Une brosse de polymères est une matrice dense de macromolécules greffées à une surface donnée. Au-delà des brosses synthétiques réalisées en laboratoire, on trouve des exemples très variés dans la nature: un exemple emblématique est le glycocalyx endothélial, décorant la surface interne des vaisseaux sanguins des mammifères. L'interaction de cette structure avec le plasma et les cellules sous écoulement n'est encore que très partiellement explorée. La présente thèse propose, grâce à des simulations de "Dissipative Particle Dynamics", un modèle coarse-grained pour une analyse auto-cohérente d'une brosse polymérique dense sous écoulement parabolique. Cette étude mésoscopique met en évidence l'importance des effets collectifs entre molécules, entraînée par l'hydrodynamique, et propose des nouvelles interprétations à la phénoménologie du système brosse-écoulement. Des résultats préliminaires sont également produits pour l'interaction sous écoulement entre un objet mésoscopique déformable (prototype d'un globule rouge) et les polymères greffés. / Polymer brushes are dense matrices of grafted macromolecules. In addition to brushes finely designed in laboratory, various examples are offered by Nature, as the endothelial glycocalyx, decorating the lumen of mammalian blood vessels. The interaction of such network with the flowing plasma and cells is still partially unknown.The present thesis, by mean of Dissipative Particle Dynamics simulations, proposes a coarse-grained model for the self-consistent analysis of a dense polymer brush under parabolic flow. Our mesoscale investigation highlights the relevance of collective effects, driven by hydrodynamics, and proposes novel interpretations regarding the rich phenomenology of the brush-flow system.Preliminary results are also provided for the interplay between a mesoscopic deformable flowing object (prototype of a red blood cell) and the grafted polymers.

Le sujet de ma thèse est l’étude de la diffraction par des trous sub-longueur percés dans des films métalliques, ainsi que la compréhension du rôle des plasmons de surface (SPs) dans la diffraction en champ lointain. Nous avons construit un goniomètre « fait maison » de haute qualité. Une série de trous unique percés dans un film opaque et variant continûment de k • r >> 1 à k • r << 1 ont été explorées. Ici, k est le vecteur d'onde de l'onde incidente et r est le rayon du trou. Les résultats expérimentaux indiquent que la diffraction de la lumière par un trou unique peut être séparée en quatre régimes, dépendant de la polarisation incidente. Une expression analytique simple révèle pour la première fois, l’implication de deux facteurs compétitifs: l'un lié aux plasmons de surface, et l'autre provenant du couplage du champ aux modes de guide d'onde de l'ouverture. Lorsque le trou est entouré par des corrugations concentriques (structure d'oeil de boeuf), et est illuminé avec les rainures sur le côté de sortie, l'effet de collimation est observé: la diffraction en champ lointain est confinée dans un très petit angle solide. L’influence des paramètres géométrique sur la figure de diffraction de l’œil de bœuf a été étudié et des motifs de diffraction dont la largeur est inférieure à 1 ° dans le champ lointain ont été atteints. Un autre mode de surface (CWs), différent des SPs, a été étudié sur des films de tungstène. Il a été démontré que les CWs permettent également d’obtenir un effet de collimation. À titre de comparaison, nous avons montré que la transmission exaltée est bien plus faible pour les CWs que pour les SPs sur nanostructures. / The theme of my thesis is to investigate the diffraction behavior of subwavelength holes in metal films, and to understand the surface plasmons’ (SPs) role in aperture far-field diffraction. We have built a home-made goniometer setup with high-level quality. A series of single hole continuously ranging from k•r>>1 to k•r<<1 in a flat opaque film were explored, where k is the wavevector of the incident wave and r is the radius of the hole. The experimental results indicated that the diffraction of single hole can be classified into four regimes, depending on the input polarization. A simple analytical expression reveals for the first time the subtle interplay of two competing factors: one related to surface plasmon excitation and the other originating in the coupling of the field to the waveguide mode of the aperture. When the hole is surrounded by concentric grooves (bull’s eye structure) and is illuminated with the grooves on the output side, the beaming effect occurs: far-field diffraction is confined in very small solid angle. The effects of geometrical parameters on bull’s eye diffraction have been studied and the diffraction patterns with the width less than 1° in the far field have been achieved. Another surface waves (CWs) different from SPs on tungsten films were studied. It was demonstrated that the CWs have beaming effect as well. By comparison we showed that CWs display much weaker enhancement in transmission than SPs through nanostructures.

