This poster was presented in the Materials for Advanced Metallization (MAM) 2014 Conference in Chemnitz, Germany. Abstract: Atomic Layer Deposition (ALD) has emerged as an ubiquitous method for the deposition of conformal and homogeneous ultra-thin films on complex topographies and large substrates in microelectronics. Electrochemical deposition (ECD) is the first choice for the deposition of copper (Cu) into the trenches and vias of the interconnect system for ULSI circuits. The ECD of Cu necessitates an electrically conductive seed layer for filling the interconnect structures. ALD is now considered as a solution for conformal deposition of Cu seed layers on very high aspect ratio (AR) structures also for technology nodes below 20 nm, since physical vapor deposition is not applicable for structures with high AR. Cu seed layer deposition by the reduction of Cu2O, which has been deposited from the Cu(I) β-diketonate precursor [(nBu3P)2Cu(acac)], has been successfully carried out on different substrates like Ta, TaN, SiO2, and Ru [1, 2]. However, still many questions are unanswered regarding the underlying surface chemistry of the precursor on many substrates, leading to different growth modes during ALD. In this work, the surface chemistry of [(nBu3P)2Cu(acac)] on SiO2 substrate is investigated by in-situ X-ray photoelectron spectroscopy (XPS), reporting vital information about the oxidation state and the atomic concentration after chemisorption on the substrates kept at different temperatures. The aim of the investigation is to understand the stepwise change in the precursor oxidation state with increasing substrate temperature and to identify the temperature limit for the thermal ALD with this Cu precursor on SiO2. For the experiments, the Cu precursor was evaporated on SiO2 substrates kept at temperatures between 22 °C and 300 °C. The measured C/Cu and P/Cu concentration indicated that most of the nBu3P ligands were released either in the gas phase or during adsorption (Fig. 1a). No disproportionation was observed for the Cu precursor in the temperature range between 22 °C and 145 °C. Similarly, in this temperature range the Auger parameter calculated from Cu 2p3/2 and Cu L3VV spectra was found to be 360.0±0.2 eV, comparable to Cu(I) oxidation state [3]. However, disproportionation of the Cu precursor was observed above 200 °C, since C/Cu concentration ratio decreased and substantial metallic Cu was present on the substrate. Hence, 145 °C is the temperature limit for the ALD of Cu2O from this precursor, as the precursor must not alter its chemical state after chemisorption on the substrate. 500 ALD cycles with the probed Cu precursor and wet O2 as co reactant were carried out on SiO2 at 145 °C. After ALD, in situ XPS analysis confirmed the presence of Cu2O on the substrate. Ex-situ spectroscopic ellipsometry indicated an average film thickness of 2.5 nm of Cu2O deposited with a growth per cycle of 0.05 Å/cycle, comparable to previous experiments. References: [1] T. Waechtler, S. Oswald, N. Roth, A. Jakob, H. Lang, R. Ecke, S. E. Schulz, T. Gessner, A. Moskvinova, S. Schulze, M. Hietschold, J. Electrochem. Soc., 156 (6), H453 (2009). [2] T. Waechtler, S. -F. Ding, L. Hofmann, R. Mothes, Q. Xie, S. Oswald, C. Detavernier, S. E. Schulz, X. -P. Qu, H. Lang, T. Gessner, Microelectron. Eng., 88, 684 (2011). [3] J. P. Espinós, J. Morales, A. Barranco, A. Caballero, J. P. Holgado, A. R. González Elipe, J. Phys. Chem. B, 106, 6921 (2002).

This thesis describes studies of materials which can be exploited for hydrogen production from water and sunlight. The materials investigated are maghemite (γ-Fe2O3), magnetite (Fe3O4) and especially hematite (α-Fe2O3), which is an iron oxide with most promising properties in this field. Hematite has been deposited using Atomic Layer Deposition (ALD) - a thin-film technique facilitating layer-by-layer growth with excellent thickness control and step coverage. The iron oxides were deposited using bis-cyclopentadienyl iron (Fe(Cp)2) or iron pentacarbonyl (Fe(CO)5) in combination with an O2 precursor. Since it is crucial to have good control of the deposition process, the influence of substrate, process temperature, precursor and carrier gas have been investigated systematically. By careful control of these deposition parameters, three polymorphs of iron oxide could be deposited: hematite (α-Fe2O3), maghemite (γ-Fe2O3) and magnetite (Fe3O4). The deposited materials were characterized using X-ray Diffraction, Raman and UV-VIS Spectroscopy, and Scanning Electron Microscopy. Hard X-ray Photoelectron Spectroscopy (HAXPES) was also used, since it is a non-destructive, chemically specific, surface sensitive technique – the surface sensitivity resulting from the short mean escape depth of the photoelectrons. The depth probed can be controlled by varying the excitation energy; higher photoelectron energies increasing the inelastic mean-free-path in the material. HAXPES studies of atomic diffusion from F-doped SnO2 substrates showed increased doping levels of Sn, Si and F in the deposited films. Diffusion from the substrate was detected at annealing temperatures between 550 °C and 800 °C. Films annealed in air exhibited improved photocatalytic behavior; a photocurrent of 0.23 mA/cm2 was observed for those films, while the as-deposited hematite films showed no photo-activity whatsoever. The optical properties of low-dimensional hematite were studied in a series of ultra-thin films (thicknesses in the 2-70 nm range). The absorption maxima were shifted to higher energies for films thinner than 20 nm, revealing a different electronic structure in thin films.

