Optically active helical microparticles are studied in the forms of thin films, suspensions and powders. From fabricated helical porous thin films, microparticle suspensions are obtained by removing the microparticles (film columns) from their substrates and dispersing them into water. For removing microparticles, four methods are explored and compared: sacrificial NaCl layer, gold (Au) layer, buffered oxide etching, and direct ultrasonic agitation. The primary film material studied in this work is amorphous silicon (Si). Physical morphology of the microparticles is examined with scanning electron microscopy (SEM). Methods employed to characterize optical activity of the microparticles include: polarimetry, spectrophotometry, and spectroscopic ellipsometry (SE). The produced chiral microparticles exhibit optical activity: optical rotation (OR) and circular dichroism (CD - in the form of differential circular transmission (DCT)). Significant findings include: (a) we observe the largest optical rotatory power ever reported in scientific literature, 11◦/μm at 610 nm wavelength for a Si film; (b) for the helical thin films, there is one dominant DCT band in the measured wavelength range; however for microparticle suspensions and powders, there exist two DCT bands: one broad band at long wavelengths, and one narrow band in the short wavelength range; compared to their thin film forms, microparticle suspensions and powders have inverted sign for the broad DCT band. A discrete dipole approximation (DDA) model is employed to calculate optical response (e.g. extinction, scattering, and absorption cross-sections) of the microparticles, so as to enable us to understand the effects of different structural parameters of the microparticles on their optical response. Calculation confirms that optical activity of chiral microparticles is due to coherent light scatterings with the chiral structures of the particles. The inversion in sign of the broad DCT bands of microparticle suspensions and powders is likely due to the averaging effect from random orientation of the helical microparticles, as is indicated both from experimental results and from calculation. / Thesis (Ph.D, Physics, Engineering Physics and Astronomy) -- Queen's University, 2012-07-06 09:59:20.751

Avec une réduction de la taille des composants en constante progression, le domaine de la microélectronique, et d'une manière plus globale, le domaine de la nanofabrication se doit de posséder des outils de métrologie dimensionnelle performants. L'amélioration de points pertinents comme la rapidité, la précision et la répétabilité devrait permettre un suivi en temps réel de l'évolution des procédés et ainsi améliorer les rendements de production tout en limitant les pertes imputables aux dérives des procédés. Dans ce cadre, la scattérométrie, technique optique de métrologie dimensionnelle basée sur l'analyse de la lumière diffractée, a montré, suivant les cas, des capacités à répondre aux exigences des applications temps réel. Elle se décompose en une phase de mesure, effectuée par un dispositif expérimental (ellipsomètre dans notre cas) et une phase de résolution de problème inverse. La méthode utilisée pour traiter cette dernière phase conditionne la compatibilité avec le temps réel. La méthode des bibliothèques et une méthode utilisant des réseaux de neurones artificiels présentent les qualités requises. La première a déjà été validée pour le suivi d'un procédé de gravure en microélectronique et la seconde a été testée uniquement en statique à la suite d'une étape technologique. Cette thèse a pour but d'évaluer l'apport des réseaux de neurones en scattérométrie dynamique. Basée sur des critères qualitatifs et quantitatifs, cette étude souligne également la difficulté de comparer avec objectivité les différentes techniques de métrologie. Ces travaux dressent également une comparaison minutieuse de ces deux méthodes adaptées au temps réel afin d'en dégager les spécificités de fonctionnement. Enfin, la scattérométrie par l'approche des réseaux de neurones est étudiée dans le cas de la gravure de résine par plasma. En effet, il s'agit d'un procédé de fabrication en microélectronique pour lequel le contrôle in-situ est un enjeu important dans le futur. / The decrease of the components size has been widely witnessed in the past decades. Hence, microelectronic field, and more generally speaking, nanofabrication requires very efficient dimensional metrology tools. The improvement of relevant points like the speed, the accuracy and the repeatability of the tool will allow real time process monitoring and thus enhance the production yield while restricting the waste due to process drift. In this framework, scatterometry, an optical dimensional metrology technique based on the analysis of the diffracted light, has proven its ability to meet real time applications requirements. It is composed of a measuring phase, done by an experimental setup (ellipsometer in our case) and an inverse problem resolution phase. The chosen method used in order to process this last step determines the compatibility with real time. Library method and a method based on artificial neural networks possess the required qualifications. The first one has already been validated for etching process monitoring in microelectronics and the second one has been validated only on static cases after a technological step. This PhD involves assessing neural networks for dynamic scatterometry. Based on qualitative and quantitative criteria, this study underlines the difficulty of comparing different metrology techniques objectively. This work draws up a meticulous comparison of these two real time adapted methods in order to bring out their working specifications. Finally, scatterometry using neural networks is studied on a resist etching plasma case. In fact, this is a microelectronic fabrication process for which in-situ control is of an important concern in the future.

