This work is devoted to investigate light confinement in rolled-up microtubular cavities and their optofluidic applications. The microcavities are fabricated by a roll-up mechanism based on releasing pre-strained silicon-oxide nanomembranes. By defining the shape and thickness of the nanomembranes, the geometrical tube structure is well controlled. Micro-photoluminescence spectroscopy at room temperature is employed to study the optical modes and their dependence on the structural characteristics of the microtubes. Finite-difference-time-domain simulations are performed to elucidate the experimental results. In addition, a theoretical model (based on a wave description) is applied to describe the optical modes in the tubular microcavities, supporting quantitatively and qualitatively the experimental findings. Precise spectral tuning of the optical modes is achieved by two post-fabrication methods. One method employs conformal coating of the tube wall with Al2O3 monolayers by atomic-layer-deposition, which permits a mode tuning over a wide spectral range (larger than one free-spectral-range). An average mode tuning to longer wavelengths of 0.11nm/ Al2O3-monolayer is obtained. The other method consists in asymmetric material deposition onto the tube surface. Besides the possibility of mode tuning, this method permits to detect small shape deformations (at the nanometer scale) of an optical microcavity. Controlled confinement of resonant light is demonstrated by using an asymmetric cone-like microtube, which is fabricated by unevenly rolling-up circular-shaped nanomembranes. Localized three-dimensional optical modes are obtained due to an axial confinement mechanism that is defined by the variation of the tube radius and wall windings along the tube axis. Optofluidic functions of the rolled-up microtubes are explored by immersing the tubes or filling their core with a liquid medium. Refractive index sensing of liquids is demonstrated by correlating spectral shift of the optical modes when a liquid interacts with the resonant light of the microtube. In addition, a novel sensing methodology is proposed by monitoring axial mode spacing changes. Lab-on-a-chip methods are employed to fabricate an optofluidic chip device, allowing a high degree of liquid handling. A maximum sensitivity of 880 nm/refractive-index-unit is achieved. The developed optofluidic sensors show high potential for lab-on-a-chip applications, such as real-time bio/chemical analytic systems.

Vertically rolled-up microcavities are fabricated using differentially strained nanomembranes by employing rate and temperature gradients during electron beam evaporation of SiO2. The geometry of the rolled-up tubes is defined by a photo-lithographically patterned polymer sacrificial layer beneath the SiO2 layers that is dissolved to start the rolling. Rolled-up tubes support resonances formed by constructive interference of light propagating along the circumference. Optical studies are performed in the visible spectral range using a micro-photoluminescence (µPL) setup to excite and detect optical modes. Record high quality factors (Q factors) of 5400 for rolled-up resonators probed in PL-emission mode are found and their limits are theoretically investigated. Axial modes can also be supported when an increased winding number in the center is realized by appropriate pattern designs. In addition, higher order radial modes can be confined when atomic layer deposition (ALD) coatings are applied. Both types of modes are identified using polarization and spatially resolved µPL maps. Evanescent-wave coupling by tapered fibers and tubes on substrates is the second method used to study light confinement and to demonstrate frequency filtering in ALD coated rolled-up microcavities. Scans are performed by monitoring light from a tunable laser in the range of 1520-1570 nm after transmission through the tapered fiber. Dips in the spectrum are found and attributed to fundamental and axial resonant modes. Moreover, by coupling two tapered fibers to a lifted rolled-up microcavity, a four-port add-drop filter is demonstrated as a future component for vertical resonant light transfer in on-chip optical networks. Simulations show that the subwavelength tube wall thickness limits the Q factor at infrared wavelengths and ALD coatings are necessary to enhance the light confinement. After coating, two linear polarization states are found in experiment and fundamental and axial modes can be selectively excited by coupling the fiber to different positions along the tube axis. Spatially and polarization resolved transmission maps reveal a polarization dependent axial mode distribution which is verified theoretically. The results of this thesis are important for lab-on-chip applications where rolled-up microcavities are employed as high resolution optofluidic sensors as well as for future uses as waveguide coupled components in three-dimensional multi-level optical data processing units to provide resonant interlayer signal transfer.

