Les systèmes « excitables » sont omniprésents dans la nature, le plus paradigmatique d'entre eux étant le neurone, qui répond de façon « tout ou rien » aux perturbations externes. Cette particularité étant clairement établie comme l'un des points clé pour le fonctionnement des systèmes nerveux, son analyse dans des systèmes modèles (mathématiques ou physiques) peut d'une part aider à la compréhension de la dynamique d'ensembles de neurones couplés et d'autre part ouvrir des voies pour un traitement neuromimétique de l'information. C'est dans cette logique que s'inscrit la préparation de cette thèse de doctorat. Dans ce mémoire, nous utilisons des systèmes basés sur des lasers à semiconducteur pour d'une part modéliser des systèmes excitables ou des ensembles de systèmes neuromimétiques couplés et d'autre part pour contrôler (grâce à l'optogénétique) des canaux ioniques impliqués dans l'émission de potentiels d'action par des neurones de mammifères. Le long du premier chapitre, nous présentons de manière synthétique les concepts dynamiques sur lesquels nous nous appuierons dans la suite du manuscrit. Par la suite, nous décrivons brièvement le contexte de ce travail du point de vue de la synchronisation, notamment de cellules excitables. Enfin, nous discutons le contexte applicatif potentiel de ces travaux, c’est-à-dire l'utilisation de systèmes photoniques dits « neuromimétiques » dans le but de traiter de l'information. Dans le chapitre 2, nous analysons tout d'abord du point de vue théorique et bibliographique le caractère excitable d'un laser à semiconducteur sous l'influence d'un forçage optique cohérent. Par la suite, nous détaillons nos travaux expérimentaux d'abord, puis numériques et théoriques, sur la réponse de ce système « neuromimétique » à des perturbations répétées dans le temps. Tandis que le modèle mathématique simplifié prévoit un comportement de type intégrateur en réponse a des perturbations répétées, nous montrons que le comportement est en fait souvent résonateur, ce qui confère à ce système la propriété étonnante d'émettre une impulsion seulement s'il reçoit deux perturbations séparées d'un intervalle de temps bien précis. Nous montrons également que ce système peut convertir des perturbations de différente intensité en une série d'impulsions toutes identiques mais dont le nombre dépend de l'intensité de la perturbation incidente. Dans le chapitre 3, nous analysons (de nouveau expérimentalement, puis numériquement et théoriquement) le comportement dynamique d'un réseau de lasers à semiconducteur couplés dans un régime de chaos lent-rapide. Nous nous basons sur une étude antérieure montrant qu'un seul de ces éléments peut présenter une dynamique neuromimétique (en particulier l'émission chaotique d'impulsions originant du phénomène de canard). De façon surprenante pour un système ayant un si grand nombre de degrés de liberté, nous observons une dynamique qui semble chaotique de basse dimension. Nous examinons l'impact des propriétés statistiques de la population considérée sur la dynamique et relions nos observations expérimentales et numériques à l'existence d'une variété critique calculable analytiquement pour le champ moyen et près duquel converge la dynamique grâce au caractère lent-rapide du système. Dans le chapitre 4 enfin, nous présentons une brève étude expérimentale de la réponse de cellules biologiques à des perturbations lumineuses. En effet, les techniques optogénétiques permettent de rendre des cellules (en particulier des neurones) sensibles à la lumière grâce au contrôle optique de l'ouverture et de la fermeture de canaux ioniques. Ainsi, après avoir étudié dans les chapitres précédents des systèmes optiques sur la base de considérations provenant de systèmes biologiques, nous amenons matériellement un système laser vers un système biologique. / Excitable systems are everywhere in Nature, and among them the neuron, which responds to an external stimulus with an all-or-none type of response, is often regarded as the most typical example. This excitability behaviour is clearly established as to be one of the underlying operating mechanisms of the nervous system and its analysis in model systems (being them mathematical of physical) can, from one hand, shed some light on the dynamics of neural networks, and from the other, open novel ways for a neuro-mimetic treatment of information. The work presented in this PhD thesis was realized in this perspective. In this dissertation we will consider systems based on semiconductor lasers both for modelling excitable systems or coupled neuromorphic networks and for controlling (in an optogenetic outlook) ionic