The formalized and algorithmic study of human language within the field of Natural Language Processing (NLP) has motivated much theoretical work in the related field of formal languages, in particular the subfields of grammar and automata theory. Motivated and informed by NLP, the papers in this thesis explore the connections between expressibility – that is, the ability for a formal system to define complex sets of objects – and algorithmic complexity – that is, the varying amount of effort required to analyse and utilise such systems. Our research studies formal systems working not just on strings, but on more complex structures such as trees and graphs, in particular syntax trees and semantic graphs. The field of mildly context-sensitive languages concerns attempts to find a useful class of formal languages between the context-free and context-sensitive. We study formalisms defining two candidates for this class; tree-adjoining languages and the languages defined by linear context-free rewriting systems. For the former, we specifically investigate the tree languages, and define a subclass and tree automaton with linear parsing complexity. For the latter, we use the framework of parameterized complexity theory to investigate more deeply the related parsing problems, as well as the connections between various formalisms defining the class. The field of semantic modelling aims towards formally and accurately modelling not only the syntax of natural language statements, but also the meaning. In particular, recent work in semantic graphs motivates our study of graph grammars and graph parsing. To the best of our knowledge, the formalism presented in Paper III of this thesis is the first graph grammar where the uniform parsing problem has polynomial parsing complexity, even for input graphs of unbounded node degree.

Fundação Carlos Chagas Filho de Amparo a Pesquisa do Estado do Rio de Janeiro / As cerâmicas piesoelétricas estudadas neste trabalho (Pb1,03Zr0,53Ti0,47O3, Pb1,03Zr0,525Nb0,05Ti0,465Fe0,005O3, Pb1,03Zr0,515Nb0,015Ti0,465Fe0,005O3, Pb1,03Zr0,525Nb0,005Ti0,455Fe0,015O3 e Pb1,03Zr0,515Nb0,015Ti0,455Fe0,015O3) foram sinterizadas a 1200oC e 1250oC por 3,5 h a fim de que suas propriedades piesoelétricas fossem investigadas. Nas composições dos PZT obtidas, a matriz e os dopantes empregaram óxidos como matérias primas. As misturas dos óxidos precursores foram calcinadas a 850oC por 3,5 h para obtenção da fase PZT. Os precursores, os pós e os corpos de prova de PZT foram caracterizados quanto às microestruturas, densidades e propriedades físicas. Após a conformação dos pós e a sinterização, os materiais cerâmicos foram polarizados para caracterização de suas propriedades piesoelétricas através de um impedancímetro na faixa de freqüência de 100 KHz a 200 KHz. Os resultados de dispersão de laser dos precursores revelaram aglomeração do óxido de chumbo e óxido de zircônio. As composições calcinadas apresentaram tamanho de partícula na faixa de 0,44 μm a 0,63 μm. As análises de densidade por método de Arquimedes indicaram uma boa densificação dos corpos de prova sinterizados e pouca influência da temperatura de sinterização com uma escala de valores de 95,73 a 97,65% da densidade teórica. As análises de microscopia eletrônica de varredura revelaram que os sinterizados contendo concentrações diferentes de dopantes exibem uma correlação do tipo e teor de dopante com a natureza da fratura, sendo transgranular, quando dopante ferro for predominante e intergranular, quando o dopante Nb for predominante. Também, o aumento da temperatura de sinterização resultou em fratura transgranular independente do tipo e da concentração de dopante, exceto para baixo teor de dopante da composição equimolar, cujos resultados não foram consistentes com a literatura sobre o material. No que diz respeito às propriedades piesoelétricas, revelou-se que a combinação da variação da composição com a temperatura foi favorável para o aumento dos valores da constante dielétrica da formulação equimolar com maior percentual de dopantes. Já o efeito da temperatura com a composição surtiu um efeito muito negativo para os valores de fator de qualidade mecânica da formulação dopada com mais ferro. Para os valores de constante de freqüência da formulação com maior percentagem de nióbio, o efeito da temperatura com a composição gerou um efeito positivo. / The piezoelectric ceramics studied in this work, Pb1.03Zr0.53Ti0.47O3, Pb1.03Zr0.525Nb0.05Ti0.465Fe0.005O3, Pb1.03Zr0.515Nb0.015Ti0.465Fe0.005O3, Pb1.03Zr0.525Nb0.005Ti0.455Fe0.015O3 and Pb1.03Zr0.515Nb0.015Ti0.455Fe0.015O3, were all of them sintered between 1200oC and 1250oC for 3.5h. After that, their piezoelectric properties were investigated. In the present work, oxides were used as raw material in both, matrices and dopants. The mixture of the precursor oxides were calcinaned at 850oC during 3.5h for obtaining the PZT phase. The precursor oxides, the powders and the PZT samples went through