Um der Mikrowellenerwärmung als Single- oder Hybridanwendung im industriellen Ofenbau ein weiteres Anwendungsspektrum zu eröffnen, wird dem Anlagenkonstrukteur im Rahmen dieser Arbeit eine Aufstellung von Entwicklungsprioritäten und Konstruktionshinweisen übergeben. Für eine energieeffiziente Ausnutzung des technologischen Potenzials wird hierbei nicht - wie in der Vergangenheit - die Feldstärkenverteilung, sondern das Reflexionsverhalten in den Vordergrund gestellt. Durch die Entwicklung und den Aufbau eines Messplatzes zur Bestimmung temperaturspezifischer Dielektrizitätsparameter konnte die Realitätsnähe der Simulation für die anwendungsorientierte Applikatorentwicklung gesteigert werden. Die Anwendbarkeit der Auslegungskriterien wird im Rahmen der Projektierung und des Aufbaus einer Beispielanlage zur Entbinderung von keramischen Grünkörpern und bei der Entwicklung zahlreicher mikrowellenspezifischer Anlagenbauteile verifiziert.

A wave cavity resonator (WCR) is investigated to determine the suitability of the device as an energy harvester in rivers or tidal flows. The WCR consists of coupling between self-excited oscillations of turbulent flow of water in an open channel along the opening of a rectangular cavity and the standing gravity wave in the cavity. The device was investigated experimentally for a range of inflow velocities, cavity opening lengths, and characteristic depths of the water. Determining appropriate models and empirical relations for the system over a range of depths allows for accuracy when designing prototypes and tools for determining the suitability of a particular river or tidal flow as a potential WCR site. The performance of the system when coupled with a wave absorber/generator is also evaluated for a range piston strokes in reference to cavity wave height. Video recording of the oscillating free-surface inside the resonator cavity in conjunction with free-surface elevation measurements using a capacitive wave gauge provides representation of the resonant wave modes of the cavity as well as the degree of the flow-wave coupling in terms of the amplitude and the quality factor of the associated spectral peak. Moreover, application of digital particle image velocimetry (PIV) provides insight into the evolution of the vortical structures that form across the cavity opening. Coherent oscillations were attainable for a wide range of water depths. Variation of the water depth affected the degree of coupling between the shear layer oscillations and the gravity wave as well as the three-dimensionality of the flow structure. In terms of the power investigation, conducted with the addition of a load cell and linear table-driven piston, the device is likely limited to running low power instrumentation unless it can be up-scaled. Up-scaling of the system, while requiring additional design considerations, is not unreasonable; large-scale systems of resonant water waves and the generation of large scale vortical structures due to tidal or river flows are even observed naturally. / Graduate / 0547 / 0548 / reaumejd@uvic.ca

La présente thèse est consacrée à l’étude des peignes optiques de Kerr dans les résonateurs àmodes de galerie, au sein desquels la lumière peut être excitée par pompage externe. L’effet Kerrexistant dans ces résonateurs engendre des modes latéraux équidistants (dans le domaine spectral)de part et d’autre du mode excité, c’est à dire un peigne de fréquence. Cette thèse est diviséeen trois chapitres. Le premier est dédié à l’introduction de la génération de ces peignes et leurapplications. Le deuxième chapitre présente l’analyse de l’équation de Lugiato-Lefever, décrivantde manière analytique le système, et conduit à la construction de deux diagrammes de bifurcationpour les dispersions normale et anomale. Ils sont tracés en fonction des deux seuls paramètresexpérimentalement contrôlables une fois le résonateur fabriqué : la puissance du laser et sondécalage de fréquence. Ces diagrammes indiquent les plages de paramètres pour lesquels une,deux, ou trois solutions existent ainsi que leur stabilité. Les simulations numériques renseignentle type exact de solution associée à chaque aire (notamment les solitons brillants et sombres, lesbreathers, les peignes optiques de Kerr de premier et deuxième ordre, et un régime chaotique) ; cesdiagrammes indiquent donc les paramètres du laser à choisir afin de générer la solution souhaitée.Le troisième chapitre est dédié aux peignes de Kerr optique secondaires, lignes additionnelles dansle domaine spectral générées entre les lignes du peigne principal. Ils apparaissent en dispersionanormale, lorsque la quantité de photon pompe excède un seuil dit de second ordre, qui a étédéterminé numériquement. / This thesis is dedicated to the study of the Kerr optical frequency