Um fator importante para o desenvolvimento de projetos de microssistemas é o conhecimento de propriedades termomecânicas dos materiais e a compreensão dos mecanismos de falhas. Este trabalho estuda o comportamento mecânico de microvigas atuadas termicamente e propõem um método para ser utilizado na caracterização de propriedades termomecânicas de filmes finos. Fabricou-se vigas de Oxinitreto de Silício em que se aplicou a microscopia Nomarski para observar a deformação e a ocorrência do fenômeno de flambagem. / An important factor to develop microsystems is knowledge of materials properties and failure mechanisms. This research studies the thermal actuated microbeam mechanical behavior and propose a method in order to characterize thermomechanical properties of thin films. Silicon Oxynitride microbeams are fabricated and Nomarski microscopy was applied to observe strain and buckling phenomenon ocurrence.

This work explores the use of carbon-infiltrated carbon nanotube (CI-CNT) forests as a material for fabricating compliant MEMS devices. The impacts of iron catalyst layer thickness and carbon infiltration time are examined. An iron layer of 7nm or 10nm with an infiltration time of 30 minutes produces CI-CNT best suited for compliant applications. Average maximum strains of 2% and 2.48% were observed for these parameters. The corresponding elastic moduli were 5.4 GPa and 4.1 GPa, respectively. A direct comparison of similar geometry suggested CI-CNT is 80% more flexible than single-crystal silicon. A torsional testing procedure provided an initial shear modulus of about 5 GPa for the 7-nm, 30-min CI-CNT. The strain and elastic modulus values were used to design numerous functional devices which were then fabricated in CI-CNT. A series of compliant cell restraint mechanisms were developed, assessed, and revised. A passive restraint with no moving parts was found to be both the most effective design and the easiest design to produce economically. A refined version of the passive restraint has been released commercially. Another series of designed devices successfully demonstrates the implementation of CI-CNT LEM designs.

Fabrication of hemispherical structures for application in hemispherical resonator gyro-scopes (HRG) is an integral part of modern sensing systems, especially in relation to space navigation. First, it is important for these structures to be as symmetric as possible in order to accurately track both in-plane and out-of-plane acceleration that occurs in fast moving satellites and space crafts. Next, they need to be larger for easier application in current mm scale systems and to maintain a lower noise floor and high quality factor. The work in this paper introduces a methodology for the analyzation of the micromachining process for larger symmetric hemispherical shell resonators (HSR). This is in order to increase their size while maintaining symmetry through isotropic etching using HNA and the pop-up ring mask design. The implementation of the pop-up ring mask allows for symmetric etching of<111> silicon and larger MEMS structures at a low cost while giving more design control to the user in comparison to alternative designs such as the pinhole. The investigation of how hemispheric structures are affected based on the adjustment of the pop-up ring design serves to both create larger symmetric HSRs and create a better model for future designs and applications. During this investigation, a range of design tests were done to create the hemispherical resonator molds in order to gauge the effectiveness of the pop-up ring changes. These results were then used to develop a method for achieving the desired larger symmetric HSRs.

