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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
11

LEVITATED OPTOMECHANICS NEAR A SURFACE

Peng Ju (19138651) 17 July 2024 (has links)
<p dir="ltr">Following the development of laser technology in the 1960s, radiation pressure was soon employed to manipulate particles by Arthur Ashkin in the 1970s. Since then, levitated optomechanics has been widely studied across physics, engineering, chemistry, and biology. In this dissertation, we first experimentally demonstrate GHz rotation and sensing with an optically levitated nanodumbbell near a surface. Then, we propose achieving optical refrigeration below liquid nitrogen temperature using near-field Purcell enhancement.</p><p dir="ltr">The first part of this dissertation focuses on fast rotation and sensing with a non-spherical silica nanoparticle levitated near a surface. Specifically, we optically levitate a nanodumbbell at 430 nm away from a surface in high vacuum and drive it to rotate at 1.6 GHz. This corresponds to a relative linear velocity of 1.4 km/s between the tip of the nanodumbbell and the surface at sub-micrometer separation. The near-surface rotating nanodumbbell demonstrates a superior torque sensitivity of (5.0 +/- 1.1 ) x 10<sup>-26</sup> Nm at room temperature. Our numerical simulation shows that such an ultra-sensitive nanodumbbell levitated near nanostructures can be used to detect fundamental physics, such as Casimir torque and non-Newtonian gravity. </p><p dir="ltr">In the latter part of this dissertation, we propose that optical refrigeration of solid with anti-Stokes fluorescence can be enhanced by Purcell effect. The spontaneous emission rate of high-energy photons is Purcell enhanced by coupling with a near-field cavity. The enhanced emission shifts the mean emission wavelength and enables optical refrigeration with high-absorption cooling laser. We estimate a minimum achievable temperature of 38 K with a Yb<sup>3+</sup>:YLiF<sub>4</sub> nanocrystal near a cavity using our proposed Purcell enhanced optical refrigeration method. This method can be applied to other rare-earth ion doped materials and enable applications that require solid-state cooling below liquid nitrogen temperature.</p>
12

Quantum Collective Dynamics From the neV To the GeV

Steinke, Steven Kurt January 2011 (has links)
Three problems are investigated in the context of quantum collective dynamics. First, we examine the optomechanics of a Bose-Einstein condensate trapped in an optical ring cavity and coupled to counter-propagating light fields. Virtual dipole transitions cause the light to recoil elastically from the condensate and to excite its atoms into momentum side modes. These momentum side modes produce collective density oscillations. We contrast the situation to a condensate trapped in a Fabry-Perot cavity, where only symmetric ("cosine") side modes are excited. In the ring cavity case, antisymmetric ("sine") modes can be excited also. We explore the mean field limit and find that even when the counter-propagating light fields are symmetrically pumped, there are parameter regions where spontaneous symmetry breaking occurs and the sine mode becomes occupied. In addition, quantum fluctuations are taken into account and shown to be particularly significant for parameter values near bifurcations of the mean field dynamics. The next system studied is a hybrid composed of a high quality micromechanical membrane coupled magnetically to a spinor condensate. This coupling entangles the membrane and the condensate and can produce position superposition states of the membrane. Successive spin measurements of the condensate can put the membrane into an increasingly complicated state. It is possible in principle to produce nonclassical states of the membrane. We also examine a model of weaker, nonprojective measurements of the condensate's spin using phase contrast imaging. We find an upper limit on how quickly such measurements can be made without severely disrupting the unitary dynamics. The third situation analyzed is the string breaking mechanism in ultrahigh energy collisions. When quark-antiquark pairs are produced in a collision, they are believed to be linked by a tube of chromoelectric field flux, the color string. The energy of the string grows linearly with quark separation. This energy is converted into real particles by the Schwinger mechanism. Screening of the color fields by new particles breaks the string. By quantizing excitations of the string using the conjugate coordinates of field strength and string cross-section, we recover the observed exponential spectrum of outgoing particles.
13

