Lithium ion batteries (LIBs) have attracted considerable interest due to their wide range of applications, such as portable electronics, electric vehicles (EVs) and aerospace applications. Particularly, the emergence of a variety of nanostructured materials has driven the development of LIBs towards the next generation, which is featured with high specific energy and large power density. Herein, rolled-up nanotechnology is introduced for the design of strain-released materials as anodes of LIBs. Upon this approach, self-rolled nanostructures can be elegantly combined with different functional materials and form a tubular shape by relaxing the intrinsic strain, thus allowing for enhanced tolerance towards stress cracking. In addition, the hollow tube center efficiently facilitates electrolyte mass flow and accommodates volume variation during cycling. In this context, such structures are promising candidates for electrode materials of LIBs to potentially address their intrinsic issues. This work focuses on the development of superior structures of Si and SnO2 for LIBs based on the rolled-up nanotech. Specifically, Si is the most promising substitute for graphite anodes due to its abundance and high theoretical gravimetric capacity. Combined with the C material, a Si/C self-wound nanomembrane structure is firstly realized. Benefiting from a strain-released tubular shape, the bilayer self-rolled structures exhibit an enhanced electrochemical behavior over commercial Si microparticles. Remarkably, this behavior is further improved by introducing a double-sided carbon coating to form a C/Si/C self-rolled structure. With SnO2 as active material, an intriguing sandwich-stacked structure is studied. Furthermore, this novel structure, with a minimized strain energy due to strain release, exposes more active sites for the electrochemical reactions, and also provides additional channels for fast ion diffusion and electron transport. The electrochemical characterization and morphology evolution reveal the excellent cycling performance and stability of such structures.

Gegenwärtige Bestrebungen materialwissenschaftlicher Forschung beschäftigen sich unter anderem mit der Überführung zweidimensionaler Elemente elektronischer, optischer, plasmonischer oder magnetischer Funktionalität in den dreidimensionalen (3D) Raum. Dieser Ansatz vermag mittels Krümmung und struktureller Topologie bereits vorhandene Eigenschaften abzuändern beziehungsweise neue Funktionalitäten bereitzustellen. Vor allem Vektoreigenschaften wie die Magnetisierung kondensierter Materie lassen sich aufgrund der Brechung der Inversionssymmetrie in gekrümmten Flächen stark beeinflussen. Neben der Entwicklung diverser Vorgänge zur Herstellung 3D magnetischer Gegenstände sind geeignete Untersuchungsmethoden wie beispielsweise tomografische Abbildungen der Magnetisierung von Nöten, die maßgeblich die physikalischen Eigenschaften bestimmen. Die vorliegende Dissertationsschrift befasst sich mit der Abbildung von magnetischen Domänen in 3D gekrümmten Dünnschichten beruhend auf dem Effekt des zirkularen magnetischen Röntgendichroismus (XMCD). Die in diesem Zusammenhang entwickelte magnetische Röntgentomografie (MXT) basierend auf weicher Röntgenmikroskopie stellt eine zu Elektronenholografie und Neutronentomografie komplementäre Methodik dar, welche großes Anwendungspotential in der elementspezifischen Untersuchung magnetischer gekrümmter Flächen mit örtlicher Auflösung im Nanometerbereich aufweist. Die Schwierigkeit der Interpretation von Abbildungen magnetischer Strukturen in gekrümmten Flächen rührt von der Dreidimensionalität und der Vektoreigenschaft der Magnetisierung her. Die hierzu notwendigen Kenntnisse sind anhand von zwei topologisch verschiedenen Flächen in Form hemisphärischer Kappen und hohler Zylinder erschlossen worden. Die praktische Anwendung von MXT ist abschließend anhand der Rekonstruktion magnetischer Domänen in aufgerollten Dünnschichten mit zylindrischer Form verdeutlicht. / One of the foci of modern materials sciences is set on expanding conventional two-dimensional electronic, photonic, plasmonic and magnetic devices into the third dimension. This approach provides means to modify conventional or to launch novel functionalities by tailoring curvature and three-dimensional (3D) shape. The degree of effect is particularly high for vector properties like the magnetization due to an emergent inversion symmetry breaking. Aside from capabilities to design and synthesize 3D magnetic architectures, proper characterization methods, such as magnetic tomographic imaging techniques, need to be developed to obtain a thorough understanding of the system’s response under external stimuli. The main objective of this thesis is to develop a visualization technique that provides nanometer spatial resolution to image the peculiarities of the magnetic domain patterns on extended 3D curved surfaces. The proposed and realized concept of magnetic soft X-ray tomography (MXT), based on the X-ray magnetic circular dichroism (XMCD) effect with soft X-ray microscopies, has the potential to become a powerful tool to investigate element specifically an entirely new class of 3D magnetic objects with virtually any shape and magnetization. Imaging curved surfaces meets the challenge of three-dimensionality and requires a profound understanding of the recorded XMCD contrast. These experiences are gained by visualizing magnetic domain patterns on two distinct 3D curved surfaces, namely magnetic cap structures and rolled-up magnetic nanomembranes with cylindrical shape. The capability of MXT is demonstrated by reconstructing the magnetic domain patterns on 3D curved surfaces resembling hollow cylindrical objects.

