<p> 3D printing has established itself as a critical tool for manufacturing in all areas. It has evolved from a purely rapid prototyping technique into a feasible process for large-scale processing. A wide variety of 3D printing processes exist across an extreme range of size, from meters to nanometers. Much of the current technological advances come from pushing fabrication techniques to smaller and smaller scales. For 3D printing this has led to the rise of two-photon polymerization, a direct laser writing process with submicron structuring capabilities. Two-photon polymerization has proven its worth as a nanoscale 3D fabrication technique but is often considered slow and expensive, two undesirable qualities for high throughput manufacturing. Parallelization methods such as projection lithography are potential solutions to increasing the throughput capabilities of two-photon polymerization 3D printing. Additionally, the drive for further reducing the print size has inspired printing resolution enhancing strategies in two-photon polymerization printing by processes such as stimulated emission depletion (STED) and other STED-inspired pathways. This work will explore avenues for improving two-photon polymerization printing throughput and resolution.</p> <p> First, a two-photon polymerization printing system is constructed with a secondary laser for controlling polymerization inhibition. Through a STED process, a 65 nm wide printed line feature was achieved. Alongside this, a characterization and verification methodology for choosing new photoinitiator molecules for similar inhibition lithography processes is presented. Through implementation of tests such as Z-scan, fluorescence depletion, ultrafast transient spectroscopy and UV-Vis absorption and fluorescence measurements a promising new photoinitiator with 5-factor improvement in printing efficiency is found. </p> <p> Second, a projection lithography scheme is developed for rapid two-photon 3D printing. A digital micro-mirror device (DMD) is utilized for dynamic pattern generation and the effects of its dispersion properties are considered. Through a spatiotemporal focusing process, continuous 3D printing is achieved at vertical prints speeds of 1 mm s-1. Simulations performed representing this rapid printing process indicate a ~1 µm layer print feature size for large areas of exposure. Comparably, a printed vertical feature size of ~ 1 µm was achieved. Lateral feature sizes ~200 nm were also demonstrated in fabrication. A variety of complex 3D structures are printed for demonstration of the spatiotemporal focusing projection lithography process including millimeter scale objects with micrometer scale 3D features.</p> <p> Finally, resolution enhancing strategies are implemented into the continuous, projection two-photon lithography technique. An investigation of the inhibition properties of a variety of photoinitiator systems for inhibiting polymerization achieved with low repetition rate laser exposure is presented. A planar polymerization inhibiting region is generated by creating a light sheet propagating perpendicularly to the projection printing plane. </p>

<p dir="ltr">Human-robotics teaming (HRT) has many highly impactful applications in industry, medical, rehabilitation, military, mixed reality, etc. High quality sensing technologies and communications are inevitable for the HRT development. Many commercial sensors, such as vision-based, audio-based and proximity sensors, are usually rigid and difficult for conformable and large-scale integration. Imperceptible soft sensing devices feasible for human/robot integration with high compliance are attractive for the HRT applications. In addition, ubiquitous sensing with good robustness, self-powered capability, high fidelity, and high SNR are desirable for future HRT.</p><p dir="ltr">This dissertation presents a comprehensive study of SITS theory, ink-based materials, scalable manufacturing methods to develop SITS devices for various applications, including spray coated SITS for human pulse analysis and robotic control, fabric smart glove for objects recognition, and plant triboelectric skin powered IoT sensing system. We develop the SITS theory and propose design strategies for high-performance SITS devices. We study the ink-based materials and scalable manufacturing methods for SITS. We also conduct materials modifications, device configuration and system integration to fabricate versatile SITS for different applications. The presented concepts and applications vast from human skin to plant skin, which shows great potentials to implement SITS technology for future HRT system.</p>