L’objectif principal de ce travail est d’étudier in-situ et ex-situ l’interaction du dioxyde de carbone (CO2) avec les films minces de polystyrène et les surfaces par deux techniques principales : la réflectivité des rayons X (RRX) et l’ellipsométrie.Dans cette thèse, nous abordons l’étude des propriétés physiques de films de polystyrène (PS) à l’état confiné (films minces) et leur évolution lors de leur exposition à du CO2 sous pression. Nous démontrons par RRX et par ellipsométrie sur les mêmes films que la densité et l’indice de réfraction augmentent quand l’épaisseur du film diminue. Nous confirmons la diminution de Tg pour des films de PS d’épaisseur inférieure à 70 nm selon la loi empirique de Keddie [1]. Ces deux résultats pourraient signifier que les films ultraminces présentent une certaine organisation des chaines.Nous abordons ensuite le comportement des films ultra minces de PS exposés à du CO2 en fonction de la pression de CO2 par réflectivité de rayons X (RRX) faite au rayonnement synchrotron (ESRF ligne ID10B). Nous suivons in-situ le gonflement et le dégonflement du film mince d’épaisseur 7 nm lors de la pressurisation et la dépressurisation du CO2. Par calcul de l’évolution de la densité électronique dans le film, nous mettons en évidence l’existence d’une pression de transition vitreuse Pg et d’un gonflement rémanent lié à la présence de molécules de CO2 piégées dans le film [2].Nous proposons par la suite une étude ex-situ par RRX du gonflement et de l’évolution au cours du temps des films de PS gonflés. Nous observons que les films minces présentent une plus grande capacité de gonflement et dégonflement au cours du temps par opposition aux films plus épais. Nous constatons que ce phénomène est fortement dépendant du taux de dépressurisation. En effet, nous constatons que la dépressurisation rapide renforce considérablement, non seulement le gonflement du film, mais aussi son dégonflement au cours du temps. Nous mettons alors en évidence que le taux de dépressurisation régit clairement l'état final des films gonflés, à savoir l’état métastable ou l’état vitreux.Finalement, nous étudions l’influence du gonflement du film par le CO2 sur l’évolution de la température de transition vitreuse. Cette étude est effectuée principalement par ellipsométrie. Nous montrons que ces films qui ne présentaient qu’une valeur unique de Tg avant exposition, présentent après exposition trois valeurs de Tg. En suivant l’évolution de l’épaisseur de ces films gonflés en fonction de la température, nous proposons des réponses qui peuvent expliquer les différentes Tg observées. En outre, nous mettons en évidence l’existence du CO2 stocké dans les films. Après un recuit au dessus de 150°C, les films reprennent le même comportement qu’avant exposition au CO2 qui est loin d’être l’état d’équilibre du polymère massique. Nous confirmons par ce fait l’existence de fortes forces de rappel dans les films ultraminces qui les ramènent vers leurs états initiaux de non équilibre. Ce résultat est à rapprocher de celui concernant l’évolution de la Tg due au confinement dans les films ultraminces avant exposition. / The aim of this work is to study in-situ and ex-situ interaction of carbon dioxide (CO2) with thin films of polystyrene and surfaces by two main techniques: the X-ray reflectivity (XRR) and ellipsometry.In this thesis, we address the study of the physical properties of polystyrene films (PS) in the confined state (thin films) and their evolution when exposed to CO2 pressure. We demonstrate by XRR and ellipsometry in the same films that the density and the refractive index increase when the film thickness decreases. We confirm the decrease of Tg for PS films of thickness less than 70 nm according to the empirical law of Keddie [1]. Both results could mean that ultrathin films have a certain organization of channels.We then discuss the behavior of PS ultra thin films exposed to CO2 as a function of CO2 pressure by XRR made at synchrotron radiation (ESRF ID10B line). We monitor in situ the swelling and deswelling of the 7 nm thin film thickness upon pressurization and depressurization of CO2. By calculating the evolution of the electron density in the film, we highlight the existence of a glass transition pressure Pg and a residual swelling due to the presence of CO2 molecules trapped inside the film [2].We propose then an ex-situ XRR study of swelling and kinetic of