Optical microcavities (OMs) are receiving increasing attention owing to their potential applications ranging from cavity quantum electrodynamics, optical detection to photonic devices. Recently, rolled-up structures have been demonstrated as OMs which have gained considerable attention owing to their excellent customizability. To fully exploit this customizability, asymmetric and topological rolled-up OMs are proposed and investigated in addition to conventional rolled-up OMs in this thesis. By doing so, novel phenomena and applications are demonstrated in OMs. The fabrication of conventional rolled-up OMs is presented in details. Then, dynamic mode tuning by a near-field probe is performed on a conventional rolled-up OM. Next, mode splitting in rolled-up OMs is investigated. The effect of single nanoparticles on mode splitting in a rolled-up OM is studied. Because of a non-synchronized oscillating shift for different azimuthal split modes induced by a single nanoparticle at different positions, the position of the nanoparticle can be determined on the rolled-up OM. Moreover, asymmetric rolled-up OMs are fabricated for the purpose of introducing coupling between spin and orbital angular momenta (SOC) of light into OMs. Elliptically polarized modes are observed due to the SOC of light. Modes with an elliptical polarization can also be modeled as coupling between the linearly polarized TE and TM mode in asymmetric rolled-up OMs. Furthermore, by adding a helical geometry to rolled-up structures, Berry phase of light is introduced into OMs. A -π Berry phase is generated for light in topological rolled-up OMs so that modes have a half-integer number of wavelengths. In order to obtain a deeper understanding for existing rolled-up OMs and to develop the new type of rolled-up OMs, complete theoretical models are also presented in this thesis.

Following the intensive development of isolated (i.e., not coupled with on-chip waveguide) vertically rolled-up microtube ring resonators (VRU-MRRs) for both active and passive applications, a variety of microtube-based devices has been realized. These include microcavity lasers, optical sensors, directional couplers, and active elements in lab-on-a-chip devices. To provide more advanced and complex functionality, the focus of tubular geometry research is now shifting toward (i) refined vertical light transfer in 3D stacks of multiple photonic layers and (ii) to make microfluidic cooling system in the integrated optoelectronic system. Based on this motivation, this PhD research is devoted to the demonstration and the implementation of monolithic integration of VRU-MRRs with photonic waveguides for 3D photonic integration and their optofluidic applications. Prior to integration, high-quality isolated VRU-MRRs on the flat Si substrate are firstly fabricated by the controlled release of differentially strained titanium-dioxide (TiO2) bilayered nanomembranes. The fabricated microtubes support resonance modes for both telecom and visible photonics. The outcome of the isolated VRU-MRRs is a record high Q (≈3.8×10^3) in the telecom wavelength range with optimum tapered optical fiber resonator interaction. To further study the optical modes in the visible and near infrared spectral range, μPL spectroscopy is performed on the isolated VRU-MRRs, which are activated by entrapping various sizes of luminescent nanoparticles (NPs) within the windings of rolled-up nanomembranes based on a flexible, robust and economical method. Moreover, it is realized for the first time, in addition to serving as light sources that NPs-aggregated in isolated VRU-MRRs can produce an optical potential well that can be used to trap optical resonant modes. After achieving all the required parameters for creating a high-quality TiO2 VRU-MRR, the monolithic integration of VRU-MRRs with Si nanophotonic waveguides is experimentally demonstrated, exhibiting a significant step toward 3D photonic integration. The on-chip integration is realized by rolling up 2D pre-strained TiO2 nanomembranes into 3D VRU-MRRs on a microchip which seamlessly expanded over several integrated waveguides. In this intriguing vertical