L’étude proposée est une étude préliminaire en vue d’utiliser des microrésonateurs en silicium fonctionnalisé en vue de la détection électromécanique d’espèces biologiques présentes à l’état de trace. Deux aspects ont été principalement étudiés : la capture ultra-sensible mais aussi la capture ultra-spécifique d’espèces biologiques comme des marqueurs pour la maladie d’Alzheimer. Elle a été effectuée dans le cadre d’une collaboration entre le département MINASYS (Micro et Nano-Système) de l’Institut d’Electronique Fondamental (IEF) et le Laboratoire Protéines et Nanotechnologies en Sciences Séparatives de la Faculté de Pharmacie de Châtenay-Malabry.Il s’est ainsi s’agit de développer un micro-résonateur en silicium intégrant des canaux enterrés permettant la circulation d’un fluide biologique à l’intérieur de la poutre et non à l’extérieur comme ils le sont plus couramment, et ce, dans le but de limiter au maximum l’amortissement du résonateur. En ce qui concerne les aspects en biologie, nous nous sommes plus particulièrement interessé à la détection d’un bio-marqueur de la maladie d’Alzheimer, le peptide amyloïde Aβ1-42. Jusqu’à présent, le dépistage de la maladie nécessite une concentration suffisamment importante de bio-marqueurs et le recours à une ponction du liquide céphalorachidien après l’apparition des symptômes de la maladie est donc nécessaire. Le microsystème présenté ici permettra de nous approcher d’un système capable de détecter des traces de biomarqueurs présentes dans le sang ou l’urine par exemple. Ainsi, dans un premier temps, nous avons mis au point un mode de détection précoce du peptide Aβ1-42 couplant un canal micro-fluidique et la microscopie à fluorescence. La surface des canaux en silicium doit être fonctionnalisée afin de permettre le greffage spécifique des antigènes. Pour cela, nous avons mis au point une technique s’appuyant sur la reconnaissance spécifique anticorps-antigène, celle-ci nécessitant une étape préalable de fonctionnalisation chimique de surface.Le manuscrit présenté ici s’articule en quatre parties principales. Dans un premier temps, une étude bibliographique permet de faire l’état de l’art sur le principe de fonctionnement de différents types bio-capteurs couramment utilisés et leurs performances. Une seconde partie décrit la fonctionnalisation de surface du silicium et plus spécifiquement de la réaction de silanisation en phase liquide réalisée sur des surfaces planes et dans des canaux fluidique. Nous abordons ensuite le domaine de la reconnaissance spécifique d’entités biologiques et détaillons les étapes de greffage des protéines réalisées sur les surfaces ainsi que la conception d’immuno-sandwich entreprise dans des canaux fluidiques. Enfin la dernière partie du manuscrit rassemble des différents résultats préliminaires obtenus en vue de l’élaboration du micro-capteur de type poutre résonante à canaux enterrés. / This study is a preliminary study to use a fonctionnalized microsensor based on electromechanical detection of biological species present at trace levels. Two aspects were involved in this work: capture high-sensitivity but also the capture of ultra-specific biological species as markers for Alzheimer's disease. It was conducted as part of collaboration between the department MINASYS (Micro and Nanobio and Microsystems) of the Institute of Fundamental Electronics (IEF) and the Laboratory Proteins and Nanotechnologies in Separative Sciences, at the Faculty of Pharmacy of Chatenay-Malabry.The sensor includes a micro-resonator, placed in vaccum, incorporating silicon buried channels for the circulation of a biological fluid and not outside as they are more commonly, and in order to minimize the damping of the resonator. As regards the biological aspects, we primily focus on the detection of a biomarker of Alzheimer's disease, amyloidal peptide Aβ1-42. Until now, screening requires the use of a puncture and cerebrospinal fluid after onset of symptoms, therefore a sufficiently high concentration of biomarkers is required. Initially, we developed a method of early detection of Aβ1-42 peptide coupling a microfluidic system and fluorescence microscopy. Therefore, the micro-resonator that are present here allow to detect these biomarkers that are present at very low concentrations in other biological fluids in the first stage of the disease, for example, in the blood or urine. Thus, in a first step, we have developed a method of early detection of Aβ1-42 peptide coupling channel microfluidic and fluorescence microscopy. The surface of the channels in silicon must be functionalized to allow the grafting of specific antigens. For this, we developed a technique based on the specific antibody-antigen recognition, the latter requires a preliminary step of chemical functionalization of surfaces.This manuscript consists of four main parts. Initially, we present a literature review of the state of the art on the principle of operation of various types commonly used bio-sensors and the performance obtained. A second chapter describes the functionalization of silicon area and more specifically of the silanization reaction in liquid phase performed on flat surfaces and in fluidic channels. In the following chapter, we discuss the field of specific recognition of biological entities and detail the steps of grafting performed on protein surfaces and design immunoassay sandwich in fluidic channels. The last chapter of the manuscript brings together various preliminary results for the development of micro-sensor type resonant beam.

