No / A novel process chain for serial production of polymer-based devices incorporating both micro- and nano-scale features is proposed. The process chain is enabled by the use of Zr-based bulk metallic glasses (BMG) to achieve the necessary level of compatibility and complementarity between its component technologies. It integrates two different technologies, namely laser ablation and focused ion beam (FIB) milling for micro-structuring and sub-micron patterning, respectively, thus to fabricate inserts incorporating different length scale functional features. Two alternative laser sources, namely nano-second (NS) and pico-second (PS) lasers, were considered as potential candidates for the first step in this master-making process chain. The capabilities of the component technologies together with some issues associated with their integration were studied. To validate the replication performance of the produced masters, a Zr-based BMG insert was used to produce a small batch of micro-fluidic devices by micro-injection moulding. Furthermore, an experimental study was also carried out to determine whether it would be possible by NS laser ablation to structure the Zr-based BMG workpieces with a high surface integrity whilst retaining the BMG’s non-crystalline morphology. Collectively, it was demonstrated that the proposed process chain could be a viable fabrication route for mass production of polymer devices incorporating different length scale features.

In this study, the time-dependent deformation behavior of several model bulk metallic glasses (BMGs) was studied. The BMGs were obtained in different structural states by thermal relaxation below their glass transition temperature, cryogenic thermal cycling, and chemical rejuvenation by micro-alloying. The creep behavior of Zr52.5Ti5Cu17.9Ni14.6Al10 BMG in different structural states was investigated as a function of peak load and temperature. The creep strain rate sensitivity (SRS) indicated a transition from shear transformation zone (STZ) mediated deformation at room temperature to diffusion dominated mechanisms at high temperatures. The relaxation enthalpy of Zr47Cu46Al7 BMG was found to increase significantly with the addition of 1 at% Ti, namely for Zr47Cu45Al7Ti1. Comparison of their respective free volumes indicated that chemical rejuvenation had a more pronounced effect compared to cryogenic thermal rejuvenation. Micro-pillar compression tests supported the improved plasticity with increase in free volume from the rejuvenation effect. Effect of chemistry change on mechanical response and time-dependent deformation was investigated for topologically equivalent Pt-Pd BMGs, where the Pt atoms were systematically replaced with Pd atoms (Pt42.5-xPdx)Cu27Ni9.5P21: x=0, 7.5, 20, 22.5, 35, 42.5). The hardness and reduced modulus increased while the degree of plasticity decreased with increase in Pd-content, which was attributed to the increase in stiffer 3-atom cluster connections. STZ volume was calculated for all the BMGs using cooperative shear model (CSM) for fundamental understanding of the underlying deformation mechanisms.

Multicomponent high-entropy and amorphous alloys represent relatively new classes of structural materials with complex atomic configurations and exceptional mechanical properties. However, there are several knowledge gaps in the relationships between their atomic structure and mechanical properties. Understanding these critical relationships will enable novel alloy design and tailoring of their mechanical properties for desired engineering applications. In this dissertation, first-principles calculations and molecular dynamics simulations are applied to investigate the local atomic configurations and ordering in high-entropy and amorphous alloys. Our findings suggest that fluctuations in local atomic configurations for high- entropy alloys result in significant changes in stacking fault energy, twin energy, dislocation behavior, dislocation-twin interactions, and critical shear stress. For amorphous alloys or metallic glasses, the short-range order (SRO) and medium-range order (MRO) were found to play decisive roles in determination of their mechanical properties. Structural relaxation was found to lead to shear localization, which was attributed to free volume change and evolution of SRO and MRO to more brittle nature. In contrast, rejuvenated metallic glasses had relatively large and uniform free volume distribution giving rise to homogeneous flow and increased plasticity.

