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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
221

Feasibility of Ellipsometric Sensor Development for Use During PECVD SiOx Coated Polymer Product Manufacturing

Helms, Daniel Lynn 01 September 2009 (has links)
Polymeric materials have provided pathways to products that could not be manufactured otherwise. A new technology which merges the benefits of ceramics into these polymer products has created materials ideally suited to many different industries, like food packaging. Nano Scale Surface Systems, Inc. (NS3), a company which coats polymers with ceramic oxides like SiO2 through a process known as plasma enhanced chemical vapor deposition (PECVD), was interested in the feasibility of an in line measurement system for monitoring the deposited films on various polymer products. This project examined two different coated polymer products, polyethylene terephthalate (PET) beverage containers and biaxially oriented PET food packaging, commonly known as plastic wrap in an effort to determine the feasibility of an ellipsometry based measurement system for NS3’s purpose. Due to its extensive use in the semiconductor industry for monitoring films deposited on silicon, a measurement systems known as ellipsometry, adept at monitoring the thickness and refractive index of thin films deposited on various substrates, appeared to be an ideal system for the measurement of ceramic oxides deposited on various polymer substrates. This project set out to determine the feasibility of using an ellipsometry based measurement system to monitor ceramic films, specifically silicon oxides (SiOX), deposited on polymer products. A preliminary experiment determined linearly polarized light could induce a discernible change in polarized light traversing a coated beverage container relative to an uncoated container. However, the experiment lacked repeatability due to the measurement apparatus’ cheap setup, prompting the construction of a null (conventional) ellipsometer for further research. The curved surface of the beverage containers under study unnecessarily complicated the feasibility study so further research examined PECVD SiOX on biaxially oriented PET instead. Characterization of the PECVD SiOX-PET material was divided into three experiments, with the first two analyzing the SiOX film and PET substrate separately while the third analyzed them together. To assist with the characterization experiments, NS3 provided samples, both SiOX coated and uncoated, of various deposition thicknesses on silicon and biaxially oriented PET substrates. Null ellipsometry was used in conjunction with spectroscopic reflectometry to characterize the refractive index and thickness of the deposited films. The combined measurement systems found the refractive index of the deposited SiOX films to be between 1.461 and 1.465. The measured thicknesses resulting from the two measurement systems coincided well and were usually 10-20 nm thicker than the predicted thicknesses by the deposition processing parameters. Abeles’ method and monochromatic goniometry were attempted; however, the results had to be discarded due to irrecoverable errors discovered in the reflectance measurement. X-ray photoelectron spectroscopy (XPS) data provided by NS3 showed the deposited SiOX films to be homogeneous with stoichiometries between 2.15 and 2.23. Characterization of the uncoated biaxially oriented PET required numerous measurement systems. From spectroscopic transmission, trirefringent anisotropy was discovered, intertwined with thickness variations in the PET foil. Goniometry measurements displayed distinct interference curves resulting from rear interface reflections interfering with front interface reflections from the PET sample. Subsequent goniometric models produced multiple solutions due to an unknown optical phenomenon, probably scattering, which degraded the reflection measurements. However, a combined measurement technique utilizing goniometry and differential scanning calorimetry (DSC) determined the refractive indices of the polymer to be NX = 1.677, NY = 1.632 and NZ = 1.495 with a thickness of 11.343 μm and a volume fraction crystallinity of 35-41%. Utilizing the measured refractive indices, ellipsometric models produced only an adequate fit of the measured data due to the presence of depolarization caused by non-uniform PET thickness and scattering resulting from embedded microscopic crystallites. The majority of the error in the ellipsometric data was observed in the Δ measurement. XPS measurements of SiOX deposited on polypropylene (PP) provided by NS3 showed a heterogeneous interphase layer between the deposited oxide and the polymer substrate where the composition of the layer was continually changing. A similar region, which violates the homogenous assumption the ellipsometric model relied on, was anticipated for the SiOX-PET samples under investigation. The use of an effective medium approximation (EMA) to represent the interphase region was attempted, but failed to provide a decent model fit of the measured data. Depolarization and high optical anisotropy caused by the polymer substrate in combination with a heterogeneous interphase region and the effects of the deposited SiOX layer all interacted to prevent ellipsometric modelling of the null ellipsometry measurements conducted. Goniometry measurements were conducted on the thickest deposited SiOX film (approximately 100 nm) which allowed for the refractive index of the film to be approximated through Abeles’ method (n = 1.46); however the validity of this approximation was questionable given the presence of interference fringes resulting from interference between reflections at both the front and rear interfaces of the material. From the experiments conducted, it was concluded that null ellipsometry with conventional ellipsometric models could not adequately measure a SiOX film’s refractive index or thickness when deposited on biaxially oriented PET. The reasons for the failure were interactions between multiple sources of error which led to both measurement errors and inaccurate model assumptions. Use of generalized ellipsometry, possibly with spectroscopic ellipsometry, may overcome the failures of conventional ellipsometry when studying this complex optical material.
222

