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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
11

New approaches in optical lithography technology for subwavelength resolution /

Kang, Hoyoung. January 2005 (has links)
Thesis (M.S.)--Rochester Institute of Technology, 2005. / Typescript. Includes bibliographical references (leaves 94-102).
12

Delayed response of the global total electron content to solar EUV variations

Jacobi, Christoph, Jakowski, Norbert, Schmidtke, Gerhard, Woods, Thomas N. January 2016 (has links)
The ionospheric response to solar extreme ultraviolet (EUV) variability during 2011–2014 is shown by simple proxies based on Solar Dynamics Observatory/Extreme Ultraviolet Variability Experiment solar EUV spectra. The daily proxies are compared with global mean total electron content (TEC) computed from global TEC maps derived from Global Navigation Satellite System dual frequency measurements. They describe about 74% of the intra-seasonal TEC variability. At time scales of the solar rotation up to about 40 days there is a time lag between EUV and TEC variability of about one day, with a tendency to increase for longer time scales.
13

Delayed response of global ionospheric electron content to EUV variations derived from combined SolACES-SDO/EVE measurements

Jacobi, Christoph, Unglaub, Claudia, Schmidtke, Gerhard, Schäfer, Robert, Jakowski, Norbert 27 October 2017 (has links)
The ionospheric response to solar EUV variability during 2011 - 2014 is shown by an EUV proxy based on primary ionization calculations using combined solar spectra from SDO/EVE and SolACES on board the ISS. The daily proxies are compared with global mean TEC analyses. At time scales of the solar rotation and longer, there is a time lag between EUV and TEC variability of about one to two days, indicating dynamical processes in the thermosphere/ionosphere systems. This lag is not seen at shorter time scales. When taking this delay into account the TEC variance at the seasonal and short-term time scale explained by EUV variations increases from 71% to 76%. / Die ionosphärische Antwort auf Variationen des solaren EUV im Zeitraum 2011-2014 wird anhand eines Proxys dargestellt, welcher die primäre Ionisation auf der Basis gemessener solare EUV-Spektren beinhaltet. Die täglichen Werte werden mit Analysen des global gemittelten Gesamtelektronengehalts verglichen. Auf Zeitskalen der solaren Rotation und länger findet sich eine Zeitverzögerung zwischen der EUV-Variation und des derjenigen des Gesamtelektronengehalts von ein bis 2 Tagen, welche auf dynamische Prozesse im System Thermosphäre/Ionosphäre hinweist. Die Verzögerung ist auf kurzen Zeitskalen nicht zu sehen. Wenn diese Verzögerung berücksichtigt wird, erhöht sich die durch EUV-Variationen erklärte Varianz des Elektronengehalts von 71% auf 76%.
14

Laser Plasma Radiation Studies For Droplet Sources In The Extreme Ultraviolet

Kamtaprasad, Reuvani 01 January 2010 (has links)
The advancement of laboratory based Extreme Ultraviolet (EUV) radiation has escalated with the desire to use EUV as a source for semiconductor device printing. Laser plasmas based on a mass-limited target concept, developed within the Laser Plasma Laboratory demonstrate a much needed versatility for satisfying rigorous source requirements. This concept produces minimal debris concerns and allows for the attainment of high repetition rates as well as the accommodation of various laser and target configurations. This work demonstrates the generation of EUV radiation by creating laser plasmas from mass-limited targets with indium, tin, and antimony doped droplets. Spectral emission from the laser plasmas is quantified using a flat-field spectrometer. COWAN code oscillator strength predications for each of the dopants were convolved with narrow Gaussian functions creating synthetic spectra for the EUV region between 10 nm - 20 nm. A preliminary comparison was made between the theoretical spectra and experimental results. From this comparison, ion stage transitions for each of the hot dense plasmas generated were assessed.
15

The NASA EUVE Satellite in Transition: From Staffed to Autonomous Science Payload Operations