combs in whispering gallery moderesonators, where the light can be excited by the extern pump. Due to the Kerr effect existing in theseresonators, the quasi-equidistant lines in the spectral domain are generated around the excited mode,that is the frequency comb. This thesis is devided in three chapters. The first one is dedicated to theintroduction of the Kerr comb generation and their applications.The second one presents the analysisof the Lugiato-Lefever equation used for the analytical study of the system, leading to the constructionof two bifurcation diagrams for the normal and anomalous dispersions. They are plotted for twoparameters, which can be controlled during experiments once the resonator has been fabricated,which are the pump power of the laser and its frequency detuning. These diagrams show the areas ofthe parameters for which one, two, or three solutions exist and their stability. The additional numericalsimulations show the exact type of the solution in each area (such as the bright and dark solitons,the breathers, the primary and secondary Kerr combs and chaotical regimes), finally these diagramsshow the parameters of the laser needed to be choosen for the generation of the desired solution.The third chapter is dedicated to the secondary Kerr combs, which are the additional lines generatedbetween the lines of the primary comb. They appear in the anomalous dispersion regime, when thequantity of the pump photons crosses the second-order threshold, which has been found numerically.

Je rapporte dans ce manuscrit une étude théorique et expérimentale d’une source compacte, fiable et bas coût d’ondes électromagnétiques continues et cohérentes de 30 Hz de largeur de raie, accordables de 1 GHz à 500 GHz par pas de 1 GHz. Ces ondes sont générées par un photo-mélange de deux diodes lasers DFB (Distributed Feedback) très accordables autour de 1550 nm, stabilisées avec des polarisations orthogonales sur une même cavité Fabry-Perot optique fibrée. J’ai conçue des électroniques de correction très rapides pour chaque laser permettant d’avoir une bande passante d’asservissement de 7 MHz limitée par la longueur de la boucle. Je démontre des suppressions de bruit de phase jusqu’à -60 dBc/ Hz à 1 kHz et de -90 dBc/Hz à 100 kHz d’écart d’une porteuse électrique à 92 GHz. Je mesure aussi une dérive de fréquence de ~170 kHz d’un battement à 10 GHz à long terme sur 7,5 heures de verrouillage continu. Je montre une conception optimisée d’une boucle d’asservissement intégrée de quelques dizaines de cm de longueur qui réduit le bruit de phase de 18 dB à 1 MHz d’écart à la porteuse optique et des couplages phase-amplitude réduits dans la cavité d’un facteur 50 par rapport à ceux estimés expérimentalement. L’ajout d’un troisième laser DFB stabilisé en phase sur un oscillateur local permettrait d’avoir une source continûment accordable sur 1 THz. La source d’ondes continues permettrait également de générer à partir de fibres hautement non linéaires et dispersives des impulsions pico- ou femtosecondes à un taux de répétition fixe en remplacement les lasers DFB par des lasers plus stables. Je calcule par simulation une gigue temporelle de 7,2 fs sur un temps d’intégration de 1 ms à 40 GHz de taux de répétition. / I report in this manuscript a theoretical and experimental study of a compact, reliable and low cost source of 30 Hz linewidth, continuous and coherent electromagnetic waves tunable from 1 GHz to 500 GHz in steps of 1 GHz. These waves are generated by photomixing two distributed feedback (DFB) laser diodes at 1550 nm which are frequency stabilized with orthogonal polarizations on the same optical fibered Fabry-Perot cavity. I have designed very fast electronic control filters for each laser allowing a 7 MHz servo bandwidth limited by the loop length. I demonstrate phase noise suppressions down to -60 dBc/Hz at 1 kHz and -90 dBc/Hz at 100 kHz offset frequencies from a 92 GHz electrical carrier. I also measure a ~170 kHz frequency drift of the beat note at 10 GHz on the long term over a continuous 7.5 hour locking period. I show an optimized design of an integrated servo loop of few tens of cm length which reduces the phase noise by 18 dB at 1 MHz optical carrier offset frequency and the phase-amplitude couplings in the cavity by a factor of 50 compared to the experimental one. The addition of a third DFB laser phase stabilized on a local oscillator allows the possibility to have continuously tunable source over 1 THz. The continuous wave source also makes it possible to generate fixed repetition rate pico- or femtosecond pulses from highly non-linear and dispersive fibers, replacing the DFB lasers by further stable lasers. I have calculated by simulation 7.2 fs temporal jitter at 40 GHz repetition rate over a 1 ms integration time.

