This diploma thesis deals with the analysis of Quality management system in a selected organization with respect to the requirements of IATF 16949:2016 standard. The theoretical part is focused on quality, especially, on quality management systems, concepts of these systems and also directly on the industry standard IATF 16949:2016 and its requirements. The practical part deals with the quality management system directly in the company CB Plast CR s.r.o. At first, the characteristics of the company with subsequent analysis of the application of selected requirements of industry standard IATF16949:2016 is described. Also, the analysis of the selected area of the quality management system and survey focused on awareness of company employees of the implemented quality management system is a part of the practical part of the thesis. The current status of the quality management system in the company CB Plast CR s.r.o. with respect to the requirements of the industry standard and recommendations for ensuring higher efficiency of the implemented quality management system are shown at the end of the practical part of this thesis.

Thesis (MTech (Quality))--Cape Peninsula University of Technology, 2017. / The diffusion of a Quality Management System (QMS) to improve business performance depends upon the quality management strategy used. The aim of Eskom’s QMS strategy was to create a sustainable quality drive throughout the company to improve customer and stakeholder satisfaction. This research project’s objective is to determine how the diffusion of a QMS can improve the electricity supply industry in the Western Cape division of the electricity sector in South Africa. The key research objectives within the research study are:  to assess what effect a QMS has on a sustainable long-term solution for energy supply;  to assess how a QMS contributes to the establishment of world class processes and practices;  to determine how a QMS affects quality culture;  to determine what factors of a QMS play a role in a continual improvement process, and  to determine what barriers affect a sustainable QMS implementation. The research question is: “how can the diffusion of a QMS bring improvement to the electricity supply industry?” A quantitative research methodology was employed in the study. The responses to a survey questionnaire were analysed and conclusions were drawn. The research finding is that diffusion of a QMS improves the electricity industry by positively affecting attitudes towards the challenge of securing a sustainable long-term energy supply, improving processes and practices, engendering a quality culture and contributing towards continual improvement. At the same time, certain barriers to the implementation of a sustainable QMS were identified.

Propriedades benéficas são associadas ao consumo moderado de vinho devido à presença dos compostos fenólicos. Uma dose diária de vinho de até 200 ou 300 mL é sugerida para mulheres e homens, respectivamente. Entretanto, dentre os compostos presentes nos vinhos, podem ser encontrados compostos carbonílicos tóxicos, como o formaldeído, acroleína, acetaldeído, furfural e carbamato de etila, os quais tem sido associados a efeitos adversos à saúde humana, incluindo o câncer. O objetivo deste trabalho foi desenvolver e validar um método para a quantificação simultânea destes compostos tóxicos através da microextração em fase sólida no modo headspace associada à cromatografia gasosa acoplada à espectrometria de massas quadrupolar no modo de monitoramento de íons selecionados (HS-SPME- GC/qMS-SIM) e caracterizar o risco relacionado à exposição a estes compostos. Quatro etapas da vinificação (uva, mosto, após a fermentação alcoólica e vinho) e vinhos comercialmente disponíveis foram analisados com o uso da GC/qMS-SIM após verificar as coeluições através da cromatografia gasosa bidimensional abrangente acoplada ao detector de espectrometria de massas por tempo de voo (GC×GC- TOFMS). O acetaldeído e a acroleína derivatizados coeluíram na primeira dimensão cromatográfica com o limoneno e o hexanoato de metila, respectivamente. Em função disso, foram escolhidos como íons quantificadores na análise por GC/qMS, íons que não foram encontrados no espectro de massas dos compostos coeluídos. Os parâmetros de validação (LOD, LOQ, recuperação, repetibilidade e reprodutibilidade) mostraram que a HS-SPME-GC/qMS-SIM é adequada para quantificar simultaneamente os cinco compostos tóxicos. A acroleína foi encontrada em concentrações similares na uva e mosto, e não foi detectada após a fermentação alcoólica e no vinho. O acetaldeído foi detectado em menores concentrações no mosto e em maiores níveis após a fermentação alcoólica. A concentração de furfural foi maior nas uvas do que nas demais etapas. O carbamato de etila não foi detectado nas etapas da vinificação e nos vinhos comerciais. Os níveis de formaldeído ficaram entre os valores de LOD e LOQ em todas as etapas da vinificação e nos vinhos comerciais. Além disso, nos vinhos comercialmente disponíveis, a acroleína foi encontrada em 50% das amostras, o acetaldeído e o furfural estavam presentes