Atuadores Piezelétricos Flextensionais consistem de uma estrutura flexível atuada por cerâmicas piezelétricas (ou “pilhas” de cerâmicas). A estrutura flexível conectada a piezocerâmica deve gerar deslocamentos e forças em diferentes pontos específicos do domínio, para uma direção especificada. Estes atuadores são usados em aplicações de mecânica de precisão, tal como, sistemas microeletromecânicos (MEMS), manipulador de células, interferometria laser, equipamentos de nanotecnologia, equipamentos de microcirurgias, nanoposicionadores, sonda de varredura microscópica, e etc. Porém, devido ao fato destes atuadores consistirem principalmente de um mecanismo flexível, seu projeto é complexo. A estrutura flexível comporta-se como um transformador mecânico pela amplificação para converter, direcionar e amplificar os pequenos deslocamentos gerados pela piezocerâmica (ordem de nanômetros). A estrutura flexível é projetada distribuindo-se flexibilidade e rigidez no domínio de projeto, o que pode ser obtido usando a otimização topológica. Portanto, o objetivo deste trabalho é implementar um método sistemático baseado no método de otimização topológica para projetar atuadores piezelétricos flextensionais. Essencialmente, o método de otimização topológica consiste em encontrar a distribuição ótima de material perfurando o domínio de projeto com infinitos microfuros. O material em cada ponto pode alterar de vazio a total presença de material, também assumindo material intermediário (ou compósito). A implementação do método de otimização topológica é baseado no modelo de material SIMP (Simple Isotropic Material with Penalization). O problema de otimização é posto como a maximização dos deslocamentos gerados (ou força de blocagem) em diferentes pontos e direções especificadas do domínio. Considerando o comportamento linear da piezocerâmica. Alterando a flexibilidade e a rigidez da estrutura flexível conectada a piezocerâmica obtém-se diferentes tipos de atuadores piezelétricos flextensionais, que podem ser projetados para determinadas aplicações. Para ilustrar o método, os exemplos mostrados são modelos bidimensionais (2D), uma vez que a maior parte das aplicações envolve dispositivos planos. Estes atuadores são fabricados usando corrosão química em chapas de cobre abaixo de 200 μm de espessura através do método de litografia. Técnica de corrosão química tem um baixo custo e permite-nos fabricar diversos protótipos para testes. Esta técnica pode ser facilmente utilizada no LNLS (Laboratório Nacional de Luz Síncrotron – Campinas). Análise experimental destes protótipos são procedidas para medição de deslocamentos usando uma Probe Station. Como trabalho futuro, estes protótipos serão construídos em escala de MEMS. / Flextensional Piezoelectric Actuators consist of a flexible structure actuated by piezoelectric ceramics (or a stack of piezoceramics). The flexible structure connected to the piezoceramic must generate displacements and forces in different specified points of the domain, according to a specific direction. These actuators are applied to precision mechanic applications such as microelectromechanical systems (MEMS), cell manipulators, laser interferometers, nanotechnology equipment, microsurgery equipment, nanopositioners, scanning probe microscopy, etc. However, due to the fact these actuators essentially consist of a compliant mechanism their design is complex. The compliant structure behaves as a mechanical transform by amplifying and changing the direction of small output displacements generated by piezoceramics (order of nanometer). The flexible structure is designed by distributing flexibility and stiffness in the design domain, which can be archieved by using topology optimization. Therefore, the objective of this work is to implement a systematic method based on topology optimization method to design flextensional piezoelectric actuators. Essentially, the topology optimization method consists of finding the optimal material distribution in a perforated design domain with infinite microvoids. The material in each point can change from void to full material, also assuming intermediate (or composite) material. The implemented topology optimization method is based on the SIMP (Simple Isotropic Material with Penalization) material model. The optimization problem is posed as maximization of output displacements (or grabbing forces) in different specified directions and points of the domain. A linear behavior of piezoceramic is considered. By changing the flexibility and stiffness of flexible structure connected to the piezoceramics different types of flextensional piezoelectric actuators can be designed for a desired application. To illustrate the method, examples presented herein are limited to two-dimensional (2D) models once in most part of applications of these actuators they are planar devices. These actuators are manufactured by using chemical corrosion on a 200 um thickness copper plate through lithography method. Chemical corrosion technique has a low cost and it allow us to manufacture several prototypes for testing. For this technique, facilities of the micromachining laboratory of National Sincroton Light Laboratory (LNLS - Campinas) are used. Experimental analysis of these prototypes are conducted by measuring displacements using a probe station. As a future work, these prototypes will be built in a MEMS scale.