Electrochemical capacitors, now often termed supercapacitors, are high power electrochemical energy storage devices that complement or replace high power batteries in applications ranging from wind turbines to hybrid engines to uninterruptable power supplies to electronic devices. My dissertation explores the applications of relatively uncommon techniques for both supercapacitor material syntheses and gaining better mechanistic understanding of factors impacting electrochemical performance of supercapacitors. From fundamental ion electroadsorption studies made possible by using small angle neutron scattering (SANS), to the systematic investigations of coating thickness and microstructure in metal oxide / carbon nanocomposite electrodes realized through the novel use of the atomic layer deposition (ALD) technique, new avenues of material characterization and fabrication have been studied. In this dissertation I first present the motivation to expand the knowledge of supercapacitor science and technology, and follow with an in-depth literature review of the state of the art. The literature review covers different types of supercapacitors, the materials used in the construction of commercial and exploratory devices, an exploration of the numerous factors which affect supercapacitor performance, and an overview of relevant materials synthesis and characterization techniques The technical objectives for the work performed in this dissertation are then presented, followed by the contributions that I made in this field in my two primary research thrusts: advances to the understanding of ion electroadsorption theory in both aqueous and organic electrolytes through the development of a SANS-based methodology, and advances to metal-oxide carbon nanocomposites as electrodes through the use of ALD. The understanding of ion electro-adsorption on the surface of microporous (pores < 2 nm) solids is largely hindered by the lack of experimental techniques capable of identifying the sites of ion adsorption and the concentration of ions at the nanoscale. In the first research thrust of my dissertation, I harness the high penetrating power and sensitivity of neutron scattering to isotope substitution to directly observe changes in the ion concentration as a function of the applied potential and the pore size. I have conducted initial studies in selected aqueous and organic electrolytes and outlined the guidelines for conducting such experiments for the broad range of electrode-ions-solvent combinations. I unambiguously demonstrate that depending on the solvent properties and the solvent-pore wall interactions, either enhanced or reduced ion electro-adsorption may take place in sub-nanometer pores. More importantly, for the first time I demonstrate the route to identify the critical pore size below which either enhanced or reduced electrosorption of ions takes place. My studies experimentally demonstrate that poor electrolyte wetting in the smallest pores may indeed limit device performance. The proposed methodology opens new avenues for systematic in-situ studies of complex structure-property relationships governing adsorption of ions under applied potential, critical for rational optimization of device performance. In addition to enhancing our understanding of ion sorption, there is a critical need to develop novel supercapacitor electrode materials with improved high-energy and high-power characteristics. The formation of carbon-transition metal oxide nanocomposites may offer unique benefits for such applications. Broadly available transition metal oxides, such as vanadium oxide, offer high ion storage capabilities due to the broad range of their oxidation states, but suffer from high resistivities. Carbon nanomaterials, such as carbon nanotubes (CNT), in contrast are not capable to store high ion content, but offer high and readily accessible surface area and high electrical conductivity. In the second research thrust of my thesis, by exploiting the ability of atomic layer deposition (ALD) to produce uniform coatings of metal oxides on CNT electrodes, I demonstrated an effective way to produce high power supercapacitor electrodes with ultra-high energy capability. The electrodes I developed showed stable performance with excellent capacitance retention at high current densities and sweep rates. Electrochemical performance of the oxide layers were found to strongly depend on the coating thickness. Decreasing the vanadium oxide coating thickness to ~10 nm resulted in some of the highest values of capacitance reported to date (~1550 F·g⁻¹VOx at 1 A·g⁻¹ current density). Similar methodology was utilized for the deposition of thin vanadium oxide coatings on other substrates, such as aluminum (Al) nanowires. In this case the VOₓ coated Al nanowire electrodes with 30-50% of the pore volume available for electrolyte access show volumetric capacitance of 1390-1950 F cc⁻¹, which exceeds the volumetric capacitance of porous carbons and many carbon-metal oxide composites by more than an order of magnitude. These results indicated the importance of electrode uniformity and precise control over conformity and thickness for the optimization of supercapacitor electrodes.