<p><a>The quick, reliable, and sensitive detection of bacterial contamination is desired in areas such as counter bioterrorism, medicine, and food/water safety as pathogens such as<i> E. coli</i> can cause harmful effects with the presence of just a few cells. However, standard high sensitivity techniques require laboratories and trained technicians, requiring significant time and expense. More desirable would be a sensitive point-of-care device that could detect an array of pathogens without sample pre-treatment, or a continuous monitoring device operating without the need for frequent operator intervention.<br> <br> Optical microring resonators in silicon photonic platforms are particularly promising as scalable, multiplexed refractive index sensors for an integrated biosensing array. However, no systematic effort has been made to optimize the sensitivity of microrings for the detection of relatively large discrete analytes such as bacteria, which differs from the commonly considered cases of fluid or molecular sensitivity. This work demonstrates the feasibility of using high finesse microrings to detect whole bacterial cells with single cell resolution over a full range of potential analyte-to-sensor binding scenarios. Sensitivity parameters describing the case of discrete analyte detection are derived and used to guide computational optimization of microrings and their constituent waveguides, after considering a range of parameters such as waveguide dimension, material, modal polarization, and ring radius. The sensitivity of the optimized 2.5 µm radius silicon TM O-band ring is experimentally demonstrated with photoresist cellular simulants. A multiplexed optimized ring array is then shown to detect <i>E. Coli</i> cells in an experimental proof of concept.</a></p>

Ce travail porte sur l'étude théorique et numérique des cristaux phononiques non linéaires. Les non linéarités étudiées sont celles dues aux constantes élastiques d'ordre deux (quadratiques) et trois (cubiques) des matériaux constituant les cristaux. Les effets non linéaires sont étudiés grâce à des méthodes d'éléments finis en simulant la propagation d'une onde élastique à travers les cristaux.Un premier projet de recherche a porté sur l'étude d'une structure osseuse, et plus spécifiquement sur la dispersion des ondes élastiques dans une structure constituée d'une alternance de couches de collagène et d'hydroxy apatite. Les simulations montrent qu'il existe un lien étroit entre l'hydratation des os et leur capacité à dissiper l'énergie.La seconde étude réalisée concerne un résonateur élastique. Une structure constituée d'inclusions d'acier dans de la silice présente un comportement de commutateur lorsque les non linéarités cubiques de l'acier sont prises en compte. Cet effet fortement non linéaire apparaît lorsque l'amplitude de l'onde incidente dépasse un certain seuil. Un modèle analytique complet est fourni.La dernière étude réalisée montre la conception de matériaux composites possédant de fortes non linéarités cubiques mais de faibles non linéarités quadratiques. La dérivation des lois de mélange des paramètres élastiques d'un matériau non linéaire dans un matériau linéaire est effectuée à l'ordre trois. Les équations montrent une forte amplification des paramètres non linéaires du matériau résultant pour certaines concentrations. Les simulations permettent de conclure que le résonateur mentionné ci-dessus peut effectivement être réalisé. / This work is dedicated to the theoretical and numerical study of nonlinear phononic crystals. The studied nonlinearities are those due to the second (quadratic) and third (cubic) order elastic constants of the materials that constitute the crystals. Nonlinear effects are studied by the means of finite element methods, used to simulate the propagation of an elastic wave through the crystals.A first research project concerns the study of a bone structure, namely the dispersion of elastic waves in a structure composed of collagen and hydroxy apatite alternate constituent layers. Simulations showed that it exists a strong link between bones hydration and their ability to dissipate the energy.The second study relates to an elastic resonator. A structure composed of steel inclusions in a silica matrix shows a switch behavior when the cubic nonlinearities of steel are taken into account. This strong nonlinear effect appears when the amplitude of the incident wave reaches a threshold. A full analytical model is provided.The last study demonstrates the design of composite materials with both strong cubic nonlinearities and weak quadratic nonlinearities. The derivation of the mixing laws of the elastic parameters of a nonlinear material inside a linear one is performed up to order three. Equations show a strong amplification of the nonlinear parameters of the material for some concentrations. Numerical simulations allow to conclude that the above mentioned resonator can be produced.

