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Ablation laser femtoseconde assistée d’une mise en forme temporelle pour le dépôt de couches minces et la synthèse de nanoparticules / Femtosecond laser ablation assisted by temporal pulse for thin films deposition and nanoparticles synthesisBourquard, Florent 06 December 2013 (has links)
Ce travail explore le contrôle de la composition et la cinétique du panache d’ablation laser en régime ultrabref par mise en forme temporelle des impulsions laser femtoseconde. L’objectif est l’optimisation du dépôt de couches minces et de nanoparticules. Le chapitre 1 est une synthèse de la littérature sur le dépôt de couches minces par ablation laser femtoseconde, en particulier de films de Diamond-Like Carbon et de nanoparticules. L’influence de la mise en forme temporelle du laser sur les mécanismes d’ablation est développée, ainsi que le diagnostic du panache d’ablation. Le chapitre 2 présente les dispositifs expérimentaux de mise en forme temporelle et de diagnostic du panache d’ablation par spectroscopie d’émission résolue en temps et espace et spectroscopie d’extinction. Le chapitre 3 rapporte l’impact de l’utilisation d’impulsions doubles et élargies sur les panaches de l’aluminium et du bore. L’augmentation de la composante ionique du plasma d’aluminium est expliquée au travers de simulations hydrodynamiques. Dans le chapitre 4, différentes formes temporelles sont employées pour l’ablation du graphite et le dépôt de couches de Diamond-Like Carbon. Le contrôle de la cinétique du panache est atteint en peuplant plus ou moins ses différentes composantes de vitesse : molécules, atomes et ions. Si la structure du Diamond-Like Carbon déposé n’est pas affectée, une amélioration de la surface des couches est observée. Le chapitre 5 montre l’efficacité et la sensibilité de la spectroscopie d’extinction optique pour la mesure in situ de la distribution en taille des nanoparticules métalliques dans le panache d’ablation laser femtoseconde / This work explores the control of ultrafast laser ablation plume composition and kinetics by temporal shaping of femtosecond laser pulses. The goal is the optimization of thin films and nanoparticles deposition. Chapter 1 is a synthesis of the literature on femtosecond laser deposition of thin films. The focus is on Diamond-Like Carbon films and nanoparticles. The impact of laser temporal pulse shaping on the ablation mechanisms is developed. Ablation plume diagnostic methods are detailed. Chapter 2 describes the experimental setup for temporal pulse shaping and plasma diagnostic. The latter is done through space and time-resolved optical emission spectroscopy and extinction spectroscopy. Chapter 3 reports on the impact of doubles pulses and long pulses on aluminium and boron ablation plumes. Ion yield enhancement in aluminium ablation plasma is explained through hydrodynamics simulations. In chapter 4, various temporal pulse shapes are used for graphite ablation and Diamond-Like Carbon thin films deposition. The control of the plume kinetics is reached by selectively populating the various plume speed components: molecules, atoms, ions. Even though the deposited Diamond-Like Carbon structure is unaffected, it has been observed an improvement of the thin films surface. Chapter 5 shows the efficiency and sensitivity of optical extinction spectroscopy for in situ measurement of nanoparticles size distribution in femtosecond laser ablation plumes
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Étude par dynamique moléculaire de l'ablation par impulsions laser ultrabrèves de cibles nanocristallinesGill-Comeau, Maxime 07 1900 (has links)
No description available.