La caractérisation et le monitoring des ressources en eau souterraine et des processus d'écoulement et de transport associés reposent principalement sur la mise en place de forages (piézomètres). Mais la variété des échelles auxquelles se déroulent ces processus et leur variabilité dans l'espace et dans le temps limitent l'interprétation des observations hydrogéologiques. Dans un tel contexte, l'hydrogéophysique fait appel aux méthodes de prospection géophysique afin, notamment, d'améliorer la très faible résolution spatiale des données de forage et de limiter leur caractère destructif. Parmi les outils géophysiques appliqués à l'hydrogéologie, les méthodes sismiques sont régulièrement utilisées à différentes échelles. Mais la réponse sismique dans le contexte de la caractérisation des aquifères reste complexe. L'interprétation des vitesses estimées est souvent délicate à cause de leur variabilité en fonction de la lithologie de l'aquifère (paramètres mécaniques intrinsèques et géométrie des milieux poreux le constituant, influence du degré de saturation, etc). La perméabilité du milieu a également un effet sur la géométrie d'un réservoir hydrologique dont les contours peuvent varier en espace comme en temps, compliquant ainsi l'interprétation des données sismiques.Les géophysiciens cherchent à pallier ces limites, notamment à travers l'étude conjointe des vitesses (Vp et Vs) des ondes compression (P) et de cisaillement (S), dont l'évolution est par définition fortement découplée en présence de fluides. D'un point de vue théorique, cette approche se révèle appropriée à la caractérisation de certains aquifères, en particulier grâce à l'estimation des rapports Vp/Vs ou du coefficient de Poisson. L'évaluation de ces rapports peut être pratiquée de manière systématique grâce à la tomographie sismique en réfraction en utilisant parallèlement ondes P et S. Mais d'un point de vue pratique, la mesure de Vs reste délicate à mettre en oeuvre car les ondes S sont souvent difficiles à générer et à identifier sur les enregistrements sismiques. Une alternative est proposée par l’estimation indirecte de Vs à partir de l’inversion de la dispersion des ondes de surface, réalisée à partir de mesures de la vitesse des ondes de surface contenues dans les enregistrements sismiques classiques. Bien que généralement proposée pour la caractérisation de milieux 1D, la prospection par ondes de surface peut être déployée le long de sections linéaires dans le but de reconstruire un modèle 2D de distribution des Vs du sous-sol.Une méthodologie a été mise au point afin d'exploiter simultanément et de façon optimale les ondes P et les ondes de surface à partir des mêmes enregistrements sismiques. Lors de sa mise en oeuvre sur le terrain, cette acquisition « en ondes P » a été systématiquement suivie d'une acquisition « en ondes SH » afin de comparer les vitesses Vs obtenues par analyse de la dispersion des ondes de surface et par tomographie en ondes SH. L'utilisation de cette méthodologie dans différents contextes géologiques et hydrogéologiques a permis d'estimer les variations latérales et temporelles du rapport Vp/Vs, en bon accord avec les informations géologiques a priori et les données géophysiques et piézométriques existantes. L'utilisation de l'interférométrie laser a également permis de mettre ces techniques de traitement en application sur des modèles physiques parfaitement contrôlés afin d'étudier la propagation des ondes élastiques dans des « analogues » réalistes de milieux poreux partiellement saturés. / Characterisation and monitoring of groundwater resources and associated flow and transport processes mainly rely on the implementation of wells (piezometers). The interpretation of hydrogeological observations is however limited by the variety of scales at which these processes occur and by their variability in space and in time. In such a context, using geophysical methods often improves the very low spatial resolution of borehole data and limits their destructive nature. Among the geophysical tools applied to hydrogeology, seismic methods are commonly used at different scales. However, the seismic response in the context of aquifer characterisation remains complex. The interpretation of the estimated velocities is often difficult because of their variability depending on the aquifer lithology (intrinsic mechanical parameters and geometry of the constituting porous media, influence of the degree of saturation, etc). The permeability of the medium also affects the geometry of a hydrological reservoir whose contours may vary in space and in time, thus complicating the interpretation of seismic data. Geophysicists seek to overcome these limitations, especially through the joint study of compression (P-) and shear (S-) wave velocities (Vp and Vs), whose evolution is by definition highly decoupled in the presence of fluids. From a theoretical point of view, this approach proves suitable for the characterisation of aquifers, especially by estimating Vp/Vs or Poisson's ratio. The evaluation of these ratios can be systematically carried out with seismic refraction tomography using both P- and S-waves. However, retrieving Vs remains practically delicate because S-waves are usually difficult to generate and identify on seismic records. As an alternative, indirect estimation of Vs is commonly achieved thanks to surface-wave dispersion inversion, carried out from measurements of surface waves phase velocities contained in typical seismic records. Although it is usually proposed for the characterisation of 1D media, surface-wave prospecting can be deployed along linear sections in order to build 2D models of Vs distribution in the ground. A specific methodology has been developed for the combined and optimised exploitation of P- and surface waves present on single seismic records. When deployed on the field, this "P-wave" acquisition has been systematically followed by a "SH-wave" acquisition in order to compare Vs models obtained from surface-wave dispersion analysis and SH-wave refraction tomography. The use of this methodology in several geological and hydrogeological contexts allowed for estimating Vp/Vs ratio lateral and temporal variations in good agreement with a priori geological information and existing geophysical and piezometric data. Laser-based ultrasonic techniques were also proposed to put these processing techniques in practice on perfectly controlled physical models and study elastic wave propagation in partially saturated porous media.