Stroozas, B. A., Biroscak, D., Eckert, M., Girouard, F., Hopkins, A., Kaplan, G. C., Kronberg, F., McDonald, K. E., Ringrose, P., Smith, C. L., Vallerga, J. V., Wong, L. S., Malina, R. F. 10 1900 (has links)
International Telemetering Conference Proceedings / October 28-31, 1996 / Town and Country Hotel and Convention Center, San Diego, California / The science payload for NASA's Extreme Ultraviolet Explorer (EUVE) satellite is controlled from the EUVE Science Operations Center (ESOC) at the Center for EUV Astrophysics (CEA), University of California, Berkeley (UCB). The ESOC is in the process of a transition from a single staffed shift to an autonomous, zero-shift, "lights out" science payload operations scenario (a.k.a., 1:0). The purpose of the 1:0 transition is to automate all of the remaining routine, daily, controller telemetry monitoring and associated "shift" work. Building on the ESOC's recent success moving from three-shift to one-shift operations (completed in Feb 1995), the 1:0 transition will further reduce payload operations costs and will be a "proof of concept" for future missions; it is also in line with NASA's goals of "cheaper, faster, better" operations and with its desire to out-source missions like EUVE to academe and industry. This paper describes the 1:0 transition for the EUVE science payload: the purpose, goals, and benefits; the relevant science payload instrument health and safety considerations; the requirements for, and implementation of, the multi-phased approach; a cost/benefit analysis; and the various lessons learned along the way.
16

Extreme Ultraviolet Spectral Streak Camera

Szilagyi, John Michael 01 January 2010 (has links)
The recent development of extreme ultraviolet (EUV) sources has increased the need for diagnostic tools, and has opened up a previously limited portion of the spectrum. With ultrafast laser systems and spectroscopy moving into shorter timescales and wavelengths, the need for nanosecond scale imaging of EUV is increasing. EUV’s high absorption has limited the number of imaging options due to the many atomic resonances in this spectrum. Currently EUV is imaged with photodiodes and X-ray CCDs. However photodiodes are limited in that they can only resolve intensity with respect to time and X-ray CCDs are limited to temporal resolution in the microsecond range. This work shows a novel approach to imaging EUV light over a nanosecond time scale, by using an EUV scintillator to convert EUV to visible light imaged by a conventional streak camera. A laser produced plasma, using a mass-limited tin based target, provided EUV light which was imaged by a grazing incidence flat field spectrometer onto a Ce:YAG scintillator. The EUV spectrum (5 nm-20 nm) provided by the spectrometer is filter by a zirconium filter and then converted by the scintillator to visible light (550 nm) which can then be imaged with conventional optics. Visible light was imaged by an electron image tube based streak camera. The streak camera converts the visible light image to an electron image using a photocathode, and sweeps the image across a recording medium. The streak camera also provides amplification and gating of the image by the means of a micro channel plate, within the image tube, to compensate for low EUV intensities. The system provides 42 ns streaked images of light with a iii temporal resolution of 440 ps at a repetition rate of 1 Hz. Upon calibration the EUV streak camera developed in this work will be used in future EUV development.
17

Nanoscale Waveguiding Studied by Lensless Coherent Diffractive Imaging using EUV High-Harmonic Generation Source

Zayko, Sergey 21 September 2016 (has links)
No description available.
18

RE-ENGINEERING THE EUVE PAYLOAD OPERATIONS INFORMATION FLOW PROCESS TO SUPPORT AUTONOMOUS MONITORING OF PAYLOAD TELEMETRY

Kronberg, F., Ringrose, P., Losik, L., Biroscak, D., Malina, R. F. 11 1900 (has links)
International Telemetering Conference Proceedings / October 30-November 02, 1995 / Riviera Hotel, Las Vegas, Nevada / The UC Berkeley Extreme Ultraviolet Explorer (EUVE) Science Operations Center (ESOC) is developing and implementing knowledge-based software to automate the monitoring of satellite payload telemetry. Formerly, EUVE science payload data were received, archived, interpreted, and responded to during round-the-clock monitoring by human operators. Now, knowledge-based software will support, augment, and supplement human intervention. In response to and as a result of this re-engineering project, the creation, storage, revision, and communication of information (the information flow process) within the ESOC has been redesigned. We review the information flow process within the ESOC before, during, and after the re-engineering of telemetry monitoring. We identify six fundamental challenges we face in modifying the information flow process. (These modifications are necessary because of the shift from continuous human monitoring to a knowledge-based autonomous monitoring system with intermittent human response.) We describe the innovations we have implemented in the ESOC information systems, including innovations in each part of the information flow process for short-term or dynamic information (which changes or updates within a week) as well as for long-term or static information (which is valid for more than a week). We discuss our phased approach to these innovations, in which modifications were made in small increments and the lessons learned at each step were incorporated into subsequent modifications. We analyze some mistakes and present lessons learned from our experience.
19

