This dissertation concerns quasistatic torsional mirror's for optical applications. The intended main area of application is the use as switch in optical network's, replacing the conventional optical-electro-optical conversation. With these actuator's a new concept of electrostatic actuation has been realised. While the drive electrodes are integrated into the deflectable mirror, the whole counter electrode below the mirror plate remains at equal ground potential. The device is manufactured out of two parts using method's of silicon bulk mikro machining. A deflectable mirror plate, torsional spring's and the surrounding support structure are fabricated within the thin device layer at the top of BSOI material. The counter electrode is manufactured out of a highly doped silicon wafer. Both part's are assembled together by adhesive bonding at die level at the end. Since the driving potential is supplied to the mirror plate and the counter electrode is at ground level, lateral tolerances because of device assembly mismatches does not appear with the use of the new concept. In detail the mirror plate itself is divided into two seperate electrodes by a parallel arrangement of filled isolating trenches. The highly doped device layer provides electrical connection via the torsional spring's to the mirror electrodes. A quasistatic torsional actuation is performed if a dc-voltage is applied between one mirror side and the counter electrode. Several design's have been fabricated. The lateral dimension of the torsional mirror plate vary from 0,5 mm to 2,0 mm. The designed characteristic frequencies vary from 0,5 to 3 kHz. For quasistatic actuation the pull in angle vary from 1 to 5 degree and the pull in voltage goes up to several hundred volts. Accessorily the mirror plate is enclosed by a comb drive structure. So that the device could be used for low voltage resonant actuation or an capacitive position read out becomes feasible. Within this thesis the new concept has been verified and functionality has been demonstrated. Depending on their characteristic frequency, devices are suitable to perform quasistatic actuation within 10 ms. Experiments indicated that the electrical isolation damages irreversible at drive voltage's above 400 volt. It limits the maximum deflection of nearly all design's. At prototype actuators repeatability has been studied. No drift was observed in the static characteristic within several cycles for certain designs. Closed-loop position control is not mandatory for the actuators fabricated within this thesis. Mechanical stress inside the mirror plate causes deformation of the reflective surface larger than permitted by optical criteria. This paves the way for further device optimization, yield improvement and system integration.