deswelling for PS swollen films. We observe that the thin films have a higher swelling and deswelling capacity compare to the thicker films. We note that this phenomenon is highly dependent to the depressurization rate. Indeed, we find that the rapid depressurization greatly enhances not only the swelling of the film, but also its deswelling over time. We then highlight that the rate of depressurization clearly governs the final state of swolen films, to say the metastable state or glassy state.Finally, we study the effect of film swelling by CO2 on the evolution of the glass transition temperature. This study is carried out mainly by ellipsometry. We show that these films which showed only a single Tg value before exposure, after exposure has three values of Tg completely independent of film thickness. By following the thickness evolution of these swollen films as a function of temperature, we offer answers that can explain the different Tg values observed. In addition, we highlight the existence of CO2 stored in these films. After annealing above 150 ° C, the films show the same behavior as before exposure to CO2 which is far from the equilibrium state of the bulk polymer. We confirm therefore the existence of strong restoring forces in ultrathin films that bring them back to their initial states of non-equilibrium. This result presents similarities to that concerning the evolution of the Tg due to confinement in ultrathin films before exposure.

In present work we studied the processes of phase transition of five luminescent liquid-crystals by using emission ellipsometry technique. The samples studied present different mesophases liquid crystalline between the solid crystalline and liquid isotropic phases. The samples were characterized by optical absorption, photoluminescence, and emission ellipsometry technique (EE) in function of sample temperature. The EE measurement allowed us obtain the Stokes parameters, the degree of polarization of emitted light, and ellipticity and rotation angle of the polarization ellipse. In addition, we founded that the degree polarization, the ellipticity, and the rotation angle of polarization ellipse of emitted light change when the sample temperature increase. It was possible to correlate those changes with the phase transition temperature for each sample in concordance with the literature data. Finally, we propose empirical model to explain our results using the emission ellipsometry technique to determine the phase transition temperature of luminescent liquid crystal systems. / Neste trabalho foram estudados processos de transição de fase de cinco cristais líquidos luminescentes através da técnica de elipsometria de emissão. Os compostos estudados possuem mais de uma mesofase líquido-cristalina entre o estado sólido-cristalino e a fase líquido-isotrópica. As amostras foram caracterizadas opticamente pelas técnicas de medidas de absorção óptica, fotoluminescência e elipsometria de emissão (EE) em função da temperatura. A medida de EE nos permitiu obter os parâmetros de Stokes, o grau de polarização, a elipsidade e o ângulo de rotação da luz emitida, sendo possível verificar as mudanças no grau de polarização, na elipsidade da luz e no ângulo de rotação da elipse de polarização da luz emitida pelas amostras com a variação da temperatura das amostras. Foi possível correlacionar essas mudanças da luz emitida pelas amostras com as transições de fase desses materiais e comprovadas por dados da literatura, com boa concordância. Finalmente, propomos um modelo empírico para explicar nossos resultados e certificar a técnica EE para determinação da temperatura de transição de fase em sistemas líquido-cristalinos luminescentes. / Mestre em Física

Este trabalho visou investigar as interações entre enzimas e polímeros em solução e a adsorção das mesmas sobre superfícies sólidas e para isto foi dividido em duas partes distintas. Na primeira parte a influência do poli(etileno glicol) (PEG), polímero considerado inerte e utilizado em muitos processosbiotecnológicos, na atividade enzimática e na conformação estrutural de enzimas foi estudada através de medidas de espectrofotometria- UV, calorimetria e espalhamento de raio-X de baixo ângulo (SAXS). Foram escolhidas neste estudo as enzimas glicose-6-fosfato desidrogenase (G-6-PDH) e hexoquinase (HK), que são enzimas largamente aplicadas em análises clínicas na determinação de glicose no sangue, e