Le laminage à chaud de l’acier inoxydable est une étape du procédé de fabrication agissant significativement sur la qualité de surface des produits. Les nuances ferritiques stabilisées sont largement utilisées dans les applications automobiles et de décoration mais sont concernées par le phénomène de collage à chaud. Ces nuances, ayant des résistances élevées en corrosion sèche et en fluage, sont riches en éléments tels que le Cr, le Nb ou le Ti, limitant aussi l’oxydation des brames lors du laminage. Or, l’oxydation maitrisée de la brame permet de protéger la surface du métal de tout contact direct avec les cylindres de laminage.Afin de comprendre l’initiation du collage, une première campagne d’étude sur la topographie et la dégradation de l’état de surface des cylindres a été réalisée. Il a été mis en évidence que l’initiation du collage ne serait pas du à des rayures d’usure en surface des cylindres et dont la profondeur serait supérieure à la couche d’oxyde, car la probabilité que la profondeur d’une rayure de cylindre soit plus importante que la couche d’oxyde est très faible.Ensuite, un banc d’essai reproduisant les conditions tribologiques de l’emprise du laminoir a été conçu afin de mieux appréhender les mécanismes à l’origine du collage. Etant donné l’importance de l’état de surface des brames et des cylindres, ce banc d’essai a permis de travailler sur des échantillons pris en production, permettant d’étudier la surface oxydée des tôles. Cette deuxième campagne d’étude a mis en évidence l’importance des oxydes de silicium sur l’adhérence partielle de la couche d’oxyde, ainsi que la relative hétérogénéité en épaisseur et en composition chimique. / Hot rolling of stainless steel is one of the most important steps in manufacturing process regarding surface quality of the product. Stabilised ferritic stainless steels are widely used in automotive and cosmetic appliances but are also concerned by sticking phenomenon. These grades, having high dry corrosion and creep resistance, are enriched in specific chemical elements such as Cr, Nb or Ti, limiting also slab oxidation during hot rolling. Nevertheless, the mastered oxidation of slab surface is a way to protect metal surface from direct contact with rolls.In order to better understand initiation of sticking, a first campaign was based on topography and rolls surface state wear analysis. This study revealed that sticking initiation is not due to the presence of roll scratches which depth is higher than oxide layer thickness. Indeed, the probability that roll scratches are deeper than oxide layer thickness is very low.In a second time, a pilot was designed, reproducing tribological conditions of a roll bite, to better understand mechanisms that initiate sticking. Keeping in mind the importance of rolls and slab surface state, this pilot is able to use specimen taking from industrial products, having the original oxide layer surface. This second study highlighted the major role of silicium oxides on scale adherence and the high heterogeneity of this scale layer in thickness and in chemical composition.

The reduction behaviour of the olivine iron ore pellet MPBOwas studied in laboratory scale at KTH as well as in the LKABexperimental blast furnace. Initially, a newreduction-under-load, or so-called reduction/softening/melting,test equipment was developed. Experiments using differentreducing conditions, corresponding to different radialpositions of the blast furnace, were conducted. The experimentsincluded different temperature profiles, reducing atmospheresand mechanical loads applied on the sample bed to simulate thevarying conditions in the blast furnace process. The progressof reduction was investigated, as well as the processes ofsintering and contraction during reduction. A model of thecarburisation (pick-up of carbon by the reduced iron) andmelt-down process during rapid contraction was presented. Laboratory testing of MPBO pellets was compared with resultsfrom the LKAB experimental blast furnace. The reduction of ironore pellets in the experimental blast furnace was surveyed by adissection of the furnace after quenching. The high temperaturephenomena occurring when reducing the MPBO pellet, with limitedsoftening and a short temperature range of the melting process,resulting in a thin cohesive zone, were found to be the same inlaboratorytests and in the experimental blast furnace. Thereduction down through the burden of the experimental blastfurnace was similar, but not identical to the results of theRUL experiments. The differences were found to be due todifferent reducing conditions. Therefore, it was concluded thata simulation of the reduction occurring in the blast furnacecan be performed in laboratory scale, provided the experimentalconditions are correctly chosen. Finally, a modification to further improve the properties ofthe MPBO pellets was examined. With the aim to improve theblast furnace process, coating of blast furnace pellets wasinvestigated in laboratory scale, as well as in the LKABexperimental blast furnace. Olivine, dolomite and quartzitewere used as coating agents. In laboratory scale the stickingprevention action of the different coating materials wasverified, in established test methods as well as in new testmethods, modified for blast furnace conditions. Testing of thecoated pellets in the experimental blast furnace revealedseveral advantages; significantly reduced blast furnace fluedust generation, improved gas utilisation and a smoother blastfurnace operation with a potential for a lowered fuel rate. <b>Keywords:</b>Olivine, pellets, pellet testing,reduction/softening/melting, MPBO, blast furnace, reduction,quenching, dissection, coating, sticking, coated pellets.