Silicon Photonic Devices and Their Applications

Li, Ying January 2015 (has links)
Silicon photonics is the study and application of photonic systems, which use silicon as an optical medium. Data is transferred in the systems by optical rays. This technology is seen as the substitutions of electric computer chips in the future and the means to keep tack on the Moore’s law. Cavity optomechanics is a rising field of silicon photonics. It focuses on the interaction between light and mechanical objects. Although it is currently at its early stage of growth, this field has attracted rising attention. Here, we present highly sensitive optical detection of acceleration using an optomechanical accelerometer. The core part of this accelerometer is a slot-type photonic crystal cavity with strong optomechanical interactions. We first discuss theoretically the optomechanical coupling in the air-slot mode-gap photonic crystal cavity. The dispersive coupling gom is numerically calculated. Dynamical parametric oscillations for both cooling and amplification, in the resolved and unresolved sideband limit, are examined numerically, along with the displacement spectral density and cooling rates for the various operating parameters. Experimental results also demonstrated that the cavity has a large optomechanical coupling rate. The optically induced spring effect, damping and amplification of the mechanical modes are observed with measurements both in air and in vacuum. Then, we propose and demonstrate our optomechanical accelerometer. It can operate with a resolution of 730 ng/Hz¹/² (or equivalently 40.1 aN/Hz¹/²) and with a transduction bandwidth of ≈ 85 kHz. We also demonstrate an integrated photonics device, an on-chip spectroscopy, in the last part of this thesis. This new type of on-chip microspectrometer is based on the Vernier effect of two cascaded micro-ring cavities. It can measure optical spectrum with a bandwidth of 74nm and a resolution of 0.22 nm in a small footprint of 1.5 mm².
14

Near-Field Optical Forces: Photonics, Plasmonics and the Casimir Effect

Woolf, David Nathaniel 08 October 2013 (has links)
The coupling of macroscopic objects via the optical near-field can generate strong attractive and repulsive forces. Here, I explore the static and dynamic optomechanical interactions that take place in a geometry consisting of a silicon nanomembrane patterned with a square-lattice photonic crystal suspended above a silicon-on-insulator substrate. This geometry supports a hybridized optical mode formed by the coupling of eigenmodes of the membrane and the silicon substrate layer. This system is capable of generating nanometer-scale deflections at low optical powers for membrane-substrate gaps of less than 200 nm due to the presence of an optical cavity created by the photonic crystal that enhances both the optical force and a force that arises from photo-thermal-mechanical properties of the system. Feedback between Brownian motion of the membrane and the optical and photo-thermal forces lead to dynamic interactions that perturb the mechanical frequency and linewidth in a process known as ``back-action.'' The static and dynamic properties of this system are responsible for optical bistability, mechanical cooling and regenerative oscillations under different initial conditions. Furthermore, solid objects separated by a small distance experience the Casimir force, which results from quantum fluctuations of the electromagnetic field (i.e. virtual photons).The Casimir force supplies a strong nonlinear perturbation to membrane motion when the membrane-substrate separation is less than 150 nm. Taken together, the unique properties of this system makes it an intriguing candidate for transduction, accelerometry, and sensing applications. / Engineering and Applied Sciences
15

Optomechanical transduction applied to M/NEMS devices / Transduction optomécanique appliquée aux dispositifs M/NEMS

Leoncino, Luca 11 October 2017 (has links)
Au cours de ces dernières années, les progrès technologiques dans le domaine dumicro-usinage sur silicium ont permis le développement de Micro/Nano SystèmesÉlectro Mécaniques (M/NEMS) pour réaliser des capteurs ou des actionneurs.Dans le domaine des NEMS, dont les dimensions sont par définition submicroniques,les propriétés obtenues permettent de viser des applications en analyse biochimiqueou biomédicale. Il a été démontré que ces nano capteurs de masse (ou de force)atteignent des résolutions de l’ordre du zeptogramme (10−21 g) ou du picoNewtonce qui permet d’envisager des diagnostics précoces de certains cancers.Tous ces systèmes utilisent `a l’heure actuelle des moyens d’actionnement et dedétection électriques: de nombreuses équipes ont néanmoins démontré que la photoniqueactionne et détecte des mouvements de très faibles amplitudes, de l’ordredu femtomètre. Cette technologie hybride, circuit photonique associé au M/NEMS,offre potentiellement un gain de performance important par rapport aux moyens detransduction électromécanique.L’objectif de la thèse est le développement de la transduction optomécanique afinde détecter le déplacement de résonateurs NEMS. Un simple modèle analytique estproposé avec le support d’un simulation numérique. Les performances de transductionoptique sont comparées aux caractéristiques de la transduction électrique. Lacomparaison se base sur des critères objectifs (sensibilité, bruit, encombrement) puisde proposer des structures optomécaniques originales. Un banc de caractérisationoptique et mécanique est développé pour la caractérisation des échantillons dans unenvironnement contrôlé. Des mesures sur des composants fabriqués permettent demieux appréhender les contraintes de dimensionnement et, de façon plus général, latransduction optomécanique appliqué aux dispositifs NEMS. / During several last years, technological advances in the field of silicon micromachininghave initiated the industrial growth of Micro/Nano Electro Mechanical Systems(M/NEMS) for fabricating sensors or actuators.In the field of NEMS with sub-micron sizes, the properties allow for targeting applicationsin biomedical or biochemical analyses. It has been demonstrated that thesenano mass (or force) sensors achieve resolutions of the order of zeptogram (10−21 g)or picoNewton, hence allowing early diagnosis of certain cancers.Transduction schemes of these systems are currently based on electrical principles:many teams have nevertheless shown that photonics operates and detects tiny displacementin the order of femtometer. This hybrid technology, photonic circuitassociated with M/NEMS, potentially offers a significant improvement compared toelectrical transduction.The purpose of the thesis consists of developing the optomechanical transductionfor NEMS resonators displacement. A simple analytical model is presented togetherwith a numerical simulation. The performance of optical detection is compared toelectrical detection features. The comparison is based on objective criteria (sensitivity,noise, crowding) for designing original optomechanical structures. A dedicatedbench has been developed for the optical and mechanical characterizations of thesamples placed in a controlled environment. Measurements on fabricated devicesallow a better understanding of the design constrains and, more in general, of theoptomechanical detection applied to NEMS.i
16

