[ES] Esta tesis se ha centrado en el modelado, diseño y demostración experimental de un sensor espectroscópico integrado basado en un AWG (del inglés Arrayed Waveguide Grating). El dispositivo ha sido diseñado y fabricado en una nueva plataforma de nitruro de silico (Si3N4) en oxido de silico (SiO2) desarrollada en España. El trabajo realizado en esta tesis se puede dividir en dos secciones principalmente. En la primera parte, se describe el panorama general de las plataformas de Si3N4 existentes y su estado del arte, junto con la descripción de los procesos de fabricación y caracterización de nuestra plataforma de Si3N4 con 300 nm de altura en la capa de guiado. En la segunda parte, se presenta el dispositivo bautizado como Integrated Optical Spectroscopic Sensor (IOSS). El IOSS consiste en un AWG cuyo conjunto de guías de onda está dividido en dos subgupos diseñados para replicar los canales del AWG. Las guías de uno de los subgrupos contienen ventanas de sensado, que están definidas por secciones en las que el núcleo de las guías está al descubierto y, por tanto, en contacto con el medio que las rodea. De esta manera, el sensado se lleva a cabo mediante la interacción del campo evanescente con la muestra depositada. Las guías del segundo subconjunto permanecen inalteradas. Por lo tanto, el dispositivo proporciona al mismo tiempo los espectros de sensado y de referencia. El modelo matemático del IOSS, su procedimiento de diseño y la prueba de concepto del sensor configurado para espectroscopía de absorción se describen en esta tesis. / [CAT] La present tesi s'ha centrat en el modelatge, disseny i demostració experimental d'un sensor espectroscòpic integrat basat en un AWG (de l'anglès Arrayed Waveguide Grating). El dispositiu ha sigut dissenyat i fabricat en una nova plataforma de nitrur de silici (Si3N4) en òxid de silici (SiO2) desenvolupada a Espanya. El treball realitzat en aquesta tesi es pot dividir en dues seccions principalment. En la primera part, es descriu el panorama general de les plataformes de Si3N4 existents i el seu estat de l'art, juntament amb la descripció dels processos de fabricació i caracterització de la nostra plataforma de Si3N4 amb 300 nm d'altura en la capa de guiat. En la segona part, es presenta el dispositiu batejat com Integrated Optical Spectroscopic Sensor (IOSS). El IOSS consisteix en un AWG en el que el seu conjunt de guies d'ona està dividit en dos subgrups dissenyats per a replicar els canals del AWG. Les guies d'un dels subgrups conté finestres de detecció, que estan definides per seccions en les quals el nucli de les guies d'ona està al descobert i en contacte amb el mitjà que li envolta. D'aquesta manera, la detecció es duu a terme mitjançant la interacció del camp evanescent amb la mostra depositada. Les guies del segon subconjunt romanen inalterades. Per tant, el dispositiu proporciona al mateix temps els espectres de detecció de referència. El model matemàtic del IOSS, el seu procediment de disseny i la prova de concepte del sensor configurat per a espectroscopia d'absorció es descriuen en aquesta tesi. / [EN] This thesis is focused on the model, design and experimental demonstration of an integrated spectroscopic sensor based on a modified Arrayed Waveguide Grating (AWG). The device has been designed and fabricated in a new silicon nitride (Si3N4) on silicon oxide (SiO2) platform developed in Spain. The work performed for this thesis can be then divided into two main sections. In the first part, an overview of the existing Si3N4 platforms and their state of art is described, alongside the report on the fabrication and characterization of our 300 nm guiding film height Si3N4 platform. On the second part, the device named Integrated Optical Spectroscopic Sensor (IOSS) is presented. The IOSS consists of an AWG which arrayed waveguides are divided into two sub-sets engineered to replicate the AWG channels. The waveguides of one of the sub-sets contain sensing windows, defined as waveguides sections which core is in contact with the surrounding media. Thus, the sensing is performed through evanescent field interaction with the sample deposited. The waveguides from the second sub-set remain isolated. Therefore, the device provides both sensing and reference spectra. The IOSS mathematical model, design procedure and proof of concept configured for absorption spectroscopy are reported in this thesis. / Micó Cabanes, G. (2020). Integrated Spectroscopic Sensor fabricated in a novel Si3N4 platform [Tesis doctoral]. Universitat Politècnica de València. https://doi.org/10.4995/Thesis/10251/159381

