To allow electronic devices to operate within allowable temperatures, heat sinks and fans are employed to cool down computer chips. However, cooling performance is limited by air gaps between the computer chip and the heat sink, due to the fact that air is a poor heat conductor. To alleviate this problem, thermal interface material (TIM) is often applied between mating substrates to fill air gaps. Carbon nanotube (CNT) based TIM has been reported to have excellent thermal impedance; however, because it is non biodegradable, its potential impact on the environment is a concern. In this thesis research, two types of TIMs were designed, synthesized, and characterized. The first type, Designed TIM 1, consisted of anodic aluminum oxide (AAO) templates with nanochannels (pore size=80nm) embedded with copper nanowires by electrodeposition. This type of nanostructure was expected to have low thermal impedance because the forest-like structure of copper nanowires can bridge two mating surfaces and efficiently transport heat one dimensionally from one substrate to the other. The second type, Designed TIM 2, was fabricated by sandwiching Designed TIM 1 with commercially available thermal grease to further reduce thermal impedance. It was expected that the copper nanowire structures would secure the thermal grease in place, thus preventing grease pump-out under contact pressure, which is a common problem associated with the usage of thermal grease. The morphologies of the two designed TIMs were studied using scanning electron microscopy (SEM), and their thermal properties were determined using ASTM D5470-06, the standard method for testing thermal transmission properties of thermally conductive materials. Experiments were conducted to evaluate the proposed TIMs, as well as commercially available TIMs, under different temperature and pressure settings. Experimental results suggest that the thermal impedance of TIMs can be reduced by increasing contact pressure or reducing thickness. Designed TIM 2 yielded 0.255℃-cm2/W, which is lower than thermal grease and other available TIMs at the operating temperature of 50 to 60℃. Considering the application limitations and safety issues of thermal grease, phase change material, and CNT-based TIMs, our designed TIMs are safe and promising for future applications.

This paper presents the results of an ongoing effort to develop a direct solder bumping process for electronics packaging. The proposed process entails delivering molten droplets onto specific locations on electronic devices to form solder bumps. This study is focused on investigating droplet deposition behaviors that affect solder bump characteristics such as final bump volume, shape, and adhesion strength. The occurrence of droplet bouncing has a strong influence on these characteristics. The potential for a droplet to bounce in the absence of solidification was modeled in discrete stages based on energy conservation. Wetting and target surface roughness were identified as the critical parameters affecting bouncing. The experimental results showed that improvements in wetting and decreases in surface roughness retard bouncing. These observations agreed well with the trends predicted by the energy conservation based model. The knowledge acquired in this study is expected to contribute to the development of an efficient solder bumping process. / Singapore-MIT Alliance (SMA)

This article reports the recent progress of re-search made in the Droplet-Based Manufacturing Laboratory at MIT. The study has been focused on obtaining a fundamental understanding of microdroplet deposition and applying the technology to various practical applications. Specific scientific contributions include the development of an analytical model for droplet splashing/recoiling, an in situ droplet size control methodology, and a study of microstructure design for spray forming. The research per-formed in the lab provides both fundamental knowledge base and practical process developments for a range of manufacturing applications, including electronics packaging, spray forming and freeform fabrication. / Singapore-MIT Alliance (SMA)

Flip chip interconnections have superior performance for microwave applications compared to wire bond interconnections because of their reduced parasitics, more compact architecture, and flexibility in laying out flip chip bond pads. Reduction in interconnect parasitics enables these interconnects to support broadband signals, therefore increasing the bandwidth capabilities of flip chip-assembled systems. Traditional flip chip designs provide mechanical and electrical connections from a top chip to a carrier substrate with rigid solder joints. For heterogeneous assemblies, flip chip connections suffer from thermo-mechanical failures caused by coefficient of thermal expansion mismatches. As an alternative, flexible flip chip interconnections incorporating a metal, which is liquid at room temperature, mitigates the possibility of such thermo-mechanical failures. Additionally, liquid metal, flip chip interconnections allow for room temperature assembly, simplifying assembly and rework processes. This dissertation focuses on the design and characterization of liquid metal interconnections, specifically using Galinstan, an alloy of gallium indium and tin, for the heterogeneous assembly of active monolithic microwave integrated circuits (MMICs) onto a CTE mismatched substrate. Carrier substrates designed for liquid metal transitions were fabricated on high resistivity Si and on three dimensional copper structures. The three dimensional copper structures were fabricated in the PolyStrata™ process. Individual MMIC chips were post-processed to mate with carrier substrates in a liquid metal, flip chip configuration. S-parameter measurements of prototype MMIC assemblies with liquid metal, flip chip interconnections showed an average transition loss of 0.7dB over the MMIC's frequency of operation (4.9 - 8.5 GHz). Passive assemblies were also fabricated to characterize the power and temperature performance of liquid metal transitions. Liquid metal interconnections show excellent power handling, maintaining consistent RF performance while transmitting 100W of continuous wave power for an hour. Liquid metal interconnections were also tested following 200 temperature cycles over the -140°C – 125°C range. A comparison of S parameter measurements taken before and after temperature cycling, over a frequency range of 10MHz - 40GHz showed no significant changes in performance. These passive assemblies were also used to develop a lumped element model of the interconnection which is useful for the verification the interconnection\'s performance and for comparison of liquid metal interconnection parasitic to wire bond and flip chip interconnect parasitics. The experimental results presented in this dissertation confirm that liquid metal interconnect are viable for wider use in military and commercial applications. In the future, additional environmental testing and further refinement of the processing flow, such as improved contact metallurgy, are needed to make this interconnect approach more viable for large volume manufacturing. / Ph. D.

