In this thesis, we discussed various possibilities of integrating scheduling decisions with information and constraints from Advanced Process Control (APC) systems in semiconductor Manufacturing. In this context, important questions were opened regarding the benefits of integrating scheduling and APC. An overview on processes, scheduling and Advanced Process Control in semiconductor manufacturing was done, where a description of semiconductor manufacturing processes is given. Two of the proposed problems that result from integrating bith systems were studied and analyzed, they are :Problem of Scheduling with Time Constraints (PTC) and Problem of Scheduling with Equipement health Factor (PEHF). PTC and PEHF have multicriteria objective functions.PTC aims at scheduling job in families on non-identical parallel machines with setup times and time constraints.Non-identical machines mean that not all miachines can (are qualified to) process all types of job families. Time constraints are inspired from APC needs, for which APC control loops must be regularly fed with information from metrology operations (inspection) within a time interval (threshold). The objective is to schedule job families on machines while minimizing the sum of completion times and the losses in machine qualifications.Moreover, PEHF was defined which is an extension of PTC where scheduling takes into account the equipement Health Factors (EHF). EHF is an indicator on the state of a machine. Scheduling is now done by considering a yield resulting from an assignment of a job to a machine and this yield is defined as a function of machine state and job state.

To handle potentially large size and complicated nonstationary functional data, we present the wavelet-based methodology in data mining for process monitoring and fault classification. Since traditional wavelet shrinkage methods for data de-noising are ineffective for the more demanding data reduction goals, this thesis presents data reduction methods based on discrete wavelet transform. Our new methods minimize objective functions to balance the tradeoff between data reduction and modeling accuracy. Several evaluation studies with four popular testing curves used in the literature and with two real-life data sets demonstrate the superiority of the proposed methods to engineering data compression and statistical data de-noising methods that are currently used to achieve data reduction goals. Further experimentation in applying a classification tree-based data mining procedure to the reduced-size data to identify process fault classes also demonstrates the excellence of the proposed methods. In this application the proposed methods, compared with analysis of original large-size data, result in lower misclassification rates with much better computational efficiency. This thesis extends the scalogram's ability for handling noisy and possibly massive data which show time-shifted patterns. The proposed thresholded scalogram is built on the fast wavelet transform, which can effectively and efficiently capture non-stationary changes in data patterns. Finally, we present a SPC procedure that adaptively determines which wavelet coefficients will be monitored, based on their shift information, which is estimated from process data. By adaptively monitoring the process, we can improve the performance of the control charts for functional data. Using a simulation study, we compare the performance of some of the recommended approaches.

Since semiconductor fabrication processes require numerous steps, cost and yield are critical concerns. In-situ monitoring is therefore vital for process control. However, this goal is currently restricted by the shortage of available sensors capable of performing in this manner. The goal of this research therefore, was to investigate the use of acoustic signals for monitoring and control of semiconductor fabrication equipment and processes. Currently, most methods for process monitoring (such as optical emission or interferometric techniques) rely on "looking" at a process to monitor its status. What was investigated here involved "listening" to the process. Using acoustic methods for process monitoring enhances the amount and sensitivity of data collection to facilitate process diagnostics and control. A silicon acoustic sensor was designed, fabricated, and implemented as a process monitor. Silicon acoustic sensors are favorable because of their utilization of integrated circuit and micromachining processing techniques; thus, enabling miniature devices with precise dimensions, batch fabrication of sensors, good reproducibility, and low costs. The fabricated sensor was used for in-situ monitoring of nickel-iron electrochemical deposition processes. During this process, changes occur in its plating bath as the alloy is being deposited. It is known that changes in the process medium affect the acoustic response. Thus, the sensor was implemented in an electroplating set-up and its response was observed during depositions. By mapping the sensor response received to the film thickness measured at certain times, a predictive model of the plated alloy thickness was derived as a function of sensor output and plating time. Such a model can lead to real-time monitoring of nickel-iron thickness.