El creciente número de controles analíticos requeridos en áreas como la sanitaria, el medio ambiente o la alimentación conlleva la necesaria automatización de los procesos analíticos.De acuerdo con ello, en esta tesis se han desarrollado, implementado y puesto a punto nuevos métodos automáticos de análisis robustos y económicos para la determinación de analitos de interés medioambiental, clínico e industrial. La automatización de las metodologías, empleando las técnicas de flujo MSFIA y MPFS, simplifican de forma considerable el procesamiento analítico con un importante ahorro de reactivos y tiempo, y permiten una mayor frecuencia de análisis, con la consecuente reducción del coste por análisis y en la generación de residuos. Los métodos propuestos son selectivos, reproducibles, precisos, robustos y en casi su totalidad son ejecutados sin la intervención del analista. / O crescente número de controlos analíticos requeridos em diversas áreas como o médio ambiente, a indústria sanitária ou a alimentar, conduziu à necessidade de automatização dos processos analíticos.Indo de encontro a estes requisitos, nesta tese desenvolveu-se, implementou-se e colocou-se em prática novos métodos de análise automáticos robustos e económicos para a determinação de analitos com interesse ambiental, clínico e industrial. A automatização das metodologias aplicando as técnicas de fluxo MSFIA e MPFS, simplificam de forma considerável o procedimento analítico com um decréscimo importante de reagentes gastos e tempo de análise, permitindo uma maior frequência de análise, com consequente redução do custo de análise e de geração de resíduos. Os métodos propostos são selectivos, reprodutíveis, precisos e robustos.

Les insectes sont capables de prouesses remarquables lorsqu’il s’agit d’éviter des obstacles,voler en environnement perturbé ou poursuivre une cible. Cela laisse penser que leurs capacités de traitement, aussi minimalistes soient-elles, sont parfaitement optimisées pour le vol. A cela s’ajoute des mécanismes raffinés, comme la stabilisation de la vision par rapport au corps, permettant d’améliorer encore plus leurs capacités de vol.Ces travaux de thèse présentent l’élaboration d’un micro drone de type quadrirotor, qui ressemble fortement à un insecte sur le plan perceptif (vibration rétinienne) et reprend des points structurels clés, tels que le découplage mécanique entre le corps et le système visuel. La conception du quadrirotor (de type open-source), son pilotage automatique et son système occulo-moteur sont minutieusement détaillés.Des traitements adaptés permettent, malgré un très faible nombre de pixels (24 pixels seulement), de poursuivre finement du regard une cible en mouvement. A partir de là, nous avons élaboré des stratégies basées sur le pilotage par le regard, pour stabiliser le robot en vol stationnaire, à l’aplomb d’une cible et asservir sa position ; et ce, en se passant d’une partie des capteurs habituellement utilisés en aéronautique tels que les magnétomètres et les accéléromètres. Le quadrirotor décolle, se déplace et atterrit de façon autonome en utilisant seulement ses gyromètres, son système visuel original mimant l’oeil d’un insecte et une mesure de son altitude. Toutes les expérimentations ont été validées dans une arène de vol, équipée de caméras VICON.Enfin, nous décrivons une nouvelle toolbox qui permet d’exécuter en temps réel des modèles Matlab/Simulink sur des calculateurs Linux embarqués de façon complètement automatisée (http://www.gipsalab.fr/projet/RT-MaG/). Cette solution permet d’écrire les modèles, de les simuler, d’élaborer des lois de contrôle pour enfin, piloter en temps réel, le robot sous l’environnement Simulink. Cela réduit considérablement le "time-to-flight" et offre une grande flexibilité (possibilité de superviser l’ensemble des données de vol, de modifier en temps réel les paramètres des contrôleurs, etc.). / Insects, like hoverflies are able of outstanding performances to avoid obstacles, reject disturbances and hover or track a target with great accuracy. These means that fast sensory motor reflexes are at work, even if they are minimalist, they are perfectly optimized for the flapping flight at insect scale. Additional refined mechanisms, like gaze stabilization relative to the body, allow to increase their flight capacity.In this PhD thesis, we present the design of a quadrotor, which is highly similar to an insect