Sensors is one of the major areas of current research. Thin film micro/nano sensors are gaining attention worldwide, as there is necessity of miniaturization. There are varieties of sensors available by utilizing different materials in bulk and thin film form for measuring parameters like temperature, pressure, flow, humidity etc. Apart from these, there are various sensors available to measure impact force. Impact sensor offers potential application possibilities in robotics, aerospace, structural & mechanical engineering and related areas. Many physical principles have been explored for the realization of impact sensor. The present thesis reports the efforts made in developing impact sensor using piezoelectric thin film. The necessary brief background information on impact sensors is presented in Chapter 1. This includes the description of available literature on impact sensors and their probable applications. In Chapter 2, a review of the various techniques such as thin film deposition techniques, film thickness measurement techniques, thin film characterization techniques, used in our work are explained in detail. Chapter 3 explains the direct and indirect methods of characterization used for confirming the piezoelectric property of zinc oxide thin films. The detailed experimental work carried out in realizing the impact sensor using piezoelectric thin films is presented in chapter 4. This includes design of the sensor, calibration setup used & the procedure followed and results obtained. Finally, we present the summary of the work carried out in the thesis, conclusions arrived at and the scope for carrying out further work in the direction of making the sensor more efficient.

Amorphous oxide semiconductors (AOSs) are of great current interest for thin-film transistor (TFT) channel layer applications. In particular, indium gallium zinc oxide (IGZO) is under intense development for commercial applications because of its demonstrated high performance at low processing temperatures. The objective of the research presented in this thesis is to provide detailed assessments of device stability, temperature dependence, and related phenomena for IGZO-based TFTs processed at temperatures between 200 °C and 300 °C. TFTs tested exhibit an almost rigid shift in log₁₀(I[subscript D]) – V[subscript GS] transfer curves in which the turn-on voltage, V[subscript ON], moves to a more positive gate voltage with increasing stress time during constant-voltage bias-stress testing of IGZO TFTs. TFT stability is improved as the post-deposition annealing temperature increases over the temperature range of 200 – 300 ºC. The turn-on voltage shift induced by constant-voltage bias-stressing is at least partially reversible; V[subscript ON] tends to recover towards its initial value of V[subscript ON] if the TFT is left unbiased in the dark for a prolonged period of time and better recovery is observed for a longer recovery period. V[subscript ON] for a TFT can be set equal to zero after bias-stress testing if the TFT electrodes are grounded and the TFT is maintained in the dark for a prolonged period of time. Attempts to accelerate the recovery process by application of a negative gate bias at elevated temperature (i.e., 100 ºC) were unsuccessful, resulting in severely degraded subthreshold swing. An almost rigid log₁₀(I[subscript D]) – V[subscript GS] transfer curve shift to a lower (more negative) V[subscript ON] with increasing temperature is observed in the range of –50 °C to +50 °C, except for a TFT with an initial V[subscript ON] equal to zero, in which case the log₁₀(ID) – V[subscript GS] transfer curve is temperature-independent. A more detailed temperature-dependence assessment, however, indicates that the log₁₀(I[subscript D]) – V[subscript GS] transfer curve shift is not exactly rigid since the mobility is found to increase slightly with increasing temperature. A noticeable anomaly is observed in certain log₁₀(I[subscript D]) – VGS transfer curves, especially when obtained at elevated temperature (e.g., 30 and 50 ºC), in which I[subscript D] decreases precipitously near zero volts in the positive gate voltage sweep. This anomaly is attributed to a gate-voltage-step-involved detrapping and subsequent retrapping of electrons in the accumulation channel and/or channel/gate insulator interface. In fact, all IGZO TFT stability and temperature-dependence trends are attributed to channel interface and/or channel bulk trapping/detrapping. / Graduation date: 2009