Chalcogenide glasses (ChGs) are produced by alloying together a “chalcogen” element” (S, Se or Te) with other elements, generally from group V (Sb, As) or group IV (Ge, Si) to form covalently bonded solids. A variety of stable non-crystalline materials can be prepared in bulk, fiber, and thin film forms using melt-quenching, vacuum deposition, and other less common techniques. Being amorphous semiconductors, ChGs exhibit a variety of photo-induced phenomena when irradiated with proper light and therefore find a wide range of technological applications (optical data storage, telecommunications, IR optics, etc). As research in this field is strongly driven by the needs of high-tech industry, physical properties related to the applications are more systematically investigated than the atomic structure, which is ultimately related to the macroscopic properties. A shortcoming of not having yet established microstructure-properties relations in ChGs is the lack of a strategic design of new materials for specific applications. The present study is a systematic investigation of properties for various families of ChGs using experimental techniques that probe structure (near infrared Raman scattering, x-ray and neutron diffraction, EXAFS), dynamics (IR-Photon correlation spectroscopy), thermal properties (differential scanning calorimetry) and glass morphology (scanning electron microscopy). Particular emphasis is given on binary and pseudo-ternary ChGs, which are the basis of more complex multi-component glasses, such as As-Se, Sb-Se, As-Te, Ge-S, Ge-S-AgI, As-Se-AgI, As-Se-Ag, As-S-AgI, As-S-Ag etc. over a wide glass composition range. The binary systems are known for their significant optical properties while the Ag-doped glasses belong to the class of superionic conductors. Although some of these glass-forming systems have been extensively studied in the literature, several details concerning the atomic arrangement are still not fully understood, partly due to that some of these glasses are phase separated at the microscale; a fact that is usually overlooked in related studies. In the present study, using high-resolution off-resonant Raman conditions and a more elaborate analysis of the Raman spectra, in conjunction with thermal and morphological data, we have been able to obtain a better understanding of atomic structure and to advance structure-properties relations for both the homogeneous and phase separated glasses. / Μια κατηγορία υαλωδών υλικών, γνωστή ως χαλκογονούχες ύαλοι αρχίζει να κερδίζει σημαντικό έδαφος στον τομέα των εφαρμογών λόγω των φωτονικών ιδιοτήτων που διαθέτουν. Ως χαλκογονούχες ύαλοι θεωρούνται οι υαλώδεις ενώσεις στις οποίες ένα τουλάχιστον περιέχει ένα από τα στοιχεία χαλκογόνων S, Se, και Te. Η ανάμιξη των στοιχείων αυτών με στοιχεία όπως Sb, As, Ge, Si, κλ.π. οδηγεί στο σχηματισμό σταθερών ομοιοπολικών υαλωδών ενώσεων. Το γεγονός ότι οι χαλκογονούχες ύαλοι είναι άμορφοι ημιαγωγοί έχει ως αποτέλεσμα την εμφάνιση πλήθους φωτο-επαγόμενων φαινομένων όταν οι ενώσεις αυτές ακτινοβοληθούν με φως κατάλληλου μήκους κύματος (συγκρίσιμο με το ενεργειακό τους χάσμα). Οι φωτο-επαγόμενες αλλαγές απορρέουν από τις αλλαγές οι οποίες επέρχονται στην ατομική δομή του υλικού (φωτο-δομικές αλλαγές). Τα φωτο-επαγόμενα φαινόμενα είναι εκμεταλλεύσιμα σε πλήθος τεχνολογικών εφαρμογών, για παράδειγμα στην οπτική αποθήκευση πληροφορίας (DVD), σε οπτικά που λειτουργούν στο υπέρυθρο, στις τηλεπικοινωνίες κλπ. Καθώς η έρευνα πάνω στο εν λόγω επιστημονικό πεδίο καθορίζεται σε μεγάλο βαθμό από τις ανάγκες για βιώσιμες τεχνολογικές εφαρμογές, οι φυσικές ιδιότητες, οι οποίες σχετίζονται άμεσα με τις εφαρμογές, έχουν μελετηθεί εντατικότερα και πιο συστηματικά από την ατομική δομή η οποία είναι κατά βάση υπεύθυνη για τα φωτο-επαγόμενα φαινόμενα. Αυτό έχει ως μειονέκτημα την απουσία συσχετισμών μεταξύ μικροσκοπικών και μακροσκοπικών ιδιοτήτων με αποτέλεσμα την απουσία στρατηγικού σχεδιασμού νέων λειτουργικών υλικών με τις επιθυμητές ιδιότητες. Η παρούσα διατριβή περιλαμβάνει μια συστηματική μελέτη διαφόρων οικογενειών χαλκογονούχων υάλων με τη χρήση πειραματικών τεχνικών οι οποίες διερευνούν την ατομική δομή (σκέδαση Raman, περίθλαση ακτίνων-X και νετρονίων, EXAFS), τις θερμικές ιδιότητες (διαφορική θερμιδομετρία σάρωσης) και την μορφολογία των υάλων (ηλεκτρονική μικροσκοπία σάρωσης). Ιδιαίτερη έμφαση δόθηκε σε δυαδικά και ψευδο-δυαδικά συστήματα χαλκογονούχων υάλων τα οποία συμπεριλαμβάνουν As-Se, Sb-Se, As-Te, Ge-S, Ge-S-AgI, As-Se-AgI, As-Se-Ag, As-S-AgI, As-S-Ag κλπ. για μεγάλο εύρος συστάσεων της κάθε οικογένειας. Τα δυαδικά συστήματα είναι γνωστά για τις εξαίρετες οπτικές τους ιδιότητες ενώ οι ύαλοι με προσμίξεις Αργύρου ανήκουν στην κατηγορία των υπεριοντικών υάλων με αρκετά υψηλές ιοντικές αγωγιμότητες που χαρακτηρίζονται από μικροσκοπικό διαχωρισμό φάσεων σε συγκεκριμένες συγκεντρώσεις του Αργύρου. Παρά το γεγονός ότι ορισμένα από τα προαναφερθέντα άμορφα υλικά έχουν κατ’ επανάληψη μελετηθεί στο παρελθόν, ακριβείς πληροφορίες σχετικά με την ατομική δομή τους δεν είναι διαθέσιμες, εν μέρει εξ’ αιτίας της ελλιπούς πειραματικής προσέγγισης και εν μέρει λόγω του μικροσκοπικού διαχωρισμού φάσεων που χαρακτηρίζει τις υάλους με πρόσμιξη Αργύρου, γεγονός το οποίο συχνά αμελείται σε προγενέστερες μελέτες. Στην παρούσα διατριβή, χρησιμοποιώντας τη φασματοσκοπία σκέδασης Raman υψηλής ανάλυσης και μακριά από συνθήκες συντονισμού, σε συνδυασμό με θερμικά και μορφολογικά δεδομένα των υάλων, κατέστη δυνατό να αποκτηθεί μια πιο σφαιρική γνώσης σχετικά με την ατομικής κλίμακας δομή των υάλων και να προαχθούν συσχετισμοί δομής-ιδιοτήτων τόσο για ομοιογενή όσο και για ανομοιογενείς υάλους.

