Rolled-up nanotechnology based on strain-engineering is a powerful tool to manufacture three-dimensional hollow structures made of virtually any kind of material on a large variety of substrates. The aim of this thesis is to address the key features of different on- and off-chip applications of rolled-up microtubes through modification of their basic framework. The modification of the framework pertains to the tubular structure, in particular the diameter of the microtube, and the material which it is made of, hence achieving different functionalities of the final rolled-up structure. The tuning of the microtube diameter which is adjusted to the individual size of an object allows on-chip studies of single cells in artificial narrow cavities, for example. Another modification of the framework is the addition of a catalytic layer which turns the microtube into a self-propelled catalytic micro-engine. Furthermore, the tuneability of the diameter can have applications ranging from nanotools for drilling into cells, to cargo transporters in microfluidic channels. Especially rolled-up microtubes based on low-cost and easy to deposit materials, such as silicon oxides, can enable the exploration of novel systems for several scientific topics. The main objective of this thesis is to combine microfluidic features of rolled-up structures with optical sensor capabilities of silicon oxide microtubes acting as optical ring resonators, and to integrate these into a Lab-on-a-Chip system. Therefore, a new concept of microfluidic integration is developed in order to establish an inexpensive, reliable and reproducible fabrication process which also sustains the optical capabilities of the microtubes. These integrated microtubes act as optofluidic refractrometric sensors which detect changes in the refractive index of analytes using photoluminescence spectroscopy. The thesis concludes with a demonstration of a functional portable sensor device with several integrated optofluidic sensors. / Die auf verspannten Dünnschichten basierende „rolled-up nanotechnologie“ ist eine leistungsfähige Methode um dreidimensionale hohle Strukturen (Mikroröhrchen) aus nahezu jeder Art von Material auf einer großen Vielfalt von Substraten herzustellen. Ausgehend von der Möglichkeit der Skalierung des Röhrchendurchmessers und der Modifikation der Funktionalität des Röhrchens durch Einsatz verschiedener Materialien und Oberflächenfunktionalisierungen kann eine große Anzahl an verschiedenen Anwendungen ermöglicht werden. Eine Anwendung behandelt unter anderem on-chip Studien einzelner Zellen wobei die Mikroröhrchen, an die Größe der Zelle angepasste, Reaktionscontainer darstellen. Eine weitere Modifikation der Funktionalität der Mikroröhrchen kann durch das Aufbringen einer katalytischen Schicht realisiert werden, wodurch das Mikroröhrchen zu einem selbstangetriebenen katalytischen Mikro-Motor wird. Hauptziel dieser Arbeit ist es Mikrometer große optisch aktive Glasröhrchen herzustellen, diese mikrofluidisch zu kontaktieren und als Sensoren in Lab-on-a-Chip Systeme zu integrieren. Die integrierten Glasröhrchen arbeiten als optofluidische Ringresonatoren, welche die Veränderungen des Brechungsindex von Fluiden im inneren des Röhrchens durch Änderungen im Evaneszenzfeld detektieren können. Die Funktionsfähigkeit eines Demonstrators wird mit verschiedenen Flüssigkeiten gezeigt, dabei kommt ein Fotolumineszenz Spektrometer zum Anregen des Evaneszenzfeldes und Auslesen des Signals zum Einsatz. Die entwickelte Integrationsmethode ist eine Basis für ein kostengünstiges, zuverlässiges und reproduzierbares Herstellungsverfahren von optofluidischen Mikrochips basierend auf optisch aktiven Mikroröhrchen.