The considerable interest in nanomaterials and nanotechnology over the last decade is attributed to Industry's desire for lower cost, more sophisticated devices and the opportunity that nanotechnology presents for scientists to explore the fundamental properties of nature at near atomic levels. In pursuit of these goals, researchers around the world have worked to both perfect existing technologies and also develop new nano-fabrication methods; however, no technique exists that is capable of producing complex, 2D and 3D nano-sized features of arbitrary shape, with smooth walls, and at low cost. This in part is due to two important limitations of current nanofabrication methods. First, 3D geometry is difficult if not impossible to fabricate, often requiring multiple lithography steps that are both expensive and do not scale well to industrial level fabrication requirements. Second, as feature sizes shrink into the nano-domain, it becomes increasingly difficult to accurately maintain those features over large depths and heights. The ability to produce these structures affordably and with high precision is critically important to a number of existing and emerging technologies such as metamaterials, nano-fluidics, nano-imprint lithography, and more. Summary To overcome these limitations, this study developed a novel and efficient method to etch complex 2D and 3D geometry in silicon with controllable sub-micron to nano-sized features with aspect ratios in excess of 500:1. This study utilized Metal-assisted Chemical Etching (MaCE) of silicon in conjunction with shape-controlled catalysts to fabricate structures such as 3D cycloids, spirals, sloping channels, and out-of-plane rotational structures. This study focused on taking MaCE from a method to fabricate small pores and silicon nanowires using metal catalyst nanoparticles and discontinuous thin films, to a powerful etching technology that utilizes shaped catalysts to fabricate complex, 3D geometry using a single lithography/etch cycle. The effect of catalyst geometry, etchant composition, and external pinning structures was examined to establish how etching path can be controlled through catalyst shape. The ability to control the rotation angle for out-of-plane rotational structures was established to show a linear dependence on catalyst arm length and an inverse relationship with arm width. A plastic deformation model of these structures established a minimum pressure gradient across the catalyst of 0.4 - 0.6 MPa. To establish the cause of catalyst motion in MaCE, the pressure gradient data was combined with force-displacement curves and results from specialized EBL patterns to show that DVLO encompassed forces are the most likely cause of catalyst motion. Lastly, MaCE fabricated templates were combined with electroless deposition of Pd to demonstrate the bottom-up filling of MaCE with sub-20 nm feature resolution. These structures were also used to establish the relationship between rotation angle of spiraling star-shaped catalysts and their center core diameter. Summary In summary, a new method to fabricate 3D nanostructures by top-down etching and bottom-up filling was established along with control over etching path, rotation angle, and etch depth. Out-of-plane rotational catalysts were designed and a new model for catalyst motion proposed. This research is expected to further the advancement of MaCE as platform for 3D nanofabrication with potential applications in thru-silicon-vias, photonics, nano-imprint lithography, and more.

Recently a periodic surface model was developed to assist geometric construction in computer-aided nano-design. This implicit surface model helps create super-porous nano structures parametrically and support crystal packing. In this thesis, a new approach for pathway search in phase transition simulation of crystal structures is proposed. The approach relies on the interpolation of periodic loci surface models. Respective periodic plane models are reconstructed from the positions of individual atoms at the initial and final states, and surface correspondence is found using a Simulated Annealing-like algorithm. With geometric constraints imposed based on physical and chemical properties of crystals, two surface interpolation methods are used to approximate the intermediate atom positions on the transition pathway in the full search of the minimum energy path. This hybrid approach integrates geometry information in configuration space and physics information to allow for efficient transition pathway search. The methods are demonstrated by examples of FeTi, VO2, and FePt. Additionally, two new particle swarm optimization (PSO) algorithms are developed and applied to crystal structure relaxation of the initial and final states. The PSO algorithms are integrated into the Quantum-Espresso open-source software package and tested against the default Broyden-Fletcher-Goldfarb-Shanno relaxation method.

Nanobelts are a new class of semiconducting metal oxide nanowires with great potential for nanoscale devices. The present research focuses on the manipulation of SnO₂ nanobelts suspended in ethanol using microfluidics and electric fields. Dielectrophoresis (DEP) was demonstrated for the first time on semiconducting metal oxide nanobelts, which also resulted in the fabrication of a multiple nanobelt device. Detailed and direct real-time observations of the wide variety of nanobelt motions induced by DEP forces were conducted using an innovative setup and an inverted optical microscope. High AC electric fields were generated on a gold microelectrode (~ 20 µm gap) array, patterned on glass substrate, and covered by a ~ 10 µm tall PDMS (polydimethylsiloxane) channel, into which the nanobelt suspension was introduced for performing the DEP experiments. Negative DEP (repulsion) of the nanobelts was observed in the low frequency range (< 100 kHz) of the applied voltage, which caused rigid body motion as well as deformation of the nanobelts. In the high frequency range (~ 1 MHz - 10 MHz), positive DEP (attraction) of the nanobelts was observed. Using a parallel plate electrode arrangement, evidence of electrophoresis was also found for DC and low frequency (Hz) voltages. The existence of negative DEP effect is unusual considering the fact that if bulk SnO₂ conductivity and permittivity values are used in combination with ethanol properties to calculate the Clausius Mossotti factor using the simple dipole approximation theory; it predicts positive DEP for most of the frequency range experimentally studied. A fluidic nanobelt alignment technique was studied and used in the fabrication of single nanobelt devices with small electrode gaps. These devices were primarily used for conducting impedance spectroscopy measurements to obtain an estimate of the nanobelt electrical conductivity. Parametric numerical studies were conducted using COMSOL Multiphysics software package to understand the different aspects of the DEP phenomenon in nanobelts. The DEP induced forces and torques were computed using the Maxwell Stress Tensor (MST) approach. The DEP force on the nanobelt was calculated for a range of nanobelt conductivity values. The simulation results indicate that the experimentally observed behavior can be explained if the nanobelt is modeled as having two components: an electrically conductive interior and a nonconductive outer layer surrounding it. This forms the basis for an explanation of the negative DEP observed in SnO₂ nanobelts suspended in ethanol. It is thought that the nonconductive layer is due to depletion of the charge carriers from the nanobelt surface regions. This is consistent with the fact that surface depletion is a commonly observed phenomenon in SnO₂ and other semiconducting metal oxide materials. The major research contribution of this work is that, since nanostructures have large surface areas, surface dominant properties are important. Considering only bulk electrical properties can predict misleading DEP characteristics.