channels that are involved in the emission of action potentials of neurons in mammals. During the first chapter, we will briefly present the dynamical concepts on which we will build our understanding for the rest of the manuscript. Thereafter, we will describe the context of this work from the point of view of synchronized systems, in particular excitable cells. Finally, we will discuss in this context the applications potential of this work, namely the possibility of using “neuromimetic” photonic systems as a was to treat information. In chapter 2 we will firstly analyse from a theoretical and bibliographical standpoint the excitable character of a laser with coherent injection. Later, we will firstly detail our results, firstly experimental and subsequently numerical and theoretical, on the response of this “neuromimetic” system to perturbations repeated in time. Whereas the simplified mathematical model envisions an integrator behaviour in response to repeated perturbations, we will show that the system often acts as a resonator, thus imparting the remarkable property of being able to emit a single pulse only if it receives two perturbations that are separated by a specific time interval. We will also illustrate how this system can convert perturbations of different intensity in a series of all identical pulses whose number depends on the intensity of the incoming perturbation. In the third chapter we will analyse, first experimentally and later numerically and theoretically, the dynamical behaviour of a network of coupled semiconductor lasers in a slow-fast chaotic regime. We will rely on a previous study documenting that a single such element can present a neuromimetic dynamics (in particular, the emission of chaotic pulses originating from a canard phenomenon). Surprisingly for a system having such a large number of degrees of freedom, we observe a dynamics which seems low dimensional chaotic. We will examine the impact of statistical properties of the selected population on the dynamics, and we will link our experimental and numerical observations to the existence of a slow manifold for the mean field, computable analytically, and towards whom the dynamics converges thanks to the slow-fact nature of the system. Finally, in chapter 4 we will present a short experimental study on the response of biological cells to light perturbations. Indeed, optogenetic techniques enables to render the cells (in particular neurons) sensitive to light due to the optical control of the opening and closing of ionic channels. Hence, after having studied in the previous chapters optical systems on the basis of observations derived from biological systems, we will physically transfer an optical system towards a biological one. Here we lay the groundwork of a photonic system which allows, with a moderate complexity, to realize cell measurements in response to spatially localized optical perturbations.

Die mikromechanische Gleichspannungswandlung basierend auf verschiebungsabhängigen Kapazitäten stellt eine Alternative zu etablierten rein elektronischen Wandlern für den Spezialfall der kapazitiven oder piezoelektrischen Verbraucher dar. Durch ihre kleine Bauform und den Verzicht auf Induktivitäten bietet sie den Vorteil der On-Chip-MEMS- und CMOS-Integration und ermöglicht die Bereitstellung hoher elektrischer Gleichspannungen aus den verfügbaren Grundspannungen der Elektronik (z. B. 3, 5 bzw. 12 V). Von hohen Polarisationsspannungen profitieren nicht nur kapazitive Sensoren und Aktoren, sondern auch piezoelektrische Messverfahren. Diese Arbeit stellt eine umfangreiche Übersicht und Bewertung der möglichen Bauformen mikromechanischer Gleichspannungswandler sowie die konkrete Umsetzung, Charakterisierung und Modellbildung eines resonant arbeitenden Wandlers vor. Es wird auf Besonderheiten und Probleme im Entwurf eingegangen und ausgehend von den Ergebnissen ein Konzeptentwurf für einen optimierten resonanten Gleichspannungswandler erarbeitet.:1 Einleitung 2 Theoretische Grundlagen 3 Ausführungsvarianten von MEMS-DC/DC-Wandlern 4 Designstudie und Umsetzung des resonanten Funktionsprinzips 5 Zusammenfassung und Ausblick / Micromechanical DC/DC conversion based on variable capacitances is an alternative to established electronic voltage converters, which does not require bulky inductors and is suitable for capacitive and piezoelectric loads. The converters are capable of boosting up the polarization voltage from CMOS and electronic levels (3, 5, 12 V), which is beneficial not only for capacitive sensors and actuators but also for piezoelectric sensing. Advantages of this method are the on-chip- and