<p>The reduction behaviour of the olivine iron ore pellet MPBOwas studied in laboratory scale at KTH as well as in the LKABexperimental blast furnace. Initially, a newreduction-under-load, or so-called reduction/softening/melting,test equipment was developed. Experiments using differentreducing conditions, corresponding to different radialpositions of the blast furnace, were conducted. The experimentsincluded different temperature profiles, reducing atmospheresand mechanical loads applied on the sample bed to simulate thevarying conditions in the blast furnace process. The progressof reduction was investigated, as well as the processes ofsintering and contraction during reduction. A model of thecarburisation (pick-up of carbon by the reduced iron) andmelt-down process during rapid contraction was presented.</p><p>Laboratory testing of MPBO pellets was compared with resultsfrom the LKAB experimental blast furnace. The reduction of ironore pellets in the experimental blast furnace was surveyed by adissection of the furnace after quenching. The high temperaturephenomena occurring when reducing the MPBO pellet, with limitedsoftening and a short temperature range of the melting process,resulting in a thin cohesive zone, were found to be the same inlaboratorytests and in the experimental blast furnace. Thereduction down through the burden of the experimental blastfurnace was similar, but not identical to the results of theRUL experiments. The differences were found to be due todifferent reducing conditions. Therefore, it was concluded thata simulation of the reduction occurring in the blast furnacecan be performed in laboratory scale, provided the experimentalconditions are correctly chosen.</p><p>Finally, a modification to further improve the properties ofthe MPBO pellets was examined. With the aim to improve theblast furnace process, coating of blast furnace pellets wasinvestigated in laboratory scale, as well as in the LKABexperimental blast furnace. Olivine, dolomite and quartzitewere used as coating agents. In laboratory scale the stickingprevention action of the different coating materials wasverified, in established test methods as well as in new testmethods, modified for blast furnace conditions. Testing of thecoated pellets in the experimental blast furnace revealedseveral advantages; significantly reduced blast furnace fluedust generation, improved gas utilisation and a smoother blastfurnace operation with a potential for a lowered fuel rate.</p><p><b>Keywords:</b>Olivine, pellets, pellet testing,reduction/softening/melting, MPBO, blast furnace, reduction,quenching, dissection, coating, sticking, coated pellets.</p>

Au cours d’un traitement de surface de type dépôt assisté par plasma, les caractéristiques et propriétés de l’interface entre le dépôt et le substrat sont déterminées par la première couche atomique du dépôt, voire les premiers atomes qui commencent à recouvrir la surface du substrat. Aussi, la parfaite connaissance du comportement des particules incidentes et du réarrangement des atomes suite à l’impact d’une particule du plasma est-elle un élément essentiel à la description du comportement de la surface en cours de traitement et donc de ses propriétés ultérieures. Au cours de cette thèse, nous avons entrepris d’étudier, par une approche combinant expériences et simulation numérique par dynamique moléculaire, l’interaction d’espèces (C, Ti, W) avec une surface de silicium en fonction de paramètres tels que l’énergie, la fluence ou encore l’incidence des particules arrivant sur la surface. Une part importante de ce travail a consisté à adapter les codes de dynamique moléculaire (utilisation des champs de force réactifs) aux systèmes étudiés. La partie expérimentale a nécessité la mise en place de procédures spécifiques pour l’utilisation de l’équipement Storing Matter. Les résultats montrent que, quelles que soient l’espèce incidente, parmi celles étudiées, le coefficient de collage (SC) est dans la gamme [0.7 – 1] ; dans le cas de W, quasiment tous les atomes incidents restent sur la surface (SC~~1). Outre la détermination du coefficient de collage, pour différentes conditions initiales des espèces incidentes (énergie, incidence, fluence) les modifications apportées à la surface ont également