Cohérence, accordabilité, propriétés spectrales et spatiales de sources de lumière extrême-ultraviolette femtoseconde / Coherence, tunability, spectral and spatial properties of femtosecond extreme-ultraviolet light sources / Koherenca, nastavljivost ter spektralna in prostorska natačnost femtosekundnih izvorov v ekstremnem UV področju

Mahieu, Benoît 17 June 2013 (has links)
Les lasers à électrons libres (LELs) à simple passage représentent actuellement la possibilité la plus prometteuse pour fournir des impulsions lumineuses de haute énergie (µJ à mJ) à des échelles de durée femtoseconde (1 fs = 10⁻¹⁵s) et des longueurs d’ondes ultra-courtes (résolution nanométrique i.e., jusqu’aux domaines de l’extrême-ultraviolet et des rayons X). Les LELs émettant dans l’extrême-ultraviolet sont une technologie encore jeune, si bien que de nombreuses questions restent ouvertes. Celles posées au sein de ce manuscrit concernent la configuration dite injectée, dans laquelle le processus est initié par une source externe cohérente (le “seed"). Nous nous concentrons particulièrement dans cette thèse sur les caractéristiques transverses et longitudinales de la lumière, sa cohérence, les propriétés de la phase temporelle et les liens directs entre le seed et l’émission LEL. La technique de génération dans un gaz noble d’harmoniques d’ordres élevés d’un laser femtoseconde (GHE) se montre à la fois complémentaire et en compétition avec les LELs. En compétition car les impulsions produites ont des qualités similaires à celles obtenues avec un LEL ; complémentaire car le rayonnement GHE peut être utilisé comme seed ou en combinaison avec la lumière LEL, par exemple pour effectuer des expériences mettant en jeu de multiples faisceaux. Bien que la GHE fournisse des impulsions moins puissantes, l’implémentation d’une telle source requiert un effort significativement moins important. Le taux de conversion harmonique, l’accordabilité et la qualité spatiale du faisceau généré, et la manière dont ces paramètres dépendent du laser générateur sont les problématiques traitées au sein de ce manuscrit. La volonté de la communauté scientifique d’effectuer des expériences novatrices demande des études profondes et l’optimisation des sources de GHE et des LELs. En particulier, sur la source LEL injectée FERMI@Elettra de Trieste, l’induction d’une dérive de fréquence dans le rayonnement a conduit à des résultats marquants. Entre autres, une méthode de génération d’impulsions scindées avec différentes longueurs d’ondes a été analysée et développée. Une telle possibilité ouvre la voie à l’utilisation des LELs injectés en tant que source autonome pour des installations de type pompe-sonde à deux couleurs. Plus généralement, l’étude des phénomènes mis en jeu dans les processus de GHE et du LEL ainsi que la caractérisation des propriétés de leur lumière sont des sujets intrinsèquement excitants, ayant des connexions directes avec de nombreux aspects fondamentaux de la physique. / Single-pass free-electron lasers (FELs) are currently the most promising facilities for providing light pulses with high energies (µJ to mJ) at femtosecond time scales (1 fs = 10⁻¹⁵s) and with ultrashort wavelengths (nanometer resolution i.e., down to extreme-ultraviolet and X-ray spectral regions). Extreme-ultraviolet FELs are still quite young so that many questions remain open. Those addressed within this manuscript concern the so-called seeded configuration, where an external coherent source (the “seed") initiates the process. In particular, we focus in this thesis on the transverse and longitudinal characteristics of the light, its coherence, the properties of the temporal phase and the direct correlations between the seed and the FEL emission. With regard to FELs, high-order harmonics of femtosecond laser pulses generated in noble gases (HHG technique) exhibit both competitive and