In this thesis, we have designed and optimized strip waveguide based micro-ring and micro-ring and micro-racetrack resonators for biosensing applications. Silicon-On-Insulator (SOI) platform which offers several advantages over other materials such as Lithium Niobate, Silica on Silicon and Silicon nitride is considered here. High index contrast enables us to miniaturize the biosensor devices and monolithic integration of source and detectors on the same chip. We have considered the dispersive nature of the waveguide and proceeded towards optimization. Finite difference schemes and Finite Difference Time Domain (FDTD) methods are the primary tools used to model the biosensor. Various structures such as channel waveguides and beam structures are analyzed on the basis of their suitability for sensing applications. Strip and Rib waveguides are the two geometries considered in our studies. In an optical guiding structure, effective index of the propagating optical mode can be induced by two different phenomena: i. Homogeneous Sensing In this category, effective index of a propagating optical mode changes with uniformly distributed analytes extending over a distance well exceeding the evanescent field penetration depth. The sample serves as the waveguide cover. ii. Surface Sensing In the case of surface sensing, analytes bound to the surface of the waveguide. The effective index of an optical mode changes with the refractive index as well as the thickness of an adlayer. A thin layer of adsorbed or bound molecules transported from liquid or gaseous medium serving as waveguide cover is referred as an adlayer. Both homogeneous and surface sensing schemes are addresses in this work. By bulk sensing method, the characteristics of bioclad covering the device are studied. Optimization of the resonator structure involves the analysis of following parameters: • Gap between the ring and bus waveguides • Free spectral range • Extinction ratio • Quality factor We have achieved a maximum bulk sensitivity of 115 nm / RIU with ring waveguide width of 450 nm and bus width of 350 nm which is better than an earlier reported value of 70 nm/ RIU. We have proposed a novel detection scheme consisting of a micro-racetrack resonator formed over a cantilever structure. The devoice works on the principle of opto-mechanical coupling to detect conformational changes due to biomolecular adherence. BSA (Bovine Serum Albumin) and IgG ( Immuno Globulin G) are the two proteins considered in the work. Mechanical analysis of the beam for tensile and compressive stresses and corresponding spectral responses of the racetrack resonators are analyzed both by semi-analytical and method and numerical analyzes. We compared various aspects of rib and strip waveguide racetrack resonators. We have proved by numerical simulation, that the device is capable of distinguishing tensile and compressive stress. Two strip waveguides of dimensions : 450 nm X 220 nm and 400 nm X 180 nm, former supporting both Quasi-TE and Quasi-TM modes where as the second configuration allows only Quasi-TE mode alone. Sensitivity of the cantilever sensor is : 0.3196 x 10-3 nm/ µɛ at 1550 nm wavelength.

