Résumé : Le transistor monoélectronique (SET) est un dispositif nanoélectronique très attractif à cause de son ultra-basse consommation d’énergie et sa forte densité d’intégration, mais il n’a pas les capacités suffisantes pour pouvoir remplacer complètement la technologie CMOS. Cependant, la combinaison de la technologie SET avec celle du CMOS est une voie intéressante puisqu’elle permet de profiter des forces de chacune, afin d’obtenir des circuits avec des fonctionnalités additionnelles et uniques. Cette thèse porte sur l’intégration 3D monolithique de nanodispositifs dans le back-end-of-line (BEOL) d’une puce CMOS. Cette approche permet d’obtenir des circuits hybrides et de donner une valeur ajoutée aux puces CMOS actuelles sans altérer le procédé de fabrication du niveau des transistors MOS. L’étude se base sur le procédé nanodamascène classique développé à l’UdeS qui a permis la fabrication de dispositifs nanoélectroniques sur un substrat de SiO2. Ce document présente les travaux réalisés sur l’optimisation du procédé de fabrication nanodamascène, afin de le rendre compatible avec le BEOL de circuits CMOS. Des procédés de gravure plasma adaptés à la fabrication de nanostructures métalliques et diélectriques sont ainsi développés. Le nouveau procédé nanodamascène inverse a permis de fabriquer des jonctions MIM et des SET métalliques sur une couche de SiO2. Les caractérisations électriques de MIM et de SET formés avec des jonctions TiN/Al2O3 ont permis de démontrer la présence de pièges dans les jonctions et la fonctionnalité d’un SET à basse température (1,5 K). Le transfert de ce procédé sur CMOS et le procédé d’interconnexions verticales sont aussi développés par la suite. Finalement, un circuit 3D composé d’un nanofil de titane connecté verticalement à un transistor MOS est réalisé et caractérisé avec succès. Les résultats obtenus lors de cette thèse permettent de valider la possibilité de co-intégrer verticalement des dispositifs nanoélectroniques avec une technologie CMOS, en utilisant un procédé de fabrication compatible. / Abstract : The single electron transistor (SET) is a nanoelectronic device very attractive due to its ultra-low power consumption and its high integration density, but he is not capable of completely replace CMOS technology. Nevertheless, the hybridization of these two technologies is an interesting approach since it combines the advantages of both technologies, in order to obtain circuits with new and unique functionalities. This thesis deals with the 3D monolithic integration of nanodevices in the back-end-ofline (BEOL) of a CMOS chip. This approach gives the opportunity to build hybrid circuits and to add value to CMOS chips without fundamentally changing the process fabrication of MOS transistors. This study is based on the nanodamascene process developed at UdeS, which is used to fabricate nanoelectronic devices on a SiO2 layer. This document presents the work done on the nanodamascene process optimization, in order to make it compatible with the BEOL of CMOS circuits. The development of plasma etching processes has been required to fabricate metallic and dielectric nanostructures useful to the fabrication of nanodevices. MIM junctions and metallic SET have been fabricated with the new reverse nanodamascene process on a SiO2 substrate. Electrical characterizations of MIM devices and SET formed with TiN/Al2O3 junctions have shown trap sites in the dielectric and a functional SET at low temperature (1.5 K). The transfer process on CMOS substrate and the vertical interconnection process have also been developed. Finally, a 3D circuit consisting of a titanium nanowire connected to a MOS transistor is fabricated and is functional. The results obtained during this thesis prove that the co-integration of nanoelectronic devices in the BEOL of a CMOS chip is possible, using a compatible process.