This work is devoted to investigate light confinement in rolled-up microtubular cavities and their optofluidic applications. The microcavities are fabricated by a roll-up mechanism based on releasing pre-strained silicon-oxide nanomembranes. By defining the shape and thickness of the nanomembranes, the geometrical tube structure is well controlled. Micro-photoluminescence spectroscopy at room temperature is employed to study the optical modes and their dependence on the structural characteristics of the microtubes. Finite-difference-time-domain simulations are performed to elucidate the experimental results. In addition, a theoretical model (based on a wave description) is applied to describe the optical modes in the tubular microcavities, supporting quantitatively and qualitatively the experimental findings. Precise spectral tuning of the optical modes is achieved by two post-fabrication methods. One method employs conformal coating of the tube wall with Al2O3 monolayers by atomic-layer-deposition, which permits a mode tuning over a wide spectral range (larger than one free-spectral-range). An average mode tuning to longer wavelengths of 0.11nm/ Al2O3-monolayer is obtained. The other method consists in asymmetric material deposition onto the tube surface. Besides the possibility of mode tuning, this method permits to detect small shape deformations (at the nanometer scale) of an optical microcavity. Controlled confinement of resonant light is demonstrated by using an asymmetric cone-like microtube, which is fabricated by unevenly rolling-up circular-shaped nanomembranes. Localized three-dimensional optical modes are obtained due to an axial confinement mechanism that is defined by the variation of the tube radius and wall windings along the tube axis. Optofluidic functions of the rolled-up microtubes are explored by immersing the tubes or filling their core with a liquid medium. Refractive index sensing of liquids is demonstrated by correlating spectral shift of the optical modes when a liquid interacts with the resonant light of the microtube. In addition, a novel sensing methodology is proposed by monitoring axial mode spacing changes. Lab-on-a-chip methods are employed to fabricate an optofluidic chip device, allowing a high degree of liquid handling. A maximum sensitivity of 880 nm/refractive-index-unit is achieved. The developed optofluidic sensors show high potential for lab-on-a-chip applications, such as real-time bio/chemical analytic systems.

Rolled-up nanotechnology based on strain-engineering is a powerful tool to manufacture three-dimensional hollow structures made of virtually any kind of material on a large variety of substrates. The aim of this thesis is to address the key features of different on- and off-chip applications of rolled-up microtubes through modification of their basic framework. The modification of the framework pertains to the tubular structure, in particular the diameter of the microtube, and the material which it is made of, hence achieving different functionalities of the final rolled-up structure. The tuning of the microtube diameter which is adjusted to the individual size of an object allows on-chip studies of single cells in artificial narrow cavities, for example. Another modification of the framework is the addition of a catalytic layer which turns the microtube into a self-propelled catalytic micro-engine. Furthermore, the tuneability of the diameter can have applications ranging from nanotools for drilling into cells, to cargo transporters in microfluidic channels. Especially rolled-up microtubes based on low-cost and easy to deposit materials, such as silicon oxides, can enable the exploration of novel systems for several scientific topics. The main objective of this thesis is to combine microfluidic features of rolled-up structures with optical sensor capabilities of silicon oxide microtubes acting as optical ring resonators, and to integrate these into a Lab-on-a-Chip system. Therefore, a new concept of microfluidic integration is developed in order to establish an inexpensive, reliable and reproducible fabrication process which also sustains the optical capabilities of the microtubes. These integrated microtubes act as optofluidic refractrometric sensors which detect changes in the refractive index of analytes using photoluminescence spectroscopy. The thesis concludes with a demonstration of a functional portable sensor device with several integrated optofluidic sensors. / Die auf verspannten Dünnschichten basierende „rolled-up nanotechnologie“ ist eine leistungsfähige Methode um dreidimensionale hohle Strukturen (Mikroröhrchen) aus nahezu jeder Art von Material auf einer großen Vielfalt von Substraten herzustellen. Ausgehend von der Möglichkeit der Skalierung des Röhrchendurchmessers und der Modifikation der Funktionalität des Röhrchens durch Einsatz verschiedener Materialien und Oberflächenfunktionalisierungen kann eine große Anzahl an verschiedenen Anwendungen ermöglicht werden. Eine Anwendung behandelt unter anderem on-chip Studien einzelner Zellen wobei die Mikroröhrchen, an die Größe der Zelle angepasste, Reaktionscontainer darstellen. Eine weitere Modifikation der Funktionalität der Mikroröhrchen kann durch das Aufbringen einer katalytischen Schicht realisiert werden, wodurch das Mikroröhrchen zu einem selbstangetriebenen katalytischen Mikro-Motor wird. Hauptziel dieser Arbeit ist es Mikrometer große optisch aktive Glasröhrchen herzustellen, diese mikrofluidisch zu kontaktieren und als Sensoren in Lab-on-a-Chip Systeme zu integrieren. Die integrierten Glasröhrchen arbeiten als optofluidische Ringresonatoren, welche die Veränderungen des Brechungsindex von Fluiden im inneren des Röhrchens durch Änderungen im Evaneszenzfeld detektieren können. Die Funktionsfähigkeit eines Demonstrators wird mit verschiedenen Flüssigkeiten gezeigt, dabei kommt ein Fotolumineszenz Spektrometer zum Anregen des Evaneszenzfeldes und Auslesen des Signals zum Einsatz. Die entwickelte Integrationsmethode ist eine Basis für ein kostengünstiges, zuverlässiges und reproduzierbares Herstellungsverfahren von optofluidischen Mikrochips basierend auf optisch aktiven Mikroröhrchen.