também a enzima álcool desidrogenase (AD), utilizada para determinação de concentração de álcool. Foram obtidos resultados quantitativos, numa faixa de baixa concentração de enzima, que indicam uma forte influência de PEG na atividade das enzimas estudadas. Medidas de calorimetria revelaram que PEG interage não só com a enzima em estudo mas também com a coenzima NADP+. Numa faixa de concentração maior, os resultados de SAXS mostraram que PEG exerce também um efeito significativo no processo de agregação das enzimas. Acima de tudo, foi evidenciado neste estudo que PEG não pode ser tratado como um polímero inerte, pois ele interfere na atividade e conformação de enzimas. As enzimas são macromoléculas complexas e PEG interage de forma diferenciada com cada enzima, merecendo atenção especial caso a caso. Na segunda parte do trabalho, o estudo da adsorção de hexoquinase (HK) e creatina fosfoquinase (CPK) sobre lâminas de silício foi realizado através de medidas de ângulo de contato, elipsometria in situ e microscopia de força atômica (AFM) em água. A CPK é uma enzima bastante utilizada em kits de determinação de creatina no sangue e no diagnóstico de desordens musculares. Este trabalho revelou que o mecanismo de adsorção de CPK sobre silício depende fortemente do pH. Em pH 4, 7 ou 9 CPK adsorveu mantendo a mesma conformação que tinha em solução. Medidas de espectrofotometria UV-Vis revelaram uma mudança no pH ótimo para atividade enzimática de CPK de 6,8 para 9 após adsorção. A HK imobilizada em esferas de vidro mostrou atividade maior do que HK imobilizada nas placas. A reutilização das esferas e placas recobertas com HK foi testada e observou-se que as atividades das enzimas adsorvidas no substrato esférico foram mantidas. Entretanto, nas placas revestidas a atividade foi perdida. As enzimas imobilizadas sobre esferas puderam ser reutilizadas pelo menos 3 vezes, mantendo a atividade por um período de até 3 semanas. / This work aimed to investigate the interactions between enzymes and polymers in solution and also the adsorption behavior of these enzymes on solid surfaces. For that reason it was divided into two parts. In the first part, the influence of poly(ethylene glycol) (PEG), a polymer considered inert and utilized in several biotechnological processes, on the enzymatic activity and structure of the enzyme was studied by means of UV spectrophotometry, calorimetric titration, circular dichroism (CD) and small angle X-ray scattering (SAXS). Glucose-6-phosphate dehydrogenase (G-6-PDH) and hexokinase (HK) were chosen because of their large application in clinical analysis for determination of glucose in the blood strain. Alcohol dehydrogenase (AD), which is widely used to determine alcohol concentration in various samples, was also used. Quantitative results, in a low enzyme concentration range, indicated a strong influence of PEG on the enzymes activity. The calorimetric measurements revealed no favorable interactions between enzyme and polymer, but indicated favorable interactions between PEG and co-enzyme NADP+. In a higher concentration range, SAXS results showed that PEG also exerts a significant effect on the enzyme aggregation process. This work showed that PEG shall no longer be treated as an inert polymer since it interferes in the enzyme activity and structure. The enzymes are complex macromolecules and PEG interacts differently with each one, deserving special attention in each case. In the second part of the work, the adsorption behavior of creatine phosphokinase (CPK) and hexokinase (HK) onto silicon wafers was studied by means of contact angle measurements, in situ ellipsometry and atomic force microscopy (AFM) in water. CPK was chosen due to its large application on the diagnosis of several muscle disorders. This work revealed that the adsorption mechanism of CPK on silicon surfaces is strongly dependent on pH. At pH 4, 6.8 or 9, CPK adsorbed keeping the same conformation as in solution. pectrophotometric measurements revealed a shift on the optimum pH from 6,8 to 9 upon CPK adsorption. HK adsorbed onto glass beads showed higher activity than HK immobilized on silicon wafers. HK covered glass beads could also be reused three times and for a period of at least three weeks. In the contrary, HK covered silicon wafers could not be reused. For practical purposes, HK covered glass beads showed to be a better “biosensor” than HK covered silicon wafers.

