The objective of the proposed research is to design, implement, and characterize low-cost, lightweight front-end components and subsystems in the microwave domain through innovative packaging architectures for remote sensing applications. Particular emphasis is placed on system-on-package (SoP) solutions implemented in organic substrates as a low-cost alternative to conventional, expensive, rigid, and fragile radio- frequency substrates. To this end, the dielectric properties of organic substrates RT/duroid 5880, 6002 and 6202 are presented from 30 GHz to 70 GHz, covering most of the Ka and V radar bands, giving also a thorough insight on the uncertainty of the microstrip ring resonator method by means of the Monte Carlo uncertainty analysis. Additionally, an ultra-thin, high-power antenna-array technology, with transmit/ receive (T/R) functionality is introduced for mobile applications in the X band. Two lightweight SoP T/R array panels are presented in this work using novel technologies such as Silicon Germanium integrated circuits and microelectromechanical system switches on a hybrid organic package of liquid crystal polymer and RT/duroid 5880LZ. A maximum power of 47 dBm is achieved in a package with a thickness of 1.8 mm without the need of bulky thermal management devices. Finally, to address the thermal limitations of thin-film substrates of interest (liquid crystal polymer, RT/duroid 6002, alumina and Aluminum Nitride), a thermal assessment of microstrip structures is presented in the X band, along with the thermal characterization of the dielectric properties of RT/duroid 6002 from 20 ºC to 200 ºC and from 30 GHz to 70 GHz. Additional high-power, X-band technologies presented in this work include: a novel and compact topology for evanescent mode filters, and low-profile Wilkinson power dividers implemented on Aluminum Nitride using Tantalum Nitride thin-film resistors.

<div>The allocated frequency bands for the incoming fifth generation (5G) wireless communication technologies spread broadly from sub 6 GHz to K and potentially W bands. The evolution of the future generations toward higher frequency bands will continue and presents significant challenges in terms of excessive system complexity, production and maintenance costs. Reconfigurable radio architecture with frequency-tunable components is one of the most feasible and cost-effective solutions to meet such challenges. Among these technologies, evanescent-mode (EVA) cavity tunable resonator have demonstrated many of the needed features such as wide tunability, low loss and high linearity. Such a technology typically employs a movable membrane that controls the resonant frequency of a post-loaded cavity. </div><div><br></div><div>The first part of this work focuses on advancing such technology into the mm-wave frequency bands and beyond. Manufacturing tolerance and tuner performance are the two main limiting factors addressed here. This work develops a cost-effective micro-fabrication and package assembly flow which addresses the manufacturing related limitations. On the other hand, introducing micro-corrugated diaphragms and gold-vanadium co-sputtered thin film deposition technology, significantly reduces (4 times) the tuning voltage and enhances tuning stability (7 times). We demonstrate a tunable two-pole band-pass filter (BPF) prototype as the first EVA cavity tunable filter operating in the K-Ka band. </div><div><br></div><div>The second part of this work extensively discusses an optimal RF design flow based on the developed manufacturing technology. It considers all technology constrains and allows the actualization of a high Q transfer function with minimum bandwidth variation within an octave tuning range. Moreover, a new fully passive input/output feeding mechanism that facilitates impedance matching over the entire tuning range is presented. The devised RF methodology is validated through the design and testing of a two-resonator BPF. Measurements demonstrate a tuning range between 20-40 GHz, relative bandwidth of 1.9%-4.7%, and impedance matching over the entire tuning range which is upto 2 times better than previously reported state-of-the-art MEMS tunable filters of this type.</div><div><br></div><div>The third part of this work further advances the technology by proposing the first MEMS-based low-power bi-directional EVA tuning approach that employs both the main bias circuitry as well as a new corrective biasing technique that counteracts viscoelastic memory effects. The two key enabling technologies are extensively discussed: a) a new metal-oxide-metal (MOM) sealed cavity that maintains high quality without requiring complicated metal bonding; and b) a new electrostatic bi-directional MEMS tuner that implements the needed frequency tuning without lowering the resonator quality factor. </div><div><br></div><div>Furthermore, we explore important design and fabrication trade-offs regarding sensitivity to non-ideal effects (residual stress, fabrication imperfections). Measurement of the new prototype bi-directional design, prove that this technology readily corrects residual post-bias displacement of 0.1 um that shifts the frequency by over 1 GHz with less than 2.5 V. It takes over 100 seconds to recover this error in the uni-directional case. This correction does not adversely affect the filter performance.</div>