CMOS-integrability. This thesis introduces a comprehensive overview and evaluation of possible designs as well as the practical application, characterization and modeling of a resonant micromechanical DC/DC converter. Innovative claims include a test board for the characterization of resonant DC/DC converters and a SPICE behavioral model of the device, considering parasitic effects. Characteristics and problems of the design are discussed and the results are used to demonstrate an optimized conceptual design of a resonant DC/DC converter.:1 Einleitung 2 Theoretische Grundlagen 3 Ausführungsvarianten von MEMS-DC/DC-Wandlern 4 Designstudie und Umsetzung des resonanten Funktionsprinzips 5 Zusammenfassung und Ausblick

Master’s thesis deals with the issue of electronic filtering circuits with arbitrary frequency characteristics. First part of the thesis describes theoretical basis. Second part explores the possibilities of design procedures for filters with arbitrary frequency characteristics. Design procedures are demonstrated on examples accordingly to the presented methods, including their circuit implementation and computer simulation to verify the correctness of theoretical assumptions. Thesis also explores the possibilities of tuning circuit structures and electronic setting for characteristics using controllable active elements.

This work deals with the most famous constructions of planar antennas. The work analyses selected methods of connecting planar antennas' charging with the possibility of impedance adaptation. An important part of the work consists of description of techniques for increasing bandwidth and conversely techniques for reducing the dimensions which are important for the design of planar antennas for mobile devices. The antennas were designed by means of theoretical basis and their properties were examined in the electromagnetic field simulator. The selected antenna model was constructed and its parameters were measured experimentally. The matching circuit for the antenna to tune it to different resonant frequencies was designed and constructed.

Rolled-up nanotechnology based on strain-engineering is a powerful tool to manufacture three-dimensional hollow structures made of virtually any kind of material on a large variety of substrates. The aim of this thesis is to address the key features of different on- and off-chip applications of rolled-up microtubes through modification of their basic framework. The modification of the framework pertains to the tubular structure, in particular the diameter of the microtube, and the material which it is made of, hence achieving different functionalities of the final rolled-up structure. The tuning of the microtube diameter which is adjusted to the individual size of an object allows on-chip studies of single cells in artificial narrow cavities, for example. Another modification of the framework is the addition of a catalytic layer which turns the microtube into a self-propelled catalytic micro-engine. Furthermore, the tuneability of the diameter can have applications ranging from nanotools for drilling into cells, to cargo transporters in microfluidic channels. Especially rolled-up microtubes based on low-cost and easy to deposit materials, such as silicon oxides, can enable the exploration of novel systems for several scientific topics. The main objective of this thesis is to combine microfluidic features of rolled-up structures with optical sensor capabilities of silicon oxide microtubes acting as optical ring resonators, and to integrate these into a Lab-on-a-Chip system. Therefore, a new concept of microfluidic integration is developed in order to establish an inexpensive, reliable and reproducible fabrication process which also sustains the optical capabilities of the microtubes. These integrated microtubes act as optofluidic refractrometric sensors which detect changes in the refractive index of analytes using photoluminescence spectroscopy. The thesis concludes with a demonstration of a functional portable sensor device with several integrated optofluidic sensors. / Die auf verspannten Dünnschichten basierende „rolled-up nanotechnologie“ ist eine leistungsfähige Methode um dreidimensionale hohle Strukturen (Mikroröhrchen) aus nahezu jeder Art von Material auf einer großen Vielfalt von Substraten herzustellen. Ausgehend von der Möglichkeit der Skalierung des Röhrchendurchmessers und der Modifikation der Funktionalität des Röhrchens durch Einsatz verschiedener Materialien und Oberflächenfunktionalisierungen kann eine große Anzahl an verschiedenen Anwendungen ermöglicht werden. Eine Anwendung behandelt unter