We demonstrate the use of embedded CdS nanowires in improving spectral transmission loss and the low mechanical and electrical robustness of planar CdS window layer and thus enhancing the quantum efficiency and the reliability of the CdS-CdTe solar cells. CdS nanowire window layer enables light transmission gain at 300nm-550nm. A nearly ideal spectral response of quantum efficiency at a wide spectrum range provides an evidence for improving light transmission in the window layer and enhancing absorption and carrier generation in absorber. Nanowire CdS/CdTe solar cells with Cu/graphite/silver paste as back contacts, on SnO2/ITO-soda lime glass substrates, yield the highest efficiency of 12% in nanostructured CdS-CdTe solar cells. Reliability is improved by approximately 3 times over the cells with the traditional planar CdS counterpart. Junction transport mechanisms are delineated for advancing the basic understanding of device physics at the interface. Our results prove the efficacy of this nanowire approach for enhancing the quantum efficiency and the reliability in window-absorber type solar cells (CdS-CdTe, CdS-CIGS and CdS-CZTSSe etc) and other optoelectronic devices. We further introduce MoO3-x as a transparent, low barrier back contact. We design nanowire CdS-CdTe solar cells on flexible foils of metals in a superstrate device structure, which makes low-cost roll-to-roll manufacturing process feasible and greatly reduces the complexity of fabrication. The MoO3 layer reduces the valence band offset relative to the CdTe, and creates improved cell performance. Annealing as-deposited MoO3 in N2 reduces series resistance from 9.98 Ω/cm2 to 7.72 Ω/cm2, and hence efficiency of the nanowire solar cell is improved from 9.9% to 11%, which efficiency comparable to efficiency of planar counterparts. When the nanowire solar cell is illuminated from MoO3-x /Au side, it yields an efficiency of 8.7%. This reduction in efficiency is attributed to decrease in Jsc from 25.5mA/cm2 to 21mA/cm2 due to light transmission loss in the MoO3-x /Au electrode. Even though these nanowire solar cells, when illuminated from back side exhibit better performance than that of nanopillar CdS-CdTe solar cells, further development of transparent back contacts of CdTe could enable a low-cost roll-to-roll fabrication process for the superstrate structure-nanowire solar cells on Al foil substrate.

The progress of the silicon-based complementary-metal-oxide-semiconductor (CMOS) technology is mainly contributed to the scaling of the individual component. After decades of development, the scaling trend is approaching to its limitation, and there is urgent needs for the innovations of the materials and structures of the MOS devices, in order to postpone the end of the scaling. Atomic layer deposition (ALD) provides precise control of the deposited thin film at the atomic scale, and has wide application not only in the MOS technology, but also in other nanostructures. In this dissertation, I study rapid thermal processing (RTP) treatment of thermally grown SiO2, ALD growth of SiO2, and ALD growth of high-k HfO2 dielectric materials for gate oxides of MOS devices. Using a lateral heating treatment of SiO2, the gate leakage current of SiO2 based MOS capacitors was reduced by 4 order of magnitude, and the underlying mechanism was studied. Ultrathin SiO2 films were grown by ALD, and the electrical properties of the films and the SiO2/Si interface were extensively studied. High quality HfO2 films were grown using ALD on a chemical oxide. The dependence of interfacial quality on the thickness of the chemical oxide was studied. Finally I studied growth of HfO2 on two innovative interfacial layers, an interfacial layer grown by in-situ ALD ozone/water cycle exposure and an interfacial layer of etched thermal and RTP SiO2. The effectiveness of growth of high-quality HfO2 using the two interfacial layers are comparable to that of the chemical oxide. The interfacial properties are studied in details using XPS and ellipsometry.

Body mounted germanium substrate solar cell arrays form the faces of many small satellite designs to provide the primary power source on orbit. High efficiency solar cells are made affordable for university satellite programs as triangular devices trimmed from wafer scale solar cells. The smaller cells allow array designs to pack tightly around antenna mounts and payload instruments, giving the board design flexibility. One objective of this work is to investigate the reliability of solar cells attached to FR-4 printed circuit boards. FR-4 circuit boards have significantly higher thermal expansion coefficients and lower thermal conductivities than germanium. This thermal expansion coefficient mismatch between the FR-4 board and the components causes concern for the power system in terms of failures seen by the solar cells. These failures are most likely to occur with a longer orbital lifetime and an extended exposure to harsh environments. This work compares various methods of attaching solar cells to printed circuit boards, using solder paste alone and with a silicone adhesive, and considering the application of these adhesives by comparing the solder joints when printed by screen versus a stencil. An environmental test plan was used to compare the survivability and performance of the solar arrays.