A novel biotinylated surface designed for QCM-D applications

Nilebäck, Erik January 2009 (has links)
<p> </p><p>Control of protein immobilization at sensor surfaces is of great interest within various scientific fields, since it enables studies of specific biomolecular interactions. To achieve this, one must be able to immobilize proteins with retained native structure, while minimizing non-specific protein binding. The high affinity interaction between streptavidin (SA) and biotin is extensively used as a linker between a surface, where SA is immobilized, and the (biotinylated) molecule of interest. Self- assembled monolayers (SAMs) of poly- and oligo ethylene glycol (PEG and OEG) derivatives have been proven in literature to minimize non-specific protein binding, and biotin-exposing SAMs have been shown efficient for immobilization of SA.</p><p>The aim of this master's thesis project was to develop biotinylated gold surfaces for quartz crystal microbalance with dissipation monitoring (QCM-D) applications through the self-assembly of mixed monolayers of thiolated OEG (or PEG) derivatives with or without a terminal biotin head group. For this, different thiol compounds were to be compared and evaluated. For the systems under study, the required biotin density for maximum specific SA immobilization was to be established, while keeping the non-specific serum adsorption at a minimum. Model experiments with biotinylated proteins immobilized to the SA-functionalized surfaces were to be performed to evaluate the possibilities for commercialization.</p><p>A protocol for the preparation of a novel biotinylated surface was developed based on the immersion of gold substrates in an ethanolic incubation solution of dithiols with OEG chains (SS-OEG and SS-OEG-biotin, 99:1) and found to give reproducible results with respect to low non-specific protein binding and immobilization of a monolayer of SA. The modified surfaces allowed for subsequent immobilization of biotinylated bovine serum albumin (bBSA) and biotinylated plasminogen (bPLG). PLG was the subject of a challenging case study, using a combination of QCM-D and surface plasmon resonance (SPR), where the immobilized protein was subjected to low molecular weight ligands that were believed to induce conformational changes. The high control of the surface chemistry allowed for the interpretation of the increased dissipation shift upon ligand binding in terms of conformational changes.</p><p>An obstacle before commercialization of the described biotinylated surfaces is that they do not seem stable for storage > 7 days. The reasons for this have to be investigated further.</p>
223

On the Development of Mucin-based Biomaterial Coatings

Sandberg, Tomas January 2008 (has links)
Owing to their key role in mucosal functioning as surface barriers with biospecific interaction potentials, the mucins are interesting candidates for use as surface modifiers in biomaterials applications. In this work, “mild” fractionation procedures were used to prepare mucins of bovine (BSM), porcine (PGM), and human (MG1) origin. Biophysicochemical analysis showed the prepared mucins to differ in size, charge, conformation, and composition. In turn, these factors were shown to govern mucin adsorption on hydrophilic and hydrophobic model surfaces. To enable for detailed coating analysis, methods for the qualitative and quantitative analysis of mucin-based coatings were developed. Of particular interest, a method for the determination of the fraction of surface-exposed, presumed bioactive proteins in a complex mucin coating was described. It was shown, using microscopy and activation assays, that mucin precoating effectively suppresses the neutrophil response towards a polymeric model biomaterial. Under optimal coating conditions, all mucins performed equally well, thus indicating them to be functionally similar. Coating analysis suggested that efficient mucin surface-shielding is critical for good mucin coating performance. Following a study on the complexation of albumin with preadsorbed mucin, we investigated the effect of mucin precoating on the conformation and neutrophil-activating properties of adsorbed host proteins. We found that mucin precoating greatly reduces the strong immune-response normally caused by adsorbed proinflammatory proteins (IgG and sIgA). Detailed coating analysis revealed that the fraction of surface-exposed protein in the mucin-protein composite influences the neutrophil response. Unexpectedly low neutrophil activation for composites containing near-monolayer concentrations of exposed IgG, suggested IgG to act synergistically with mucin on the surface. Conformational analysis supported this by showing that a preadsorbed mucin layer could stabilize adsorbed IgG through complexation. Our findings link well to the complex in vivo situation and suggest that functional mucosal mimics can be created in situ for improved biomaterials performance.
224