The goal of the present work is to develop, and evaluate a parametric model of a basic microscale Self-Assembly (SA) interaction that provides scaling predictions of process rates as a function of key process variables. At the microscale, assembly by “grasp and release” is generally challenging. Recent research efforts have proposed adapting nanoscale self-assembly (SA) processes to the microscale. SA offers the potential for reduced equipment cost and increased throughput by harnessing attractive forces (most commonly, capillary) to spontaneously assemble components. However, there are challenges for implementing microscale SA as a commercial process. The existing lack of design tools prevents simple process optimization. Previous efforts have characterized a specific aspect of the SA process. However, the existing microscale SA models do not characterize the inter-component interactions. All existing models have simplified the outcome of SA interactions as an experimentally-derived value specific to a particular configuration, instead of evaluating it outcome as a function of component level parameters (such as speed, geometry, bonding energy and direction). The present study parameterizes the outcome of interactions, and evaluates the effect of key parameters. The present work closes the gap between existing microscale SA models to add a key piece towards a complete design tool for general microscale SA process modeling. First, this work proposes a simple model for defining the probability of assembly of basic SA interactions. A basic SA interaction is defined as the event where a single part arrives on an assembly site. The model describes the probability of assembly as a function of kinetic energy, binding energy, orientation and incidence angle for the component and the assembly site. Secondly, an experimental SA system was designed, and implemented to create individual SA interactions while controlling process parameters independently. SA experiments measured the outcome of SA interactions, while studying the independent effects of each parameter. As a first step towards a complete scaling model, experiments were performed to evaluate the effects of part geometry and part travel direction under low kinetic energy conditions. Experimental results show minimal dependence of assembly yield on the incidence angle of the parts, and significant effects induced by changes in part geometry. The results from this work indicate that SA could be modeled as an energy-based process due to the small path dependence effects. Assembly probability is linearly related to the orientation probability. The proportionality constant is based on the area fraction of the sites with an amplification factor. This amplification factor accounts for the ability of capillary forces to align parts with only very small areas of contact when they have a low kinetic energy. Results provide unprecedented insight about SA interactions. The present study is a key step towards completing a basic model of a general SA process. Moreover, the outcome from this work can complement existing SA process models, in order to create a complete design tool for microscale SA systems. In addition to SA experiments, Monte Carlo simulations of experimental part-site interactions were conducted. This study confirmed that a major contributor to experimental variation is the stochastic nature of experimental SA interactions and the limited sample size of the experiments. Furthermore, the simulations serve as a tool for defining an optimum sampling strategy to minimize the uncertainty in future SA experiments.