Este trabalho descreve a seqüência de fabricação de uma microválvula piezoelétrica posicionada na saída de um microbocal sônico. A técnica usada para fabricar os microbocais foi o jateamento utilizando pó de alumina e o substrato usado foi de vidro. As microválvulas são atuadores fabricados com o polímero poli(fluoreto de vinilideno) (PVDF) que é um material piezoelétrico. Os microbocais têm um formato convergente-divergente com diâmetro na entrada de 1 mm e com diâmetro na garganta em cerca de 240 microns. O atuador foi fabricado no modo bimorfo (duas folhas do polímero coladas com polarização opostas) com dimensões de 3 mm de largura por 6 mm de comprimento. Ambas as folhas do polímero são recobertas por um filme condutor de 200 nm de espessura usados como eletrodos. Aplicando uma voltagem entre os eletrodos uma folha expande enquanto a outra contrai gerando um movimento vertical do atuador. O movimento vertical pode ser maior ou menor dependendo do valor da tensão aplicada. Os dispositivos foram testados usando uma linha de gás, aplicando tensões DC e AC nos eletrodos do atuador. Para controle, também foram realizadas medidas em bocais sem atuadores. No caso onde foram aplicadas tensões DC nos atuadores, a pressão de entrada foi constante de 266 Pa. Aplicando uma tensão de +300 V DC nos eletrodos, o atuador teve um movimento vertical na direção oposta ao do microbocal de 20 microns (movimento de abertura). Neste caso o fluxo de gás medido, quando a razão de pressão entre a entrada e a saída atingiu 0,5, foi de 150 cm3/min. Aplicando uma tensão de -300 V DC (o que significa um movimento vertical de fechamento de 13 microns), o fluxo de gás medido, quando a razão de pressão foi de 0,5, foi de 134 cm3/min. Assim, existe uma faixa de fluxo entre 134 cm3/min e 150 cm3/min que pode ser controlada através do atuador. Em uma das medidas onde se aplicou uma tensão AC (200 V com 5 Hz de freqüência), foi utilizada uma pressão de entrada 13300 Pa. Neste caso, para uma razão de pressão de 0,5, onde o bocal se encontrava blocado, foi observado um fluxo de 847 cm3/min. Considerando que o fluxo do bocal sem atuador, nas mesmas condições de medida foi de 614 cm3/min, concluímos que o dispositivo no modo AC funciona como uma microbomba. A relevância deste trabalho está a utilização do poli(fluoreto vinilideno) (PVDF) na fabricação de um atuador para uso como microválvula. Este material que ainda não havia sido testado para esta finalidade. A fabricação dos microbocais foi feita em um substrato de vidro usando a técnica de jateamento também é inédita. Esta técnica é bastante usada na fabricação de microestruturas na superfície do vidro. Mas nunca tinha sido usada para a fabricação de microbocais que são canais em formato cônico que atravessam o substrato. / This work describes the fabrication and test of a microvalve integrated in a micronozzle. The technique used to fabricate the micronozzles was powder blasting using aluminum oxide powder and glass as substrate. The microvalves are actuators made from PVDF (poli(vinylidene fluoride)), that is a piezoelectric polymer. The micronozzles have convergent-divergent shape with diameter of 1mm at the entrance and throat around 240µm. The actuators were fabricated as a bimorph structure (two piezoelectric sheets were clamped together with opposite polarization) with dimensions 3 mm width and 6 mm length. Both sheets are recovered with a conductive thin film with 200 nm of thickness used as electrodes. Applying voltage between the electrodes one sheet expands while the other contracts and this generate a vertical movement to the entire actuator. If the voltage is changed, this movement can be higher or lower. The devices were tested in a gas line applying DC and AC voltages between the actuator\'s electrodes. Measurements were also realized using a micronozzle without actuator, for control. In the case where DC voltage was applied between the actuators electrodes, the inlet pressure was kept constant in 266 Pa. Applying +300V DC voltage between the electrodes, the actuator moved 20µm vertically in the opposite direction of the micronozzle (it opened). In this case the volume flux rate, for a pressure ratio (outlet / inlet) of 0.5, was 150 cm3/min. Applying -300V DC between the electrodes (that means it closed 13 microns in the micronozzle direction), for a pressure ratio of 0.5, the volume flux rate was 134 cm3/min. With these results, we conclude that it is possible to control the flow through the device in the range between 134 and 150 cm3/min. Flow measurements were also performed applying AC voltage (200V AC with frequency of 5 Hz) between the actuator electrodes and with the inlet pressure kept constant in 13300 Pa. In this case, with a pressure ratio (outlet / inlet) of 0.5, blocking the micronozzle, the flow rate measured was 847 cm3/min. Considering that the flow rate measured for the micronozzle without actuator was 614 cm3/min, in the same measurement conditions, we concluded that the device, in AC mode, was working as a micropump. The relevance of this work was the use of the poly(vinylidene) (PVDF) in the fabrication of the actuators and use it as a microvalve. The micronozzles were fabricated in a glass substrate using the powder blasting technique that was also new.