in terms of perception (visual system) and implements a bio-inspired gaze control system through the mechanical decoupling between the body and the visual system. The design of the quadrotor (open-source), itspilot and its decoupled eye are thoroughly detailed. New visual processing algorithms make it possible to faithfully track a moving target, in spite of a very limited number of pixels (only 24 pixels). Using this efficient gaze stabilization, we developed new strategies to stabilize the robot above a target and finely control its position relative to the target. These new strategies do not need classical aeronautic sensors like accelerometers and magnetometers. As a result, the quadrotor is able to take off, move and land automatically using only its embedded rate-gyros, its insect-like eye, and an altitude measurement. All these experiments were validated in a flying arena equipped with a VICON system. Finally, we describe a new toolbox, called RT-MaG toolbox, which generate automatically a real-time standalone application for Linux systems from a Matlab/Simulink model (http://www.gipsalab.fr/projet/RT-MaG/). These make it possible to simulate, design control laws and monitor the robot’s flight in real-time using only Matlab/Simulink. As a result, the "time-to-flight" is considerably reduced and the final application is highly reconfigurable (real-time monitoring, parameter tuning, etc.).

Several sensor technologies have been developed and experimented over the last few decades to cater various needs of medical diagnostics. Among these, fiber optic sensors, in particular, Fiber Bragg Grating (FBG) based sensors have attracted considerable attention due to their inherent advantages such electrical passiveness, immunity to Electro Magnetic Interference (EMI), chemical inertness, etc. The present research work focuses on design, development and validation of FBG sensor based devices for measurement of certain healthcare parameters in the context of foot function/gait cycle, cardiac and breathing activity, nostril dominance, hand grip/wrist angle force function, etc. The experimental work presented here emphasizes on the effectiveness and competitiveness of the FBG devices developed, in comparison with standard tools such as Accelerometer, Load cell, Electronic Stethoscope, Electromyogram and Dynamometer. In the field of human balance, stability and geriatrics, two independent FBG devices namely, Fiber Bragg Grating based Stability Assessment Device (FBGSAD) and Optical Sensor Ground Reaction Force measurement Platform (OSGRFP) have been designed, developed and experimented for postural stability assessment and gait analysis respectively. The result of these studies have significant implications in understanding of the mechanism of plantar strain distribution, identifying issues in gait cycles, detecting foot function discrepancies, identifying individuals who are susceptible to falls and to qualify subjects for balance and stability. In the field of ergonomic assessment, Fiber Braggs Grating based Hand Grip Device (FBGHGD) is designed and developed for the measurement of hand grip force which helps in the understanding of several important biomechanical aspects such as neuromuscular system function, overall upper-limb strength, vertebral fracture, skeletal muscle function, prediction of disability, incapacity, mortality and bone mass density (forearm, skeletal sites, spine, hip etc.). Further as an extension of this work, the FBGHGD is used for measurement of force generated by the wrist in different positions of the flexion and extension which relates to the wrist muscle activity and its enactment. In the field of cardiac activity monitoring, a novel, in-vivo, non-invasive and portable device named Fiber Bragg Grating based Heart Beat Device (FBGHBD) is developed for the simultaneous measurement of respiratory and cardiac activities. The work involves designing FBGHBD, validating its performance against traditional diagnostic systems like electronic stethoscope, exploration of its clinical relevance and the usage of FBGHBD in studies involving normal persons and patients with myocardial infarction. The unique design of FBGHBD provides critical information such as nascent morphology of cardiac and breathing activity, heart rate variability, heart beat rhythm, etc., which can assist in early clinical diagnosis of many conditions associated to heart and lung malfunctioning. Further, the scope of this work extends towards evaluating several