The research work presented in this thesis reports for the first time the fabrication of Titanium Niobium complex oxide (TiNb2O7 (TNO)) thin films by employing pulsed laser deposition and their use as the anode material in Li-ion micro batteries. Chapter 1 provides a brief introduction to complex metal oxides as multifunctional materials. In the first section of this chapter, a brief introduction is given about the history of TNO complex oxide material. The complex structure and properties of TNO oxide are also discussed briefly. In the second section, the importance and need of thin film batteries in emerging applications is discussed. Finally, the specific objectives of the current research are outlined in the last section. Chapter 2 gives the details about various experimental methods and characterization tools used in this research. The first part gives a brief overview about the principles and the use of different experimental methods involved in the growth of TNO thin films using pulsed laser deposition. Details, including the laboratory setup designed for PLD growth, also described briefly. In the second part, the different state-of-the-art characterization tools used in this research are described in terms of their principles and their applications such as measuring structural, morphological, chemical and electrochemical properties. Chapter 3 describes the synthesis and characterization of TNO bulk targets prepared via solid state reaction. In the first part, the detailed descriptions of experimental conditions are given. In the second part, the study of as-prepared TNO targets by various characterization tools such as XRD, Raman, SEM and XPS for understanding its structure, morphology and chemical properties are discussed briefly. The emphasis is made on the preparation of a quality target by careful observations. Chapter 4 mainly describes the comprehensive studies carried out on the fabrication and characterization of TNO thin films using PLD. In the first part, the preliminary experimental conditions for the growth of TNO thin films on Pt (200)/TiO2/SiO2/ Si (100) substrates are explained briefly. The importance of primary understanding about target-laser interaction through the structural, morphology changes observed by various characterization tools is discussed. In the latter part of the chapter, the effects of systematic variation of deposition parameters on the properties of the grown TNO thin films are described extensively. Various advanced characterization tools are used to study the changes in as-grown TNO thin films in terms of their structural, morphological and chemical changes by various advanced characterization tools. Chapter 5 is an account of the state-of-the-art characterization tools that are used on the as-grown TNO thin films for determining structural, compositional and elemental information with nanometer spatial resolution. In the first part, the effects of various processing conditions used during FIB are discussed briefly, along with observed results. An attempt has been made to solve the experimental difficulties during FIB for cross sectional sample preparation for HRTEM analysis. Later, the imaging, diffraction and spectroscopic studies carried out on TNO thin films using HRTEM, STEM HAADF, and EDXS elemental mapping are discussed in detail. Finally, obtained results are correlated to the experimental conditions during PLD growth. Chapter 6 focuses on the usage of as-grown TNO thin films as a new anode material in rechargeable Li-ion micro batteries. The various experimental details, battery cell fabrication, etc are described in the first part of the chapter. Then the comprehensive studies are carried out for demonstrating TNO thin films as anode material in micro batteries. Besides this, the basic cyclic voltammogram and charge-discharge tests carried out on a TNO electrode are discussed in detail. The structural, morphological studies are done before and after the electrochemical cell reaction to understand the crystal stability of TNO as an anode electrode. The effects of important experimental parameters on their electrochemical properties are also described briefly. Finally, the observed results are compared with existing literature. Chapter 7 summarizes the present research reported in this thesis and discusses the future research that could give insight into the understanding and optimization of TNO thin films for better usage in battery applications.