Le contrôle de la propagation des ondes élastiques repose principalement sur la conception de milieu artificiel à base de matériaux structurés pour obtenir une ingénierie avancée de la dispersion de la propagation. Au cours de la thèse, la dispersion du mode (S0) dans des membranes micro-structurées à base d’AlN a été numériquement investiguée et les applications qui en découlent explorées. Il est mis en évidence le lien fort entre la dispersion du mode et la sensibilité aux perturbations externes en combinant la membrane d’AlN avec une couche de SiO2 structurée en rubans. En particulier, il est montré qu’il est possible d’obtenir un TCF=0 pour les résonateurs sans presque aucune dégradation du coefficient K2. Il est montré qu’il est possible d’ouvrir des bandes interdites avec une largeur de l’ordre de 50% en structurant l’AlN sous forme de rubans ou en utilisant des piliers pour former un PhnC. Sur cette base, des designs de cavités et de guides d’ondes sont proposés et leurs performances sont étudiées en fonction des paramètres géométriques. Il est également proposé un nouveau design de cavité basé sur l’introduction d’un défaut résonant dans le PhnC sous forme de disque de dimension très petite par-rapport à la taille de la cellule élémentaire. Le défaut permet d’introduire des modes quasi-plats dans le diagramme de bande et permet en conséquence la conception d’une nouvelle génération de dispositifs phononiques robustes pour des applications en traitement du signal et capteurs. Les structures optimales sont utilisées pour la conception de capteur de champs magnétiques, une sensibilité de 5% est obtenue pour le mode localisé dans le cas d’un disque magnéto-élastique / The control of elastic wave propagation relies mainly on the design of artificial media based on structured materials to achieve advanced propagation dispersion engineering. During the thesis, the dispersion of the mode (S0) in micro-structured membranes based on AlN was numerically investigated and the resulting applications explored. The strong link between mode dispersion and sensitivity to external disturbances is highlighted by combining the AlN membrane with a layer of SiO2 structured into strips. In particular, it is shown that it is possible to obtain a TCF = 0 for the resonators without any degradation of the K2 coefficient. It is shown that it is possible to open wide band-gaps of 50% by structuring the AlN in the shape of strips or using pillars to form a PhnC. On this basis, designs of cavities and waveguides are proposed and their performances are studied according to the geometrical parameters. It is also proposed a new cavity design based on the introduction of a resonant defect with a disc shape in the PhnC and presenting very small size in comparison to the unit cell. The defect makes it possible to introduce quasi-flat modes in the band diagram and consequently allows the design of a new generation of phononic devices for signal processing and sensor applications. The optimal structures are used to design a magnetic field sensor design, a sensitivity of 5% is obtained for the localized mode in the case of defect based on magneto-elastic thin film.

Les systèmes modernes de télécommunication touchent un public de plus en plus large, ce qui induit inexorablement une utilisation intensive de la gamme hyperfréquence. Pour éviter la saturation des services disponibles, les spécifications concernant les systèmes sont de plus en plus exigeantes. Ces contraintes drastiques sont reportées sur les différents éléments et en particulier sur les filtres. C'est dans ce contexte que nous présentons une nouvelle technologie de réalisation de filtres, l'objectif étant d'améliorer les performances électriques des filtres sans renoncer à la facilité de réalisation des circuits. Ainsi, dans le premier chapitre, nous introduisons les deux techniques historiques de fabrication de filtres, les technologies planaire et volumique. Puis une association de ces deux technologies appelée Substrate Integrated Waveguide (SIW) est présentée. Elle consiste à créer des cavités enterrées à l'intérieur d'un substrat planaire. Dans le deuxième chapitre, nous proposons des améliorations concernant cette technique SIW, celles-ci concernent non seulement les topologies des résonateurs mais aussi les possibilités de couplages entre les résonateurs. Enfin, dans le troisième chapitre, nous présentons une nouvelle topologie de filtre basée sur une recombinaison entre éléments planaires et cavités intégrées. La synthèse de ce résonateur est aussi décrite dans cette partie. Les avantages de cette nouvelle topologie sont une conception aisée ainsi que des bonnes performances électriques.