Lab-on-a-Chip-Systeme sind mikrofluidische, portable Systeme mit denen bioanalytische Reaktionen und Auswertungen an kleinen Probenvolumina vor Ort durchführbar sind. In der vorliegenden Arbeit wird eine Entwurfsstrategie für das integrierte, resistive Heizen in einem solchen System auf Basis einer polymerbasierten, modularen Technologieplattform entwickelt. Dabei wird eine Modellierung als Feldmodell, die Ableitung eines reduzierten Makromodells sowie die experimentelle Untersuchung und Verifikation beschrieben. Verschiedene Ansätze für die Abbildung temperaturunabhängiger und -abhängiger elektrisch-thermischer Wandler sind berücksichtigt. Der Einflüsse von Aufbau, Widerstandsverhalten, Randbedingungen, sowie der elektrischen Ansteuerung auf die Temperatur der Biosensorfläche, in der die bioanalytische Reaktion erfolgt, werden dargelegt. / Lab on a chip systems are portable microfluidic systems which enable bioanalytical reactions and the appropriate analysis at the point of need using small sample volumes. In this publication a design strategy for integrated resistive heating in such a polymer based system is developed. The modelling comprises a field model, a derived reduced macro model and the experimental characterisation. Approaches to describe temperature dependent as well as independent electric-thermal converters are taken into account. The effects of the assembly, resistive behaviour, boundary conditions as well as the drive electronics on the temperature of the biosensor are presented.

This work is devoted to investigate light confinement in rolled-up microtubular cavities and their optofluidic applications. The microcavities are fabricated by a roll-up mechanism based on releasing pre-strained silicon-oxide nanomembranes. By defining the shape and thickness of the nanomembranes, the geometrical tube structure is well controlled. Micro-photoluminescence spectroscopy at room temperature is employed to study the optical modes and their dependence on the structural characteristics of the microtubes. Finite-difference-time-domain simulations are performed to elucidate the experimental results. In addition, a theoretical model (based on a wave description) is applied to describe the optical modes in the tubular microcavities, supporting quantitatively and qualitatively the experimental findings. Precise spectral tuning of the optical modes is achieved by two post-fabrication methods. One method employs conformal coating of the tube wall with Al2O3 monolayers by atomic-layer-deposition, which permits a mode tuning over a wide spectral range (larger than one free-spectral-range). An average mode tuning to longer wavelengths of 0.11nm/ Al2O3-monolayer is obtained. The other method consists in asymmetric material deposition onto the tube surface. Besides the possibility of mode tuning, this method permits to detect small shape deformations (at the nanometer scale) of an optical microcavity. Controlled confinement of resonant light is demonstrated by using an asymmetric cone-like microtube, which is fabricated by unevenly rolling-up circular-shaped nanomembranes. Localized three-dimensional optical modes are obtained due to an axial confinement mechanism that is defined by the variation of the tube radius and wall windings along the tube axis. Optofluidic functions of the rolled-up microtubes are explored by immersing the tubes or filling their core with a liquid medium. Refractive index sensing of liquids is demonstrated by correlating spectral shift of the optical modes when a liquid interacts with the resonant light of the microtube. In addition, a novel sensing methodology is proposed by monitoring axial mode spacing changes. Lab-on-a-chip methods are employed to fabricate an optofluidic chip device, allowing a high degree of liquid handling. A maximum sensitivity of 880 nm/refractive-index-unit is achieved. The developed optofluidic sensors show high potential for lab-on-a-chip applications, such as real-time bio/chemical analytic systems.