<p>  </p> <p>The development of the semiconductor industry is encountering a giant leap recently as Moorse’s is extended to the next levels. Advanced nanomanufacturing technology is the major challenge in the way. Higher resolution down to a few nanometers as well as higher throughput is always the key. As the optical lithography determines the feature size, the photomask is still in need of a low-cost and high resolution maskless patterning tool. In another aspect, the growing information allows the generation and storage of data at ever faster rates, which has led to the era of big data reaching a heroic amount of 7 zettabytes of total data in 2020. Future growth requires the total shipment of data storage capacity to double roughly every two years or less. For the future generation of magnetic data storage, the bit patterned medium (BPM) in combination with the current heat assisted magnetic recording (HAMR) is expected to increase the areal storage capacity by another order of magnitude by physically isolating magnetic bits at the nanoscale. Electron beam lithography (EBL) as a universal maskless lithography technique shows great resolution but has a high tool cost and low process throughput. Scanning probe lithography (SPL) is another family of nanoscale patterning techniques with low tool cost but the practical throughput is still limited. For example, dip pen nanolithography utilizes an AFM probe as a writing pen in direct patterning, but the ink delivery is limited by the rate of ink’s capillary transport. Other SPLs such as thermal probes with capabilities of 3D fabrication and surface oxidation via chemical reactions are all facing similar limitations in throughput. One way of breaking this limitation is to use parallel writing with millions of probes which also faces uniformity problems. </p> <p>In this Ph.D. dissertation, we report our Surfing Scanning Probe lithography (SSPL) method which can boost the scanning speed of SPL by several orders of magnitudes at a low cost by using a hydro-aero-dynamic scanning scheme. We use a homemade patterning head to continuously scan over a partially-wet spinning substrate at a linear speed of meters per second. The head carries several metallic tips which emit electrons and induce electrochemical reactions inside a gap of 10 nm scale. We use a liquid phase precursor and deliver it using the near-field electrospinning method and microfluid structures during the fast patterning. The best linewidth demonstrated is about 15 nm in full-width half maximum (FWHM) which can be further improved using smaller scanning gaps and sharp probe tips. Besides direct writing with a liquid precursor, SSPL can work with gas precursors as well enabled by nano plasma. The rate of material deposition is much high than conventional SPL. The SSPL system is a low-cost nanopatterning technology to produce patterns at high throughput and high resolution.</p>

No description available.

<p>Neuromorphic computing endeavors to develop computational systems capable of emulating the brain’s capacity to execute intricate tasks concurrently and with remarkable energy efficiency. By utilizing new bioinspired computing architectures, these systems have the potential to revolutionize high-performance computing and enable local, low-energy computing for sensors and robots. Organic and soft materials are particularly attractive for neuromorphic computing as they offer biocompatibility, low-energy switching, and excellent tunability at a relatively low cost. Additionally, organic materials provide physical flexibility, large-area fabrication, and printability.</p><p>This doctoral dissertation showcases the research conducted in fabricating a comprehensive spiking organic neuron, which serves as the fundamental constituent of a circuit system for neuromorphic computing. The major contribution of this dissertation is the development of the organic, flexible neuron composed of spiking synapses and somas utilizing ultra-low voltage organic field-effect transistors (OFETs) for information processing. The synaptic and somatic circuits are implemented using physically flexible and biocompatible organic electronics necessary to realize the Polymer Neuromorphic Circuitry. An Axon-Hillock (AH) somatic circuit was fabricated and analyzed, followed by the adaptation of a log-domain integrator (LDI) synaptic circuit and the fabrication and analysis of a differential-pair integrator (DPI). Finally, a spiking organic neuron was formed by combining two LDI synaptic circuits and one AH synaptic circuit, and its characteristics were thoroughly examined. This is the first demonstration of the fabrication of an entire neuron using solid-state organic materials over a flexible substrate with integrated complementary OFETs and capacitors.</p>