A novel biotinylated surface designed for QCM-D applications

Nilebäck, Erik January 2009 (has links)
Control of protein immobilization at sensor surfaces is of great interest within various scientific fields, since it enables studies of specific biomolecular interactions. To achieve this, one must be able to immobilize proteins with retained native structure, while minimizing non-specific protein binding. The high affinity interaction between streptavidin (SA) and biotin is extensively used as a linker between a surface, where SA is immobilized, and the (biotinylated) molecule of interest. Self- assembled monolayers (SAMs) of poly- and oligo ethylene glycol (PEG and OEG) derivatives have been proven in literature to minimize non-specific protein binding, and biotin-exposing SAMs have been shown efficient for immobilization of SA. The aim of this master's thesis project was to develop biotinylated gold surfaces for quartz crystal microbalance with dissipation monitoring (QCM-D) applications through the self-assembly of mixed monolayers of thiolated OEG (or PEG) derivatives with or without a terminal biotin head group. For this, different thiol compounds were to be compared and evaluated. For the systems under study, the required biotin density for maximum specific SA immobilization was to be established, while keeping the non-specific serum adsorption at a minimum. Model experiments with biotinylated proteins immobilized to the SA-functionalized surfaces were to be performed to evaluate the possibilities for commercialization. A protocol for the preparation of a novel biotinylated surface was developed based on the immersion of gold substrates in an ethanolic incubation solution of dithiols with OEG chains (SS-OEG and SS-OEG-biotin, 99:1) and found to give reproducible results with respect to low non-specific protein binding and immobilization of a monolayer of SA. The modified surfaces allowed for subsequent immobilization of biotinylated bovine serum albumin (bBSA) and biotinylated plasminogen (bPLG). PLG was the subject of a challenging case study, using a combination of QCM-D and surface plasmon resonance (SPR), where the immobilized protein was subjected to low molecular weight ligands that were believed to induce conformational changes. The high control of the surface chemistry allowed for the interpretation of the increased dissipation shift upon ligand binding in terms of conformational changes. An obstacle before commercialization of the described biotinylated surfaces is that they do not seem stable for storage &gt; 7 days. The reasons for this have to be investigated further.
225

Adsorption of polyhydroxyl based surfactants

Matsson, Maria January 2005 (has links)
<p>Adsorption on solid surfaces from solution is a fundamental property of a surfactant. It might even be the most important aspect of surfactant behavior, since it influences many applications, such as cleaning, detergency, dispersion, separation, flotation, and lubrication. Consequently, fundamental investigations of surfactant adsorption are relevant to many areas.</p><p>The main aim of this thesis has been to elucidate the adsorption properties, primarily on the solid/water interface, of a particular class of polyhydroxyl based surfactants: the alkyl glucosides. By the use of ellipsometry, the equilibrium and kinetic aspects of adsorption on titanium dioxide with respect to structural effects has been studied. Furthermore, the effects of small amounts of cationic surfactant additives on the adsorption on silica have been investigated. The results have been compared with similar studies for other nonionic surfactants.</p><p>We have found that the surfactant structure has a strong effect on the adsorption properties. An increase in the surfactant chain length increases the cooperativity of the system. An increase in the head group polymerization decreases the cooperativity and the plateau adsorbed amount at equilibrium. The effect of surfactant structure on the adsorption kinetics depends on the concentration relative to the cmc, while the there is a decrease in the rate of desorption with increasing hydrophobic chain length independent of the concentration. The adsorption/desorption process is concluded to be diffusion driven, as suggested by the model used. When comparing these results with studies on ethylene oxide based surfactants, we conclude that the two types of surfactants exhibit similar trends on surfaces onto which they adsorb.</p><p>Adsorption from binary surfactant solutions is even more interesting than adsorption from single surfactant solutions, since it brings us one step closer to the systems used in applications. In addition, adsorption from a mixture can be very different from adsorption from any of the single surfactants in the mixture. Alkyl glucosides alone do not adsorb on silica, but addition of small amounts of a cationic surfactant to the alkyl glucoside solution allows for adsorption on silica. A comparison between the adsorption and bulk properties has shown that mixed micellization explains most, but not all, effects of the coadsorption properties. Changing the pH in the mixed systems reveals that a surfactant with a pH-dependent charge and the ability to adapt its charge to the environment, e.g. a surface, enhances the adsorbed amount over a wider range of pH values than a purely cationic surfactant.</p><p>It is well known that alkyl glucosides and ethylene oxides adsorb differently on different types of hydrophilic surfaces. As a consequence, replacing ethylene oxides with alkyl glucosides might not be all straight-forward; however, we have shown that the effect of the surface can be eliminated by the use of a cosurfactant.</p>
226