Les travaux réalisés lors de cette thèse ont pour objectif la fabrication de filtres accordables fort Q0. Pour cela nous nous sommes naturellement orienté vers des structures volumiques puisque elles permettent l’obtention de Q0 important. Nous avons également utilisé des éléments d’accord permettant de maximiser ce Q0, tels que des MEMS-RF ou bien encore des patchs de Matériaux à Transition de Phase (PTM) comme le dioxyde de vanadium (VO2). Nous avons démontré lors de notre étude que ces dispositifs garantissaient des Q0 supérieurs à 1000 sur une large plage d’accord. / This work is based on the fabrication of High-Q tunable filters. We looked at cavity filters since they allow us to achieve a high Q0. We also used RF-MEMS or vandium Dioxyde as tuning element. Since they provide a high-Q tuning. We have demonstrated Q0 better than one thousand over a wide tuning range.

Les interféromètres de type Mirau sont largement utilisés dans les profilomètres et vibromètres optiques 3D plein champ et d’autres applications dans les domaines de la biologie et de la médecine ont été démontrées. Quand elle a été débutée, cette thèse était la première tentative de réalisation d’interféromètres Mirau entièrement intégrés et accordables en technologie microsystèmes électromécaniques (MEMS) silicium. La conception proposée est fondée sur l’intégration hybride 3D d’un wafer de scanners hors plan de micromiroirs de référence et d’un wafer de séparatrices de faisceaux optiques. La nouveauté majeure de la conception du scanner de miroir est l’utilisation de microactionneurs à peignes électrostatiques verticaux autoalignés réalisés à partir de wafers double Silicium sur Isolant (DSOI). Les modélisations semi-Analytiques et les simulations électromécaniques par éléments finis ont démontré que la combinaison de cet actionnement électrostatique avec des ressorts en serpentins optimisés permet d’obtenir une translation de grande course, bidirectionnelle et symétrique (+/-20µm) du miroir de référence. Un procédé de fabrication original de ce scanner de miroir, reposant largement sur la gravure ionique profonde (DRIE) et des techniques innovantes de délimitation de motifs avec des films secs photosensibles, a été étudié, et les principales étapes critiques de fabrication ont été démontrées avec succès avec des substrats de Si, SOI et DSOI commetciaux. La séparatrice semi-Réfléchissante large bande a été conçue pour être réalisée par une technologie de fabrication de membranes diélectriques multicouches SiO2/SiNx développée précédemment à l’IEF. L’assemblage des wafers de scanners de miroir et de séparatrices sera étudiée dans l’avenir pour obtenir des matrices d’interféromètres Mirau accordables permettant des mesures parallélisées d’interférométrie à décalage de phase ou d’interférométrie faiblement cohérente à balayage dans différentes gammes de longueurs d’onde. / Mirau-Type interferometers are widely used in full field optical 3D profilometers and vibrometers and other applications in biology and medicine fields have been demonstrated. When it was started, this thesis was the first attempt towards the realization of a fully integrated and tunable Mirau interferometer in silicon MEMS technology. The proposed design is based on 3D hybrid integration of an out-Of plane reference micro-Mirror scanner wafer and a optical beam splitter wafer. The major novelty of the micro-Mirror scanner design is the use of self-Aligned vertical electrostatic combs micro-Actuators made from double SOI (DSOI) wafers. Electromechanical modeling by semi-Analytical modeling and finite element simulations demonstrated that the combination of this electrostatic actuation with optimized serpentine suspension springs allows a large range, bidirectional and symmetrical vertical translation (+/-20µm) of the reference mirror. An original fabrication process of this mirror scanner, largely relying on Deep Reactive Ion Etching and on innovative patterning techniques with dry photosensitive films, was investigated, and the main critical fabrication steps were successfully demonstrated with commercial Si, SOI and DSOI substrates. The semi-Reflective broadband beam splitter was designed to be realized by a dielectric SiO2/SiNx multilayer membrane technology previously developed at IEF. Assembly of the mirror scanner and the beam splitter wafers will be investigated in the future to obtain integrated tunable Mirau interferometer arrays allowing parallelized phase shifting interferometry and low coherence scanning interferometry measurements in various wavelength ranges.

