Die vorliegende Arbeit beschreibt die Entwicklung und Charakterisierung eines mikromechanischen kraftgekoppelten Schwingsystems für die resonante Detektion niederfrequenter Schwingungen. Es wird ein neuartiges Prinzip vorgestellt, das es ermöglicht, niederfrequente Vibrationen frequenzselektiv zu erfassen. Mittels Amplitudenmodulation wird das niederfrequente Signal in einen höheren Frequenzbereich umgesetzt. Durch Ausnutzung der mechanischen Resonanzüberhöhung wird aus dem breitbandigen Signal ein schmales Band herausgefiltert, die anderen Frequenzbereiche werden unterdrückt. Auf diese Weise wird direkt die spektrale Information des niederfrequenten Signals gewonnen. Eine Fourier-Transformation ist hierbei nicht notwendig. Die Abstimmung des Sensors erfolgt über eine Wechselspannung und führt dadurch zu einer einfachen Auswertung. Die Schwerpunkte der Arbeit liegen in den theoretischen Untersuchungen zum neuartigen Sensorprinzip, in der Entwicklung einer mikromechanischen Sensorstruktur zum Einsatz des neuen Prinzips sowie in der Entwicklung und Charakterisierung eines Messsystems zur Detektion niederfrequenter mechanischer Schwingungen mit dem neuen Sensor. / This thesis describes the development and characterization of a micromechanical force coupled oscillator system for the resonant detection of low frequency vibrations. It presents a novel working principle that enables spectral measurements of low frequency vibrations. The low frequency spectral content is converted into a higher frequency range by means of amplitude modulation. Due to the mechanical resonance a narrow band is filtered out of the wide band vibration signal. The remaining frequency content is suppressed. Hence, the spectral information is directly obtained with the sensor system without a fast Fourier transform. The tuning is done with an AC voltage resulting in a simple analysis. The main focuses of the work are the theoretical analysis of this novel sensor principle, the development of the micromechanical sensor structure for the use of the novel principle as well as the development and characterization of a measurement system for the spectral detection of low frequency mechanical vibrations with the developed sensor system.

<p>Metamaterials are artificially structured materials which attain their unconventional macroscopic properties from their cellular configuration rather than their constituent chemical composition. The judicious design of this cellular structure opens the possibility to program and control the optical, mechanical, acoustic, or thermal responses of metamaterials. This Ph.D. dissertation focuses on scalable design and manufacturing strategies for optical and mechanical metamaterials.<br> <br> </p> <p>The fabrication of optical metamaterials still relies heavily on low-throughput process such as electron beam lithography, which is a serial technique. Thus, there is a growing need for the development of high-throughput, parallel processes to make the fabrication of optical metamaterials more accessible and cost-effective. The first part of this dissertation presents a scalable manufacturing method, termed “roll-to-roll laser induced superplasticity” (R2RLIS), for the production of flexible optical metamaterials, specifically metallic near-perfect absorbers. R2RLIS enables the rapid and inexpensive fabrication of ultra-smooth metallic nanostructures over large areas using conventional CO₂ engravers or inexpensive diode lasers. Using low-cost metal/epoxy nanomolds, the minimum feature size obtained by R2RLIS was <40 nm, facilitating the rapid fabrication of flexible near-perfect absorbers at visible frequencies with the capability to wrap around non-planar surfaces.</p> <p> </p> <p>The existing approaches for designing mechanical metamaterials are mostly <i>ad hoc</i>, and rely heavily on intuition and trial-and-error. A rational and systematic approach to create functional and programmable mechanical metamaterials is therefore desirable to unlock the vast design space of mechanical properties. The second part of this dissertation introduces a systematic, algorithmic design strategy based on Voronoi tessellation to create architected soft machines (ASMs) and twisting mechanical metamaterials (TMMs) with programmable motion and properties. ASMs are a new class of soft machines that benefit from their 3D-architected structure to expand the range of mechanical properties and behaviors achievable by 3D printed soft robots. On tendon-based actuation, ASMs deform according to the topologically encoded buckling of their structure to produce a wide range of motions such as contraction, twisting, bending, and cyclic motion. TMMs are a new class of chiral mechanical metamaterials which exhibit compression-twist coupling, a property absent in isotropic materials. This property manifests macroscopically and is independent of the flexible material chosen to fabricate the TMM. The nature of this compression-twist coupling can be programmed by simply tuning two design parameters, giving access to distinct twisting regimes and tunable onset of auxetic (negative Poisson’s ratio) behavior. Taking a metamaterial approach toward the design of soft machines substantially increases their number of degrees of freedom in deformation, thus blurring the boundary between materials and machines.</p>

The dissertation thesis is focused on research and development in the field of microfabrication by the technology of electron beam lithography. In the first part of this work, the extensive study is conducted in the field of technology of electron beam lithography in terms of physical principles, writing strategies and resist materials. This is followed with description of physical principles of etching for the transfer of relief structures into substrates. The thesis describes innovative techniques in modelling, simulation, data preparation and optimization of manufacturing technology. It brings new possibilities to record deep binary or multilevel microstructures using electron beam lithography, plasma and reactive ion etching technology. Experience and knowledge in the large area of microlithography, plasma and anisotropic wet-etching of silicon have been capitalized to the design process of manufacturing of nano-patterned membranes. It was followed with practical verification and optimization of the microfabrication process.