été déterminées en termes d’implantation et de trajectoire dans le matériau des espèces incidentes, et de pulvérisation de la surface du substrat / During plasma assisted deposition, properties of the coating substrate interface depend on the first atomic layer of the deposit, or the atoms that first start to cover the surface. Therefore the good knowledge of the sticking coefficient and the reorganization of the surface following particle impact is an essential issue to achieve the description of the behavior of the processed surface and, therefore, its expected properties. Consequently, we investigated the interaction between incoming particles (C, Ti, W) and a silicon surface by using an approach combining molecular dynamic simulations and experiments. Various initial conditions were studied, energy, fluence and incidence angle of the incoming particles. An important part of this work has consisted in adapting the molecular dynamic codes (using reactive force fields) to the investigated systems. Meanwhile, experimental procedure specifically devoted to the use of the Storing Matter facility was also developed. Results show that the sticking coefficient (SC) value is in the range [0.7 – 1] irrespectively of the incoming species; in the case of W, almost all atoms stick on the surface (SC~~1). Besides the determination of sticking coefficient, the surface modification resulting from the particles impingement were determined for various initial conditions (energy, fluence, angle) in terms of implantation and displacement of the incoming species, and surface sputtering as well

This thesis supplies a contribution to the understanding of the interaction between carboncarbon surfaces, atoms with carbon-surfaces, and atoms with metallic surfaces. It is well established that the surface-surface and atom-surface interactions are interesting, important and challenging for reasons that vary from industrial interest up to the academic necessity of understanding it deeply. Currently, there are many measurements and simulations for the geometric and electronic properties of Graphite, these differ by more than 40%. This implies that our understanding of the nature of this material is quite poor. The interaction between small transition-metals clusters with a Graphene sheet is another example where our knowledge is very limited. There are many theoretical studies in the literature that describe the interaction between these clusters with a Graphene sheet, but they agree and disagree on many points, which calls for systematic study of this issue. In this thesis we will focus our efforts on studying the surface-surface and atom/clusters-surface interactions. This thesis is split into three projects. The first aims to contribute to the understanding of the interlayer interactions of the bulk Graphite. In the second, we intend to shed some light on comprehending the interaction of an adatom with a Graphene sheet. Both of these projects, are studied within DFT framework with the inclusion of the van der Waals (vdW) corrections. In the Graphite project, we found that the electronic and geometric properties depend on the vdW correction employed in the calculation. In the adatom supported on Graphene project, we combined a modified Anderson-Newns model to describe the coupling between the adatom with Graphene. In addition, we found the existence of competition between quantum and classical forces, which determine the type of site in which the adatom prefers to adsorb. The last project is a dynamical study of an atom that impinges upon a metallic surface. In this project, we focus on the calculation of the sticking coefficient, a measure of the amount of nuclear density attached to the metal surface after collision. At this time the project is not one 100% ready, but our preliminary results indicates that, a small part of the nuclear density stays stuck on the metal. / Esta tese ajuda a entender as interações entre duas superfícies de carbono. A natureza da interação de átomos ou aglomerados atômicos adsorvidos sobre uma superfície de carbono. Além disso, visa esclarecer a dinâmica de um átomo sendo adsorvido sobre uma superfície metálica. As interações superfície-superfície e átomos-superfícies são importantes por razões que variam