Ce travail de thèse porte sur la conception et la réalisation de capteurs optiques ultracompacts et sensibles utilisant le mode d’interrogation en intensité pour la détection d’analytes chimiques et biologiques. Deux approches, l’intégration hybride et l’intégration monolithique, ont été explorées durant cette thèse. Après un descriptif des outils d’analyse et de conception de guides d’onde et de micro résonateurs en anneaux, le manuscrit présente l’intégration hybride d’un laser Fabry-Perot en semiconducteur III-V avec un résonateur en anneau basé sur du matériau SOI. Le laser Fabry-Perot à faible coût fonctionnant en multimode longitudinal a été utilisé comme peigne de référence pour le résonateur en anneau en contact avec un échantillon liquide. L’effet Vernier a été implanté dans le système de détection en utilisant le mode d’interrogation en intensité. La largeur spectrale étroite du laser avec sa densité de puissance élevée ont permis d’obtenir un capteur de plus haute sensitivité en comparaison avec le capteur en double anneaux réalisé précédemment. Une étude numérique d’un capteur composé d’un laser Fabry-Perot et deux résonateurs en anneaux permettant de compenser la fluctuation de température a été ensuite présentée. Concernant l'intégration monolithique, l'interface entre oxyde et non-oxyde après l’oxydation de AlGaAs a été étudiée au Central de Technologies du LPN/CNRS. Un phénomène d’oxydation verticale de GaAs ou AlGaAs avec une faible teneur en aluminium activée par une couche voisine oxydée de AlGaAs avec une forte teneur en aluminium a été identifié expérimentalement. Afin de limiter l’oxydation verticale et de réduire la rugosité des interfaces, des guides d’onde basés respectivement sur une structure intégrant un super-réseau et sur une structure standard ont été fabriqués et caractérisés. L’impact de l'hydrogène sur l'activation du processus d'oxydation de GaAs ou AlGaAs avec une faible teneur en Al a été mis en évidence. Enfin, ce manuscrit décrit la réalisation et la caractérisation d’un laser Fabry-Perot fonctionnant en mode TM. Ce laser constitue une brique important vers l’intégration monolithique d’un capteur extrêmement sensible. / The objective of the thesis is to realize the integrated optical sensors with high sensitivity using intensity interrogation method for chemical and biological analyte detection. For this purpose, two approaches, hybrid integration and monolithic integration, have been explored theoretically and experimentally during this thesis. After a review of the design and analysis tools of optical waveguide and micro-ring resonators, the manuscript reports an experimental demonstration of a highly-sensitive intensity-interrogated optical sensor based on cascaded III-V semiconductor Fabry-Perot laser and silicon-on-insulator ring resonator. The low-cost easy-to-fabricate Fabry-Perot laser serves as a reference comb for the sensing ring in contact with liquid sample. The Vernier effet has been exploited in the detection scheme using intensity interrogation mode. The sharp emission peaks of the FP laser with high spectral power density result in a high sensitivity for the sensor compared to previously investigated all-passive double-ring sensor. The temperature compensation method has also been investigated numerically to improve the performance of the sensor. Concerning the potential monolithic integration of laser and sensing waveguide, the interface between oxide and non-oxide after wet oxidation of buried AlGaAs has been investigated at the Technology Centre of LPN/CNRS. The vertical oxidation of GaAs or AlGaAs with low Al content activated by a neighbouring oxidized Al-rich AlGaAs layer has been discovered experimentally. To limit the vertical oxidation and reduce the roughness of the interface, the waveguides with buried oxide layer on superlattice sample and standard sample have been fabricated and characterised. The key role of hydrogen incorporation in the activation of the oxidation process for GaAs or AlGaAs materials with low Al content has been shown experimentally. Finally, this thesis reports the fabrication and the characterisation results of a Fabry-Perot laser working on TM mode which is an important building block for highly-sensitive monolithically-integrated circuit.

"Photonic crystals have recently been the subject of studies for use in optical signal processing. In particular, a Coupled Resonator Optical Waveguide (CROW) structure has been considered by M. F. Yanik and S. Fan in “Stopping Light All Optically” for use in a time-varying optical system for the storage of light in order to mitigate the effects of waveguide dispersion. In this thesis, the effects of the thermal field on the state stored in such a structure is studied. Through simulation, this thesis finds that when this structure is constructed of gallium arsenide cylinders in air, loss of the signal was found to be caused by free-carrier absorption, and the decay of the signal dominates over thermal spreading of the optical signal’s spectrum."