No description available.

Conception de nanomatériaux à base d'oxyde par ALD : de la détection aux membranes / In this context, the aim of this PhD work is the synthesis of different nanostructured materials based on ALD oxide thin film (Al2O3, ZnO and Al2O3/ZnO nanolaminates) deposited on different types of substrates such as silicon substrate, glass, nanofibers, multipores and monopores membranes, PET and gold coated nickel dogbones. ALD deposition was performed on those substrates with changing the film thickness (number of cycles), the deposition temperature, and the film composition (doping, multilayers etc.). After the ALD deposition chemical, structural, optical, electrical and mechanical characterization were performed on the ALD deposited layer in order to study the influence of the deposition parameters on the thin film properties. The deposited and characterized ALD films were investigated on different fields:• Optical properties for solar cell applications (Chapter 2) • UV detection (Chapter 3)• Protective coating and gas barrier (chapter 4)• Ionic transport, water desalination, Mass spectrometry, DNA sequencing and Gas purification (chapter 5)The atomic layer deposition technique combined with nanostructured templates show several advantages on several application fields that will be reported on this thesis. The structural and properties evolution of the ALD thin film with the deposition parameter evolution leaded to a doped ZnO layer and Al2O3/ZnO multilayer with tunable optical, electrical and mechanical properties that can be interesting for different applications such as solar cell and UV detection. The conformal coating on high aspect ratio template with the angstrom range thickness control offered by the atomic layer deposition technique meted our target on nanopores diameter tuning for different applications on the nanometeric range such as gas purification. Moreover the compatibility of the deposited materials with some biological function leaded to a combination between nanostructure materials and biological function that shows promising results for different applications such as ionic transport, water desalination, mass spectrometry and DNA sequencing.

Metal oxide nanolaminate films are potential high temperature solid lubricants due to their ability to exhibit significant plasticity when grain size is reduced to the nanometer scale, and defective growth structure is achieved by condensation of oxygen vacancies to form intrinsic stacking faults. This is in contrast to conventional microcrystalline and single crystal oxides that exhibit brittle fracture during loading in a sliding contact. This study emphasizes the additional effect of growth orientation, in particular crystallographic texture, on determining the sliding friction behavior in nanocolumnar grain zinc oxide films grown by atomic layer deposition. It was determined that zinc oxide low (0002) versus higher (101 ̅3) surface energy crystallographic planes influenced the sliding friction coefficient. Texturing of the (0002) grains resulted in a decreased adhesive component of friction thereby lowering the sliding friction coefficient to ~0.25, while the friction coefficient doubled to ~0.5 with increasing contribution of surface (101 ̅3) grains. In addition, the variation of the x-ray grazing incident angle from 0.5° to 5° was studied to better understand the surface grain orientation as a function of ZnO layer thickness in one versus four bilayer nanolaminates where the under layer (seed layer) was load-bearing Zn(Ti,Zr)O3.

Friction and wear mitigation is typically accomplished by introducing a shear accommodating layer (e.g., a thin film of liquid) between surfaces in sliding and/or rolling contacts. When the operating conditions are beyond the liquid realm, attention turns to solid coatings. Solid lubricants have been widely used in governmental and industrial applications for mitigation of wear and friction (tribological properties). Conventional examples of solid lubricants are MoS2, WS2, h-BN, and graphite; however, these and some others mostly perform best only for a limited range of operating conditions, e.g. ambient air versus dry nitrogen and room temperature versus high temperatures. Conversely, lubricious oxides have been studied lately as good potential candidates for solid lubricants because they are thermodynamically stable and environmentally robust. Oxide surfaces are generally inert and typically do not form strong adhesive bonds like metals/alloys in tribological contacts. Typical of these oxides is ZnO. The interest in ZnO is due to its potential for utility in a variety of applications. To this end, nanolaminates of ZnO, Al2O3, ZrO2 thin films have been deposited at varying sequences and thicknesses on silicon substrates and high temperature (M50) bearing steels by atomic layer deposition (ALD). The top lubricious, nanocrystalline ZnO layer was structurally-engineered to achieve low surface energy {0002}-orientated grain that provided low sliding friction coefficients (0.2 to 0.3), wear factors (range of 10-7 to 10-8 mm3/Nm) and good rolling contact fatigue resistance. The Al2O3 was intentionally made amorphous to achieve the {0002} preferred orientation while {101}-orientated tetragonal ZrO2 acted as a high toughness/load bearing layer. It was determined that the ZnO defective structure (oxygen sub-stoichiometric with growth stacking faults) aided in shear accommodation by re-orientating the nanocrystalline grains where they realigned to create new friction-reducing surfaces. Specifically, high resolution transmission electron microscopy (HRTEM) inside the wear surfaces revealed in an increase in both partial dislocation and basal stacking fault densities through intrafilm shear/slip of partial dislocations on the (0002) planes via a dislocation glide mechanism. This shear accommodation mode mitigated friction and prevented brittle fracture classically observed in higher friction microcrystalline and single crystal ZnO that has potential broad implications to other defective nanocrystalline ceramics. Overall, this work has demonstrated that environmentally-robust, lubricious ALD nanolaminates of ZnO/Al2O3/ZrO2 are good candidates for providing low friction and wear interfaces in moving mechanical assembles, such as fully assembled rolling element bearings and microelectromechanical systems (MEMS) that require thin (~10-200 nm), uniform and conformal films.