Traditional fabrication methods used to manufacture biosensors for physiological, therapeutics, or health monitoring purposes are complex and rely on costly materials, which has hindered their adoption as single-use medical devices. The development of a new kind of wearable and implantable electronics relying on inexpensive materials for their manufacturing will pave the way towards the ubiquitous adoption of sticker-like health tracking devices.<div>One of growing and most promising applications for biosensors is the continuous health monitoring using mechanically soft, stretchable sensors. While these healthcare devices showed an excellent compatibility with human tissues, they still need highly trained personnel to perform multi-step, prolonged fabrication for several functioning layers of the device. In this dissertation, I propose low-cost, scalable, simple, and rapid manufacturing techniques to fabricate multifunctional epidermal and implantable sensors to monitor a range of biosignals including heart, muscle, or eye activity to characterizing of biofuids such as sweat. I have also used these devices as an implant to provide heat therapy for muscle regeneration and optical stimulation of neurons using optogenetics. These devices have also combined with those of triboelectric<br>nanogenerators to realize self-powered sensors for monitoring imperceptible mechanical biosignals such as respiratory and pulse rate.</div><div>Food health and safety has also emerged as another important frontier to develop biosensors and improve the human health and quality of life. The recent progresses on detecting microbial activity inside foods or their packages rely on development of highly functional materials. The existing materials for fabrication of food sensors, however,<br>are often costly and toxic for human health or the environment. In this dissertation, I proposed biocompatible food sensors using protein/PCL microfibers to reinforce the protein microfibrous structure in humid conditions and exploit their excellent hygroscopic properties to sense biogenic gas, as an indicator for early detection of food spoilage. Finally, my battery-free food sensors are capable of monitoring food safety with no need of extra measurement devices. Collectively, this dissertation proposes cost-effective solutions to solve human health issues, enabled by developing low-cost, functional materials and exploiting simple fabrication techniques.<br></div>

Today, the growing and aging population, and the rise of new global threats on human health puts an increasing demand on the healthcare system and calls for preventive actions. To make existing medical treatments more efficient and widely accessible and to prevent the emergence of new threats such as drug-resistant bacteria, improved diagnostic technologies are needed. Potential solutions to address these medical challenges could come from the development of novel lab-on-chip (LoC) for point-of-care (PoC) diagnostics. At the same time, the increasing demand for sustainable energy calls for the development of novel approaches for energy conversion and storage systems (ECS), to which micro- and nanotechnologies could also contribute. This thesis has for objective to contribute to these developments and presents the results of interdisciplinary research at the crossing of three disciplines of physics and engineering: electrokinetic transport in fluids, manufacturing of micro- and nanofluidic systems, and surface control and modification. By combining knowledge from each of these disciplines, novel solutions and functionalities were developed at the macro-, micro- and nanoscale, towards applications in PoC diagnostics and ECS systems. At the macroscale, electrokinetic transport was applied to the development of a novel PoC sampler for the efficient capture of exhaled breath aerosol onto a microfluidic platform. At the microscale, several methods for polymer micromanufacturing and surface modification were developed. Using direct photolithography in off-stoichiometry thiol-ene (OSTE) polymers, a novel manufacturing method for mold-free rapid prototyping of microfluidic devices was developed. An investigation of the photolithography of OSTE polymers revealed that a novel photopatterning mechanism arises from the off-stoichiometric polymer formulation. Using photografting on OSTE surfaces, a novel surface modification method was developed for the photopatterning of the surface energy. Finally, a novel method was developed for single-step microstructuring and micropatterning of surface energy, using a molecular self-alignment process resulting in spontaneous mimicking, in the replica, of the surface energy of the mold. At the nanoscale, several solutions for the study of electrokinetic transport toward selective biofiltration and energy conversion were developed. A novel, comprehensive model was developed for electrostatic gating of the electrokinetic transport in nanofluidics. A novel method for the manufacturing of electrostatically-gated nanofluidic membranes was developed, using atomic layer deposition (ALD) in deep anodic alumina oxide (AAO) nanopores. Finally, a preliminary investigation of the nanopatterning of OSTE polymers was performed for the manufacturing of polymer nanofluidic devices. / <p>QC 20140509</p> / Rappid / NanoGate / Norosensor