nÃo hà / A expansÃo das redes de telecomunicaÃÃes sem fio e o fenÃmeno da convergÃncia digital trazem a inerente necessidade da pesquisa de novos componentes que assegurem a sustentabilidade e a evoluÃÃo dos sistemas. Novos tipos de antenas, menores e mais eficientes, sÃo exigidas à medida que novos dispositivos vÃo surgindo. Neste contexto, as antenas ressoadoras dielÃtricas, construÃdas com novos materiais, aparecem como excelente opÃÃo para substituir as antenas metÃlicas tradicionais. Este trabalho apresenta uma proposta de antena ressoadora dielÃtrica circularmente polarizada, operando na frequÃncia central de 2,25 GHz, na qual um esquema de alimentaÃÃo por sonda Ãnica à empregado para excitar dois modos ressonantes em um dielÃtrico em forma de quarto de cilindro. Este leiaute permite a ativaÃÃo de modos de baixa ordem, com distribuiÃÃo ortogonal dos campos eletromagnÃticos, ressoando em frequÃncias prÃximas com uma diferenÃa de fase de 90Â. SÃo introduzidos conceitos da teoria eletromagnÃtica envolvendo cavidades ressonantes e caracterÃsticas dos materiais cerÃmicos que compÃem o dielÃtrico. AlÃm disso, os processos de modelagem por computador e de construÃÃo de um protÃtipo sÃo explicados. Os resultados sÃo discutidos comparativamente entre o modelo computacional e as medidas experimentais executadas em laboratÃrio. O estudo demonstra uma boa concordÃncia entre os resultados simulados e os experimentais e evidencia a viabilidade da antena para aplicaÃÃes que necessitem de polarizaÃÃo circular na regiÃo do espectro de frequÃncias prÃximas a 2,25 GHz. / The expansion of wireless telecommunications networks and the phenomenon of digital convergence bring the inherent need for research of new components to ensure the sustainability and evolution of the systems. New types of antenna, smaller and more efficient, are required as new devices emerge. In this context, the dielectric resonator antennas, built with new materials, appear as an excellent option to replace the conventional metallic antennas. This work presents a proposal for a circularly polarized dielectric resonator antenna to operate at the center frequency of 2.25 GHz in which a single probe feeding scheme is used to excite two resonant modes in a quarter-cylinder-shaped dielectric. This layout allows the activation of low-order modes with orthogonal distribution of electromagnetic fields, resonating at near frequencies with a 90 phase difference. The concepts of electromagnetic theory related to resonant cavities and the characteristics of dielectric ceramic materials are introduced. Furthermore, the processes of computer modeling and constructing of a prototype are explained. The results are discussed by comparison between the computational model and experimental measurements performed in the laboratory. The study shows a good agreement between the simulated and experimental results and demonstrates the feasibility of the antenna for applications requiring circular polarization for operating at the region of the frequency spectrum close to 2.25 GHz.

Ce travail de thèse s’inscrit dans le cadre de l’intégration des films minces ferroélectriques de BaxSr(1-x)TiO3 au sein de dispositifs microondes. Dans un premier temps, les caractéristiques diélectriques des films de B0.3S0.7TiO3 déposés par pulvérisation cathodique ont été déterminées. Il a été mis en évidence l’intérêt d’une couche tampon dans le contrôle de l’orientation des films ainsi que son impact dans l’évolution des propriétés diélectriques. L’utilisation d’une structure coplanaire optimisée a été utilisée dans le but de déterminer les évolutions fréquentielles de la permittivité, des pertes ainsi que de l’accordabilité jusqu’à 67 GHz. La caractérisation du matériau a permis la réalisation et la qualification de l’élément de base dans la conception de dispositifs microondes accordables : la capacité ferroélectrique. Le phénomène d’agilité a été mis en exergue au sein de cette structure.Par la suite, une analyse complète a été menée sur un dispositif de type résonateur. Une étude analytique couplée à la réalisation de démonstrateur a permis de mettre en évidence la configuration nous permettant d’exploiter au mieux les propriétés des films de BST. / This work is dedicated to the integration of ferroelectric BaxSr(1-x)TiO3 thin films in microwave devices. Initially, the dielectric properties of B0.3S0.7TiO3 films deposited by radiofrequency magnetron sputtering were determined. It has been demonstrated the influence of a buffer layer in the control of orientation films and the impact in the evolution of dielectric properties. The realization of optimized coplanar waveguide has permit to determine the frequency evolution of permittivity, loss factor and tunability up to 67 GHz. The characterization of the dielectric properties has enabled the realization and qualification of the basic element in the design of tunable microwave devices: the ferroelectric capacitance. The agility property has been highlighted within this structure. Subsequently, a complete analysis was conducted on a resonator. An analytical study coupled with the demonstrator realization highlighted the configuration allowing us to exploit the properties of BST films.