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Aplikace elektrického výboje v kapalinách pro čistění nekovových archeologických předmětů / Application of electric discharge in liquids for surface cleaning of non-metallic archaeological objectsTihonová, Jitka January 2020 (has links)
This diploma thesis is focused on the plasma surface treatment of historical glass from the 18th and 19th centuries by low temperature electrical discharges in solutions of sodium chloride and potassium carbonate and finding the most suitable settings of conditions for the surface cleaning. Stainless steel electrode and a specially designed electrode system with wolfram wire in the quartz glass capillary were used for the generation of discharge using an audio frequency power supply. Each line of samples was made from one piece of historical glass that was cut to smaller pieces. All cleaned samples were photographed before and after the cleaning so the possible changes of the cleaned area could be visually compared. Then the samples were analysed by LA-ICP-MS (line scanning of surface), where was analysed the cleaned area of samples, and values were compared to the analysis of the reference sample that was not cleaned. Examined isotopes of elements were selected on the basis of the supposed composition of glass, corrosion products, and soil at the place of discovery. Analyses were standardized by NIST 610. Acquired values were transferred to oxides. The most important oxides (Na2O, MgO, SiO2, P2O5 a K2O) were chosen for deciding the most effective cleaning settings. It was decided that the most effective setting for cleaning was the one where the biggest difference of values between sample and reference occurred. Four series of these solutions were compiled and one parameter was changed for each of them. Solutions and their conductivity, frequency of the power supply, and time of cleaning were chosen as changing values. Three samples of different times of cleaning were cleaned without interruption. The time of cleaning was split into intervals of 30 seconds of cleaning and 1 minute of non-action for another two samples of this series. In this way we were trying to find out if the following surface analysis will be influenced by the diffusion of the particles into the sample, or not. The frequency of power supply was recorded and its dissipated power was calculated for each measurement. Emission spectra of a series of different solution conductivity were measured before cleaning of samples. Measurement of OES was made with the ignition of discharge so the active species of plasma were shown in spectra. These species are probably participating in the cleaning process of glass. Emission spectra were also measured after cleaning to find out if values of active species were changed or unknown spectral lines appeared. These lines should be from dirt and corrosion products that were cleaned from the surface of the glass. It was found out that the most effective cleaning of sample 1 (series where the conductivity of the NaCl solution was changed) was done in a solution of conductivity 900 S/cm. The most effective cleaning of sample 4 and sample 7 (series where the conductivity of the K2CO3 solution was changed) was done in a solution of conductivity 600 S/cm. The most effective cleaning of sample 6 (series where the frequency was changed) was done at frequency = (15200 ± 30) Hz. The most effective cleaning of sample 5 (series of different cleaning times) lasted seven minutes without time delay. The future research it should be appropriate to try a combination of these most effective cleaning settings on the surface of more samples, so the finding of this thesis will be confirmed.
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Vliv atmosféry na laserovou ablaci materiálů / Impact of the atmosphere on laser ablation of mattersČerná, Svatava January 2020 (has links)
This thesis deals with a general overview of laser-induced breakdown spectroscopy - ablation of material and plasma formation when a change of the surrounding environment occurs. The aim is to establish ideal conditions for improving detection, which is difficult for some elements when the measurement takes place in the ambient atmosphere. This is the reason why we change the ambient conditions, the gas (air, helium, argon) and its pressure. Buffer gases (helium, argon) influence the development of the material ablation and quality of generated plasma. That is why we inspect the changes in the signal according to particular atmospheres (signal change in buffer gases compared to the ambient atmosphere). The first part of the thesis presents the principle and physical nature of laser ablation with a brief search of experiments performed so far for similar purposes. Based on this search we determine conclusions about the influence of buffer gasses and pressure on the detection used gasses. In the second part of the work, the controlled experiment is presented, which consisted of the detection of spectral lines of fluorine and potassium, see chapter 5.6 and molecular transitions of calcium fluoride, see chapter 5.10. In a controlled experiment, we established two assumptions. The first assumption is the influence of the inert gas atmosphere, which should significantly improve the detection of fluorine and potassium compared to the air atmosphere. We confirmed this finding only for the argon atmosphere. In contrast, in the helium atmosphere, the detection of none of the elements improved. The second assumption is the effect of reducing the ambient pressure, which in combination with an inert gas should allow the detection of fluorine even at low concentrations in the sample. We consider the measured glass disk in chapter 5.7 to be such a sample. This assumption is not confirmed, as the increased intensity of the fluorine spectral line does not manifest itself in any way when the pressure in the vacuum chamber decreases. Finally, in chapter 7 from the results of individual parts of the experiment, the most suitable conditions for the future detection of the measured substances were proposed: fluorine, potassium and calcium fluoride molecules.
