This dissertation deals with the development of RF MEMS switches with novel materials and micromachining techniques for the RF and microwave applications. To enable the integration of RF and microwave components on CMOS grade silicon, finite ground coplanar waveguide transmission line on CMOS grade silicon wafer were first studied using micromachining techniques. In addition, several RF MEMS capacitive switches were developed with novel materials. A novel approach for fabricating low cost capacitive RF MEMS switches using directly photo-definable high dielectric constant metal oxides was developed, these switches exhibited significantly higher isolation and load capacitances as compared to comparable switches fabricated using a simple silicon nitride dielectric. The second RF MEMS switch developed is on a low cost, flexible liquid crystal polymer (LCP) substrate. Its very low water absorption (0.04%), low dielectric loss and multi-layer circuit capability make it very appealing for RF Systems-On-a-Package (SOP). Also, a tunable RF MEMS switch on a sapphire substrate with BST as dielectric material was developed, the BST has a very high dielectric constant (>300) making it very appealing for RF MEMS capacitive switches. The tunable dielectric constant of BST provides a possibility of making linearly tunable MEMS capacitor-switches. For the first time a capacitive tunable RF MEMS switch with a BST dielectric and its characterization and properties up to 40 GHz was presented. Dielectric charging is the main reliability issue for MEMS switch, temperature study of dielectric polarization effect of RF MEMS was investigated in this dissertation. Finally, integration of two reconfigurable RF circuits with RF MEMS switches were discussed, the first one is a reconfigurable dual frequency (14GHz and 35 GHz) antenna with double polarization using RF MEMS switches on a multi-layer LCP substrate; and the second one is a center frequency and bandwidth tunable filter with BST capacitors and RF MEMS switches on sapphire substrate.

Submitted by Claudinei Pracidelli (cpracide@ipen.br) on 2015-10-28T11:10:50Z No. of bitstreams: 0 / Made available in DSpace on 2015-10-28T11:10:50Z (GMT). No. of bitstreams: 0 / Tese (Doutorado em Tecnologia Nuclear) / IPEN/T / Instituto de Pesquisas Energeticas e Nucleares - IPEN-CNEN/SP

Submitted by Claudinei Pracidelli (cpracide@ipen.br) on 2015-10-28T11:10:50Z No. of bitstreams: 0 / Made available in DSpace on 2015-10-28T11:10:50Z (GMT). No. of bitstreams: 0 / Neste trabalho pós de CaCu3Ti4O12 foram preparados por reação em estado sólido e por técnicas de solução: complexação de cátions e coprecipitação dos oxalatos. Foram realizados estudos de formação de fase, densificação e propriedades dielétricas das cerâmicas sinterizadas. Para efeito comparativo, ta is propriedades foram determinadas em amostras puras e contendo dissilicato de lítio (LSO) e fluoreto de lítio (LiF) como aditivos de sinterização. O principal objetivo foi verificar o efeito do uso dos diferentes aditivos de sinterização na microestrutura, densificação e propriedades dielétricas do CCTO. Os principais resultados revelaram que pós preparados por técnicas de solução apresentam fase única após calcinação em condições selecionadas. Foi verificado que os aditivos influenciam na densificação, possibilitando obter cerâmicas com 95% da densidade teórica do CCTO a 1025°C. As amostras preparadas por diferentes técnicas apresentam propriedades similares, com exceção das características microestruturais. A permissividade elétrica determinada à temperatura ambiente é da ordem de 104 independentemente do método de síntese. As menores perdas dielétricas foram obtidas para amostras contendo LiF como aditivo de sinterização. / Tese (Doutorado em Tecnologia Nuclear) / IPEN/T / Instituto de Pesquisas Energeticas e Nucleares - IPEN-CNEN/SP