signal processing algorithms and demonstrating a suitable signal processing architecture for real-time extraction of heart beat and respiratory rates along with its nascent morphologies for critical health care application. In the area of breath monitoring, a Nostril Pressure and Temperature Device (NPTD) is designed and developed which aims at simultaneous, accurate and real-time measurement of nostril air flow pressure and temperature to aid in clinical diagnosis of nasal dysfunction and associated nose disorders. The results of NPTD can offer certain vital features like breathing pattern, respiratory rate, changes in individual nostril temperature/pressure, nostrils dominance, body core temperature etc., which can assist in early clinical diagnosis of breathing problems associated with heart, brain and lung malfunctioning. Since the research work in this thesis involve experiments engaging human subjects, necessary approvals from the ethical committee is obtained before the experiments and required ethical procedures are followed during all the experimental trials.

[pt] Sensores baseados na espectroscopia de ressonância de plásmons de superfície (SPR) são dispositivos fotônicos amplamente usados para a detecção ultra sensível de gases e analitos (bio) químicos sem marcadores. O mecanismo de sensoriamento baseia-se na sensitividade do campo eletromagnético evanescente associado aos Polaritons de Plásmon de Superfície (SPP) propagando-se na interface metal-dielétrica, o qual age como uma eficiente nanosonda no meio exterior. Mesmo com resultados excelentes em aplicações de sensoriamento em tempo real, a espectroscopia SPR encontra severas limitações nas caracterizações elipsométricas de filmes finos com espessuras maiores que alguns nm. As limitações são principalmente associadas a instabilidade no longo prazo das propriedades físico-químicas das interfaces metal-dielétricas dos dispositivos SPR, a qual prejudica a acurácia na determinação simultânea da espessura e do índice de refração dos filmes finos que estão sendo investigados. Por estas razões, a primeira parte da tese é dedicada ao estudo da degradação e do processo de estabilização das interfaces metal-dielétricas de diferentes plataformas de sensoriamento SPR, tanto no ar como em ambiente aquoso. As plataformas de sensoriamento foram monitoradas por espectroscopia SPR e microscopia de força atômica (AFM). Diferentes configurações de interfaces metal-dielétricas foram analisadas, tanto em termos de camadas de adesão, tipo de metal que suporta a onda de plasma, e supercamadas, com o objetivo de otimizar a estabilidade e a sensitividade de plataformas SPR monomodais e multimodais. As melhores performances foram obtidas quando uma interface metal-dielétrica com baixo amortecimento eletromagnético é criada através da deposição de uma monocamada adesiva de (3-Mercaptopropyl) trimethoxysilane (MPTS), e quando uma monocamada de grafeno (SLG) é transferida como supercamada na cima de um filme fino metálico de ouro. O estudo do processo de estabilização das plataformas SPR foi a base para o desenvolvimento da segunda parte da tese, onde nós mostramos as potencialidades da espectroscopia SPR na configuração Kretschmann para a acurada caracterização elipsométrica de três classes de materiais deferentes: nanopartículas de ouro (AuNPs), filmes finos de materiais orgânicos luminescentes, e grafeno. Para determinar simultaneamente a espessura e o índice de refração dos filmes finos, foram adoptados os métodos das duas cores e/ou dois modos, esse último realizado através do uso de guias de onda carregadas por dielétricos (DLWGs) com interfaces simétricas do tipo Au/MPTS/SiO2. Por fim, estas três classes de materiais foram usadas no desenvolvimento de novos sensores ópticos SPR de interesse biológico e ambiental. A prova de conceito de um dosímetro de raios UVA baseado em espectroscopia SPR é demonstrado através do monitoramento das modificações da espessura e índice de refração induzidas pela radiação em filmes finos de tris (8-hydroxyquinoline) (Alq3) e tris (dibenzoylmethane) mono (1,10-phenanthroline) europium (III) (Eu (dbm)3Phen). AuNPs com um diâmetro nominal de 15nm estabilizadas por citrato de sódio, foram usadas para demonstrar o princípio de funcionamento de medidores de tamanho de partículas e contadores superficiais de AuNPs baseados na espectroscopia SPR de duas cores. Neste último caso, nós mostramos experimentalmente que as DLWG podem ser usadas como acurados nanocontadores para