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Cette thèse, effectuée en collaboration entre le CEMES-CNRS, le laboratoire Satie (ENS Cachan) et NXP Semiconductors est motivée par la compréhension des mécanismes de défaillance des dispositifs MOSFET pour les applications dans l'industrie automobile. Un facteur limitant de la fiabilité à long terme des modules de puissance basse tension est le vieillissement électrothermique et/ou thermo-mécanique des parties métalliques de la source: métallisation en aluminium (ou alliage) et fils de connexion. A cause de la différence de coefficient de dilatation thermique entre la métallisation les oxydes et le substrat semi-conducteur, la température atteinte pendant les cycles de fonctionnement (quelques centaines de degrés), induit une déformation plastique inévitable dans le métal, qui est le matériau le plus mou dans l'architecture complexe du MOSFET. Nous avons caractérisé la microstructure métallique avant et après les tests de vieillissement électrothermique accélérés, en utilisant des techniques spécifiques du domaine de la métallurgie physique: microscopie électronique et ionique, cartographie d'orientation de grains et de la composition chimique. Pour la première fois, la métallisation de la source a été caractérisée sous les fils de connexion, qui sont cent fois plus épais que la métallisation. Cet emplacement est critique pour la fiabilité du composant, car le processus de soudure par ultrasons induit une déformation plastique importante qui peut affaiblir la métallisation initiale avant le vieillissement. Ceci est peu étudié dans la littérature en raison de la difficulté à accéder à la métallisation sous les fils sans altérer leur interface, souvent endommagée et fragilisée dans les modules vieillis. Nous avons mis en place des méthodes de préparation d'échantillon, basées sur le polissage ionique, pour étudier cette interface, sans introduire d'artefacts de préparation. Le processus de soudure à froid induit une déformation plastique sévère et non uniforme dans la métallisation sous les fils sans parvenir à recréer un bon contact électrique: de petites cavités et des résidus d'oxyde natif, ont été systématiquement observés à l'interface Al / Al, dans tous les modules analysés, avant et après vieillissement. Le mécanisme principal de défaillance des modules est la génération et la propagation de fissures de fatigue dans l'aluminium, associée à une oxydation locale qui empêche la fermeture de ces fissures. Sous et en dehors des fils de connexion, ces fissures traversent la métallisation perpendiculairement à la surface jusqu'au substrat en silicium en suivant les joints de grains. Cette fissuration est due à la diffusion intergranulaire accélérée des atomes d'aluminium. Dans la zone de soudure, le phénomène de fissuration parallèle à l'interface est favorisé par les imperfections initiales (cavités, oxyde). Les expériences de tomographie ionique ont montré que ces fissures sont confinées à l'interface fil-métal et ne se propagent pas dans le fil malgré sa plus faible résistance mécanique (Al pur, structure à grains plus grands). La propagation de la fissure le long de l'interface Al/Al peut provoquer une diminution du contact entre le fil et la métallisation de la source et éventuellement son décollement. Les fissures dans le métal source peuvent expliquer l'augmentation locale de la résistance et de la température du module qui accélère le processus de vieillissement jusqu'à l'échec. Cette étude a établi de nouvelles techniques dédiées et des méthodes de quantification pour évaluer le vieillissement des parties métalliques des modules MOSFET. La caractérisation complète de l'interface soudée, intrinsèquement défectueuse et la dégradation de la métallisation pendant le vieillissement électrothermique ouvrent la voie à l'amélioration possible les technologies actuelles et au développement potentiel de nouveaux procédés. / This thesis, a collaboration between CEMES-CNRS, Satie laboratory (ENS Cachan) and NXP Semiconductors is motivated by the comprehension of the failure mechanisms of low voltage power MOSFET devices produced for ap- plications in the automotive industry. A limiting factor for the long-term reliability of power modules is the electro- thermal and/or thermo-mechanical aging of the metallic parts of the source: Al metallization and bonding wires. At the temperature reached during the on-off operating cycles (few hundred degrees), the difference in the coefficient of thermal expansion between the metallization and the oxide and semicon- ductor parts induces an inevitable plastic deformation in the metal, which is the softest material in the complex MOSFET architecture. We have characterized the metal microstructure before and after accelerated electro-thermal aging tests, by using specific techniques from the field of the physical metallurgy: electron and ion microscopy, grain orientation and chem- ical composition mapping. For the first time the source metallization has been characterized both away and under the bonding connections, which are one hundred times thicker than the metallization layer. The latter is a critical loca- tion for the reliability assessment because the ultrasonic bonding process may weaken the initial metallization microstructure by adding an important plas- tic deformation prior to aging. This is, however, poorly stated in the literature because of the difficulty to access the metallization under the wires without damaging their bonding, which is known to be particularly weak in case of aged modules. In order to investigate the wire-metallization interface, we have set up origi- nal sample preparations, based on ion polishing, that allowed us to disclose the metallization under the bonding wires without introducing preparation artifacts in the microstructure. The bonding process induces a severe and non- uniform plastic deformation in the metallization under the wires without re- creating a good electrical contact: small cavities and native oxide residues, have been systematically observed at the Al/Al interface, in all the analyzed mod- ules, before and after aging. The main mechanism behind the device failure is the generation and propa- gation of fatigue cracks in the aluminum metallization, associated to a local Al oxidation that prevents these crack from closing. Away and under the wire bonds, they run perpendicularly from the surface down to the silicon substrate following the grain boundaries, due to an enhanced intergranular diffusion of aluminum atoms. In the bonding area, the phenomenon of parallel cracking is favored by the initial imperfections in the wire-metallization bonding. Ion to- mography experiments have shown that these cracks are confined to the wire- metal interface and do not propagate in the wire despite its lower strength (pure Al, larger grain structure). Crack propagation along the Al/Al interface can cause a contact reduction between the wire and the source metallization and eventually its failure. Such discontinuities in the metal can explain the lo- cal increase in the device resistance and temperature that accelerates the aging process until failure. This study settled new, dedicated techniques and quantification methods to as- sess the aging of the metal parts of MOSFET devices. The full characterization of the intrinsically defective interface generated by the bonding process and the metallization degradation during electro-thermal aging indicated paths to possible improvements of current technologies and potential developments of new processes.