In this study, ambient noise wavefield was used for the first time to image spatial and temporal upper crustal seismic structures in NW-Bohemia/Vogtland region. The data come from 111 stations and were collected from continuous recordings of the permanent station networks of Germany and Czech Academy of Sciences as well as temporary stations of the BOHEMA and PASSEQ experiments. Rayleigh and Love waves travelling between each station-pair are extracted by cross-correlating long time series of ambient noise data recorded at the stations. Group velocity dispersion curves are obtained by time-frequency analysis of cross-correlation functions between 0.1 and 1 Hz, and are tomographically inverted to provide 2-D group velocity maps. At shorter periods Rayleigh wave group velocity maps are in good agreement with surface geology where low velocity anomalies appear along Mariánské Lázně Fault and Eger rift. A low velocity zone is observed at the northern edge of Mariánské Lázně Fault which shifts slightly to the south with increasing period and correlates well with the main focal zone of the earthquake swarms at 5 s period. We invert the 2-D group velocity maps into a 3-D shear wave velocity model. In this step Love waves were excluded from further analysis because of their high level of misfit to modelled dispersion curves. Horizontal and vertical sections through the model reveal a clear low velocity zone above the Nový Kostel seismic focal zone which narrows towards the top of the seismic activity and ends above the shallowest hypocenters at 7 km depth. We investigate temporal variation of seismic velocity within and around the Nový Kostel associated with 2008 and 2011 earthquake swarms by employing Passive Image Interferometry method using 7 continuous seismograms recorded by the WEBNET network. The results reveals stable seismic velocities without a clear post seismic velocity change during earthquake swarms in the Nový Kostel area.

Thesis (M.S.)--Joint Program in Oceanographic Engineering (Massachusetts Institute of Technology, Dept. of Ocean Engineering; and the Woods Hole Oceanographic Institution), 1997. / Includes bibliographical references (p. 65-66). / The Surface Suspended Acoustic Receiver (SSAR) is a free-drifting platform intended for use as a receiver in large scale acoustic tomography experiments. Early prototypes of the SSAR exhibited very poor signal-to-noise ratios in the frequency band of the hydrophones. This thesis details efforts to reduce the hydrophone noise level by combining the analysis of experimental data with the results from numerical models. Experiments were conducted to quantify both the frequency content and magnitude of noise generated on the SSAR. Through a program of sea trials and pond testing, two noise sources were identified. The dominant source of noise in the SSAR is velocity dependent flow noise that results from turbulent pressure fluctuations on the hydrophones. A second noise source results from the acceleration sensitivity of the hydrophones in conjunction with high frequency accelerations present in the hydrophone array cable. These high frequency accelerations also show a velocity dependence. The presence of the acceleration-induced noise leads to correlations between the signals from adjacent hydrophones, thus distorting the typical picture that flow noise should be uncorrelated along an array. The primary methods of eliminating the noise are encapsulating the hydrophone in a flow shield, eliminating the array cable, and slowing the system down by replacing the wave following surface buoy with a spar buoy. Using the experimental results, empirical relationships between hydrophone velocity and expected noise level are formed for both shielded and unshielded hydrophones. The numerical models developed as a part of this effort are then used to predict the velocities for a wide range of possible SSAR configurations. The models can also provide information, such as system tensions, that is useful in evaluating the longevity and survivability of SSARs. Modeled design fixes include subsurface component changes as well as comparing a wave following surface buoy to a spar buoy. / by Jason I. Gobat. / M.S.