Résumé : Ce travail de thèse a pour but de développer un dispositif intégré de photodétection pour des applications biomédicales nécessitant une grande sensibilité de détection et une discrimination spectrale (sélectivité). Ce dispositif peut être appliqué, par exemple, à la mesure simultanée de plusieurs marqueurs fluorescents dans les laboratoires sur puce mettant en œuvre de très faibles volumes de réactifs (inférieurs au microlitre). Le travail de thèse se focalise sur la conception, la réalisation et le test de ce dispositif intégré de photodétection. Ce travail se décline selon deux axes principaux : d’une part, la conception d’un photodétecteur CMOS avec préamplificateurs intégrés, et d’autre part la conception, la réalisation et la caractérisation de filtres optiques intégrés performants pour la détection de fluorescence. Le dispositif de détection conçu implémente un photodétecteur à quatre jonctions enterrées (Buried Quad Junction photodetector – BQJ) et un étage de préamplification de charge pour le traitement simultané des quatre sorties de ce photodétecteur. L’ensemble a été fabriqué en technologie Haut-Voltage CMOS Teledyne-DALSA 0,8μm. Son fonctionnement a été démontré et ses performances, notamment en termes de bruit et de sensibilité, ont été caractérisées. En parallèle, des filtres optiques coupe-bande ont été développés à l’aide d’un procédé compatible avec la technologie CMOS utilisée pour le photodétecteur. Ainsi, le dépôt de ces filtres sur le photodétecteur pourra être intégré dans le process de fabrication industriel. Les filtres interférentiels développés sont fabriqués en alternant des dépôts de couches minces de nitrure et d’oxyde de silicium par PECVD. La mesure des indices optiques de ces matériaux a été utilisée pour optimiser ces filtres à partir de simulations. Les filtres déposés sur lame de verre ou sur le photodétecteur BQJ ont été caractérisés. Des méthodes de traitement des signaux spécifiques pour le BQJ sont également proposées pour améliorer la sensibilité et/ou la sélectivité de détection. Leurs performances ont été évaluées. Enfin, des mesures de fluorescence avec le système de photodétection conçu ont été réalisées sur des mélanges de nanocristaux fluorescents (quantum dots) ou de fluorophores organiques. Ces résultats préliminaires permettent de valider le fonctionnement applicatif du système de photodétection développé. // Abstract : This thesis aims to develop an integrated photosensor device for biomedical applications requiring high detection sensitivity and spectral discrimination (selectivity). For example, this system can be applied to mesure simultaneous emissions of several fluorescent labels in lab-on-a-chip implementing very small volumes of reagents (less than one microliter). The thesis focuses on the design, implementation and testing of this integrated photodetector device. The work is divided in two main parts: first, the design of a CMOS photodetector with integrated preamplifiers, and secondly the design, realization and characterization of integrated optical filters for fluorescence detection. The detection device implements a Buried Quad Junction photodetector (BQJ) and charge sensitive preamplifiers for the simultaneous treatment of its four outputs. The chip was made in 0.8μm High Voltage CMOS technology from Teledyne-DALSA. Its operation has been demonstrated and its performances, especially in terms of noise and sensitivity, have been characterized. In parallel, optical notch filters have been developed using a process compatible with the CMOS technology used for the photodetector fabrication. Thus, deposition of these filters on the photodetector can be integrated during industrial process. Developed interference filters are made by alternating deposition of thin layers of nitride and silicon oxide by PECVD. Measurements of refractive index of these materials were used to optimize these filters through simulations. The filters implemented on a glass cover or on the BQJ photodetector were characterized. Signal processing methods specific to BQJ are also proposed to improve the detection’s sensitivity and/or selectivity. Their performances were evaluated. Finally, fluorescence measurements with the designed photodetection device were performed on mixtures of fluorescent nanocrystals (quantum dots) or of organic fluorophores. These preliminary results validate the performances in terms of photodetection of the designed integrated photodetection device.