desde o interesse industrial até a necessidade acadêmica para compreendê-la profundamente. Entendê-las ainda é um desafio. Diversos trabalhos apresentam medidas experimentais e simulações para as propriedades geométricas e eletrônicas do grafite. Tais medidas diferem em mais ide 40% umas da outra. Isso mostra que nossa compreensão sobre a natureza desse material ainda é bastante pobre. A interação entre pequenos grupos de metais de transição com uma folha de grapheno é outro exemplo em que nosso conhecimento é limitado. Existem muitos estudos teóricos na literatura que descrevem a interação desse tipo de aglomerado com uma folha de grafeno, porém há numerosas discordâncias. Tais controvérsias parecem suplicar por um estudo sistemático. Nesta tese focamos nossos estudos nas interações superfície-superfície e de átomos ou aglomerados atômicos com superfícies de carbono e de um metal. A tese foi dividida em três projetos. O primeiro visa compreender melhor a interação entre as camadas do grafite. No segundo, pretendemos lançar alguma luz no entendimento da interação de átomos e aglomerados atômicos com uma folha de grafeno. Esses dois projetos, são estudados à luz da Teoria do Funcional da Densidade com a inclusão das correções van der Waals (vdW). No Projecto sobre o grafite, mostramos que as propriedades eletrônicas e geométricas dependem do tipo de correção de vdW empregada no cálculo. No projeto sobre átomos e aglomerados atômicos adsorvidos no grapheno, combinamos um modelo modificado de Anderson-Newns para descrever o acoplamento entre um átomo adsorvido e o grafeno. Além disso, encontramos uma competição entre forças quânticas e clássicas, a qual determina o tipo de sítio no qual o átomo prefere ser adsorvido. O último projeto é um estudo dinâmico de um átomo colidindo contra uma superfície metálica. Nesse projeto o foco é posto no cálculo do coeficiente de aderência, o qual mede a taxa de densidade nuclear presa na superfície metálica após a colisão. Resultados preliminares indicam que, uma pequena parte da densidade nuclear permanece aderida ao metal depois da colisão.

Desenvolve-se um novo método de cálculo da probabilidade de adsorção química de átomos incidentes em superfícies metálicas. Introduz-se um modelo teórico de adsorção cujo Hamiltoniano descreve um átomo incidindo normalmente e interagindo com os elétrons da banda de condução de uma superfície metálica. Como interações, são levadas em consideração (1) a possibilidade de transferência de energia cinética e de carga do átomo para o metal e (2) o potencial de carga imagem do átomo ionizado. A solução do modelo consiste em se tratar a parte eletrônica e a nuclear do Hamiltoniano separadamente. A parte eletrônica é tratada com a técnica de grupo de renormalização introduzida por Wilson e a parte nuclear, através da solução numérica da equação de Schrödinger para o movimento nuclear. O acoplamento entre as duas componentes do hamiltoniano é tratado como perturbação à aproximação adiabática. A probabilidade de adsorção é calculada em função da energia cinética do átomo incidente através da regra de ouro de Fermi. Os resultados, mostrando que a probabilidade de adsorção decai rapidamente acima de uma energia cinética característica, são interpretados fisicamente. / A new procedure that calculates sticking coefficients for atomic beams incident upon metallic surfaces is discussed. A model Hamiltonian describing the normal incidence of an ad-atom and its interaction with the conduction electrons of the adsorbate is introduced. The Hamiltonian accounts for two couplings: (1) the overlap between the atomic orbital and the metallic conduction states, allowing charge transfer between incident particle and adsorbate, and (2) the image potential associated with the ionized ad-atom. The electronic and nuclear parts of the model Hamiltonian are diagonalized separately, the former by renormalization group techniques and the second by numerical integration of the Schrödinger equation for the nuclear motion. Through the perturbative treatment, the first order corrections to the adiabatic approximation are presented. The results, showing that the sticking coefficient diminishes rapidly above a characteristic kinetic energy o£ the incident atom, are interpreted.