Thermalization, the evolution of an interacting many-body system towards a thermal Gibbs ensemble after initialization in an arbitrary non-equilibrium state, is currently a phenomenon of great interest, both in theory and experiment. As the time evolution of a quantum system is unitary, the proposed mechanism of thermalization in quantum many-body systems corresponds to the so-called eigenstate thermalization hypothesis (ETH) and the typicality of eigenstates. Although this formally solves the contradiction of thermalizing but unitary dynamics in a closed quantum many-body system, it does neither make any statement on the dynamical process of thermalization itself nor in which way the coupling of the system to an environment can hinder or modify the relaxation dynamics. In this thesis, we address both the question whether or not a quantum system driven away from equilibrium is able to relax to a thermal state, which fulfills detailed balance, and if one can identify universal behavior in the non-equilibrium relaxation dynamics. As a first realization of driven quantum systems out of equilibrium, we investigate a system of Ising spins, interacting with the quantized radiation field in an optical cavity. For multiple cavity modes, this system forms a highly entangled and frustrated state with infinite correlation times, known as a quantum spin glass. In the presence of drive and dissipation, introduced by coupling the intra-cavity radiation field to the photon vacuum outside the cavity via lossy mirrors, the quantum glass state is modified in a universal manner. For frequencies below the photon loss rate, the dissipation takes over and the system shows the universal behavior of a dissipative spin glass, with a characteristic spectral density $\\mathcal{A}(\\omega)\\sim\\sqrt{\\omega}$. On the other hand, for frequencies above the loss rate, the system retains the universal behavior of a zero temperature, quantum spin glass. Remarkably, at the glass transition, the two subsystems of spins and photons thermalize to a joint effective temperature, even in the presence of photon loss. This thermalization is a consequence of the strong spin-photon interactions, which favor detailed balance in the system and detain photons from escaping the cavity. In the thermalized system, the features of the spin glass are mirrored onto the photon degrees of freedom, leading to an emergent photon glass phase. Exploiting the inherent photon loss of the cavity, we make predictions of possible measurements on the escaping photons, which contain detailed information of the state inside the cavity and allow for a precise, non-destructive measurement of the glass state. As a further set of non-equilibrium systems, we consider one-dimensional quantum fluids driven out of equilibrium, whose universal low energy theory is formed by the so-called Luttinger Liquid description, which, due to its large degree of universality, is of intense theoretical and experimental interest. A set of recent experiments in research groups in Vienna, Innsbruck and Munich have probed the non-equilibrium time-evolution of one-dimensional quantum fluids for different experimental realizations and are pushing into a time regime, where thermalization is expected. From a theoretical point of view, one-dimensional quantum fluids are particular interesting, as Luttinger Liquids are integrable and therefore, due to an infinite number of constants of motion, do not thermalize. The leading order correction to the quadratic theory is irrelevant in the sense of the renormalization group and does therefore not modify static correlation functions, however, it breaks integrability and will therefore, even if irrelevant, induce a completely different non-equilibrium dynamics as the quadratic Luttinger theory alone. In this thesis, we derive for the first time a kinetic equation for interacting Luttinger Liquids, which describes the time evolution of the excitation densities for arbitrary initial states. The resonant character of the interaction makes a straightforward derivation of the kinetic equation, using Fermi\'s golden rule, impossible and we have to develop non-perturbative techniques in the Keldysh framework. We derive a closed expression for the time evolution of the excitation densities in terms of self-energies and vertex corrections. Close to equilibrium, the kinetic equation describes the exponential decay of excitations, with a decay rate $\\sigma^R=\\mbox\\Sigma^R$, determined by the self-energy at equilibrium. However, for long times $\\tau$, it also reveals the presence of dynamical slow modes, which are the consequence of exactly energy conserving dynamics and lead to an algebraic decay $\\sim\\tau^$ with $\\eta_D=0.58$. The presence of these dynamical slow modes is not contained in the equilibrium Matsubara formalism, while they emerge naturally in the non-equilibrium formalism developed in this thesis. In order to initialize a one-dimensional quantum fluid out of equilibrium, we consider an interaction quench in a model of interacting, dispersive fermions in Chap.