Kyoto University (京都大学) / 0048 / 新制・課程博士 / 博士(工学) / 甲第16862号 / 工博第3583号 / 新制||工||1541(附属図書館) / 29537 / 京都大学大学院工学研究科電子工学専攻 / (主査)教授 木本 恒暢, 教授 藤田 静雄, 准教授 浅野 卓 / 学位規則第4条第1項該当

Doctor of Philosophy / Department of Physics / Hongxing Jiang / Deep ultraviolet (UV) photoluminescence (PL) spectroscopy has been employed to study optical properties of AlGaN alloys, undoped and doped AlN epilayers and nanostructure AlN photonics crystals (PCs). Using a deep UV laser system with an excitation wave length at 197 nm, continuous wave PL, temperature dependent, and time-resolved PL have been carried out on these AlGaN and AlN epilayers and nanostructures. We have measured the compositional and temperature dependence of the energy bandgap of AlxGa1-xN alloys covering the entire alloy range of x, 0 ≤ x ≤ 1 and fitted with the Varshni equation. Varshni coefficients, alpha and beta in AlGaN alloys have a parabolic dependence with alloy concentration x. Based on the experimental data, an empirical relation was thus obtained for the energy gap of AlGaN alloys for the entire alloy concentration and at any temperature below 800 K. The exciton localization energy in AlxGa1-xN alloys the entire composition range (0 ≤ x ≤ 1) has been measured by fitting the band edge emission peak energy with the Varshni equation. Deviations of the excitonic emission peak energy from the Varshni equation at low temperatures provide directly the exciton localization energies, ELoc in AlGaN alloys. It was found that ELoc increases with x for x ≤ 0.7, and decreases with x for x ≥ 0.8. The relations between the exciton localization energy, the activation energy, and the emission linewidth have been established. It thus provides three different and independent methods to determine the exciton localization energies in AlGaN alloys. Impurity transitions in AlGaN alloys have also been investigated. Continuous wave (CW) PL spectra of Si and undoped AlGaN alloys reveals groups of impurity transitions that have been assigned to the recombination between shallow donors and an isolated triply charged cation-vacancy (VIII)3-, a doubly charged cation-vacancy-complex (VIII-complex)2-, and a singly charged cation-vacancy-complex (VIII-complex)-1. The energy levels of these deep acceptors in AlxGa1-xN (0 ≤ x ≤ 1) alloys are pinned to a common energy level in the vacuum. AlGaN alloys predominantly exhibiting the bandedge and (VIII-complex)1- transitions possess improved conductivities over those emitting predominantly (VIII)3- and (VIII-complex)2- related transitions. These results thus answer the very basic question of high resistivity in Al-rich AlGaN alloys. Acceptor doped AlGaN alloys have been studied by deep UV PL. A PL emission line at 6.02 eV has been observed at 10 K in Mg-doped AlN. It is due to the recombination of an exciton bound to the neutral Mg acceptor (I1) with a binding energy, Ebx of 40 meV, which indicates large activation energy of the Mg acceptor. The observed large binding energy of the acceptor-bound exciton is consistent with relatively large binding energy of the Mg acceptor in AlN. With the energy level of 0.51 eV for Mg dopants in AlN, it is interesting and important to study other suitable acceptor dopants for AlN. Growth and optical studies of Zn-doped AlN epilayers has been carried out. The PL spectra of Zn-doped AlN epilayers exhibited two impurity emission lines at 5.40 and 4.50 eV, which were absent in undoped epilayers. They are assigned respectively, to the transitions of free electrons and electrons bound to triply positively charged nitrogen vacancies (0.90 eV deep) to the Zn0 acceptors. It was deduced that the Zn energy level is about 0.74 eV above the valence band edge, which is about 0.23 eV deeper than the Mg energy level in AlN. Nitrogen vacancies are the compensating defects in acceptor doped AlGaN alloys. A nitrogen vacancy (VN) related emission line was also observed in ion-implanted AlN at 5.87 eV and the energy level of singly charged VN1+ is found at 260 meV below the conduction band. As a consequence of large binding energy of VN1+ as well as high formation energy, VN1+ in AlN cannot contribute significant n-type conductivity, which is consistent with experimental observation. The temperature dependent PL study of the bandedge emissions in GaN and AlN epilayers up to 800 K has been carried out, which reveals two distinctive activation processes. The first process occurring below Tt = 325 K (Tt = 500 K) for GaN (AlN) is due to the activation of free excitons to free carriers, whereas the second occurring above Tt with an activation energy of 0.29 eV (0.3 eV) for GaN (AlN) is believed to be associated with a higher lying conduction band (3) at about 0.3 eV above the conduction band minimum (1). These higher lying bands could affect device performance of GaN and AlN at elevated temperatures. Two-dimensional nanostructured AlN photonic crystals (PCs) with a varying periodicity/diameter down to 150 nm/75 nm have also been studied by deep UV PL. With PCs formation, a 20-fold enhancement in the band edge emission intensity at 208 nm over unpatterned AlN epilayer has been observed. The emission intensity increases with the decrease in the lattice constant of the AlN PCs. AlN PCs represent photonic crystals with highest (shortest) bandgap (wavelength) semiconductors, which open up new opportunities for exploring novel physical phenomena in the artificially structured photonic band gap material systems and their applications, particularly in the area of deep UV as well as nano-photonics.