Surfaces that exhibit a gradual change in their chemical and/or physical properties are termed as surface gradients. Based on the changes in properties they are classified either as physical or chemical gradients. Chemical gradients show variations in properties like polarity, charge, functionality concentration and have found potential applications in fields of biology, physics, biosensing, catalysis and separation science. In this dissertation, surface gradients have been prepared using controlled rate infusion (CRI). CRI is a simple method in which a surface gradient is formed by carrying out the infusion of organoalkoxysilane in a time-dependent fashion using a set infusion rate. Depending on concentration of silane, rate of infusion and time of infusion, the gradient profiles on surfaces can be varied and the surface chemistry of the substrate can be altered. Initial work in the dissertation focuses on demonstrating different gradient profiles and selectivity obtained using amine and/ or phenyl functionalized gradient stationary phases on thin layer chromatography (TLC) plates prepared by CRI. The presence of amine and phenyl on the surfaces were confirmed by X-ray Photoelectron Spectroscopy (XPS) and diffuse reflectance spectroscopy, respectively. The change in surface chemistry was demonstrated by changes in the selectivities of water and fat soluble vitamins. After successful preparation and characterization of single and multi-component stationary phase gradients for planar chromatography, single-component gradients were prepared for column chromatography (Silica monolithic columns). Similar to that observed for planar chromatography, the selectivity was evaluated from retention factors and was found to be different for a weak acid/weak base mixture. The results obtained showed the promising approach of using gradient stationary phases in column chromatography. This work was further extended to prepare amine and phenyl multi-component gradients on silica monolithic columns to investigate mixed-mode and synergistic effects. Finally, amine, phenyl and thiol gradients were also prepared on cellulose substrates, particularly water color paper, The goal was to study the formation of functionality gradients on cellulose substrates particularly the interaction between hydroxyl groups on cellulose and silanols and to study the stability of the silanes on the cellulose surface.

L’oxygène et l’eau présents dans l’atmosphère sont des acteurs important dans la dégradationdes matériaux contenus dans les dispositifs opto-électroniques organiques. Dans le but d’améliorerla stabilité et la durée de vie de ces dispositifs, ces dispositifs sont encapsulés avec desmatériaux barrière aux gaz par lamination ou par l’utilisation de couches minces. Cette dernière,notamment utilisée pour les OLED, permet de fournir des barrières aux gaz performantes parle dépôt de couches inorganiques denses directement sur les dispositifs. Cependant, elles sontassujetties aux défauts des surfaces sur lesquelles elle sont déposées.L’objectif de ces travaux est de développer une couche de planarisation afin d’homogénéiserla surface des dispositifs photovoltaïques organiques (OPV) et de réduire la rugosité dans lebut d’obtenir une protection barrières aux gaz améliorée, conférée par le dépôt subséquent decouches denses inorganiques selon divers moyens (voie liquide et gazeuse).Dans un premier temps, des couches de planarisation ont été développées à partir de 6 copolymèresp(VDF-HFP). Ces derniers ont été caractérisés afin d’améliorer nos connaissances sur cesmatériaux.Grâce à une étude de solubilité, des encres à différentes concentrations dans l’acétate d’éthyleont été réalisées. Ces dernières ont été étudiées par des mesures rhéologiques et de tension desurface permettant de mieux appréhender leur étalement, et les états de surface obtenus sur dessubstrats PET et sur les dispositifs OPV. Ces recherches ont été complétées par un contrôlede la topographie et par conséquent de la planarisation des dispositifs OPV par microscopieconfocale.Pour finir, l’étude des performances barrière des structures d’encapsulations hybrides (organiqueinorganique)ont dévoilé une bonne compatibilité lorsque la rugosité de la couche de planarisationest très faible. Ces résultats sont confirmés par des mesures barrières aux gaz et des tests devieillissement accélérés des dispositifs