transmission configuration, resonant filtering of optical signals at telecom wavelengths is demonstrated based on ultra-smooth and subwavelength thick-walled VRU-MRRs. Finally, to illustrate the usefulness of the fully integrated VRU-MRRs with photonic waveguides, optofluidic functionalities of the integrated system is investigated. In this work, two methods are performed to explore optofluidic applications of the integrated system. First, the hollow core of an integrated VRU-MRR is uniquely filled with a liquid solution (purified water) by setting one end of the VRU-MRRs in contact with a droplet placed onto the photonic chip via a glass capillary. Second, the outside of an integrated VRU-MRR is fully covered with a big droplet of liquid. Both techniques lead to a significant shift in the WGMs (Δλ≈46 nm). A maximum sensitivity of 140 nm/refractive index unit, is achieved. The achievements of this PhD research open up fascinating opportunities for the realization of massively parallel optofluidic microsystems with more functionality and flexibility for analysis of biomaterials in lab-on-a-tube systems on single chips. It also demonstrates 3D photonic integration in which optical interconnects between multiple photonic layers are required.

Medical devices have made a big step forward in the past decades. One of the most noticeable medical events of the twenties century was the development of long-lasting, wireless electronic implants such as identification tags, pacemakers and neuronal stimulators. These devices were only made possible after the development of small scale radio frequency electronics. Small radio electronic circuits provided a way to operate in both transmission and reception mode allowing an implant to communicate with an external world from inside a living organism. Bidirectional communication is a vital feature that has been increasingly implemented in similar systems to continuously record biological parameters, to remotely configure the implant, or to wirelessly stimulate internal organs. Further miniaturisation of implantable devices to make the operation of the device more comfortable for the patient requires rethinking of the whole radio system concept making it both power efficient and of high performance. Nowadays, high data throughput, large bandwidth, and long term operation requires new radio systems to operate at UHF (ultra-high frequency) bands as this is the most suitable for implantable applications. For instance, the MICS (Medical Implant Communication System) band was introduced for the communication with implantable devices. However, this band could only enable communication at low data rates. This was acceptable for the transmission of telemetry data such as heart beat rate, respiratory and temperature with sub Mbps rates. Novel developments such as neuronal and prosthetic implants require significantly higher data rates more than 10 Mbps that can be achieved with large bandwidth communicating systems operating at higher frequencies in a GHz range. Higher operating frequency would also resolve a strong issue of MICS devices, namely the scale of implants defined by dimensions of antennas used at this band. Operation at 2.4 GHz ISM band was recognized to be the most adequate as it has a moderate absorption in the human body providing a compromise between an antenna/implant scale and a total power efficiency of the communicating system. This thesis addresses a key challenge of implantable radio communicating systems namely an efficient and small scale antenna design which allows a high yield fabrication in a microelectronic fashion. It was demonstrated that a helical antenna design allows the designer to precisely tune the operating frequency, input impedance, and bandwidth by changing the geometry of a self-assembled 3D structure defined by an initial 2D planar layout. Novel stimuli responsive materials were synthesized, and the rolled-up technology was explored for fabrication of 5.5-mm-long helical antenna arrays operating in ISM bands at 5.8 and 2.4 GHz. Characterization and various applications of the fabricated antennas are successfully demonstrated in the thesis.