anderem on-chip Studien einzelner Zellen wobei die Mikroröhrchen, an die Größe der Zelle angepasste, Reaktionscontainer darstellen. Eine weitere Modifikation der Funktionalität der Mikroröhrchen kann durch das Aufbringen einer katalytischen Schicht realisiert werden, wodurch das Mikroröhrchen zu einem selbstangetriebenen katalytischen Mikro-Motor wird. Hauptziel dieser Arbeit ist es Mikrometer große optisch aktive Glasröhrchen herzustellen, diese mikrofluidisch zu kontaktieren und als Sensoren in Lab-on-a-Chip Systeme zu integrieren. Die integrierten Glasröhrchen arbeiten als optofluidische Ringresonatoren, welche die Veränderungen des Brechungsindex von Fluiden im inneren des Röhrchens durch Änderungen im Evaneszenzfeld detektieren können. Die Funktionsfähigkeit eines Demonstrators wird mit verschiedenen Flüssigkeiten gezeigt, dabei kommt ein Fotolumineszenz Spektrometer zum Anregen des Evaneszenzfeldes und Auslesen des Signals zum Einsatz. Die entwickelte Integrationsmethode ist eine Basis für ein kostengünstiges, zuverlässiges und reproduzierbares Herstellungsverfahren von optofluidischen Mikrochips basierend auf optisch aktiven Mikroröhrchen.

Um der Mikrowellenerwärmung als Single- oder Hybridanwendung im industriellen Ofenbau ein weiteres Anwendungsspektrum zu eröffnen, wird dem Anlagenkonstrukteur im Rahmen dieser Arbeit eine Aufstellung von Entwicklungsprioritäten und Konstruktionshinweisen übergeben. Für eine energieeffiziente Ausnutzung des technologischen Potenzials wird hierbei nicht - wie in der Vergangenheit - die Feldstärkenverteilung, sondern das Reflexionsverhalten in den Vordergrund gestellt. Durch die Entwicklung und den Aufbau eines Messplatzes zur Bestimmung temperaturspezifischer Dielektrizitätsparameter konnte die Realitätsnähe der Simulation für die anwendungsorientierte Applikatorentwicklung gesteigert werden. Die Anwendbarkeit der Auslegungskriterien wird im Rahmen der Projektierung und des Aufbaus einer Beispielanlage zur Entbinderung von keramischen Grünkörpern und bei der Entwicklung zahlreicher mikrowellenspezifischer Anlagenbauteile verifiziert.

Vertically rolled-up microcavities are fabricated using differentially strained nanomembranes by employing rate and temperature gradients during electron beam evaporation of SiO2. The geometry of the rolled-up tubes is defined by a photo-lithographically patterned polymer sacrificial layer beneath the SiO2 layers that is dissolved to start the rolling. Rolled-up tubes support resonances formed by constructive interference of light propagating along the circumference. Optical studies are performed in the visible spectral range using a micro-photoluminescence (µPL) setup to excite and detect optical modes. Record high quality factors (Q factors) of 5400 for rolled-up resonators probed in PL-emission mode are found and their limits are theoretically investigated. Axial modes can also be supported when an increased winding number in the center is realized by appropriate pattern designs. In addition, higher order radial modes can be confined when atomic layer deposition (ALD) coatings are applied. Both types of modes are identified using polarization and spatially resolved µPL maps. Evanescent-wave coupling by tapered fibers and tubes on substrates is the second method used to study light confinement and to demonstrate frequency filtering in ALD coated rolled-up microcavities. Scans are performed by monitoring light from a tunable laser in the range of 1520-1570 nm after transmission through the tapered fiber. Dips in the spectrum are found and attributed to fundamental and axial resonant modes. Moreover, by coupling two tapered fibers to a lifted rolled-up microcavity, a four-port add-drop filter is demonstrated as a future component for vertical resonant light transfer in on-chip optical networks. Simulations show that the subwavelength tube wall thickness limits the Q factor at infrared wavelengths and ALD coatings are necessary to enhance the light confinement. After coating, two linear polarization states are found in experiment and fundamental and axial modes can be selectively excited by coupling the fiber to different positions along the tube axis. Spatially and polarization resolved transmission maps reveal a polarization dependent axial mode distribution which is verified theoretically. The results of this thesis are important for lab-on-chip applications where rolled-up microcavities are employed as high resolution optofluidic sensors as well as for future uses as waveguide coupled components in three-dimensional multi-level optical data processing units to provide resonant interlayer signal transfer.