Ce mémoire traite de l’ étude et de la réalisation de composants à ondes élastiques de surface (SAW) pour des applications de filtrage dans les gammes VHF et UHF. Nous y étudions différentes structures de ces filtres, à commencer par des filtres à couplage acoustique longitudinal centrés aux alentoursdu gigahertz, de bande passante relative inférieure à 0,1 % réalisés sur quartz. Leur fabrication et leur caractérisation ont révélé des pertes d’insertion inférieures à 5 dB et des niveaux de rejet supérieurs à 20 dB, conformément aux prévisions de notre modèle de matrice mixte. Un tel filtre a été inséré dans un oscillateur pour valider la fonction réalisée. Pour une maîtrise accrue de la conception de ces filtres, nous avons développé un modèle tenant compte de la contribution des modes transverses sur leur fonction de transfert. Des comparaisons entre théorie et expérience ont permis de démontrer la précision de ce modèle. Nous nous sommes également intéressés à des structures de filtres à éléments d’impédance et à transducteurs en éventails (fan-shaped) pour la réalisation de bandes passantes relatives comprises entre 1 et 15 % dans la bande 100 − 300 MHz. Pour chacune de ces structures, nous avons développé un modèle permettant d’en étudier le comportement. Une configuration de filtre en treillis de bande passante relative proche de 2 %a été fabriquée et caractérisée, ainsi que plusieurs filtres à transducteurs en éventails de bandes passantes relatives supérieures à 10 %. Enfin, nous avons étudié deux approches qui nous ont permis de réaliser des dispositifs fonctionnant à des fréquences voisines de 3 GHz. La première, consiste à exploiter les vitesses de phase supérieures à 5 km.s−1 d’un guide d’ondes à base de carbone-diamant. La seconde exploite la résolution d’un procédé de lithographie par nano-impression pour réduire la période des réseaux d’ électrodes. / This thesis deals with the development of surface acoustic wave devices (SAW) for filtering applications in the VHF and UHF bands. Several filter structures are studied. The first ones are longitudinally coupled resonator filters (LCRF) manufactured on Quartz with a relative pass-band narrower than 0,1 % centered at about 1 GHz. These filters have been fabricated and characterized, yielding less than 5 dB insertion loss with rejection levels in excess of 20 dB as predicted by our P-matrix model. One of these filters has been mounted in an oscillator to validate its characteristics.To improve the design of such filters, we have developed a model accounting for transverse mode contributions on their spectral function. Comparisons between theory and experiment emphasizes the accuracy of the developed model. We also have investigated impedance element and slanted transducers (fan-shaped) filter structures to produce filters with relative pass-band ranging from 1 to 15 % in the 100 − 300 MHz frequency range. For each type of filters, we have developed a model to predict their electrical response. A balanced-bridge filter configuration with a 2 % relative pass-band and four fan-shaped filters with pass-band larger than 10 % have been fabricated and characterized. Finally, we have studied two approaches for the development of SAW devices operating at frequencies in the vicinity of 3 GHz. The first approach exploits Diamond-based substrates, providing phase velocity higher than 5 km.s−1. The second one uses a nano-imprint lithography process to reduce the pitch of electrode gratings.