This thesis supplies a contribution to the understanding of the interaction between carboncarbon surfaces, atoms with carbon-surfaces, and atoms with metallic surfaces. It is well established that the surface-surface and atom-surface interactions are interesting, important and challenging for reasons that vary from industrial interest up to the academic necessity of understanding it deeply. Currently, there are many measurements and simulations for the geometric and electronic properties of Graphite, these differ by more than 40%. This implies that our understanding of the nature of this material is quite poor. The interaction between small transition-metals clusters with a Graphene sheet is another example where our knowledge is very limited. There are many theoretical studies in the literature that describe the interaction between these clusters with a Graphene sheet, but they agree and disagree on many points, which calls for systematic study of this issue. In this thesis we will focus our efforts on studying the surface-surface and atom/clusters-surface interactions. This thesis is split into three projects. The first aims to contribute to the understanding of the interlayer interactions of the bulk Graphite. In the second, we intend to shed some light on comprehending the interaction of an adatom with a Graphene sheet. Both of these projects, are studied within DFT framework with the inclusion of the van der Waals (vdW) corrections. In the Graphite project, we found that the electronic and geometric properties depend on the vdW correction employed in the calculation. In the adatom supported on Graphene project, we combined a modified Anderson-Newns model to describe the coupling between the adatom with Graphene. In addition, we found the existence of competition between quantum and classical forces, which determine the type of site in which the adatom prefers to adsorb. The last project is a dynamical study of an atom that impinges upon a metallic surface. In this project, we focus on the calculation of the sticking coefficient, a measure of the amount of nuclear density attached to the metal surface after collision. At this time the project is not one 100% ready, but our preliminary results indicates that, a small part of the nuclear density stays stuck on the metal. / Esta tese ajuda a entender as interações entre duas superfícies de carbono. A natureza da interação de átomos ou aglomerados atômicos adsorvidos sobre uma superfície de carbono. Além disso, visa esclarecer a dinâmica de um átomo sendo adsorvido sobre uma superfície metálica. As interações superfície-superfície e átomos-superfícies são importantes por razões que variam desde o interesse industrial até a necessidade acadêmica para compreendê-la profundamente. Entendê-las ainda é um desafio. Diversos trabalhos apresentam medidas experimentais e simulações para as propriedades geométricas e eletrônicas do grafite. Tais medidas diferem em mais ide 40% umas da outra. Isso mostra que nossa compreensão sobre a natureza desse material ainda é bastante pobre. A interação entre pequenos grupos de metais de transição com uma folha de grapheno é outro exemplo em que nosso conhecimento é limitado. Existem muitos estudos teóricos na literatura que descrevem a interação desse tipo de aglomerado com uma folha de grafeno, porém há numerosas discordâncias. Tais controvérsias parecem suplicar por um estudo sistemático. Nesta tese focamos nossos estudos nas interações superfície-superfície e de átomos ou aglomerados atômicos com superfícies de carbono e de um metal. A tese foi dividida em três projetos. O primeiro visa compreender melhor a interação entre as camadas do grafite. No segundo, pretendemos lançar alguma luz no entendimento da interação de átomos e aglomerados atômicos com uma folha de grafeno. Esses dois projetos, são estudados à luz da Teoria do Funcional da Densidade com a inclusão das correções van der Waals (vdW). No Projecto sobre o grafite, mostramos que as propriedades eletrônicas e geométricas dependem do tipo de correção de vdW empregada no cálculo. No projeto sobre átomos e aglomerados atômicos adsorvidos no grapheno, combinamos um modelo modificado de Anderson-Newns para descrever o acoplamento entre um átomo adsorvido e o grafeno. Além disso, encontramos uma competição entre forças quânticas e clássicas, a qual determina o tipo de sítio no qual o átomo prefere ser adsorvido. O último projeto é um estudo dinâmico de um átomo colidindo contra uma superfície metálica. Nesse projeto o foco é posto no cálculo do coeficiente de aderência, o qual mede a taxa de densidade nuclear presa na superfície metálica após a colisão. Resultados preliminares indicam que, uma pequena parte da densidade nuclear permanece aderida ao metal depois da colisão.