This work is devoted to investigate light confinement in rolled-up microtubular cavities and their optofluidic applications. The microcavities are fabricated by a roll-up mechanism based on releasing pre-strained silicon-oxide nanomembranes. By defining the shape and thickness of the nanomembranes, the geometrical tube structure is well controlled. Micro-photoluminescence spectroscopy at room temperature is employed to study the optical modes and their dependence on the structural characteristics of the microtubes. Finite-difference-time-domain simulations are performed to elucidate the experimental results. In addition, a theoretical model (based on a wave description) is applied to describe the optical modes in the tubular microcavities, supporting quantitatively and qualitatively the experimental findings. Precise spectral tuning of the optical modes is achieved by two post-fabrication methods. One method employs conformal coating of the tube wall with Al2O3 monolayers by atomic-layer-deposition, which permits a mode tuning over a wide spectral range (larger than one free-spectral-range). An average mode tuning to longer wavelengths of 0.11nm/ Al2O3-monolayer is obtained. The other method consists in asymmetric material deposition onto the tube surface. Besides the possibility of mode tuning, this method permits to detect small shape deformations (at the nanometer scale) of an optical microcavity. Controlled confinement of resonant light is demonstrated by using an asymmetric cone-like microtube, which is fabricated by unevenly rolling-up circular-shaped nanomembranes. Localized three-dimensional optical modes are obtained due to an axial confinement mechanism that is defined by the variation of the tube radius and wall windings along the tube axis. Optofluidic functions of the rolled-up microtubes are explored by immersing the tubes or filling their core with a liquid medium. Refractive index sensing of liquids is demonstrated by correlating spectral shift of the optical modes when a liquid interacts with the resonant light of the microtube. In addition, a novel sensing methodology is proposed by monitoring axial mode spacing changes. Lab-on-a-chip methods are employed to fabricate an optofluidic chip device, allowing a high degree of liquid handling. A maximum sensitivity of 880 nm/refractive-index-unit is achieved. The developed optofluidic sensors show high potential for lab-on-a-chip applications, such as real-time bio/chemical analytic systems.

