The development of new materials with novel properties plays an important role in improving our lives and welfare. Research in Nanotechnology can provide e.g. cheaper and smarter materials in applications such as energy storage and sensors. In order for this development to proceed, we need to be able to characterize the material properties at the nano-, and even the atomic scale. The ultimate goal is to be able to tailor them according to our needs. One of the great challenges concerning the characterization of nano-sized objects is how to achieve the physical contact to them. This thesis is focused on the contacting of nanoobjects with the aim of electrically characterizing them and subsequently understanding their electrical properties. The analyzed nanoobjects are carbon nanosheets, nanotetrapods, nanoparticles and molecular systems. Two contacting strategies were employed in this thesis. The first strategy involved the development of a focused ion beam (FIB) based nanocontact platform. The platform consists of gold nanoelectrodes, having nanogaps of 10-30 nm, on top of an insulating substrate. Gold nanoparticles, double-stranded DNA and cadmium telluride nanotetrapods have been trapped in the gaps by using dielectrophoresis. In certain studies, the gold electrodes have also been coated with conducting or non-conducting molecules, prior to the trapping of gold nanoparticles, in order to form molecular junctions. These junctions were subsequently electrically characterized to evaluate the conduction properties of these molecular systems. For the purpose of better controlling the attachment of molecules to the nanoelectrodes, a novel route to synthesize alkanedithiol coated gold nanoparticles was developed. The second contacting strategy was based on the versatility of the FIB instrument as a platform for in-situ manipulation and electrical characterization of non-functionalized and functionalized carbon nanosheets, where it was found that the functionalized samples had an increased conductivity by more than one order of magnitude. Both contacting strategies proved to be valuable for building knowledge around contacting and electrical characterization of nanoobjects

In the last years, there is a rise of interest in investigation and fabrication of nanometer sized magnetic structures due to their various applications (e.g. for data storage or micro sensors). Over the last several decades ion beam implantation became an important tool for the modification of materials and in particular for the manipulation of magnetic properties. Nanopatterning and implantation can be done simultaneously using focused-ion beam (FIB) techniques. FIB implantation and standard ion implantation differ in their beam current densities by 7 orders of magnitude. This difference can strongly influence the structural and magnetic properties, e.g. due to a rise of the local temperature in the sample during ion implantation. In previous investigations both types of implantation techniques were studied separately. The aim of the current research was to compare both implantation techniques in terms of structural changes and changes in magnetic properties using the same material system. Moreover, to separate any possible annealing effects from implantation ones, the influence of temperature on the structural and magnetic properties were additionally investigated. For the current study a model material system which is widely used for industrial applications was chosen: a 50 nm thick non-ordered nano-crystalline permalloy (Ni81Fe19) film grown on a SiO2 buffer layer based onto a (100)-oriented Si substrate. The permalloy films were implanted with a 30 keV Ga+ ion beam; and also a series of as-deposited permalloy films were annealed in an ultra-high vacuum (UHV) chamber. Several investigation techniques were applied to study the film structure and composition, and were mostly based on non-destructive X-ray investigation techniques, which are the primary focus of this work. Besides X-ray diffraction (XRD), providing the long-range order crystal structural information, extended X-ray absorption fine structure (EXAFS) measurements to probe the local structure were performed. Moreover, the film thickness, surface roughness, and interface roughness were obtained from the X-ray reflectivity (XRR) measurements. Additionally cross-sectional transmission electron microscope (XTEM) imaging was used for local structural characterizations. The Ga depth distribution of the samples implanted with a standard ion implanter was measured by the use of Auger electron spectroscopy (AES) and Rutherford backscattering (RBS), and was compared with theoretical TRIDYN calculation. The magnetic properties were characterized via polar magneto-optic Kerr effect (MOKE) measurements at room temperature. It was shown that both implantation techniques lead to a further material crystallization of the partially amorphous permalloy material (i.e. to an increase of the amount of the crystalline material), to a crystallite growth and to a material texturing towards the (111) direction. For low ion fluences a strong increase of the amount of the crystalline material was observed, while for high ion fluences this rise is much weaker. At low ion fluences XTEM images show small isolated crystallites, while for high ones the crystallites start to grow through the entire film. The EXAFS analysis shows that both Ni and Ga atom surroundings have a perfect near-order coordination corresponding to an fcc symmetry. The lattice parameter for both implantation techniques increases with increasing ion fluence according to the same linear law. The lattice parameters obtained from the EXAFS measurements for both implantation types are in a good agreement with the results obtained from the XRD measurements. Grazing incidence XRD (GIXRD) measurements of the samples implanted with a standard ion implanter show an increasing value of microstrain with increasing ion fluence (i.e. the lattice parameter variation is increasing with fluence). Both types of implantation result in an increase of the surface and the interface roughness and demonstrate a decrease of the saturation polarization with increasing ion fluence. From the obtained results it follows that FIB and standard ion implantation influence structure and magnetic properties in a similar way: both lead to a material crystallization, crystallite growth, texturing and decrease of the saturation polarization with increasing ion fluence. A further crystallization of the highly defective nano-crystalline material can be simply understood as a result of exchange processes induced by the energy transferred to the system during the ion implantation. The decrease of the saturation polarization of the implanted samples is mainly attributed to the simple presence of the Ga atoms on the lattice sites of the permalloy film itself. For the annealed samples more complex results were found. The corresponding results can be separated into two temperature regimes: into low (≤400°C) and high (>400°C) temperatures. Similar to the implanted samples, annealing results in a material crystallization with large crystallites growing through the entire film and in a material texturing towards the (111) direction. The EXAFS analysis shows a perfect near-order coordination corresponding to an fcc symmetry. The lattice parameter of the annealed samples slightly decreases at low annealing temperatures, reaches its minimum at about ~400°C and slightly rises at higher ones. From the GIXRD measurements it can be observed that the permalloy material at temperatures above >400°C reaches its strain-free state. On the other hand, the film roughness increases with increasing annealing temperature and a de-wetting of the film is observed at high annealing temperatures. Regardless of the material crystallization and texturing, the samples annealed at low temperatures demonstrate no change in saturation polarization, while at high temperatures a rise by approximately ~15% at 800°C was observed. The rise of the saturation polarization at high annealing temperatures is attributed to the de-wetting effect.