Nesse trabalho são discutidos os resultados a respeito de materiais híbridos baseados na poliimida, PI, obtida por reações de policondensação entre a diamina 4,4\'-Oxidianilina (ODA) e o dianidrido 4,4\'-Oxidiftálico (ODPA), seguida de imidização térmica. O estudo foca na influência do tempo de tratamento (1, 15 e 60 min) e na temperatura de decomposição térmica (500°C) sobre as propriedades da PI. Os experimentos foram realizados sob fluxo de Argônio e os materiais obtidos apresentam características intermediárias entre PI e materiais carbonáceos. Dados de Nanoindentação (NI) revelaram aumento de até 50% de dureza para os filmes tratados por 60 min. ODPA e ODA serviu ainda de base para a preparação do revestimento híbrido contendo ORMOSIL gerado in situ por catálise ácida via processo sol-gel a partir do (3-aminopropil)trietóxissilano (APTES) e Tetraetil Ortossilicato (TEOS). O revestimento obtido é homogêneo e tem boa interação com o substrato (aço inoxidável 316L). A polarização potenciodinâmica revelou uma proteção elevada tanto em solução de NaCl 3,5% em massa quanto em H2SO4 0,5 mol L-1, em relação ao aço sem revestimento, com densidade de corrente da ordem de 10-9 A cm-2, na faixa de -700 a 500 mV vs Ag/AgCl. Por fim, filmes híbridos baseados em ODPA, ODA, APTES e TEOS, adicionados de Ácido Fosfotungstico (HPW) foram preparados e avaliados por Espectroscopia na região do Infravermelho com Transformada de Fourier e Ressonância Magnética Nuclear de Silício e Fósforo (29Si e 31P MAS NMR) que confirmaram a formação da PI e da rede ORMOSIL, bem como revelam que a estrutura do HPW permaneceu intacta após o processo de síntese. Mapeamentos realizados por Micro-fluorescência de Raios X assistida por Luz Síncrotron (μ-XRF) mostram uma boa dispersão da fase inorgânica (ORMOSIL e HPW) na orgânica (POO), e todos os materiais são termicamente estáveis até aproximadamente 500°C, de acordo com as curvas obtidas por Termogravimetria (TGA). Outras técnicas de caracterização também foram usadas para uma investigação mais detalhada dos materiais. / In this thesis are presented the results and considerations related to several hybrid materials derived from the polyimide, PI, obtained by polycondensation reactions between 4,4\'-Oxydianiline (ODA) and 4,4\'-Oxydiphthalic (ODA), followed by thermal imidization. The study focuses on the effect of thermal treatment time (1, 15 and 60 min) and the temperature of beginning of thermal decomposition (773 K) on the properties of PI. The experiments were performed under Argon flow, and the materials presented intermingled properties of PI and carbonaceous materials. The hardness, evaluated by Nanoindentation (NI), reached an increase of 50% for POO films treated for 60 min. POO was also used for the preparation of the hybrid coating containing ORMOSIL obtained in situ by acid catalysis via sol-gel process from (3-aminopropyl)triethoxysilane (APTES) and Tetraethyl Orthosilicate (TEOS). The coating is homogeneous and present a good interaction with the substrate (316L stainless steel). Data of potendynamic polarization revealed a high protection both under NaCl 3.5 wt% and H2SO4 0.5 mol L-1 solutions related to the neat substrate, with current density of order 10-9 A cm-2, in range potential of -700 to 500 mV vs Ag/AgCl. Finally, hybrid films were prepared based on ODPA, ODA, APTES and TEOS, in addition to Phosphotungstic Acid (HPW). The characteristics of all materials were evaluated by Fourier Transform Infrared Spectroscopy in Middle and Near Infrared region (FTMIR and FTNIR), and Magic Angle Spinning-Nuclear Magnetic Resonance of Silicon 29 and Phosphorus 31 (29Si and 31P MAS NMR) which confirmed the ORMOSIL network formation, as well as revealed that the HPW structure remained intact after the synthesis process. Mapping performed by Assisted Synchrotron Light X-ray Micro Fluorescence (μ-XRF) the good dispersion of the inorganic phase (ORMOSIL and HPW) in the organic phase (POO). All materials are thermally stable up to 773 K, according to Thermogravimetric Analysis (TGA). Other techniques of characterization were also used to further investigation of the materials.