complementary features. Competitive, because the produced pulses have similar assets as the ones provided by an FEL. Complementary, because the generated harmonics can be used as a seed or, in combination with FEL light, to perform multi-beam experiments. Even though less powerful pulses are produced by a HHG source, its implementation requires a significantly smaller effort. The efficiency of harmonic conversion, the tunability and spatial quality of the generated beam, and how these parameters depend on the driving laser are the issues discussed within this manuscript. The general will of the scientific community to perform novel experiments requires deep studies and optimization of FEL and HHG sources. In particular, on the seeded FEL facility FERMI@Elettra of Trieste, the induction of chirp in the radiation has led to remarkable results. Among others, a method of generation of split pulses with different wavelengths has been construed and developed. Such a possibility paves the way for the use of seeded FEL facilities as stand-alone sources for two-colour pump-probe setups. More generally, the study of phenomena involved in the FEL and HHG processes, together with the characterization of the light properties, are intrinsically exciting matters that have direct connections with fundamental aspects of physics. / Laser na proste elektrone (LPE, ang. free-electron laser - FEL) z enojnim prehodom je trenutno najbolj obetaven vir femtosekundnih (1 fs = 10⁻¹⁵ s) svetlobnih pulzov z visoko energijo (μJ do mJ) in ultra kratko valovno dolžino (nanometrska ločljivost, t.j., vse do spektralnega območja ekstremne ultravijolične in rentgenske svetlobe). LPE-ji, ki delujejo na področju ekstremne ultravijolične svetlobe, so razmeroma novi svetlobni viri, kar pomeni, da so glede njihovega delovanja odprta še mnoga vprašanja. V pričujočem doktorskem delu smo se ukvarjali predvsem z dvostopenjsko konfiguracijo, pri kateri LPE ojači zunanje (koherentno) elektromagnetno valovanje (seed). Osredotočili smo se na transverzalne in longitudinalne lastnosti proizvedene svetlobe, koherenco, lastnosti časovne faze ter na direktne korelacije med zunanjim virom (seed) in sevanjem LPE-ja. Poleg LPE-jev so v vzponu tudi svetlobni viri, ki temeljijo na generaciji visokih harmonikov (GVH, ang. high-order harmonic generation - HHG) v žlahtnih plinih. Ti svetlobni viri so zaradi podobnih lastnosti pulzov konkurenčni LPE-jem, po drugi strani pa predstavljajo komplementarne izvore svetlobe, ker jih je mogoče uporabiti v dvostopenjski LPE konfiguraciji kot vir zunanjega elektromagnetnega valovanja (seed) ali v kombinaciji z LPE-jem v eksperimentih z dvema ali več žarki. Kljub temu, da so ti svetlobni viri šibkejši v primerjavi z LPE-ji, je njihova izvedba bistveno lažja. V dizertaciji obravnavamo izkoristek harmonične pretvorbe virov, ki temeljijo na principu GVH, nastavljivost in prostorsko kakovost žarkov, ter odvisnost omenjenih parametrov od gonilnega laserja. Zaradi vse večje težnje po novih eksperimentih na vseh znanstvenih področjih sta ključna zelo natančno poznavanje delovanja in optimizacija LPE-jev in virov, ki temeljijo na GVH. Med bolj pomembne dosežke na LPE-ju FERMI@Elettra v Trstu spadajo možnost spreminjanja trenutne frekvence proizvedene svetlobe (ang. chirp) na podlagi katere je bila razvita metoda za generacijo razdeljenih pulzov z različnimi valovnimi dolžinami. S pomočjo te metode bo možno dvostopenjske LPE-je uporabljati kot samostojne vire svetlobe za poskuse v t.i. načinu « pump-probe ». V dizertaciji so predstavljene študije pojavov, ki so prisotni pri generaciji svetlobe v LPE-jih ter virih, ki temeljijo na GVH. Ti pojavi so, skupaj z metodami karakterizacije proizvedene svetlobe, tesno povezani s temeljnimi principi v fiziki.
20

Colliding Laser Produced Plasma Physics and Applications in Inertial Fusion and Nanolithography