Oscilação em cavidades optomecânicas / Oscillation in optomechanical cavities

Luiz, Gustavo de Oliveira, 1988- 23 August 2018 (has links)
Orientador: Gustavo Silva Wiederhecker / Dissertação (mestrado) - Universidade Estadual de Campinas, Instituto de Física Gleb Wataghin / Made available in DSpace on 2018-08-23T23:27:40Z (GMT). No. of bitstreams: 1 Luiz_GustavodeOliveira_M.pdf: 12840478 bytes, checksum: 50b184b19ca56624e14520e4331b112a (MD5) Previous issue date: 2013 / Resumo: A transferência de momento linear da luz para partículas foi teorizada no século XVII por Johanes Kepler e demonstrada pela primeira vez por Lebedev e, independentemente, por Nichols e Hull apenas em 1901. Em cavidades ópticas, como demonstrado por V. Braginsky, essa interação pode dar origem a diversos fenômenos interessantes. No ano de 2005 Tal Carmon demonstra alguns destes efeitos em cavidades microfabricadas. Nesta dissertação são apresentados os resultados de estudos sobre as microcavidades optomecânicas de disco duplo de nitreto de silício. Dentre estes estão medidas de ruído térmico de uma cavidade optomecânica deste tipo; a demonstração teórica de que deve ser possível operar tais cavidades no regime de banda lateral resolvida, usando modos mecânicos de ordem superior; a otimização do processo de fabricação destas cavidades, culminando em cavidades com fatores de qualidade mecânico, em vácuo e a temperatura ambiente, em torno de 10000 / Abstract: Momentum transfer from light to particles was theorized in the XVII century byJohanes Kepler and experimentally demonstrated for the first time by Lebedev and, independently, by Nichols and Hull only in 1901. In optical cavities, as shown by V. Braginsky, this interaction may result in many interesting phenomena. In 2005 Tal Carmon demonstrated some of these effects in microfabricated cavities. In this thesis the results of studies on silicon nitride double-disk optomechanical microcavities are presented. Among these results are the theoretical demonstration that it is possible to drive such devices in the resolved side-band regime, exciting higher order mechanical modes, thermal noise measurements and optimization of the fabrication process, yielding cavities with mechanical quality factors close to 10000, in vacuum and at room temperature / Mestrado / Física / Mestre em Física
17

Optomechanics in photonic crystal cavities = Optomecânica em cavidades de cristal fotônico / Optomecânica em cavidades de cristal fotônico

