Electron Beam Induced Deposition (EBID) is a direct write fabrication process with applications in circuit edit and debug, mask repair, and rapid prototyping. However, it suffers from significant drawbacks, most notably low purity. Work over the last several years has demonstrated that deposition from bulk liquid precursors, rather than organometallic gaseous precursors, results in high purity deposits of low resistivity (LPEBID). In this work, it is shown that the deposits resulting from LP-EBID are only highly conductive when deposited at line doses below 25μC/cm. When the dose exceeds this value, the resulting structure is highly porous providing a poor conductive pathway. It is also shown that beam current has no significant effect on the resistivity of the deposits. Nanowires with resistivity significantly lower than the previous best result of 67μΩ•cm were achieved, with the lowest resistivity being only 6.6μΩ•cm, only a factor of 4 higher than that bulk copper of 1.7μΩ•cm.

Additive manufacturing (AM), also called 3D-printing, are technologies where parts are formed from the bottom up by adding material layer-by-layer on top of each other. Electron Beam Melting (EBM) is an AM technique capable of manufacturing fully solid metallic parts, using a high-intensity electron beam to melt powder particles in layers to form finished components. Compared to conventional machining, EBM offers enhanced efficiency for production of customized and patient specific parts such as e.g. dental prosthetics. However, dental prosthetics are challenging to produce by EBM, as their small sizes mean that mechanical and surface properties may be altered as part sizes decreases. The aim of this thesis is to gain new insights that could lead to optimization for production of small sized components in the EBM. The work is focused to understand the process-property relationships for small size components production. To improve the surface resolution and part detailing, a smaller sized powder was used for production and compared to parts made with standard sized powder. The surface-, chemical and mechanical properties were evaluated for parts produced with both types of powders. The results indicate that the surface roughness may be influenced by powder and build layer thickness size, whereas the mechanical properties showed no influence of the layer-wise production. However, the mechanical properties are dependent on part size. The outermost surface of the parts consists of a surface oxide dominated by TiO2, formed as a result of reaction between the surface and residual gases in the EBM build chamber. The surface oxide thickness is comparable to that of a conventionally machined surface, but is dependent on build height. This work concludes that the surface resolution and component detailing can be improved by various measures. Provided that proper process themes are used, the EBM manufactured material is homogenous with properties comparable to conventional produced titanium. It has also been shown that the material properties will be altered for small components. The results point towards different ways of optimizing manufacturing of dental prosthetics by EBM, which will make dental prosthetics available for an increased number of patients.

Le récent développement de la Fabrication Additive de pièces métalliques permet d'élaborer directement des structures à partir de modèles 3D. En particulier, la technologie "Electron Beam Melting" (EBM) permet la fusion sélective, couche par couche, de poudres métalliques. Elle autorise la réalisation de géométries très complexes mais apporte de nouvelles contraintes de fabrication.Ce travail se concentre sur la caractérisation géométrique et mécanique de structures treillis produites par cette méthode. Les pièces fabriquées sont comparées au design initial à travers des caractérisations par tomographie aux rayons X. Les propriétés mécaniques sont testées en compression uni-axiale. Pour les poutres de faibles épaisseur, la différence entre la structure numérique et celle fabriquée devient significative. Les écarts au design initial se traduisent pour chaque poutre par un concept de matière mécaniquement efficace. D'un point de vue modélisation, ce concept est pris en compte en remplaçant la poutre fabriquée par un cylindre avec un diamètre mécaniquement équivalent. Ce diamètre équivalent est utilisé dans des simulations et optimisations "réalistes" intégrant ainsi les contraintes de fabrication de la technologie EBM.Différentes stratégies sont aussi proposées pour réduire la proportion de volume "inefficace" et améliorer le contrôle de la taille des poutres, soit en jouant sur les paramètres procédé et les stratégies de fusion, soit en effectuant des post-traitements. / The recent development of Additive Manufacturing for the fabrication of metallic parts allows structures to be directly manufactured from 3D models. In particular, the "Electron Beam Melting" (EBM) technology is a suitable process which selectively melts a powder bed layer by layer. It can build very complex geometries but brings new limitations that have to be quantified.This work focuses on the structural and mechanical characterization of lattice structures produced by such technology. The structural characterization mainly rely on X-ray tomography whereas mechanical properties are assessed by uni-axial compression. The geometry and related properties of the fabricated structures are compared with the designed ones. For small strut size, the difference between the designed structure and the produced one is large enough to impact the desired mechanical properties. The concept of mechanical efficient volume is introduced. For the purpose of simulation, this concept is taken into account by replacing the struts by a cylinder with a textit{mechanical equivalent diameter}. After validation, it has been used into "realistic" simulation and optimization procedures, thus taking into account the process constraints.Post-treatments (Chemical Etching and Electro-Chemical Polishing) were applied on lattice structures to get rid of the inefficient matter by decreasing the surface roughness. The control of the size of the fabricated struts was improved by tuning the process strategies and parameters.