La sensibilité des détecteurs d’ondes gravitationnelles de LIGO (Laser Interferometer Gravitational-Wave Observatory) est limité par les fluctuations thermiques dues à la dissipation mécanique dans les couches de Ta2O5 amorphe, qui est une composante des miroirs des interféromètres. Le paramètre d’angle de perte ( ) permet de quantifié l’ampleur de la dissipation et est obtenu en étudiant l’absorption d’énergie mécanique par la couche de matériau. Ce paramètre est généralement caractérisé expérimentalement à des fréquences d’excitations allant de 1-30 KHz près de celle qui nous intéresse pour la détection d’onde gravitationnelle (10-100 Hz) et par des simulations de dynamique moléculaire pour des fréquences très élevées (GHz). Notre recherche vise à caractériser l’angle de perte pour ce matériau pour des fréquences intermédiaires, soit dans la gamme des MHz. Afin d’obtenir une meilleure précision sur les résultats, on utilise les ondes acoustiques de surface qui donne un plus grand poids à la couche mince lors du calcul de l’angle de perte. Deux méthodes sont utilisées pour tenter d’obtenir l’angle de perte des couches ( c) de Ta2O5 de 1 μm déposées sur des substrats, d’une part, composé de SiO2 B270 d’épaisseur 2 mm, et d’autre part, de LiNbO3 d’épaisseur 1 mm. La première se fait à l’aide d’un transmetteur piézoélectrique amovible qui génère les ondes de surface et d’un vibromètre laser qui détecte l’amplitude des vibrations à différentes positions sur l’échantillon. Malgré un précision limitée, il est possible d’obtenir l’angle de perte des couches minces à une fréquence d’excitation de 9.08 MHz. Les résultats les plus fiables de c sont dans l’intervalle 2−7×10−2 avec des incertitudes de 1−3×10−2, ce qui représente de 15 à 50% des valeurs selon le cas. On obtient donc des résultats plus élevés que ce qui est attendu pour cette gamme de fréquence, même avec une précision limitée, ce qui nous porte à penser que certains mécanismes peuvent affecter l’angle de perte à plus hautes fréquences. Pour la deuxième méthode, on place directement sur l’échantillon des transmetteurs interdigitaux qui servent à la fois d’émetteur et de récepteur et une cavité résonante qui permet de contenir les ondes d’une certaine longueur d’onde sur l’échantillon. Les fréquences d’excitations des ondes de surface générés sont de 19.89 MHz et 33.15 MHz. Nos échantillons ne nous permettent pas de calculer c, mais la technique de mesure nous permet d’avoir une précision au moins plus élevée que la première méthode soit 1 × 10−2 pour un échantillon et 4 × 10−3 pour l’autre. On peut facilement améliorer la méthode, notamment en augmentant la réflectivité de la cavité résonante, ce qui permettrait d’obtenir des résultats précis avec des échantillons qui comprennent la couche mince. / Limitations to the sensitivity of LIGO’s (Laser Interferometer Gravitational-Wave Observatory) gravitational wave detectors is due to thermal fluctation induced by mechanical dissipation in the amorphous Ta2O5 thin films composing the interferometer’s mirrors. The loss angle parameter ( ) describes the magnitude of the dissipation that occurs in the material and is obtained by studying the mechanical energy absorption of the thin film. This parameter is usually measured for a range of frequencies going from 1 to 30 KHz, which is near the expected frequencies for gravitational wave detection (10-100 Hz). Molecular dynamics simulations also calculate the loss angle for very high frequencies (GHz). Our research aim to caracterise the loss angle of Ta2O5 thin films in the MHz mid-range frequencies. We use surface acoustic waves for the thin film to have a greater weight in the caculation of the loss angle to help us get a higher precision. Two methods are used to obtain the loss angle of the film ( c) of Ta2O5 (1 μm thick) which, for the first method, is deposited on a 2 mm thick SiO2 B270 substrates, and, for the second method, on a 1mm thick LiNbO3 substrates. The first one uses a movable piezoelectric transducer that generates the surface waves and a laser vibrometer to mesure the amplitude of the vibration along the sample. Though the precision is not very good, we were able to calculate the loss angle of thin films for a surface wave frequency of 9.08 MHz. The best results for c are within the range of 2 − 7 × 10−2 with uncertainties ranging from 1−3×10−2, which represent 15 to 50% of values by case. We get higher loss angles than what was expected for this frequency range, even with a low precision, so we suspect that some loss mechanisms might affect the loss angle at higher frequency. The second method uses a resonator that is place directly on the samples with interdigital transducers that generate the surface waves and acoustical mirrors that form the resonator (acoustical cavity). Wave are excited at two different frequencies, 19.89 MHz and 33.15 MHz, and are contained in the resonator to study their propagation on the sample. Althouth we do not have c results for coated sample, we were able to evaluate the precision of such measuments and we have uncertainties of 1 × 10−2 for a sample and 4 × 10−3 for the other. The samples used with this method could easily be improve, by increasing the reflecitvity of the resonator mirrors, to obtain a higher precision and get better results for sample coated with a thin film.