characterization tests in order to have their microstructures, densities and physical properties correctly determined. After the powders had been conformed and performed the sinterization process, the PZT ceramics were polarized and their piezoelectric properties determined by using an impedancemeter working in the frequency from 100 KHz to 200 KHz. The obtained results from laser dispersion had revealed agglomeration of lead and zirconium oxide. The calcined samples presented particle sizes from 0.44 μm to 0.63 μm. The density analyses using the Archimedes method indicated a good densification of the sintered samples and a weak influence of the sintering temperature on the obtained density values, whose values ranged from 95.73 to 97.65 % of the theoretical density value. Analysis performed using the scanning electron microscopy technique (MEV) revealed that the sintered samples had showed a correlation between the type and concentration of the dopant with their fracture mode, which were transgranular when Fe prevails over the Nb as dopant, and intergranular, when is the Nb that prevails over the Fe as dopant. By the other side, from increasing the sintering temperature resulted transgranular fractures, independently of which type and content of dopant had been used, except for the equimolar case with relatively low content of dopant, whose results were not consistent with the literature related to this material. About the piezoelectric properties, the results had showed that the combination of the dopant composition with the sintering temperature had brought better values of dielectric constant for the equimolar formulation with more content of dopant. Relating to the mechanical quality factor, from the combination of the dopant composition with the sintering temperature had decreased the factor when Fe prevails over Nb and increased the frequency factor when is the Nb that prevails over the Fe.

CAPES; CNPq; Fundação Araucária / No presente trabalho foram estudadas as respostas de sensores óticos baseados em rede de período longo em cascata (CLPG) na avaliação de biocombustíveis (biodiesel de soja e etanol) em diferentes situações de não conformidade, simulando casos de possíveis adulterações ou ainda falhas no processo de fabricação. Para tanto, os dispositivos serviram como transdutores de índice de refração das substâncias analisadas. Em uma das aplicações dos sensores foram avaliadas misturas entre biodiesel de soja e óleo de soja comercial, sendo observado o desempenho do sensor ótico ao longo de toda a faixa de concentração de óleo em biodiesel (0 – 100%) e, as características metrológicas foram calculadas para três faixas de operação do sistema, abrangendo diferentes faixas de concentrações. Para as faixas 1 a 3, a sensibilidade variou de 0,06 – 0,30 nm / % v/v e a resolução de 0,17 a 0,03 % / v/v. Com o intuito de comparar resultados, as mesmas amostras de biodiesel-óleo foram avaliadas com técnicas de ultrassom, obtendo para esse, sensibilidade de 0,70 m/s / % v/v e resolução de 0,4 %. Outra situação estudada foi com relação às misturas entre biodiesel de soja e metanol e a resposta do sensor ótico apresentou resolução de 0,007 – 0,001 % / v/v. Por meio dessas respostas pôde-se desenvolver um método analítico no qual se utiliza o sensor ótico para a determinação de constituintes em misturas ternárias (biodiesel-óleo-metanol), desde que associando à operação do sensor a variação de temperatura das amostras. Em outra parte do trabalho, o sensor ótico também foi empregado na avaliação de etanol. A resposta do sensor para misturas etanol-metanol apresentou resolução de 0,19 % / v/v, enquanto que, a avaliação dessas mesmas substâncias utilizando o ultrassom, apresentou resolução de 0,26 % / v/v. Outra situação analisada com o sensor ótico, para a análise da conformidade do etanol combustível, foram amostras apresentando misturas ternárias (etanol-metanol-água) em que se fez necessária a avaliação dessas misturas por meio de um refratômetro de Abbe e medidas de densidade. Os resultados encontrados apresentaram-se promissores ao relacionar os dados refratométricos em relação às densidades obtidas para cada amostra, uma vez que, apenas um desses parâmetros não seria capaz de identificar a conformidade do produto. Foi possível então determinar, dentre todos os resultados, uma região de conformidade para o etanol combustível. / In the present work were studied the responses of the optical sensors based on cascaded long period gratings (CLPG) to evaluate biofuels (soy biodiesel and ethanol) in different situations of non-compliance, simulating cases of possible tampering or failures in the process of manufacturing. To this end, the devices served as refractive index transducers of the analyzed substances. One of the applications of the sensors were evaluate mixtures of soybean biodiesel and commercial soybean oil, observing the performance of the optical sensor over the whole range of biodiesel oil concentration (0 - 100%) and the metrological characteristics were calculated for three system operating ranges covering different concentration ranges. In lanes 1 through 3, the sensitivity ranged from 0.06 to 0.30 nm /% v / v and the resolution from 0.17 to 0.03% / v / v. In order to compare the results, the same samples of biodiesel oil, were assessed by ultrasound techniques for obtaining this, a sensitivity of 0.70 m / sec / v / v% and resolution of 0.4%. Another situation studied envolved mixtures of soybean biodiesel and methanol and the response of the optical sensor showed resolution from 0.007 to 0.001% / v / v. Through these responses could be developed an analytical method which uses the optical sensor for the determination of constituents of ternary mixtures (biodiesel - soybean oil - methanol) associating to the sensor the right temperature of the samples. Another part of the work, the optical sensor was used in the evaluation of ethanol. The sensor response for ethanol-methanol mixtures showed resolution of 0.19% / v / v, while the evaluation of those substances using ultrasound, showed resolution of 0.26% / v / v. Another situation observed using the optical sensor was the analysis of ethanol fuel with samples having ternary mixtures (ethanol-methanol-water) in which the evaluation of these mixtures by means of a refractometer Abbe and density measurements made necessary. The results presented in these analyses are promising when related the refractometric to densities datas obtained for each sample, since only one of these parameters would not be able to identify the product conformity. It was then possible to determine, among all results, a compliance region for ethanol fuel.

CAPES; CNPq; Fundação Araucária / No presente trabalho foram estudadas as respostas de sensores óticos baseados em rede de período longo em cascata (CLPG) na avaliação de biocombustíveis (biodiesel de soja e etanol) em diferentes situações de não conformidade, simulando casos de possíveis adulterações ou ainda falhas no processo de fabricação. Para tanto, os dispositivos serviram como transdutores de índice de refração das substâncias analisadas. Em uma das aplicações dos sensores foram avaliadas misturas entre biodiesel de soja e óleo de soja comercial, sendo observado o desempenho do sensor ótico ao longo de toda a faixa de concentração de óleo em biodiesel (0 – 100%) e, as características metrológicas foram calculadas para três faixas de operação do sistema, abrangendo diferentes faixas de concentrações. Para as faixas 1 a 3, a sensibilidade variou de 0,06 – 0,30 nm / % v/v e a resolução de 0,17 a 0,03 % / v/v. Com o intuito de comparar resultados, as mesmas amostras de biodiesel-óleo foram avaliadas com técnicas de ultrassom, obtendo para esse, sensibilidade de 0,70 m/s / % v/v e resolução de 0,4 %. Outra situação estudada foi com relação às misturas entre biodiesel de soja e metanol e a resposta do sensor ótico apresentou resolução de 0,007 – 0,001 % / v/v. Por meio dessas respostas pôde-se desenvolver um método analítico no qual se utiliza o sensor ótico para a determinação de constituintes em misturas ternárias (biodiesel-óleo-metanol), desde que associando à operação do sensor a variação de temperatura das amostras. Em outra parte do trabalho, o sensor ótico também foi empregado na avaliação de etanol. A resposta do sensor para misturas etanol-metanol apresentou resolução de 0,19 % / v/v, enquanto que, a avaliação dessas mesmas substâncias utilizando o ultrassom, apresentou resolução de 0,26 % / v/v. Outra situação analisada com o sensor ótico, para a análise da conformidade do etanol combustível, foram amostras apresentando misturas ternárias (etanol-metanol-água) em que se fez necessária a avaliação dessas misturas por meio de um refratômetro de Abbe e medidas de densidade. Os resultados encontrados apresentaram-se promissores ao relacionar os dados refratométricos em relação às densidades obtidas para cada amostra, uma vez que, apenas um desses parâmetros não seria capaz de identificar a conformidade do produto. Foi possível então determinar, dentre todos os resultados, uma região de conformidade para o etanol combustível. / In the present work were studied the responses of the optical sensors based on cascaded long period gratings (CLPG) to evaluate biofuels (soy biodiesel and ethanol) in different situations of non-compliance, simulating cases of possible tampering or failures in the process of manufacturing. To this end, the devices served as refractive index transducers of the analyzed substances. One of the applications of the sensors were evaluate mixtures of soybean biodiesel and commercial soybean oil, observing the performance of the optical sensor over the whole range of biodiesel oil concentration (0 - 100%) and the metrological characteristics were calculated for three system operating ranges covering different concentration ranges. In lanes 1 through 3, the sensitivity ranged from 0.06 to 0.30 nm /% v / v and the