The objective of this research is to apply micromachined silicon-based resonant gravimetric sensors to the detection of gas-phase volatile organic compounds (VOCs). This is done in two primary tasks: 1) the optimization and application of silicon disk resonators to the detection of gas-phase VOCs, and 2) the development and application of a novel gravimetric-capacitive multisensor platform for the detection of gas-phase VOCs. In the rst task, the design and fabrication of a silicon-based disk resonator structure utilizing an in-plane resonance mode is undertaken. The resonance characteristics of the disk resonator are characterized and optimized. The optimized characteristics include the resonator Q-factor as a function of geometric parameters, and the dynamic displacement of the in-plane resonance mode. The Q-factors of the disk resonators range from 2600 to 4360 at atmosphere for disk silicon thicknesses from 7 µm to 18 µm, respectively. The resonance frequency of the in-plane resonance mode ranges from 260 kHz up to 750 kHz. The disk resonators are applied to the sensing of gas-phase VOCs using (poly)isobutylene as a sensitive layer. Limits of detection for benzene, toluene and m-xylene vapors of 5.3 ppm, 1.2 ppm, and 0.6 ppm are respectively obtained. Finally, models for the limits of detection and chemical sensitivity of the resonator structures are developed for the case of the polymer layers used. In the second task, a silicon-based resonator is combined with a capacitive structure to produce a multisensor structure for the sensing of gas-phase VOCs. Fabrication of the multisensor structure is undertaken, and the sensor is theoretically modeled. The baseline capacitance of the capacitor component of the multisensor is estimated to be 170 fF. Finally, initial VOC detection results for the capacitive aspect of the sensor are obtained.

Precise measurements of both absolute frequencies and small frequency differences of atomic energy levels have played an important role in the development of physics. For example, high precision measurements of absolute frequencies of the 2S½ → 2P ½ transition (D1 line) of alkali atoms form an important link in the measurement of the fine structure constant, α. Similarly, precise interferometric measurements of the local gravitational acceleration (g) rely on the knowledge of the absolute frequencies of the 2S½ → 2P 3/2 transition (D2line) in alkali atoms. Difference frequency measurements of hyperfine structure and isotope shifts of atomic energy levels provide valuable information about the structure of the nucleus, which in turn helps in fine tuning the atomic wave functions used in theoretical calculations. The work reported in this thesis starts with the development and refinement of high precision measurement of absolute frequencies using a ring-cavity resonator. The measurement technique is relatively simple and cost-effective, but the accuracy is comparable to that achieved with the frequency comb technique (10¯11) when the accuracy is limited by the natural linewidth of the transition being measured. The technique combines the advantages of using tunable diode lasers to access atomic transitions with the fact that the absolute frequency of the D2 line in87Rb is known with an accuracy of 6 kHz. A frequency-stabilized diode laser locked to this line is used as a frequency reference, along with a ring-cavity resonator whose length is locked to the reference laser. For a given cavity length, an unknown laser locked to an atomic transition has a small frequency offset from the nearest cavity resonance. We use an acousto-optic modulator (AOM) to compensate for this frequency offset. The measured offset is combined with the cavity mode number to obtain a precise value for the frequency of The unknown laser. We have used this technique for absolute frequency measurements Of the D lines in133Cs and 6,7Li, and the 398.8nm line in Yb. We have also developed a technique to measure the ‘difference frequency’ of atomic energy levels using a single diode laser and an AOM. In this technique, the laser is first locked to a given hyperfine transition. The laser frequency is then shifted using the AOM to another hyperfine transition and the AOM frequency is locked to this difference. Thus the AOM frequency directly gives a measurement of the hyperfine interval. Applying this AOM technique we have measured the hyperfine interval of the D1 lines of all alkali atoms with high precision. We have further developed a technique of coheren-tcontrol spectroscopy (CCS) using co-propagating control and probe beam that is useful for highresolution spectroscopy. In this technique, the probe beam is locked to a transition and its absorption signal is monitored while the control beam is scanned through neighbouring transition. As the control comes into resonance with another transition, the probe absorption is reduced and the signal shows a Doppler free dip. This technique allows us to resolve transitions that are otherwise swamped by crossover resonances in conventional saturated absorption spectroscopy (SAS). We have applied this technique to measure hyperfine intervals in the D2 line of several alkali atoms. Thus, we were able to do high-precision measurements of both absolute and difference frequency of atomic transitions. The precision of the absolute frequency measurement is finally limited by the accuracy of 6 kHz with which the reference frequency is known. The nearby two photon transition in Rb, i.e. the 5S1/2→5D3/2 transition at 778 nm, is known with an accuracy of 1 kHz. In future, we hope to improve the accuracy of our technique using this transition as the reference. This thesis is organized as follows: In Chapter1,we give a brief introduction to our work.. We review the importance of frequency measurements and precision spectroscopy, followed by a comparison of the frequency comb and our ring cavity technique. In Chapter2, we describe measurements of the absolute frequency of the D lines of 133Cs using the ring cavity. We give a detailed discussion of the technique, the Possible sources of errors, and ways to check for the errors. The measurement of the absolute frequency of the D lines of Cs allows a direct comparison to frequency comb measurements, and thus acts as a good check on our technique. In Chapter 3, we describe the absolute frequency and isotope shift measurements in the 398.8 nm line in Yb. We probed this line by frequency doubling the output of a tunable Ti:Sapphire laser. We obtained< 60 kHz precision in our measurements and were able to resolve several discrepancies in previous measurements on this line. In Chapter 4, we describe the measurement of hyperfine structure in the D1 lines of alkali atoms. We used conventional saturated-absorption spectroscopy in a vapor cell to probe different hyperfine transitions and then used our AOM technique to measure the hyperfine interval with high precision. In Chapter 5 we discuss our measurements of hyperfine structure in the D2 lines of several alkali atoms. In the case of 23Na and 39K, the closely-spaced hyperfine transitions are not completely resolved in conventional saturatedabsorption spectroscopy due to the presence of cross over resonances. We have used coherent control spectroscopy to obtain crossover-free spectra and then measured the hyperfine intervals using an AOM. This technique was also used for high resolution spectroscopy in the D2 line of 133Cs. Finally, we describe our measurements of hyperfine structure in the D2 line of Rb using normal saturated absorption spectroscopy. Chapter 6, describes the relative and absolute frequency measurements in the D lines of6,7 Li at 670nm. High-precision measurements in lithium are of special interest because theoretical calculations of atomic properties in this simple three electron system are fairly advanced. Lithium spectroscopy poses an experimental challenge and we describe our efforts in doing highresolution spectroscopy on this system. Chapter 7 describes the hyperfine spectroscopy on the1P 1 state of 173Yb. Measurement of hyperfine structure in 173Yb has a problem because two of the hyperfine transitions overlap with the transition in 172Yb. In our earlier work (described in chapter 4), we had solved this problem by using multipeak fitting to the partially resolved spectrum. Here, we directly resolve the hyperfine transitions by using transverse laser cooling to selectively deflect the 173Yb isotope. In Chapter 8 , we give a broad conclusion to the work reported in this thesis and suggest future avenues of research to continue the work commenced here.