em todas as amostras. O único composto cuja ingestão pode representar risco a saúde é a acroleína. Dessa forma, este estudo contribuiu para identificar os pontos críticos de controle relacionados à presença de compostos tóxicos durante a vinificação, incluindo a produção do acetaldeído durante a fermentação alcoólica e a contaminação das uvas com acroleína e furfural através do ar atmosférico. Além disso, os resultados da ocorrência destes compostos tóxicos em vinhos comercialmente disponíveis poderão contribuir para a criação de uma legislação nacional que estabeleça limites dos mesmos nesta bebida. / Beneficial properties are associated with moderate consumption of wine due to the presence of phenolic compounds. A daily intake of wine of up to 200 or 300 mL is suggested for women and men, respectively. However, toxic carbonyl compounds such as formaldehyde, acetaldehyde, acrolein, furfural and ethyl carbamate can be found among the compounds present in wines, which have been associated with adverse effects on human health, including cancer. The objective of this work was to develop and validate a method for simultaneous quantification of these toxic compounds through headspace solid phase microextraction associated with gas chromatography with quadrupole mass spectrometric detection in selected-ion monitoring mode (HS-SPME-GC/qMS-SIM) and characterize the risk related to exposure to these compounds. Four vinification steps (grape, must, after alcoholic fermentation and wine) and commercially available wine were analyzed using GC/qMS-SIM after checking the coelutions by comprehensive two-dimensional gas chromatography with time-of-flight mass spectrometry (GC×GC-TOFMS). The derivatized acetaldehyde and acrolein coeluted in the first chromatographic dimension with limonene and methyl hexanoate, respectively. Based on this, were chosen as quantifiers ions in GC/qMS analysis, ions that were not found in the mass spectra of the coeluted compounds. The validation parameters (LOD, LOQ, recovery, repeatability and reproducibility) showed that HS-SPME-GC/qMS-SIM is adequate to simultaneously quantify the five toxic compounds. Acrolein was found at similar concentrations in grape and must, and was not detected after alcoholic fermentation and in wine. Acetaldehyde was detected at lower concentrations in the must and at higher levels after alcoholic fermentation. The concentration of furfural was higher in the grapes than in the other stages. Ethyl carbamate was not detected in the vinification steps and in commercially wine. Formaldehyde levels were between the LOD and LOQ values at all stages of winemaking and commercial wines. In addition, in commercially available wines, acrolein was found in 50% of samples, acetaldehyde and furfural were present in all samples. The only compound whose intake may pose a health risk is acrolein. Thus, this study contributed to identify critical control point related to the presence of toxic compounds during winemaking, including the production of acetaldehyde during alcoholic fermentation and the contamination of grapes with acrolein and furfural through atmospheric air. In addition, the results of the occurrence of these toxic compounds in commercially available wines may contribute to the creation of national legislation that establishes limits of the same in this drink.

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Martin Ivarsson, manager and part owner at Landeryd’s Mechanical Workshop (LMW), Landeryd, Sweden, initiated this project. This because of a new released ISO 9001 version that LMW has to implement before the 15th of September 2018 to remain certified. Since LMW is ISO 9001:2008 certified the project members only needed to identify the differences among the 2015 and 2008 version to see what LMW has to do to get certified. There are approximately 1.1 million ISO 9001 certificates issued worldwide. An ISO 9001 certification increase organizations ability to satisfy customer needs and customers can rely on that the products and services provided are of consistently good quality. ISO 9001 can also work as a tool to streamline the organization’s processes and make them more efficient. Since the ISO 9001 is reviewed every five year it helps organizations to keep current in an ever- changing world. Landeryd’s Mechanical Workshop has been ISO 9001 certified since 2002 and the “ISO- think” is deeply rooted within the company. LMW is a small owner-controlled company with only 18 employees. ISO 9001:2015 is applicable on different kinds of organizations in various scales. Comparing to previous versions of ISO 9001 the new version is more adaptable. This makes it more beneficial for the organizations but harder for the auditors that certifies. One major conclusion is that LMW will have more freedom of document handling with the new ISO version. This report highlights LMW’s status today in accordance to the new ISO 9001 version, and estimates how much effort that is needed for a successful revision. Readers of this report will benefit from the results, since much is applicable on all types of organizations or companies.