OPV encapsulés en enceinte climatique qui permettentd’illustrer l’intérêt de l’encre planarisante développée.Ce travail a été réalisé au laboratoire LMPO au CEA/LITEN en collaboration avec l’industrielArkema dans le but de fournir des technologies d’encapsulations performantes. / Oxygen and water present in the atmosphere are important actors of the degradation of materialscontained in optoelectronic devices. In order to increase the stability and the lifetime ofOPV, the devices are encapsulated with gas-barrier materials by lamination encapsulation orthin film encapsulation. These latter, espacially used in OLED technology, provides high performancegas barriers by depositing dense inorganic layers directly onto the devices. However,they are subject to the defects of the surfaces on which they are deposited.The purpose of this study is to develop a planarinzing layer in order to homogenize the surfaceof organic photovoltaic devices (OPV) and to reduce the roughness with the aim to obtain animproved gas barrier protection, conferred by the subsequent deposition of dense inorganic layersby various ways (liquid and gaseous routes).In a first step, the planarization layers were developed from six p(VDF-HFP) co-polymers. Thesehave been characterized to improve our knowledge on those materials.Through a solubility study, inks at different concentrations in ethyl acetate were made. Thelatter were studied by rheological measurements and surface tension to understand better theirspread, and the surface conditions obtained on PET substrates and OPV devices. Those researchswere completed with a topography control and consequently the planarization of OPVdevices by confocal microscopy.Finally, the study of the barrier performance of hybrid encapsulation structures (organic-inorganic)revealed a good compatibility when the rugosity of the planarization layer is very low. Theseresults are confirmed by permeation measurements and accelerated aging tests of OPV devicesencapsulated in climatic chambers that illustrate the interest of the planarized ink developed.This work has been performed in the LMPO Laboratory at CEA/LITEN in collaboration withthe chemical company Arkema in order to be able to provide performant encapsulation technologies.

No desenvolvimento de códigos paralelos, a biblioteca PETSc se destaca como uma ferramenta prática e útil. Com o uso desta ferramenta, este trabalho apresenta um estudo sobre resolvedores de sistemas lineares aplicados a escoamentos incompressíveis de fluidos em microescala, além de uma análise de seu comportamento em paralelo. Após um estudo dos diversos aspectos dos métodos de fronteira imersa, é apresentado um método de fronteira imersa paralelo de primeira ordem. Na sequência, é apresentada uma proposta de melhoria na precisão do método, baseada na minimização da distância entre a condição de contorno exata e aproximada, no sentido de mínimos quadrados. O desenvolvimento de uma ferramenta paralela eficiente é demonstrado na solução numérica de problemas envolvendo escoamentos incompressíveis de fluidos viscosos com fronteiras imersas / In the development of parallel codes, PETSc library has an important position as a practical and useful tool. With this tool, this work presents a study about linear system solvers applied to incompressible flow in microscale problems, furthermore an analysis of the parallel behavior of these methods is presented. After a study of several aspects of immersed boundary methods, and taking advantage of the flexibility of PETSc, a parallel first order immersed boundary method is presented. Thereafter, an improvement in the accuracy of the method is presented, based on the minimization of the distance between exact and approximated boundary conditions, in the least square sense. The development of a parallel and efficient tool is demonstrated in the numerical solution of incompressible viscous flow problems with immersed boundary