This study focuses on development a planar power module with low thermal impedance and thermo-mechanical stress for high density integration of power electronics systems. With the development semiconductor technology, the heat flux generated in power device keeps increasing. As a result, more and more stringent requirements were imposed on the thermal and reliability design of power electronics packaging. In this dissertation, a boundary-dependent RC transient thermal model was developed to predict the peak transient temperature of semiconductor device in the power module. Compared to conventional RC thermal models, the RC values in the proposed model are functions of boundary conditions, geometries, and the material properties of the power module. Thus, the proposed model can provide more accurate prediction for the junction temperature of power devices under variable conditions. In addition, the transient thermal model can be extracted based on only steady-state thermal simulation, which significantly reduced the computing time. To detect the peak transient temperature in a fully packaged power module, a method for thermal impedance measurement was proposed. In the proposed method, the gate-emitter voltage of an IGBT which is much more sensitive to the temperature change than the widely used forward voltage drop of a pn junction was monitored and used as temperature sensitive parameter. A completed test circuit was designed to measure the thermal impedance of the power module using the gate-emitter voltage. With the designed test set-up, in spite of the temperature dependency of the IGBT electrical characteristics, the power dissipation in the IGBT can be regulated to be constant by adjusting the gate voltage via feedback control during the heating phase. The developed measurement system was used to evaluate thermal performance and reliability of three different die-attach materials. From the prediction of the proposed thermal model, it was found that the conventional single-sided power module with wirebond connection cannot achieve both good steady-state and transient thermal performance under high heat transfer coefficient conditions. As a result, a plate-bonded planar power module was designed to resolve the issue. The comparison of thermal performance for conventional power module and the plate-bonded power module shows that the plate-bonded power module has both better steady-state and transient thermal performance than the wirebonded power module. However, due to CTE mismatch between the copper plate and the silicon device, large thermo-mechanical stress is induced in the bonding layer of the power module. To reduce the stress in the plate-bonded power module, an improved structure called trenched copper plate structure was proposed. In the proposed structure, the large copper plate on top of the semiconductor can be partitioned into several smaller pieces that are connected together using a thin layer copper foil. The FEM simulation shows that, with the improved structure, the maximum von Mises stress and plastic strain in the solder layer were reduced by 18.7% and 67.8%, respectively. However, the thermal impedance of the power module increases with reduction of the stress. Therefore, the trade-off between these two factors was discussed. To verify better reliability brought by the trenched copper plate structure, twenty-four samples with three different copper plate structures were fabricated and thermally cycled from -40°C to 105°C. To detect the failure at the bonding layer, the curvature of these samples were measured using laser scanning before and after cycling. By monitoring the change of curvature, the degradation of bonding layer can be detected. Experimental results showed that the samples with different copper plate structure had similar curvature before thermal cycle. The curvatures of the samples with single copper plate decreased more than 80% after only 100 cycles. For the samples with 2 × 2 copper plate and the samples with 3 × 3 copper plate, the curvatures became 75.8% and 77.5% of the original values, respectively, indicating better reliability than the samples with single copper plate. The x-ray pictures of cross-sectioned samples confirmed that after 300 cycles, the bonding layer for the sample with single copper plate has many cracks and delaminations starting from the edge. / Ph. D.

Circuit assembly and packaging technologies for power electronics have not kept pace with those for digital electronics. Inside those packaged power devices as well as the state-of-the-art power modules, interconnection of power chips is accomplished with wirebonds. Wirebonds in power devices and modules are prone to resistance, noise, parasitic oscillations, fatigue and eventual failure. Furthermore, there has been an increase demand for higher power density and better efficiency for power converters. Power semiconductor suppliers have been concentrating on improving device structure, density, and process technology to lower the on-resistance of MOSFETs and voltage drop of IGBTs. Recent advances made in power semiconductor technology are pushing packaging technology to the limits for performance of these power systems since the resistance and parasitics contribution by the package and the wirebonds are roughly the same as that on the silicon. In recent years, an integrated systems approach to standardizing power electronics components and packaging techniques in the form of power electronics building blocks has emerged as a new concept in the area of power electronics. As a result, it has been envisioned that the packaging of three-dimensional high-density multichip modules (MCMs) can meet the requirement for future power electronics systems. However, the conventional wirebond interconnected power devices are excluded from three-dimensional MCMs because of their large size, limited thermal management, and incompatible processing techniques. On the other hand, advanced solder joint area-array technologies, such as flip-chip technology, has emerged in microelectronics industry due to increased speed, higher packaging density, and performance, improved reliability and low cost these technologies offer. With all these benefits to offer, solder joint area-array technology has yet to be implemented for power electronics packaging. Therefore, the first objective of this study is to design and develop a solder joint area-array interconnection technique for power chips. Solder joint reliability is a major concern for area array technologies and power