<div>Increasing flexibility of light manipulation is vital for various domains including both biomedical and military applications, where a lack of photon control could become critical. The efforts conducted and projected within this proposal are focused on three major areas: semi-continuous planar thin film photomodification for infrared (IR) filtering, nanosphere core-shell structures for obscurance, and all-dielectric sub-wavelength focal lenses for advanced IR sensing.Through a collaborative effort with the Army Research Office, we advanced the tunability of planar plasmonic filters with cutoff wavelengths in the 10–16μm range with photomodification using a 10.6μm CO2laser. Surface-enhanced molecular absorption in concert with three-dimensional (3D) Au nano-structures with inherent broad absorption in the IR band was a novel approach utilized to create such planar filters.Expanding on these, efforts and the results of the 2-dimensional (2D) semicontinuous Au plasmonic planar filtering, we further advanced our research with 3D Au nano-coreshell structures to enable levitated long-wavelength pass filter obscurants. We exploited the radiative effects of Au nano-structures that mimic conventional apertures or antennas, though these structures are on the nanometer scale and demonstrated the filtering characteristics through flow cell.In parallel with our plasmonic filtering we designed, manufactured and tested low loss dielectric microlenses for IR radiation based on a dielectric metasurface layer by patterning a SI substrate and etching to sub-micron depths. For a proof-of-concept lens demonstration,we chose a fine patterned array of nano-pillars with variable diameters.Merging our plasmonic filtering and dielectric microlens efforts, we created a holographic lenslet by designing and simulating a low loss focusing metasurface lens with engineered nano-scaled features to converge off-axis IR radiation. An array of nano-pillars with varied diameter and fixed height and periodicity was chosen for ease of fabrication with single layer etching</div>

Die vorliegende Arbeit beschreibt die Entwicklung und Charakterisierung eines mikromechanischen kraftgekoppelten Schwingsystems für die resonante Detektion niederfrequenter Schwingungen. Es wird ein neuartiges Prinzip vorgestellt, das es ermöglicht, niederfrequente Vibrationen frequenzselektiv zu erfassen. Mittels Amplitudenmodulation wird das niederfrequente Signal in einen höheren Frequenzbereich umgesetzt. Durch Ausnutzung der mechanischen Resonanzüberhöhung wird aus dem breitbandigen Signal ein schmales Band herausgefiltert, die anderen Frequenzbereiche werden unterdrückt. Auf diese Weise wird direkt die spektrale Information des niederfrequenten Signals gewonnen. Eine Fourier-Transformation ist hierbei nicht notwendig. Die Abstimmung des Sensors erfolgt über eine Wechselspannung und führt dadurch zu einer einfachen Auswertung. Die Schwerpunkte der Arbeit liegen in den theoretischen Untersuchungen zum neuartigen Sensorprinzip, in der Entwicklung einer mikromechanischen Sensorstruktur zum Einsatz des neuen Prinzips sowie in der Entwicklung und Charakterisierung eines Messsystems zur Detektion niederfrequenter mechanischer Schwingungen mit dem neuen Sensor. / This thesis describes the development and characterization of a micromechanical force coupled oscillator system for the resonant detection of low frequency vibrations. It presents a novel working principle that enables spectral measurements of low frequency vibrations. The low frequency spectral content is converted into a higher frequency range by means of amplitude modulation. Due to the mechanical resonance a narrow band is filtered out of the wide band vibration signal. The remaining frequency content is suppressed. Hence, the spectral information is directly obtained with the sensor system without a fast Fourier transform. The tuning is done with an AC voltage resulting in a simple analysis. The main focuses of the work are the theoretical analysis of this novel sensor principle, the development of the micromechanical sensor structure for the use of the novel principle as well as the development and characterization of a measurement system for the spectral detection of low frequency mechanical vibrations with the developed sensor system.

Indiana University-Purdue University Indianapolis (IUPUI) / This thesis presents a converter topology for photovoltaic panels. This topology minimizes the number of switching devices used, thereby reducing power losses that arise from high frequency switching operations. The control strategy is implemented using a simple micro-controller that implements the proportional plus integral control. All the control loops are closed feedback loops hence minimizing error instantaneously and adjusting efficiently to system variations. The energy management between three components, namely, the photovoltaic panel, a battery and a DC link for a microgrid, is shown distributed over three modes. These modes are dependent on the irradiance from the sunlight. All three modes are simulated. The maximum power point tracking of the system plays a crucial role in this configuration, as it is one of the main challenges tackled by the control system. Various methods of MPPT are discussed, and the Perturb and Observe method is employed and is described in detail. Experimental results are shown for the maximum power point tracking of this system with a scaled down version of the panel's actual capability.