Die vorliegende Arbeit beschreibt den Verlauf der Forschung von der Entwicklung einer neuartigen Methode der gepulsten Laser-Plasmaabscheidung (PLD) über die Untersuchung der ternären In- und Al-Legierungssysteme von metastabilem orthorhombischen κ-Ga2O3 auf der Basis dieser Methode hin zu Multi-Quantengraben (QW) Supergitter (SL) Heterostrukturen für transparente Quantengrabeninfrarotphotodetektoren (QWIPs). Im ersten Teil wird die Methode, welche vertical continuous composition spread (VCCS) PLD genannt wird, eingeführt und am MgxZn1−xO Legierungssystem erprobt. Die Methode erlaubt die Kontrolle der Komposition von Dünnfilmen über die radiale Position des PLD Laserspots auf der Targetoberfläche. Das ist eine wichtige Voraussetzung für die Bestimmung der kompositionsabhängigen Eigenschaften der Legierungssysteme und für präzise Profile der physikalischen Eigenschaften in Wachstumsrichtung für das Design von Bauelementen. Die Dünnfilme mit 0 ≤ x ≤ 0.4 zeigen die gleichen Eigenschaften wie solche, die mit Standard-PLD abgeschieden wurden. Numerische Modelle werden präsentiert, welche die Dünnfilmkomposition exakt vorhersagen. Im zweiten Teil werden κ-Ga2O3 Dünnfilme durch die Beigabe von Zinn während des PLD Prozesses stabilisiert. Die Dünnfilme weisen hohe kristalline Qualität, glatte Oberflächen und große Bandlücken (Eg ≈ 4.9 eV) auf. Ein Wachstumsmodell wird präsentiert, welches Zinn als Oberflächenschicht beschreibt. Im dritten Teil werden die In- und Al-Legierungssysteme von κ-Ga2O3 mittels VCCS PLD untersucht. Die Löslichkeitsgrenzen xIn <~ 0.35 und xAl <~ 0.65 sind die höchsten bislang berichteten. In- und out-of-plane Gitterkonstanten wurden in Abhängigkeit der Zusammensetzung bestimmt und Eg konnte von 4.1 eV bis 6.4 eV variiert werden. Die Position des Valenzbandmaximums wird als unabhängig von der Komposition gezeigt, womit die Variation in Eg den Leitungsbandunterschieden gleicht und Detektionsbereiche vom fernen IR bis in das Sichtbare für QWIP-Anwendungen bedeutet. Berechnungen anhand dieser Ergebnisse ergeben Polarisationsladungsdichten an Grenzflächen von Heterostrukturen gleich oder höher derer im etablierten AlGaN/GaN System, welche wichtig zur Polarisationsdotierung zur Besetzung des Grundzustandes in QWIPs sind. Dies bestätigt das große Potential der κ-Phase. Im letzten Teil werden erste kohärent gewachsene κ-(AlxGa1−x)2O3/Ga2O3 SL Strukturen untersucht. Glatte Grenzflächen im Bereich weniger Monolagen werden gezeigt und es konnten kritische Dicken für die κ-Ga2O3 QW Schichten bestimmt werden, die für QWIP-Anwendungen genügen. / The presented thesis describes the research path from the development of a novel pulsed laser deposition (PLD) technique over the exploration of the ternary In- and Al-alloy systems of metastable orthorhombic κ-Ga2O3 employing this technique towards multi-quantum well (QW) superlattice (SL) heterostructures for solar-blind quantum well infrared photodetector (QWIP) applications. In the first part, the PLD technique called vertical continuous composition spread (VCCS) PLD employing radially-segmented targets is established and tested on the well-known MgxZn1−xO alloy system. The technique enables direct control of the chemical composition of thin films by a variation of the radial position of the PLD laser spot on the target surface. This is a prerequisite for a discrete compositional screening of alloy properties and the exact tailoring of physical parameters in growth direction for heterostructure device design. The resulting thin films with 0 ≤ x ≤ 0.4 exhibit the same quality as thin films deposited by standard PLD and numerical models are presented that precisely predict the thin film composition. In the second part, κ-Ga2O3 thin films are stabilized by the addition of tin in the PLD process. The thin films show a high crystalline quality, smooth surfaces and large bandgaps (Eg ≈ 4.9 eV). A growth model is proposed based on tin acting as surfactant. In the third part, the In- and Al-alloy systems of κ-Ga2O3 are explored by VCCS PLD. Solubility limits of xIn <~ 0.35 and xAl <~ 0.65 are the highest reported to date. In- and out-of-plane lattice constants were determined as function of alloy composition and bandgap engineering from 4.1 eV to 6.4 eV is feasible within these limits. The energetic position of the valence band maximum was found independent on chemical composition such that the change in bandgap equals the conduction band offset rendering wavelength ranges from far IR to the visible spectral range in QWIP applications possible. Calculations based on these results found polarization charge densities at the interfaces of corresponding heterostructures on par or larger than for the established AlGaN/GaN system important for polarization doping to populate the ground state in QWIPs. This corroborates the high potential of the κ-phase. In the last part, first coherently grown κ-(AlxGa1−x)2O3/Ga2O3 SL heterostructures are presented. Smooth interfaces of the order of a few monolayers are confirmed and critical thicknesses for coherent growth of the Ga2O3 QW layer are found to be sufficient for QWIP applications.