"Laser micromachining is essential in today’s advanced manufacturing, of e.g., printed circuit boards and electronic components, especially laser microdrilling. Continued demands for miniaturization, in particular of high-performance MEMS components, have generated a need for smaller holes and microvias as well as smaller and more controllable spot-welds than ever before. All these neeeds require smaller taper of the microholes and more stable and controlled laser micromachining process than currently available. Therefore considerable attention must be focused on the laser process parameters that control critical specifications such as accuracy of the hole size as well as its shape and taper angle, all of which highly influence quality of the laser micromachining processes. Determination of process parameters in laser micromachining, however, is expensive because it is done mostly by trial and error. This Dissertation attempts to reduce the experimental time and cost associated with establishing the process parameters in laser micromachining by employing analytical, computational, and experimental solutions (ACES) methodology."

Le but du travail est de montrer la faisabilité du tissage de filament de très faible diamètre (de l'ordre de 10 à 25 -tm) et de matières différentes (cuivre, or, polyester...). Les essais du comportement mécanique (traction, fatigue) du micro filament de cuivre ont montré la possibilité du tissage de ce type du filament à cette échelle. A partir de ces résultats, il est possible d'entrevoir des solutions techniques de tissage pour réaliser des tissus à partir de ces filaments. Ce travail a permis donc de concevoir les différentes parties de la machine de micro tissage : système d'alimentation des fils de chame, système de formation de la foule, système d'insertion du fil de trame, système de mouvement du peigne, système d'appel et de stockage du tissu. Le système de formation de la foule de type Jacquard représente le cœur de la machine à tisser. Il lève un verrou technologique persistant depuis de très nombreuses années. Les résultats prometteurs des micros actionneurs fluidiques ont permis de montrer la faisabilité du micro tissage. Ils ont permis également de valider le procédé de la fabrication d'un bloc des plusieurs actionneurs capable de séparer les filaments de chaîne pour former la foule. Le logiciel de contrôle et de dessin conçu permet à la fois de réaliser des armures et de les compiler en format convenable pour pouvoir les transmettre à la carte de contrôle. Cette dernière permet de contrôler les différentes parties de la machine à tisser. / The aim of this work is to demonstrate the feasibility ofweaving filaments of very small diameter (about 10 to 25 -tm) made ofvarious materials (copper, gold, polyester, etc...). The possibility of weaving copper micro filaments at this scale has been proved via the fatigue and traction mechanical tests. According to these results, it was possible to foresee weaving technical solutions to produce fabrics from these micro filaments. This work has permitted the design of the different parts of the micro weaving machine: warp let-off system, warp shedding system, filling insertion system, beat-up system and take-up system. Warp shedding system of Jacquard type represents the heart of the weaving machine. It solved the complicated technical problem ofweaving materials that persists since many years. The positive results of micro fluidic actuators have demonstrated the feasibility of micro weaving. They have also validated the process of manufacturing a block of severa! actuators capable of separating the warp filament's to form the shed. The created software of control and design allows to make weaves and to compile them into a convenient format to be transmitted to the control card. This card controls the different parts of the weaving machine.