Cette thèse présente la conception d'un microgyromètre MEMS triaxial. Les microgyromètres ont de nombreuses applications telles que le contrôle d'attitude de drones ou l'interfaces homme/machine. Les microgyromètres triaxiaux sont particulièrement avantageux car ils permettent de déterminer les trois composantes de la vitesse de rotation à partir d'un seule structure monolithique et planaire. Le principe de fonctionnement des gyromètres vibrants à effet Coriolis (CVG) a été étudié analytiquement, puis une structure originale de gyromètre triaxial monolithique et planaire a été conçue. Cette structure est constituée de quatre poutres encastrées sur un cadre déformable. Des prototypes en silicium ont été réalisés et caractérisés. L’arséniure de gallium (GaAs) a été sélectionné pour la réalisation en raison de ses propriétés piézoélectriques et de son fort potentiel de miniaturisation. Un système d’électrodes pour l'excitation et la détection des vibrations mécaniques a été mis au point. Deux procédés d'usinage du GaAs ont été développés, un procédé de gravure chimique et un procédé de gravure plasma permettant tous les deux de graver verticalement le GaAs sur 450 micromètres de profondeur. Le procédé de gravure plasma est compatible avec la réalisation du CVG triaxial. Des résonateurs de test en GaAs dopé Carbone ont été réalisés par gravure chimique pour mesurer l'évolution en température de la résistivité et des propriétés électromécaniques de ce matériau. Ces mesures ont permis d'estimer que les marches aléatoires angulaires du CVG triaxial sont inférieures à 0,025 degré par racine d'heure sur la gamme de température [-40°C +80°C] pour les trois axes de mesure. Ceci situe le potentiel du CVG triaxial conçu parmi les CVG MEMS les plus performants. / This PhD present the conception of a triaxial MEMS microgyro. Microgyros offer a wide range of applications varying from drones attitude control to human interface devices. The triaxial microgyros offer great benefits because they allow determination of the three rotation rate components with only one monolithic planar structure. The operating principle of Coriolis Vibrating Gyro (CVG) has been studied analytically and an original structure has been designed. This structure consists of four beam clamped into a deformable frame. Some silicon prototypes have been machined and characterised. The gallium arsenide (GaAs) has been chosen for the realisation because of its piezoelectric properties and its great miniaturization potential. A transduction system based on GaAs piezoelectricity was developed. Two GaAs machining processes have been developed: a chemical etching process and a plasma etching process which both enable 450 micrometers deep vertical etching. The plasma etching technique allows high fidelity enough machining to be compatible with the triaxial CVG realisation. Some C-doped GaAs test resonators have been realised to measure the resistivity temperature dependency and electromechanical properties of this material. Those characterisations lead to estimate the angular random walk for the three axis ranges below 0,025 degree per square root hour on the temperature range [-40°C +80°C]. This sets the triaxial CVG together with the best monoaxial MEMS CVG.