John P. Oliver (5930102) 17 January 2019 (has links)
<div>Laser-produced plasmas (LPP) have been used in a wide range of applications such as in pulsed laser deposition (PLD), extreme ultraviolet lithography (EUVL), laser-induced breakdown spectroscopy (LIBS), and many more. In the collision of two laser-produced plasmas, the two counter-streaming plasmas may face a degree of stagnation which influences the subsequent development of the compound plasma plume. The plume development of the stagnation layer can deviate quite noticeably from typical laser-plasma behavior. For instance, an enhanced degree of collisionality is expected, especially when the plasma collision transpires in a low pressure ambient. Colliding plasma can be intentionally implemented or conversely may occur naturally. In EUV lithography colliding plasma could service as an efficient EUV source with inherent debris mitigation. Conversely, colliding plasma could manifest in an inertial fusion energy (IFE) chamber leading to contamination, disrupting successful device operation.</div><div><br></div><div>Various techniques such as optical emission spectroscopy (OES), CCD plume imaging, laser-induced fluorescence (LIF), laser-induced incandescence (LII), and scanning electron microscopy (SEM) may be used to study laser-produced plasmas and their associated byproducts. These techniques will be used extensively throughout this work to aid in developing an understanding of the various physical and chemical phenomena occurring in these plasmas.</div><div><br></div><div><div>Chapter 1 provides introductory knowledge regarding LPPs with a specific exploration into colliding plasma and its relevance to a broad body of scientific knowledge. Additionally, the principles behind the various experimental techniques are capitulated.</div><div><br></div><div>Chapter 2 presents the laboratory facilities available at our Center for Materials Under eXtreme Environment (CMUXE) which can be used to study LPP. The various equipment (chambers, lasers, spectrograph, etc.) are discussed in detail.</div><div><br></div><div>Chapter 3 begins the series of substantive chapters which comprise the original research of this thesis. Here, the early formation (< 1 μs) of colliding carbon plasmas produced from the ablation of graphite is explored. The influence of plume hydrodynamics on the temporary lateral confinement of the stagnation layer is discussed with attention to the three different laser intensities studied. Additionally, species in the plasma were identified using OES and monochromatic plume imaging. A large increase in Swan emission from C2 dimers is observed in the stagnation layer, suggesting formation of C2 and/or re-excitation of C2 produced ab initio during laser ablation. Results were compared with HEIGHTS computational modeling to verify observations and to validate the code package for a new plasma regime.</div><div><br></div><div>Chapter 4 functions as a continuation from Chapter 3, looking into the intermediate time (1-10 μs) dynamics of colliding carbon plasma. To observe transient molecular species of carbon, C2 and C3, LIF was employed. By acquiring plume images through LIF, the various mechanisms by which C2 and C3 appear at different times in the plasma lifetime may be discerned. Using optical time-of-flight (OTOF), more information of carbon species populations may be determined to construct space-time contours which offer corroborative information regarding the spatiotemporal development of the stagnation layer.</div></div><div><br></div><div><div>Chapter 5 presents work on colliding Sn plasma for application as a EUV light source. The accumulation of material along the stagnation layer makes colliding plasmas a suitable preplasma in a dual pulse laser scheme. Dual-pulse EUV concepts call for the formation of a preplasma from the stagnation of two Sn plasmas. This preformed plasma is then subject to a second, pumping laser purposed to optimize the conversion efficiency (CE) of laser energy into EUV output. Characterization of the stagnation layer was obtained through optical emission spectroscopy while CE data is obtained using an absolutely calibrated EUV photodiode. HEIGHTS computational modeling then provides prediction of EUV emission upon using a CO2 laser for preplasma reheat.</div><div><br></div><div>Chapter 6 explores the collision between two dissimilar plasmas. Laser-produced plasma of Si and C are created in a manner which enables the two plasmas to collide. The ensuing development of the colliding plasma regime is then discussed in terms of relevant plume hydrodynamics. Analysis of the colliding regime is accomplished using fast-gated plume imaging and optical time-of-flight.</div><div><br></div><div>The final chapter, Chapter 7, provides a concise summary of the results presented in the preceding chapters. Additionally, recommended research directives are presented which are designed with consideration for the current facilities and capabilities at CMUXE.</div></div>

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