<div>Some of the biggest challenges with analog signal processing at radio frequencies (RF) are: RF loss at the frequency of interest, large enough fractional bandwidth, and sufficient delay. It is difficult to achieve enough delay in radio front ends using a purely electromagnetic approach since it is limited to a fraction of the speed of light. A solution has been the use of acoustic RF devices, such as surface acoustic wave (SAW) delaylines and MEMS filters. For some acoustic RF devices, like high performance Transmit and Receive SAW correlators, the long delays introduce significant propagation losses. These propagation losses can be compensated within the device by integrating a low noise amplifier into the acoustic correlator architecture. This can be accomplished by designing the SAW correlator on a high performance acoustoelectric (AE) platform. The AE effect is a phenomenon where nearby free carriers can interact with a travelling acoustic wave. Free carriers in close proximity to a piezoelectric material can interact with a travelling acoustic wave through its periodic potential. When a drift field is applied, depending on the relative velocity difference between the free carriers and acoustic wave, energy can either be transferred into (amplification) or out of (attenuation) the acoustic wave. </div><div><br></div><div>This thesis investigates the design and feasibility of AE MEMS devices on several Lithium Niobate (LN) platforms. First, the key acoustic and free carrier parameters are discussed and optimized for an ideal high performance AE material stack. In order to debug and analyze the performance of intermediate steps in the process of making high performance AE MEMS devices, three LN-based platforms are used throughout this work. These platforms help further examine some of the key challenges associated with making a high performance AE platform, like wafer bonding, fabrication, device design, and device operating conditions. These material stacks consist of: thin film LN bonded to a silicon wafer (LNOSi), thin film LN bonded to a silicon on insulator wafer (LNOSOI), and epitaxial indium gallium arsenide bonded to a LN wafer (InGaAs-LN).</div><div><br></div><div>The acoustic and piezoelectric performance of SAW devices on the LNOSi and LNOSOI platforms are modeled using COMSOL Multiphysics. A full study is performed to determine the piezoelectric coupling coefficient variation vs. device wavelength, propagation angle, transducer metal, and acoustic mode. A lumped element cross-field Mason model is modified to include substrate conductivity and simulated in Advanced Design System (ADS) software. SAW delaylines are then fabricated with both aluminum (Al) and gold (Au) Interdigital Transducers (IDT) and measured to compare to the simulated results. The analytical AE theory is then presented and calculations are performed to determine the desired (optimum) carrier concentration for AE devices. In addition to the 1D analytical AE model, initial work is done on developing a generalized 2D Finite Element Analysis (FEA) AE modeling scheme in COMSOL. The results for a piezoelectric semiconductor bulk acoustic wave (BAW) resonator and SAW delayline amplifier are presented. </div><div><br></div><div>On the LNOSi platform, gate controlled passive AE delaylines are fabricated and measured to examine the effects of LN bonding on Silicon free carrier concentrations and interface charges. Then, the fabrication and initial measurement results for doped Silicon AE delayline amplifiers are outlined. Based on the device design, the non-reciprocal nature of the AE effect can be used for more than just amplification and loss compensation. Using the InGaAs-LN platform, several classes of AE devices are designed and tested in pulsed mode operation. First, a series of segmented AE delayline amplifiers are measured to look at how the relative AE gain performance and input DC power scale with acoustic frequency, segment unit length, and number of segments. By taking advantage of the non-reciprocal shift in acoustic velocity, a dual-voltage AE delayline phase shifter is designed and tested. Routing of the acoustic waves between parallel delaylines can be accomplished through multistrip couplers (MSC) and can increase the library of possible AE device designs. The simplest example is a 3-port AE switch, which is designed and tested. The demonstration of these AE MEMS devices opens the door to a larger library of non-reciprocal acoustic devices utilizing the AE effect in high performance integrated material platforms.</div>

This work discusses the dynamic predictions of compliant mechanisms using the Pseudo-Rigid-Body model (PRBM). In order to improve the number of mechanisms that can be modeled, this research develops and identifies several key concepts in the behavior of beam segments where both ends are fixed to a rigid body (fixed-fixed flexible segments). A model is presented, and several examples are discussed. The dynamic behavior of several compliant segments is predicted using the PRBM and the results are compared to finite element analysis and experimental results. Details are presented as to the transient behavior of a typical uniform rectangular cross section beam. The results of this study are extended and applied to compliant planar mechanisms. It is shown by comparison with finite element analysis and experimental results that the PRBM is a good model of the physical system's dynamic behavior. The method is also demonstrated for use with compliant microelectromechanical (MEMS) systems.

Location-based services (LBSs) have become pervasive, and the demand for these systems and services is rising. Indoor Positioning Systems (IPSs) are key to extend location-based services indoors where the Global Positioning System (GPS) is not reliable due to low signal strength and complicated signal propagation environment. Most existing IPSs either require the installation of special hardware devices or build a fingerprint map, which is expensive, time-consuming, and labor-intensive. Developments in microelectromechanical systems (MEMS) have resulted in significant advancements in the low-cost compact MARG inertial sensors, making it possible to achieve low-cost and high-accuracy IPSs. This research considers the indoor positioning problem and aims to design and develop an infrastructure-free self-contained indoor positioning and tracking system based on Pedestrian Dead Reckoning (PDR) using MEMS MARG inertial sensors. PDR-based systems rely on MARG inertial sensor measurements to estimate the current position of the object by using a previously determined position without external references. Many issues still exist in developing such systems, such as cumulative errors, high-frequency sensor noises, the gyro drift issue, magnetic distortions, etc. As the MARG sensors are inherently error-prone, the most significant challenge is how to design sensor fusion models and algorithms to accurately extract useful location-based information from individual motion and magnetic sensors. The objective of this thesis is to solve these issues and mitigate the challenges. The proposed positioning system is designed with four main modules at the system level and a dual-mode feature. Specifically, the four main modules are mode detection, step detection and moving distance estimation, heading and orientation estimation, and position estimation. To address the cumulative error issue of using low-cost inertial sensors, signal processing and sensor fusion techniques are utilized for algorithm design. Experimental evaluations show that the proposed position estimation algorithm is able to achieve high positioning accuracy at low costs for the indoor environment. / Thesis / Master of Applied Science (MASc) / With the maturity of microelectromechanical systems (MEMS) technology in recent years, Magnetic, Angular Rate, and Gravity (MARG) sensors are embedded in most smart devices. This research considers the indoor positioning problem and aims to design and develop an infrastructure-free self-contained MEMS MARG inertial sensor-based indoor positioning and tracking system with high precision. The proposed positioning system uses the Pedestrian Dead Reckoning (PDR) approach and includes four main modules at the system level with a dual-mode feature. Specifically, the four main modules are mode detection, step detection and moving distance estimation, heading and orientation estimation, and position estimation. The two modes are static mode and dynamic mode. To address the cumulative error issue of using low-cost inertial sensors, signal processing and sensor fusion techniques are utilized for algorithm design. The detection and estimation algorithms of each module are presented in the system design chapter. Experimental evaluations including trajectory results under five scenarios show that the proposed position estimation algorithm achieves a higher position accuracy than that of conventional estimation methods.