Les avions comportent plusieurs systèmes de navigation et de communication nécessitent des antennes VHF large bande. Réduire la taille de ses antennes est un enjeu majeur tout en gardant des bonnes performances. Cette thèse propose des nouvelles configurations d'antennes à profil bas utilisant des nouveaux matériaux nanocomposites non conducteurs constitués de nanoparticules magnétiques développés au Lab-STICC. Un monopole planaire large bande a été développé et optimisé avec un taux de miniaturisation de 60% grâce à l'utilisation d'un matériau magnéto-diélectrique de forte perméabilité et faible pertes couvrant seulement 5% de sa surface. Les résultats expérimentaux, en presque parfait accord avec les simulations, montrent que le diagramme de rayonnement est omnidirectionnel et que la polarisation est verticale, avec un bon niveau du gain. L'antenne monopole planaire insérée dans un MMD des dimensions limitées avec des pertes a été modélisée par un nouveau circuit équivalent multi résonant. Ce circuit est développé à partir de l'impédance d'entrée de l'antenne et des caractéristiques du MMD, et validé par les simulations avec un parfait accord entre les résultats. / Airplanes with multiple navigation and communication systems require broadband VHF antennas. Reduce the size of these antennas is a major challenge while keeping good performances. This thesis proposes new configurations of low profile antennas using new nanocomposite non-conductive materials consisting of magnetic nanoparticles developed at Lab-STICC. A broadband planar monopole has been developed and optimized with a 60% miniaturization rate thanks to the use of a high permeability and low loss magneto-dielectric material covering only 5% of its surface. The experimental results, in almost perfect agreement with the simulations, show that the radiation pattern is omnidirectional and that the polarization is vertical, with a good level of gain. The planar monopole antenna inserted in a MMD of limited dimensions with losses was modeled by a new multi-resonant equivalent circuit. This circuit is developed from the input impedance of the antenna and the characteristics of the MMD. and validated by the simulations with a perfect agreement between the results.

The following studies describe the synthesis and properties of a family of poly(arylene ether ketone)s which are well known to have good thermal stability, mechanical durability, and other film properties. These poly(arylene ether ketone)s were functionalized with fluorine, oxidized, blended, and crosslinked to increase performance with focus on materials for polymeric capacitors and gas separation membranes. There is a need for polymeric capacitors with improved energy storage density and thermal stability. In this work, the affect of polymer molecular structure and symmetry on Tg, breakdown strength, and relative permittivity was investigated. A systematic series of four amorphous poly(arylene ether ketone)s was compared. Two of the polymers had symmetric bisphenols while the remaining two had asymmetric bisphenols. Two contained trifluoromethyl groups while the other two had methyl groups. The symmetric polymers had Tg's of approximately 160 °C while the asymmetric polymers showed higher Tg's near 180 °C. The symmetric polymers had breakdown strengths near 380 kV/mm at 150 °C. The asymmetric counterparts had breakdown strengths near 520 kV/mm even at 175 °C, with the fluorinated polymers performing slightly better in both cases. The non-fluorinated polymers had higher relative permittivities than the fluorinated materials, with the asymmetric polymers being better in both cases. Two amorphous, high glass transition, crosslinkable poly(arylene ether)s for gas purification membranes have been studied. The polymers were polymerized via step growth and contained tetramethyl bisphenol F and either 4,4'-difluorobenzophenone or 4,4'-dichlorodiphenylsulfone. The benzylic methylene group in tetramethyl bisphenol F can undergo oxidation reactions and crosslinking with UV light. The polymers were oxidized under two different conditions, one by chemical treatment using oxone and KBr and one by elevated thermal treatment in air. Thermogravimetric analysis, 1H-NMR and attenuated total reflectance Fourier transform infrared spectroscopy revealed the progress of the thermal oxidation reactions. Both polymers produced tough, ductile films and gas transport properties of the non-crosslinked linear polymers and crosslinked polymer was compared. Crosslinking was performed by irradiating polymer films for one hour on each side in air under a 100W high intensity, long-wave UV lamp equipped with a 365-nm light filter. The O2 permeability of tetramethyl bisphenol F containing non-crosslinked poly(arylene ether ketone) was 2.8 Barrer, with an O2/N2 selectivity of 5.4. Following UV crosslinking, the O2 permeability decreased to 1.8 Barrer, and the O2/N2 selectivity increased to 6.2. Poly(2,6-dimethyl-1,4-phenylene oxide) (PPO) is a commercial polymer that is utilized for gas