This thesis presents research towards enabling micromachined millimeter and submillimeter wave focal plane arrays (FPAs). The FPAs operate under the following principle: a switch network consisting of microelectromechanical (MEMS) switches, integrated with micromachined waveguides, is used to feed an array of antenna elements, located in the focal plane of a high-gain quasi-optical system. Hence, it is possible to switch between a set of narrow beams in different directions. Such beam steering systems are needed for future millimeter and submillimeter wave imaging and communication systems. The contributions to future MEMS-switchable FPAs presented here are organized in three papers, as described below. Paper I presents a criterion on the spacing between adjacent FPA elements which results in -3 dB overlap between the switched beams, for the special case when an extended hemispherical dielectric lens is used as the optical system. A key step towards this criterion is a closed-form relation between the scan angle and the FPA element's position, which results in an expression for the effective focal length of extended hemispherical lenses. A comparison with full-wave simulations demonstrates an excellent agreement with the presented theoretical results. Finally, it is shown that the maximum feasible FPA spacing when using an extended hemispherical lens is about 0.7 wavelengths. Paper II presents a numerical study of silicon-micromachined planar extended hemispherical lenses, with up to three matching regions used to reduce internal reflections. The effective permittivity of the matching regions is tailor-made by etching periodic holes in the silicon wafer. The optimal thickness and permittivity of the matching regions were determined using TRF optimization, in order to yield the maximum wide-band aperture efficiency and small side-lobes. We introduce a new matching region geometry, referred to as shifted-type matching regions, and it is demonstrated that using three shifted-type matching regions results in twice as large aperture efficiency as compared to using three conventional concentric-type matching regions. Paper III presents a submillimeter-wave single-pole single-throw (SPST) 500-750 GHz MEMS waveguide switch, based on a MEMS-reconfigurable surface inserted between two waveguide flanges. A detailed design parameter study is carried out to select the best combination of the number of horizontal bars and vertical columns of the MEMS-reconfigurable surface, for achieving a low insertion loss in the transmissive state and a high isolation in the blocking state. A method is presented to model the non-ideal electrical contacts between the vertical cantilevers of the MEMS surface, with an excellent agreement between the simulated and measured isolation. It is shown that the isolation can be improved by replacing an ohmic contact by a new, capacitive contact. The measured isolation of the switch prototype is better than 19 dB and the measured insertion loss is between 2.5 and 3 dB. / Denna avhandling presenterar forskning som syftar till att möjliggöra fokalplans-gruppantenner (FPAs) för våglängder i millimeter och submillimeterområdet. Principen för en sådan FPAs funktion är följande: ett nätverk bestående av mikroelektromekaniska (MEMS) switchar, används för att välja mellan de olika antenn-elementen i en gruppantenn, som placerats i fokalplanet av ett optiskt system. Därmed blir det möjligt att välja från en uppsättning av smala lober i olika riktningar. Sådana lob-styrningssystem behövs för framtida radar- och kommunikationssystem i millimeter och submillimeterområdet. Resultaten är uppdelade i tre vetenskapliga artiklar, som beskrivs nedan. I den första artikeln (Paper I) presenteras ett villkor för avståndet mellan närliggande FPA-element som resulterar i -3 dB överlappning mellan de switchade loberna, för specialfallet då en förlängd hemisfärisk lins används som optiskt system. Det viktigaste steget mot att hitta detta villkor är att bestämma en analytisk relation mellan avsökningsvinkeln och FPA-elementens position. Detta resulterar i ett uttryck för den effektiva fokallängden för denna typ av lins. En utmärkt överensstämelse har funnits mellan dessa relationer och simuleringar. Slutligen visas det att de största möjliga FPA-avstånden för en förlängd hemisfärisk lins är ungefär 0.7 våglängder, vilket uppnås för linser med låg permittivitet. I den andra artikeln (Paper II) presenteras en numerisk studie av plana förlängda hemisfäriska linser, som kan produceras från en kiselskiva. Linserna har upp till tre matchningsregioner, som används för att reducera interna reflektioner. Den effektiva permittiviteten av de matchande regionerna skräddarsys genom etsning av periodiska hål i kiselskivan. Den optimala tjockleken och permittiviteten av de matchande regionerna har bestämts med hjälp av TRF-optimering, för att ge maximal bredbandig direktivitet och minimala sidlober. En ny geometri introduceras för matchningsregionerna, som vi kallar matchningsregioner av skiftad typ. Vi visar att användning av tre matchningsregioner av skiftad typ resulterar i en dubbelt så hög apertur-effektivitet, jämfört med att använda tre konventionella matchningsregioner av koncentrisk typ. I den tredje artikeln (Paper III) presenteras en MEMS-switch för rektangulära vågledare, för frekvensområdet 500-750 GHz. Baserat på en designparameterstudie har den bästa kombinationen av antalet horisontella rader och vertikala kolumner hos den MEMS-konfigurerbara ytan valts ut, för att uppnå låga förluster i det öppna tillståndet och hög isolation i det blockerande tillståndet. I artikeln presenteras en metod för att modellera icke-perfekta elektriska kontakter mellan de fixerade och de rörliga delarna i MEMS-ytan. Denna metod uppvisar en utmärkt överensstämmelse mellan den simulerade och den uppmätta isolationen. Vi visara att isolationen kan förbättras med hjälp av en ny typ av kapacitiv kontakt. Den uppmätta isolationen hos den presenterade switch-prototypen är högre än 19 dB, och den uppmätta förlusten är mellan 2.5 och 3 dB. / <p>QC 20161206</p>

In the nearest future, the human driver is viewed as a reliable backup even for the fully automated road motor vehicles (cars). Indeed, the driver is assumed to swiftly take the control of the car in cases of suddenly occurring (i) challenging environmental conditions, (ii) complex unforeseen driving situations, or (iii) degradation of performance of the car. However, due to the cognitive overload in such a sudden, stressful takeover of the control, the driver would often experience the startle effect, which usually results in an unconscious, instinctive, yet incorrect response. An extreme case of startle is freezing, in which the driver might be incapable to respond to the sudden takeover of control at all. The possible approaches to alleviate the startle during the takeover of control (i.e., the automation startle) include an offset- (i.e., either early- or delayed-), gradual yielding the controls to the driver. In the cases considered above, however, these approaches are hardly applicable because of (i) the presumed unpredictability of the events that result in the need of takeover of control, and (ii) the severe time constraints of the latter. Conversely, the objective of our research is to propose an approach of minimizing the need of yielding the control to the driver in challenging environmental conditions by guaranteeing an adequate automated control in these conditions. Focusing on slippery roads as an instance of challenging conditions, and steering control as an instance of control, we aim at developing such an automated steering that controls the car adequately in various road surfaces featuring low friction coefficients without the need of driver’s intervention.In order to develop such an automated steering we employed an in-house evolutionary computation framework – XML-based genetic programming (XGP) – which offers a flexible, portable, and human readable representation of the evolved optimal steering functions. The trial runs of the evolved steering functions were performed in the Open Source Racing Car Simulator (TORCS), which features a realistic, yet computationally efficient simulation of the car and its environment. The obtained experimental results indicate that due to the challenging dynamics of the unstable car on slippery roads, neither the canonical (tuned) servo-control (as a variant of PD) nor the (tuned) PID-controller could control the car adequately on slippery roads. On the other hand, the controller, featuring a relaxed, arbitrary structure evolved by XGP outperforms both the servo- and PID controllers in that it results in a minimal deviation of the car from its intended trajectory in rainy, snowy, and icy road conditions. Moreover, the evolved steering that employs anticipated perceptions is even superior as it could anticipate the imminent understeering of the car at the entry of the turns and consequently – to compensate for such an understeering by proactively turning the steering wheels in advance – well before entering the turn. The obtained results suggest a human competitiveness of the evolved automated steering as it outperforms the commonly used alternative steering controllers proposed by human experts. The research could be viewed as a step towards the evolutionary development of automated steering of cars in challenging environmental conditions. / 博士(工学) / Doctor of Philosophy in Engineering / 同志社大学 / Doshisha University

