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111	Nanolithography on thin films using heated atomic force microscope cantilevers Saxena, Shubham 01 November 2006 (has links) Nanotechnology is expected to play a major role in many technology areas including electronics, materials, and defense. One of the most popular tools for nanoscale surface analysis is the atomic force microscope (AFM). AFM can be used for surface manipulation along with surface imaging. The primary motivation for this research is to demonstrate AFM-based lithography on thin films using cantilevers with integrated heaters. These thermal cantilevers can control the temperature at the end of the tip, and hence they can be used for local in-situ thermal analysis. This research directly addresses applications like nanoscale electrical circuit fabrication/repair and thermal analysis of thin-films. In this study, an investigation was performed on two thin-film materials. One of them is co-polycarbonate, a variant of a polymer named polycarbonate, and the other is an energetic material called pentaerythritol tetranitrate (PETN). Experimental methods involved in the lithography process are discussed, and the results of lithographic experiments performed on co-polycarbonate and PETN are reported. Effects of dominant parameters during lithography experiments like time, temperature, and force are investigated. Results of simulation of the interface temperature between thermal cantilever tip and thin film surface, at the beginning of the lithography process, are also reported. Characterization Deflection Setpoint Grain rearrangement Array Precise positioning Metrology Explosion Explosives Data storage Material Image processing Slow scan disabled Temperature Tip Local In-situ Nanoscale Electrical circuit fabrication Repair Co-polycarbonate Polymers Polycarbonates Energetic materials PETN Simulation Interface Nano-manufacturing Experiment Calibration Raman Frequency Deflagration Decomposition Detonation Build up Pile-up End capped End capping Cross linked Cross-linked Conductivity Microscale MEMS Microcantilever NEMS DPN tDPN Silicon Glass Peak InVOLS Manipulation AFM Atomic force microscope Defense Nanoscale Surface Stiffness Force Scan size Thermal cantilevers Imaging Lithography Nanolithography Thin films Cantilevers Heaters Technology Nanotechnology Scan velocity Scan rate Bake Anneal Pentaerythritol tetranitrate Thin films Thermal properties Atomic force microscopy Microlithography Nanotechnology Surfaces (Technology) Analysis
112	Cantilever properties and noise figures in high-resolution non-contact atomic force microscopy Lübbe, Jannis Ralph Ulrich 03 April 2013 (has links) Different methods for the determination of cantilever properties in non-contact atomic force microscopy (NC-AFM) are under investigation. A key aspect is the determination of the cantilever stiffness being essential for a quantitative NC-AFM data analysis including the extraction of the tip-surface interaction force and potential. Furthermore, a systematic analysis of the displacement noise in the cantilever oscillation detection is performed with a special focus on the thermally excited cantilever oscillation. The propagation from displacement noise to frequency shift noise is studied under consideration of the frequency response of the PLL demodulator. The effective Q-factor of cantilevers depends on the internal damping of the cantilever as well as external influences like the ambient pressure and the quality of the cantilever fixation. While the Q-factor has a strong dependence on the ambient pressure between vacuum and ambient pressure yielding a decrease by several orders of magnitude, the pressure dependence of the resonance frequency is smaller than 1% for the same pressure range. On the other hand, the resonance frequency highly depends on the mass of the tip at the end of the cantilever making its reliable prediction from known cantilever dimensions difficult. The cantilever stiffness is determined with a high-precision static measurement method and compared to dimensional and dynamic methods. Dimensional methods suffer from the uncertainty of the measured cantilever dimensions and require a precise knowledge its material properties. A dynamic method utilising the measurement of the thermally excited cantilever displacement noise to obtain cantilever properties allows to characterise unknown cantilevers but requires an elaborative measurement equipment for spectral displacement noise analysis. Having the noise propagation in the NC-AFM system fully characterised, a proposed method allows for spring constant determination from the frequency shift noise at the output of the PLL demodulator with equipment already being available in most NC-AFM setups. non-contact atomic force microscopy NC-AFM cantilever eigenfrequency resonance frequency spring constant stiffness Q-factor quality factor thermal excitation noise mounting loss tip mass ambient pressure feedback loop filter noncontact atomic force microscopy spectral analysis PLL FM-AFM 07.79.Lh - Atomic force microscopes 68.37.Ps - Atomic force microscopy (AFM) 46.70.De - Beams, plates and shells 62.20.Dc - Elasticity, elastic constants ddc:530

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Nanolithography on thin films using heated atomic force microscope cantilevers

Cantilever properties and noise figures in high-resolution non-contact atomic force microscopy