No presente trabalho foi realizado um estudo da viabilidade de integrar dois dispositivos ópticos: micro-lâmpadas incandescentes e filtros interferenciais com o objetivo de construir um dispositivo único com características próprias. A fabricação destes dispositivos ópticos foi feita utilizando materiais dielétricos, obtidos por deposição química a vapor assistida por plasma (PECVD), e usando técnicas convencionais de microeletrônica desenvolvidas neste laboratório. São apresentadas simulações numéricas, processo de fabricação e caracterização de cada um dos dois dispositivos ópticos assim como a caracterização do dispositivo óptico integrado obtido. As micro-lâmpadas incandescentes foram fabricadas a partir de um filamento de cromo, isolado do meio ambiente por duas camadas dielétricas de oxinitreto de silício, sendo alimentado eletricamente com uma tensão contínua com a finalidade de aumentar a temperatura do filamento até atingir a incandescência. Com a finalidade de reduzir a dissipação térmica nessa região, o filamento foi projetado e construído para ficar suspenso através de uma corrosão anisotrópica parcial do substrato de silício. Por outro lado, os filtros interferenciais foram fabricados sobre substratos de vidro a partir de uma série de camadas depositadas por PECVD alternadas de Si3N4 e SiO2, com espessuras de 240 e 340 nm e índices de refração de 1.91 e 1.46 respectivamente, com a finalidade de produzir picos de atenuação na transmitância da luz na região do visível do espectro eletromagnético. Foram construídos filtros com 9, 11 e 13 camadas. Os resultados deste trabalho mostraram que é possível realizar a integração eficiente destes dois dispositivos ópticos para produzir uma fonte luminosa que permite a filtragem de uma determinada faixa de comprimentos de onda. Foi demonstrado também que tanto a largura da faixa, como a região de filtragem, podem ser controladas através do índice de refração, espessuras e número de camadas constituintes do filtro interferencial. Os resultados das simulações numéricas mostraram-se bastante coerentes com os resultados experimentais obtidos. / In the present work was realized a study of the viability of integrating two optical devices: incandescent micro-lamps and interferometric filters with the intention of obtaining a single device with specific characteristics. The fabrication of these optical devices was made using dielectric materials, obtained by plasma-enhanced chemical vapor deposition (PECVD), and using conventional microelectronics techniques developed at this laboratory. Numeric simulations, fabrication process and characterization of each one of the two optical devices as well as the characterization of the obtained integrated optical device are presented. The incandescent microlamps were fabricated from a chromium filament, isolated from the environment by two dielectric silicon oxynitride layers, which is powered electrically with a continuous voltage with the purpose of increasing the temperature of the filament to reach the incandescence. With the purpose of reducing the thermal dissipation in that area, the filament was designed and fabricated to be suspended through a partial anisotropic etch of the silicon substrate. On the other hand, the interferometric filters were fabricated on glass substrates starting from a series of alternate Si3N4 and SiO2 layers deposited by PECVD, with thickness of 240 and 340 nm and refraction indexes of 1.91 and 1.46 respectively, with the purpose of producing light transmittance attenuation peaks in the visible region of the electromagnetic spectrum. Filters were fabricated with 9, 11 and 13 layers. The results of this work showed that it is possible to develop the efficient integration of these two optical devices to produce a luminous source that it allows the filtering of a certain range of wavelengths. It was also demonstrated that, the bandwidth as well as the filtering area, can be controlled through the refraction index, thickness and number of constituent layers of the interferometric filter. The results of the numeric simulations showed to be quite coherent with the obtained experimental results.

No presente trabalho foi desenvolvido um suporte catalítico monolítico para fins aeroespaciais empregando a manufatura aditiva. Para tanto, foi proposta uma geometria que proporcione um escoamento turbulento, permitindo um maior contato entre o reagente e a superfície do catalisador, proporcionando menor perda de carga ao sistema. Esta nova estrutura foi obtida via manufatura aditiva, através da técnica de Sinterização Seletiva a Laser (SLS) indireta. Para utilizar a técnica SLS e material cerâmico, foi necessário desenvolver um revestimento sobre as partículas de alumina para promover a aderência entre as mesmas durante o processo de manufatura aditiva. Em seguida