Les microsystèmes, qui sont réalisés à partir de technologies micro-électroniques, connaissent un essor scientifique et technologique important grâce à leurs applications qui sont de plus en plus présentes dans la vie courante. Un des microsystèmes très en vogue est le transducteur ultrasonore capacitif micro-usiné, couramment appelé CMUT. Il est utilisé pour transmettre ou réceptionner des ondes ultrasonores et son domaine d’application est très vaste puisqu’on le trouve dans des sondes d’imagerie médicale, dans des hauts parleurs ultra directifs, pour le contrôle non destructif de matériaux… Dans la plupart des applications la puissance acoustique émise par le CMUT doit être très élevée ce qui implique que le CMUT va être utilisé en régime non-linéaire. En outre, même en utilisant des procédés de fabrication avancés, la microplaque mobile constituant le CMUT possède une déformation géométrique dans son état de repos. Il faudra par conséquent tenir compte des non-linéarités et des imperfections géométriques lors de l’analyse statique et dynamique du CMUT.Dans ce travail le modèle multiphysique d’un CMUT est développé en tenant compte des non-linéarités géométriques et électrostatiques ainsi que de la déflexion initiale de la microplaque. Les équations différentielles du mouvement de la microplaque, issues de la théorie des plaques de von Kármán, sont discrétisées spatialement en utilisant la méthode différentielle quadratique. La réponse statique d’un CMUT a été analysée à partir de simulations numériques et d’essais expérimentaux, en considérant des plaques planes et des plaques courbes et on montre qu’une déflexion initiale de la plaque conduit à une augmentation de la tension de pull-in. Le comportement dynamique non-linéaire du CMUT est analysé en discrétisant la variable temporelle et en utilisant la méthode des différences finies. En utilisant la technique de continuation arclength, nous déterminons la réponse en fréquence non-linéaire du CMUT. Suivant la valeur de la tension DC, le CMUT aura un comportement raidissant ou assouplissant. Une validation expérimentale du modèle numérique est réalisée en utilisant des microplaques planes et des microplaques courbes. En particulier nous montrons que l’utilisation de microplaques courbes, dues aux imperfections géométriques, change la réponse en fréquence du CMUT, passant d’un comportement raidissant à un comportement assouplissant, augmente le domaine de bi-stabilité et modifie la topologie de bifurcation.Le modèle numérique est par la suite étendu afin d’analyser les effets du film d’air sur le comportement dynamique de la microplaque en couplant les équations mécaniques du CMUT avec les équations de Reynolds du fluide. Les fréquences de résonance du problème multiphysique sont obtenues par résolution d'un système linéaire amorti. La validation expérimentale et numérique du modèle est effectuée en déterminant les fréquences de résonance du CMUT à des pressions différentes. Nous montrons que l’air comprimé change la réponse dynamique du CMUT par l’ajout d’une raideur et d’un amortissement. La diminution de la pression conduit à une diminution de la fréquence de résonance du système couplé et tend vers la fréquence de résonance de la microplaque. D'autre part la réponse en fréquence du système devient non-linéaire due à la diminution du coefficient d'amortissement. A la pression atmosphérique, on montre que le CMUT a un comportement non-linéaire de type assouplissant lorsque les excitations sont élevées. Le modèle numérique développé est un outil efficace pour analyser les CMUTs et augmenter leurs performanaces. / Micro Electro Mechanical Systems (MEMS) have attracted the interest of scientists and engineers thanks to the variety of their applications and their significant roles in our real life. One of the most important microsystems is the capacitive micromachined ultrasonic transducer (CMUT), which is used for transmitting ultrasonic waves, for instance in medical imaging and therapy. In such applications, a high-transmitted acoustic power is needed which implies driving the CMUT in the nonlinear regime. Moreover, from a manufacturing point of view, the fabrication of a CMUT with a flat surface is extremely difficult even with the recent advances in the fabrication process. Modeling this type of microsystem while including the main sources of nonlinearities and geometric imperfections is a challenging step in understanding its static and dynamic behavior.In this thesis, a multiphysics model of imperfect CMUTs is developed taking into account the geometric and electrostatic nonlinearities. The governing equations of motions are derived from the von Kármán plate theory and spatially discretized using the Differential Quadrature Method (DQM). For the static response, numerical simulations and experimental characterizations have been conducted on flat and curved CMUTs, showing that a positive initial deflection leads to an increase in the pull-in voltage. The nonlinear dynamic behavior of a CMUT is studied by discretizing the time variable using the Finite Difference Method (FDM). The nonlinear frequency and force responses have been determined by combining FDM with the arclength continuation technique. It is shown that the CMUT can exhibit a hardening or softening behavior depending on the DC voltage. An experimental validation of the numerical model is performed for the case of flat and curved microplates. We demonstrate that the geometric imperfection modifies the nonlinear frequency response of a CMUT from hardening to softening, increases its bistability domain and permits the tuning of its bifurcation topology.The numerical model is extended to investigate the effect of an air film on the dynamic behavior of the microplate by coupling the nonlinear mechanical equations with the Reynolds equation. The complex resonance frequencies of the multi-physical problem are determined by solving the damped linear system. An experimental and numerical validation of the model is performed by determining the resonance frequencies at several static pressures. We demonstrate that the air film is able to modify the dynamic response of the CMUT by adding stiffness and damping. By decreasing the static pressure, the resonance frequency of the coupled problem decreases and becomes closer to the natural resonance frequency of the microplate. Moreover, the frequency response of the system becomes nonlinear due the decrease in the damping coefficient. At atmospheric pressure, the softening type behavior of the CMUT is obtained by applying high excitation levels. The presented numerical model is a very efficient tool to understand the nonlinear dynamic behavior CMUTs and to enhance their performances.