Elaboration of nanocomposites based on Ag nanoparticles embedded in dielectrics for controlled bactericide properties / Elaboration of thin nanocomposite layers based on Ag nanopartiles embedded in silica for controlled biocide properties

Pugliara, Alessandro 27 September 2016 (has links)
Les nanoparticules (NPs) d'Ag sont très utilisées dans le secteur de la santé, dans l'industrie alimentaire et dans les produits de consommation pour leurs propriétés antimicrobiennes. Le grand rapport surface sur volume des NPs d'Ag permet une augmentation importante du relargage d'Ag comparé au matériau massif et donc une toxicité accrue vis à vis des micro-organismes sensibles à cet élément. Ce travail de thèse présente une évaluation des propriétés antimicrobiennes de petites NPs d'Ag (<20 nm) enrobées dans des matrices de silice sur la photosynthèse d'algues vertes. Deux techniques d'élaboration par voie physique ont été utilisées pour fabriquer ces nanocomposites: (i) l'implantation ionique à basse énergie et (ii) la pulvérisation d'Ag couplée avec la polymérisation plasma. Les propriétés structurales et optiques de ces nanostructures ont été étudiées par microscopie électronique à transmission, réflectivité et ellipsométrie. Cette dernière technique, couplée à un modèle basé sur l'approximation quasi-statique de type Maxwell-Garnett, a permis la détection de petites variations dans la taille et la densité des NPs d'Ag. Le relargage d'argent de ces NPs d'Ag enrobées dans des diélectriques a été mesuré par spectrométrie de masse après immersion dans de l'eau tamponnée. La toxicité à court terme de l'Ag sur la photosynthèse d'algues vertes, Chlamydomonas reinhardtii, a été évaluée par fluorométrie. L'enrobage des nanoparticules dans un diélectrique réduit leur interaction avec l'environnement, et les protège d'une oxydation rapide. La libération d'Ag bio-disponible (impactant sur la photosynthèse des algues) est contrôlée par la profondeur à laquelle se trouvent les NPs d'Ag dans la matrice hôte de silice. Cette étude permet d'envisager le design de revêtements à effet biocide contrôlé. En couplant les propriétés antimicrobiennes de ces NPs d'Ag enrobées à leur qualité d'antenne plasmonique, ces nanocomposites peuvent être utilisés pour détecter et prévenir les premières étapes de la formation de biofilms sur des surfaces. Ainsi, une dernière partie de ce travail est dédiée à l'étude de la stabilité et de l'adsorption de protéines fluorescentes Discosoma rouges recombinantes (DsRed) sur ces surfaces diélectriques avec la perspective du développement de dispositifs SERS. / Silver nanoparticles (AgNPs) because of their strong biocide activity are widely used in health-care sector, food industry and various consumer products. Their huge surface-volume ratio enhances the silver release compared to the bulk material, leading to an increased toxicity for microorganisms sensitive to this element. This work presents an assessment of the biocide properties on algal photosynthesis of small (<20 nm) AgNPs embedded in silica layers. Two physical approaches were used to elaborate these nanocomposites: (i) low energy ion beam synthesis and (ii) combined silver sputtering and plasma polymerization. These techniques allow elaboration of a single layer of AgNPs embedded in silica films at defined nanometer distances (from 0 to 7 nm) beneath the free surface. The structural and optical properties of the nanocomposites were studied by transmission electron microscopy, reflectance spectroscopy and ellipsometry. This last technique, coupled to modelling based on the quasi-static approximation of the classical Maxwell-Garnett formalism, allowed detection of small variations over the size and density of the embedded AgNPs. The silver release from the nanostructures after immersion in buffered water was measured by inductively coupled plasma mass spectrometry. The short-term toxicity of Ag to the photosynthesis of green algae, Chlamydomonas reinhardtii, was assessed by fluorometry. Embedding AgNPs reduces their interactions with the buffered water, protecting the AgNPs from fast oxidation. The release of bio-available silver (impacting on the algal photosynthesis) is controlled by the depth at which AgNPs are located for the given host silica matrix. This provides a procedure to tailor the biocide effect of nanocomposites containing AgNPs. By coupling the controlled antimicrobial properties of the embedded AgNPs and their quality as plasmonic antenna, these coatings can be used to detect and prevent the first stages of biofilm formation. Hence, the last part of this work is dedicated to a study of the structural stability and adsorption properties of Discosoma recombinant red (DsRed) fluorescent proteins deposited on these dielectric surfaces with perspectives of development of SERS devices.
227