resolution from 0.17 to 0.03% / v / v. In order to compare the results, the same samples of biodiesel oil, were assessed by ultrasound techniques for obtaining this, a sensitivity of 0.70 m / sec / v / v% and resolution of 0.4%. Another situation studied envolved mixtures of soybean biodiesel and methanol and the response of the optical sensor showed resolution from 0.007 to 0.001% / v / v. Through these responses could be developed an analytical method which uses the optical sensor for the determination of constituents of ternary mixtures (biodiesel - soybean oil - methanol) associating to the sensor the right temperature of the samples. Another part of the work, the optical sensor was used in the evaluation of ethanol. The sensor response for ethanol-methanol mixtures showed resolution of 0.19% / v / v, while the evaluation of those substances using ultrasound, showed resolution of 0.26% / v / v. Another situation observed using the optical sensor was the analysis of ethanol fuel with samples having ternary mixtures (ethanol-methanol-water) in which the evaluation of these mixtures by means of a refractometer Abbe and density measurements made necessary. The results presented in these analyses are promising when related the refractometric to densities datas obtained for each sample, since only one of these parameters would not be able to identify the product conformity. It was then possible to determine, among all results, a compliance region for ethanol fuel.

Fundação Carlos Chagas Filho de Amparo a Pesquisa do Estado do Rio de Janeiro / As cerâmicas piesoelétricas estudadas neste trabalho (Pb1,03Zr0,53Ti0,47O3, Pb1,03Zr0,525Nb0,05Ti0,465Fe0,005O3, Pb1,03Zr0,515Nb0,015Ti0,465Fe0,005O3, Pb1,03Zr0,525Nb0,005Ti0,455Fe0,015O3 e Pb1,03Zr0,515Nb0,015Ti0,455Fe0,015O3) foram sinterizadas a 1200oC e 1250oC por 3,5 h a fim de que suas propriedades piesoelétricas fossem investigadas. Nas composições dos PZT obtidas, a matriz e os dopantes empregaram óxidos como matérias primas. As misturas dos óxidos precursores foram calcinadas a 850oC por 3,5 h para obtenção da fase PZT. Os precursores, os pós e os corpos de prova de PZT foram caracterizados quanto às microestruturas, densidades e propriedades físicas. Após a conformação dos pós e a sinterização, os materiais cerâmicos foram polarizados para caracterização de suas propriedades piesoelétricas através de um impedancímetro na faixa de freqüência de 100 KHz a 200 KHz. Os resultados de dispersão de laser dos precursores revelaram aglomeração do óxido de chumbo e óxido de zircônio. As composições calcinadas apresentaram tamanho de partícula na faixa de 0,44 μm a 0,63 μm. As análises de densidade por método de Arquimedes indicaram uma boa densificação dos corpos de prova sinterizados e pouca influência da temperatura de sinterização com uma escala de valores de 95,73 a 97,65% da densidade teórica. As análises de microscopia eletrônica de varredura revelaram que os sinterizados contendo concentrações diferentes de dopantes exibem uma correlação do tipo e teor de dopante com a natureza da fratura, sendo transgranular, quando dopante ferro for predominante e intergranular, quando o dopante Nb for predominante. Também, o aumento da temperatura de sinterização resultou em fratura transgranular independente do tipo e da concentração de dopante, exceto para baixo teor de dopante da composição equimolar, cujos resultados não foram consistentes com a literatura sobre o material. No que diz respeito às propriedades piesoelétricas, revelou-se que a combinação da variação da composição com a temperatura foi favorável para o aumento dos valores da constante dielétrica da formulação equimolar com maior percentual de dopantes. Já o efeito da temperatura com a composição surtiu um efeito muito negativo para os valores de fator de qualidade mecânica da formulação dopada com mais ferro. Para os valores de constante de freqüência da formulação com maior percentagem de nióbio, o efeito da temperatura com a composição gerou um efeito positivo. / The piezoelectric ceramics studied in this work, Pb1.03Zr0.53Ti0.47O3, Pb1.03Zr0.525Nb0.05Ti0.465Fe0.005O3, Pb1.03Zr0.515Nb0.015Ti0.465Fe0.005O3, Pb1.03Zr0.525Nb0.005Ti0.455Fe0.015O3 and Pb1.03Zr0.515Nb0.015Ti0.455Fe0.015O3, were all of them sintered between 1200oC and 1250oC for 3.5h. After that, their piezoelectric properties were investigated. In the present work, oxides were used as raw material in both, matrices and dopants. The mixture of the precursor oxides were calcinaned at 850oC during 3.5h for obtaining the PZT phase. The precursor oxides, the powders and the PZT samples went through characterization tests in order to have their microstructures, densities and physical properties correctly determined. After the powders had been conformed and performed the sinterization process, the PZT ceramics were polarized and their piezoelectric properties determined by using an impedancemeter working in the frequency from 100 KHz to 200 KHz. The obtained