Micro and nanofabrication technologies have been used extensively in many biomedical and biological applications. Integration of MEMS technology and biology (BioMEMS) enables precise control of the cellular microenvironments and offers high throughput systems. The focus of this research was to develop three dimensional (3-D) isotropic microstructures for comprehensive analysis on cell-substrate interactions. The aim was to investigate whether the normal and cancerous cells differentially respond to their underlying substrate and whether the differential response of the cells leads to a novel label-free technique to distinguish between normal and cancerous cells. Three different generations of 3-D isotropic microstructures comprised of curved surfaces were developed using a single-mask, single-etch step process. Our experimental model included HS68 normal human fibroblasts, MCF10A normal human breast epithelial cells and MDA-MB-231 metastatic human breast cancer cells. Primary findings on the first generation of silicon substrates demonstrated a distinct adhesion and growth behavior in HS68 and MDA-MB-231 cells. MDA-MB-231 cells deformed while the fibroblasts stretched and elongated their cytoskeleton on the curved surfaces. Unlike fibroblasts, MDA-MB-231 cells mainly trapped and localized inside the deep microchambers. Detailed investigations on cytoskeletal organization, adhesion pattern and morphology of the cells on the second generation of the silicon substrates demonstrated that cytoskeletal prestress and microtubules organization in HS68 cells, cell-cell junction and cell-substrate adhesion strength in MCF10A cells, and deformability of MDA-MB-231 cells (obtained by using AFM technique) affect their behavior inside the etched cavities. Treatment of MDA-MB-231 cells with experimental breast cancer drug, SAHA, on the second generation of substrates, significantly altered the cells morphology, cytoarchitecture and adhesion pattern inside the 3-D microstructures. Third generation of silicon substrates was developed for comprehensive analysis on behavior of MDA-MB-231 and MCF10A cells in a co-culture system in response to SAHA drug. Formation of colonies of both cell types was evident inside the cavities within a few hours after seeding the cells on the chips. SAHA selectively altered the morphology and cytoarchitecture in MDA-MB-231 cells. Most importantly, the majority of MDA-MB-231 cells stretched inside the etched cavities, while the adhesion pattern of MCF10A cells remained unaltered. In the last part of this dissertation, using AFM analysis, we showed that the growth medium composition has a pronounced effect on cell elasticity. Our findings demonstrated that the proposed isotropic silicon microstructures have potential applications in development of biosensor platforms for cell segregation as well as conducting fundamental biological studies. / Ph. D.

Cancer progression is accompanied with alterations in the cell biomechanical phenotype, including changes in cell structure, morphology, and responses to microenvironmental stress. These alterations result in an increased deformability of transformed cells and reduced resistance to mechanical stimuli, enabling motility and invasion. Therefore, single cell biomechanical properties could be served as a powerful label-free biomarker for effective characterization and early detection of single cancer cells. Advances and innovations in microsystems and nanotechnology have facilitated interrogation of the biomechanical properties of single cells to predict their tumorigenicity, metastatic potential, and health state. This dissertation utilized Atomic Force Microscopy (AFM) for the cell biomechanical phenotyping for cancer diagnosis and early detection, efficacy screening of potential chemotherapeutic agents, and also cancer stem-like/tumor initiating cells (CSC/TICs) characterization as the critical topics received intensive attention in the search for effective cancer treatment. Our findings demonstrated the capability of exogenous sphingosine to revert the aberrant biomechanics of aggressive cells and showed a unique, mechanically homogeneous, and extremely soft characteristic of CSC/TICs, suitable for their targeted isolation. To make full use of cell biomechanical cues, this dissertation also considered the application of nonlinear viscoelastic models such as Fractional Zener and Generalized Maxwell models for the naturally complex, heterogeneous, and nonlinear structure of living cells. The emerging need for a high-throughput clinically relevant alternative for evaluating biomechanics of individual cells led us to the development of a microfluidic system. Therefore, a high-throughput, label-free, automated microfluidic chip was developed to investigate the biophysical (biomechanical-bioelectrical) markers of normal and malignant cells. Most importantly, this dissertation also explored the biomechanical response of cells upon a dynamic loading instead of a typical transient stress. Notably, metastatic and non-metastatic cells subjected to a pulsed stress regimen exerted by AFM exhibited distinct biomechanical responses. While non-metastatic cells showed an increase in their resistance against deformation and resulted in strain-stiffening behavior, metastatic cells responded by losing their resistance and yielded slight strain-softening. Ultimately, a second generation microfluidic chip called an iterative mechanical characteristics (iMECH) analyzer consisting of a series of constriction channels for simulating the dynamic stress paradigm was developed which could reproduce the same stiffening/softening trends of non-metastatic and metastatic cells, respectively. Therefore, for the first time, the use of dynamic loading paradigm to evaluate cell biomechanical responses was used as a new signature to predict malignancy or normalcy at a single-cell level with a high (~95%) confidence level. / Ph. D.