Optoplasmonic microtube cavities, the combination of dielectric microcavities and noble metal layers, allow for the interactions between photonic modes and surface plasmons, leading to several novel phenomena and promising applications. In this thesis, the hybrid modes with different plasmon-types of evanescent field in the optoplasmonic microtube cavities are discussed. The basic physical mechanism for the generation of plasmon-type field is comprehensively investigated based on an effective potential approach. In particular, when the cavity wall becomes ultra-thin, the plasmon-type field can be greatly enhanced, and the hybrid modes are identified as strong photon-plasmon hybrid modes which are experimentally demonstrated in the metal-coated rolled-up microtube cavities. By designing a metal nanocap onto microtube cavities, angle-dependent tuning of hybrid photon-plasmon modes are realized, in which TE and TM polarized modes exhibit inverse tuning trends due to the polarization match/mismatch. And a novel sensing scheme is proposed relying on the intensity ratio change of TE and TM modes instead of conventionally used mode shift. In addition, localized surface plasmon resonances coupled to resonant light is explored by designing a vertical metal nanogap on microtube cavities. Selective coupling of high-order axial modes is demonstrated depending on spatial-location of the metal nanogap. A modified quasi-potential well model based on perturbation theory is developed to explain the selective coupling mechanism. These researches systematically explore the design of optoplasmonic microtube cavities and the mechanism of photon-plasmon coupling therein, which provide a novel platform for the study of both fundamental and applied physics such as the enhanced light-matter interactions and label-free sensing.

Optical microcavities (OMs) are receiving increasing attention owing to their potential applications ranging from cavity quantum electrodynamics, optical detection to photonic devices. Recently, rolled-up structures have been demonstrated as OMs which have gained considerable attention owing to their excellent customizability. To fully exploit this customizability, asymmetric and topological rolled-up OMs are proposed and investigated in addition to conventional rolled-up OMs in this thesis. By doing so, novel phenomena and applications are demonstrated in OMs. The fabrication of conventional rolled-up OMs is presented in details. Then, dynamic mode tuning by a near-field probe is performed on a conventional rolled-up OM. Next, mode splitting in rolled-up OMs is investigated. The effect of single nanoparticles on mode splitting in a rolled-up OM is studied. Because of a non-synchronized oscillating shift for different azimuthal split modes induced by a single nanoparticle at different positions, the position of the nanoparticle can be determined on the rolled-up OM. Moreover, asymmetric rolled-up OMs are fabricated for the purpose of introducing coupling between spin and orbital angular momenta (SOC) of light into OMs. Elliptically polarized modes are observed due to the SOC of light. Modes with an elliptical polarization can also be modeled as coupling between the linearly polarized TE and TM mode in asymmetric rolled-up OMs. Furthermore, by adding a helical geometry to rolled-up structures, Berry phase of light is introduced into OMs. A -π Berry phase is generated for light in topological rolled-up OMs so that modes have a half-integer number of wavelengths. In order to obtain a deeper understanding for existing rolled-up OMs and to develop the new type of rolled-up OMs, complete theoretical models are also presented in this thesis.

The presence of photonic band gap in an arbitrarily shaped photonic structure, particularly structures that are fabricated by exploiting rolled-up nanotechnology, can be understood from the density of optical states. In this thesis, the density of optical states and the local density of optical states in finite-sized photonic structures are calculated using the finite difference time domain method together with a parallelized message passing interface. With this approach, a software package suitable for high-performance computing on multi-platform was published under GNU GPL license. When light is guided to propagate along a rolled-up thin film, whispering gallery mode resonances can be formed in a microtubular structure. Dynamic probing and tuning via a plasmonic nanoparticle-coated glass tip are investigated