Cette thèse s’inscrit dans le cadre d’une cotutelle internationale entre l’Université de Bourgogne Franche-Comté en France et l’Université de Sherbrooke au Canada. Elle porte sur le développement d'un biocapteur miniature pour la détection et la quantification de bactéries dans des milieux liquides complexes. La bactérie visée est l’Escherichia coli (E. coli), régulièrement mise en cause dans des épidémies d'infections alimentaires, et parfois meurtrière.La géométrie du biocapteur consiste en une membrane en arséniure de gallium (GaAs) sur laquelle est déposé un film mince piézoélectrique d’oxyde de zinc (ZnO). L'apport du ZnO structuré en couche mince constitue un réel atout pour atteindre de meilleures performances du transducteur piézoélectrique et consécutivement une meilleure sensibilité de détection. Une paire d'électrodes déposée sur le film de ZnO permet de générer sous une tension sinusoïdale une onde acoustique se propageant dans le GaAs, à une fréquence donnée. La face arrière de la membrane, quant à elle, est fonctionnalisée avec une monocouche auto-assemblée (SAM) d'alkanethiols et des anticorps anti-E. coli, conférant la spécificité de la détection. Ainsi, le biocapteur bénéficie à la fois des technologies de microfabrication et de bio-fonctionnalisation du GaAs, déjà validées au sein de l’équipe de recherche, et des propriétés piézoélectriques prometteuses du ZnO, afin d’atteindre potentiellement une détection hautement sensible et spécifique de la bactérie d’intérêt. Le défi consiste à pouvoir détecter et quantifier cette bactérie à de très faibles concentrations dans un échantillon liquide et/ou biologique complexe.Les travaux de recherche ont en partie porté sur les dépôts et caractérisations de couches minces piézoélectriques de ZnO sur des substrats de GaAs. L’effet de l’orientation cristalline du GaAs ainsi que l’utilisation d’une couche intermédiaire de Platine entre le ZnO et le GaAs ont été étudiés par différentes techniques de caractérisation structurale (diffraction des rayons X, spectroscopie Raman, spectrométrie de masse à ionisation secondaire), topographique (microscopie à force atomique), optique (ellipsométrie) et électrique. Après la réalisation des contacts électriques, la membrane en GaAs a été usinée par gravure humide. Une fois fabriqué, le transducteur a été testé en air et en milieu liquide par des mesures électriques, afin de déterminer les fréquences de résonance pour les modes de cisaillement d’épaisseur. Un protocole de bio-fonctionnalisation de surface, validé au sein du laboratoire, a été appliqué à la face arrière du biocapteur pour l’ancrage des SAMs et des anticorps, tout en protégeant la face avant. De plus, les conditions de greffage d’anticorps en termes de concentration utilisée, pH et durée d’incubation, ont été étudiées, afin d’optimiser la capture de bactérie. Par ailleurs, l’impact du pH et de la conductivité de l’échantillon à tester sur la réponse du biocapteur a été déterminé. Les performances du biocapteur ont été évaluées par des tests de détection de la bactérie cible, E. coli, tout en corrélant les mesures électriques avec celles de fluorescence. Des tests de détection ont été réalisés en variant la concentration d’E. coli dans des milieux de complexité croissante. Différents types de contrôles ont été réalisés pour valider les critères de spécificité. En raison de sa petite taille, de son faible coût de fabrication et de sa réponse rapide, le biocapteur proposé pourrait être potentiellement utilisé dans les laboratoires de diagnostic clinique pour la détection d’E. coli. / This thesis was conducted in the frame of an international collaboration between Université de Bourgogne Franche-Comté in France and Université de Sherbrooke in Canada. It addresses the development of a miniaturized biosensor for the detection and quantification of bacteria in complex liquid media. The targeted bacteria is Escherichia coli (E. coli), regularly implicated in outbreaks of foodborne infections, and sometimes fatal.The adopted geometry of the biosensor consists of a gallium arsenide (GaAs) membrane with a thin layer of piezoelectric zinc oxide (ZnO) on its front side. The contribution of ZnO structured in a thin film is a real asset to achieve better performances of the piezoelectric transducer and consecutively a better sensitivity of detection. A pair of electrodes deposited on the ZnO film allows the generation of an acoustic wave propagating in GaAs under a sinusoidal voltage, at a given frequency. The backside of the membrane is functionalized with a self-assembled monolayer (SAM) of alkanethiols and antibodies anti-E. coli, providing the specificity of detection. Thus, the biosensor benefits from the microfabrication and bio-functionalization technologies of GaAs, validated within the research team, and the promising piezoelectric properties of ZnO, to potentially achieve a highly sensitive and specific detection of the bacteria of interest. The challenge is to be able to detect and quantify these bacteria at very low concentrations in a complex liquid and/or biological sample.The research work partly focused on the deposition and characterization of piezoelectric ZnO thin films on GaAs substrates. The effect of the crystalline orientation of GaAs and the use of a titanium / platinum buffer layer between ZnO and GaAs were studied using different structural (X-ray diffraction, Raman spectroscopy, secondary ionization mass spectrometry), topographic (atomic force microscopy), optical (ellipsometry) and electrical characterizations. After the realization of the electrical contacts on top of the ZnO film, the GaAs membrane was micromachined using chemical wet etching. Once fabricated, the transducer was tested in air and liquid medium by electrical measurements, in order to determine the resonance frequencies for thickness shear mode. A protocol for surface bio-functionalization, validated in the laboratory, was applied to the back of the biosensor for anchoring SAMs and antibodies, while protecting the top side. Furthermore, different conditions of antibody grafting such as the concentration, pH and incubation time, were tested to optimize the immunocapture of bacteria. In addition, the impact of the pH and the conductivity of the solution to be tested on the response of the biosensor has been determined. The performances of the biosensor were evaluated by detection tests of the targeted bacteria, E. coli, while correlating electrical measurements with fluorescence microscopy. Detection tests were completed by varying the concentration of E. coli in environments of increasing complexity. Various types of controls were performed to validate the specificity criteria. Thanks to its small size, low cost of fabrication and rapid response, the proposed biosensor has the potential of being applied in clinical diagnostic laboratories for the detection of E. coli.