results from laser dispersion had revealed agglomeration of lead and zirconium oxide. The calcined samples presented particle sizes from 0.44 μm to 0.63 μm. The density analyses using the Archimedes method indicated a good densification of the sintered samples and a weak influence of the sintering temperature on the obtained density values, whose values ranged from 95.73 to 97.65 % of the theoretical density value. Analysis performed using the scanning electron microscopy technique (MEV) revealed that the sintered samples had showed a correlation between the type and concentration of the dopant with their fracture mode, which were transgranular when Fe prevails over the Nb as dopant, and intergranular, when is the Nb that prevails over the Fe as dopant. By the other side, from increasing the sintering temperature resulted transgranular fractures, independently of which type and content of dopant had been used, except for the equimolar case with relatively low content of dopant, whose results were not consistent with the literature related to this material. About the piezoelectric properties, the results had showed that the combination of the dopant composition with the sintering temperature had brought better values of dielectric constant for the equimolar formulation with more content of dopant. Relating to the mechanical quality factor, from the combination of the dopant composition with the sintering temperature had decreased the factor when Fe prevails over Nb and increased the frequency factor when is the Nb that prevails over the Fe.

A sobreposição de frequências ultrassônicas a uma ferramenta em operações de perfuração, utilizando transdutores piezelétricos, resulta em melhorias na usinagem de metais, garantindo melhor acabamento (ausência de rebarba), redução do tamanho do cavaco e menor desgaste ferramental. A utilização desse tipo de técnica na perfuração de rochas reduz a carga axial e aumenta a velocidade do processo, possibilitando maior profundidade de perfuração, podendo vir a ser muito útil em pesquisas aplicadas à perfuração de reservas petrolíferas e exploração mineral. Este trabalho teve como objetivo simular e aplicar um transdutor piezelétrico ultrassônico de potência para perfuração de rochas e metais. Para as simulações numéricas duas técnicas foram utilizadas: o método dos elementos finitos (MEF) e o método das matrizes em cadeia (MMC). O MEF permitiu análises harmônicas e modais de forma rápida e precisa enquanto o MMC resultou em expressão analítica, possibilitando melhor compreensão dos parâmetros físicos e geométricos envolvidos na performance do transdutor. Ambos os métodos nortearam o projeto do protótipo a ser usado em ensaios de perfuração. Para a construção do protótipo, foi projetado um mandril para a fixação da broca, que foi adaptado a um transdutor de potência de 20 kHz. Ensaios de perfuração de rochas e de discos de alumínio foram realizados com o protótipo. A aplicação do protótipo à perfuração de rochas carbonáticas demonstrou redução no tempo de furação, quando comparada ao método convencional (sem aplicação de ultrassom). Na furação de discos de alumínio, a redução de rebarbas, quebra do cavaco durante a operação e melhor acabamento da peça, são conclusões evidentes das melhorias proporcionadas pela sobreposição de frequências ultrassônicas à broca. / Superposition of high frequency vibration in the tool, driven by a piezoelectric actuator, in a drilling machining process of metals results in some improvements such as finishing quality (without burr), reduction of tool wear and chip dimensions. Similar techniques applied in rock perforation reduce the axial load in the tool, which enhances the process velocity, resulting in deeper perforation. This might be useful in oil and mineral exploration, opening the feasibility of researches in this field. The aim of this work is to simulate and implement an ultrasonic piezoelectric transducer to perforate rocks and metals. Concerning numerical simulation, two techniques were performed: finite element method (FEM) and chain matrix method (CMM). FEM simulations provide fast and effective modal and harmonic analysis. CMM provide mathematical expressions, analytically exposing geometrical and physical parameters involved in the transducer performance. Both methods were the guide and basement for the prototype project, able to perform perforation experiments. For the construction of the prototype, a drill chuck were designed and adapted for a 20 kHz power ultrasonic transducer. Aluminum drilling and rock perforation experiments were carried out with this prototype. A lower perforation time was achieved in carbonate rocks when the ultrasound-aided method was used as opposed to the conventional method. Results in aluminum disks presented burr reduction, better part finishing and breakage of chips during operation. Those results evidently appoint some improvements due to the power ultrasonic superposition in the drilling process.