En vue de leur refroidissement, les parois de chambres de combustion aéronautiques sont perforées de trous à travers lesquels de l’air plus froid est injecté. La paroi est ainsi refroidie par convection et un film isolant est créé en surface chaude (film cooling). Cette thèse a pour objectif d’utiliser les possibilités de la fabrication additive pour proposer de nouvelles solutions architecturées qui permettraient d’augmenter les échanges de chaleur internes et d’obtenir ainsi de meilleures efficacités de refroidissement.La première approche consiste à élaborer de nouveaux designs de plaques multiperforées par Electron Beam Melting (EBM) et Selective Laser Melting (SLM) aux limites de résolution des procédés. Les architectures sont caractérisées en microscopie, en tomographie X et en perméabilité. Des simulations aérothermiques permettent de mettre en évidence l’effet de ces nouveaux designs sur l’écoulement et les échanges de chaleur, et de proposer des voies d’amélioration de la géométrie.La deuxième approche consiste à élaborer de façon simultanée une pièce architecturée par EBM, avec des zones denses et poreuses. A partir d’analyse d’images associée à une cartographie EBSD grand champ, il est possible de remonter aux mécanismes de formation du matériau poreux et de relier la perméabilité et la porosité aux paramètres procédé. Afin de favoriser le film cooling, il pourrait être avantageux que les zones microporeuses soient orientées dans le sens de l’écoulement. Pour ce faire, un nouveau procédé dénommé Magnetic Freezing, où des poudres métalliques forment une structure orientée par un champ magnétique, est mis au point.Les diverses solutions développées durant cette thèse sont testées sur un banc aérothermique. Les essais montrent qu’elles offrent un refroidissement plus efficace et plus homogène que la référence industrielle. Enfin, de premiers tests en combustion sur l’une des structures retenues, plus légère et plus perméable que la référence, montrent qu’il s’agit d’une solution aussi efficace à un débit traversant donné, et donc a priori plus efficace à une surpression donnée. / Combustion chamber walls are perforated with holes so that a cooling air flow can be injected through them. The wall is cooled by convection and an insulating film is created on the hot surface (film cooling). This PhD thesis aims to use the possibilities of additive manufacturing to provide new architectured solutions that could enhance the internal heat exchanges, and lead to a higher cooling effectiveness.The first approach is to develop new designs of multiperforated walls by Electron Beam Melting (EBM) and Selective Laser Melting (SLM) used at the resolution limits of the processes. They are characterized by microscopy, X-ray tomography and permeability tests. Some aerothermal simulations help understanding the effects of these new designs on the flow and on heat exchanges. These results lead to a geometry adaptation.The second approach is to simultaneously manufacture an architectured part with dense and porous zones by EBM. Thanks to image analysis combined with large field EBSD, it is possible to investigate the mechanisms leading to the porous zones and to link them to permeability and porosity. The film cooling effect could be favoured by the orientation of pores towards the cooling flow. Therefore, a new powder-based manufacturing process named Magnetic Freezing, where metallic powders organize into an oriented structure thanks to a magnetic field, is developed.The various solutions studied during this thesis are tested on an aerothermal bench. They all show a more efficient and homogeneous cooling than the industrial reference. Some first tests on one of the selected solutions are performed on a combustion bench. This lighter and more permeable structure proves to be a solution as efficient as the industrial reference at a given flow rate. It should therefore be a more efficient solution for a given overpressure.