The topic of this thesis is the theoretical analysis of theoptomechanical coupling effects in a high-finesse optical cavity, and the experimental realization of such a device.Radiation pressure exerted by light limits the sensitivity of high precision optical measurements. In particular, the sensitivity of interferometric measurements of gravitational wave is limited by the so called standard quantum limit. cavity with a movable mirror. The internal field stored in such cavity can be orders of magnitude greater than the input field, and it's radiation pressure force can change the physical length of the cavity. In turn, any change in the mirror's position changes the phase of the out put field. This optomechanical coupling leads to an intensity-dependent phase shift for thelight equivalent to an optical Kerr effect. Such a device can then be used for squeezing generation or quantum nondemolition measurements.In our experiment, we send a laser beam in to a high-finesse optical cavity with a movable mirror coated on a high Q-factor mechanical resonator. Quantum effects of radiation pressure become therefore, at low temperature, experimentally observable. However, we've shown that the phase of the reflected field is very sensitive to small mirror displacements, which indicate other possible applications of thistype of device like high precision displacements measurements. We've been able to observe the Brownian motion of the moving mirror. We've also used an auxiliary intensity modulated laser beam to optically excite the acoustic modes. We've finally obtained a sensitivity of2x10^(-19) m/sqrt(Hz), in agreement with theoretical prediction.

The fields of health care and environment control have an increasing demand for sensors able to detect low concentrations of specific molecules in gaseous or liquid samples. The recent introduction of microfabricated devices in these fields gave rise to sensors with attractive properties. A cutting edge technology is based on guided acoustic waves, which are perturbed by events occurring at the nanometer scale. A first part of the thesis investigates the Love mode waveguide, a versatile structure in which a thin film is guiding the acoustic wave generated in a piezoelectric substrate. A systematic analysis of its sensitivity was obtained using a transmission line model generalized to discriminate the rigid or viscous nature of the probed layers. We developed a novel integrated combination of the Love mode device with a Surface Plasmon Resonance optical sensor to quantify the thickness and the composition of soft layers. The electromagnetic interferences in the recorded signal were modeled to determine the phase velocity in the sensing area and to provide new mechanisms for an enhanced sensitivity. The experimental aspects of this work deal with the fabrication, the important issue of the packaging and the sensitivity calibration of the Love mode biosensor. A second part of the thesis investigates nanocrystalline diamond under the form of a thin film membrane suspended to a rigid silicon frame. The high mechanical and chemical resistance of nanocrystalline diamond, close to single-crystal diamond, open ways to membrane based acoustic sensors such as Flexural Plate Wave and thin Film Bulk Acoustic Resonators (FBAR). A novel dynamic characterization of the thin film is reported and the properties of composite FBAR devices including a diamond thin film membrane and a piezoelectric aluminum nitride layer are assessed using the perturbation theory. This study is applied to evaluate the high sensing potential of the first prototype of an actual diamond-based composite FBAR.

The fields of health care and environment control have an increasing demand for sensors able to detect low concentrations of specific molecules in gaseous or liquid samples. The recent introduction of microfabricated devices in these fields gave rise to sensors with attractive properties. A cutting edge technology is based on guided acoustic waves, which are perturbed by events occurring at the nanometer scale. A first part of the thesis investigates the Love mode waveguide, a versatile structure in which a thin film is guiding the acoustic wave generated in a piezoelectric substrate. A systematic analysis of its sensitivity was obtained using a transmission line model generalized to discriminate the rigid or viscous nature of the probed layers. We developed a novel integrated combination of the Love mode device with a Surface Plasmon Resonance optical sensor to quantify the thickness and the composition of soft layers. The electromagnetic interferences in the recorded signal were modeled to determine the phase velocity in the sensing area and to provide new mechanisms for an enhanced sensitivity. The experimental aspects of this work deal with the fabrication, the important issue of the packaging and the sensitivity calibration of the Love mode biosensor. A second part of the thesis investigates nanocrystalline diamond under the form of a thin film membrane suspended to a rigid silicon frame. The high mechanical and chemical resistance of nanocrystalline diamond, close to single-crystal diamond, open ways to membrane based acoustic sensors such as Flexural Plate Wave and thin Film Bulk Acoustic Resonators (FBAR). A novel dynamic characterization of the thin film is reported and the properties of composite FBAR devices including a diamond thin film membrane and a piezoelectric aluminum nitride layer are assessed using the perturbation theory. This study is applied to evaluate the high sensing potential of the first prototype of an actual diamond-based composite FBAR.