Mecanismos flexíveis são mecanismos onde o movimento é dado pela flexibilidade da estrutura ao invés da presença de juntas e pinos. Tem grande aplicação em dispositivos de mecânica de precisão, área biomédica, e mais recentemente na construção de microeletromecanismos (“MEMS” em inglês). Várias técnicas são usadas no projeto de mecanismos flexíveis, sendo que entre elas, a Otimização Topológica tem se mostrado a mais genérica e sistemática. O método de Otimização Topológica combina um método de otimização com o método dos elementos finitos (MEF). A utilização da Otimização Topológica permite que um engenheiro ou cientista projete o mecanismo para a sua aplicação específica sem precisar adquirir conhecimentos específicos sobre estruturas e mecanismos flexíveis. Dessa forma, o objetivo desse trabalho é aplicar o método de Otimização Topológica no projeto de mecanismos flexíveis, usando o modelo de material SIMP (método de densidades). O projeto é definido como sendo um problema de otimização de uma estrutura flexível, sujeito à restrição na quantidade de material, onde a função objetivo é maximizar o deslocamento numa dada região do domínio da estrutura quando submetida a um dado carregamento em outra região. Para ilustrar a implementação do método são apresentados resultados de topologias bidimensionais de mecanismos flexíveis. / Compliant Mechanisms consist of mechanisms where the movement is giving by the structural flexibility rather than the presence of joints and pins. They are applied to precision mechanic devices, biomedical field, and more recently to the design of microelectromechanical systems (MEMS). Many techniques has been applied to design compliant mechanisms. Among them, topology optimization method is a generic and systematic method. Topology optimization combines optimization algorithms with finite element method and allows an engineer or a scientist to design a compliant mechanism for its application without having to acquire specific knowledge about structures or compliant mechanisms. Therefore, the objective of this work is to apply topology optimization to design compliant mechanisms. The topology optimization method implemented is based on the SIMP material model. The design is defined as the optimization problem of a flexible structure, subject to an amount of material constraint, where the objective function is to maximize the output displacement in a certain region of the structure domain due to an applied load to other region. To illustrate the implementation of the method, two-dimensional topologies of compliant mechanisms are presented as a result.

Atuadores Piezelétricos Flextensionais consistem de uma estrutura flexível atuada por cerâmicas piezelétricas (ou “pilhas” de cerâmicas). A estrutura flexível conectada a piezocerâmica deve gerar deslocamentos e forças em diferentes pontos específicos do domínio, para uma direção especificada. Estes atuadores são usados em aplicações de mecânica de precisão, tal como, sistemas microeletromecânicos (MEMS), manipulador de células, interferometria laser, equipamentos de nanotecnologia, equipamentos de microcirurgias, nanoposicionadores, sonda de varredura microscópica, e etc. Porém, devido ao fato destes atuadores consistirem principalmente de um mecanismo flexível, seu projeto é complexo. A estrutura flexível comporta-se como um transformador mecânico pela amplificação para converter, direcionar e amplificar os pequenos deslocamentos gerados pela piezocerâmica (ordem de nanômetros). A estrutura flexível é projetada distribuindo-se flexibilidade e rigidez no domínio de projeto, o que pode ser obtido usando a otimização topológica. Portanto, o objetivo deste trabalho é implementar um método sistemático baseado no método de otimização topológica para projetar atuadores piezelétricos flextensionais. Essencialmente, o método de otimização topológica consiste em encontrar a distribuição ótima de material perfurando o domínio de projeto com infinitos microfuros. O material em cada ponto pode alterar de vazio a total presença de material, também assumindo material intermediário (ou compósito). A implementação do método de otimização topológica é baseado no modelo de material SIMP (Simple Isotropic Material with Penalization). O problema de otimização é posto como a maximização dos deslocamentos gerados (ou força de blocagem) em diferentes pontos e direções especificadas do domínio. Considerando o comportamento linear da piezocerâmica. Alterando a flexibilidade e a rigidez da estrutura flexível conectada a piezocerâmica obtém-se diferentes tipos de atuadores piezelétricos flextensionais, que podem ser projetados para determinadas aplicações. Para ilustrar o método, os exemplos mostrados são modelos bidimensionais (2D), uma vez que a maior parte das aplicações envolve dispositivos planos. Estes atuadores são fabricados usando corrosão química em chapas de cobre abaixo de 200 μm de espessura através do método de litografia. Técnica de corrosão química tem um baixo custo e permite-nos fabricar diversos protótipos para testes. Esta técnica pode ser facilmente utilizada no LNLS (Laboratório