Stuttgart, Univ., Diss., 2002.

Les gravures par plasma pour les technologies sub 14nm nécessitent de bien contrôler la gravure de couches très minces de l’ordre du nanomètre, tout en contrôlant la dimension latérale des structures gravées au nanomètre près. Pour les gravures espaceurs, 3 nouveaux défis apparaissent. Le premier est d’obtenir une grande sélectivité des matériaux utilisés par rapport au silicium car l’utilisation de couches d’arrêt est proscrite du fait des contraintes dimensionnelles. Les couches à graver deviennent très fines de l’ordre de 5nm à 6nm, et l’épaisseur de la couche réactive est de 3 nm. Le second défi est le contrôle des dommages induits par le plasma sur la couche silicium leurs effets sur les performances du transistor. De plus pour différencier les zones NMOS et PMOS nous utilisons des croissances sur le silicium par épitaxie. Cette technique est très sensible à l’état de surface et à la contamination. Il faut donc laisser une couche de silicium le plus intact possible. Le dernier est le contrôle du retrait du masque dur et de la hauteur des espaceurs. Cela peut entraîner une épitaxie parasite empêchant la réalisation des transistors.Des études préliminaires ont montré l’intérêt d’utiliser des plasmas à bias pulsé couplé à un ajout de tétrachlorure de silicium afin de réduire la consommation et l’endommagement de la couche de silicium. Nous proposons d’évaluer la nouvelle fenêtre de procédé obtenue ainsi que l’impact de ce procédé sur les performances électriques des circuits-intégrés.Une seconde partie de l’étude sera consacré à l’étude d’une approche novatrice de la gravure des espaceurs. Elle consiste dans un premier temps à modifier la couche que nous voulons retirer par un plasma d’ions légers dans un réacteur de gravure conventionnel. Ce plasma implanté est ensuite retiré sélectivement au plasma non modifié par un bain d’acide fluorhydrique. Nous utiliserons des analyses FTIR, XPS et SIMS afin de caractériser les matériaux modifiés et de comprendre les mécanismes de gravure.Enfin nous évaluerons la compatibilité de ces procédés avec la gravure d’un matériau à basse permittivité : le SiCO. / Plasma etching for sub 14nm technological nodes require a precise control of the etching of thin nanometer-sized layers, while controlling the lateral dimension of nanometer-scale structures. For spacers etching, the 3 mains challenges appear. The first is to obtain high selectivity of the spacer’s materials with respect to silicon or silicon germanium. The use of a chemistry with a stop layer on silicon is prohibited because of the dimensional constraints. The order of the layers to be etched is of 5nm to 6nm and the thickness of the reactive layer is of 3nm. The second challenge is the control of the damaged induced by the plasma on the silicon layer and their effects on the electrical performances. Moreover, an epitaxial growth is used differentiate the NMOS and PMOS zones. This technique is very sensitive to the surface state condition and the contamination. The silicon layer should be as intact as possible. The last challenge is the control of the hard mask consumption or the spacer height. It can lead to an epitaxial growth preventing the transistors realization.Preliminary studies have shown that the use of a bias pulsed plasma coupled with the adding of tetrachlorosilane SiCl4 allows to reduce the consumption and the damaged induced of the silicon layer. We will study the new process window obtained, as well as the impact of this new process on the electrical performances of the integrated circuits.A second part of the study will focus on a new approach for the spacers etching. It consists initially in modifying the layer that we want to remove by a light ion plasma in a conventional etching reactor. The modified layer is then remove selectively to the unmodified layer by a hydrofluoric acid. We performed FTIR, XPS et SIMS analyses to characterize the modified materials and to understand the etching mechanisms.Finally, we will evaluate the compatibility of these processes with the etching of a low-k material: SiCO.