Etude structurale de cristaux liquides calamitiques en volume et aux interfaces

Boucher, Nicolas 29 January 2010 (has links)
Les Oligothiophènes sont étudiés depuis une quinzaine d’années dans le cadre du développement d’applications électroniques et plus particulièrement des transistors à effet de champ organiques (OFETs). Dans ce contexte, une série de dialkylterthiophènes a été synthétisée et l’organisation supramoléculaire a été caractérisée en volume à l’aide de différentes techniques. L’analyse enthalpique différentielle nous a, tout d’abord permis de détecter les transitions de phases de chaque composé et de caractériser précisément les températures et les enthalpies de transitions. Nous avons constaté que chaque système présente une ou plusieurs phases cristal-liquides. Leur nature smectique ainsi que leur structure ont été identifiées par microscopie optique polarisée et par diffraction des rayons X. Pour les phases smectiques les plus ordonnées, la diffraction RX a révélé une organisation supramoléculaire à l’intérieur des plans smectiques, symptomatique de phases smectiques-cristallines. Les paramètres de maille de chaque système en phase cristalline ou SmG, ont été déterminés à l’aide d’une méthode de simulation. Les propriétés thermotropes et structurales sont discutées en fonction de la longueur des chaines alkyles.<p>Un composé cristal-liquide de la série précédente, le dioctylterthiophène, a ensuite été caractérisé en couche mince afin d’étudier les effets d’interfaces sur sa structure. La caractérisation, par diffraction des rayons X et microscopie à force atomique, de films minces de différentes épaisseurs, a révélé l’existence d’une phase ‘‘couche mince’’ à partir de leur interface substrat/composé et sur une épaisseur d’environ 30 nm. Au-delà de cette épaisseur, la phase en volume domine l’organisation supramoléculaire de chaque film. Aucune phase similaire (à la phase couche mince) n’a, par contre, été détectée à leur interface air/composé. Deux températures d’isotropisation ont donc été observées à 106°C pour la phase couche mince et à 90°C pour la phase en volume.<p>Enfin, le phénomène de pré-transition de phase à l’interface air/composé de films épais de dihexylterthiophène et de dioctylterthiophène, a été étudié par ellipsométrie. Cette technique nous a permis d’observer la formation progressive d’une couche anisotrope à l’interface air/composé de chaque film quelques degrés au dessus de leur température de transition de phase isotrope/smectique. L’épaisseur de chaque couche anisotrope augmente par couche smectique lorsque la température décroit vers la température de transition de phase isotrope/smectique. À l’approche de cette température de transition, nous avons constaté que chaque épaisseur diverge impliquant un mouillage complet de leur interface air/composé. L’épaisseur de chaque couche anisotrope augmente tout d’abord de manière logarithmique ;puis à l’approche de la température de transition, cette augmentation suit une loi de puissance. <p> / Doctorat en Sciences / info:eu-repo/semantics/nonPublished
228

Caractérisation expérimentale des propriétés micromécaniques et micromorphologiques des alliages base nickel contraints par la croissance d'une couche d'oxydes formée dans le milieu primaire d'une centrale nucléaire / Experimental characterization of micromechanical and microphological properties of nickel base alloys strained by the growth of an ovide payer made in the primary water of a nuclear power plant