Benevides, Rodrigo da Silva, 1989- 07 August 2016 (has links)
Orientador: Thiago Pedro Mayer Alegre / Dissertação (mestrado) - Universidade Estadual de Campinas, Instituto de Física Gleb Wataghin / Made available in DSpace on 2018-08-31T00:04:36Z (GMT). No. of bitstreams: 1 Benevides_RodrigodaSilva_M.pdf: 12114965 bytes, checksum: 9db892fbca5fe67d883b58515f6e1dc7 (MD5) Previous issue date: 2016 / Resumo: A área de optomecânica de cavidades passou por um grande desenvolvimento na última década. O crescente interesse nesta área foi impulsionado principalmente pela interessante conexão entre movimentos mecânicos e campos ópticos. Tal acoplamento é amplamente explorado em diversos experimentos, com escalas variando de interferômetros quilométricos a cavidades ópticas microestruturadas. O principal desafio em todos estes experimentos é criar um dispositivo optomecânico com um longo tempo de vida óptico e mecânico, ao mesmo tempo em que mantém um grande acoplamento. Neste contexto, as cavidades de cristal fotônico surgiram como fortes candidatas já que elas são capazes de confinar campo óptico em um volume modal muito reduzido e por um longo tempo de vida. No regime clássico, estes pequenos dispositivos, que podem oscilar mecanicamente com frequências de alguns poucos MHz até dezenas de GHz, permitem detectar forças, massas e deslocamentos muito pequenos. Elas também são usadas para produzir osciladores mecânicos de alta qualidade, que podem ser sincronizados por intermédio do campo óptico. No regime quântico, a optomecânica quântica de cavidades tem sido usada para ajudar na compreensão do fenômeno de decoerência em uma escala mesoscópica, criando estados não-clássicos fortemente acoplados entre campo óptico e movimento mecânico, intermediado pela interação optomecânica. Entretanto, até agora, foram realizados poucos estudos sobre a possibilidade de produção destes dispositivos em larga escala, um passo necessário para massivas aplicações tecnológicas e científicas destes dispositivos. Neste trabalho, descrevemos um estudo detalhado de cavidades optomecânicas baseadas em cristais fotônicos produzidos numa fábrica de dispositivos compatíveis com indústria CMOS. Nós demonstramos a viabilidade desta plataforma explorando três geometrias distintas de cristais fotônicos. Primeiramente, nós mostramos como atingir fatores de qualidade muito elevados usando uma geometria consistente com as limitações de fabricação. Nossos fatores de qualidade são os maiores já reportados usando cavidades de cristal fotônico fabricadas com litografia óptica. Em seguida, investigamos uma cavidade do tipo fenda, possibilitando a produção de alto acoplamento optomecânico usando um movimento mecânico planar. Por fim, desenhamos um escudo acústico, com dimensões variadas, para restringir o modo mecânico para dentro da região óptica. Essa estratégia foi usada de forma bem sucedida para produzir altos fatores de qualidade mecânicos e acoplamentos optomecânicos, permitindo a observação de resfriamento e amplificação de modos mecânicos à baixa temperatura / Abstract: The field of cavity optomechanics has experienced a rapid growth in last decade. The increasing interest in this area was mostly driven by the intricate interface between mechanical motion and the optical field. Such coupling is widely explored in a variety of experiments scaling from kilometer long interferometers to micrometer optical cavities. The challenge on all these experiments is to create an optomechanical device with long-living optical and mechanical resonances while keeping a large coupling rate. In this context photonic crystal cavities have emerged as a strong candidate since they are able to produce very small optical mode volume and long optical lifetime. In the classical regime, these tiny devices, which can mechanically oscillate from frequencies ranging from couple MHz up to tens of GHz, allows for highly sensitive small forces, masses, displacements and acceleration detectors. They are also used to produce high quality optically driven mechanical oscillators which can be synchronized via an optical field. In the quantum regime, cavity quantum optomechanics is being used to understand decoherence phenomena in a mesoscopic scale by creating nonclassical states between light and mechanical modes intermediated by optomechanical interaction. However up to now, few studies have been done concerning the possibility of large scale production of these devices, a necessary step towards massive technological and scientific application of these devices. In this work, we describe a detailed study of optomechanical cavities based upon photonic crystal cavities fabricated in a CMOS-compatible commercial foundry. We prove the feasibility of this platform exploring three photonic crystal designs. First, we show how to achieve ultra-high optical quality factors using a design resilient to the fabrication constrains. Our demonstrated quality factors are the largest ever reported using photonic crystal cavities manufactured by optical lithography. Secondly, we investigate a slot type optical cavity, able to produce very large optomechanical coupling using a simple in-plane motion. Finally, we design a trimmable acoustic shield to restrict the mechanical motion inside the optical region. Such strategy was successfully used to produce high mechanical quality factor and optomechanical coupling which enabled the observation of cooling and amplification of mechanical modes at low temperature / Mestrado / Física / Mestre em Física / 2014/12875-4 / 132737/2014-0 / FAPESP / CNPQ
18