This diploma thesis "Quality Management in the Selected Company" is focused on the quality management system in an international company, which is located in České Budějovice. The aim of this thesis is to suggest changes and recommendations for achieving higher level in current applied quality management system. Based on results from analysis of the chosen QMS areas, the respective suggestions were proposed. Based on the information from theoretical review, internal document analysis, interviews with the high management representatives and data analysis, various changes were suggested. All with one goal: establishing, keeping and continuously improving the quality management system which helps to ensure a prosperous and effectively working organisation with a stable position in the market where the organisation is present.

Today's industries are constantly evolving and the demands according to quality for products and services produced and performed are becoming more and higher. ISO 9001 is a standard that serves as a tool for organizations who wants to effectively control and manage their quality workforce on business different processes. A background to the introduction of a quality managementsystem towards Skärås svets och mekaniska in Västerås are that more and more customers demand this from a company to enable it to obtain an order of production. Efforts to introduce a quality system such as ISO 9001-2008 all begin with to carry out a situationanalysis of the business. Skärås svets och mekaniska currently has no existing quality management system so therefore there is no current directives regarding who is responsible, for a future certification in the business. By structuring a situation analysis of the business. You get a good overview of the business and how it is conducted today. This analysis can be performed in separate ways, but this thesis has chosen to perform it using the process mapping. Process mapping is a powerful tool for an organization, not just as a situation analysis, but as a tool for future efficiencies and improvements. Process mapping has been done in accordance with walk-trough concept where you go through the tasks that are within the business itself and see what the people involved in the making are doing in there tasks. To compile this to the process maps later on. An Analysis of the process and the mapping of them compered to the requirements of ISO 9001-2008. Is explaining where Skärås svets och mekaniska really are today in the work towards a future certification. Against what the standard requires. What do you need to implement in their business or change for a future certification will be possible?. This is one of the main issues reguarding this thesis. The results of this thesis is a comprehensive situation analysis consisting of process maps for Skärås svets och mekaniska, and an analysis of these against the requirements of ISO 9001-2008 standard. That are requiered for a business lika Skärås svets och mekaniska in order to be able to certify against the ISO 9001 Series.

L'étude du climat implique nécessairement la collecte et le traitement d'une grande quantité de données obtenues par l'analyse d'archives climatiques telle que les carottes de glace. Dans ce contexte, ce travail présente le plus long enregistrement jamais obtenu d'éléments crustaux, métaux, métalloïdes, terres rares, mercure et isotopes du plomb. Cet enregistrement a été possible grâce à un forage récent réalisé en Antarctique de l'Est permettant d'obtenir une carotte de glace profonde (EPICA/Dome C, 3270 m). Ces éléments ont été étudiés dans de nombreuses sections de la carotte de glace EPICA/Dome C de 263 000 à 671 000 ans avant nos jours. <br /><br />L'analyse d'éléments crustaux, métaux, métalloïdes, terres rares, mercure ont été réalisées grâce à un spectromètre de masse à secteur magnétique couplé à un plasma induit. La caractérisation des isotopes du plomb et l'analyses de methylmercure et mercure inorganique ont