chip interconnection, thus the second objective of this study is to evaluate solder joint reliability, investigate the fatigue failure behavior of solder joint and improve solder joint reliability by developing a new solder bumping process for improved solder joint geometry, underfilling solder joint with encapsulant and applying flexible substrate in the assembly. The third objective is the implementation of solder joint interconnection technique in developing chip-scale power packages and a three-dimensional integrated power electronics module structure. Solder joint area array interconnection for power chips has been designed with the considerations of parasitic resistance and inductance reduction, current handling capability, thermal management, reliability improvement and manufacturability. A new solder joint fabrication process, which is able to produce high standoff hourglass-shaped solder joint that consists of an inner cap, middle ball and outer cap, as well as the conventional solder bumping process have been successfully developed for power chips by using stencil printing. This solder bumping technology is compatible with the existing surface-mount assembly operations and potentially low cost. The fabricated solder joints have been characterized for their structure integrity, mechanical strength and electrical performances. Solder joint reliability has been improved by optimizing solder joint geometry, underfilling flipped power chip and utilizing compliant substrate. Solder joint reliability was evaluated using accelerated temperate cycling and adhesion tests. The interfaces of the triple-stacked solder joints were examined using scanning electron microscopy (SEM) and energy dispersive X-ray analysis (EDX) for the integrity of the joint. Acoustic microscopy imaging (nondestructive evaluation) was utilized to examine the quality of the bonded interfaces and to detect cracks and other defects before and during accelerated fatigue tests. Adhesion strength of both single bump barrel-shaped and stacked hourglass-shaped solder joints to bonding pads was characterized and analyzed. It was found that stacked hourglass-shaped solder joint have higher fracture stress than barrel-shaped solder joint. This verifies that hourglass-shaped solder joint has lower stress singularity at the interface between the solder bump and the silicon die as well as at the interface between the solder bump and substrate than barrel-shaped solder joint, especially around the corners of the interfaces. Furthermore, the adhesion strength of barrel-shaped solder joint decreases much faster than that of high standoff hourglass-shaped solder joint under temperature cycling, which indicates that the latter has high reliability than the former. Our accelerated temperature cycling test clearly shows that solder joint fatigue failure process consists of three phases: crack initiation, crack propagation and catastrophic failure. Solder joint geometry, underfilling and substrate flexibility were proved to affect solder joint reliability. The effects of solder joint shape and standoff height on reliability have been systematically studied experimentally for the first time. Our experimental results indicated that both hourglass shape and great standoff height could improve solder joint fatigue lifetime, with standoff height being the more effective factor. The fatigue lifetime of high standoff hourglass-shaped solder joint is improved mainly by prolonged crack propagation time, with slight improvement in crack initiation time. Experimental data suggested that shape is the dominant factor affecting crack initiation time while standoff height is the major factor influencing crack propagation time. Underfilling and flexible substrate improved the lifetime of both barrel and hourglass-shaped solder joints. The effect of underfill on solder joint reliability is well known in microelectronics packaging field. However, for the first time, it is reported in this study that flex substrate could improve solder joint reliability. It has been found that flex substrate bucks during temperature cycling and thus reduces thermal strain in solder joints, which in turn improves solder joint fatigue lifetime. Chip scale packaging can enable a few very important concepts and advantages in power electronics packaging. It offers high silicon to package footprint ratio, provides a known good die solution to power chips, improves electrical as well as thermal performance and creates an opportunity for power component standardization. Two kinds of chip-scale power packages have been developed in this research. One is called cavity down flip chip on flex; the other is termed Die Dimensional Ball Grid Array (D2BGA). Both utilize solder joint as chip-level interconnection. Electrical tests show that the VCE(sat) of the high speed IGBT chip-scale packages is improved by 20% to 30% by eliminating the device¡¯s wirebonds and other external interconnections, such as leadframe. Double-sided cooling is realized in these CSPs. Temperature cycling test shows that the CSPs are reliable. Integrated power electronics modules (IPEMs) are envisioned as integrated power modules consisting of power semiconductor devices, power integrated circuits, sensors, and protection circuits for a wide range of power electronics applications, such as inverters for motor drives and converters for power processing equipment. We have developed a three-dimensional approach, termed flip chip on flex (FCOF), for packaging high-performance IPEMs. The new concept is based on the use of solder joint (D2BGA chip scale package), not bonding wires, to interconnect power devices. This packaging approach has the potential to produce modules having superior electrical and thermal performance and improved reliability. We have demonstrated the feasibility of this approach by constructing half-bridge converters (consisting of two IGBTs, two power diodes, and a simple gate driver circuitry) which have been successfully tested at power levels over 30 kW. Switching tests have shown that parasitic inductance of the FCOF module has been reduced by 40% to 50% over conventional wire bond power modules. Better thermal management can be achieved in this three-dimensional power module structure. Compared with the state-of-the-art half-bridge power modules, the volume of the half-bridge FCOF power module is reduced by at least 65%. Reliability test shows that this flip chip on flex power module structure is potentially more reliable than wire bond power module. / Ph. D.