Les matériaux à base de TiO2 ont déjà été très étudiés. En particulier, les films minces mésoporeux cristallins de TiO2 montrent une activité photo-catalytique élevée due à leur surface spécifique incomparable. Cependant, l'étude et l'optimisation de la photocatalyse dans un tel milieu poreux n'est pas si simple car le processus catalytique dépend de plusieurs paramètres environnementaux et structuraux. Les activités de recherche se sont essentiellement focalisées sur (i) la conception de couches mésoporeuses à base de TiO2 avec une composition et une nanostructure variée et (ii) leur mise en œuvre comme plateforme pour une étude fondamentale par ellipsométrie concernant le processus photocatalytique. Des films mésoporeux ont été produits en couplant la chimie sol-gel, et des procédés de dépôt. Parmi des outils de caractérisation analytiques, 2D-GISAXS, ellipsométrie, SEM-FEG, HR-TEM et WAXS sont notamment les techniques qui ont été utilisées pour obtenir des informations. Premièrement, un film mésoporeux de TiO2 a été analysé par ellipsométrie in-situ pour des investigations fondamentales sur les cinétiques de son processus photocatalytique dans l'air en fonction de la composition environnementale et du polluant organique. La grosse quantité d'information obtenue a d'ailleurs permis la proposition de mécanismes de photo-dégradation dans les conditions étudiées. Dans la seconde partie, des films minces mésoporeux mixtes TiO2/SiO2 avec des propriétés optiques ajustables ont été préparées. Une étude structurale a été conduite sur le réseau et la composition des films poreux. L'ellipsométrie a été également mis en œuvre pour étudier leur le activité photocatalytique. / TiO2-based materials have been extensively studied as potential material to be used in photocatalysis. In particular crystalline mesoporous thin films exhibit increased photocatalytic activities due to their exceptionally high surface area. However the study and the optimization of the photocatalysis in such porous media is not easy to be done due to the fact that the catalytic process is highly dependent from several environmental and structural parameters. The research activities of this thesis were essentially focused on (i) the fabrication of mesoporous TiO2-based photoactive thin films with tunable composition and nanostructure and (ii) their utilization as platform for fundamental study of the photocatalytic process by ellipsometry. The mesoporous films with tunable nanostructure will be fabricated by coupling sol-gel chemistry and highly controlled liquid deposition techniques. Among modern analytical tools, 2D-GISAXS, ellipsometry and ellipso-porosimetry, SEM-FEG, HR-TEM and WAXS, were used to obtain a large set of relevant information. In the first part, a model TiO2 mesoporous film was analysed by ellipsometry for fundamental investigations of the photocatalytic process kinetics in air as function of the environmental and the organic pollutant. The information obtain by ellipsometry has allowed the proposition of photodegradation mechanisms in the studied conditions. In the second part, composite mesoporous TiO2/SiO2 films with tunable optical properties were fabricated by sol-gel chemistry. A structural study on the films porous network and composition was conducted. In-situ ellispometry was also used to study the photocatalytic activity.