separation membranes. It has a relatively high free volume with high gas permeabilities but suffers from low gas selectivities. In this study, PPO polymers with number average molecular weights of 2000, 6000, 17,000, 19,000 and 22,000 were synthesized and blended with a poly(arylene ether ketone) synthesized from bisphenol A and difluorobenzophenone (BPA-PAEK) to make UV-crosslinkable films. The ketone and benzylic methylene groups on the BPA-PAEK and the PPO polymers respectively formed crosslinks upon exposure to broad wavelength UV light. The crosslinked blends had increased selectivities over their linear counterparts. DSC thermograms showed that the blends with all but the lowest molecular weight PPO had two Tg's, thus suggesting that two phases were present, one high in PBA-PAEK and the other high in PPO composition. The PBA-PAEK blend with the 2000 Mn PPO showed only one Tg between the two control polymers. Despite the immiscibility of these films, the gel fractions after UV exposure were high. Gel fractions as a function of the amount of the 22,000 Mn PPO were explored and did not show any significant change. UV spectroscopy of the individual components and the blends showed that more broad wavelength light was transmitted through the PPO component, so it was reasoned that films that was high in PPO composition crosslinked to deeper depths. The O2/N2 permeabilities and selectivities were measured for the linear and crosslinked films. Between the 33/67, 67/33, and 90/10 22k PPO/BPA PAEK crosslinked blended films, the 90/10 PPO/BPA PAEK gained the most selectivity and maintained a larger amount of its permeability. In comparison to commercial gas separation polymers, the non-crosslinked 33/67 22,000 Mn PPO/BPA PAEK blend outperformed polysulfone and cellulose acetate with a 2.45 degree of acetylation. Overall, we were able to blend a small amount of BPA PAEK with the commercially used PPO to create a mechanically robust crosslinked polymer film. / Ph. D.

La maîtrise de la communication et de l'information est un atout primordial dans les stratégies de pouvoir, qu'elles soient militaires, politiques ou commerciales. Celui qui est capable de transmettre l'information plus vite prend l'avantage sur les autres. Tel est le moteur de la croissance et du progrès dans le domaine des télécommunications. L'omniprésence grandissante des dispositifs communicants témoigne de l'expansion exponentielle qu'a connu ce domaine depuis les premières communications sans fil. À l'époque du all-in-one, la multiplication des applications au sein d'un même appareil nécessite l'utilisation de composants toujours plus performants et petits . Au cœur de ces systèmes, les filtres ont une importance grandissante. Dans un environnement spatial, les contraintes de fiabilité et d'encombrement sont particulièrement drastiques. Le choix des matériaux est par ailleurs limité, ce qui réduit les possibilités d'innovation. Cependant, l'amélioration de la précision et de la fiabilité dans les technologies de fabrication ouvre de nouvelles perspectives d'innovation et d'amélioration des composants. Ces travaux ont ainsi été motivés par ce souci d'apporter toujours plus de performance et de fiabilité, pour un encombrement moindre en tirant profit du potentiel offert par l'association du concept SIW et de la technologie LTCC. Les résultats mettent à jour de sérieuses dispersions technologiques. Cependant, le potentiel de l'association SIW/LTCC est démontré, et les difficultés rencontrées sont surmontables. Les filtres SIW en technologie LTCC présentent donc des atouts pour s'imposer comme une alternative sérieuse aux solutions existantes. / Control of communication and information is a key asset in the strategies of power, whether military, political or commercial. Whoever is able to transmit information faster takes advantage of others. This is the engine of growth and progress in the field of telecommunications. The growing ubiquity of communicating devices demonstrates the exponential growth experienced by this area since the first wireless communications. At the time of all-in-one, multiple applications within a single device requires the use of ever more powerful and small components. At the heart of these systems, filters are becoming increasingly important. In a space environment, reliability constraints and space are particularly dramatic. The choice of materials is also limited, which reduces the possibilities of innovation. However, the improvement of accuracy and reliability in manufacturing technologies opens new opportunities for innovation and improved components. This work has been motivated by the desire to bring more performances and reliability, a smaller footprint by taking advantage of the potential offered by combining the concept SIW and LTCC. The results update serious technological dispersions. However, the potential association SIW / LTCC is shown, and the difficulties are surmountable. SIW filters in LTCC therefore have advantages for itself as a serious alternative to existing solutions.