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Spektroskopické studium interakcí fokusovaného svazku rentgenového laseru s hmotou / The spectroscopy study of focused short-wavelength laser-matter interactionsBurian, Tomáš January 2019 (has links)
Title: The spectroscopy study of focused short-wavelength laser-matter interactions Author: Tomas Burian Department: Department of Surface and Plasma Science Supervisor: Ing. Libor Juha, CSc., Department of Radiation and Chemical Physics, Institute of Physics of the Czech Academy of Sciences, Prague Abstract: This thesis is focused on processes occurring during and immediately after an interaction of intense short-wavelength laser pulses with matter. Extreme states of matter (warm dense matter - WDM and hot dense matter - HDM), induced by EUV/SXR/X-ray lasers of two kinds, i.e., free-electron lasers (FEL) and plasma-based lasers, were investigated by emission spectroscopy over various spectral ranges and mass spectroscopic techniques. Absorption/transmission experiments revealed an effect of saturable absorption of soft X-ray laser radiation in aluminium WDM. Then, an ionisation potential depression (IPD) in dense plasmas was investigated by means of X-ray emission spectroscopy. Results obtained with the X-ray FEL-produced plasma exhibit very good agreement with computer simulations considering the Ecker-Kröll model. Analysis of optical emission spectra (OES) supports the key role played by fast recombination processes in the ablation plume created by focused short-wavelength laser beams on the solid target...
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Steigerung der Effizienz und Leuchtdichtehomogenität von organischen Leuchtdioden mittels Druck- und LaserprozessenPhilipp, André 03 June 2019 (has links)
Der Schwerpunkt dieser Arbeit liegt auf der Entwicklung von Technologien und Prozessen, welche die Marktakzeptanz organischer Leuchtdioden (OLED) durch Steigerung der Effizienz und Leuchtdichtehomogenität erhöhen. Dazu werden die Fertigungskosten durch neuartige Herstellungsverfahren reduziert und die Realisierung von effizienten, großflächigen (> 300×300 mm2) und homogen leuchtenden OLED-Modulen in beliebiger Modulform ermöglicht. Um dies zu erreichen, wurden folgende drei Ansätze verfolgt:
1. Die Optimierung der Strukturierung dünner Schichten bei Substraten für die organische Elektronik unter Verwendung der Technologien Siebdruck und Laserablation. Es werden neuartige Druckpasten auf ihre Eigenschaften hin untersucht und deren Eignung für die Substratstrukturierung bei OLEDs mittels Testmodulen elektro-optisch charakterisiert. Weiterhin steht die Verringerung der parasitären Leckströme durch einen optimierten Laserablationsprozess zur Grundelektrodenstrukturierung und einer Variation der Dicke der Löchertransportschicht im Fokus.
2. Die Realisierung einer schattenmasken- und photolithografiefreien seriellen elektrischen Verschaltung von mehreren kleinen OLED-Segmenten zu einem großen Gesamtmodul. Dazu werden ein Verfahren für die Erzeugung einer elektrischen Verbindung zwischen Top- und Grundelektrode sowie zwei hochinnovative Verfahren zur Separation einer vollflächig abgeschiedenen Topelektrode entwickelt und auf ihre Eignung hin validiert.
3. Die Verbesserung der Lichtauskopplung aus OLED-Modulen mittels einer modulinternen Streuschicht. Es werden fünf unterschiedliche Streupartikelarten und zwei Matrixmaterialien untersucht und deren Auswirkungen auf die Lichtauskopplung anhand von OLED-Testmodulen charakterisiert.