Ferroelectricity in hafnium oxide thin films is known to be induced by various doping elements and in solid-solution with zirconia. While a wealth of studies is focused on their basic ferroelectric properties and memory applications, thorough studies of the related pyroelectric properties and their application potential are only rarely found. This work investigates the impact of Si doping on the phase composition and ferro- as well as pyroelectric properties of thin film capacitors. Dynamic hysteresis measurements and the field-free Sharp-Garn method were used to correlate the reported orthorhombic phase fractions with the remanent polarization and pyroelectric coefficient. Maximum values of 8.21 µC cm−2 and −46.2 µC K−1 m−2 for remanent polarization and pyroelectric coefficient were found for a Si content of 2.0 at%, respectively. Moreover, temperature-dependent measurements reveal nearly constant values for the pyroelectric coefficient and remanent polarization over the temperature range of 0 °C to 170 °C, which make the material a promising candidate for IR sensor and energy conversion applications beyond the commonly discussed use in memory applications.

This thesis focuses on employing a new patterning technique called block copolymer lithography to transfer the nano-porous pattern from the polymer template to the underlying oxide thin film. Nano-porous block copolymer films are produced by spin-coating polymer solution on wafers followed by annealing, UV exposure and development processes. Reactive-ion etching is then used to etch the oxide films based on the pattern of polymer template and the polymer is then removed. The obtained oxide microstructure is characterized by SEM, showing a nanomesh of microdomains with the same hole size and density as the initial block copolymer layer. The advantages of block copolymer lithography include uniform nanopatterning, cost efficiency and simple processing. The nano-porous oxide thin films could be used as hard mask for nanopatterning in microelectronics and for energy storage applications. / Denna avhandling fokuserar på användningen av en ny mönstringsteknik som kallas block-sampolymerlitografi som används för att överföra nano-porösa mönster från polymermaller till en underliggande oxidtunnfilm. Nano-porösa blocksampolymerfilmer framställs genom spinbeläggningspolymerlösning på skivor följt av glödgning, UV-exponering och utvecklingsprocesser. Reaktionjon etsning används sedan för att etsa oxidfilmerna baserat på mönstret av polymermaller och därefter blir polymeren avlägsnad. Den erhållna oxidmikrostrukturen karakteriseras av SEM, som visar en nanomesh av mikrodomäner med samma hålstorlek och densitet som det ursprungliga blocksampolymerskiktet. Fördelarna med block-sampolymerlitografi innefattar likformig nanomönstring, kostnadseffektivitet och enkel bearbetning. De nanoporösa oxidtunnfilmerna kan användas som en hard mask för nanomönstring i mikroelektronik och för energilagringsapplikationer.