La thèse est consacrée aux matériaux électro-actifs, qui sont développés et conçus pour faire de la conversion entre énergie électrique et énergie mécanique. Avec les nouvelles technologies émergentes de transduction électromécanique, les polymères électro-actifs (EAP) ont gagné une attention considérable. Ils présentent de grandes déformations quand ils sont soumis à un champ électrique. Cependant, ces matériaux présentent de faibles permittivités et exigent pour fonctionner l’application de forts champs électriques. Les recherches entreprises dans la thèse traitent de différentes méthodes ayant pour but d'augmenter la permittivité des polymères et par conséquent d’améliorer les propriétés électromécaniques sous des champs électriques modérés. Les différentes approches consistent à la mise au point de nouveaux matériaux, par la méthode de mélange de polymères ou en utilisant un nouveau type de polymère, et par l'incorporation de nano-charges spéciales dans la matrice polymère. Un mélange de polyuréthane (PU) et PEMG obtenu à partir d'un procédé en solution conduit à des valeurs plus basses de module de Young, mais aussi à de plus faibles permittivités diélectriques. Il est cependant mis en évidence une amélioration des propriétés électromécaniques, par exemple, à le gain à des champs électriques modérés est d’un facteur 2, avec seulement 9% en poids de PEMG. Deux types de Pebax sont testés comme matrice polymère. Des valeurs très élevées de permittivités sont obtenus plus particulièrement pour le Pebax1657 mais liés pour ce matériau à des valeurs élevées de conductivité. En dépit de ces permittivités élevées, seule une légère amélioration de la conversion électromécanique est observée par rapport au polyurethane. Nous nous sommes également intéressés aux nanocomposites de polyuréthane basés sur desnanoparticules d'argent recouvertes de polymère polyvinylpyrrolidone (PVP). Un fin revêtement de polymère sur les nanoparticules d'argent conduit à une meilleure dispersion des charges dans les films de polyuréthane, et des valeurs plus élevées de permittivité. Différentes quantités d'Ag-PVP sont testées jusqu'au seuil de percolation proche de 45% en poids de charges. À partir des mesures par interférométrie laser et du nouveau dispositif de caractérisation croisée, les propriétés électromécaniques optimales sont obtenues pour 20% en poids de Ag-PVP, avecun gain de 2 à 6 par rapport au polyuréthane pur. Afin d'expliquer la différence entre les résultats expérimentaux et attendus, et par conséquent pour parvenir à une meilleure compréhension du comportement électromécanique de ces différents matériaux, certaines hypothèses ont été discutées et testées. Nous avons montré notamment une baisse des permittivités diélectriques sous champs électriques pour les Pebax et les nanocomposites, des problèmes d'absorption d'eau pour les Pebax et une diminution de cristallinité dans le cas des nanocomposites PU-Ag. / The thesis is devoted to electroactive materials, which are developed and designed to make conversion between the electricity and the mechanical form. With newer emerging electromechanical transduction technologies, electroactive polymers (EAP) have gained a considerable attention. The polymers are competitive in many applications such as actuators, sensors, robotic system and biological mimics since they are cheap, light, easy to process, and they present large electric field-induced strains. However, these materials suffer from the low permittivity and high voltage requirement to drive the actuations. The research undertaken for the thesis intends then to provide different methods in order to enhance the polymer permittivity and consequently the electromechanical activities at moderate electric fields. The different approaches consist on the development of new materials by polymer blend method or by using new kind of polymer, and on the incorporation of special nano-fillers in the polymer matrix. A blend of polyurethane (PU) and poly [ethylene-co-(methyl acrylate)-co-(glycidyl methacrylate) (PEMG) obtained from a simple solution method leads to lower values of Young modulus but also lower dielectric permittivities. The PU-PEMG blend presents however an improvement of the electromechanical capabilities, for example it is obtained a two fold increase of the strain at moderate fields with only 9%wt of PEMG.Two types of Polyetherblockamide (Pebax) are tested as polymer matrix. Very high values of permittivities are obtained particulary for Pebax1657 but accompanied for this material by high values of conductivity. Despite these high permittivities (more than 200000 for Pebax 1657 and 500 for Pebax 2533 at 0.1 Hz), only a moderate improvement of the electromechanical capability is observed compared to PU. We are also intererested on polyurethane nanocomposites based on silver nanoparticles coverered by PolyVinylPyrrolidone (PVP) polymer. A little polymer coating of the nanosilver leads to a better dispersion into the polyurethane films and higher values of permittivity. Different amounts of Ag-PVP are tested up to the percolation threshold close to 45%wt of fillers. Based on laser interferometer measurements and new cross characterization device, the optimal electromechanical properties are obtained for 20 %wt of Ag-PVP and a gain of 2 to 6 is obtained compared to pure polyurethane. In order to explain the difference between experimental and expected results and consequently to achieve a better understanding of the electromechanical behaviour of these different materials, some hypotheses were discussed and tested. We have shown particularly a drop of dielectric permittivities under electric fields for Pebax and nanocomposites, some problems of water absorption for Pebax and a decrease of crystallinity for the PU-Ag nanocomposites.