Orientador: Ana Maria Goulart de Azevedo Tozzi / Dissertação (mestrado) - Universidade Estadual de Campinas, Instituto de Biologia / Made available in DSpace on 2018-08-09T03:16:51Z (GMT). No. of bitstreams: 1 Meireles_JoseEduardodeCarvalho_M.pdf: 5457639 bytes, checksum: 2254e34efd86c3760ca5a245abf9eaf6 (MD5) Previous issue date: 2007 / Resumo: Poecilanthe (Leguminosae, Papilionoideae, Brongniartieae) é em gênero sul-americano que inclui atualmente dez espécies. A heterogeneidade morfológica e química encontrada em Poecilanthe dificulta sua circunscrição e coloca em dúvida sua monofilia. Além disso, limites interespecíficos imprecisos e falta de chave de identificação dificultam o reconhecimento das espécies. Este trabalho tem como objetivos testar a monofilia de Poecilanthe e estabelecer as relações entre suas espécies, bem como revisar a taxonomia do gênero. Para tanto, uma análise filogenética de máxima parcimônia baseada em caracteres morfológicos e seqüências de ITS/5.8S (nrDNA) foi realizada. Como subsídio para a análise cladística, foi feito um estudo sobre a morfologia das sementes e embriões de Poecilanthe, que resultou no reconhecimento de quatro padrões distintos de morfologia. Os resultados da filogenia mostram que Poecilanthe não é um gênero monofilético, sendo composto por três clados parafiléticos em relação à tribo. Estes três clados foram caracterizados morfologicamente e considerados como gêneros distintos. Poecilanthe é recircunscrito para incluir apenas as espécies extra-amazônicas (Poecilanthe s.s.), compreendendo então seis espécies. O gênero Amphiodon é restabelecido, e P. ovalifolia combinada neste. Um gênero novo é descrito para incluir P. amazonica e P. hostmannii. Cada um destes gêneros foi tratado taxonomicamente, constando em cada tratamento descrições, ilustrações e chave para a identificação das espécies / Abstract: The genus Poecilanthe (Leguminosae, Papilionoideae, Brongniartieae) currently comprises ten South-American species. The morphological and chemical diversity that is found within this genus renders its circumscription imprecise and brings Poecilanthe¿s monophyly into question. This work aims to test the monophyly of Poecilanthe and to revise the taxonomy of the genus. A parsimony analysis based on both morphological and ITS/5.8S data was carried out. In order to provide characters to the cladistic analysis, the morphology of the seeds and embryos of Poecilanthe was analyzed, and resulted in the identification of four different morphological patterns. The phylogeny does not support Poecilanthe as monophyletic, but resolves three different well-supported lineages that are paraphyletic with respect to the tribe. These clades are morphologically characterized and ranked at the generic level. Poecilanthe is recircumscribed to include the six extra-Amazonian species only. The genus Amphiodon is reinstated and P. ovalifolia is combined. Poecilante amazonica and P. hostmannii are segregated into a new genus. Each genus was revised and descriptions, illustrations and identification key for the species are presented. / Mestrado / Biologia Vegetal / Mestre em Biologia Vegetal