With the potential to improve upon silicon (Si ) based power electronics exhausted, the push for improvement now lies with wide bandgap (WBG) materials like gallium nitride (GaN). With a larger bandgap, higher electron mobility, and higher electrical field strength than Si, GaN high electron mobility transistors (HEMTs) can have lower on-state losses and higher switching frequencies in a smaller package. This makes GaN HEMTs an attractive choice for compact, high efficiency power devices. However, the package designs used for Si cannot be used for GaN HEMTs, requiring novel, chip-scale designs that are optimized for low electrical parasitics and low thermal resistance. Recent Center for Power Electronics (CPES) research culminated in a printed circuit board-direct bonded copper (PCB-DBC) hybrid package to house a 650 V, 150 A GaN HEMT. Called the PCB-Interposer-on-DBC package, it utilizes a DBC for heat extraction while using vertical pin interconnects to minimize electrical parasitics. Previous work did not investigate the design's locations of expected failure or reliability. With thermally generated mechanical fatigue a consistent cause of electronics failure, it must be investigated for the design to move beyond the prototyping phase. Thermo-mechanical fatigue failure is the brittle fracture of bonds caused by thermally induced warpage. The thermal warpage is the consequence of the bonded package components having a coefficient of expansion (CTE) mismatch while being subjected to temperature changes during operation. Multiphysics simulation software have previously quantified the fatigue placed on bonds exposed to these cyclic conditions, with a common metric being the volume-averaged inelastic strain energy density gained per cycle (ΔWavg). ΔWavg can identify which bonds are subjected to the greatest amount of fatigue and will thus fail first, and then quantify the effect of design alterations on those vulnerable bonds. A common design alteration seen in solder ball packaging is adding a polymeric material that encapsulates the bonds. If the polymer has a CTE like that of the package substrates and an elastic modulus (E) exceeding 1 GPa, it constrains the thermal warpage and lowers bond fatigue. This thesis uses thermo-mechanical simulations to provide evidence on which bonds fail first in the package, and that material-based methods of fatigue reduction used in solder ball packing apply to this novel package. Chapter 1 explains how a desire to reduce the cost and increase the performance of electric vehicles led to the development of the PCB-Interposer-on-DBC design, and that the package's response to thermo-mechanical fatigue is unknown. The concepts of thermo-mechanical fatigue and using encapsulants to reduce it are established, along with how simulations are used to study said fatigue. Chapter 2 serves two purposes, the first being an explanation of the simulation settings and metrics used to establish the quality and assumptions used, and the second being a beginners guide on how to create these simulations. Chapter 3 identifies the most probable locations of initial package failure and identifies what encapsulants minimize ΔWavg on those locations. The sintered silver bond expected to fail first is the Internal Gate bond, and an encapsulant with the maximum possible E and 8 ppm/°C minimizes ΔWavg. The Sn60Pb40 bond expected to fail first is the External Source 4 bond and using an encapsulant with the maximum possible E and a CTE of 24 ppm/°C minimizes ΔWavg. While ΔWavg cannot determine which of the two bonds fails first as they are made of different materials, the Internal Gate is prioritized as it has a higher per-cycle fatigue and to prevent loss of the gate signal. Chapter 4 demonstrates how to perform a brief encapsulant study while ranking the expected cycles to failure when using four different encapsulant options. The first two options are to use no encapsulant or silicone gel. As the elastic modulus of silicone gels are too low to restrict or couple the thermally generated warpage, using silicone gel results in a ΔWavg comparable to using no encapsulant. The rigid encapsulant with the properties most like the optimal encapsulant identified for Internal Gate has the lowest ΔWavg¬ of the encapsulants tested. Guidelines are established for what properties an encapsulant must have to outperform said rigid encapsulant. This work uses simulations to provide evidence that encapsulant methods used in ball grid array (BGA) packaging to reduce fatigue apply to a novel GaN HEMT package. By identifying the first-failure locations of the package, establishing what existing encapsulant should be used, and what encapsulation it should eventually be replaced with, these results provide the groundwork for both experimental temperatures cycling and more complex simulations. Such work fills the gap in understanding the reliable lifetime and common failure mechanisms of the PCB-Interposer-on-DBC package. / Master of Science / In modern engineering, the cause of failure in a well-designed electronic