<p dir="ltr">Thin film materials are used in many areas of our daily lives. From memory storage chips to optical coatings, these thin films are essential to the technologies on which we rely. Multiferroic thin films, a group of materials that simultaneously exhibit ferromagnetism and ferroelectricity, are of particular interest because of the new opportunities that they enable in memory storage and sensors. Bismuth-based oxide materials have proven to be excellent candidates for these applications, with multiferroic properties and anisotropic structures. This novel self-assembled structure found in layered supercell systems has applications in optical devices, such as isolators and beamsplitters. Throughout this study, thin film strain and epitaxy must be tended to as the fundamentals of film growth, adding to the complexity of these challenges.</p><p dir="ltr">In this dissertation, bismuth-based oxides, and more specifically the Bi₃Fe₂Mn₂O_x (BFMO) layered supercell phase, are studied from three perspectives. First, BFMO is integrated onto silicon substrates for commercialization using a complex buffer layer stack to mediate the differences in the crystal lattice. This allows for a demonstration of device fabrication with this film. Second, the growth and impact of strain are examined through geometric phase analysis, discovering that strain is essential for the growth of the supercell phase in BFMO. This strain can be tuned through buffer layer addition to optimize the growth of this phase. Third, two methods are demonstrated to free the BFMO material from the typical film-substrate lattice matching requirements. The process of transferring the film from the original substrate onto a different substrate removes these restrictions, allowing virtually unlimited access to applications that were previously not possible. The two methods demonstrate different solutions to the specific challenges of transferring the highly strained BFMO thin film. These findings pave a practical way to integrate multiferroic layered oxide thin films onto chips for the next generation of devices.</p>

Man’s desire to replicate/mimic the nature’s creation provided an impetus and inspiration to the rapid advancements and progress made in the sensors and actuators technology. A normal human being has five basic sensory organs, which helps and guides him in performing the routine tasks. This underlines the importance of basic sensory organs in a human life. In a similar fashion, sensors and actuators are of paramount importance for most of the science and engineering applications. The aim of the present thesis work is to explore the application of piezoelectric ZnO thin films deposited on a flexible substrate for the development of sensors and actuators. Detailed study was performed on the suitability of three different flexible substrates namely Phynox, Kapton and Mylar. However, Phynox alloy substrate was found to be a suitable substrate material for the above mentioned applications. Sputtering technique was chosen for the deposition of ZnO thin films on to Phynox substrate. The necessary process parameters were optimized to achieve good quality piezoelectric thin films. In the present work, sensors have been developed by utilizing the direct piezoelectric effect of ZnO thin films deposited on Phynox alloy substrate. These includes a flow sensor for gas flow rate measurement, impact sensor for non-destructive material discrimination study and a Thin Film Sensor Array (TFSA) for monitoring the impact events. On the other hand, using the converse piezoelectric effect of ZnO thin films, actuators have also been developed. These include a thin film micro actuator and a Thin Film Micro Vibrator (TFMV) for vibration testing of micro devices. The thesis is divided into following seven chapters. Chapter 1: This chapter gives a general introduction about sensors and actuators, piezoelectric thin films, flexible substrates, thin film deposition processes and characterization techniques. A brief literature survey of different applications of piezoelectric thin films deposited on various flexible substrates in device development is presented. Chapter 2: A novel flexible metal alloy (Phynox) and its properties along with its applications are discussed in this chapter. ZnO thin films were deposited on Phynox substrate by Rf reactive magnetron sputtering technique. The sputtering process parameters such as: Ar:O2 gas ratio, substrate temperature and RF power were optimized for the deposition of good quality piezoelectric ZnO thin films. The deposited ZnO thin films were characterized using XRD, SEM, AFM and d31 coefficient measurement techniques. Chapter 3: It reports on the comparative study of properties of piezoelectric ZnO thin films deposited on three different types of flexible substrates. The substrate materials employed were a metal alloy (Phynox), polyimide (Kapton), and polyester (Mylar). Piezoelectric ZnO thin films deposited on these flexible substrates were characterized by XRD, SEM, AFM and d31 coefficient measurement techniques. A vibration sensing test was also performed for the confirmation of good piezoelectric property. Compared to the polymer flexible substrates, the metal alloy flexible substrate (Phynox) was found to be more suitable for integrating ZnO thin film for sensing applications. Chapter 4: The development of a novel gas flow sensor for the flow rate measurement in the range of L min-1 is presented in this chapter. The sensing element is a Phynox alloy cantilever integrated with piezoelectric ZnO thin film. A detailed theoretical analysis of the experimental set–up showing the relationship between output voltage generated and force at a particular flow rate has been discussed. The flow sensor is calibrated using an in-house developed testing set-up. Chapter 5: This chapter is divided into two sections. Section 5.1 reports on the development of a novel packaged piezoelectric thin film impact sensor and its application in non-destructive material discrimination studies. Different materials (Iron, Glass, Wood and Plastic) were successfully discriminated by using the developed impact sensor. The output response of impact sensor showed good linearity and repeatability. The impact sensor is sensitive, reliable and cost-effective. Section 5.2 reports on the development of a Thin Film Senor Array (TFSA) for monitoring the location and magnitude of the impact force. The fabricated TFSA consists of evenly distributed ZnO thin film sensor array. Chapter 6: It consists of two sections. Section 6.1 reports on the fabrication of micro actuator using piezoelectric ZnO thin film integrated with flexible Phynox substrate. A suitable concave Perspex mounting was designed for the actuator element. The actuator element was excited at different frequencies for the supply voltages of 2V, 5V and 8V. The developed micro actuator has the potential to be used as a micro pump for pumping nano liters to micro liters of fluids. Section 6.2 reports the design and development of a portable ready to use Thin Film Micro Vibrator (TFMV). The TFMV is capable of providing the vibration amplitude in the range of nanometer to micrometer. A thin silicon diaphragm was used as a test specimen for its vibration testing studies using the developed TFMV. The TFMV is light-weight and have internal battery, hence no external power supply is required for its functioning. Chapter 7: The first section summarizes the salient features of the work presented in this thesis. In the second section the scope for carrying out the further work is given.