Dans le cadre de l'installation GANIL / SPIRAL-1, un système innovant de source d'ions cible (TISS) a été conçu pour produire des nouveaux faisceaux d'ions radioactifs compétitifs et déterminer dans quelle mesure il est possible d'améliorer les performances de production par l’optimisation de l’ensemble cible-source (ECS) d’ions dédié à la production d'un faisceau d'ions radioactifs spécifique.L'isotope d'alcalin de courte durée de 74Rb ( demi-vie = 64.8 ms) a été choisi comme cas d’école.En étudiant et en améliorant les processus impliqués dans le fonctionnement de l’ECS, i.e. production dans la cible par réaction fusion-évaporation, implantation dans- et sortie du graphite, effusion et ionisation, une efficacité de transformation atome-ion de 75% est attendue, menant à un taux d'ions de l'ordre de 104 pps à la sortie de l’ECS.Les performances estimées permettraient à l'installation GANIL / SPIRAL-1 de délivrer des faisceaux de 74Rb et 114Cs avec des intensités compétitives, jamais atteintes dans d'autres installations.Le dispositif de production a été développé sur la base de mon travail, pour répondre aux objectifs de physique et aux conditions d'opération de SPIRAL-1. L'efficacité, la fiabilité et donc la simplicité étaient essentielles. Le système répond à ces exigences. / In the frame of GANIL/SPIRAL-1 facility, an innovative target ion source system (TISS) has been designed in order to produce new competitive radioactive ion beams, and to determine to which extent it is possible to improve the production performances by optimizing a target ion source system dedicated to the production of a specific radioactive ion beam.The short-lived alkali isotope of 74Rb (half-life = 64.8 ms) has been chosen as a challenging case study.By studying and improving the processes involved in the TISS designed, i.e. in-target production by fusion-evaporation, implantation in and release out of graphite, effusion, and ionization, an atom-to-ion transformation efficiency of 75% was predicted, leading to an ion rate of the order of 104 pps at the exit of the TISS.The estimated performances would allow the GANIL / SPIRAL-1 installation to deliver beams of 74Rb and 114Cs with competitive intensities never reached in other installations.The production device was developed based on my work, to cope with physics objectives and with the conditions of the SPIRAL-1 operation. Efficiency, reliability and thus simplicity were essential. The system meets these requirements.The instrumentation needed for tests existed or have been specifically designed. The TISS has been built, assembled and partly tested.In parallel, issues have been addressed to answer related questions about sticking times, resistivity, and emissivity, to get inputs for the design of the TISS.Expected results with alkali allow thinking that the transposition of the principle to the production of neutron-deficient short-lived isotopes of noble gases and eventually metals could be performing.

In dieser Arbeit werden verschiedene Prozesse zur Atomlagenabscheidung (ALD) von TiO2 und HfO2 experimentell untersucht. Die Untersuchungen schließen eine experimentelle Charakterisierung des Schichtwachstums sowie eine massenspektrometrische Analyse der Reaktionsprodukte ein. Im Detail wurden der ALD-Prozess mit Cp*Ti(OMe)3 und Ozon zur Abscheidung von TiO2 sowie der ALD-Prozess mit TEMAHf und Ozon zur Abscheidung von HfO2 untersucht. Der theoretische Teil der Arbeit beginnt mit einer Methode zur Bestimmung des absoluten Haftkoeffizienten. Anschließend werden numerische Modelle entwickelt, welche die Adsorption von Präkursormolekülen durch strukturierte Substrate beschreiben. Diese Modelle enthalten die Substratstruktur und den absoluten Haftkoeffizienten. Es wird eine statistische numerische Methode entwickelt, mit der der Gastransport in dem ALD-Reaktor statistisch beschrieben wird. Die statistischen Größen, welche die Gasdynamik im Reaktor beschreiben, werden mit der Discrete Simulation Monte Carlo (DSMC) Methode bestimmt. Mit dieser Methode und den Modellen der Adsorption kann der komplette ALD-Prozess simuliert werden. Die neu entwickelte Methode wird verwendet um die Effizienz verschiedener ALD-Reaktoren in Abhängigkeit des absoluten Haftkoeffizienten, der Substratstruktur sowie der Prozessbedingungen zu untersuchen. Die Geometrie des Reaktors wird variiert und mit der Referenzgeometrie verglichen. / This dissertation is divided into an experimental part and a theoretical part. The experimental part describes the atomic layer deposition (ALD) of TiO2 and HfO2. TDMAT and Cp*Ti(OMe)3 