Am Beispiel der Orgelpfeife wurde der Einfluss der Wandungsgeometrie des akustischen Wellenleiters auf die Schallabstrahlung untersucht. Für verschiedene Metalllegierungen wurden unterschiedliche Profile der Orgelpfeifenwandung verglichen: ein konisches Wandungsprofil mit zur Mündung hin abnehmender Wandungsstärke und ein paralleles Wandungsprofil mit konstanter Wandungsstärke. Für eine hohe statistische Sicherheit der Ergebnisse wurden sämtliche Untersuchungen an vier mal zehn Testpfeifen durchgeführt. Mit Ausnahme der beschriebenen Unterschiede sind die Pfeifen von gleichen Abmessungen und auf gleichen Klang intoniert.<br><br> Die Überprüfung der Wandungseinflüsse auf den Klang besteht aus drei verschiedenen Untersuchungen: Erstens, einer subjektiven Hinterfragung der Wahrnehmbarkeit in einem Hörtest. Zweitens wurde der abgestrahlte Luftschall objektiv gemessen und das Spektrum der Pfeifen in seinen Komponenten (Teiltöne, Grundfrequenz) verglichen. Drittens wurde mit einer neuartigen Messtechnik die Oszillation des Pfeifenkörpers (ein einem akustischen Monopol entsprechendes "Atmen" des Querschnitts) untersucht. Die Ergebnisse belegen die Wahrnehmbarkeit unterschiedlicher Wandungsprofile als auch klare objektive Differenzen zwischen den emittierten Schallspektren. Ein Atmen mit guter Korrelation zur inneren Druckanregung bestätigt den Einfluss wandungsprofilabhängiger Oszillationen auf den Klang der Orgelpfeife. Schließlich wurde die Interaktion zweier in Abstand und Grundfrequenz nah beieinander liegender Orgelpfeifen überprüft. Als Ursache des dabei wahrnehmbaren Oktavsprung des Orgeltons konnte eine gegenphasiger Oszillation des Grundtons beider Pfeifen nachgewiesen werden. / The influence of the wall geometry of an acoustic waveguide on the sound radiation has been investigated on the example of the steady sound quality of an organ pipe. At the example of two different pipe materials two different pipe wall geometries were compared: a wedge-shaped conical wall profile with a decreasing wall strength towards the pipes open end and a constant wall profile with no change in wall strength, respectively. For statistic safety all investigations were exercised on a large test pipe series of 4 by 10 pipes, unique to our knowledge. Apart from the described differences, all pipes are produced and intonated to be as equal as possible.<br><br> The verification of the wall geometries influences is based on three investigations: First, a subjective evaluation of the audible differences was performed. Second, differences in the broad spectra, the level of the harmonics partials and in the fundamental frequency were detected in an anechoic chamber. Third, with a new measurement technique we examined the oscillation of the pipe body (monopolic breathing of the pipe bodies cross-section) as source of the detected differences in the sound. The results show clear audible difference which are supported by measurable differences in airborne sound and body oscillations of the investigated pipes. Finally the interaction of two organ pipes closely space in frequency and distance has been investigated. The subjective impression of frequency doubling was detected as an anti-phase phase oscillation of the fundamental tone of both pipes leading to a dominance of the second harmonic.<br><br>