Försäljningen av trehjuliga motorcyklar beräknas att öka de kommande åren. Efterfrågan ökar framför allt på eldrivna trehjuliga motorcyklar. För att lyckas i fordonsbranschen behöver fordonen som utvecklas vara säkra. Säkerhet är av hög prioritet i utvecklingen av Omotion AB:s fordon. OMotion har två problem med sin senaste trehjuliga motorcykel där lösningarna kan bidra till ökad säkerhet. Instrumentpanel bakom ratt skyms när ratten vrids. Föregående modell av styrsystemet interagerar ej med 3D-modellen av fordonet på ett verklighetstroget sätt. Nytt koncept med prototyp av display tas fram med en produktutvecklingsprocess. Produktutvecklingsprocessen innefattar en konceptutveckling, utveckling på systemnivå, detaljutveckling och testning. 3D-modell för nytt styrsystem som interagerar på ett korrekt sätt tas fram med CAD-programmet SolidWorks. Enklare fysikaliska beräkningar utförs med kunskap inom hållfasthetslära och maskinelement. Resultatet är lösningar på OMotions två problem. En fysisk och analytisk prototyp för rattens integrerade display är framtagen samt en verklighetstrogen 3D-modell av styrsystemet. Styrsystemsmodellen möjliggör styrning av motorcykelmodellen i SolidWorks. / Sales of three-wheeled motorcycles are expected to increase in the coming years. Demand is increasing, especially for electric tricycles. To succeed in the automotive industry, the vehicles that are developed need to be safe. Safety is a high priority in the development of Omotion AB’s vehicles. OMotion has two problems with its latest three-wheeled motorcycle Where the solutions can contribute to increased safety. The dashboard behind the steering wheel is obscured when the steering wheel is turned. The previous model of the steering system does not interact with the 3D model of the vehicle realistically. New concept with prototype of display is developed with a product development process. The product development process includes a concept development, development at system level, detailed development and testing. 3D model för a new control system that interacts correctly is developed with the CAD program SolidWorks. Simpler physical calculations are performed with knowledge in solid mechanics and machine elements.The results are solutions to OMotion’s two problems. A physical and analytical prototype for the steering wheel’s integrated display has been developed, as well as a realistic 3D model of the steering system. The steering system model enables control of the motorcycle model in SolidWorks

A simple and novel dual-CP printed antenna is modelled and measured. The patch antennais small and achieves a low axial ratio without quadrature feeding. The measured pattern showsaxial ratio pattern squinting over frequency. Possible methods of improving the individual element are discussed, as well as an array technique for improving the axial ratio bandwidth. Three endfire printed antenna structures are designed, analyzed, and compared. The comparison includes an analysis of costs of production for the antenna structures in addition to their performance parameters. This analysis concludes that cost of materials primarily reduces the size of antennas for a given gain and bandwidth. An antenna stucture with an annular beam pattern for down-looking navigational radar is proposed. The antenna uses sub-wavelength grating techniques from optics to achieve a highly directive planar reflector which is used as a ground plane for a monopole. A fan-beam array element is fabricated for use in a digitally steered receive array for obstacle avoidance radar. The steered beam pattern is observed. The element-dependent phase shifts for a homodyned signal in particular are explored as to their impact on beam steering.

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