Surface acoustic wave (SAW) sensors offer a wireless, passive sensor solution for use in numerous environments where wired sensing can be expensive and infeasible. Single carrier frequency SAW sensor embodiments such as delay lines, and resonators have been used in single sensor environments where sensor identification is not a necessity. The orthogonal frequency coded (OFC) SAW sensor tag embodiment developed at UCF uses a spread spectrum approach that allows interrogation in a multi-sensor environment and provides simultaneous sensing and sensor identi- fication. The SAW device is encoded via proper design of multiple Bragg reflectors at differing frequencies. To enable accurate device design, a model to predict reflectivity over a wide range of electrode metallization ratios and metal thicknesses has been developed and implemented in a coupling of modes (COM) model. The high coupling coefficient, reflectivity and temperature coefficient of delay (TCD) of YZ LiNbO3 makes it an ideal substrate material for a temperature sensor, and the reflectivity model has been developed and verified for this substrate. A new concept of pseudo-orthogonal frequency coded (POFC) SAW sensor tags has been investigated, and with proper design, the POFC SAW reduces device insertion loss and fractional bandwidth compared to OFC. OFC and POFC sensor devices have been fabricated at 250 MHz and 915 MHz using fundamental operation, and 500 MHz and 1.6 GHz using second harmonic operation. Measured device results are shown and compared with the COM simulations using the iii enhanced reflectivity model. Additionally, the first OFC devices at 1.05 GHz were fabricated on 128o YX LiNbO3 to explore feasibility of the material for future use in OFC sensor applications. Devices at 915 MHz have been fabricated on YZ LiNbO3 and integrated with an antenna, and have then been used in a transceiver system built by Mnemonics, Inc. to wirelessly sense temperature. The first experimental wireless POFC SAW sensor device results and predictions will be presented.

No description available.

Two surface wave testing methods, namely, (i) the spectral analysis of surface waves (SASW), and (ii) the multi-channel analysis of surface waves (MASW), form non-destructive and non-intrusive techniques for predicting the shear wave velocity profile of different layers of ground and pavement. These field testing tools are based on the dispersive characteristics of Rayleigh waves, that is, different frequency components of the surface wave travel at different velocities in layered media. The SASW and MASW testing procedure basically comprises of three different components: (i) field measurements by employing geophones/accelerometers, (ii) generating dispersion plots, and (iii) predicting the shear wave velocity profile based on an inversion analysis. For generating the field dispersion plot, the complexities involved while doing the phase unwrapping calculations for the SASW technique, while performing the spectral calculations on the basis of two receivers’ data, makes it difficult to automate since it requires frequent manual judgment. In the present thesis, a new method, based on the sliding Fourier transform, has been introduced. The proposed method has been noted to be quite accurate, computationally economical and it generally overcomes the difficulties associated with the unwrapping of the phase difference between the two sensors’ data. In this approach, the unwrapping of the phase can be carried out without any manual intervention. As a result, an automation of the entire computational process to generate the dispersion plot becomes feasible. The method has been thoroughly validated by including a number of examples on the basis of surface wave field tests as well as synthetic test data. While obtaining the dispersion image by using the MASW method, three different transformation techniques, namely, (i) the Park’s wavefield transform, (ii) the frequency (f) -wavenumber ( ) transform and (iii) the time intercept ( -phase slowness (p) transform have been utilized for generating the multimodal dispersion plots. The performance of these three different methods has been assessed by using synthetic as well as field data records obtained from a ground site by means of 48 geophones. Two-dimensional as well as three-dimensional dispersion plots were generated. The Park’s wavefield transformation method has been found to be especially advantageous since it neither requires a very high sampling rate nor an inclusion of the zero padding of the data in a wavenumber (distance) domain. In the case of an irregular dispersive media, a proper analysis of the higher modes existing in the dispersion plots becomes essential for predicting the shear wave velocity profile of ground on the basis of surface wave tests. In such cases, the establishment of the predominant mode becomes quite significant. In the current investigation for Rayleigh wave propagation, the predominant mode