quant à elles étaient rendues possible par l'utilisation d'un spectromètre de masse à ionisation thermique et d'un spectromètre de masse à temps de vol couplé à un plasma induit. Ces analyses ont toutes été effectuées en salle blanche. <br /><br />L'étude des éléments crustaux (V, Cr, Mn, Fe, Co, Rb, Ba et U) a permis de quantifier les variations naturelles des flux de ces éléments dans les glaces de l'Antarctique de l'Est de 263 000 à 671 000 ans avant nos jours. On a remarqué de fortes variations naturelles de concentration et de flux au cours de ces 6 cycles climatiques, avec des flux de retombées plus faibles pendant les périodes chaudes (interglaciaires) et des flux plus fort pendant les périodes froides (maxima glaciaires). De plus, ces apports augmentent brutalement en Antarctique de l'Est quand δD ≤ - 430‰. <br /><br />Pour la première fois, les terres rares ont pu être analysées dans une carotte de glace profonde. Les variations temporelles et la provenance des terres rares, d'origine crustale, dans l'Antarctique de l'Est ont été étudiées de 263 000 à 671 000 ans avant nos jours. Ainsi, l'origine géographique des éléments crustaux pendant les périodes glaciaires et interglaciaires a été précisée grâce à la comparaison de données de terres rares obtenues dans la carotte EPICA/Dome C et celles provenant de régions potentielles d'origine des aérosols de l'hémisphère austral. L'Australie et la province de Córdoba apparaissent comme étant les sources dominantes à part égales sur le plateau de l'Antarctique de l'Est au cours des maxima glaciaires peu prononcés (MIS 12.2, 12.4 et 14.2). Différemment, les maxima glaciaires plus prononcés (MIS 8.2, MIS 10.2, 10.4 et16.2) montrent des ratios différents : ces éléments crustaux proviennent à 80-90% de la région de Cordoba et à 20-10% de l'Australie. Pendant les périodes interglaciaires, l'Amerique du Sud (Argentine du Sud, Argentine Centrale, et peut-être la Patagonie), les montagnes Transantarctiques (glacier Koettkitz) et l'Australie apparaissent comme étant les sources dominantes au Dome C. <br /><br />Les concentrations des métaux et des métalloïdes ont été mesurées de 263 à 671 ka BP afin d'examiner la variabilité à long-terme de ces éléments, d'évaluer les contributions de sources naturelles et les modes de transport. De fortes variations naturelles de concentration et de flux au cours de ces 6 cycles climatiques ont été observées, avec des flux de retombées plus faibles pendant les périodes chaudes (interglaciaires) et des flux plus fort pendant les périodes froides (maxima glaciaires). Cependant, certains métaux varient plus que d'autres. En particulier, l'approche isotopique du plomb apporte une contribution importante dans l'interprétation des variations de compositions de poussières d'origine crustale en Antarctique.<br /><br />Finalement, pour la première fois, le mercure total, le methylmercure et le mercure inorganique ont été mesurés dans une carotte de glace profonde. Cette analyse montre des concentrations qui varient considérablement au cours des derniers 671 000 ans, avec de faibles valeurs pendant les interglaciaires et de fortes valeurs pendant les périodes les plus froides. L'analyse de ces éléments a permis de déterminer les variations en paleoproductivité océanique et de mieux comprendre les procédés de dépôts de mercure au cours des derniers 671 000 ans.

Ruthenium und sein elektrisch leitfähiges Rutheniumdioxid sind viel versprechende Kandidaten als Elektrodenmaterial in MIM (Metall-Isolator-Metall-)Kondensatoren mit Dielektrika hoher Permittivität der nächsten Generation von DRAM-Speichern, als Metall-Gate-Elektroden in p-Kanal-MOS-Transistoren mit Dielektrika hoher Permittivität, oder als Keimschicht für das direkte elektrochemische Abscheiden von Kupfer-Verbindungsleitungen. Die ALD (Atomic Layer Deposition) wächst Materiallagen mit weniger als einem Zehntel Nanometer Dicke, indem sie gasförmige Reaktanden abwechselnd, getrennt durch spülende Pulse, in