Les espaceurs auto-immolables sont des assemblages moléculaires inactifs permettant de découpler deux entités chimiques A (un groupe protecteur subissant une activation) et B (un composé d'intérêt, tel qu'un principe actif, un rapporteur ou un autre espaceur) par des liaisons covalentes. Sous l'effet d'un stimulus externe (activation), A est clivé spontanément lors d'un processus irréversible appelé auto-immolation, qui provoque la libération de l'espèce B. Cette dernière est généralement inactive lorsqu'elle est intégrée dans l'espaceur ; en revanche, une fois libérée, elle retrouve son activité intrinsèque.La cinétique du processus d'auto-immolation contrôle la corrélation spatio-temporelle existant entre l'activation et la libération de la substance active. L'objectif principal de ce travail a été précisément de fournir un ensemble complet de données permettant d'établir des relations structure/propriétés cinétiques fiables dans une série d'espaceur auto-immolable contenant une structure aromatique portant un substituant hydroxyle et s'appuyant sur un mécanisme impliquant une cascade électronique. Ainsi, nous avons utilisé un groupe photactivable et la lumière pour déclencher le processus d'auto-immolation d'une grande banque d'espaceurs auto-immolables, qui présentent un temps caractéristique d'auto-immolation s'étalant sur un large éventail d'échelle de temps (10-4-104s).Au cours de ce travail, nous avons également développé des espaceurs auto-immolables, qui libérent deux composés après activation. Ces systèmes ont été mis en ¿uvre pour répondre à l'analyse quantitative d'un substrat libéré par photodéprotection dans les systèmes biologiques. / Self-immolative spacers are inactive molecular assemblies decoupling two chemical entities A (a protecting group undergoing activation) and B (a compound of interest such as a drug, a reporter or another spacer) via covalent bonds. Under the effect of an external stimulus (activation), A is cleaved thus spontaneously initiating an irreversible process called self-immolation, which ultimately causes the release of the species B. The latter is usually inactive by binding on the spacer but, once released, it recovers its intrinsic activity. The kinetics of the self-immolation process controls the spatiotemporal correlation existing between activation and release of the active compound. Although many kinetic studies have been already reported on various series of self-immolative spacers, literature still lacked homogeneous information permitting comparative analysis of the kinetics of self-immolation. The major aim of this work was precisely to provide an extensive set of data drawing reliable structure property relationships in a series of self-immolative spacers containing an aromatic structure bearing a hydroxyl substituent and relying on a mechanism involving an electronic cascade. Thus we used a photactivable group and light to trigger the disassembly process of a large collection of self-immolative spacers, which exhibit self-immolation time varying over a wide range of time scale (10-4-104s). During this work, we also developed self-immolative spacers, which could release two compounds after a single activation. These systems have been implemented to address the quantitative analysis of a substrate released by uncaging in biological systems.

Abstract Prostate cancer is the most common cancer among men in Western industrialized countries. Approximately 60% of prostate cancer patients receive radiotherapy at some phase of the disease, a treatment based on the use of ionizing radiation to kill or control malignant cells. Unfortunately, adjoining healthy tissues are also affected by exposure to ionization, potentially leading to the emergence of adverse side effects, even several years later. The main radiation treatment modalities are external radiotherapy and low dose rate (LDR) or high dose rate (HDR) brachytherapy. Different techniques and methods are used to decrease the dose to healthy tissues, thus limiting the possibility of adverse effects. In this thesis a novel technique and associated equipment were developed whereby brachytherapy can be performed by inserting all needles simultaneously. This reduces the implantation time, thus minimizing the impairing effect on seed positioning accuracy resulting from prostate swelling. A phantom model was also constructed for testing and training purposes. DuraSeal® was investigated as a spacer material between the prostate and rectum, and its effect on rectal dose was evaluated during brachytherapy and external radiotherapy. DuraSeal® is resorbed over one to six months, thus altering rectal doses compared with the original dose plan. In brachytherapy, the resorption effect on rectal doses was calculated along with an evaluation of the potential of using different isotopes. In external radiotherapy, the resorption effect on rectal dose-volume histograms (DVHs) was calculated and the need for adaptive planning considered. DuraSeal®, as a spacer gel, clearly has favorable effects on rectal and anterior rectal wall DVHs in brachytherapy and external radiotherapy, and has the potential to decrease adverse effects. It is especially beneficial in hypofractionated treatments and external radiotherapy and brachytherapy combination treatment. In LDR brachytherapy using permanent seeds, dose planning is recommended prior to gel injection to prevent excessive rectal tolerance doses in situations where gel is rapidly resorbed. In external radiotherapy, the use of adaptive planning with a spacer gel improves rectal DVH, but is not necessary according to this thesis. / Tiivistelmä Eturauhasen syöpä on läntisten teollistuneiden maiden miesten yleisin syöpä. Arviolta 60 % eturauhassyöpäpotilaista saa sairauden jossain vaiheessa sädehoitoa. Sädehoito perustuu syöpäsolujen kontrolloimiseen ja tuhoamiseen ionisoivalla säteilyllä. Valitettavasti ionisoiva säteily vaikuttaa myös ympäröivään tervekudokseen aiheuttaen mahdollisia haittavaikutuksia jopa vuosien päästä. Sädehoidon kolme päätyyppiä ovat ulkoinen sädehoito sekä matala- ja korkea-annosnopeuksinen tykösädehoito (brakyterapia). Tervekudosannosten pienentämiseksi ja siten myös mahdollisten haittavaikutusten vähentämiseksi käytetään eri menetelmiä ja tekniikoita. Tässä väitöskirjassa kehitettiin uusi menetelmä ja laitteisto, joiden avulla voidaan brakyterapiassa asettaa kaikki neulat samanaikaisesti eturauhaseen. Menetelmä nopeuttaa implantointivaihetta, jolloin eturauhasen turpoaminen ei ehdi vaikuttaa jyvien asettelutarkkuutta heikentävästi. Samassa yhteydessä rakennettiin myös fantomi laadunvalvontaa ja harjoittelua varten. Työssä tutkittiin ja arvioitiin myös DuraSeal® geelin käyttöä välikemateriaalina eturauhasen ja peräsuolen välissä sekä geelin vaikutusta peräsuoliannoksiin. DuraSeal® resorboituu kuuden kuukauden aikana muuttaen alkuperäisen annossuunnitelman mukaista peräsuoliannosta. Brakyterapiassa tutkittiin ja laskettiin resorption vaikutusta sekä arvioitiin eri isotooppien käyttöä. Ulkoisessa sädehoidossa laskettiin resorption vaikutusta peräsuolen tilavuushistogrammeihin ja tutkittiin mahdollisen adaptiivisen suunnittelun käyttöä. DuraSeal® geelin käyttö välikemateriaalina pienentää selkeästi peräsuoliannoksia ja siten myös mahdollisesti tervekudosten haittavaikutuksia sekä ulkoisessa sädehoidossa että brakyterapiassa. Geelin käyttö on erityisen hyödyllistä hypofraktiohoidoissa sekä ulkoisen sädehoidon ja brakyterapian kombinoidussa käytössä. Matala-annosnopeuksisessa brakyterapiassa (jyvähoidoissa) annossuunnitelma suositellaan tehtäväksi ennen geelin ruiskutusta, jotta peräsuolen toleranssiannoksia ei ylitettäisi vaikka geeli resorboituisikin nopeasti. Ulkoisessa sädehoidossa adaptiivinen suunnittelu välikegeelin kanssa tuo lisäarvoa pienentämällä edelleen peräsuoliannoksia, mutta ei ole välttämätöntä.