Three ionic liquids (ILs), trihexyltetradecylphosphonium tetrafluoroborate (TTPT), N-butyl-4-methylpyridinium tetrafluoroborate (BMPT), and 1-methyl-3- octylimidazolium tetrafluoroborate (MOIC), were utilized to prepare sol- gel sorbent coatings. Non-polar polydimethylsiloxane (PDMS) and polar poly(ethylene glycol) (PEG), poly(tetrahydrofuran) (PolyTHF) and bis[(3-methyldimethoxy-silyl)propyl] polypropylene oxide (BMPO) polymers were employed to develop novel ionic liquidmediated sol- gel hybrid organic- inorganic sorbents. The novel sorbents were first tested as coatings for capillary microextraction off-line hyphenated to gas chromatography. To gain an understanding of the role of the ionic liquids in the sol-gel process, the preconcentration abilities of these novel coatings were investigated for several classes of compounds utilizing CME-GC. This was accomplished by comparing GC peak areas of a series of analytes extracted on the ionic liquid mediated sol-gel CME coatings with that of analogous peak areas obtained on sol- gel coatings prepared without the ionic liquid. The morphology of these coatings was compared using scanning electron microscopy (SEM) imaging data. Overall, the ionic liquid-mediated sol- gel coatings had more porous morphologies than the sol-gel coatings prepared without ionic liquid. The PDMS andBMPO sol-gel coatings prepared with ionic liquid in the sol solution provided enhanced extraction sensitivity reflected in higher preconcentration effects and lower detection limits than the sol- gel coatings prepared without the ionic liquid. The polar IL-mediated BMPO sol- gel sorbent was further investigated by exploring the extraction profile and thermal stability of these coatings. A further application of ionic liquid-mediated sol-gel sorbents could be as stationary phases in a microchip-based separation system. Towards this goal, microfluidic channels were fabricated in glass substrates using microelectromechanical engineering. Spiral and serpentine channels were etched in Pyrex and fused silica wafers using wet and deep reactive ion etching (DRIE) techniques. Microfabrication protocols such as the use of hard mask and etching times were investigated for both techniques. DRIE produced microfluidic channels that had an etch quality that was superior to wet etched channels. Thus, the ultimate microchip-based separation system should by fabricated using DRIE.

This thesis presents methods for fabricating MicroElectroMechanical System (MEMS) actuators and high-flow gas microvalves using wafer-level integration of Shape Memory Alloys (SMAs) in the form of wires and sheets. The work output per volume of SMA actuators exceeds that of other microactuation mechanisms, such as electrostatic, magnetic and piezoelectric actuation, by more than an order of magnitude, making SMA actuators highly promising for applications requiring high forces and large displacements. The use of SMAs in MEMS has so far been limited, partially due to a lack of cost efficient and reliable wafer-level integration approaches. This thesis presents new methods for wafer-level integration of nickel-titanium SMA sheets and wires. For SMA sheets, a technique for the integration of patterned SMA sheets to silicon wafers using gold-silicon eutectic bonding is demonstrated. A method for selective release of gold-silicon eutectically bonded microstructures by localized electrochemical etching, is also presented. For SMA wires, alignment and placement of NiTi wires is demonstrated forboth a manual approach, using specially built wire frame tools, and a semiautomatic approach, using a commercially available wire bonder. Methods for fixing wires to wafers using either polymers, nickel electroplating or mechanical silicon clamps are also shown. Nickel electroplating offers the most promising permanent fixing technique, since both a strong mechanical and good electrical connection to the wire is achieved during the same process step. Resistively heated microactuators are also fabricated by integrating prestrained SMA wires onto silicon cantilevers. These microactuators exhibit displacements that are among the highest yet reported. The actuators also feature a relatively low power consumption and high reliability during longterm cycling. New designs for gas microvalves are presented and valves using both SMA sheets and SMA wires for actuation are fabricated. The SMA-sheet microvalve exhibits a pneumatic performance per footprint area, three times higher than that of previous microvalves. The SMA-wire-actuated microvalve also allows control of high gas flows and in addition, offers benefits of lowvoltage actuation and low overall power consumption. / QC 20120514