foram definidos, experimentalmente, os parâmetros de aplicação da técnica SLS para o compósito alumina/poliamida. Por fim, foi fabricado, via SLS, o suporte catalítico na forma monolítica. Após a confecção do suporte monolítico, foi desenvolvido um revestimento composto de pseudo-boemita e nitrato de alumínio e aplicado na superfície do monólito, a fim de expandir a área superficial específica do material. Este aumento da área específica favorece a dispersão da fase ativa, composta de óxidos de cobalto e manganês, na superfície do suporte. A caracterização do catalisador monolítico foi realizada a partir das técnicas de Adsorção de Nitrogênio, Análise Termogravimétrica, Microscopia Eletrônica de Varredura e Espectrometria de Emissão Ótica com Fonte de Plasma (ICP-OES). O desempenho do catalisador monolítico na decomposição do H2O2 concentrado foi analisado via teste de gota, monitorado por câmera de alta velocidade. Os bons resultados obtidos nesta reação apontam esta técnica de obtenção de suporte catalítico monolítico através da manufatura aditiva como uma metodologia promissora a ser empregada em sistemas catalíticos com elevada difusão de massa e calor, mas principalmente em sistemas propulsivos a monopropelente. / This work was developed by the additive manufacture monolithic catalytic support to apply aerospace applications. A geometry was proposed to implement a turbulent flow allowing a better contact with catalytic surface and reagent with a low pressure drop in the system. This new structure was obtained by additive manufacture through indirect Selective Laser Sintering (SLS) technique. Firstly, in order to use the SLS for the ceramic material was developed a coating on the alumina particles to promote a melting between them during addictive manufacturing process. Secondly, the printer parameters SLS was configurated into the alumina/polyamide particle. Finally, the monolithic catalytic support was built via SLS. After the monolithic support building, the pseudo-boehmite and aluminum nitrate coating was developed and applied on the monolithic surface to increase the specific superficial area of the material. This increasing of the specific surface area helps the spread of the active phase to made up of cobalt and manganese oxide in the support surface. The characterization of the monolithic catalyst was carried out using the nitrogen adsorption technique, thermogravimetric analysis, scanning electron microscopy and inductive coupled plasma with optical emission spectrometry. The monolithic catalytic performance in the H2O2 concentrated decomposition was analyzed via drop test monitored by the high-speed camera. The good results of this reaction and such a technique of monolithic catalytic support obtainment through the additive manufacture show that a promising methodology can be used in the catalytic system with high diffusion of mass and heat but mainly, in monopropellant propulsive system.

O uso de pesticidas levou ao aumento da produtividade e qualidade dos produtos agrícolas, porém o seu uso acarreta na intoxicação dos seres vivos pela ingestão gradativa de seus resíduos que contaminam o solo, a água e os alimentos. Dessa forma, há a necessidade do monitoramento constante de suas concentrações nos compartimentos ambientais. Para isto, busca-se o desenvolvimento de métodos de extração e enriquecimento de forma rápida, com baixo custo, gerando um baixo volume de resíduos, contribuindo com a química verde. Dentre estes métodos destacam-se a extração por banho de ultrassom e a extração por ponto nuvem. Após o procedimento de extração, o extrato obtido pode ser analisado por técnicas de Cromatografia a Líquido de Alta Eficiência (HPLC) e a Cromatografia por Injeção Sequencial (SIC), empregando fases estacionárias modernas, tais como as monolíticas e as partículas superficialmente porosas. O emprego de SIC com coluna monolítica (C18, 50 x 4,6 mm) e empacotada com partículas superficialmente porosas (C18, 30 x 4,6 mm, tamanho de partícula 2,7 µm) foi estudado para separação de simazina (SIM) e atrazina (ATR), e seus metabólitos, desetilatrazina (DEA), desisopropilatrazina (DIA) e hidroxiatrazina (HAT). A separação foi obtida por eluição passo-a-passo, com fases móveis compostas de acetonitrila (ACN) e tampão Acetato de Amônio/Ácido acético (NH4Ac/HAc) 2,5 mM pH 4,2. A separação na coluna monolítica foi realizada com duas