A challenge exists for understanding the origin of color for structurally colored, 3-dimensional bioorganic nanostructures, such as the scales of butterflies, beetles, and moths. Complex, hierarchical structures found within such scales create the overall scale appearance. The controlled alteration of color through material deposition and the addition of new optical functionalities to such structures are other areas of scientific interest. This dissertation addresses these challenges with a first-of-its-kind, systematic isolation (deconstruction) of scale component nanostructures, followed by evaluation of optical property/structure correlations. The additive deposition (constructive alteration) of emissive materials to structurally-colored templates complements this deconstructive approach towards understanding the origin of color in butterfly scales. Discoveries made through this work may help advance the bioinspired design of synthetic optical structures and subsequent color control through the addition of multilayered, emissive optical components.

Les batteries, et en particulier les batteries lithium-ion (Li-ion), sont devenues des vecteurs de stockage de l'énergie particulièrement adaptés à l'avènement des très nombreuses applications portables (téléphones ou ordinateurs). Dans le but d'améliorer et de rendre plus sûrs ces vecteurs, il est impératif de pouvoir comprendre et caractériser de la manière la plus précise les matériaux les constituant et les interfaces les séparant. Pour cela, l'utilisation d'outils puissants et adaptés est essentielle, notamment depuis l'apparition de matériaux ayant une architecture à l'échelle nanométrique. Ainsi, l'utilisation de la Microscopie Electronique en Transmission (MET) est particulièrement prometteuse, pour sa capacité à analyser les propriétés morphologiques, structurales ou chimiques à cette échelle. Fort de ce constat, nous avons tenté de réaliser la première observation in situ dans un MET d'une batterie en cours de cyclage électrochimique. La première partie de ce manuscrit est dédiée à la présentation de la stratégie utilisée. En effet, les nombreuses difficultés liées à la fois à l'environnement du MET et à la nature même d'une batterie, nous ont forcé à faire des choix basés sur l'analyse de l'état de l'art, principalement en termes de matériaux, de technologies et d'équipements expérimentaux. Ainsi, ce projet est basé sur l'étude d'une microbatterie Li-ion tout solide. Le deuxième chapitre est lui consacré au procédé de fabrication par ablation laser de ces microbatteries tout solide, avec notamment la synthèse et la caractérisation de chacun des matériaux actifs constitutifs. La troisième partie décrit les solutions envisagées pour lever certaines des incertitudes qui avaient été identifiées. Nous avons ainsi réussi la première observation ex situ par MET d'une "nanobatteries" obtenue par découpe d'une microbatterie à l'aide d'un faisceau d'ions focalisés (FIB) dans un MEB à double faisceaux. Les analyses par MET entre des coupes de batteries après dépôt et ayant subi un cyclage électrochimique ont permis de mettre en évidence, pour la première fois, de nombreux dommages ou des mécanismes de détérioration des interfaces. Les premiers essais, et notamment la configuration utilisée, n'ayant pas permis de réaliser les premiers tests de cyclage in situ dans un MET, plusieurs modifications ont dû être opérées, qui sont présentées dans le dernier chapitre. Ce nouveau design a permis d'expérimenter un cyclage in situ sur des "nanobatteries" et de mettre en lumière les derniers challenges à relever.