Precise manipulation of heterogeneous droplets on an open droplet microfluidic platform could have numerous practical advantages in a broad range of applications, from proton exchange membrane (PEM) fuel cells and microreactors, to medical diagnostic platforms capable of assaying complex biological analytes. Toward the aim of developing electrically controllable micropost arrays for use in open droplet manipulation, custom-designed titanium dioxide (TiO2)- loaded poly(dimethylsiloxane) (PDMS) micropost arrays were developed in this work and indirectly mechanically actuated by applying an electric field. Initial experiments explored the bulk properties of TiO2-loaded PDMS films, with scanning electron microscopy (SEM) confirming a uniform TiO2 particle distribution in the PDMS, and tensile testing of bulk films showing an inverse relationship between TiO2 % (w/w) and Young’s Modulus with the Young’s Moduli quantified as 4.22 ± 0.51 MPa for unloaded PDMS, 2.27 ± 0.18 MPa for 10 % (w/w) TiO2, and 1.39 ± 0.20 MPa for 20 % (w/w) TiO2. Following bulk material evaluation, soft lithography methods were developed to fabricate TiO2- loaded PDMS micropost arrays. Mathematical predictions were applied to design microposts of varying shape, length, and gap spacing to yield super-hydrophobic surfaces actuatable by an electric field. Visual inspection and optical microscopy of the resulting arrays confirmed a non- collapsed micropost geometry. Overall, round microposts that were 100, 200, and 300 μm in length, 15 μm in diameter, and spaced 50 μm apart were produced largely free of defects, and used in contact angle measurements and micropost deflection experiments. Droplet contact angles measured on the arrays remained above 120° indicating the arrays successfully provided super- hydrophobic surfaces. Individual microposts deflected most notably above an electric field strength of 520 kV/m (12.5 kV nominal voltage). The ability to mechanically deflect customized microposts using an electric field demonstrated by this work is promising for translating this technology to precise droplet manipulation applications. Indirect actuation of droplets could enable the manipulation of liquids with varying electrical properties, which is a limitation of current micropumping technologies. Once optimized, electrically actuated micropost arrays could significantly contribute to the micro- handling of heterogeneous, highly ionic, and/or deionized fluids. / Thesis (Master, Chemical Engineering) -- Queen's University, 2013-03-03 17:25:49.785

This thesis focuses on inductive base sensor design at MHz range frequency. The background theory, design, experiments and results for a new magnetic particles sensor is presented. A new magnetic sensor based on a planar coil was investigated for DNA pathogen detection. Change in inductance of the planar coil due to the presence of magnetic particles with varying mass was measured. The experimental set-up consisted of different sized planar coil with associated electronics for inductance measurements. The best sensor performance was accomplished using two different inductors while oscillating at frequencies 2.4MHz using 9.5μH inductor and 7.2MHz with 85μH inductor. The sensor has very large signal to noise ratio (580×103), while the average amount of frequency drift was 0.58. This sensor was tested with various types of magnetic particles. In addition, iron-oxide nanoparticles were synthesized through water in oil microemulsion method and with an average size of 25nm. The best sensitivity achieved for detection of 50μg iron-oxide particles was with the bead size of 10nm. 81Hz frequency shift was attained in regard to that amount of particles. This research shows that increasing the resonance frequency to 7.2MHz can cause the larger output signal difference (frequency shift) in the presence of magnetic particles; however, the sensor stability is the most important factor for determining the detection resolution and sensitivity. The sensitivity is better if the sensor can detect smaller amount of magnetic sample. The results of this research demonstrate that while the sample consists of smaller size particles, the sensor can detect the lower amount of sample. This is due to the heating effect of nanoparticles. On the other hand the sample distance from the sensor has a major impact on the sensitivity too; the shorter the distance, the higher the sensitivity. This technique can potentially be extended to detect several different types of bacterial pathogens and can be modified for multiplex quantitative detection. This sensing technique will be incorporated into a handheld, disposable microfluidic chip for point-of-care diagnostics for sexually transmitted diseases.