~\\ref. In this scenario, the fermionic interaction is suddenly changed at time $t=0$, such that for $t>0$ the system is not in an eigenstate and therefore undergoes a non-trivial time evolution. For the quadratic theory, the stationary state in the limit $t\\rightarrow\\infty$ is a non-thermal, or prethermal, state, described by a generalized Gibbs ensemble (GGE). The GGE takes into account for the conservation of all integrals of motion, formed by the eigenmodes of the Hamiltonian. On the other hand, in the presence of non-linearities, the final state for $t\\rightarrow\\infty$ is a thermal state with a finite temperature $T>0$. . The spatio-temporal, dynamical thermalization process can be decomposed into three regimes: A prequench regime on the largest distances, which is determined by the initial state, a prethermal plateau for intermediate distances, which is determined by the metastable fixed point of the quadratic theory and a thermal region on the shortest distances. The latter spreads sub-ballistically $\\sim t^$ in space with $0<\\alpha<1$ depending on the quench. Until complete thermalization (i.e. for times $t<\\infty$), the thermal region contains more energy than the prethermal and prequench region, which is expressed in a larger temperature $T_{t}>T_$, decreasing towards its final value $T_$. As the system has achieved local detailed balance in the thermalized region, energy transport to the non-thermal region can only be performed by the macroscopic dynamical slow modes and the decay of the temperature $T_{t}-T_\\sim t^$ again witnesses the presence of these slow modes. The very slow spreading of thermalization is consistent with recent experiments performed in Vienna, which observe a metastable, prethermal state after a quench and only observe the onset of thermalization on much larger time scales. As an immediate indication of thermalization, we determine the time evolution of the fermionic momentum distribution after a quench from non-interacting to interacting fermions. For this quench scenario, the step in the Fermi distribution at the Fermi momentum $k\\sub$ decays to zero algebraically in the absence of a non-linearity but as a stretched exponential (the exponent being proportional to the non-linearity) in the presence of a finite non-linearity. This can serve as a proof for the presence or absence of the non-linearity even on time-scales for which thermalization can not yet be observed. Finally, we consider a bosonic quantum fluid, which is driven away from equilibrium by permanent heating. The origin of the heating is atomic spontaneous emission of laser photons, which are used to create a coherent lattice potential in optical lattice experiments. This process preserves the system\'s $U(1)$-invariance, i.e. conserves the global particle number, and the corresponding long-wavelength description is a heated, interacting Luttinger Liquid, for which phonon modes are continuously populated with a momentum dependent rate $\\partial_tn_q\\sim\\gamma |q|$. In the dynamics, we identify a quasi-thermal regime for large momenta, featuring an increasing time-dependent effective temperature. In this regime, due to fast phonon-phonon scattering, detailed balance has been achieved and is expressed by a time-local, increasing temperature. The thermal region emerges locally and spreads in space sub-ballistically according to $x_t\\sim t^{4/5}$. For larger distances, the system is described by an non-equilibrium phonon distribution $n_q\\sim |q|$, which leads to a new, non-equilibrium behavior of large distance observables. For instance, the phonon decay rate scales universally as $\\gamma_q\\sim |q|^{5/3}$, with a new non-equilibrium exponent $\\eta=5/3$, which differs from equilibrium. This new, universal behavior is guaranteed by the $U(1)$ invariant dynamics of the system and is insensitive to further subleading perturbations. The non-equilibrium long-distance behavior can be determined experimentally by measuring the static and dynamic structure factor, both of which clearly indicate the exponents for phonon decay, $\\eta=5/3$ and for the spreading of thermalization $\\eta_T=4/5$. Remarkably, even in the presence of this strong external drive, the interactions and their aim to achieve detailed balance are strong enough to establish a locally emerging and spatially spreading thermal region. The physical setups in this thesis do not only reveal interesting and new dynamical features in the out-of-equilibrium time evolution of interacting systems, but they also strongly underline the high degree of universality of thermalization for the classes of models studied here. May it be a system of coupled spins and photons, where the photons are pulled away from a thermal state by Markovian photon decay caused by a leaky cavity, a one-dimensional fermionic quantum fluid, which has been initialized in an out-of-equilibrium state by a quantum quench or a one-dimensional bosonic quantum fluid, which is driven away from equilibrium by continuous, external heating, all of these systems at the end establish a local thermal equilibrium, which spreads in space and leads to global thermalization for $t\\rightarrow\\infty$. This underpins the importance of thermalizing collisions and endorses the standard approach of equilibrium statistical mechanics, describing a physical system in its steady state by a thermal Gibbs ensemble.