Reduced activation oxide dispersion strengthened (ODS) steels are candidate alloys for use in fusion reactor systems and are fabricated by mechanically alloying yttrium oxide to a reduced activation ferritic steel powder. The product is consolidated at high temperature by hot isostatic pressing (HIP), producing a dispersion of nanometre sized oxide particles throughout the ferritic microstructure. These particles have been shown to both improve the high temperature mechanical properties of the alloy and provide trapping sites for helium gas. The use of these particles to sequester helium is of particular significance in the development of a structural ODS steel for fusion reactor systems. A fusion power reactor, based on the ITER design, is expected to produce over 2000 appm transmutant helium in any steel components exposed to the core neutron flux. At these gas concentrations, conventional steels undergo severe swelling and embrittlement, motivating the development of materials capable of managing helium accumulation. This thesis investigates the use of the oxide particle dispersion in sequestering helium introduced by ion implantation. An initial characterisation of a model Fe-14Cr-0.25Y₂O₃ (wt%) system was completed using high resolution transmission electron microscopy (HRTEM) and atom probe tomography (APT). This demonstrated the efficacy of the production methods and the gas trapping capabilities of the oxide particles via argon gas, introduced during the mechanical alloying process. The subsequent consolidation of a full set of Fe-14Cr-3W-0.2Ti-0.25Y₂O₃ (wt%) ODS alloys at 1150°C, 1050 °C and 950 °C produced a systematic variation in the density of the particle dispersion. The characterisation of these materials using APT provided an insight into the consistent Y₂Ti₃O₅ particle chemistry found in each consolidation, and identified a stoichiometric shift from Y₂Ti₃O₅ to YTiO2 following short term annealing periods at 1000°C. Though further work is required, this shift is thought to be consistent with a thermodynamically mediated transition of the metastable clusters to stable oxide particles. Following implantation with 2000 appm helium and examination under TEM, the helium bubble and particle densities were found to be closely correlated thus providing evidence for an association between the particles and the gas bubbles. Controlling the helium bubble density via the particle dispersion demonstrates the potential use of processing temperature in controlling how helium accumulates in an implanted ODS microstructure. The effects of both bubble and particle densities on mechanical properties were investigated further using nanoindentation methods. Significant local variation in the hardness of the ODS steels was found to result from the bimodal grain size distribution of the material. By using only those measurements taken from large grained regions of the ODS, the grain refinement and particle hardening effects could be deconvolved and used to quantify particle hardening using a dispersed barrier model. The significant hardening effects with helium addition observed in the reference alloys were found to be almost entirely absent from the ODS systems, though anomalous softening in the 950°C consolidation indicated a potentially unexpected interaction between the bubble and particle populations. A possible explanation for this anomaly and a proposal for further work to establish its origin is discussed.

The combination of X-ray imaging and diffraction techniques provides a unique tool for structural and mechanical analysis of engineering components. A variety of modes can be employed in terms of the spatial resolution (length-scale), time resolution (frequency), and the nature of the physical quantity being interrogated. This thesis describes my contributions towards the development of novel X-ray “rich” imaging experimental techniques and data interpretation. The experimental findings have been validated via comparison with other experimental methods and numerical modelling. The combination of fast acquisition rate and high penetration properties of X-ray beams allows the collection of high-resolution 3-D tomographic data sets at submicron resolution during in situ deformation experiments. Digital Volume Correlation analysis tools developed in this study help understand crack propagation mechanisms in quasi-brittle materials and elasto-plastic deformation in co-sprayed composites. For the cases of crystalline specimens where the knowledge of “live” or residual elastic strain distributions is required, diffraction techniques have been advanced. Diffraction Strain Tomography (DST) allows non-destructive reconstruction of the 2-D (in-plane) variation of the out-of-plane strain component. Another diffraction modality dubbed Laue Orientation Tomography (LOT), a grain mapping approach has been proposed and developed based on the translate-rotate tomographic acquisition strategy. It allows the reconstruction of grain shape and orientation within polycrystalline samples, and provides information about intragranular lattice strain and distortion. The implications of this method have been thoroughly investigated. State-of-the-art engineering characterisation techniques evolve towards scrutinising submicron scale structural features and strain variation using the complementarity of X-ray imaging and diffraction. The first successful feasibility study is reported of in operando stress analysis in an internal combustion engine. Finally, further advancement of ‘rich’ imaging techniques is illustrated via the first successful application of Time-of-Flight Neutron Diffraction Strain (TOF-NDST) tomography for non-destructive reconstruction of the complete strain tensor using an inverse eigenstrain formulation.