die Reaktionskammer einleitet. Dadurch wird mit jeder zyklischen Wiederholung idealerweise selbstbeendender Gas-Festkörper-Reaktionen stets die gleiche Materialmenge abgeschieden, bis eine gewünschte Schichtdicke erreicht ist. Wie sich die Oberfläche aufgrund der Materialabscheidung während der ALD verändert, kann mit der in-situ SE (Spektroskopische Ellipsometrie) beobachtet werden. Die Ellipsometrie misst die Änderung eines Polarisationszustands bzgl. Amplitude und Phase, nachdem ein einfallender Lichtstrahl von einer (schichtbedeckten) Oberfläche reflektiert und/ oder durch diese transmittiert wurde. Die ellipsometrischen Daten stehen im direkten Zusammenhang mit optischen Materialparametern und sind somit physikalisch interpretierbar – oder sie werden in eindimensionale strukturelle Größen, wie die Schichtdicke übersetzt. In dieser Arbeit wurden Schichten aus Ruthenium und Rutheniumdioxid aus dem Präkursor ECPR, [(Ethylcyclopentadienyl)(Pyrrolyl)Ruthenium(II)], und molekularem Sauerstoff per ALD gewachsen. Die chemischen Teilreaktionen wurden während der ALD von Ruthenium und Rutheniumoxid auf frisch abgeschiedenen Schichtoberflächen per in-situ SE, on-site QMS (Quadrupol-Massenspektrometrie) und XPS (Röntgen-Photoelektronenspektroskopie) ohne Vakuumunterbrechung untersucht. Weiterhin wurden Experimente zum Schichtwachstum auf frisch abgeschiedenen Schichten sowie einer Ausgangssubstratoberfläche per in-situ und Echtzeit SE durchgeführt, wobei die folgenden Prozessparameter variiert wurden: die jeweilige Reaktanden Dosis, die Spülpulsdauern, die Substrattemperatur und der Prozessdruck. / Ruthenium and its conductive dioxide are promising candidates as electrodes in MIM (metal-insulator-metal) capacitors with high-k dielectrics of next generation DRAM (dynamic random access memory) devices, as metal-gate electrodes in pMOS-Transistors with high-k dielectrics, and as seed layer for direct electrochemical plating of copper interconnects. ALD (atomic layer deposition) grows material layers with less than a tenth of a nanometer thickness, pulsing gaseous reactants alternately into the reaction chamber, separated by purging pulses. Hence, every cyclic recurrence of ideally self-limiting gas-solid reactions deposits a fixed material amount, until the desired film thickness is achieved. So, the surface’s chemical composition changes through material deposition during ALD, observable by in-situ SE (spectroscopic ellipsometry). Ellipsometry measures the polarization state’s change in amplitude and phase, reflecting an incident light beam from and/ or transmitting it through a (film covered) surface. The ellipsometric data can be directly related to optical material parameters and are thus physically interpretable – or they are translated into one-dimensional structural values, like film thickness. In this work, ruthenium and ruthenium dioxide films were grown from ECPR, [(ethylcyclopentadienyl)(pyrrolyl)ruthenium(II)], and molecular oxygen. Reaction mechanisms during the ALD of ruthenium and ruthenium dioxide were studied on the as-deposited film surface by in-situ SE, on-site QMS (quadrupole mass spectrometry), as well as XPS (x-ray photoelectron spectroscopy) without vacuum break. Additionally, film growth experiments were performed on the as-deposited film and the initial substrate surface by in-situ and real-time SE, varying the process parameters: reactant doses, purging times, substrate temperature and total pressure.