to demonstrate the transition from dielectric-dielectric to dielectric-plasmonic coupling in the tubular microcavity. The competition of these two coupling mechanisms allow the tuning of the optical cavity modes towards lower and then higher energies in a single coupling system. Moreover, three dimensionally confined higher order axial modes can be selectively coupled and tuned by the glass tip due to their unique spatial distribution of the optical field along the tube axis. In addition, the interaction between sharp optical cavity modes and broad plasmonic modes supported by silver nanoparticles leads to the occurrence of Fano resonance. In particular, Fano resonances occurring at higher-order axial modes has been observed as well. The experimental results are supported by numerical simulations based on the finite difference time domain method. In photonic lattice structures, light propagation behavior can be influenced and defined by the photonic band structure. By designing the unit cell with glide mirror symmetry, topologically protected edge states operating in the visible spectral range have been proposed in two dimensional photonic crystals which can be made of feasible materials. Topological phenomena such as unidirectional waveguiding and/or effective zero refractive index are presented. In addition, a scheme to study topological phase transition in a single photonic crystal device is proposed and studied via unevenly stretching photonic lattice. Moreover, a new method is explored to distinguish the topological phase from the bulk modes. The research presented in this thesis concerns molding the flow of light in specially designed photonic devices for various potential applications. The software package can be used to design and investigate finite-sized photonic structures with an arbitrary shape, which is much faster in terms of computation than other reported techniques and software packages. The rolled-up microcavities can be employed to trap and store light in the way of whispering gallery mode resonances, and the resonant light can be tuned and modulated by a plasmonic nanoparticles-coated glass tip. This research is particularly interesting for optical signal processing, slowing light via Fano resonances, and high sensitive sensing. In addition, the topological photonic crystal design and examination scheme presented in this thesis provide a simplified yet more efficient way to obtain non-trivial topological phase from a tunable photonic crystal that can be verified not only by edge modes but also by bulk modes.:Bibliographic record 1 Abstract 1 LIST OF ABBREVIATIONS and Symbols 3 1 Introduction 9 1.1 Introduction and Motivation 9 1.2 Objectives 11 1.3 Organization of the thesis 12 2 Density of optical states in rolled-up photonic crystals and quasi crystals 15 2.1 Introduction 15 2.1.1 background 17 2.1.2 Infinitely extended ideal photonic crystal 17 2.2 Finite-sized photonic crystal, photonic quasicrystal, and arbitrary photonics structures 20 2.2.1 Numerical algorithm 25 2.2.2 Rolled-up photonic crystals and quasi crystals 30 2.3 Software package 33 2.3.1 Computational performance 33 2.3.2 FPS User interface 35 2.3.3 Detailed tutorial 37 2.3.4 Alternative rolled-up photonic crystals 47 2.3.5 Beyond 3D photonic crystals. 48 2.4 Conclusion 49 3 Rolled-up microesonator 51 3.1 Introduction 51 3.2 Rolled-up microresonators 52 4 Tip-assisted photon-plasmon coupling in three-dimensionally confined microtube cavities 57 4.1 Introduction 57 4.2 Tube and plasmonic particle preparation and characterization 60 4.3 Results and discussion 62 4.4 Axial mode tuning 64 4.5 Fano resonance 65 4.5.1 Background 65 4.5.2 Fano resonance in the tip assisted coupling setup 68 4.6 Conclusion 71 5 Topological photonics 73 5.1 Introduction and motivation 73 5.2 Topological phase transition point 77 5.2.1 Fundamental phase transition point 77 5.2.2 Zero refractive index material 79 5.3 Non-trivial topology in realistic materials 80 6 Topological phase transition in stretchable photonic crystals 85 6.1 Introduction and motivation 85 6.2 SSH model 88 6.3 Photonic crystal 91 6.4 Band structure and end modes of the photonic crystal 99 6.5 Conclusion 101 7 Summary and outlook 103 7.1 Summary 103 7.2 Outlook 104 Bibliography 111 List of figures 127 Publications 133 Acknowledgments 136 Selbständigkeitserklärung 137 Curriculum Vitae 138