abstract: The quest to find efficient algorithms to numerically solve differential equations isubiquitous in all branches of computational science. A natural approach to address this problem is to try all possible algorithms to solve the differential equation and choose the one that is satisfactory to one's needs. However, the vast variety of algorithms in place makes this an extremely time consuming task. Additionally, even after choosing the algorithm to be used, the style of programming is not guaranteed to result in the most efficient algorithm. This thesis attempts to address the same problem but pertinent to the field of computational nanoelectronics, by using PETSc linear solver and SLEPc eigenvalue solver packages to efficiently solve Schrödinger and Poisson equations self-consistently. In this work, quasi 1D nanowire fabricated in the GaN material system is considered as a prototypical example. Special attention is placed on the proper description of the heterostructure device, the polarization charges and accurate treatment of the free surfaces. Simulation results are presented for the conduction band profiles, the electron density and the energy eigenvalues/eigenvectors of the occupied sub-bands for this quasi 1D nanowire. The simulation results suggest that the solver is very efficient and can be successfully used for the analysis of any device with two dimensional confinement. The tool is ported on www.nanoHUB.org and as such is freely available. / Dissertation/Thesis / Masters Thesis Electrical Engineering 2020

京都大学 / 0048 / 新制・課程博士 / 博士(工学) / 甲第18229号 / 工博第3821号 / 新制||工||1585(附属図書館) / 31087 / 京都大学大学院工学研究科電子工学専攻 / (主査)教授 川上 養一, 教授 北野 正雄, 教授 木本 恒暢 / 学位規則第4条第1項該当 / Doctor of Philosophy (Engineering) / Kyoto University / DFAM

京都大学 / 0048 / 新制・課程博士 / 博士(工学) / 甲第20576号 / 工博第4356号 / 新制||工||1677(附属図書館) / 京都大学大学院工学研究科電子工学専攻 / (主査)教授 川上 養一, 教授 藤田 静雄, 准教授 後藤 康仁 / 学位規則第4条第1項該当 / Doctor of Philosophy (Engineering) / Kyoto University / DFAM

京都大学 / 0048 / 新制・課程博士 / 博士(工学) / 甲第21270号 / 工博第4498号 / 新制||工||1700(附属図書館) / 京都大学大学院工学研究科電子工学専攻 / (主査)教授 野田 進, 教授 藤田 静雄, 教授 川上 養一 / 学位規則第4条第1項該当 / Doctor of Philosophy (Engineering) / Kyoto University / DGAM

This research investigated the effect of electron injection in III-Nitrides. The combination of electron beam induced current and cathodoluminescence measurements was used to understand the impact of electron injection on the minority carrier transport and optical properties. In addition, the application of the electron injection effect in optoelectronic devices was investigated. The impact of electron injection on the minority carrier diffusion length was studied at various temperatures in Mg-doped p-GaN, p-Al[subscript x]Ga[subscript 1-x]N, and p-Al[subscript x]Ga[subscript 1-x] N/GaN superlattices. It was found that Lsubscript n] experienced a multi-fold linear increase and that the rate of change of L[subscript n] decreased exponentially with increasing temperature. The effect was attributed to a temperature-activated release of the electrons, which were trapped by the Mg levels. The activation energies, E[subscript a], for the electron injection effect in the Mg-doped (Al)GaN samples were found to range from 178 to 267 meV, which is close to the thermal ionization energy of the Mg acceptor. The E[subscript a] observed for Al[subscript 0.15]Ga[subscript 0.85]N and Al[subscript 0.2]Ga[subscript 0.8]N was consistent with the deepening of the Mg acceptor level due to the incorporation of Al into the GaN lattice. The E[subscript a] in the homogeneously doped Al[subscript 0.2]Ga[subscript 0.8]N/GaN superlattice indicates that the main contribution to the electron injection effect comes from the capture of injected electrons by the wells (GaN). The electron injection effect was successfully applied to GaN doped with an impurity (Mn) other than Mg. Electron injection into Mn-doped GaN resulted in a multi-fold increase of the L[subscript n] and a pronounced decrease in the band-to-band cathodoluminescence intensity. The E[subscript a] due to the electron injection effect was estimated from temperature-dependent cathodoluminescence measurements to be 360 meV. The decrease in the band-to-band cathodoluminescence is consistent with an increase in L[subscript n] and these results are attributed to an increase in the minority carrier lifetime due to the trapping of injected electrons by the Mn levels. A forward bias was applied to inject electrons into commercially built p-i-n and Schottky barrier photodetectors. Up to an order of magnitude increase in the peak (360 nm) responsivity was observed. The enhanced photoresponse lasted for over four weeks and was attributed to an electron injection-induced increase of L[subscript n] and the lifetime.

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