Neste trabalho, é apresentada uma formulação apropriada à análise de guias de ondas eletromagnéticos, cobrindo do espectro de microondas até o da óptica. Nas regiões a partir do ultravioleta, os comprimentos de onda são equivalentes às dimensões atômicas e a formulação necessita de uma abordagem quântica, que não é considerada neste estudo. A formulação é fundamentada nos métodos vetorial magnético e dos elementos finitos (MEF), em meios não homogêneos, anisotrópicos e não dissipativos, embora a dissipação possa ser facilmente introduzida na análise. Deu-se preferência à formulação com o campo magnético em vez do elétrico, pelo fato do campo magnético ignorar descontinuidades elétricas. Ele é contínuo em regiões de permeabilidade homogênea, propriedade dos meios dielétricos em geral ( = 0), independente da permissividade dos respectivos meios, conquanto os campos elétricos sejam descontínuos entre regiões de permissividades diferentes. / This work presents a suitable formulation to the analysis of electromagnetic waveguide, covering the spectrum of the microwave to optics. In regions from the ultraviolet, the wavelengths are equivalent to atomic dimensions and the design needs a quantum approach, which is not considered in this study. The formulation is based on the magnetic vector and the finite element methods (FEM), in non-homogeneous, anisotropic and non-dissipative dielectric materials, while the dissipation can be easily introduced in the analysis. Preference was given to the formulation with the magnetic field, because the magnetic field ignores electrical discontinuities. It is continuous in regions of homogeneous permeability, property of all dielectric materials (=0), independent of the permissiveness of respective regions, while electric fields are discontinuous between regions of different permittivities.

Neste trabalho, é apresentada uma formulação apropriada à análise de guias de ondas eletromagnéticos, cobrindo do espectro de microondas até o da óptica. Nas regiões a partir do ultravioleta, os comprimentos de onda são equivalentes às dimensões atômicas e a formulação necessita de uma abordagem quântica, que não é considerada neste estudo. A formulação é fundamentada nos métodos vetorial magnético e dos elementos finitos (MEF), em meios não homogêneos, anisotrópicos e não dissipativos, embora a dissipação possa ser facilmente introduzida na análise. Deu-se preferência à formulação com o campo magnético em vez do elétrico, pelo fato do campo magnético ignorar descontinuidades elétricas. Ele é contínuo em regiões de permeabilidade homogênea, propriedade dos meios dielétricos em geral ( = 0), independente da permissividade dos respectivos meios, conquanto os campos elétricos sejam descontínuos entre regiões de permissividades diferentes. / This work presents a suitable formulation to the analysis of electromagnetic waveguide, covering the spectrum of the microwave to optics. In regions from the ultraviolet, the wavelengths are equivalent to atomic dimensions and the design needs a quantum approach, which is not considered in this study. The formulation is based on the magnetic vector and the finite element methods (FEM), in non-homogeneous, anisotropic and non-dissipative dielectric materials, while the dissipation can be easily introduced in the analysis. Preference was given to the formulation with the magnetic field, because the magnetic field ignores electrical discontinuities. It is continuous in regions of homogeneous permeability, property of all dielectric materials (=0), independent of the permissiveness of respective regions, while electric fields are discontinuous between regions of different permittivities.