Microvalves are essential components of the miniaturization of the fluidic systems to control of fluid flow in a variety of applications as diverse as chemical analysis systems, micro-fuel cells, and integrated fluidic channel arrangements for electronic cooling. Using microvalves, these systems offer important advantages: they can operate using small sample volumes and provide rapid response time. This PhD dissertation presents the world first electromagnetically actuated microvalve fabricated on a single wafer with CMOS compatibility. In this dissertation, the design, fabrication, and testing results of two different types of electromagnetic microvalves are presented: the on/off microvalve and the bistable microvalve with latching mechanism. The microvalves operate with power consumption of less than 1.5 W and can control the volume flow rate of DI water, or a 50% diluted methanol solution in the range 1 - 50 µL in. The leaking rate of the on/off microvalve is the order of 30 nL/min. The microvalve demonstrated a response time for latching of 10 ms in water and 0.2 ms in air. This work has resulted in a US patent, application no. 10/699,210.Other inventions that have been developed as a result of this research are bidirectional, and bistable-bidirectional microactuators with latching mechanism, that can be utilized for optical switch, RF relay, micro mirror, nano indenter, or nano printings.

Recent advances in the miniaturization, functionality, and integration of integrated circuits and packages, such as the system-on-package (SOP) methodology, require increasing use of microvias that generates vertical signal paths in a high-density multilayer substrate. A scanning projection excimer laser system has been utilized to fabricate the microvias. In this thesis, a novel technique implementing statistical experimental design and neural networks (NNs) is used to characterize and model the excimer laser ablation process for microvia formation. Vias with diameters from 10 50 micrometer have been ablated in DuPont Kapton(r) E polyimide using an Anvik HexScan(tm) 2150 SXE pulsed excimer laser operating at 308 nm. Accurate NN models, developed from experimental data, are obtained for microvia responses, including ablated thickness, via diameter, wall angle, and resistance. Subsequent to modeling, NNs and genetic algorithms (GAs) are utilized to generate optimal process recipes for the laser tool. Such recipes can be used to produce desired microvia responses, including open vias, specific diameter, steep wall angle, and low resistance. With continuing advancement in the use of excimer laser systems in microsystems packaging has come an increasing need to offset capital equipment investment and lower equipment downtime. In this thesis, an automated in-line failure diagnosis system using NNs and Dempster-Shafer (D-S) theory is implemented. For the sake of comparison, an adaptive neuro-fuzzy approach is applied to achieve the same objective. Both the D-S theory and neuro-fuzzy logic are used to develop an automated inference system to specifically identify failures. Successful results in failure detection and diagnosis are obtained from the two approaches. The result of this investigation will benefit both engineering and management. Engineers will benefit from high yield, reliable production, and low equipment down-time. Business people, on the other hand, will benefit from cost-savings resulting from more production-worthy (i.e., lower maintenance) laser ablation equipment.

This dissertation presents the design and development of a mixed-signal low noise second-order integrated circuit (IC) for the open-loop and closed-loop operation of integrated capacitive micro- and nano-gravity accelerometers. The micromechanical accelerometers are fabricated in thick (less than 100 m) silicon-on-insulator (SOI) substrates. The IC provides the 1-bit digital output stream and has the versatility of interfacing sensors with different sensitivities while maintaining minimum power consumption (less than 5 mW) and maximum dynamic range (90 dB). A fully-differential sampled-data scheme is deployed with the ability of low-frequency noise reduction through the use of correlated double sampling (CDS) scheme. In this work, the measured resolution of the closed-loop CMOS-SOI accelerometer system, in the presence of high background accelerations, is in the micro-g (g: gravity) range. In this design, a second-order SC modulator is cascaded with the accelerometer and the front-end amplifier. The accelerometer operates in air and is designed for non-peaking response with a BW-3dB of 500 Hz. A 22 dB improvement in noise and hence dynamic range is achieved with a sampling clock of 40 kHz corresponding to a low oversampling ratio (OSR) of 40. The interface IC consumed a current of 1.5 mA from a supply of 3 V.