Nano-objects have unique properties due to their sizes, shapes and structure. When electronic properties of such nano-objects are used to build devices, the control of interfaces at atomic level is required. In this thesis, systems were built that can not only electrically characterize nano-objects, but also allow to analyze a large number of individual nano-objects statistically at the example of graphene and nanoparticle-molecule-nanoelectrode junctions. An in-situ electrical characterization system was developed for the analysis of free standing graphene sheets containing defects created by an acid treatment. The electrical characterization of several hundred sheets revealed that the resistance in acid treated graphene sheets decreased by 50 times as compared to pristine graphene and is explained by the presence of di-vacancy defects. However, the mechanism of defect insertion into graphene is different when graphene is bombarded with a focused ion beam and in this case, the resistance of graphene increases upon defect insertion. The defect insertion becomes even stronger at liquid N2 temperature. A molecular electronics platform with excellent junction properties was fabricated where nanoparticle-molecule chains bridge 15-30nm nanoelectrodes. This approach enabled a systematic evaluation of junctions that were assembled by functionalizing electrode surfaces with alkanethiols and biphenyldithiol. The variations in the molecular device resistance were several orders of magnitude and explained by variations in attachment geometries of molecules.  The spread of resistance values of different devices was drastically reduced by using a new functionalization technique that relies on coating of gold nanoparticles with trityl protected alkanedithiols, where the trityl group was removed after trapping of nanoparticles in the electrode gap. This establishment of a reproducible molecular electronics platform enabled the observation of vibrations of a few molecules by inelastic tunneling spectroscopy. Thus this system can be used extensively to characterize molecules as well as build devices based on molecules and nanoparticles.

The objective of this research was to develop a novel technique for mechanical treatment to manipulate the microstructure of Nickel-Manganese-Gallium Hesuler alloys to increase anisotropy, which can lead to higher magnetocaloric properties. Ni2+xMn1-xGa intermetallics have the potential to be employed in magnetic refrigeration devices including residential refrigerators, heat pumps, and air conditioning. Solid-state magnetic refrigeration systems are smaller, quieter, and reduce energy consumption by 20% compared to existing conventional vapor-cycle refrigeration devices which rely on harmful hydro-fluorocarbon gases and pump millions of tons of greenhouse gases into the atmosphere. The magnetic refrigeration market is predicted to reach US$ 315.7 Million by 2022. Magnetic refrigeration systems can also be used in electronic systems and the space industry. The current state-of-the-art magnetic refrigeration systems use expensive rare earth elements including Gadolinuim (Gd). The need to replace Gd and other rare earth elements with cheaper and more available elements led to other alloys including Ni-Mn-Ga. By understanding the processing-microstructure-property relationship of Ni-Mn-Ga alloy, it is possible to manipulate the microstructure in order to obtain higher refrigeration capacity. It is a promising alternative to rare earth elements and improves national security by minimizing foreign dependence on the import of rare earth metals. This novel in situ study establishes that twin boundaries can be manipulated in a polycrystalline Ni-Mn-Ga alloy. This results in a change in magnetocrsytalline anisotropy, which leads to a higher magnetic cooling power. Mechanical loading in a preferred direction, traditionally referred to as a training process, was able to move the twin boundaries, and the combination of focused ion beam imaging linked specific movement with mechanical loading. This technique, in situ monitoring process, can be utilized to devise training procedures for future iterations of magnetocaloric and shape memory alloys.

This diploma thesis deals with the preparation of epitaxially grown metastable paramagnetic Fe films alloyed by Ni on Cu/Si(100) substrates at RT. Molecular beam epitaxy of Cu(100) buffer layer was performed on H-Si(100) native SiO2 free samples treated by etching in HF or thermal treatment. The epitaxially grown Cu layers with thickness ranging from 50 up to 130 nm serves as suitable substrate for the deposition of 44-ML-thick paramagnetic Fe78Ni22. The film growth was taking place in CO atmosphere and as well as Ni it led to paramagnetic film stabilization. The structural and magnetic ion-beam-induced transformation of desired Fe-Ni structure was performed and propeties of irradiated films were characterized afterwards by MOKE. Then some specific patterns on Si(100) by e-beam litography were fabricated and they served as suitable matrix for Cu(100) buffer layer and paramagnetic Fe. Prepared Si(100), globally and locally deposited metal films were examined by LEED, XPS, AFM, AES, SEM a STM. The recorded results showed the possibility of paramagnetic films preparation on H-Si(100) where it was possible to make ferromagnetic patterns on paramagnetic background by irradiation of specific ion dose.