Ce mémoire rapporte les études de protéines amyloïdes en interaction avec des membranes modèle afin d’établir une relation structure toxicité. Nous avons choisi différents modèles membranaires (monocouches, bicouches) de composition lipidique et charges différentes et utilisé différentes méthodes physico-chimiques afin de caractériser les interactions des protéines amyloïdes avec les membranes.Nous avons montré l’importance de la contribution électrostatique dans les interactions de la protéine amyloïde HET-s (218-289) et ses mutants avec les membranes modèles.L’ellipsométrie a démontré que les mutants toxiques de HET-s (218-289) (M8, WT.Y1Y2V2) perturbentfortement les monocouches lipidiques à l’interface air-eau. La structure riche en feuillets β antiparallèles des protéines àl’interface air-eau et dans l’interaction avec les monocouches de lipides a été démontrée par la spectroscopie PMIRRAS (Polarization Modulation – Infrared Reflection Absorption Spectroscopy). Nous avons établie que l’interface air-eau peut modifier l’agrégation des protéines amyloïdes. A l’aide de la spectroscopie de fluorescence, la spectroscopie PWR (Plasmon-Waveguided Resonance) et la spectroscopie ATR-FTIR (Attenuated Total Reflection – Fourier Transform Infrared), nous avons mis en évidence que la protéine toxique M8 adopte une structure riche en feuillets β antiparallèles en altérant fortement l’intégrité des bicouches lipidiques. Au contraire, la protéine non toxique WT se structure en feuillets β parallèles dans ces interactions et elle ne perturbe pas l’homogénéité des membranes. La toxicité de la protéine M8 semble liée à son organisation différente et à sa capacité à réorganiser les membranes.Nos résultats confortent également l’hypothèse de la toxicité des oligomères amyloïdes.Une étude sur la fabrication d’une cellule microfluidique pour la séparation de différents types d’autoassemblage afin de les détecter et de les étudier en interaction avec des liposomes par spectroscopie infrarouge est présentée. Une cellule microfluidique de CaF2 de 8 μm d’épaisseur de canaux est obtenue et est utilisée pour la détection d’une protéine de test. / This manuscript reports the studies of amyloid proteins in interaction with membrane models in order to establish their structure-toxicity relationship.Membrane models (monolayer, bilayer) of different charge and lipid composition were used. We used various physico chemical methods to characterize the interaction of these amyloid proteins with membranes.We showed the importance of the electrostatic contribution in the interactions of the amyloid protein HET-s(218-289) and its mutants with model membranes.Ellipsometry showed that the toxic mutants of HET-s (218-289) (M8, WT.Y1Y2V2) strongly disturbed thelipid monolayers at the air-water interface. The structure rich in antiparallel β sheets of auto-assembled proteins at theair-water interface and in interaction with lipid monolayers at the air-water interface has been demonstrated by the PMIRRAS spectroscopy (Polarization Modulation - Infrared Reflection Absorption Spectroscopy). We established that theair-water interface can change the aggregation properties of amyloid proteins.By using fluorescence spectroscopy, PWR spectroscopy (Plasmon Resonance-Waveguided spectroscopy) and ATR-FTIR spectroscopy (Attenuated Total Reflection - Fourier Transform Infrared spectroscopy), we found that thetoxic protein (M8) adopted a structure rich in antiparallel β sheets greatly altered the integrity of lipid bilayers. Incontrast, the protein non-toxic (WT) organized in a structure rich in parallel β sheets in these interactions and it did notdisturb the homogeneity of the membranes. The toxicity of the protein M8 appears to be related to its differentorganization and its ability to rearrange membranes.Our results also support the hypothesis of the toxicity of amyloid oligomers.A study on the fabrication of a microfluidic cell for the separation of different aggregation states of amyloidproteins in order to detect these assemblies and to study their interaction with liposomes by infrared spectroscopy is presented. A CaF2 microfluidic cell with channels of 8 μm of thickness was obtained and was used for the detection of atested protein.