Nacional de Luz Síncrotron – Campinas). Análise experimental destes protótipos são procedidas para medição de deslocamentos usando uma Probe Station. Como trabalho futuro, estes protótipos serão construídos em escala de MEMS. / Flextensional Piezoelectric Actuators consist of a flexible structure actuated by piezoelectric ceramics (or a stack of piezoceramics). The flexible structure connected to the piezoceramic must generate displacements and forces in different specified points of the domain, according to a specific direction. These actuators are applied to precision mechanic applications such as microelectromechanical systems (MEMS), cell manipulators, laser interferometers, nanotechnology equipment, microsurgery equipment, nanopositioners, scanning probe microscopy, etc. However, due to the fact these actuators essentially consist of a compliant mechanism their design is complex. The compliant structure behaves as a mechanical transform by amplifying and changing the direction of small output displacements generated by piezoceramics (order of nanometer). The flexible structure is designed by distributing flexibility and stiffness in the design domain, which can be archieved by using topology optimization. Therefore, the objective of this work is to implement a systematic method based on topology optimization method to design flextensional piezoelectric actuators. Essentially, the topology optimization method consists of finding the optimal material distribution in a perforated design domain with infinite microvoids. The material in each point can change from void to full material, also assuming intermediate (or composite) material. The implemented topology optimization method is based on the SIMP (Simple Isotropic Material with Penalization) material model. The optimization problem is posed as maximization of output displacements (or grabbing forces) in different specified directions and points of the domain. A linear behavior of piezoceramic is considered. By changing the flexibility and stiffness of flexible structure connected to the piezoceramics different types of flextensional piezoelectric actuators can be designed for a desired application. To illustrate the method, examples presented herein are limited to two-dimensional (2D) models once in most part of applications of these actuators they are planar devices. These actuators are manufactured by using chemical corrosion on a 200 um thickness copper plate through lithography method. Chemical corrosion technique has a low cost and it allow us to manufacture several prototypes for testing. For this technique, facilities of the micromachining laboratory of National Sincroton Light Laboratory (LNLS - Campinas) are used. Experimental analysis of these prototypes are conducted by measuring displacements using a probe station. As a future work, these prototypes will be built in a MEMS scale.

O presente trabalho trata do desenvolvimento de um sistema de sensoriamento de orientação utilizando sensores inerciais de baixo custo, de tecnologia MicroElectroMechanical Systems, MEMS, que apresentam altas taxas de ruído. Assim, é realizada a filtragem e fusão dos dados dos sensores para obtenção de uma estimativa confiável, com a aplicação do filtro de Kalman estendido. O sistema é utilizado para a navegação e controle em um veículo aquático de superfície autônomo. No desenvolvimento do trabalho são investigados os princípios da navegação inercial, da representação da orientação e os sistemas de coordenadas envolvidos, apresentando o método por ângulos de Euler, quatérnios e DCM e o procedimento de atualização conforme a variação da orientação. O sistema desenvolvido foi testado em bancada e em um barco com formato de trimarã construído no Laboratório de Controle e Eletrônica de Potência, na Escola de Engenharia de São Carlos, mostrando os resultados dos testes realizados navegando em uma represa, obtendo resultados satisfatórios para essa aplicação. É mostrado também o comportamento dinâmico dos veículos aquáticos de superfície através do estudo da dinâmica de corpos rígidos. / This work describes the development of an orientation sensing system composed of low cost inertial sensors with MicroElectroMechanical Systems (MEMS) technology, which presents high noise levels. Thus, filtering and sensor\'s measurements fusion is done in order to achieve a reliable estimation, trough an extended Kalman filter. The system is used for navigation and control of an autonomous aquatic surface vehicle. In this work, the principles of inertial navigation, orientation representation as well as the coordinate frames involved are investigated, presenting the methods trough Euler angles, quaternions and DCM, and the update proceeding according to the orientation changes. The developed system was tested in the lab and on a trimaran shaped vessel navigating on a dam, wich was developed in the Control and Power Electronics Laboratory at the São Carlos School of Engineering, achieving satisfactory results for this application. It is also shown the dynamic behavior of the surface aquatic vehicles, using rigid-body dynamics.