MEMS microphones have been a research topic for the last two and half decades. The state-of-the-art comprises surface mount MEMS microphones in laptops, mobile phones and tablets, etc. The popularity and the commercial success of MEMS microphones is largely due to the steep cost reduction in manufacturing afforded by the mass scale production with microfabrication technology. The current MEMS microphones are de-signed along the lines of traditional microphones that use capacitive transduction with or without permanent charge (electret type microphones use permanent charge of their sensor element). These microphones offer high sensitivity, stability and reasonably at frequency response while reducing the overall size and energy consumption by exploiting MEMS technology. Conceptually, microphones are simple transducers that use a membrane or diaphragm as a mechanical structure which deflects elastically in response to the incident acoustic pressure. This dynamic deflection is converted into an electrical signal using an appropriate transduction technique. The most popular transduction technique used for this application is capacitive, where an elastic diaphragm forms one of the two parallel plates of a capacitor, the fixed substrate or the base plate being the other one. Thus, there are basically two main elements in a microphone { the elastic membrane as a mechanical element, and the transduction technique as the electrical element. In this thesis, we propose and study novel design for both these elements. In the mechanical element, we propose a simple topological change by introducing slits in the membrane along its periphery to enhance the mechanical sensitivity. This simple change, however, has significant impact on the microphone design, performance and its eventual cost. Introduction of slits in the membrane makes the geometry of the structural element non-trivial for response analysis. We devote considerable effort in devising appropriate modeling techniques for deriving lumped parameters that are then used for simulating the system response. For transduction, we propose and study an FET (Field Effect Transistor) coupled micro-phone design where the elastic diaphragm is used as the moving (suspended) gate of an FET and the gate deflection modulated drain current is used in the subthreshold regime of operation as the output signal of the microphone. This design is explored in detail with respect to various design parameters in order to enhance the electrical sensitivity. Both proposed changes in the microphone design are motivated by the possibilities that the microfabrication technology offers. In fact, the design proposed here requires further developments in MEMS technology for reliably creating gaps of 50-100 nm between the substrate and a large 2D structure of the order of a few hundred microns in diameter. In the First part of the thesis, we present detailed simulations of acoustic and squeeze lm domain to understand the effect slits could bring upon the behaviour of the device as a microphone. Since the geometry is nontrivial, we resort to Finite element simulations using commercial packages such as COMSOL Multiphysics and ANSYS in the structural, acoustic and Fluid-structure domains to analyze the behaviour of a microphone which has top plate with nontrivial geometry. On the simulated Finite element data, we conduct low and high frequency limit analysis to extract expressions for the lumped parameters. This technique is well known in acoustics. We borrow this technique of curve Fitting from the acoustics domain and apply it in modified form into the squeeze lm domain. The dynamic behaviour of the entire device is then simulated using the extracted parameters. This helps to simulate the microphone behaviour either as a receiver or as a transmitter. The designed device is fabricated using MEMSCAP PolyMUMPS process (a foundry Polysilicon surface micromachining process). We conduct vibrometer (electrostatic ex-citation) and acoustic characterization. We also study the feasibility of a microphone with slits and the issues involved. The effect of the two dissipation modes (acoustic and squeeze lm ) are quantified with the experimentally determined quality factor. The experimentally measured values are: Resonance is 488 kHz (experimentally determined), low frequency roll-off is 796 Hz (theoretical value) and is 780 Hz as obtained by electrical characterization. The first part of this thesis focusses on developing a comprehensive understanding of the effect of slits on the performance of a MEMS microphone. The presence of slits near the circumference of the clamped plate cause reduction in its rigidity. This leads to an increase in the sensitivity of the device. Slits also cause pressure equalization between the top and bottom of the diaphragm if the incoming sound is at relatively low frequencies. At this frequency, also known as the lower cutoff frequency, the microphone's response starts dropping. The presence of slits also changes the radiation impedance of the plate as well as the squeeze lm damping below the plate. The useful bandwidth of the microphone changes as a consequence. The cavity formed between the top plate and the bottom fixed substrate increases the stiffness of the device significantly due to compression of the trapped air. This effect is more pronounced here because unlike the existing capacitive MEMS microphones, there is no backchamber in the device fabricated here. In the second part of the thesis, we present a novel subthreshold biased FET based MEMS microphone. This biasing of the transistor in the subthreshold region (also called as the OFF-region) offers higher sensitivity as compared to the above threshold region (also called as the ON-region) biasing. This is due to the exponentially varying current with change in the bias voltage in the OFF-region as compared to the quadratic variation in the ON-region. Detailed simulations are done to predict the behaviour of the device. A lumped parameter model of the mechanical domain is coupled with the drain current equations to predict the device behaviour in response to the deflection of the moving gate. From the simulations, we predict that the proposed biasing offers a device sensitive to even sub-nanometer deflection of the flexible gate. As a proof of concept, we fabricate fixed-fixed beams which utilize CMOS-MEMS fabrication. The process involves six lithography steps which involve two CMOS and the remaining MEMS fabrication. The fabricated beams are mechanically characterized for resonance. Further, we carry out electrical characterization for I-V (current-voltage) characteristics. The second part of the thesis focusses on a novel biasing method which circumvents the need of signal conditioning circuitry needed in a capacitive based transduction due to inbuilt amplification. Extensive simulations with equivalent circuit has been carried out to determine the increased sensitivity and the role of various design variables.