Nanostructured ZnO films were obtained via thermal oxidation of thin films formed with metallic Zn-nanoparticle dispersions. Commercial zinc nanoparticles used for this work were characterized by microscopic and thermal analysis methods to analyze the Zn-ZnO core shell structure, surface morphology and oxidation characteristics. These dispersions were spin-coated on SiO₂/Si substrates and then annealed in air between 100 and 600 °C. Significant nanostructural changes were observed for the resulting films, particularly those from larger Zn nanoparticles. These nanostructures, including nanoneedles and nanorods, were likely formed due to fracturing of ZnO outer shell due to differential thermal expansion between the Zn core and the ZnO shell. At temperatures above 227 °C, the metallic Zn has a high vapor pressure leading to high mass transport through these defects. Ultimately the Zn vapor rapidly oxidizes in air to form the ZnO nanostructures. We have found that the resulting films annealed above 400 °C had high electrical resistivity. The zinc nanoparticles were incorporated into zinc indium oxide solution and spin-coated to form thin film transistor (TFT) test structures to evaluate the potential of forming nanostructured field effect sensors using simple solution processing. The functionalization of zinc tin oxide (ZTO) films with self-assembled monolayers (SAMs) of n-hexylphosphonic acid (n-HPA) was investigated. The n-HPA modified ZTO surfaces were characterized using contact angle measurement, x-ray photoelectron spectroscopy (XPS) and electrical measurements. High contact angles were obtained suggesting high surface coverage of n-HPA on the ZTO films, which was also confirmed using XPS. The impact of n-HPA functionalization on the stability of ZTO TFTs was investigated. The n-HPA functionalized ZTO TFTs were either measured directly after drying or after post-annealing at 140 °C for 48 hours in flowing nitrogen. Their electrical characteristics were compared with that of non-functionalized ZTO reference TFTs fabricated using identical conditions. We found that the non-functionalized devices had a significant turn-on voltage (V[subscript ON]) shift of ~0.9 V and ~1.5 V for the non-annealed and the post-annealed conditions under positive gate bias stress for 10,000 seconds. The n-HPA modified devices showed very minimal shift in V[subscript ON] (0.1 V), regardless of post-thermal treatment. The VON instabilities were attributed to the interaction of species from the ambient atmosphere with the exposed ZTO back channel during gate voltage stress. These species can either accept or donate electrons resulting in changes in the channel conductance with respect to the applied stress. / Graduation date: 2012 / Access restricted to the OSU Community at author's request from Jan. 6, 2012 - Jan. 6, 2013

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Les aciers inoxydables austénitiques métastables sont le siège de différents mécanismes de déformation qui sont à l'origine des propriétés mécaniques qui distinguent ce type d’alliages. Cependant, ces dernières, dépendant de la microstructure locale, sont fortement anisotropes. Par ailleurs, la déformation d'un échantillon massif serait différente de celle obtenue en surface. De ce fait, une étude détaillée trouve tout son intérêt. Le présent travail vise donc à identifier les principaux mécanismes de déformation et de leur évolution progressive, en se basant sur une déformation contrôlée de grains austénitiques individuels par des tests mécaniques de nanoindentation monotoniques et cycliques. Les courbes correspondantes au chargement-déchargement révèlent des informations détaillées sur les propriétés mécaniques sous-jacentes qui pourraient être liées à une étude complète de la structure de déformation en surface et en volume par différentes techniques de caractérisation à une échelle très fine. La déformation en fonction du temps, les phénomènes de transformation de phase réversible sous charge, l'anisotropie cristalline, l'influences de la taille des grains, la transmission de la plasticité et la tenue en fatigue ont été mis en évidence et étudiés / Metastable austenitic stainless steels feature an abundance of different deformation mechanisms, which contribute to the distinguished mechanical properties of these alloys. However, these properties are known to depend on the local microstructure and also are highly anisotropic. Furthermore, deformation is expected to be different for the bulk and the surface of a sample. In this sense, a discrete study is not trivial. The present work aims at investigation of the main deformation mechanisms and their gradual evolution, by employing controlled deformation of individual austenite grains via monotonic and cyclic nanoindentation. The corresponding loading–unloading curves have given extensive information about underlying mechanical properties, which could be related to an exhaustive reconstruction of the deformation substructure, both in surface and bulk, by different small scale characterization techniques. Amongst others, features such as time-dependent deformation, reversible phase transformation under load, crystalline anisotropy and grain size influences, besides plasticity transmission and fatigue behavior have been found and analyzed