device is typically not a single event. Rather, it is the culmination of many smaller events that each cause a minor amount of damage. This cycle of repeated, minor damage is called fatigue. When working with power or IC electronics, the most common type of fatigue occurs due to the device's changing temperature. Electronics undergo continuously changing temperatures due to the environment and their own energy losses, causing repeated cycles of heating and cooling. All materials expand upon heating and contract upon cooling , and the magnitude of this change is the coefficient of thermal expansion (CTE). Electronic devices are comprised of dissimilar materials, so disparate components will expand and contract at different rates. Holding these disparate materials together are bonds, which in the process of holding this warped structure together, also deform. This deformation causes permanent damage, which accumulates in the bonds until they break. As these bonds often serve as pathways for the electrical signal or heat extraction, their failure either degrades or breaks the electrical devices. While preventing bond fatigue is impractical, there are strategies to extend the operating lifetime. A common option used elsewhere is to encase the bonds with a polymer. If the polymer's properties are carefully selected, they can reduce the structural warpage, thereby reducing the fatigue on the bonds. Previous Center for Power Electronics (CPES) research has culminated in a new electronics device called the Printed Circuit Board-Interposer-on-Direct Bonded Copper package (PCB-Interposer-on-DBC package). While general trends suggest which bonds will fail first and what kind of polymers reduce fatigue, this information has not yet been confirmed. This thesis uses computer simulations to identify which bonds will likely fail first, and to provide evidence that existing methods for reducing fatigue are viable for this unique package. The simulations work by subjecting a 3D model to a cycle of heating and cooling, called a temperature cycle, and quantifying the damage sustained by the bonds for every cycle. Chapter 1 describes the relevant details leading to this package design, the importance of thermo-mechanical reliability in the design of electronics, and how to use simulation software to quantify reductions in bond fatigue. Chapter 2 explains how to set up these simulations and evaluate their quality. Chapter 3 identifies the initial locations of package failure and identifies what are the most optimal encapsulants to use. Chapter 4 identifies what existing encapsulant will maximize the package lifetime in experimental temperature cycling.

This research is focused on the processing of an innovative three-dimensional packaging architecture for power electronics building blocks with soldered device interconnections and subsequent characterization of the module's critical interfaces. A low-cost approach termed metal posts interconnected parallel plate structure (MPIPPS) was developed for packaging high-performance modules of power electronics building blocks (PEBB). The new concept implemented direct bonding of copper posts, not wire bonding of fine aluminum wires, to interconnect power devices as well as joining the different circuit planes together. We have demonstrated the feasibility of this packaging approach by constructing PEBB modules (consisting of Insulated Gate Bipolar Transistors (IGBTs), diodes, and a few gate driver elements and passive components). In the 1st phase of module fabrication with IGBTs with Si₃N₄ passivation, we had successfully fabricated packaged devices and modules using the MPIPPS technique. These modules were tested electrically and thermally, and they operated at pulse-switch and high power stages up to 6kW. However, in the 2nd phase of module fabrication with polyimide passivated devices, we experienced significant yield problems due to metallization difficulties of these devices. The under-bump metallurgy scheme for the development of a solderable interface involved sputtering of Ti-Ni-Cu and Cr-Cu, and an electroless deposition of Zn-Ni-Au metallization. The metallization process produced excellent yield in the case of Si₃N₄ passivated devices. However, under the same metallization schemes, devices with a polyimide passivation exhibited inconsistent electrical contact resistance. We found that organic contaminants such as hydrocarbons remain in the form of thin monolayers on the surface, even in the case of as-received devices from the manufacturer. Moreover, in the case of polyimide passivated devices, plasma cleaning introduced a few carbon constituents on the surface, which was not observed in the case of Si₃N₄ passivated devices. X-Ray Photoelectron Spectroscopy (XPS) Spectra showed evidence of possible carbon contaminants, such as carbide (~282.9eV) and graphite (~284.3eV) on the surface at binding energies below the binding energy of the hydrocarbon peak (C 1s at 285eV). Whereas above the hydrocarbon peak energy level, carbon-nitrogen compounds, single bond