The frequency demands of radiating systems are moving into the terahertz band with potential applications that include sensing, imaging, and extremely broadband communication. One commonly used method for generating and detecting terahertz waves is to excite a voltage-biased photoconductive antenna with an extremely short laser pulse. The pulsed laser generates charge carriers in a photoconductive substrate which are swept onto the metallic antenna traces to produce an electric current that radiates or detects a terahertz band signal. Therefore, analysis of a photoconductive antenna requires simultaneous solutions of both semiconductor physics equations (including drift-diffusion and continuity relations) and Maxwell’s equations. A multi-physics analysis scheme based on the Discontinuous-Galerkin Finite-Element Time-Domain (DGFETD) is presented that couples the semiconductor drift-diffusion equations with the electromagnetic Maxwell’s equations. A simple port model is discussed that efficiently couples the two equation sets. Various photoconductive antennas were fabricated using TiAu metallization on a GaAs substrate and the fabrication process is detailed. Computed emission intensities are compared with measured data. Optimized antenna designs based on the analysis are presented for a variety of antenna configurations.

Humidity measurement has been increasingly important in many industries and process control applications. This thesis research focus mainly on humidity sensor calibration and characterization. The humidity sensor instrumentation is briefly described. The testing infrastructure was designed for sensor data acquisition, in order to compensate the humidity sensor’s temperature coefficient, temperature chambers using Peltier elements are used to achieve easy-controllable stable temperatures. The sensor characterization falls into a multivariate interpolation problem. Neuron networks is tried for non-linear data fitting, but in the circumstance of limited training data, an innovative algorithm was developed to utilize shape preserving polynomials in multiple planes in this kind of multivariate interpolation problems.

Solar energy is an abundant renewable source, which is expected to play an increasing role in the grid's future infrastructure for distributed generation. The research described in the thesis focuses on the analysis of integrating multi-megawatt photovoltaics (PV) systems with battery energy storage into the existing grid and on the theory supporting the electrical operation of components and systems. The PV system is divided into several sections, each having its own DC-DC converter for maximum power point tracking and a two-level grid connected inverter with different control strategies. The functions of the battery are explored by connecting it to the system in order to prevent possible voltage fluctuations and as a buffer storage in order to eliminate the power mismatch between PV array generation and load demand. Computer models of the system are developed and implemented using the PSCADTM/EMTDCTM software.

An increasing need for effective thermal sensors, together with dwindling energy resources, have created renewed interests in thermoelectric (TE), or solid-state, energy conversion and refrigeration using semiconductor-based nanostructures. Effective control of electron and phonon transport due to confinement, interface, and quantum effects has made nanostructures a good way to achieve more efficient thermoelectric energy conversion. This thesis studies the two well-known approaches: confinement and energy filtering, and implements improvements to achieve higher thermoelectric performance. The effect of confinement is evaluated using a 2D material with a gate and utilizing the features in the density of states. In addition to that, a novel controlled scattering approach is taken to enhance the device thermoelectric properties. The shift in the onset of scattering due to controlled scattering with respect to sharp features in the density of states creates a window shape for transport integral. Along with the controlled scattering, an effective utilization of Fermi window can provide a considerable enhancement in thermoelectric performance. The conclusion from the results helps in selection of materials to achieve such enhanced thermoelectric performance. In addition to that, the electron filtering approach is studied using the Wigner approach for treating the carrier-potential interactions, coupled with Boltzmann transport equation which is solved using Rode's iterative method, especially in periodic potential structures. This study shows the effect of rapid potential variations in materials as seen in superlattices and the parameters that have significant contribution towards the thermoelectric performance. Parameters such as period length, height and smoothness of such periodic potentials are studied and their effect on thermoelectric performance is discussed. A combination of the above two methods can help in understanding the effect of confinement and key requirements in designing a nanostructured thermoelectric device that has a enhanced performance.