Metallo-supramolecular hydrogels have interesting dynamic properties for many applications. We report a simple method for synthesizing copper-based polymer hydrogels made from nontoxic poly(methyl vinyl ether-alt-maleic anhydride) (PVM-alt-MA) in the absence or presence of added dicarboxylates, such as adipate and terephthalate. We utilize metal-polycarboxylate backbone and carboxylate spacer ligands between polymers strands engineered via non-covalent metal ion coordination. Rheological measurements revealed that the mechanical stability of the hydrogels was enhanced by the addition of supplementary dicarboxylate ligands. The optimal ratio of polymer to dicarboxylate to Cu2+ was 10:4:2.5. Our scanning electron microscope (SEM) and Cryo-SEM imaging and physical adsorption measurements revealed the formation of pores. The Brunauer–Emmett–Teller (BET) surface area of the dried hydrogels increased from 177.96 m2 g−1 in a dried hydrogel without added dicarboxylate to 646.90 and 536.44 m2 g−1 with the addition of adipate and terephthalate, respectively. The pore volume increased as well. Separation of CO2 from post-combustion flue gases is important for environmental and economic sustainability. The PVM-alt-Na-MA:adipate:Cu2+ hydrogels are promising material for post-combustion CO2 separation. At normal conditions (298 K and 1 bar), the PVM-alt-Na-MA:adipate:Cu2+ hydrogel samples with 10:4:2.5 ratio, showed notable CO2/N2 selectivity of 78.46 and a high CO2/CH4 selectivity reaching 26.09 at 1 bar. Additionally, we investigated in detail the effect of transition metal ion on the rigidity and structure of hydrogels using Al3+, Fe3+, Cu2+, Ni2+, Zn2+, and Co2+. We also studied the effect of using tricarboxylate spacer ligands such as nitrilotriacetic (NTA) and trisodium citrate or tetracarboxylate such as ethylenediaminetetraacetic acid (EDTA). It is important to mention that one of the main advantages of our facile synthesis method is being simple and can be scaled up for commercial applications. For scaling up the synthesis of hydrogels, we utilized a filling machine that is able to increase the amount of hydrogel aliquots with variable volume. Silver-based hydrogels showed significant antibacterial activity, due to the presence of silver nanoparticles. We utilized a filling machine for application of amorphous wound dressing. The optimization of the conditions of the filling enabled us to scale up the synthesis and the filling process.