Nanomechanical resonators at extreme dissipation: measurement of the Brownian force in a highly viscous liquid and optomechanical resonators for quantum-limited transduction

Ari, Atakan Bekir 25 September 2021 (has links)
Dissipation is an inevitable property of a mechanical system and influences the dynamical behavior and device performance. It is, therefore, crucial to study and understand the sources of dissipation in mechanical systems in order to control the dissipation present in the system. These sources of dissipation can be broadly classified in two groups: extrinsic and intrinsic mechanisms. Extrinsic mechanisms are independent of material properties and influenced by the external properties of the system, such as geometry, pressure, and temperature. Intrinsic mechanisms on the other hand, are independent of external conditions and arise from the intrinsic properties of the device material, such as defects in the bulk and the surface of the material. In this work, we closely study two extreme limits of dissipation at the opposite ends of the spectrum. First, at the high dissipation limit where extrinsic mechanisms dominate dissipation, spectral properties of the thermal noise force giving rise to Brownian fluctuations of a continuous mechanical system — namely, a doubly clamped nanomechanical beam resonator — immersed in a viscous liquid are investigated. To this end, two separate sets of experiments are performed. The power spectral density (PSD) of the Brownian fluctuations of the resonator around its fundamental mode are measured at the center of the resonator. Then, the frequency-dependent linear response of the resonator is measured, again at its center, by driving it with a harmonic force, via an electrothermal transducer, that couples well to the fundamental mode. These two separate measurements are then used to determine the PSD of the Brownian force acting on the structure in its fundamental mode. The PSD of the force noise extracted from multiple resonators with varied lengths spanning a broad frequency range displays a ``colored spectrum'' and follows the viscous dissipation of a cylinder oscillating in a viscous liquid by virtue of the fluctuation-dissipation theorem. In the second application, which is at the ultra-low dissipation limit at low temperature where intrinsic mechanisms dominate dissipation, we design and fabricate high-frequency aluminum nitride (AlN) piezo-optomechanical resonators. Furthermore, an acoustic radiation shield consisting of periodic phononic crystals is designed and implemented to further decrease dissipation. Fabrication and design of both the optomechanical cavity and phononic crystals are discussed in detail. Room temperature characterization of the ring resonator is presented and out-of-plane thickness mode of the AlN resonators has been identified. With microwave mechanical frequency and high Quality factor mechanical response, these resonators can be cooled down to quantum ground state with direct cooling methods such as dilution fridge cooling. These type of resonators can achieve efficient conversion between electrical, optical, and mechanical signals which can be utilized for quantum information science and sensing applications in the field of nanoelectromechanical systems. / 2023-09-24T00:00:00Z
19

Feedback Control of Optically Trapped Nanoparticles and its Applications

Jaehoon Bang (8795519) 04 May 2020 (has links)
<div>In the 1970's, Arthur Ashkin developed a remarkable system called the ``optical tweezer'' which utilizes the radiation pressure of light to manipulate particles. Because of its non-invasive nature and controllability, optical tweezers have been widely adopted in biology, chemistry and physics. In this dissertation, two applications related to optical tweezers will be discussed. The first application is about the demonstration of multiple feedback controlled optical tweezers which let us conduct novel experiments which have not been performed before. For the second application, levitation of a silica nanodumbbell and cooling its motion in five degrees of freedom is executed.</div><div><br></div><div>To be more specific, the first chapter of the thesis focuses on an experiment using the feedback controlled optical tweezers in water. A well-known thought experiment called ``Feynman's ratchet and pawl'' is experimentally demonstrated. Feynman’s ratchet is a microscopic heat engine which can rectify the random thermal fluctuation of molecules to harness useful work. After Feynman proposed this system in the 1960’s, it has drawn a lot of interest. In this dissertation, we demonstrate a solvable model of Feynman’s ratchet using a silica nanoparticle inside a feedback controlled one dimensional optical trap. The idea and techniques to realize two separate thermal reservoirs and to keep them in contact with the ratchet is discussed in detail. Also, both experiment and simulation about the characteristics of our system as a heat engine are fully explored.</div><div><br></div><div>In the latter part of the dissertation, trapping silica nanodumbbell in vacuum and cooling its motion in five degrees of freedom is discussed. A levitated nanoparticle in vacuum is an extraordinary optomechanical system with an exceptionally high mechanical quality factor. Therefore, levitated particles are often utilized as a sensor in various research. Different from a levitated single nanosphere, which is only sensitive to force, a levitated nanodumbbell is sensitive to both force and torque. This is due to the asymmetry of the particle resulting it to have three rotational degrees of freedoms as well as three translational degrees of freedoms. In this dissertation, creating and levitating a silica nanodumbbell will be demonstrated. Active feedback cooling also known as cold damping will be employed to stabilize and cool the two torsional degrees of freedom of the particle along with the three center of mass DOF in vacuum. Additionally, both computational and experimental analysis is conducted on a levitated nanodumbbell which we call rotation-coupled torsional motion. The complex torsional motion can be fully explained with the effects of both thermal nonlinearity and rotational coupling. The new findings and knowledge of a levitated non-spherical particles leads us one step further towards levitated optomechanics with more complex particles.</div>
20