Clair, Aurélie 30 November 2011 (has links)
De nombreuses études ont prouvé l’affaiblissement de la résistance de l’alliage 600 lors de l’oxydation en milieu primaire des réacteurs à eau pressurisée. Celle-ci induit la rupture localisée du matériau notamment par fissure intergranulaire. La nature ainsi que la structure de l’oxyde se développant à la surface de l’alliage sont parfaitement connues. Cependant, l’influence mécanique de l’oxyde sur l’alliage n’a pas été explorée. L’objectif de cette étude est d’apporter des connaissances nouvelles sur l’impact de l’oxydation sur la réponse mécanique de l’alliage. Un système d’analyse, basé sur l’utilisation de nanoplots comme marqueurs de position, a été développé et mis en œuvre afin de mesurer des déformations engendrées par l’oxydation puis par une traction. Le traitement statistique de ces données a permis de déterminer des évènements rares de haute déformation. Les échantillons utilisés ont été caractérisés par MEB, TEM, XPS et ellipsométrie spectroscopique afin d’en déduire l’épaisseur de la couche d’oxyde interne contraignant l’alliage. De plus, le couplage de l’EBSD avec les nanoplots a permis de déterminer un ensemble de paramètres pouvant servir de critère d’alerte à l’initiation de la fissuration intergranulaire. / The loss of the corrosion resistance of the alloy 600, a nickel base alloy, during the oxidation in pressurized water reactor (PWR) has been demonstrated by many studies. It induces the intergranular stress corrosion cracking (IGSCC). If the chemical composition and the structure of the growing oxide are well-known, the mechanical influence of the oxide on the alloy has not been fully studied, yet. This study aims at bringing new knowledge of the oxidation impact on the mechanical response of the alloy. A new methodology is introduced for determining the local nanodeformation of the alloy 600 induced either by an oxidation or by a tensile loading. This method is based on nanodots disposed at the alloy surface as local markers of position. The statistical analysis of these data allowed to determine rare events of high deformation The samples were characterized locally by SEM, TEM, XPS and spectroscopic ellipsometry to characterize the internal oxide which constrains the alloy. The coupling of the EBSD with the nanodots had enabled to determine a set of parameters, which was used as an alarm criterion for the IGSCC initiation.
229

Studium tloušťky tenkých vrstev organických materiálů / Study of thin film organic materials thickness

Hegerová, Lucie January 2008 (has links)
The diploma thesis deals with the determination of thickness and refractive index of thin organic films using image analysis. In the theoretical part there are described principles of the methods, which are used to prepare the films (spin coating, inkjet printing, vapour deposition), the characteristics of thin films, ways of finding out the thickness and refractive index of substances (weight methods, electric methods, method based on measurement of absorption coefficient of light, interference microscopy, ellipsometry) and also image analysis (harmonic and wavelet analysis). Interference microscope Epival - Interpako (Carl Zeiss Jena), digital camera Nikon Coolpix 5400 and computer were used for the determination of thickness and refractive index. The thicknesses of layers were set on the basis of interference images of edges and grooves – both from the side of the metal contact and the side of underlying glass. The refractive indices of thin layers were then set using the recorded figures. In the final part of the thesis there are discussed the results of interference images photographed along the full length of the aluminium contact which are used for measuring electrical characteristics of DPP structures. The produces are thicknesses and refractive indices of individual layers.
230

Plazmochemická depozice vrstev z plynné fáze s využitím směsí TVS/Ar a TVS/O2 / Plasma-enhanced chemical vapor deposition using TVS/Ar and TVS/O2 mixtures

Sadílek, Jakub January 2013 (has links)
Tato studie je zaměřena na základní výzkum přípravy a-SiC:H a a-SiCO:H slitin plazmových polymerů pomocí metody plazmochemické depozice z plynné fáze (PE-CVD). Tyto slitiny byly připravovány depozicí z monomeru tetravinylsilanu (TVS) a jeho směsí s kyslíkem a argonem při různých efektivních výkonech pulzního plazmatu. Připravené tenké vrstvy byly za účelem získání závislostí optických, mechanických a chemických vlastností na depozičních podmínkách zkoumány pomocí metod spektros-kopické elipsometrie (ELL), nanoindentace (NI), fotoelektronové spektrometrie (XPS) a Fourierovy transformované infračervené spektrometrie

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