Micro-technology relies on a highly parallel fabrication of 2D electronic and/or microelectromechanical devices, where in most cases silicon wafers are used as substrates. In contrast 3D fabrication shows unique advantages, such as footprint reduction or the possibility to obtain additional functionalities. For example, in the case of a sensor, knowledge of the acceleration in all possible directions, the surrounding electric or magnetic field among other quantities can help to determine the exact position of an object in 3D space. To do that it is crucial to retrieve all components of a vector field, which requires at least one out of plane component. In other fields like integrated optics three dimensional structures can enhance the coupling efficiency with free space interactions. As such 3D micro-structures will be crucial for upcoming products and devices. A highly parallel fabrication is required to enable mass-adaption, self-assembly is an emerging technology that could deliver this purpose. Examples of 3D structures created by self-assembly include polyhedrons like cubes, pyramids or micro tubular structures such as tubes or spirals. Following a self assembly scheme, 3D devices would be created through the fabrication of standard 2D structures that are reshaped through a self-assembly step into a 3D object. In this thesis a novel dry release protocol was developed to roll-up strained nanomembranes from a silicon sacrificial layer employing dry fluorine chemistry. This way a wet release is totally circumvented thus preventing damage of the created structures due to turbulent flow or capillary forces. Additionally the developed process enabled the use of standard CMOS deposition and processing tools, leading to a high increase in yield and quality, with yields exceeding 99% for microtubes. Building on the developed technology various devices where fabricated, for example rolled-up micro capacitors at a wafer scale with an increased yield and a low spread of electrical characteristics. For the E12 industrial standard more than 90% of devices behaved within the required performance characteristics. Furthermore the yield and Q-factor of roll-up whispering gallery mode resonators was strongly improved, making it possible to self assemble 3D coupled photonic molecules, which showed a mode splitting exceeding the FSR, as well as hybrid supermodes at points of energy degeneracy.:Contents Bibliographic Record i List of Abbreviations vii List of Chemical Substances ix 1 Introduction 1 1.1 Microelectromechanical Systems 1 1.2 Strain Engineering 2 1.3 Rolled - Up Nanotechnology 3 1.4 Objective and Structure of the Thesis 5 2 Materials and Methods 9 2.1 Fabrication Techniques 9 2.1.1 Substrates 9 2.1.2 Plasma Enhanced Chemical Vapor Deposition 9 2.1.3 Dry Etching12 2.1.4 Deep Reactive Ion Etching 18 2.1.5 Atomic Layer Deposition 19 2.1.6 Lithography 20 2.2 Characterization Techniques 22 2.2.1 Strain Measurement 22 2.2.2 Ellipsometry 23 3 Dry Roll-Up of Strained Nanomembranes 25 3.1 Rolled - Up Nanotechnology 25 3.2 Fabrication 26 3.2.1 Release 29 3.3 Conclusions 33 4 Rolled-UpMicro Capacitors 35 4.1 Micro Capacitors 35 4.2 Fabrication 38 4.3 Characterization 39 4.4 Conclusion 41 5 Optical Micro-Cavities 43 5.1 Optical Micro Cavities 43 5.2 Theorectical Background 45 5.2.1 Quality - factor 49 5.2.2 FDTD 52 6 Optical Microtube Resonators 55 6.1 Optical Whispering Gallery Mode Microtube Resonators 55 6.2 Fabrication 57 6.3 Active Characterization 60 6.4 Conclusions 64 7 Photonic Molecules 65 7.1 Coupled Photonic Systems 65 7.2 Fabrication 68 7.3 Device Characterization 71 7.4 Multimode Waveguides 84 7.5 Conclusions 85 8 Conclusions and Outlook 87 8.1 Conclusions 87 8.2 Outlook 88 Bibliography 91 List of Figures 109 List of Tables 117 A Equipment 119 Cover Pages 121 Selbstständigkeitserklärung 123 Acknowledgements 125 List of Publications 127 List of Presentations 129 Curriculum Vitae 131