The growing speed and bandwidth requirements of telecommunication systems demand all-optical on-chip solutions. Microphotonic devices can deliver low power nonlinear signal processing solutions. This thesis looks at the slow light photonic crystals in chalcogenide glasses to enhance low power nonlinear operation. I demonstrate the development of new fabrication techniques for this delicate class of materials. Both, reactive ion etching and chemically assisted ion beam etching are investigated for high quality photonic crystal fabrication. A new resist-removal technique was developed for the chemical, mechanical and light sensitive thin films. I have developed a membraning method based on vapor phase etching in combination with the development of a save and economical etching tool that can be used for a variety of vapour phase processes. Dispersion engineered slow light photonic crystals in Ge₃₃As₁₂Se₅₅ are designed and fabricated. The demonstration of low losses down to 21±8dB/cm is a prerequisite for the successful demonstration of dispersion engineered slow light waveguides up to a group index of around n[subscript(g)] ≈ 40. The slow light waveguides are used to demonstrate highly efficient third harmonic generation and the first advantages of a pure chalcogenide system over the commonly used silicon. Ge₁₁.₅As₂₄24Se₆₄.₅ is used for the fabrication of photonic crystal cavities. Quality factors of up to 13000 are demonstrated. The low nonlinear losses have enabled the demonstration of second and third harmonic generation in those cavities with powers up to twice as high as possible in silicon. A computationally efficient model for designing coupled resonator bandpass filters is used to design bandpass filters. Single ring resonators are fabricated using a novel method to define the circular shape of the rings to improve the fabrication quality. The spectral responses of the ring resonators are used to determine the coupling coefficient needed for the design and fabrication of the bandpass filters. A flat top bandpass filter is fabricated and characterized as demonstration of this method. A passive all-optical regenerator is proposed, by integrating a slow-light photonic crystal waveguide with a band-pass filter based on coupled ring resonators. A route of designing the regenerator is proposed by first using the dispersion engineering results for nonlinear pulse propagation and then using the filter responses to calculate the nonlinear transfer function.

Les verres bioactifs sont des matériaux particulièrement intéressants en régénération osseuse du fait de leur capacité à stimuler les cellules responsables de la croissance osseuse par les espèces qu’ils relarguent lors de leur dissolution et pour leur capacité à se lier à l’os. Au-delà de leur rôle comme matériau de comblement de défauts osseux, ils pourraient servir de support à la croissance en laboratoire de véritables greffons osseux cultivés à l’aide de seulement quelques cellules d’un patient. Afin d’être efficace, ce support doit posséder une architecture macroporeuse interconnectée pour permettre l’invasion cellulaire ainsi que la vascularisation, nécessaire à la survie des cellules. Ce travail de thèse a pour objectif la réalisation d’un tel support par l’ajout d’une étape de moussage au procédé sol-gel. Ce procédé a été utilisé pour la synthèse de matériaux aux porosités différentes permettant de déterminer une porosité plus prometteuse pour des essais in vivo qui ont montré l’invasion possible de cette mousse par des cellules osseuses. Ce procédé a de plus été rendu plus sûr par la mise au point d’une voie de synthèse alternative dans laquelle l’acide nécessaire au procédé de moussage, mais toxique, a été remplacé avec succès. Cette voie alternative a de plus permis l’organisation de la mésoporosité de la mousse. L’incorporation d’un élément d’intérêt biologique, le strontium, a été réalisé et son influence sur les propriétés et la réactivité du verre a été étudiée. Enfin, une voie de synthèse de nouveaux matériaux composites a été proposée : la grande bioactivité des verres bioactifs est conservée tout en ayant des propriétés mécaniques supérieures grâce à l’utilisation de la gélatine comme phase organique. / Bioactive glasses are very interesting materials for bone regeneration because of their ability to stimulate cells responsible for bone growth with ionic products released during dissolution and for their bone bonding ability. Beyond their role as bone filling materials, they can be used as support for growth of laboratory-made bone grafts cultivated from just a few cells of a patient. This support, named scaffold, has to be an interconnected macroporous architecture in order to allow cell invasion and vascularization which is essential to cell survival. The aim of this thesis work is the realization of such a scaffold using the sol-gel foaming process. This process has been used for the synthesis of materials with different properties that were compared for determination of the most promising for in vivo implantation and was indeed able to allow cell invasion. Moreover, this process was improved to be safer by replacement of hazardous catalyst. This new process also allowed the structuration of the mesoporosity inside the foams. Incorporation of a biologically active element (strontium) was realized and its influence on the glass properties and reactivity was evaluated. Finally, the synthesis of new composite materials has been proposed: the high bioactivity of bioactive glasses is preserved while better mechanical properties are obtained thank to the use of gelatin as organic phase.