Microdisques optomécaniques résonants en silicium pour la détection biologique en milieu liquide / Optomechanical silicon microdisk resonators for biosensing in liquid

Hermouet, Maxime 26 March 2019 (has links)
La détection précoce de biomarqueurs de maladies telles que le cancer représente un intérêt majeur dans le processus de traitement. En effet, un diagnostic avancé augmente considérablement les chances de réussite du traitement. En pratique, cela nécessite des outils permettant de détecter rapidement d'infimes quantités de composants biologiques (anticorps, protéines, ADN...) au sein d'échantillons réels tels que du sang ou du sérum.Ces dernières années, les avancées et progrès technologiques en matière de micro et nanofabrication ont permis le développement des Micro et Nano Systèmes Electro-Mécaniques (M/NEMS) dans de nombreux domaines d'application et notamment celui de la détection de masse. Ainsi, des nano-capteurs de masse atteignant des résolutions de l'ordre du yoctogram ($10^{-24}g$), soit la masse d'un seul proton ont été développés. De telles résolutions permettraient d'utiliser ces capteurs à des fins de biodétection. Ces résultats ont cependant été obtenus sous vide ce qui est incompatible avec le monde biologique. Immergés en liquide, les performances des M/NEMS traditionnels sont drastiquement réduites notamment à cause de l'amortissement du au fluide. Un nouveau type de résonateur à base de microdisques optomécaniques résonants a ainsi vu le jour démontrant un fort potentiel pour la détection en milieu liquide. Là où les méthodes classiques de transduction électriques des M/NEMS éprouvent des difficultés en liquide, l'exceptionnelle sensibilité de la transduction optomécanique permet de surmonter ce problème.Dans ce cadre, ces travaux de thèse visent à développer un biocapteur à base de microdisques optomécaniques résonants en silicium pour la détection biologique en milieu liquide. Le design, la fabrication ainsi que la caractérisation complète de ces capteurs est décrite. Enfin, une preuve de concept de détection de virus T5 à une concentration de quelques pM à l'aide de ces microdisques est également présentée. / Early detection of disease's biomarkers such as cancer represents a major interest in the treatment process. Indeed, a diagnosis at an early stage considerably increases the chance of the treatment to be successful. Practically, tools allowing the rapid detection of tiny amount of biological compounds (antibodies, proteins, DNA...) in real samples such as blood or serum are needed.Over the last years, the advances and progresses of micro and nanofabrication techniques have allowed the development of Micro-Nano Electro Mechanical Systems (M/NEMS) in various fields of application including mass sensing. Thus, nano mass sensors reaching resolution down to the yoctogram level, the equivalent of a single proton have been demonstrated. Such resolution limit would theoretically allow these sensors to be used as potential biosensors. These results were nonetheless obtained in vacuum conditions which is incompatible with the biological world. Immersed in fluid, the performance of traditional M/NEMS are drastically degraded mostly due to the large viscous damping. A new type of object in the form of optomechanical microdisk resonators have recently emerged, demonstrating a huge potential for sensing in liquid. While M/NEMS classical electrical or optical transduction methods become very challenging in liquid, the astonishing sensitivity of the optomechanical transduction overcomes this major issue.In this context, this thesis work aims at developing a biosensor based on silicon optomechanical microdisk resonators for biosensing in liquid. Design, fabrication along with the complete characterization of theses devices is described. Eventually, a proof-of-concept of T5 virus detection at the pM level using these microdisks is presented.

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