Bioimpedance presents a versatile, label-free means of monitoring biological cells and their responses to physical, chemical and biological stimuli. Breast cancer is the second most common type of cancer among women in the United States. Although significant progress has been made in diagnosis and treatment of this disease, there is a need for robust, easy-to-use technologies that can be used for the identification and discrimination of critical subtypes of breast cancer in biopsies obtained from patients. This dissertation makes contributions in three major areas towards addressing the goal. First, we developed miniaturized bioimpedance sensors using MEMS and microfluidics technology that have the requisite traits for clinical use including reliability, ease-of-use, low-cost and disposability. Here, we designed and fabricated two types of bioimpedance sensors. One was based on electric cell-substrate impedance sensing (ECIS) to monitor cell adhesion based events and the other was a microfluidic device with integrated microelectrodes to examine the biophysical properties of single cells. Second, we examined a panel of triple negative breast cancer (TNBC) cell lines and a hormone therapy resistant model of breast cancer in order to improve our understanding of the bioimpedance spectra of breast cancer subtypes. Third, we explored strategies to improve the sensitivity of the microelectrodes to bioimpedance measurements from breast cancer cells. We investigated nano-scale coatings on the surface of the electrode and geometrical variations in a branched electrode design to accomplish this. This work demonstrates the promise of bioimpedance technologies in monitoring diseased cells and their responses to pharmaceutical agents, and motivates further research in customization of this technique for use in personalized medicine. / Ph. D.

This thesis presents novel radio frequency microelectromechanical (RF MEMS) circuits based on the three-dimensional (3-D) micromachined coplanar transmission lines whose geometry is re-configured by integrated microelectromechanical actuators. Two types of novel RF MEMS devices are proposed. The first is a concept of MEMS capacitors tuneable in multiple discrete and well-defined steps, implemented by in-plane moving of the ground side-walls of a 3-D micromachined coplanar waveguide transmission line. The MEMS actuators are completely embedded in the ground layer of the transmission line, and fabricated using a single-mask silicon-on-insulator (SOI) RF MEMS fabrication process. The resulting device achieves low insertion loss, a very high quality factor, high reliability, high linearity and high self actuation robustness. The second type introduces two novel concepts of area efficient, ultra-wideband, MEMS-reconfigurable coupled line directional couplers, whose coupling is tuned by mechanically changing the geometry of 3-D micromachined coupled transmission lines, utilizing integrated MEMS electrostatic actuators. The coupling is achieved by tuning both the ground and the signal line coupling, obtaining a large tuneable coupling ratio while maintaining an excellent impedance match, along with high isolation and a very high directivity over a very large bandwidth. This thesis also presents for the first time on RF nonlinearity analysis of complex multi-device RF MEMS circuits. Closed-form analytical formulas for the IIP3 of MEMS multi-device circuit concepts are derived. A nonlinearity analysis, based on these formulas and on  measured device parameters, is performed for different circuit concepts and compared to the simulation results of multi-device  conlinear electromechanical circuit models. The degradation of the overall circuit nonlinearity with increasing number of device stages is investigated. Design rules are presented so that the mechanical parameters and thus the IIP3 of the individual device stages can be optimized to achieve a highest overall IIP3 for the whole circuit.The thesis further investigates un-patterned ferromagnetic NiFe/AlN multilayer composites used as advanced magnetic core materials for on-chip inductances. The approach used is to increase the thickness of the ferromagnetic material without increasing its conductivity, by using multilayer NiFe and AlN sandwich structure. This suppresses the induced currents very effectively and at the same time increases the ferromagnetic resonance, which is by a factor of 7.1 higher than for homogeneous NiFe layers of same thickness. The so far highest permeability values above 1 GHz for on-chip integrated un-patterned NiFe layers were achieved. / <p>QC 20140328</p>