Ruthenium und sein elektrisch leitfähiges Rutheniumdioxid sind viel versprechende Kandidaten als Elektrodenmaterial in MIM (Metall-Isolator-Metall-)Kondensatoren mit Dielektrika hoher Permittivität der nächsten Generation von DRAM-Speichern, als Metall-Gate-Elektroden in p-Kanal-MOS-Transistoren mit Dielektrika hoher Permittivität, oder als Keimschicht für das direkte elektrochemische Abscheiden von Kupfer-Verbindungsleitungen. Die ALD (Atomic Layer Deposition) wächst Materiallagen mit weniger als einem Zehntel Nanometer Dicke, indem sie gasförmige Reaktanden abwechselnd, getrennt durch spülende Pulse, in die Reaktionskammer einleitet. Dadurch wird mit jeder zyklischen Wiederholung idealerweise selbstbeendender Gas-Festkörper-Reaktionen stets die gleiche Materialmenge abgeschieden, bis eine gewünschte Schichtdicke erreicht ist. Wie sich die Oberfläche aufgrund der Materialabscheidung während der ALD verändert, kann mit der in-situ SE (Spektroskopische Ellipsometrie) beobachtet werden. Die Ellipsometrie misst die Änderung eines Polarisationszustands bzgl. Amplitude und Phase, nachdem ein einfallender Lichtstrahl von einer (schichtbedeckten) Oberfläche reflektiert und/ oder durch diese transmittiert wurde. Die ellipsometrischen Daten stehen im direkten Zusammenhang mit optischen Materialparametern und sind somit physikalisch interpretierbar – oder sie werden in eindimensionale strukturelle Größen, wie die Schichtdicke übersetzt. In dieser Arbeit wurden Schichten aus Ruthenium und Rutheniumdioxid aus dem Präkursor ECPR, [(Ethylcyclopentadienyl)(Pyrrolyl)Ruthenium(II)], und molekularem Sauerstoff per ALD gewachsen. Die chemischen Teilreaktionen wurden während der ALD von Ruthenium und Rutheniumoxid auf frisch abgeschiedenen Schichtoberflächen per in-situ SE, on-site QMS (Quadrupol-Massenspektrometrie) und XPS (Röntgen-Photoelektronenspektroskopie) ohne Vakuumunterbrechung untersucht. Weiterhin wurden Experimente zum Schichtwachstum auf frisch abgeschiedenen Schichten sowie einer Ausgangssubstratoberfläche per in-situ und Echtzeit SE durchgeführt, wobei die folgenden Prozessparameter variiert wurden: die jeweilige Reaktanden Dosis, die Spülpulsdauern, die Substrattemperatur und der Prozessdruck.:1 Einleitung I Theoretischer Teil 2 Ruthenium in der Mikroelektronik 2.1 Eigenschaften 2.2 Verwendung 3 Atomlagenabscheidung 3.1 Definition 3.2 Ablauf 3.3 Hauptmerkmale 3.4 Weit verbreitete Irrtümer 3.5 Vorteile und Grenzen 4 Massenspektrometrie 4.1 Definition 4.2 Verwendung 4.3 Aufbau und Funktionsweise von Massenspektrometern 4.4 Massenspektrometrische Methodik 5 Ellipsometrie 5.1 Definition 5.2 Vorteile und Grenzen 5.3 Physikalische Grundlagen 5.4 Messprinzip 5.4.1 Bestimmen ellipsometrischer Rohdaten 5.4.2 Interpretieren ellipsometrischer Spektren 5.4.3 Optisches Modellieren II Praktischer Teil 6 Chemische Reaktionen bei der thermischen Atomlagenabscheidung von Ruthenium und Rutheniumoxid 6.1 Vorbemerkungen 6.2 Untersuchungsmethoden 6.3 Beobachtungen mit Auswertung 6.3.1 Prozessgasanalyse per Quadrupol-Massenspektrometrie 6.3.2 In-situ und Echtzeit Spektroskopische Ellipsometrie 6.3.3 Röntgen-Photoelektronenspektroskopie ohne Vakuumunterbrechung 6.4 Formulieren vermuteter Teilreaktionen für das Ru Schicht-auf-Schicht Wachstum 6.4.1 Sauerstoff-Puls 6.4.2 Präkursor (ECPR)-Puls 6.4.3 ALD-Zyklus 6.5 Schlussfolgerungen für die ALD von Rutheniumoxid 6.6 Zwischenfazit und Ausblick 7 Spektroskopische Ellipsometrie in-situ und in Echtzeit während der thermischen Atomlagenabscheidung 7.1 Vorbemerkungen 7.2 Datenaufnahme 7.2.1 Messtechnische Eckdaten 7.2.2 Echtzeit-Begriff bei der Atomlagenabscheidung 7.2.3 Nasschemisches Vorbehandeln zum Zwecke definierter Ausgangssubstrate 7.2.4 Temperieren der Substrate 7.3 Interpretieren ellipsometrischer Spektren 7.4 Optisches Modellieren zur Datenauswertung 7.5 Fehlerabschätzung 8 Prozessentwicklung der thermischen Atomlagenabscheidung von Ruthenium 8.1 Vorbemerkungen 8.2 Untersuchungsmethoden 8.2.1 Schichtherstellung 8.2.2 Schichtcharakterisierung 8.3 Kennlinien der thermischen Ru-ALD 8.3.1 Zyklenanzahl 8.3.2 ECPR-Puls 8.3.3 Sauerstoff-Puls 8.3.4 Spülpulse 8.3.5 Substrattemperatur 8.3.6 Prozessdruck 8.4 Formulieren einer optimierten ALD-Prozesssequenz 8.5 Schichteigenschaften 9 Zusammenfassung und Ausblick III Anhang A Theoretische Grundlagen verwendeter Messtechnik B Parametereinflüsse im monomolekularen Wachstumsmodell C Weitere Abbildungen / Ruthenium and its conductive dioxide are promising candidates as electrodes