Membrane fouling, which is caused by deposition/adsorption of foulants on the surface or within membrane pores, still remains a bottleneck that hampers the widespread application of membrane bioreactor (MBR) technology for wastewater treatment. Recently membrane surface modification has proved to be a useful method in water/wastewater treatment to improve the surface hydrophilicity of membranes to obtain higher water fluxes and to reduce fouling. In this study, membrane modification was investigated by depositing a thin film of same thickness of TiO2 on the surface of an ultrafiltration alumina membrane. Various thin-film deposition (TFD) methods were employed, i.e. electron-beam evaporation, sputter and atomic layer deposition (ALD), and a comparative study of the methods was conducted to assess fouling inhibition performance in a lab-scale anaerobic MBR (AnMBR) fed with synthetic municipal wastewater. Thorough surface characterization of all modified membranes was carried out along with clean water permeability (CWP) tests and fouling behavior by bovine serum albumin (BSA) adsorption tests. The study showed better fouling inhibition performance of all modified membranes; however the effect varied due to different surface characteristics obtained by different deposition methods. As a result, ALD-modified membrane showed a superior status in terms of surface characteristics and fouling inhibition performance in AnMBR filtration tests. Hence ALD was determined to be the best TFD method for alumina membrane surface modification for this study. ALD-modified membranes were further characterized to determine an optimum thickness of TiO2-film by applying different ALD cycles. ALD treatment significantly improved the surface hydrophilicity of the unmodified membrane. Also ALD-TiO2 modification was observed to reduce the surface roughness of original alumina membrane, which in turn enhanced the anti-fouling properties of modified membranes. Finally, a same thickness of ALD-TiO2 and ALD-SnO2 modified membranes were tested for alginate fouling inhibition performance in a dead-end constant-pressure filtration system. This is the first report on the application of SnO2-modified ceramic membrane for testing its alginate fouling potential; which was determined to be nearly-same for both modified membranes with a negligible amount of difference. This revealed SnO2 as a potential future anti-foulant to be tested for membrane modification/fabrication for application in water/wastewater treatment systems.

No description available.

The recent discovery of layered transition metal carbides (MXenes) is one of the most important developments in two-dimensional (2D) materials. Preliminary theoretical and experimental studies suggest a wide range of potential applications for MXenes. The MXenes are prepared by chemically etching ‘A’-layer element from layered ternary metal carbides, nitrides and carbonitrides (MAX phases) through aqueous acid treatment, which results in various surface terminations such as hydroxyl, oxygen or fluorine. It has been found that surface terminations play a critical role in defining MXene properties and affects MXene performance in different applications such as electrochemical energy storage, electromagnetic interference shielding, water purification, sensors and catalysis. Also, the electronic, thermoelectric, structural, plasmonic and optical properties of MXenes largely depend upon surface terminations. Thus, controlling the surface chemistry if MXenes can be an efficient way to improve their properties. This research mainly aims to perform surface modifications of two commonly studied MXenes; Ti2C and Ti3C2, via chemical, thermal or physical processes to enhance electrochemical energy storage properties. The as-prepared and surface modified MXenes have been studied as electrode materials in Li-ion batteries (LIBs) and supercapacitors (SCs). In pursuit of desirable MXene surface, we have developed an in-situ room temperature oxidation process, which resulted in TiO2/MXene nanocomposite and enhanced Li-ion storage. The idea of making metal oxide and MXene nanocomposites was taken to the next level by combining a high capacity anode materials – SnO2 – and MXene. By taking advantage of already existing surface functional groups (–OH), we have developed a composite of SnO2/MXene by atomic layer deposition (ALD) which showed enhanced capacity and excellent cyclic stability. Thermal annealing of MXene at elevated temperature under different atmospheres was carried out and detailed surface chemistry was studied to analyze the change in surface functional groups and its effect on electrochemical performance. Also, we could replace surface functional groups with desirable heteroatoms (e.g., nitrogen) by plasma processing and studied their effect on energy storage properties. This work provides an experimental baseline for surface modification of MXene and helps to understand the role of various surface functional groups in MXene electrode electrochemical performance.