La structuration laser femtoseconde en trois dimensions rencontre un intérêt grandissant du fait de sa facilité de mise en œuvre et des nombreuses applications qu’elle peut couvrir dans le domaine des composants photoniques. Des structures telles que des guides d’onde, des réseaux de diffraction, des mémoires optiques ou des cristaux photoniques peuvent être fabriquées grâce à cette technique. Son emploi sur des verres oxydes est prometteur car ces derniers présentent des avantages certains ; ils sont très résistants au flux et au vieillissement, leur composition chimique peut être changée facilement afin de s’adapter à un cahier des charges précis. On les retrouve déjà dans les amplificateurs Raman, les fibres optiques, les lasers à fibres, etc… Le travail de cette thèse s’articule autour de deux grands axes. Le premier axe consiste à caractériser les propriétés optiques linéaires et non-linéaires de matériaux vitreux massifs afin d’optimiser leur composition en vue d’une application particulière. Dans ce contexte, les propriétés optiques non-linéaires, leurs origines physiques (électronique et nucléaire) ainsi que leurs temps de réponse caractéristiques (de quelques femtosecondes à quelques centaines de picosecondes) sont décrits dans le cadre de l’approximation de Born-Oppenheimer. Ainsi, la silice fondue et plusieurs verres sodo-borophosphates contenant différentes concentrations en oxyde de niobium ont été étudiés. Les résultats montrent que les propriétés optiques non-linéaires dans la silice fondue sont majoritairement d’origine électronique, alors que dans les verres sodo-borophosphates, la contribution d’origine nucléaire peut devenir prépondérante lorsque la concentration en oxyde de niobium dépasse 30%. Le second axe s’articule autour de la structuration des matériaux. Trois échantillons commerciaux de silice fondue présentant des conditions de fabrication différentes (donc des taux d’impuretés distincts) et irradiés avec un laser femtoseconde proche infrarouge ont été étudiés. Les défauts induits par laser ont été identifiés au moyen de plusieurs techniques de spectroscopie. Elles ont montré la formation de centres colorés ainsi qu’une densification au niveau de la zone irradiée. Leurs propriétés optiques linéaire (indice de réfraction) et non-linéaire (susceptibilité du troisième ordre) ont été mesurées. De plus, la structuration de la silice fondue à l’échelle sub-micrométrique sous forme de « nano-réseaux » est observée et la biréfringence de forme induite par ces structures est discutée. En plus des échantillons de silice fondue, plusieurs verres oxydes présentant des compositions chimiques très distinctes ont été étudiés. Un verre sodo-borophosphate contenant de l’oxyde de niobium exhibe des micro-craquelures et des nano-crystallites après irradiation. Un verre silicate contenant ou non de l’argent dévoile des structures en anneau fluorescentes ou en « nano-réseaux ». Un verre zinc phosphate contenant de l’argent présente lui aussi des structures en anneau fluorescentes, d’une taille de l’ordre de 80 nm, bien inférieure à la limite de diffraction. Des techniques pompe-sonde sous microscope ont été mises en œuvre sur ce dernier verre pour étudier l’interaction laser-verre. Le mécanisme d’absorption de l’énergie lumineuse pour ce verre est l’absorption à quatre photons. La densité d’électrons libres générée est de l’ordre de 1017 cm-3, ce qui permet de conclure qu’un gaz d’électrons plutôt qu’un plasma se forme pendant l’irradiation laser. / Three-dimensional femtosecond laser structuring has a growing interest because of its ease of implementation and the numerous possible applications in the domain of photonic components. Structures such as waveguides, diffraction gratings, optical memories or photonic crystals can be fabricated thanks to this technique. Its use with oxide glasses is promising because of several advantages; they are resistant to flux and ageing, their chemical composition can easily be changed to fit the well-defined requirements of an application. They can already be found in Raman amplifiers, optical fibers, fiber lasers, and other devices. This thesis is based on two axes. The first axis consists in characterizing the linear and nonlinear optical properties of bulk vitreous materials in order to optimize their composition with a particular application in view. Within this context, the nonlinear optical properties, their physical origins (electronic and nuclear) as well as their characteristic response times (from a few femtoseconds to a few hundreds of picoseconds) are described within the Born-Oppenheimer approximation. Fused silica and several sodium-borophosphate glasses containing different concentrations in niobium oxide have been studied. Results show that the nonlinear optical properties of fused silica are mainly from electronic origin, whereas in the sodium-borophosphate glasses, the contribution from nuclear origin becomes predominant when the concentration of niobium oxide exceeds 30%. The second axis is based on the structuring of materials. Three commercially available fused silica samples presenting different fabrication conditions (therefore distinct impurity levels) and irradiated with a near infrared femtosecond laser have been studied. The laser induced defects have been identified by means of several spectroscopic techniques. They show the formation of color centers as well as a densification inside the irradiated area. Their linear refractive index and nonlinear third-order susceptibility properties have been measured. Moreover, the structuring of fused silica at the subwavelength scale into “nanogratings” is observed and the form of birefringence induced by these structures is discussed. In addition to the fused silica samples, several oxide glasses presenting very distinct chemical compositions have been studied. A sodium-borophosphate glass containing niobium oxide exhibits micro-cracks and nano-crystallites following irradiation. A silicate glass with or without a silver component reveals fluorescent rings or “nanograting” structures. A zinc phosphate glass containing silver also presents fluorescent ring structures, with a size of the order of 80 nm, well below the diffraction limit. Pump-probe microscope techniques have been performed on this glass to investigate the laser-glass interaction. The absorption mechanism is determined to be four-photon absorption. The generated free electron density is ~ 1017 cm-3, which suggests the conclusion that an electron gas rather than a plasma is formed during the laser irradiation.