Die entwickelten Verfahren und Prozessen basieren auf den Technologien Siebdruck und Laserablation, sind explizit für die Fertigung flexibler Module auf Basis von Trägermaterialien wie Dünnglas oder Polymerfolien sowie einem Rolle-zu-Rolle-Herstellungsverfahren geeignet und können direkt in eine großserientechnische Herstellung von OLED-Modulen überführt werden. / The focus of this work is upon the development of technologies and processes to increase the efficiency and brightness homogeneity of organic light-emitting diodes (OLEDs) in order to improve their market acceptance. Additionally, manufacturing costs will be reduced by adopting the new processes and it will be shown that the production of efficient, large-area (up to 300 × 300 mm2) and uniformly bright
OLED modules of an arbitrary shape is possible. To achieve this, three approaches were followed:
1. The optimization of the structuring of thin layers on substrates for organic
electronics using screen printing and laser ablation. To achieve this, the properties of novel printing pastes were determined, and their suitability for structuring substrates was assessed using results from the electro-optical characterization of test modules. Furthermore, the parasitic leakage current was minimized by optimizing the laser ablation process used for the structuring of the bottom electrode, together with the thickness of the hole transport layer.
2. The electrical connection in series of several small OLED segments to make a larger module without the need for shadow masks or photolithographic processes was studied. This included the development of a technique to connect the top and bottom electrodes, as well as two highly innovative methods to produce a completely separated top electrode using structuring by laser ablation. The suitability of these methods for OLED production was confirmed.
3. A scattering layer within the modules was developed to improve the light outcoupling. Five types of scattering particle in two different matrix materials were examined, and the effects of the resulting scattering layer on the outcoupling from an OLED test module were characterized.
The newly developed processes make use of screen printing and laser ablation and are thus well suited to the production of flexible OLED modules using support materials such as thin glass or polymer foils with roll-to-roll processing. Accordingly, such technologies could readily be transferred to the large volume production of OLED modules.
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Intercalation von Stickstoff und Wasserstoff in Sr2N sowie ortsabhängige Feststoffcharakterisierung mit LaserablationChemnitzer, René 12 April 2006 (has links)
Die Strukturen der Erdalkalimetall-Subnitride (EA2N) von Calcium, Strontium und Barium ermöglichen mit ihrem schichtartigen Aufbau aus EA6N-Oktaedern Intercalationsreaktionen. Die Redox-Intercalation von Stickstoff in Sr2N wurde an Einkristallen untersucht. Nur durch eine drastische Erhöhung des Reaktionsgasdruckes im Vergleich zu den Reaktionen an mikrokristallinen Proben wurde die Intercalation der Diazenidionen in die Kristalle zu Sr4N3 und SrN möglich. Für eine analoge Intercalation von Wasserstoff in Sr2N konnten die Reaktionsbedingungen dahingehend optimiert werden, dass erstmals phasenreines Strontiumnitridhydrid (Sr2N)H bzw. deuterid (Sr2N)D erhalten wurde. Anhand von Intercalationsreaktionen mit Sr2N Kristallen konnte gezeigt werden, dass der Intercalationsprozess, erkennbar an der deutlichen Farbänderung von schwarz nach bersteinfarben, von außen nach innen fortschreitet. Als Methode zur räumlich aufgelösten Analyse wurde die Laserablation, in Kombination mit einem ICP - Massenspektrometer (LA-ICP-MS) verwendet. In der Literatur beschriebene Quantifizierungsstrategien wurden auf die Anwendbarkeit für die gegebene Fragestellung untersucht. Mit der ortsaufgelösten Analyse von Einkristallen konnte gezeigt werden, dass die Intercalation von Stickstoff in die Kristalle kontinuierlich von den Kanten zur Kristallmitte fortschreitet.