has been computed by maximizing the normalized vertical displacements along the free surface. Eigenvectors computed from the thin layer approach (TLM) approach are analyzed to predict the corresponding predominant mode. It is noted that the establishment of the predominant mode becomes quite important where only two to six sensors are employed and the governing (predominant) modal dispersion curve is usually observed rather than several multiple modes which can otherwise be identified by using around 24 to 48 multiple sensors. By using the TLM, it is, however, not possible to account for the exact contribution of the elastic half space in the dynamic stiffness matrix (DSM) approach. A method is suggested to incorporate the exact contribution of the elastic half space in the TLM. The numerical formulation is finally framed as a quadratic eigenvalue problem which can be easily solved by using the subroutine polyeig in MATLAB. The dispersion plots were generated for several chosen different ground profiles. The numerical results were found to match quite well with the data available from literature. In order to address all the three different aspects of SASW and MASW techniques, a series of field tests were performed on five different ground sites. The ground vibrations were induced by means of (i) a 65 kg mass dropped freely from a height of 5 m, and (ii) by using a 20 pound sledge hammer. It was found that by using a 65 kg mass dropped from a height of 5 m, for stiffer sites, ground exploration becomes feasible even up to a depth of 50-80 m whereas for the softer sites the exploration depth is reduced to about 30 m. By using a 20 lb sledge hammer, the exploration depth is restricted to only 8-10 m due to its low impact energy. Overall, it is expected that the work reported in the thesis will furnish useful guidelines for (i) performing the SASW and MASW field tests, (ii) generating dispersion plots/images, and (iii) predicting the shear wave velocity profile of the site based on an inversion analysis.

L’objectif de ce mémoire de maîtrise est de caractériser la distribution axiale des plasmas tubulaires à la pression atmosphérique créés et entretenus par une onde électromagnétique de surface ainsi que d’explorer le potentiel de ces sources pour la synthèse de matériaux et de nanomatériaux. Un précédent travail de thèse, qui avait pour objectif de déterminer les mécanismes à l’origine de la contraction radiale du plasma créé dans des gaz rares, a mis en lumière un phénomène jusque-là inconnu dans les plasmas d’onde de surface (POS). En effet, la distribution axiale varie différemment selon la puissance incidente ce qui constitue une différence majeure par rapport aux plasmas à pression réduite. Dans ce contexte, nous avons réalisé une étude paramétrique des POS à la pression atmosphérique dans l’Ar. À partir de nos mesures de densité électronique, de température d’excitation et de densité d’atomes d’Ar dans un niveau métastable (Ar 3P2), résolues axialement, nous avons conclu que le comportement axial de l’intensité lumineuse avec la puissance n’est pas lié à un changement de la cinétique de la décharge (qui est dépendante de la température des électrons et de la densité d’atomes d’Ar métastables), mais plutôt à une distribution anormale de dissipation de puissance dans le plasma (reliée à la densité d’électrons). Plus précisément, nos résultats suggèrent que ce dépôt anormal de puissance provient d’une réflexion de l’onde dans le fort gradient de densité de charges en fin de colonne, un effet plus marqué pour de faibles longueurs de colonnes à plasma. Ensuite, nous avons effectué une étude spectroscopique du plasma en présence de précurseurs organiques, en particulier le HMDSO pour la synthèse de matériaux organosiliciés et l’IPT pour la synthèse de matériaux organotitaniques. Les POS à la PA sont caractérisés par des densités de charges très élevées (>10^13 cm^-3), permettant ainsi d’atteindre des degrés de dissociation des précurseurs nettement plus élevés que ceux d'autres plasmas froids à la pression atmosphérique comme les décharges à barrière diélectrique. Dans de tels cas, les matériaux synthétisés prennent la forme de nanopoudres organiques de taille inférieure à 100 nm. En présence de faibles quantités d’oxygène dans le plasma, nous obtenons plutôt des nanopoudres à base d’oxyde de silicium (HMDSO) ou à base de titanate de silicium (IPT), avec très peu de carbone. / The purpose of this master thesis is to characterize the axial distribution of tubular discharges at atmospheric pressure sustained by electromagnetic surface wave and to explore their potential for materials and nanomaterials synthesis. A previous doctoral thesis, aimed at determining the mechanisms driving radial plasma contraction in rare gas discharges shed light on a yet unknown phenomenon occurring in surface wave discharges (SWD). As a matter of fact, increasing the power injected into the system leads to a change of the axial distribution