This report collects selected outstanding scientific and technological results obtained within the frame of the European project "FLASiC" (Flash LAmp Supported Deposition of 3C-SiC) but also other work performed in adjacent fields. Goal of the project was the production of large-area epitaxial 3C-SiC layers grown on Si, where in an early stage of SiC deposition the SiC/Si interface is rigorously improved by energetic electromagnetic radiation from purpose-built flash lamp equipment developed at Forschungszentrum Rossendorf. Background of this work is the challenging task for areas like microelectronics, biotechnology, or biomedicine to meet the growing demands for high-quality electronic sensors to work at high temperatures and under extreme environmental conditions. First results in continuation of the project work – for example, the deposition of the topical semiconductor material zinc oxide (ZnO) on epitaxial 3C-SiC/Si layers – are reported too.

At the Forschungszentrum Rossendorf the build-up of the superconducting 1.3 GHz accelerator ELBE is still in progress. Furthermore a new sc photo injector (SRF gun) is under development, which should accelerate electrons up to 10 MeV at 1.3 GHz frequency. The use of electron accelerators is also more and more interesting for applications where the destructive potential of the electrons are used like sterilization of medical waste and medical products, food irradiation or decontamination of sewage. For these processes a high power is required to achieve a high product throughput in a plant. The aim is therefore to use beam powers of around 100 kW or more. Since the applications of electron accelerators in industrial environments are steadily increasing one can speculate about transferring the above named state of the arte technology to industrial electron accelerators. At the FZR a feasibility study of such a table top electron accelerator (TTE) has been performed to investigate its technical limits and marketabilitys.

Composite metamaterials are periodic metal-dielectric structures operating at wavelengths larger than the structure period. If properly designed these structures behave as homogeneous media described by effective permittivity and permeability parameters. These effective parameters can be designed to take values in domains that are not available in naturally occurring media; notably it is possible to design composite metamaterials with simultaneously negative permittivity and permeability, or, in other words, with a negative refractive index. However, in many experimental or numerical studies it is far from obvious that the use of a homogeneous model is justified for a given structure at a given wavelength. This issue is often glossed over in the literature. <br />In this work I take a detailed look at the fundamental assumptions on which effective medium models rely and put forward a method for determining frequency domains where a given structure may or may not be accurately described by homogeneous effective medium parameters. This work opens the door to a more detailed understanding of the transition between homogeneous and inhomogeneous behavior in composite metamaterials, in particular by introducing the novel notions of custom made effective medium model, and of meta-photonic crystal.