This master thesis deals with the electron beam welding of the AMS 5659 steel used in industry for special hydraulic cylinders (Fig. 1). A theoretical analysis of electron beam welding and analysis of the influence of selected welding parameters on penetration characteristics are in the first part of the thesis. The second part contains an evaluation of the implemented experimental penetrations on samples of the steel in the hardened condition H1025 and after solution heat. It was also done a properties assessment of the same samples that were been hardened again. The light microscopy (SM), the scanning electron microscopy (SEM) and the measurement method of hardness according to Vickers were used for evaluation and comparison of the steel properties in the region of penetration and the heat affected zones properties.

The thesis deals with problems of control and diagnostics of electron beam technological devices which use electron beam for localised intensive heating of a material. A brief description of the electron beam welder MEBW-60/2 is included; the author has participated on its development and implementation. Main topics are the analysis of deflection system properties and the measurement of current distribution of the beam (so-called beam profiles). Geometrical aberrations, hysteresis, stability and dynamics of a single-stage magnetic x-y deflection system are described. Suitable measurement procedures and correction methods are introduced. Methods of transverse and longitudinal beam profile acquisition is presented using successive sampling of the local current density of the beam by a modified Faraday cup. The data processing and evaluation of characteristic beam parameters are shown. The presented methods were verified by fourteen experiments using the electron beam welder. The methods have proven to be useful in practical evaluation of the device properties.

No description available.

This thesis summarizes the results concerning the manufacture of medical implants for bone replacement using electron beam melting (EBM) which is an additive manufacturing (AM) technology, and aims to satisfy the engineering needs for the medical functionality of manufacturing technology. This thesis has focused on some microscopic properties for surfaces and bone integration. The process parameters of EBM manufacturing were studied to ascertain whether they have impacts on surface appearance, as surface properties have impacts on bone integration and implant performance. EBM manufacturing uses an electron beam to melt metal powder onto each layer in a manner akin to welding. The electron beam is controlled by process parameters that may be altered to a certain extent by the operator. There are individual process parameters for every material, and new parameters are set when developing new materials. In this thesis, process parameters in default settings were altered to ascertain whether it was possible to specify process parameters for implant manufacturing. The blood chamber model was used for thromboinflammation validation, using human whole blood. The model is used to identify early reactions of coagulation and immunoreactions. The material used in this study was Ti6Al4V-ELI, which is corrosion resistant and has the same surface oxide layers as titanium, and CoCr-F75, which has high stiffness, is wear-resistant and is commonly used in articulating joints. The study shows that among the process parameters researched, a combination of speed and current have the most impact on surface roughness and an interaction of parameters were found using design of experiment (DOE). As-built EBM surfaces show thrombogenicity, which in previous studies has been associated with bone ingrowth. Surface structure of as-build EBM manufactured surfaces are similar to implants surfaces described by Pilliar (2005), but with superior material properties than those of implants with sintered metals beads. By altering the process parameters controlling the electron beam, surface roughness of as-build parts may be affected, and the rougher EBM manufactured surfaces tend to be more thrombogen than the finer EBM manufactured surfaces. As-build EBM manufactured surfaces in general show more thrombogenicity than conventional machined implants surfaces. / Denna avhandling behandlar tillverkning av medicinska implantat för integration i ben. I fokus är den additiva tillverkningstekniken ”elektronstrålesmältning” ( Electron Beam Melting –EBM), en av flera tekniker som populärt beskrivs med termen 3D-skrivare. Avhandlingen fokuserar på mikroskopiska ytegenskaper och dess inverkan på benintegration. Processparametrarna för EBM-tillverkning studerades för att fastställa hur de påverkar ytans utseende, efter som ytegenskaper har effekt på implantatens funktion. EBM-tillverkning använder en elektronstråle som likt svetsning smälter ihop metallpulver. Elektronstrålen styrs av processparametrar som till viss mån kan justeras av maskinoperatören. Det finns individuella processparametrar för varje material och nya parametrar utvecklas till varje ny legering. I denna avhandling har ”grundinställningarnas processparametrar” studerats för att ta reda på om det är möjligt att ställa in specifika parametrar till implantattillverkning. Med hjälp av blodkammarmetoden, som använder humant blod, har thromboinflammatoriska egenskaper undersökts. Metoden identifierar tidiga koagulations- och immunologiska reaktioner. Legeringarna som undersökts i denna studie var Ti6Al4V-ELI, som är korrosionsbeständigt med samma uppsättning oxider på ytan som titan har, och CoCr-F75, en legering som har hög styvhet, är slitstarkt och är vanligt förekommande i implantat för leder. Bland de undersökta processparametrarna visar en kombination av hastighet och ström ha mest inverkan på ytjämnhet och en interaktion mellan parametrar identifierades med hjälp av försöksplanering. EBM-tillverkade ytor visade på thrombogena egenskaper som i tidigare studier kan relateras till god integration i benvävnad. Ytstrukturen hos EBM-tillverkade ytor liknar de implantatytor som Pilliar (2005) beskriver, men materialegenskaperna är bättre än de materialegenskaper som implantat, med sintrad yta, har. Genom att ändra processparametrarna som styr elektronstrålen kan ytstrukturen påverkas. Grövre EBM-tillverkade ytor tenderar att vara mer thrombogena än de finare EBM-tillverkade ytorna är. Obehandlade EBM-tillverkade ytor i allmänhet är mer thrombogena än vad konventionellt framställda implantatytor är.