densidades superficiais entre 20 e 200 NP/um2, com importantes resultados para a metrologia óptica e a emergente espectroscopia SPR amplificada por nanopartículas (PA-SPR). Por último, mostramos o utilizo da interface Au/SLG para a detecção ultra-sensível de íons de metais pesados de interesse ambiental, com um limite de detecção (LoD) sem precedentes da ordem de uma parte por bilhão (ppb). Os resultados experimentais suportam as previsões teóricas sobre a afinidade de sítios particulares do grafeno infinito para íons de metais pesados, e a possibilidade de aumentar a sensibilidade dos dispositivos SPR através da transferência de elétrons assistida por plásmons entre o filme de metal e o SLG. / [en] Surface Plasmon Resonance (SPR) Spectroscopy based sensors have emerged as a versatile and widely used optical tool for the label free ultrasensitive detection of gas and (bio) chemical analytes. The sensing mechanism is relying on the sensitivity of the evanescent field of the Surface Plasmon Polariton (SPP) wave propagating at metal dielectric interface, which acts as an efficient optical nanoprobe in the external medium. Despite the excellent results in the real-time sensing applications, SPR Spectroscopy has found limited applications in the accurate ellipsometric characterization of thin films with thickness higher than a few nm. The limitations are mainly associated with the long-time instability of the metal-dielectric interfaces of the SPR devices, which deteriorates the accuracy in the simultaneous determination of thickness and refractive index of the thin films under investigation. For these reasons, the first part of the dissertation is dedicated to the study of the degradation and stabilization process of the metal-organic interfaces of different SPR sensing platforms, in both air and water environment. The sensing platforms were monitored by SPR spectroscopy and atomic force microscopy (AFM). Different metal-dielectric interfaces configurations were analyzed, in terms of both adhesion layers, type of metal supporting the plasma wave and super-layers, with the aim to optimize the stability and the sensitivity of both monomodal and multimodal SPR platforms. The best performances were obtained when a low damping metal-dielectric interface is created through the self-assembling of a monolayer of (3-Mercaptopropyl) trimethoxysilane (MPTS), and a single layer graphene (SLG) is transferred as a super-layer on the gold (Au) thin film. The study of the process of stabilization of the SPR platforms was the base for the development of the second part of the dissertation, where we demonstrate the potentialities of the SPR spectroscopy in the Kreschtmann configuration for the accurate ellipsometric characterization of a class of three different materials: gold nanoparticles (AuNPs), organic luminescent materials, and graphene. To obtain the simultaneous determination of both the thickness and refractive index of the thin films, a two-color and/or two-mode approach was adopted, the latter performed by the use of dielectric loaded waveguides (DLWG) with symmetric Au/MPTS/SiO2 interfaces. Finally, the three class of materials have been used for the development of novel SPR optical sensors with environmental or biological interest. The proof of principle of an SPR based UVA dosimeter is demonstrated via the monitoring of the radiation induced modifications of the thickness and refractive index of luminescent thin film of tris(8-hydroxxyquinoline) (Alq3) and tris(dibenzoylmethnae) mono(1,10-phenanthroline) europium (III) (Eu(dbm)3Phen). Sodium Citrate stabilized AuNPs with a nominal diameter of about 15 nm were used to show the principle work of a two-color SPR spectroscopy nanosizer and nanocounter. In the latter case, we demonstrate experimentally that DLWGs can be used as accurate nanocounters in the range of surface density between 20 and 200 NP/um2, with results important for both optical metrology and the emerging particle amplified PA-SPR spectroscopy. Finally, we show the use of the Au/SLG interface for the ultrasensitive detection of heavy metal ions of environmental interest, with an unprecedented limit of detection (LoD) of the order of part per billion (ppb). The experimental results support the theoretical predictions about the affinity of particular sites of the infinite graphene to heavy metal ions, and the possibility to enhance the sensitivity of SPR devices by the plasmon assisted electron transfer between the metal film and the SLG.