Plusieurs industries manipulent des substances liquides et gazeuses qui circulent souvent dans de longues canalisations. La technique d'ondes guidées est couramment utilisée dans ce domaine. Cette technique est en progrès continu. Dans cette thèse, un système d'inspection a été conçu et développé. Il est basé sur des transducteurs piézoélectriques qui génèrent des ondes guidées de torsion pouvant se propager le long du tube testé. Les signaux réfléchis des défauts et singularités rencontrés sont détectés aussi par des capteurs piézoélectriques. Des simulations numériques utilisantpar la méthode d'éléments finis standard et la méthode Wave Finite Element(WFEM) ont été effectuées afin de vérifier et de visualiser le phénomène de propagation des ondes dans des tubes intacts et endommagés. Un ensemble de tests a été mis en place sur des tubes droits et courbés avec deux matériaux différents: PVC et acier. L'interaction entre les ondes générées et les défauts usinés a été prouvée.Les résultats numériques et expérimentaux confirment certaines caractéristiques spécifiques concernant le coefficient de réflexion de l'onde. Par la suite, un pipeline industriel d'environ soixante mètres de long et contenant plusieurs défauts et singularités a été testé par le système d'inspection. Les signaux enregistrés ont soumis certains traitements numériques afin de les rendre exploitables. Les signaux traités sont analysés afin d'identifier et de distinguer les réflexions des défauts de celles des singularités structurés. La méthode WFEM a été employée pour construire une base de données numérique des coefficients de réflexion en variant la profondeur et les extensions axiale et circonférentielle du défaut modélisé. Le calcul a été établi en fonction de la fréquence. La corrélation des tailles des défauts est effectuée en balayant la base de données numérique pour trouver la combinaison appropriée de dimensions pour un défaut donné. Les réflexions à partir des singularités structurées (coudes, blocs de béton, colliers, et les soudures) sont traitées ainsi en comparant des coefficients de réflexion obtenus par WFEM à ceux évalués expérimentalement. Enfin, on a étudié numériquement l'effet de la position angulaire d'un défaut sur les coefficients de réflexion et de transmission tout en excitant à différents types d'ondes. La méthode WFE est aussi utilisée pour effectuer le calcul. Cette étude donne un guide à la localisation circonférentielle des défauts dans les tubes. / Long pipelines are widely used in several industries transporting liquid or gas. The guided wave technique is commonly used in this field and it is under continuing progress. In this thesis, an inspection system has been designed and developed. Piezoelectric transducers are employed to generate torsional guided waves that could propagate along the tested pipe; and receive reflected signals from encountered features and damages. Numerical simulations using standard FE and Wave Finite Element methods have been carried out in order to verify and visualize the wave propagation phenomenon in both intact and damaged pipes. A set of tests has been performed on straight and curved pipes with two different materials: PVC and steel. The interaction between generated waves and machined defects has been proven. Numerical and experimental results confirm some specific features in the wave reflection coefficient. Thereafter, an industrial pipeline of about sixty meters long and containing several features has been tested by the inspection system.Recorded signals had submitted some numerical treatments in order to make them interpretable. Processed signals are analyzed to identify defects reflections from structured singularities echoes. The Wave Finite Element Method (WFEM) has been used to construct a numerical database of reflection coefficients from modelled defects by varying thickness, axial and circumferential extents. Calculation was made depending on frequency. The approximation of defect sizes is carried out by sweeping the numerical database to find the suitable combination of dimensions fora given defect. Reflections from structural singularities (elbows, concrete blocks,clamps, and welds) are treated as well by comparing reflection coefficients obtained by WFEM to those evaluated experimentally. Finally, a numerical investigation deals with the effect of defect angular-position on reflection and transmission coefficients while exciting by different types of waves. The spectral method Wave Finite Element has been used to carry out calculation. This study gives guidance to circumferential localization of defects in pipes.