fases móveis: MP1= 15:85 (v v-1) ACN:NH4Ac/HAc e MP2= 35:65 (v v-1) ACN:NH4Ac/HAc a uma vazão de 35 µL s-1. A separação na coluna com partículas superficialmente porosas foi efetivada com as fases móveis MP1= 13:87 (v v-1) ACN: NH4Ac/HAc e MP2= 35:65 (v v-1) ACN:NH4Ac/HAc à vazão de 8 µL s-1. A extração por banho de ultrassom em solo fortificado com os herbicidas (100 e 1000 µg kg-1) resultou em recuperações entre 42 e 160%. A separação de DEA, DIA, HAT, SIM e ATR empregando HPLC foi obtida por um gradiente linear de 13 a 35% para a coluna monolítica e de 10 a 35% ACN na coluna com partículas superficialmente porosas, sendo a fase aquosa constituída por tampão NH4Ac/HAc 2,5 mM pH 4,2. Em ambas as colunas a vazão foi de 1,5 mL min-1 e o tempo de análise 15 min. A extração por banho de ultrassom das amostras de solo com presença de ATR, fortificadas com concentrações de 250 a 1000 µg kg-1, proporcionou recuperações entre 40 e 86%. A presença de ATR foi confirmada por espectrometria de massas. Foram realizados estudos de fortificação com ATR e SIM em amostras de água empregando a extração por ponto nuvem com o surfactante Triton-X114. A separação empregando HPLC foi obtida por um gradiente linear de 13 a 90% de ACN para a coluna monolítica e de 10 a 90% de ACN para a coluna empacotada, sempre em tampão NH4Ac/HAc 2,5 mM pH 4,2. Em ambas as colunas a vazão foi de 1,5 mL min-1 e o tempo de análise 16 min. Fortificações entre 1 e 50 µg L-1 resultaram em recuperações entre 65 e 132%. / The use of pesticides has led to increased productivity and quality of agricultural products, but its use brings the intoxication of living beings by the gradual intake of their residues that contaminate soil, water and food. Thus, there is the need for constant monitoring of their concentrations in environmental compartments. For this, there is a quest for development of fast extraction and enrichment methods, at low cost, generating a low volume of waste, contributing to green chemistry. These methods include the extraction assisted by ultrasound bath and the cloud point extraction. After the extraction, the extract obtained can be analyzed by techniques such as High Performance Liquid Chromatography (HPLC) and Sequential Injection Chromatography (SIC) employing modern stationary phases, such as monolithic and superficially porous particles. The use of SIC with either monolithic column (C18, 50 x 4.6 mm) or column packed with superficially porous particles (C18, 30 x 4.6 mm, 2.7 µM particle size) was studied for separating simazine (SIM) and atrazine (ATR), and metabolites, deethylatrazine (DEA), deisopropylatrazine (DIA) and hydroxyatrazine (HAT). Separation was obtained by stepwise elution, with a mobile phase consisting of acetonitrile (ACN) and 2.5 mM ammonium acetate / acetic acid (NH4Ac / HAc) pH 4.2 buffer. The separation was performed with two mobile phases: MP1 = 15:85 (v v -1) ACN: NH4Ac / HAc and MP2 = 35:65 (v v-1) ACN: NH4Ac / HAc at a flow rate of 35 µL s-1. The separation in the column with superficially porous particles was carried out with the mobile phases MP1 = 13:87 (v v-1) ACN: NH4Ac / HAc and MP2 = 35:65 (v v-1) ACN: NH4Ac / HAc at 8 µL s-1. The ultrasound bath extraction from a soil fortified with herbicides (100 and 1000 µg kg-1) resulted in recoveries between 42 and 160 %. Separation of DEA, DIA, HAT SIM and ATR was obtained by HPLC employing a linear gradient from 13 to 35% for the monolithic column and from 10 to 35% ACN in the column packed with superficially porous particles, with the aqueous phases consisting of 2.5 mM NH4Ac / HAc buffer pH 4.2. In both columns the flow rate was 1.5 mL min-1 and the analysis time was15 min. Ultrasonic extraction from a soil sample containing ATR, fortified with concentrations from 250 to 1000 µg kg-1, provided recoveries between 40 and 86%. The presence of ATR was confirmed by mass spectrometry. Fortification studies with ATR and SIM were carried out in water samples employing cloud point extraction using Triton-X114 surfactant. The separation was accomplished by HPLC using a linear gradient from 13 to 90 % of ACN for the monolithic column and from 10 to 90 % ACN for the packed column, always in 2.5 mM NH4Ac / HAc pH 4.2 buffer. In both columns the flow rate was 1.5 mL min -1 and the analysis time 16 min. Fortifications between 1 and 50 µg L-1 resulted in recoveries between 65 and 132%.