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Intrinsic Self-Sensing of Pulsed Laser Ablation in Carbon Nanofiber-Modified Glass Fiber/Epoxy LaminatesRajan Nitish Jain (10725372) 29 April 2021 (has links)
<div>Laser-to-composite interactions are becoming increasingly common in diverse applications such as diagnostics, fabrication and machining, and weapons systems. Lasers are capable of not only performing non-contact diagnostics, but also inducing seemingly imperceptible structural damage to materials. In safety-critical venues like aerospace, automotive, and civil infrastructure where composites are playing an increasingly prominent role, it is desirable to have means of sensing laser exposure on a composite material. Self-sensing materials may be a powerful method of addressing this need. Herein, we present an exploratory study on the potential of using changes in electrical measurements as a way of detecting laser exposure to a carbon nanofiber (CNF)-modified glass fiber/epoxy laminate. CNFs were dispersed in liquid epoxy resin prior to laminate fabrication via hand layup. The dispersed CNFs form a three-dimensional conductive network which allows for electrical measurements to be taken from the traditionally insulating glass fiber/epoxy material system. It is expected that damage to the network will disrupt the electrical pathways, thereby causing the material to exhibit slightly higher resistance. To test laser sensing capabilities, a resistance baseline of the CNF-modified glass fiber/epoxy specimens was first established before laser exposure. These specimens were then exposed to an infra-red laser operating at 1064 nm, 35 kHz, and pulse duration of 8 ns. The specimens were irradiated for a total of 20 seconds (4 exposures each at 5 seconds). The resistances of the specimens were then measured again post-ablation. In this study, it was found that for 1.0 wt.% CNF by weight the average resistance increased by about 18 percent. However, this values varied for specimens with different weight fractions. This established that the laser was indeed causing damage to the specimen sufficient to evoke a change in electrical properties. In order to expand on this result, electrical impedance tomography (EIT) was employed for localization of laser exposures of 1, 3, and 5 seconds on a larger specimen, a 3.25” square plate. EIT was used to measure the changes in conductivity after each exposure. EIT was not only successful in detecting damage that was virtually imperceptible to the human-eye, but it also accurately localized the exposure sites. The post-ablation conductivity of the exposure sites decreased in a manner that was comparable to the resistance increase obtained during prior testing. Based on this preliminary study, this research could lead to the development of a real-time exposure detection and tracking system for the measurement, fabrication, and defense industries.</div>
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Développement de dispositifs à base de dioxyde de vanadium VO ₂ et de méta-surfaces dans le moyen infrarouge : applications passives et intégration sur des lasers à cascade quantique / Development of vanadium dioxide VO ₂ and meta-surfaces based devices in the mid-infrared : passive applications and integration on quantum cascade lasersBoulley, Laurent 05 July 2019 (has links)
Le travail de thèse présenté dans ce manuscrit traite du développement de dispositifs à base de dioxyde de vanadium VO₂ et de méta-surfaces dans le moyen infrarouge pour des applications passives et une intégration sur des lasers à cascade quantique (QCL). Ce travail a permis l'élaboration de nouvelles conditions de dépôt du matériau à changement de phase VO₂ par ablation laser pulsé à des températures compatibles avec les hétérostructures de III-V utilisées en optoélectronique. Les caractérisations des couches minces déposées montrent un changement de la réflectivité et de la conductivité électrique entre l'état isolant à basse température et l'état métallique à haute température autour de 68°C (341 K). Des développements ont ensuite été menés sur l'emploi d'un réseau de méta-surfaces permettant d'obtenir une couche homogène d'indice de réfraction effectif résonnant. Ces méta-surfaces sont constituées de résonateurs à anneau fendu dont la fréquence de résonance peut être ajustée par le choix de leurs paramètres géométriques et des matériaux les constituant. Une modulation optique de plus de 100cm-1 du pic de la résonance a été obtenue lors de la transition de phase avec des méta-surfaces déposées sur un film de VO₂. Ce résultat est très