in MIM (metal-insulator-metal) capacitors with high-k dielectrics of next generation DRAM (dynamic random access memory) devices, as metal-gate electrodes in pMOS-Transistors with high-k dielectrics, and as seed layer for direct electrochemical plating of copper interconnects. ALD (atomic layer deposition) grows material layers with less than a tenth of a nanometer thickness, pulsing gaseous reactants alternately into the reaction chamber, separated by purging pulses. Hence, every cyclic recurrence of ideally self-limiting gas-solid reactions deposits a fixed material amount, until the desired film thickness is achieved. So, the surface’s chemical composition changes through material deposition during ALD, observable by in-situ SE (spectroscopic ellipsometry). Ellipsometry measures the polarization state’s change in amplitude and phase, reflecting an incident light beam from and/ or transmitting it through a (film covered) surface. The ellipsometric data can be directly related to optical material parameters and are thus physically interpretable – or they are translated into one-dimensional structural values, like film thickness. In this work, ruthenium and ruthenium dioxide films were grown from ECPR, [(ethylcyclopentadienyl)(pyrrolyl)ruthenium(II)], and molecular oxygen. Reaction mechanisms during the ALD of ruthenium and ruthenium dioxide were studied on the as-deposited film surface by in-situ SE, on-site QMS (quadrupole mass spectrometry), as well as XPS (x-ray photoelectron spectroscopy) without vacuum break. Additionally, film growth experiments were performed on the as-deposited film and the initial substrate surface by in-situ and real-time SE, varying the process parameters: reactant doses, purging times, substrate temperature and total pressure.:1 Einleitung I Theoretischer Teil 2 Ruthenium in der Mikroelektronik 2.1 Eigenschaften 2.2 Verwendung 3 Atomlagenabscheidung 3.1 Definition 3.2 Ablauf 3.3 Hauptmerkmale 3.4 Weit verbreitete Irrtümer 3.5 Vorteile und Grenzen 4 Massenspektrometrie 4.1 Definition 4.2 Verwendung 4.3 Aufbau und Funktionsweise von Massenspektrometern 4.4 Massenspektrometrische Methodik 5 Ellipsometrie 5.1 Definition 5.2 Vorteile und Grenzen 5.3 Physikalische Grundlagen 5.4 Messprinzip 5.4.1 Bestimmen ellipsometrischer Rohdaten 5.4.2 Interpretieren ellipsometrischer Spektren 5.4.3 Optisches Modellieren II Praktischer Teil 6 Chemische Reaktionen bei der thermischen Atomlagenabscheidung von Ruthenium und Rutheniumoxid 6.1 Vorbemerkungen 6.2 Untersuchungsmethoden 6.3 Beobachtungen mit Auswertung 6.3.1 Prozessgasanalyse per Quadrupol-Massenspektrometrie 6.3.2 In-situ und Echtzeit Spektroskopische Ellipsometrie 6.3.3 Röntgen-Photoelektronenspektroskopie ohne Vakuumunterbrechung 6.4 Formulieren vermuteter Teilreaktionen für das Ru Schicht-auf-Schicht Wachstum 6.4.1 Sauerstoff-Puls 6.4.2 Präkursor (ECPR)-Puls 6.4.3 ALD-Zyklus 6.5 Schlussfolgerungen für die ALD von Rutheniumoxid 6.6 Zwischenfazit und Ausblick 7 Spektroskopische Ellipsometrie in-situ und in Echtzeit während der thermischen Atomlagenabscheidung 7.1 Vorbemerkungen 7.2 Datenaufnahme 7.2.1 Messtechnische Eckdaten 7.2.2 Echtzeit-Begriff bei der Atomlagenabscheidung 7.2.3 Nasschemisches Vorbehandeln zum Zwecke definierter Ausgangssubstrate 7.2.4 Temperieren der Substrate 7.3 Interpretieren ellipsometrischer Spektren 7.4 Optisches Modellieren zur Datenauswertung 7.5 Fehlerabschätzung 8 Prozessentwicklung der thermischen Atomlagenabscheidung von Ruthenium 8.1 Vorbemerkungen 8.2 Untersuchungsmethoden 8.2.1 Schichtherstellung 8.2.2 Schichtcharakterisierung 8.3 Kennlinien der thermischen Ru-ALD 8.3.1 Zyklenanzahl 8.3.2 ECPR-Puls 8.3.3 Sauerstoff-Puls 8.3.4 Spülpulse 8.3.5 Substrattemperatur 8.3.6 Prozessdruck 8.4 Formulieren einer optimierten ALD-Prozesssequenz 8.5 Schichteigenschaften 9 Zusammenfassung und Ausblick III Anhang A Theoretische Grundlagen verwendeter Messtechnik B Parametereinflüsse im monomolekularen Wachstumsmodell C Weitere Abbildungen