No presente trabalho foi realizado um estudo da viabilidade de integrar dois dispositivos ópticos: micro-lâmpadas incandescentes e filtros interferenciais com o objetivo de construir um dispositivo único com características próprias. A fabricação destes dispositivos ópticos foi feita utilizando materiais dielétricos, obtidos por deposição química a vapor assistida por plasma (PECVD), e usando técnicas convencionais de microeletrônica desenvolvidas neste laboratório. São apresentadas simulações numéricas, processo de fabricação e caracterização de cada um dos dois dispositivos ópticos assim como a caracterização do dispositivo óptico integrado obtido. As micro-lâmpadas incandescentes foram fabricadas a partir de um filamento de cromo, isolado do meio ambiente por duas camadas dielétricas de oxinitreto de silício, sendo alimentado eletricamente com uma tensão contínua com a finalidade de aumentar a temperatura do filamento até atingir a incandescência. Com a finalidade de reduzir a dissipação térmica nessa região, o filamento foi projetado e construído para ficar suspenso através de uma corrosão anisotrópica parcial do substrato de silício. Por outro lado, os filtros interferenciais foram fabricados sobre substratos de vidro a partir de uma série de camadas depositadas por PECVD alternadas de Si3N4 e SiO2, com espessuras de 240 e 340 nm e índices de refração de 1.91 e 1.46 respectivamente, com a finalidade de produzir picos de atenuação na transmitância da luz na região do visível do espectro eletromagnético. Foram construídos filtros com 9, 11 e 13 camadas. Os resultados deste trabalho mostraram que é possível realizar a integração eficiente destes dois dispositivos ópticos para produzir uma fonte luminosa que permite a filtragem de uma determinada faixa de comprimentos de onda. Foi demonstrado também que tanto a largura da faixa, como a região de filtragem, podem ser controladas através do índice de refração, espessuras e número de camadas constituintes do filtro interferencial. Os resultados das simulações numéricas mostraram-se bastante coerentes com os resultados experimentais obtidos. / In the present work was realized a study of the viability of integrating two optical devices: incandescent micro-lamps and interferometric filters with the intention of obtaining a single device with specific characteristics. The fabrication of these optical devices was made using dielectric materials, obtained by plasma-enhanced chemical vapor deposition (PECVD), and using conventional microelectronics techniques developed at this laboratory. Numeric simulations, fabrication process and characterization of each one of the two optical devices as well as the characterization of the obtained integrated optical device are presented. The incandescent microlamps were fabricated from a chromium filament, isolated from the environment by two dielectric silicon oxynitride layers, which is powered electrically with a continuous voltage with the purpose of increasing the temperature of the filament to reach the incandescence. With the purpose of reducing the thermal dissipation in that area, the filament was designed and fabricated to be suspended through a partial anisotropic etch of the silicon substrate. On the other hand, the interferometric filters were fabricated on glass substrates starting from a series of alternate Si3N4 and SiO2 layers deposited by PECVD, with thickness of 240 and 340 nm and refraction indexes of 1.91 and 1.46 respectively, with the purpose of producing light transmittance attenuation peaks in the visible region of the electromagnetic spectrum. Filters were fabricated with 9, 11 and 13 layers. The results of this work showed that it is possible to develop the efficient integration of these two optical devices to produce a luminous source that it allows the filtering of a certain range of wavelengths. It was also demonstrated that, the bandwidth as well as the filtering area, can be controlled through the refraction index, thickness and number of constituent layers of the interferometric filter. The results of the numeric simulations showed to be quite coherent with the obtained experimental results.