were used as titanium precursors, while TEMAHf was used as the hafnium precursor. Ozone was used as the oxygen source. The self limiting film growth and the temperature window of these ALD processes were investigated. The reaction by-products of the Cp*Ti(OMe)3/O3 process were identified by quadrupol mass spectrometry (QMS). The QMS analysis of the TEMAHf/O3 process revealed that water is formed during the metal precursor pulse. The theoretical part of this thesis describes the development of models and numerical methods to simulate the ALD as a whole. First of all, a model for the adsorption of precursor molecules by planar substrates was developed. This model was extended to describe the adsorption of precursor molecules inside a cylindrical hole with an aspect ratio of 20, 40 and 80. The adsorption of precursor molecules is dominated by the absolute sticking coefficient (SC), i.e., the reactivity of the precursor molecules. From the numerical model the saturation profiles along the wall of a cylindrical hole can be determined. From the comparison of the simulated profile with an experimentally determined thickness profile the SC can be determined. This method was used to determine the SC of the precursors examined in the experimental part. The SC of TEMAHf increases exponentially with the substrate temperature. A discrete particle method (DSMC) was used to derive a statistical description of the gas kinetics inside an ALD reactor. Combining the statistical description of the gas transport and the numerical models of the adsorption, it is possible to simulate the ALD for any combination of reactor, substrate and SC. It is possible to distinguish the contribution of the reactor geometry, the process parameters and the process chemistry (SC) to the process efficiency. Therefore, the ALD reactor geometry can be optimized independently of the process chemistry. This method was used to study a shower head ALD reactor. The reactor geometry, the composition of the gas at the inlet and the position of the inlet nozzles was varied in order to find more efficient ALD reactors. The efficiency of the reference geometry is limited by the inlet nozzles close to the exhaust and the decrease of the pressure on the substrate near the exhaust. The efficiency of ALD processes with different SCs was simulated for planar and structured substrates with a diameter of 300 mm and 450 mm.

La nanoimpression assistée par UV (UV-NIL) est une technique de lithographie émergente permettant de fabriquer des motifs de très petites dimensions (de l'ordre du nanomètre) par simple pressage d'un moule transparent (contenant dans sa surface des nanostructures) dans une résine fluide (déposée en film mince sur un substrat en silicium par centrifugation). L'étape suivante au pressage est l'exposition aux rayonnements UV qui photo-polymérise la résine, avant de séparer le moule de la résine durcie. En raison de son fort potentiel, l'UV-NIL est considéré comme un candidat possible pour réaliser l'étape lithographique dans la fabrication des circuits intégrés du futur. Deux aspects critiques peuvent empêcher l'adoption de l'UV-NIL à une échelle industrielle. Il s'agit des défauts générés après l'étape de pressage (liés à l'écoulement de la résine) et la courte durée de vie du moule traitée (il est en fait nécessaire de déposer une couche antiadhésive sur la surface du moule pour éviter que la résine s'y colle). La première problématique a été abordée à travers la proposition d'un model qui semble permettre de estimer la longueur d'écoulement des résines fluide pour l'UV-NIL. Les recherches menées au tour de la deuxième problématique représentent le coeur de ce manuscrit. Une meilleure compréhension des mécanismes de dégradation de la couche antiadhésive ont été acquis. La dégradation est le résultat d'une attaque chimique (exercé par les radicaux produits dans la résine polymérisée contre la molécule fluorée et conditionné aussi par la nature chimique de la résine photosensible) et d'une dégradation mécanique (due aux stresses exercés pendant le démoulage et liée à la qualité du greffage de la molécule antiadhésive sur le moule). La rajoute de surfactants fluorés dans la formulation de la résine représente une solution valable pour augmenter le nombre d'impressions faites avec un même moule traité. Enfin une résine hybride (organique-inorganique) a été synthétisée pour une application concrète : la réalisation de moules qui permettent d'organiser à longue échelle (quelque millimètre) des di-bloc copolymers (avec un taille de quelque nanometer) par graphoepitaxie.