Die Menschheit steht vor der großen Herausforderung der Energieversorgung des 21. Jahrhundert. Nirgendwo ist diese noch dringlicher geworden als im Bereich der Energiespeicherung und Umwandlung. Konventionelle Energie kommt hauptsächlich aus fossilen Brennstoffen, die auf der Erde nur begrenzt vorhanden sind, und hat zu einer starken Belastung der Umwelt geführt. Zusätzlich nimmt der Energieverbrauch weiter zu, insbesondere durch die rasante Verbreitung von Fahrzeugen und verschiedener Kundenelektronik wie PCs und Mobiltelefone. Alternative Energiequellen sollten vor einer Energiekrise entwickelt werden. Die Gewinnung erneuerbarer Energie aus Sonne und Wind sind auf jeden Fall sehr wichtig, aber diese Energien sind oft nicht gleichmäßig und andauernd vorhanden. Energiespeichervorrichtungen sind daher von großer Bedeutung, weil sie für eine Stabilisierung der umgewandelten Energie sorgen. Darüber hinaus ist es eine enttäuschende Tatsache, dass der Akku eines Smartphones jeglichen Herstellers heute gerade einen Tag lang ausreicht, und die Nutzer einen zusätzlichen Akku zur Hand haben müssen. Die tragbare Elektronik benötigt dringend Hochleistungsenergiespeicher mit höherer Energiedichte. Der erste Teil der vorliegenden Arbeit beinhaltet Lithium-Ionen-Batterien unter Verwendung von einzelnen aufgerollten Siliziumstrukturen als Anoden, die durch nanotechnologische Methoden hergestellt werden. Eine Lab-on-Chip-Plattform wird für die Untersuchung der elektrochemischen Kinetik, der elektrischen Eigenschaften und die von dem Lithium verursachten strukturellen Veränderungen von einzelnen Siliziumrohrchen als Anoden in einer Lithium-Ionen-Batterie vorgestellt. In dem zweiten Teil wird ein neues Design und die Herstellung von flexiblen on-Chip, Festkörper Mikrosuperkondensatoren auf Basis von MnOx/Au-Multischichten vorgestellt, die mit aktueller Mikroelektronik kompatibel sind. Der Mikrosuperkondensator erzielt eine maximale Energiedichte von 1,75 mW h cm-3 und eine maximale Leistungsdichte von 3,44 W cm-3. Weiterhin wird ein flexibler und faserartig verwebter Superkondensator mit einem Cu-Draht als Substrat vorgestellt. Diese Dissertation wurde im Rahmen des Forschungsprojekts GRK 1215 "Rolled-up Nanotechnologie für on-Chip Energiespeicherung" 2010-2013, finanziell unterstützt von der International Research Training Group (IRTG), und dem PAKT Projekt "Elektrochemische Energiespeicherung in autonomen Systemen, no. 49004401" 2013-2014, angefertigt. Das Ziel der Projekte war die Entwicklung von fortschrittlichen Energiespeichermaterialien für die nächste Generation von Akkus und von flexiblen Superkondensatoren, um das Problem der Energiespeicherung zu addressieren. Hier bedanke ich mich sehr, dass IRTG mir die Möglichkeit angebotet hat, die Forschung in Deutschland stattzufinden. / Human beings are facing the grand energy challenge in the 21st century. Nowhere has this become more urgent than in the area of energy storage and conversion. Conventional energy is based on fossil fuels which are limited on the earth, and has caused extensive environmental pollutions. Additionally, the consumptions of energy are still increasing, especially with the rapid proliferation of vehicles and various consumer electronics like PCs and cell phones. We cannot rely on the earth’s limited legacy forever. Alternative energy resources should be developed before an energy crisis. The developments of renewable conversion energy from solar and wind are very important but these energies are often not even and continuous. Therefore, energy storage devices are of significant importance since they are the one stabilizing the converted energy. In addition, it is a disappointing fact that nowadays a smart phone, no matter of which brand, runs out of power in one day, and users have to carry an extra mobile power pack. Portable electronics demands urgently high-performance energy storage devices with higher energy density. The first part of this work involves lithium-ion micro-batteries utilizing single silicon rolled-up tubes as anodes, which are fabricated by the rolled-up nanotechnology approach. A lab-on-chip electrochemical device platform is presented for probing the electrochemical kinetics, electrical properties and lithium-driven structural changes of a single silicon rolled-up tube as an anode in lithium ion batteries. The second part introduces the new design and fabrication of on chip, all solid-state and flexible micro-supercapacitors based on MnOx/Au multilayers, which are compatible with current microelectronics. The micro-supercapacitor exhibits a maximum energy density of 1.75 mW h cm-3 