Globally, there is growing concern about the health risks of water and air pollution. The U.S. Environmental Protection Agency (EPA) has developed a list of priority pollutants containing 129 different chemical compounds. All of these chemicals are of significant interest due to their serious health and safety issues. Permanent exposure to some concentrations of these chemicals can cause severe and irrecoverable health effects, which can be easily prevented by their early identification. Molecularly imprinted polymers (MIPs) offer great potential for selective adsorption of chemicals from water and air samples. These selective artificial bio(mimetic) receptors are promising candidates for modification of sensors, especially disposable sensors, due to their low-cost, long-term stability, ease of engineering, simplicity of production and their applicability for a wide range of targets. Herein, innovative strategies used to develop MIP-based sensors for EPA priority pollutants will be reviewed.

This diploma thesis deals with the influence of long fiber optic paths on the polarization state of light and their use for powering polarization sensors. The aim of the diploma thesis was to design the arrangement of optical fiber components so that the polarization properties of light at the end of the path are further usable for sensory purposes. Four partial measurements with a long path (in a laboratory setting, laying in the ground, on a curtain, under the influence of external influence) and one measurement without a path under the influence of external influence were designed. The overall measurement results demonstrate that for the functional power supply of long-distance sensor systems, an existing single-mode fiber can be used (laid by laying in the ground), into which a light source for a given sensor system would be multiplexed. In the discussion, all types of measurements are analyzed and compared with each other. Finally, the overall result is summarized and applications are described in which such a sensor system could be used.

Ultraprecision single point diamond turning is required to produce parts with sub-nanometer surface roughness and sub-micrometer surface profiles tolerances. These parts have applications in the optics industry, where tight form accuracy is required while achieving high surface finish quality. Generally, parts can be polished to achieve the desired finish, but then the form accuracy can easily be lost in the process rendering the part unusable. Currently, most mid to low spatial frequency surface finish errors are inspected offline. This is done by physically removing the workpiece from the machining fixture and mounting the part in a laser interferometer. This action introduces errors in itself through minute differences in the support conditions of the over constrained part on a machine as compared to the mounting conditions used for part measurement. Once removed, the fixture induced stresses and the part’s internal residual stresses relax and change the shape of the generally thin parts machined in these applications. Thereby, the offline inspection provides an erroneous description of the performance of the machine. This research explores the use of a single, high resolution, capacitance sensor to quickly and qualitatively measure the low to mid spatial frequencies on the workpiece surface, while it is mounted in a fixture on a standard ultraprecision single point diamond turning machine after a standard facing operation. Following initial testing, a strong qualitative correlation exists between the surface profiling on a standard offline system and this online measuring system. Despite environmental effects and the effects of the machine on the measurement system, the capacitive system with some modifications and awareness of its measurement method is a viable option for measuring mid to low spatial frequencies on a workpiece surface mounted on an ultraprecision machine with a resolution of 1nm with an error band of ±5nm with a 20kHz bandwidth. / Thesis / Master of Applied Science (MASc)