of the discharge, in sharp contrast with the behavior commonly observed in reduced-pressure plasmas. In this context, we have performed a parametric investigation of atmospheric pressure SWD sustained in Ar gas. Based on our axially-resolved measurements of the electron density, excitation temperature, and number density of Ar atoms in metastable state (Ar 3P2), we found that the peculiar change of the axial distribution of the light intensity with power is not linked to a modification in the discharge kinetics (linked to the electron temperature and metastable number density) but rather to an anomalous power deposition (linked to the electron density). More specifically, such anomalous power deposition can be attributed to a wave reflection in the high gradient of charged particle densities near the end of the plasma column; a behavior that is more apparent in short plasma columns. Then, we have realized a parametric investigation of the discharge with the addition of organic precursors. Particularly, we used HMDSO for organo-silicon material synthesis and TTIP for organo-titanium material synthesis. It is found that because SWD are characterized by high charged particle densities (>10^13 cm^-3), higher precursor dissociation rates can be achieved with respect to other cold, atmospheric-pressure plasmas such as low-density dielectric barrier discharges. In this case, powder-like nanomaterials with sizes below 100 nm are obtained. Moreover, the addition of small amounts of oxygen into the discharge leads to the formation of round-like silicon oxide or titanium oxide nanoparticles.

L’objectif de ce mémoire de maîtrise est de développer et de caractériser diverses sources de neutres réactifs destinées à des études fondamentales des interactions plasmas-surfaces. Ce projet s’inscrit dans le cadre d’une vaste étude de la physique des interactions plasmas-parois mises en jeu dans les procédés de gravure par plasma des matériaux de pointe. Une revue de la littérature scientifique sur les diverses méthodes permettant de générer des faisceaux de neutres réactifs nous a permis de sélectionner deux types de sources. La première, une source pyrolitique, a été caractérisée par spectrométrie de masse en utilisant le C2F6 comme molécule mère. Nous avons montré que le C2F6 était dissocié à plus de 90% à 1000ºC et qu’il formait du CF4, lui-même dissocié en CF2 vers 900ºC. Ces résultats ont été validés à l’aide d’un modèle basé sur des calculs d’équilibres chimiques, qui a aussi prédit la formation de F à 1500ºC. La seconde source, un plasma entretenu par une onde électromagnétique de surfaces, a été caractérisée par spectroscopie optique d’émission et par interférométrie haute fréquence. Dans le cas du plasma d’argon créé par un champ électromagnétique (>GHz), nos travaux ont révélé une distribution en énergie des électrons à trois températures avec Te-low>Te-high<Te-tail. Nous avons conclu que la formation d’électrons suprathermiques était liée à la génération d’instabilités de plasma au point de résonance au voisinage des parois du réacteur et à des mécanismes d’amortissement de ces instabilités de type Landau. Le même phénomène a été observé dans le plasma de Cl2, mais cet effet disparaissait pour des pressions élevées du au fait de l’amortissement collisionnel. Nous avons aussi montré que ces sources pouvaient conduire à des degrés de dissociation du Cl2 près de 100%. / The goal of this Master thesis goal is to develop and characterize different sources of reactive neutrals aimed at fundamental studies of plasma-surface interactions. This project is part of a broader study on the physics driving plasma-wall interactions during plasma etching of advanced materials. Following our literature review of the various approaches used to generate radical beams, we have selected two types of sources. The first one, a thermal cracker, was characterized by line-of-sight mass spectrometry using C2F6 as the mother. We have shown that more than 90% of the C2F6 was dissociated at 1000ºC, producing CF4 that dissociates into CF2 at temperatures close to 900ºC. These results were in good agreement with the predictions of a model based on chemical equilibrium calculations, which also predicted the formation of F radicals at 1500 ºC. The second source, a surface-wave plasma, was characterised by optical emission spectroscopy and microwave interferometry. For a high-frequency (>1GHz) argon plasmas, we have shown a three temperature electron energy distribution function with Te-low>Te-high<Te-tail. We have concluded that the formation of suprathermal electrons was linked to the generation of plasma instabilities at the resonance point near the chamber walls, and to Landau damping of these instabilities. The same phenomenon was observed in Cl2 plasma, but this effect vanished at high pressures because of collisional damping. We have shown that this type of source could produce near 100% dissociation of Cl2, depending on operating conditions.