<p align="justify">Many different active control techniques can be used to control the vibrations of a mechanical structure: they however require at least a sensitive signal amplifier (for the sensor), a power amplifier (for the actuator) and an analog or digital filter (for the controller). The use of all these electronic devices may be impractical in many applications and has motivated the use of the so-called shunt circuits, in which an electrical circuit is directly connected to a transducer embedded in the structure. The transducer acts as an energy converter: it transforms mechanical (vibrational) energy into electrical energy, which is in turn dissipated in the shunt circuit. No separate sensor is required, and only one, generally simple electronic circuit is used. The stability of the shunted structure is guaranteed if the electric circuit is passive, i.e. if it is made of passive components such as resistors and inductors.</p><p><p><p align="justify">This thesis compares the performances of the electric shunt circuits with those of classical active control systems. It successively considers the use of piezoelectric transducers and that of electromagnetic (moving-coil) transducers.</p><p><p><p align="justify">In a first part, the different damping techniques are applied on a benchmark truss structure equipped with a piezoelectric stack transducer. A unified formulation is found and experimentally verified for an active control law, the Integral Force Feedback (IFF), and for various passive shunt circuits (resistive and resistive-inductive). The use of an active shunt, namely the negative capacitance, is also investigated in detail. Two different implementations are discussed: they are shown to have very different stability limits and performances.</p><p><p><p align="justify">In a second part, vibration isolation with electromagnetic (moving-coil) transducers is introduced. The effects of an inductive-resistive shunt circuit are studied in detail; an equivalent mechanical representation is found. The performances are compared with that of resonant shunts and with that of active isolation with IFF. Next, the construction of a six-axis isolator based on a Stewart Platform is presented: the key parameters and the main limitations of the system are highlighted.</p> / Doctorat en Sciences de l'ingénieur / info:eu-repo/semantics/nonPublished

This thesis describes the development and applications of an extension of DWS which enables the recovery of ‘localized’ mechanical properties, in a specified region of a complex jelly-like object which is inhomogeneous, marked out by the focal volume of an ultrasound transducer, also called the region-of-interest (ROI). Introduction of the sinusoidal forcing creates a sinusoidal phase variation in the detected light in a DWS experiment which modulates the measured intensity autocorrelation, g2 (τ ). Decay in the modulation depth with τ is used to recover the visco-elastic spectrum of the material in the ROI. En route to this, growth of the mean-squared dis- placement (MSD) with time is extracted from the modulation depth decay, which was verified first by the usual DWS experimental data from an homogeneous object with properties matching those in the ROI of the inhomogeneous object and then those obtained by solving the generalized Langevin equation (GLE) modelling the dynamics of a typical scattering centre in the ROI. A region-specific visco-elastic spectral map was obtained by scanning the inhomogeneous object by the ultrasound focal volume. Further, the resonant modes of the vibrating ROI were measured by locating the peaks of the modulation depth variation in g2(τ ) with respect to the ultrasound frequency. These resonant modes were made use of to recover elasticity of the material of the object in the ROI. Using a similar strategy, it was also shown that flow in pipe can be detected and flow rate computed by ‘tagging’ the photons passing through the pipe with a focussed ultrasound beam. It is demonstrated, both through experiments and simulations that the ultrasound-assisted technique devel- oped is better suited to both detect and quantitatively assess flow in a background of Brownian dynamics than the usual DWS. In particular, the MSD of particles in the flow, which shows forth a super-diffusive dynamics with MSD growing following τ α with α < 2, is captured over larger intervals of τ than was possible using existing methods. On the theoretical front, the main contribution is the derivation of the GLE, with multiplicative noise modulating the interaction ‘spring constant’. The noise is derived as an average effect of the micropolar rotations suffered by the ‘bath’ particles on the ‘system’ particle modelled. It has been shown that the ‘local’ dynamics of the system particle is nontrivially influenced by the dynamics, both translation and rotation, of ‘nonlocal’ bath particles.