and a maximum power density of 3.44 W cm-3. Furthermore, a flexible and weavable fiber-like supercapacitor is also demonstrated using Cu wire as substrate. This dissertation was written based on the research project supported by the International Research Training Group (IRTG) GRK 1215 "Rolled-up nanotech for on-chip energy storage" from the year 2010 to 2013 and PAKT project "Electrochemical energy storage in autonomous systems, no. 49004401" from 2013 to 2014. The aim of the projects was to design advanced energy storage materials for next-generation rechargeable batteries and flexible supercapacitors in order to address the energy issue. Here, I am deeply indebted to IRTG for giving me an opportunity to carry out the research project in Germany. September 2014, IFW Dresden, Germany Wenping Si

Rolled-up nanotechnology based on strain-engineering is a powerful tool to manufacture three-dimensional hollow structures made of virtually any kind of material on a large variety of substrates. The aim of this thesis is to address the key features of different on- and off-chip applications of rolled-up microtubes through modification of their basic framework. The modification of the framework pertains to the tubular structure, in particular the diameter of the microtube, and the material which it is made of, hence achieving different functionalities of the final rolled-up structure. The tuning of the microtube diameter which is adjusted to the individual size of an object allows on-chip studies of single cells in artificial narrow cavities, for example. Another modification of the framework is the addition of a catalytic layer which turns the microtube into a self-propelled catalytic micro-engine. Furthermore, the tuneability of the diameter can have applications ranging from nanotools for drilling into cells, to cargo transporters in microfluidic channels. Especially rolled-up microtubes based on low-cost and easy to deposit materials, such as silicon oxides, can enable the exploration of novel systems for several scientific topics. The main objective of this thesis is to combine microfluidic features of rolled-up structures with optical sensor capabilities of silicon oxide microtubes acting as optical ring resonators, and to integrate these into a Lab-on-a-Chip system. Therefore, a new concept of microfluidic integration is developed in order to establish an inexpensive, reliable and reproducible fabrication process which also sustains the optical capabilities of the microtubes. These integrated microtubes act as optofluidic refractrometric sensors which detect changes in the refractive index of analytes using photoluminescence spectroscopy. The thesis concludes with a demonstration of a functional portable sensor device with several integrated optofluidic sensors. / Die auf verspannten Dünnschichten basierende „rolled-up nanotechnologie“ ist eine leistungsfähige Methode um dreidimensionale hohle Strukturen (Mikroröhrchen) aus nahezu jeder Art von Material auf einer großen Vielfalt von Substraten herzustellen. Ausgehend von der Möglichkeit der Skalierung des Röhrchendurchmessers und der Modifikation der Funktionalität des Röhrchens durch Einsatz verschiedener Materialien und Oberflächenfunktionalisierungen kann eine große Anzahl an verschiedenen Anwendungen ermöglicht werden. Eine Anwendung behandelt unter anderem on-chip Studien einzelner Zellen wobei die Mikroröhrchen, an die Größe der Zelle angepasste, Reaktionscontainer darstellen. Eine weitere Modifikation der Funktionalität der Mikroröhrchen kann durch das Aufbringen einer katalytischen Schicht realisiert werden, wodurch das Mikroröhrchen zu einem selbstangetriebenen katalytischen Mikro-Motor wird. Hauptziel dieser Arbeit ist es Mikrometer große optisch aktive Glasröhrchen herzustellen, diese mikrofluidisch zu kontaktieren und als Sensoren in Lab-on-a-Chip Systeme zu integrieren. Die integrierten Glasröhrchen arbeiten als optofluidische Ringresonatoren, welche die Veränderungen des Brechungsindex von Fluiden im inneren des Röhrchens durch Änderungen im Evaneszenzfeld detektieren können. Die Funktionsfähigkeit eines Demonstrators wird mit verschiedenen Flüssigkeiten gezeigt, dabei kommt ein Fotolumineszenz Spektrometer zum Anregen des Evaneszenzfeldes und Auslesen des Signals zum Einsatz. Die entwickelte Integrationsmethode ist eine Basis für ein kostengünstiges, zuverlässiges und reproduzierbares Herstellungsverfahren von optofluidischen Mikrochips basierend auf optisch aktiven Mikroröhrchen.