Ce travail de thèse est consacré au développement d’un dispositif autarcique pour le contrôle des amphétamines dans les égouts. Il a été conçu dans le cadre du projet européen MicroMole pour aider la police scientifique à résoudre des scènes concernant la localisation des laboratoires clandestins d’amphétamines et produits dérivés. Il est composé de trois volets : le premier volet est dédié au développement de deux générations de capteurs potentiométriques sélectifs à l’amphétamine en utilisant le ionophore commercial dibenzo-18-crown-6 éther dans un premier temps puis le ion-pair complexe [amphetamine-H]+[3,3’-Co(1,2-C2B9H11)2]- synthétisé comme sites actifs pour la reconnaissance sélective d’amphétamine. Le deuxième volet est consacré au développement d’un système microfluidique passif permettant de contrôler le flux d’échantillon arrivant à la partie sensible du capteur en utilisant des micro-filtres et micro-mélangeurs. Le troisième et dernier volet est dédié à la conception et fabrication d’un système autonome d’échantillonnage miniaturisé pour le stockage des échantillons dans les égouts lors des enquêtes menées par la police scientifique correspondant à la localisation de laboratoires clandestins d’amphétamines / The work in this thesis is devoted to the development of an autarkic device for real-time monitoring of amphetamines in sewage. It has been developed within the EU project Micromole to help Law Enforcement Agents (LEA) to solve forensic scenarios related to the production of amphetamines and amphetamine-type stimulants (ATS). It is composed of three main sections. The first section is devoted to the development of two generation of potentiometric sensors for the detection of amphetamines using first, the commercial ionophore dibenzo-18-crown-6 ether, then the synthesized ion-pair complex [amphetamine-H]+[3,3’-Co(1,2-C2B9H11)2]- as active sites for amphetamine recognition. The second section is dedicated to the fabrication of a passive microfluidic system integrated into a Lab-on-a-Chip to protect the sensor from the harsh environment through the control of the sample amount reaching the sensor. For this purpose, the microfluidic system formed a combination of passive micromixers, microfilters and microchannels. The final section was devoted to the development of an autarkic sample storage unit to help LEA to store spontaneous samples during forensic investigations related to the clandestine production of amphetamines in illegal laboratories

As the microelectronics industry pushes microfabrication processes further, the lab-on-a-chip field has continued to piggy-back off the industry's fabrication capabilities with the goal of producing total chemical and biological systems on small chip-size platforms. One important function of such systems is the ability to perform single molecule detection. There are currently many methods being researched for performing single molecule detection, both macro and micro in scale. This dissertation focuses on an optofluidic, lab-on-a-chip platform called the ARROW biosensor, which possesses several advantages over macro-scale single molecule detection platforms. These advantages include an amplification-free detection scheme, cheap parallel fabrication techniques, rapid single molecule detection results, and extremely low volume sample probing, which leads to ultra-sensitive detection. The ARROW biosensor was conceived in the early 2000s; however, since then it has undergone many design changes to improve and add new functionality to the lab-on-a-chip; however, water absorption in the plasma enhanced chemical vapor deposited silicon dioxide has been a problem that has plagued the biosensor platform for some time. Moisture uptake in the oxide layer of the ARROWs leads to loss of waveguiding confinement and drastically decreases the overall sensitivity of the ARROW biosensors. New ARROW designs were investigated to alleviate the negative water absorption effects in the ARROWs. The new waveguide designs were tested for resiliency to water absorption and the buried ARROW (bARROW) design was determined to be the most successful at preventing negative water absorption effects from occurring in the PECVD oxide waveguides. The bARROWs were integrated into the full biosensor platforms and used to demonstrate high sensitivity single molecule detection without any signs of water absorption affecting the bARROWs' waveguiding capabilities. The bARROW biosensors are not only water resistant, they also proved to be the most sensitive biosensors yet fabricated with average signal-to-noise ratios around 80% higher than any previously fabricated ARROW biosensors.