prometteur pour la conception de dispositifs monolithiques, robustes, compacts, accordables en fréquence et dont les propriétés optiques ne dépendent que de la température de la couche de VO₂.Enfin, ce travail étudie la fonctionnalisation des QCL dans le moyen infrarouge (7-8 µm) par des couches de VO₂ et de méta-surfaces. Il vise à comprendre l’influence des couches intégrées sur les propriétés d’émission. Afin de garantir une bonne interaction entre ces couches et le mode guidé du laser tout en ayant des pertes optiques faibles, des nouveaux guides d'onde ont été modélisés, puis les premiers QCL à base de VO₂ ont été démontrés et une température maximale de fonctionnement de 334 K a été mesurée. / The thesis work presented in this manuscript deals with the development of vanadium dioxide VO₂ and meta-surfaces based devices in the mid-infrared for passive applications and an integration on quantum cascade lasers (QCL).This work enabled the elaboration of new deposition conditions for the VO₂ phase change material by pulsed laser ablation at temperatures compatible with III-V heterostructures used in optoelectronics. The characterizations of the VO₂ coated thin films show a change in reflectivity and in electric conductivity between the insulating state at low temperature and the metallic state at high temperature around 68°C (341 K).Developments were then carried out on the use of a meta-surfaces array in order to obtain an homogeneous layer of resonant effective refractive index. These meta-surfaces are constituted by split-ring resonators, whose resonance frequency can be adjusted by choosing their geometric parameters and the materials they are made of. An optical modulation of more than 100cm-1 of the resonance peak has been obtained during the phase transition with meta-surfaces deposited on a VO₂ layer. This result is very promising for the conception of monolithic, robust, compact, frequency tunable devices and whose optical properties only depend on the VO₂ layer temperature.Finally, this work studies the functionalization of mid-infrared QCL (7-8 µm) with VO₂ and meta-surfaces layers. It aims at understanding the influence of the integrated layers on the emission properties. In order to ensure a good interaction between these layers and the laser guided mode while having low optical losses, new waveguides were modeled, then the first VO₂ based QCL have been demonstrated and a maximum operating temperature of 334 K has been measured.
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Präparation und Charakterisierung ferroelektrischer perowskitischer Multilagen.: Preparation and electrical characterisation of multilayers of ferroelectric Perovskites.Köbernik, Gert 22 March 2004 (has links)
This work deals with the structural and dielectric properties of Bariumtitanate (BTO) / Strontiumtitanate (STO) superlattices. The investigations were carried during the research for a doctoral thesis on the IFW Dresden, Institute for Metallic Materials (under supervision of Prof. Schulz). These multilayers have been prepared on single crystalline STO of (100) and (111) orientated substrates. All films where grown in an epitaxial mode. Additional superlattices and Bariumstrontiumtitanate (BSTO) thin films on silicon substrates with platinum bottom electrodes have been prepared. Thereby, (111) fibre-textured polycrystalline superlattices were produced. According to our knowledge this result was achieved for the first time (is unique in the world at the moment). According to high resolution TEM investigations of (001) oriented superlattices multilayers with atomically thin interfaces without noticeable interdiffusion have been prepared. XRD pattern of a multilayer consisting of BTO and STO monolayers that have only a thickness adequate one unit cell of BTO respective STO confirm this assumption. Multilayers on (111) oriented STO substrates show a much higher interface roughness than (001) orientated films. Regarding to the examinations in this thesis it is suggested that the roughness is correlated with the reduction of internal stresses by deformation of the stack and not with interdiffusion between the monolayers. For electrical measurements the film thickness has been varied from 30 nm to 300 nm and the periodicity in the range from 0.8 nm to 20 nm. Additionally, BSTO films of equivalent thickness and integral chemical composition were produced. Dielectical measurements were carried out in the temperature range from 20 K to 600 K and hysteresis measurements were done. It has to be pointed out, that multilayers have always lower dielectrical