Afin de développer de nouvelles applications aux couches minces d’oxydes fonctionnels, il est nécessaire de comprendre les corrélations entre leurs modes de croissance, leur microstructure, leur structure à l’interface avec le substrat, et leurs contraintes et propriétés physiques. Pour cela, une étude par spectroscopie infrarouge et THz des systèmes modèles films/substrats a été exécutée, et confrontée à des calculs théoriques, en particulier sur des couches épitaxiales de SrTiO3/Si(001), VO2/Gd2O3/Si(111) et des couches d’alumine sur alliage d’aluminium. Les caractéristiques vibrationnelles des couches minces sont ici étudiées dans l’infrarouge moyen et lointain sur la ligne AILES du Synchrotron SOLEIL, et simulées à l’aide de la Théorie de la Fonctionnelle de la Densité (DFT), permettant ainsi la première détermination de la structure cristalline de ces couches. Ainsi, une comparaison entre la structure bidimensionnelle et tridimensionnelle des matériaux est effectuée. L’effet des contraintes dans les couches est évalué grâce aux variations des énergies de vibration par rapport au matériau massif. L’influence des conditions expérimentales de l’épitaxie dans la structure locale interatomique de couches minces de SrTiO3/Si(001) est évaluée. D’autre part, la nature de l’interface STO-Si peut être caractérisée par les modes de vibration du réseau cristallin. Enfin, la transition métal-isolant (MIT) des couches minces de VO2 sur des substrats de Gd2O3/Si(111) est étudié par spectroscopie IR ; les variations de propriétés optiques et diélectriques pendant la transition, ainsi que les changements d’intensité des modes de vibration, indiquent que la transition est entraînée par une corrélation électronique et une basse température. La phase monoclinique M1 de VO2 est un isolant de Mott. Ce résultat peut aider à un meilleur contrôle des MIT de couches minces de VO2 pour de futures applications. / In order to understand the relations between growth, microstructure, interface structure, strain, and physical properties in functional oxide thin films for further applications, a study of infrared and THz spectroscopy combined with theoretical calculation has been performed on the films/substrates model systems, in particular epitaxial SrTiO3/Si(001), VO2/Gd2O3/Si(111) films and alumina/alloy films. The vibrational characteristics of the crystal structure of films have been investigated in the mid and far infrared ranges on the AILES beamline at Synchrotron SOLEIL. This experimental vibrational study has been combined with Density Functional Theory (DFT) simulation to allow for the first measure of the crystalline structure of these thin films. The 2-dimensional lattice modification compared with the bulk materials has been discussed. The strain effect in the films can be evaluated on the phonon shifts compared with the crystal spectrum. The influences of epitaxial conditions on the local interatomic structure of SrTiO3/Si(001) thin films have been estimated. The nature of STO-Si interface can be characterized by the phonon modes. The metal–insulator transition (MIT) of VO2 thin films on Gd2O3/Si(111) substrate have been studied by IR spectroscopy. The variations of optical and dielectric properties during the MIT, as well as the phonon intensities, indicate that the MIT is driven by electron correlation and the low temperature M1 monoclinic phase of VO2 is a Mott insulator. This result may help to better understand and control the MITs of VO2 thin films in the device applications.