L'inscription laser directe est un domaine de recherche en croissance depuis ces deux dernières décennies, fournissant un moyen efficace et robuste pour inscrire directement des structures en trois dimensions (3D) dans des matériaux transparents tels que des verres en utilisant des impulsions laser femtosecondes. Cette technique présente de nombreux avantages par rapport à la technique de lithographie, qui se limite à la structuration en deux dimensions (2D) et implique de nombreuses étapes de fabrication. Cela rend la technique d’inscription laser direct bien adaptée aux nouveaux procédés de fabrication. Généralement, l’inscription laser dans les verres induit des changements physiques tels qu'un changement permanent de l'indice de réfraction localisé. Ces modifications ont été classés en trois types distincts : (Type I, Type II et Type III). Dans ce travail, nous présentons un nouveau type de changement d'indice de réfraction, appelé type A qui est basé sur la création d’agrégats d'argent photo-induit. En effet, dans des verres dans lesquels sont incorporés des ions argent Ag+, lors de leurs synthèses, l’inscription laser directe induit la création d’agrégats d’argent fluorescents Agmx+ au voisinage du voxel d’interaction. Ces agrégats modifient localement les propriétés optiques comme : la fluorescence, la non-linéarité et la réponse plasmonique du verre. Ainsi, différents guides d'ondes, un séparateur de faisceau 50-50, ainsi que des coupleurs optiques ont été inscrits en se basant sur ce nouveau Type A et complétement caractérisés. D'autre part, une étude comparative entre les deux types de guides d'ondes (type A et type I) est présentée, tout en montrant qu’en ajustant les paramètres laser, il est possible de déclencher soit le Type I soit le Type A. Enfin, en se basant sur des guides d’ondes de type A inscrits proche de la surface du verre, un capteur d'indice de réfraction hautement sensible a été inscrit dans une lame de verre de 1 cm de long. Ce capteur miniaturisé peut présenter deux fenêtres de détection d’indice, ce qui constitue une première mondiale. Les propriétés des guides d'ondes inscrits dans ces verres massifs ont été transposées à des fibres en forme de ruban, du même matériau contenant de l'argent. Les résultats obtenus dans ce travail de thèse ouvrent la voie à la fabrication de circuits intégrés en 3D et de capteurs à fibre basés sur des propriétés optiques originales inaccessibles avec des guides d’onde de Type I standard. / Direct Laser Writing (DLW) has been an exponentially growing research field during the last two decades, by providing an efficient and robust way to directly address three dimensional (3D) structures in transparent materials such as glasses using femtosecond laser pulses. It exhibits many advantages over lithography technique which is mostly limited to two dimensional (2D) structuring and involves many fabrication steps. This competitive aspect makes the DLW technique suitable for future technological transfer to advanced industrial manufacturing. Generally, DLW in glasses induces physical changes such as permanent local refractive index modifications that have been classified under three distinct types: (Type I, Type II & Type III). In silver containing glasses with embedded silver ions Ag+, DLW induces the creation of fluorescent silver clusters Agmx+ at the vicinity of the interaction voxel. In this work, we present a new type of refractive index change, called type A that is based on the creation of the photo-induced silver clusters allowing the creation of new linear and nonlinear optical waveguides in silver containing glasses. Various waveguides, a 50-50 Y beam splitter, as well as optical couplers, were written based on type A modification inside bulk glasses and further characterized. On the other hand, a comparison study between type A and type I waveguides is presented, showing that finely tuning the laser parameters allows the creation of either type A or type I modification inside silver containing glasses. Finally, based on type A near-surface waveguides, a highly sensitive refractive index sensor is created in a 1 cm glass chip, which could exhibit a pioneer demonstration of double sensing refractive ranges. The waveguiding properties observed and reported in the bulk of such silver containing glasses were transposed to ribbon shaped fibers of the same material. Those results pave the way towards the fabrication of 3D integrated circuits and fiber sensors with original fluorescent, nonlinear and plasmonic properties that are not accessible using the standard type I modification

Les matériaux à changement de phase montrent la combinaison exceptionnelle d’un contraste énorme dans leurs propriétés physiques entre la phase amorphe et cristalline allié à une cinétique de changement de phase extrêmement rapide. La grande différence en résistivité permet leur application dans les mémoires numériques. De plus, cette classe de matériaux montre dans leur état vitreux des phénomènes de transport électronique caractéristiques. Le seuil de commutation dénote la chute de la résistivité dans l’état amorphe au delà d’un champ électrique critique. Le phénomène de seuil de commutation permet la transition de phase en appliquant des tensions relativement faibles. Au-dessous de cette valeur critique l’état désordonné montre une conductivité d’obscurité activée en température ainsi qu’une résistance - dans les cellules mémoires et les couches minces également – qui augmente avec le temps. Cette évolution de la résistivité amorphe entrave le stockage à plusieurs niveaux, qui offrirait la possibilité d'accroître la capacité ou la densité de stockage considérablement. Comprendre les origines physiques de ces deux phénomènes est crucial pour développer de meilleures mémoires à changement de phase. Bien que ces deux phénomènes soient généralement attribués aux défauts localisés, la connaissance de la distribution de défauts dans les matériaux amorphes à changement de phase est assez limitée. Cette thèse se concentre sur la densité des défauts mesurée dans différents verres chalcogénures présentant l’effet de seuil de commutation. Sur la base d’expériences