carbon compounds (~285.9eV) and double bond carbon compounds (~288.5eV) were evident. The majority of the carbon composition on the pad surface was associated with hydrocarbons, which were hydrophobic in nature, thus making the device contact pad less wettable. XPS data showed that, after the plasma cleaning process, absorbed monolayers on the Si₃N₄ passivated and polyimide passivated surfaces consisted of different chemical compositions and accordingly, the attraction forces of these absorbed layers are also different, which affects the bonding properties of the subsequent metallization, resulting in different contact resistances. On the other hand, with an electroless Zn-Ni-Au deposition, it was found that the polyimide passivation on the devices degraded due to due alkaline exposure in the plating baths, thus lowering the device breakdown voltage significantly. Furthermore, interfacial thermal resistances of solder preform, solder paste and silver epoxy (between the power module and the heat spreader) were characterized for process optimization. Void content at the resulting interface was found to be dependent on the flux content and flux activity. Solder preform with no-clean flux, reflowed in nitrogen results in the least resistant and minimized void-content interface. It is most likely that the flux added to the preform had a higher fluxing action than the flux contained in the solder paste. On the other hand, the outgassing of the entrapped flux profoundly affects the void formation and a lower void content indicates a lesser amount of trapped flux. In the case of a solder paste, the flux is in direct contact with the surface oxide of the powders and the surface to be soldered. Consequently, during reflow, any residual oxide can be expected to have some flux adhered to it. In the case of solder preform with added flux, the higher activity flux eliminated the oxide more rapidly and more thoroughly, thus leaving fewer spots for the flux to adhere to. Void contents in all cases of nitrogen reflow are consistently lower than the air-reflowed samples. Silver epoxy with a higher thermal conductivity (60W/mK) than Pb-Sn eutectic solder did not produce low-resistance interfaces. We found that thermal conductivity of the interface material is not the most crucial factor in reducing thermal resistance, rather it is the contact thermal resistance of the interfaces, which constitutes the largest part of the total interfacial thermal resistance. Process optimization with applied pressure and nitrogen reflow resulted in a significant lowering of contact resistance (from 0.55°C/W to 0.25°C/W) for the solder preform interfaces. We concluded that contact resistance needs to be duly accounted for in thermal modeling for an accurate representation of an interface; at the same time, the module attachment process must be tailored to reduce contact resistance for improved thermal management. / Ph. D.

To reduce electronics packaging lead time and potentially to reduce manufacturing cost, an innovative packaging process targeting rapid package prototyping (RPP) has been developed. The developed RPP process, which is based on a data-driven chip-first approach, provides electrical functionality as well as form factors for micro-systems packages. The key component of the RPP process is the nano-particle silver (NPS) interconnect. However, NPS has not yet been adequately proven for use in electronics packaging applications. Moreover, its adhesion to electronics packaging materials such as polyimide, benzocyclobutene (BCB), copper, and aluminum is found to be weak. Thus, improving the adhesion strength of NPS will be a key issue for reliable package prototypes with NPS interconnects. In this research, the adhesion of NPS to substrate materials is found to be attributed to particle adhesion and more specifically, van der Waals forces. An adhesion model based on the van der Waals force is suggested in order to predict NPS adhesion strength to packaging materials. A new adhesion test method that is based on a die shear test and a button shear test is developed to validate the NPS adhesion prediction model. The newly developed adhesion test method is generic in nature and can be extended to other thin films' adhesion tests. The NPS adhesion model provides a general and explicit relation between NPS tensile bond strength and adhesion factors such as substrate hardness, adhesion distance, van der Waals constant, and particle diameter. The NPS adhesion model is verified as a first order adhesion model using experimental data from seventeen packaging materials. Substrate hardness is identified as a primary factor in NPS adhesion. Adhesion distance and van der Waals constant are also significant in organic and inorganic materials. Diffusion or other interfacial reaction between NPS and metal substrates such as copper and silver seems to exist. Finally, guidelines to improve the adhesion strength of NPS are suggested based on the adhesion model and on external adhesion factors such as Silane coupling agents and plasma treatment.