Thermal and quantum fluctuations of the electromagnetic near field of atoms and macroscopic bodies play a key role in quantum electrodynamics (QED), as in the Lamb shift. They lead, e.g., to atomic level shifts, dispersion interactions (Van der Waals-Casimir-Polder interactions), and state broadening (Purcell effect) because the field is subject to boundary conditions. Such effects can be observed with high precision on the mesoscopic scale which can be accessed in micro-electro-mechanical systems (MEMS) and solid-state-based magnetic microtraps for cold atoms (‘atom chips’). A quantum field theory of atoms (molecules) and photons is adapted to nonequilibrium situations. Atoms and photons are described as fully quantized while macroscopic bodies can be included in terms of classical reflection amplitudes, similar to the scattering approach of cavity QED. The formalism is applied to the study of nonequilibrium two-body potentials. We then investigate the impact of the material properties of metals on the electromagnetic surface noise, with applications to atomic trapping in atom-chip setups and quantum computing, and on the magnetic dipole contribution to the Van der Waals-Casimir-Polder potential in and out of thermal equilibrium. In both cases, the particular properties of superconductors are of high interest. Surface-mode contributions, which dominate the near-field fluctuations, are discussed in the context of the (partial) dynamic atomic dressing after a rapid change of a system parameter and in the Casimir interaction between two conducting plates, where nonequilibrium configurations can give rise to repulsion. / Thermische und Quantenfluktuationen des elektromagnetischen Nahfelds von Atomen und makroskopischen Körpern spielen eine Schlüsselrolle in der Quantenelektrodynamik (QED), wie etwa beim Lamb-Shift. Sie führen z.B. zur Verschiebung atomarer Energieniveaus, Dispersionswechselwirkungen (Van der Waals-Casimir-Polder-Wechselwirkungen) und Zustandsverbreiterungen (Purcell-Effekt), da das Feld Randbedingungen unterliegt. Mikroelektromechanische Systeme (MEMS) und festkörperbasierte magnetische Fallen für kalte Atome (‘Atom-Chips’) ermöglichen den Zugang zu mesoskopischen Skalen, auf denen solche Effekte mit hoher Genauigkeit beobachtet werden können. Eine Quantenfeldtheorie für Atome (Moleküle) und Photonen wird an Nichtgleichgewichtssituationen angepasst. Atome und Photonen werden durch vollständig quantisierte Felder beschrieben, während die Beschreibung makroskopischer Körper, ähnlich wie im Streuformalismus (scattering approach) der Resonator-QED, durch klassische Streuamplituden erfolgt. In diesem Formalismus wird das Nichtgleich- gewichts-Zweiteilchenpotential diskutiert. Anschließend wird der Einfluss der Materialeigenschaften von normalen Metallen auf das elektromagnetische Oberflächenrauschen, das für magnetische Fallen für kalte Atome auf Atom-Chips und für Quantencomputer-Anwendungen von Bedeutung ist, sowie auf den Beitrag des magnetischen Dipolmoments zum Van der Waals-Casimir-Polder-Potential im thermisch- en Gleichgewicht und in Nichtgleichgewichtssituationen untersucht. In beiden Fällen sind die speziellen Eigenschaften von Supraleitern von besonderem Interesse. Beiträge von Oberflächenmoden, die die Feldfluktuationen im Nahfeld dominieren, werden im Kontext des (partiellen) dynamischen Dressing nach einer raschen Änderung eines Systemparameters sowie für die Casimir-Wechselwirkung zweier metallischer Platten diskutiert, zwischen denen in Nichtgleichgewichtssituationen Abstoßung auftreten kann.

Varactors form an important part of many communication circuits. They are utilized in oscillators, tunable matching networks, tunable filters and phase-shifters. This thesis deals with the design, analysis, characterization and applications of a novel MEMS varactor. Lower actuation voltage and higher dynamic range are the two important issues widely addressed in the study of MEMS varactors. The pull-in instability, due to which only 33% of the gap between plates could be covered smoothly, greatly reduces useful dynamic range of MEMS varactors. We propose a torsional MEMS varactor that exploits “displacement amplification” whereby pull-in is overcome and wide dynamic range is achieved. The torsion beam in the device undergoes torsion as well as bending. Behavior of the device has been analyzed through torque and force balance. Based on the torque balance and the force balance expressions, theoretical limits of torsion angle and bending for stable operation have been derived. Torsional MEMS varactors and its variants are fabricated through a commercial fabrication process (polyMUMPS) and extensive characterization has been carried out. Capacitance-voltage characteristics show a maximum dynamic range of 1:16 with parasitic capacitance subtracted out from the capacitance values. A bidirectional torsional varactor, in which the top AC plate moves not only towards bottom plate but also away from bottom plate, is also tested. The bottom AC plate is isolated from low resistivity substrate with a thin nitride layer. This gives rise to large parasitic capacitances at higher frequencies. So to avoid this, a varactor with both AC plates suspended in air is designed and fabricated. A dynamic range of 1:8 including parasitic capacitances has been achieved. Self-actuation is studied on fabricated structures and a torsional varactor that overcomes self-actuation has been proposed. Hysteresis behavior of the torsional varactor is analyzed for different AC signals across the varactor plates. Effects of residual stress on C-V characteristics are studied and advantages and disadvantages of residual stress on device performance are discussed. The torsional varactors have been cycled between Cmax and Cmin for 36 hours continuously without any failure. High-frequency characteristics of torsional varactors are analyzed through measurements on one-port and two port configurations. Measurements are done on polyMUMPS devices to study the capacitance variation with voltage, quality factor (Q) and capacitance variation with frequency. Effects of substrate are de-embedded from the device and characteristics of device are studied. An analog phase shifter based on torsional varactor proposed and analyzed through HFSS simulations. Very high tuning range can be achieved with a LC-VCO based on torsional varactors. A LC VCO with the torsional varactor as a capacitor in LC tank is designed. The torsional varactor and IC are fabricated separately and are integrated through wire bonding. Bond-wires are used as inductors.