Ce travail a été effectué dans le cadre d’études de la miniaturisation d’un cryo-réfrigérateur de type tube à gaz pulsé (TGP) et particulièrement pour mieux comprendre l’écoulement et le transfert de chaleur dans un régénérateur, l’élément clé du TGP.Nous présentons les études numérique et expérimentale du facteur de frottement et du nombre de Nusselt pour les écoulements stationnaires et continus à nombre de Reynolds modéré O(1 − 100) au sein d’un régénérateur micro-fabriqué. L’influence de la porosité et de la géométrie est étudiée. La micro-structure précisément contrôlée représente des canaux incurvés de largeur de 10, 20 et 40 μm et de profondeur de 100 à 300 μm qui forment un réseau de colonnes ayant des profiles de losanges ou sinusoïdaux. Les micro-canaux sont gravés sur un substrat de silicium par la technologie DRIE. Une technologie d’implantation de thermomètres à l’intérieur de la micro-structure de régénérateur a été développée et mise en œuvre. Les performances des micro-régénérateurs ont été étudiées selon deux approches : la première se base sur le rapport des pertes de charges dans l’écoulement et de l’efficacité du transfert thermique (NPH/NTU) ; la deuxième, sur le coefficient de transfert de chaleur globale proposé par Bejan. L’étude numérique de ces deux critères montre tout le potentiel des micro-structures proposées. / This research is done in the framework of miniaturisation of pulse tube cryocoolers studies and especially to gain a better understanding of the mass flow and heat transfert in the regenerator, which is a crucial component of these type of cryocoolers.In this work we present a numerical and experimental study of the Darcy-Weisbach friction factor and Nusselt number for a continuous and steady flow at moderate Reynolds number O(1−100) in a micro-machined regenerators. The influence of porosity from 40 to 80 % and of the geometry parameters are studied. Well-controlled microstructures represent convoluted channels of 10, 20 or 40 μm width and 100 or 300 μm depth generated by rhombic- or sinusoidal-shaped columns.The channels are etched in Silicon wafers using DRIE MEMS technology. The thermometers are integrated inside the regenerator’s micro-structure to measure the temperature evolution. The efficiency of the regenerators is estimated using two different approaches : the first, as a ratio of pressure drop losses and heat transfer efficiency (NPH/NTU) ; the second, as a volumetric heat transfer density coefficient proposed by Bejan. The numerical study of the efficiency shows theinterest of proposed micro-structures.