performances then BSTO films. In all cases the dielectric constant (DC) decreases with decreasing film thickness. Multilayers of a small periodicity show the highest DC?s, decreasing with increasing monolayer thickness in all cases. The maximum of DC shifted with decreasing film thickness to higher temperatures thus correlating with an increase of the out of plane lattice parameter. In this paper the mismatch between the stack respectivly the BSTO layers and the substrate has widely been discussed. In the case of BSTO the dielectric data can be qualitatively explained with the theory of strained films, developed mainly by Pertsev, under the assumption of a strain gradient in the thin film. Strain effects do also play an important role in ferroelectric multilayers as well as size and coupling effects between the monolayers. An adequate theory for the description of the dielectric behaviour of the ferroelectric superlattice produced during this research does yet not exist. Some thesis where pointed out, which effects have to be essentially included in to a consistent theory of ferroelectric multilayer. Some practical tips are also given, how to prepare monolayers and superlattices with very high DC and exellent hysteretic behaviour. / Es wurden (001) und (111) orientierte symmetrische BTO/STO-Multilagen auf niobdotierten STO-Einkristallen abgeschieden. Hierbei wurde sowohl die Gesamtschichtdicke, als auch deren Periodizität variiert. Zum Vergleich wurden weiterhin Ba0.5Sr0.5TiO3-Mischschichten unterschiedlicher Dicke präpariert. Aus den HRTEM und XRD Untersuchungen kann geschlossen werden, dass alle erhaltenen Schichten sowohl phasenrein als auch perfekt biaxial texturiert sind. Im Falle der (001) orientierten Multilagen konnten atomar scharfe Grenzflächen zwischen Einzellagen erhalten werden, wobei sich die Einzellagendicke bis auf eine Monolage (0.4 nm) reduzieren lässt. Aus der Schichtdickenabhängigkeit von d(001), dem mittleren out-of-plane Gitterparameter der Schicht, wird geschlossen, dass die Schichten auf den STO-Einkristallen Spannungsgradienten in den Schicht-normalen besitzen und an der Grenzfläche zum Substrat am stärksten verspannt sind. Die (111) orientierten Multilagen auf den STO-Einkristallen zeigen gegenüber den Schichten auf den (100) orientierten STO-Einkristallen eine deutlich erhöhte Interfacerauhigkeit. Vermutet wird, dass dies einerseits durch die andere kristallographische Orientierung der Wachstumsnormalen bedingt ist, weil damit jeweils keine geschlossenen SrO- bzw. BaO- und TiO3-Lagen ausgebildet werden. Andererseits zeigen die TEM-Aufnahmen eine deutliche Zunahme der Welligkeit der Einzellagen mit wachsendem Abstand vom Substrat, die rein mechanischen Effekten zugeschrieben wird. Die Verwölbung der Einzellagen könnte damit der Reduzierung der mechanischen Energie innerhalb des Systems dienen, wobei die Netzebenen dem Verlauf der Einzellagen folgen. Auf platinbeschichteten Siliziumsubstraten konnten erstmals phasenreine (111) fasertexturierte Mischschichten und BTO/STO-Multilagen abgeschieden werden. Grundlage hierfür war die Optimierung des Pt/Ti/SiO2/Si Schichtsystems hinsichtlich seiner thermischen Stabilität bis zu 800°C. Die Textur der Schichten wird von der Platingrundelektrode übernommen und deren Rauhigkeit teilweise verstärkt. Eine mechanische Verwölbung der Einzellagen konnte hier nicht beobachtet werden. Für die elektrischen Messungen wurden auf allen Schichten etwa 50 nm dicke Platinelektroden durch eine Hartmaske mittels Elektronenstrahlverdampfung im Hochvakuum bei etwa 300°C aufgebracht. Anschließend wurden die Schichten an Luft getempert, um das Sauerstoffdefizit, dass sich bei der Elektrodenabscheidung einstellt, auszugleichen. Die elektrischen Messungen zeichnen sich durch den sehr großen untersuchten Temperaturbereich aus. Temperaturabhängige Messungen im Bereich von 30-600 K finden sich für ferroelektrische Dünnschichten sehr selten in der Literatur und stellen für BTO/STO-Multilagen ein Novum dar. Auch die biasabhängige und teilweise auch temperaturabhängige Messung der Kapazität der Multilagen (C-V-Messungen) ist bisher einmalig. Durch die temperaturabhängigen Hysteresemessungen wurden Einblicke in den elektrischen Polungszustand der Schichten erhalten. Dadurch wird eine sinnvolle Interpretation der &amp;#949;(T)-Kurven erst möglich. Der Vorteil der Integration des Polarisationsstromes unter Verwendung einer Dreieckspannung als Messsignal besteht in der direkten physikalischen Aussage der Strom-Spannungskurven über die Schaltspannung der Schichten.
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