Nano-manufacturing is receiving significant attention in industry due to the ever-growing interest in nanotechnology in research institutions. It is hypothesized that single-step or direct-write nano-scale machining might be achieved by coupling nano-probe field emission with radiation transfer. A laser may be used to heat a workpiece within a microscopic region that encloses an even smaller nanoscopic region subjected to a focused electron beam. The electron-beam supplies marginal heat sufficient to remove a minute volume of material by evaporation or sublimation. Experimentally investigating this hypothesis requires an estimate of the power needed in the electron-beam. To this end, a detailed numerical study is conducted to study the possibility of using the nano-probe field emission for nano-machining. The modeling effort in this case is divided into two parts. The first part deals with the electron-beam propagation inside a target workpiece. The second part considers the temperature increase due to the energy transfer between the electron-beam and the workpiece itself. A Monte Carlo/Ray Tracing technique is used in modeling the electron-beam propagation. This approach is identical to that of a typical Monte Carlo simulation in radiative transfer, except that proper electron scattering properties are employed. The temperature distribution inside a gold film is predicted using the heat conduction equations. Details of the various numerical models employed in the simulation and a series of representative results will be presented in this dissertation.

Shrinking the feature size of very large scale integrated circuits (VLSI) with advanced lithography has been a holy grail for the semiconductor industry. However, the gap between manufacturing capability and the expectation of design performance becomes critically challenged in sub-16nm technology nodes. To bridge this gap, design for manufacturing (DFM) is a must to co-optimize both design and lithography process at the same time. DFM for advanced lithography could be defined very differently under different circumstances. In general, progress in advanced lithography happens along three different directions: (1) New patterning technique (e.g., layout decomposition for different patterning techniques); (2) New design methodology (e.g., lithography aware standard cell design and physical design); (3) New illumination system (e.g., layout fracturing for EBL system, stencil planning for EBL system). In this dissertation, we present our research results on design for manufacturing (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL) addressing these three DFM research directions in advanced lithography. For the research direction of new patterning technique, we study the layout decomposition problems for different patterning technique and explore four important topics: (1) layout decomposition for triple patterning; (2) density balanced layout decomposition for triple patterning; (3) layout decomposition for triple patterning with end-cutting; (4) layout decomposition for quadruple patterning and beyond. We present the proof that triple patterning layout decomposition is NP-hard. Besides, we propose a number of CAD optimization and integration techniques to solve different problems. For the research direction of new design methodology, we will show the limitation of traditional design flow. That is, ignoring triple patterning lithography (TPL) in early stages may limit the potential to resolve all the TPL conflicts. We propose a coherent framework, including standard cell compliance and detailed placement, to enable TPL friendly design. Considering TPL constraints during early design stages, such as standard cell compliance, improves the layout decomposability. With the pre-coloring solutions of standard cells, we present a TPL aware detailed placement where the layout decomposition and placement can be resolved simultaneously. In addition, we propose a linear dynamic programming to solve TPL aware detailed placement with maximum displacement, which can achieve good trade-off in terms of runtime and performance. For the EBL illumination system, we focus on two topics to improve the throughput of the whole EBL system: (1) overlapping aware stencil planning under MCC system; (2) L-shape based layout fracturing for mask preparation. With simulations and experiments, we demonstrate the critical role and effectiveness of DFM techniques for the advanced lithography, as the semiconductor industry marches forward in the deeper sub-micron domain. / text