de photo courant modulé (MPC) et de spectroscopie par déviation photothermique, un modèle sophistiqué des défauts a été développé pour GeTe amorphe (a-GeTe) mettant en évidence les états de la bande de valence et plusieurs défauts. Cette étude sur a-GeTe montre que l’analyse des données MPC peut être grandement améliorée en prenant en compte la variation de la bande de l’énergie interdite avec la température. Afin de mieux appréhender l’évolution de la résistivité amorphe, la présente étude porte sur l’évolution avec les recuits et le vieillissement de la résistivité, de l’énergie d’activation du courant d’obscurité, de la densité des défauts, du stress mécanique, de l'environnement atomique et de l’énergie de la bande interdite mesurée par des méthodes optiques sur les couches minces de a-GeTe. Le recuit d’un échantillon entraîne un élargissement de la bande interdite et de l’énergie d’activation du courant d’obscurité. De plus, la technique MPC a révélé une diminution des défauts profonds dans les couches minces de a-GeTe vieillies. Ces résultats illustrent l’impact de l’annihilation des défauts et de l’élargissement de la bande interdite sur l’évolution de la résistivité des matériaux à changement de phase amorphe. Cette thèse présente également une étude sur les alliages à changement de phase GeSnTe. En augmentant la concentration d’étain, on observe une décroissance systématique de la résistivité amorphe, de l’énergie d’activation du courant d’obscurité, de la largeur de bande interdite et de la densité des défauts, qui conduisent à une résistivité amorphe plus stables dans les compositions riches en étain comme a-Ge2Sn2Te4. L’étude sur les alliages GeSnTe montre que les matériaux à changement de phase ayant une résistivité amorphe plus stable présentent une faible énergie d’activation du courant d’obscurité. À l’exemple du Ge2Sn2Te4 et GeTe la présente étude montre un lien étroit entre l’évolution de la résistivité et la relaxation du stress mécanique. L’étude sur les verres chalcogénures montrent que les matériaux ayant un grand champ d’électrique de seuil, bien connu d’après la littérature, présentent aussi une grande densité de défauts. Ce résultat implique que l’origine du phénomène de seuil de commutation se trouve dans un mécanisme de génération à travers la bande interdite et de recombinaison dans les défauts profonds comme proposé par D. Adler. / Phase change materials combine a pronounced contrast in resistivity and reflectivity between their disordered amorphous and ordered crystalline state with very fast crystallization kinetics. Due to this exceptional combination of properties phase-change materials find broad application in non-volatile optical memories such as CD, DVD or Bluray Disc. Furthermore, this class of materials demonstrates remarkable electrical transport phenomena in their disordered state, which have shown to be crucial for their application in electronic storage devices. The threshold switching phenomenon denotes the sudden decrease in resistivity beyond a critical electrical threshold field. The threshold switching phenomenon facilitates the phase transitions at practical small voltages. Below this threshold the amorphous state resistivity is thermally activated and is observed to increase with time. This effect known as resistance drift seriously hampers the development of multi-level storage devices. Hence, understanding the physical origins of threshold switching and resistance drift phenomena is crucial to improve non-volatile phase-change memories. Even though both phenomena are often attributed to localized defect states in the band gap, the defect state density in amorphous phase-change materials has remained poorly studied. This thesis presents defects state densities measured on different amorphous phase-change materials and chalcogenides showing electrical threshold switching. On the basis of Modulated Photo Current (MPC) Experiments and Photothermal Spectroscopy a sophisticated band model for a-GeTe has been developed, which is shown to consist of defect bands and band tail states. This study on a-GeTe has shown that the data analysis within MPC experiments can be drastically improved by taking the temperature dependence of the optical band gap into account. To get a better understanding of resistance drift phenomena this study focuses on the evolution of resistivity on heating and ageing, activation energy of electronic conduction, optical band gap, defect state density, mechanical stress and nearest neighbour ordering in a-GeTe thin films. After heating the samples one hour at 140°C the activation energy for electric conduction increases by 30 meV, while the optical band gap increases by 60 meV. Additionally, MPC experiments revealed a decreasing concentration of mid gap states in aged a-GeTe thin films. These findings demonstrate the impact of band gap opening and defect annihilation on resistance drift. Furthermore, the stoichiometric dependence of resistance drift phenomena in a-GeSnTe phase-change alloys is studied in this thesis. A systematic decrease in the amorphous state resistivity, activation energy for electric conduction, optical band gap and defect density is observed with increasing tin content resulting in a low resistance drift for tin rich compositions such as a-Ge2Sn2Te4. This study on GeSnTe systems demonstrates, that phase change alloys showing a more stable amorphous state resistivity are characterized by a low activation energy of electronic conduction. This finding found in GeSnTe alloys holds also true for GeSbTe and AgInSbTe systems. On the example of a-Ge2Sn2Te4 and a-GeTe exhibiting a strong resistance drift, the evolution of the amorphous state resistivity is shown to be closely linked to the relaxation of internal mechanical stresses resulting in an improving structural ordering of the amorphous phase. For the investigated alloys showing electrical switching, the measured density of midgap states is observed to decreases with decreasing threshold field known from literature. This result favours a generation-recombination model behind electrical switching in amorphous chalcogenides as originally proposed by Adler.