Pour réaliser des fonctions électroniques sur support souple, le transistor en couches minces (TFT) est indispensable. Cette thèse a pour objectif d’approfondir les connaissances sur ces dispositifs.L’état de l’art est synthétisé dans le chapitre 1. Cette partie présente tout d’abord les TFT et justifie l’utilisation de l’oxyde d’indium gallium zinc (IGZO). Ensuite les propriétés de cet oxyde semi-conducteur amorphe sont traitées ; et enfin le chapitre fait état des résultats obtenus avec des TFT en IGZO.Le chapitre 2 établie un lien entre les propriétés de l’IGZO et le dépôt par pulvérisation cathodique. L’étude des films a été réalisée par ellipsométrie spectroscopique. Celle-ci a mis en évidence des variations dans les propriétés optiques dues au temps de dépôt, à la concentration en oxygène et à la position sur le substrat. Ces résultats ont été comparés à des mesures de résistivité, pour comprendre plus précisément la cause de ces variations.Le chapitre 3 élabore un procédé complet permettant de réaliser des TFT sur support souple. Le choix des différents matériaux est discuté, et les différents outils de procédés sont adaptés afin de réaliser ces dispositifs. Les TFT obtenus sont caractérisés en fonction du temps de recuit et sous flexion. Ils ont atteint des mobilités 10 cm².V-1.s-1.Le chapitre 4 étudie le dépôt d’IGZO par impression jet d’encre. Une encre a été formulée et les différents paramètres d’impression ajustés. Afin de comparer les différentes techniques de dépôt, des TFT avec canal en IGZO imprimé ont été réalisé et les films imprimés ont été caractérisé par ellipsométrie spectroscopique. Ces dispositifs ont atteint des mobilités de 0,4 cm2.V-1.s-1. / In order to carry out electronics functions on flexible substrate, thin film transistor is essential. The aim of this thesis is to increase knowledge on this device.State of art of IGZO TFT is summarized in chapter 1. This part presents thin film transistor and justify the choice of IGZO as the semiconductor material. Then, properties of this amorphous oxide semiconductor are discussed. Finally, this chapter presents the results obtained in the literature for IGZO based thin film transistor.Chapter 2 establishes a link between IGZO properties and sputtering deposition. Films are studied by spectroscopic ellipsometry. Experiments show variations in optical properties due to deposition time, oxygen content and position on the wafer. Resistivity measurements are carried out to understand more deeply the causes of these variations.Chapter 3 develops a complete process to achieve TFT on flexible substrate. The choice of different materials and processes is discussed. The performances of the TFT are investigated versus the annealing time and characterized under mechanical stress. Mobility up to 10 cm2.V-1.s-1 can be achieved after an annealing at 300°C during 1h30. Mechanical stresses show a degradation of the transistor induced by cracks in the oxide layer.Chapter 4 focuses on IGZO's deposition by inkjet printing. An ink is formulated using metallic salts and a solvents mixture. The parameters of the printing system are also optimized. To compare the different techniques of deposition, printed IGZO TFTs are characterized and compared with the one fabricated with the standard PVD deposition technique. Mobility is relatively lower and equals 0.4 cm2.V-1.s-1.

Diploma thesis deals with preparation of multilayered organic-inorganic nanostructures via PECVD technology and analysis of optical properties of these layers by spectroscopic ellipsometry. The theoretical part handles the definition of thin layers, layered and gradient nanostructures, plasma enhanced chemical vapor deposition and principles of spectroscopic ellipsometry. In the experimental part, used materials and chemicals are described, afterwards follow a complete description of the apparatus used for sample preparation and a description of the sample preparation procedure. The results part consists of methodology of preparing material models necessary for ellipsometric measurements and evaluation of optical properties of deposited nanolayers.

This diploma thesis deals with methodology of thin film thickness determination using X-ray radiation of silver anode which provides radiation with energy of 2984,3 eV. This energy is twice as high as the standard aluminium radiation which allows a measurement of new photoelectron lines with higher bonding energy and it also provides thanks to the higher photoelectron energy greater information depth. In order to get the right results it was necessary to calibrate the spectrometer Kratos Axis Supra in the silver anode mode first and found out the form of the transmission function. The determination of the thickness of the thin layer was demonstrated by the comparation of the ratio of different photoelectron lines intensities with the theoretical model. For that purpose was specifically used the Si 1s and Si 2p peak bound in the substrate in the Si-Si bonding or in the thin oxid layer in the Si-O bonding. The results show that for thin SiO2/Si film thickness determination is the best to use the intensity ratio of only one photoelectron line. A silver anode however provides greater information depth.