The topic of this master´s thesis is the strain-stress analysis of the spacer-spring for the swivel light projector of car headlamp. The spacer-spring is used for delimitation of moving swivel light projector in relation to turning drive. During vibration test there is a danger of limit state of fatigue failure.

The improvement of curtain wall thermal performances and the optimisation of the issues connected with this technology can lead to a sensible reduction of the energy consumption of the building as well as to an increase level of occupant comfort and longer durability of the façade. The aim of this work is to improve the curtain wall technology especially as far as the connection between the glass and the frame is concerned, since it is the part that mainly affects the performances of the whole façade. This project focuses on the different aspects of the thermal performance of curtain wall systems in order to achieve a higher thermal performance, meeting the objectives of lowering energy demand, improving durability and enhancing indoor comfort. In order to develop new high performance curtain wall connections and to test their level of performance compared with the state of the art ones, two methods were deployed: a numerical and an experimental one. FEM analysis was performed with the software THERM (LBNL) analysing the profile of surface temperatures and the U-values of the details. In the FEM analysis, different materials and geometries were studied. The experimental characterisation of the thermal energy performance of the studied design options was performed by means of thermometric measurements in a climatic cell. The purpose of the experimental analysis was the verification of the effective improvement of the performance in the new details and the comparison with the simulation, aiming at the validation of the simulation model.

The work is focused on experimental study and modelling of spacer grid influence on single- and two-phase flow. In the experimental study a mock-up of a realistic fuel bundle with five spacer grids of thin plate spring construction was investigated. A special pressure measuring technique was used to measure pressure distribution inside the spacer. Five pressure taps were drilled in one of the rods, which could exchange position with other rods, in this way providing a large degree of freedom. Laser Doppler Velocimetry was used to measure mean local axial velocity and its fluctuating component upstream and downstream of the spacer in several subchannels with differing spacer part. The experimental study revealed an interesting behaviour. Subchannels from the interior part of the bundle display a different effect on the flow downstream of the spacer compared to subchannels close to the box wall, even if the spacer part is the same. This behaviour is not reflected in modern correlations. The modelling part, first, consisted in comparing the present experimental data to Computational Fluid Dynamics calculations. It was shown that stand-alone subchannel models could predict the local velocity, but are unreliable in prediction of turbulence enhancement due to spacer. The second part of the modelling consisted in developing a deposition model for increase due to spacer. In this study Lagrangian Particle Tracking (LPT) coupled to Discrete Random Walk (DRW) technique was used to model droplet movements through turbulent flow. The LPT technique has an advantage to model the influence of turbulence structure effect on droplet deposition, in this way presenting a generalized model in view of spacer geometry change. The verification of the applicability of LPT DRW method to model deposition in annular flow at Boiling Water Reactor conditions proved that the method is unreliable in its present state. The model calculations compare reasonably well to air-water deposition data, but display a wrong trend if the fluids have a different density ratio than air-water.

京都大学 / 0048 / 新制・課程博士 / 博士(工学) / 甲第18589号 / 工博第3950号 / 新制||工||1607(附属図書館) / 31489 / 京都大学大学院工学研究科原子核工学専攻 / (主査)教授 功刀 資彰, 教授 中部 主敬, 講師 河原 全作 / 学位規則第4条第1項該当 / Doctor of Philosophy (Engineering) / Kyoto University / DFAM