Lithium-ion batteries(LIBs) have dominated the energy storage market in the past two decades. The high specific energy, low self-discharge, relatively high power and low maintenance of LIBs enabled the revolution of electronic devices and electric vehicle industry, changed the communication and transportation styles of the modern world. Although the specific energy of LIBs has increased significantly since first commercialized in 1991, it has reached a bottleneck with current electrode materials. To meet the increasing market demand, it is necessary to develop high capacity electrode materials.<div><br></div><div>Current commercial anode material for LIB is graphite which has a specific capacity of 372 mAh g-1. Other group IV elements (silicon (Si), germanium (Ge), tin (Sn)) have much higher capacities. However, group IV elements have large volume change during lithiation/delithiation, leading to pulverization of active materials and disconnection between electrode particles and current collector, resulting in fast capacity fading. To address this issue, it is essential to understand the microstructural evolution of Si, Ge and Sn during cycling.<br></div><div><br></div><div>This dissertation is mainly focused on the morphological and structural evolution of Sn and Ge based materials. In this dissertation, anin situ focused ion beam-scanning electron microscopy (FIB-SEM) method is developed to investigate the microstructuralevolution of a single electrode particle and correlate with its electrochemical performance. This method is applied toall projects. The first project is to investigate the microstructural evolution of a Sn particle during cycling. Surface structures of Sn particles are monitored and correlated with different states of charge. The second project is to investigate the morphological evolution of Ge particles at different conditions. Different structures (nanopores, cracks, intact surface) appear at different cycling rates. The third project is to study selenium doped Ge (GeSe) anodes. GeSe and Ge particles are tested at the same condition. Se doping forms Li-Ge-Se network, provides fast Li transport and buffers volume change. The fourth project is to study the reaction front of Ge particle during lithiation. Micron-sized Ge particles have two reaction fronts and a wedge shape reaction interface, which is different from the well-known core-shell mode. The fifth project is to investigate antimony (Sb)-coated porous Ge particles. The Sb coating suppresses electrolyte decomposition and porous structure alleviates volume change. The results in this dissertation reveal fundamental information about the reaction mechanism of Sn and Ge anode. The results also show the effects of doping, porous structuring and surface coating of anode materials.</div>

One conventional method for studying dislocations uses the Transmission Electron Microscope (TEM), a complex and expensive piece of equipment which requires extensive specimen preparation in order to thin the specimens to electron transparent thickness. Newer High Resolution Electron Backscatter Diffraction (HREBSD) methods of determining geometrically necessary dislocation content via cross-correlation promise to be able to produce estimates of the dislocation density of the sample over a larger area with considerably less preparation time and using a much more accessible instrument. However, the accuracy of the new EBSD technique needs more experimental verification, including consideration of possible changes in the specimen dislocation density due to the different preparation methods. By comparing EBSD and TEM dislocation measurements of Electron Transparent platinum specimens prepared using the Focused Ion Beam (FIB), along with EBSD dislocations measurements of specimens prepared by both FIB and mechanical polishing techniques, this paper seeks to verify the accuracy of the new method and identify any changes in the specimens’ apparent dislocation density caused by the different preparation processes.

No / A novel process chain for serial production of polymer-based devices incorporating both micro- and nano-scale features is proposed. The process chain is enabled by the use of Zr-based bulk metallic glasses (BMG) to achieve the necessary level of compatibility and complementarity between its component technologies. It integrates two different technologies, namely laser ablation and focused ion beam (FIB) milling for micro-structuring and sub-micron patterning, respectively, thus to fabricate inserts incorporating different length scale functional features. Two alternative laser sources, namely nano-second (NS) and pico-second (PS) lasers, were considered as potential candidates for the first step in this master-making process chain. The capabilities of the component technologies together with some issues associated with their integration were studied. To validate the replication performance of the produced masters, a Zr-based BMG insert was used to produce a small batch of micro-fluidic devices by micro-injection moulding. Furthermore, an experimental study was also carried out to determine whether it would be possible by NS laser ablation to structure the Zr-based BMG workpieces with a high surface integrity whilst retaining the BMG’s non-crystalline morphology. Collectively, it was demonstrated that the proposed process chain could be a viable fabrication route for mass production of polymer devices incorporating different length scale features.