Les propriétés physiques et chimiques exceptionnelles du matériau diamant ont suscité l'intérêt des chercheurs pour le développement d'applications industrielles, comme par exemple dans les domaines de la dissipation thermique ou de l'électronique de puissance. En particulier, les propriétés mécaniques remarquables de ce matériau peuvent être exploitées avantageusement pour la conception de résonateurs MEMS (Micro-Electro-Mechanical Systems). Même si certains dispositifs MEMS à base de diamant avaient été décrits dans la littérature, les propriétés mécaniques de ce matériau n'avaient jamais été associées à ses propriétés chimiques pour la réalisation de transducteurs chimiques ou biochimiques à base de résonateurs MEMS. Ainsi, l'objectif cette thèse a été de démontrer l'intérêt de ce matériau innovant pour la fabrication de ces capteurs. Les MEMS offrent la possibilité de faire de la détection en temps réel de manière directe (sans marqueur), rapide et sensible, sur de faibles quantités d'analytes. De plus ils permettent d'adresser des cibles non électro-actives qui ne peuvent pas être détectées par des capteurs électrochimiques. Dans cette étude, nous avons développé dans un premier temps des procédés de micro-structuration spécifiques du diamant. Ces procédés entièrement compatibles avec des techniques de salle blanche ont permis d'aboutir à la réalisation de nombreux transducteurs à base de micro-leviers en diamant sur des substrats en silicium de 4 pouces. De plus les approches développées permettent d'éviter la gravure fastidieuse du matériau diamant. Leur caractérisation mécanique en régime dynamique a permis de caractériser le module d'Young E du matériau diamant synthétisé en fonction des conditions de croissance. Dans le meilleur cas une valeur de E très élevée de l'ordre de 1100 GPa a été obtenue, ce qui est très proche de la valeur du diamant monocristallin (1200GPa). Par ailleurs, nous avons pu vérifier que les propriétés de résonance (fréquence de résonance et facteur de qualité) des structures en diamant réalisées étaient supérieures à celles de structures identiques en silicium. En particulier, cela rend ces résonateurs plus aptes à être exploités en milieux liquides. Nous avons montré que dans de tels milieux les micro-leviers en diamant étaient très peu sensibles à une variation massique. En revanche leur sensibilité à une variation de masse volumique du liquide est de l'ordre de 3Hz.kg-1.m3 et donc significative. Par ailleurs, en fonctionnalisant des micro-leviers en diamant par de l'acide caproïque, nous avons mis en évidence que des variations de densité de charges à la surface des micro-leviers pouvaient induire des variations de fréquence de résonance de plusieurs dizaines de Hz dans le cas de structures vibrant à quelques kHz. Ceci a permis de mettre en évidence la grande sensibilité de nos transducteurs en diamant à des interactions moléculaires. Dans ce contexte nous avons pu réaliser un capteur d'ADN permettant la reconnaissance spécifique en temps réel de brins d'ADN cibles de 24 paires de bases sans marqueur. En parallèle de ces travaux, des structures d'actionnement et de lecture ont été intégrées et évalué sur des dispositifs résonants à base de diamant. Ceci a permis de les interfacer à un premier prototype de système d'acquisition électronique portable dédié réalisé au cours de cette thèse / Diamond material is very promising for future technological applications due to its outstanding physical and chemical properties. In particular, its remarkable mechanical features may be used advantageously for MEMS (Micro-Electro-Mechanical Systems) devices development. However, even though several diamond-based MEMS devices have been reported in the literature, the mechanical properties of this material have never been combined to its chemical properties for developing resonating MEMS-based biochemical transducers. Thus, the purpose of this study was to demonstrate the interest of such diamond transducers for chemical or biochemical sensing applications. MEMS devices are indeed attractive because they allow fast, label free and sensitive detection in real time on small volumes due to their miniaturized size. Moreover they offer the possibility to address non electroactive target species which are undetectable using classical electrochemical methods. In this study, we developed specific clean room compatible processes for diamond micro-structuring. The bottom-up approaches undertaken here were based on diamond patterns growth. Hence they avoid time consuming diamond etching steps. These processes allowed fabricating several diamond micro-cantilever transducers over 4-inches substrates. The mechanical characterization of the cantilevers in oscillating regime was performed in order to extract the material Young's modulus E when the structures were made of different polycrystalline diamond qualities. In the best case, a value of E as high as 1100 GPa and very close to the Young's modulus of monocrystalline diamond (1200 GPa) was achieved. In parallel, we verified that both cantilevers resonance frequency and Q-factor were significantly higher than those of identical silicon structures (on average twice higher). This makes diamond mechanical structures more suitable for use in liquid media. In such damping media a very poor sensitivity to mass changes was determined. Nevertheless, their sensitivity to liquid density changes was found to be significant (-3Hz.kg-1.m3). More importantly, by functionalizing diamond micro-cantilevers with caproic acid, an evidence of these transducers high sensitivity to surface molecular interactions was shown. Especially, when charge density variations occurs several tens Hz changes were measured on kHz-range oscillating cantilevers. In this context, a label free DNA sensor was achieved and allowed the specific detection of 24-mer target DNA in real time. In parallel to this work, actuation and boron doped diamond-based readout gauges were integrated to the resonant cantilevers and characterized. They allowed interfacing the cantilevers to a dedicated acquisition electronic prototype developed in the course of this study