La problématique entourant la mise en oeuvre, la conception et le conditionnement de micro-capteurs au sein d'une application embarquée représente un enjeu industriel majeur, consiste en un vaste ensemble de défis techniques et touche à de nombreux champs de recherche scientifiques comme d'applications commerciales. Ce mémoire de thèse compile de manière pédagogique et détaillée la conception, la réalisation et l'évaluation expérimentale d'un capteur MEMS constitué d'un simple micro-filament destiné à la mesure, mutuellement, de la température, de la pression et de l'humidité d'une ambiance gazeuse, en utilisant un même et mutuel étage de conditionnement du signal – ce qui en tant que tel constitue une méthode d'intégration particulièrement originale qui est arbitrairement référencée comme "intégration totale". Aussi, le principe physique sous jacent à ce triplet de mesurage est la diffusion par conduction de la chaleur, produite par effet Joule dans l'élément sensible, à travers l'échantillon gazeux l'environnant. Ainsi, le principe de fonctionnement consiste en ce que, la réponse transitoire d'un tel ensemble permet d'une part de mettre en évidence, simultanément et de manière diagonalisable, à une température donnée, l'influence de la pression et de l'humidité sur la conductivité thermique et la capacité calorifique du couple sonde/échantillon. D'autre part, l'élément sensible est spécifiquement prévu pour que dans les conditions initiales du régime transitoire de l'échauffement, sa résistance électrique ne soit sensible qu'à la seule température ambiante, indépendamment des deux mesurandes. / Integration of micro sensors within an embedded system is a challenging task in terms of commercial application and deals with many fields of research. This report compiles a novel methodology of multi-sensor integration, from the design to the experimental evaluation. The reported MEMS gas sensor is made from a resistive micro-wire. It is designed to the sensing of temperature, pressure and humidity of a gaseous sample, at the same time, in using only a single sensing part as well as a single conditioning principle – which is by itself a new feature arbitrarily called "total integration". The physical principle involved here is heat-diffusion, where heat is produced by Joule effect within the resistive sensing part, sinking through the gaseous sample. The key is that the transient response of such a sensor enables the reading of both the sample thermal conductivity and heat capacity, depending on both humidity and pressure at a given temperature, the later being only depending upon the initial response of the sensor transient response.

No desenvolvimento de códigos paralelos, a biblioteca PETSc se destaca como uma ferramenta prática e útil. Com o uso desta ferramenta, este trabalho apresenta um estudo sobre resolvedores de sistemas lineares aplicados a escoamentos incompressíveis de fluidos em microescala, além de uma análise de seu comportamento em paralelo. Após um estudo dos diversos aspectos dos métodos de fronteira imersa, é apresentado um método de fronteira imersa paralelo de primeira ordem. Na sequência, é apresentada uma proposta de melhoria na precisão do método, baseada na minimização da distância entre a condição de contorno exata e aproximada, no sentido de mínimos quadrados. O desenvolvimento de uma ferramenta paralela eficiente é demonstrado na solução numérica de problemas envolvendo escoamentos incompressíveis de fluidos viscosos com fronteiras imersas / In the development of parallel codes, PETSc library has an important position as a practical and useful tool. With this tool, this work presents a study about linear system solvers applied to incompressible flow in microscale problems, furthermore an analysis of the parallel behavior of these methods is presented. After a study of several aspects of immersed boundary methods, and taking advantage of the flexibility of PETSc, a parallel first order immersed boundary method is presented. Thereafter, an improvement in the accuracy of the method is presented, based on the minimization of the distance between exact and approximated boundary conditions, in the least square sense. The development of a parallel and efficient tool is demonstrated in the numerical solution of incompressible viscous flow problems with immersed boundary