Les systèmes « excitables » sont omniprésents dans la nature, le plus paradigmatique d'entre eux étant le neurone, qui répond de façon « tout ou rien » aux perturbations externes. Cette particularité étant clairement établie comme l'un des points clé pour le fonctionnement des systèmes nerveux, son analyse dans des systèmes modèles (mathématiques ou physiques) peut d'une part aider à la compréhension de la dynamique d'ensembles de neurones couplés et d'autre part ouvrir des voies pour un traitement neuromimétique de l'information. C'est dans cette logique que s'inscrit la préparation de cette thèse de doctorat. Dans ce mémoire, nous utilisons des systèmes basés sur des lasers à semiconducteur pour d'une part modéliser des systèmes excitables ou des ensembles de systèmes neuromimétiques couplés et d'autre part pour contrôler (grâce à l'optogénétique) des canaux ioniques impliqués dans l'émission de potentiels d'action par des neurones de mammifères. Le long du premier chapitre, nous présentons de manière synthétique les concepts dynamiques sur lesquels nous nous appuierons dans la suite du manuscrit. Par la suite, nous décrivons brièvement le contexte de ce travail du point de vue de la synchronisation, notamment de cellules excitables. Enfin, nous discutons le contexte applicatif potentiel de ces travaux, c’est-à-dire l'utilisation de systèmes photoniques dits « neuromimétiques » dans le but de traiter de l'information. Dans le chapitre 2, nous analysons tout d'abord du point de vue théorique et bibliographique le caractère excitable d'un laser à semiconducteur sous l'influence d'un forçage optique cohérent. Par la suite, nous détaillons nos travaux expérimentaux d'abord, puis numériques et théoriques, sur la réponse de ce système « neuromimétique » à des perturbations répétées dans le temps. Tandis que le modèle mathématique simplifié prévoit un comportement de type intégrateur en réponse a des perturbations répétées, nous montrons que le comportement est en fait souvent résonateur, ce qui confère à ce système la propriété étonnante d'émettre une impulsion seulement s'il reçoit deux perturbations séparées d'un intervalle de temps bien précis. Nous montrons également que ce système peut convertir des perturbations de différente intensité en une série d'impulsions toutes identiques mais dont le nombre dépend de l'intensité de la perturbation incidente. Dans le chapitre 3, nous analysons (de nouveau expérimentalement, puis numériquement et théoriquement) le comportement dynamique d'un réseau de lasers à semiconducteur couplés dans un régime de chaos lent-rapide. Nous nous basons sur une étude antérieure montrant qu'un seul de ces éléments peut présenter une dynamique neuromimétique (en particulier l'émission chaotique d'impulsions originant du phénomène de canard). De façon surprenante pour un système ayant un si grand nombre de degrés de liberté, nous observons une dynamique qui semble chaotique de basse dimension. Nous examinons l'impact des propriétés statistiques de la population considérée sur la dynamique et relions nos observations expérimentales et numériques à l'existence d'une variété critique calculable analytiquement pour le champ moyen et près duquel converge la dynamique grâce au caractère lent-rapide du système. Dans le chapitre 4 enfin, nous présentons une brève étude expérimentale de la réponse de cellules biologiques à des perturbations lumineuses. En effet, les techniques optogénétiques permettent de rendre des cellules (en particulier des neurones) sensibles à la lumière grâce au contrôle optique de l'ouverture et de la fermeture de canaux ioniques. Ainsi, après avoir étudié dans les chapitres précédents des systèmes optiques sur la base de considérations provenant de systèmes biologiques, nous amenons matériellement un système laser vers un système biologique. / Excitable systems are everywhere in Nature, and among them the neuron, which responds to an external stimulus with an all-or-none type of response, is often regarded as the most typical example. This excitability behaviour is clearly established as to be one of the underlying operating mechanisms of the nervous system and its analysis in model systems (being them mathematical of physical) can, from one hand, shed some light on the dynamics of neural networks, and from the other, open novel ways for a neuro-mimetic treatment of information. The work presented in this PhD thesis was realized in this perspective. In this dissertation we will consider systems based on semiconductor lasers both for modelling excitable systems or coupled neuromorphic networks and for controlling (in an optogenetic outlook) ionic channels that are involved in the emission of action potentials of neurons in mammals. During the first chapter, we will briefly present the dynamical concepts on which we will build our understanding for the rest of the manuscript. Thereafter, we will describe the context of this work from the point of view of synchronized systems, in particular excitable cells. Finally, we will discuss in this context the applications potential of this work, namely the possibility of using “neuromimetic” photonic systems as a was to treat information. In chapter 2 we will firstly analyse from a theoretical and bibliographical standpoint the excitable character of a laser with coherent injection. Later, we will firstly detail our results, firstly experimental and subsequently numerical and theoretical, on the response of this “neuromimetic” system to perturbations repeated in time. Whereas the simplified mathematical model envisions an integrator behaviour in response to repeated perturbations, we will show that the system often acts as a resonator, thus imparting the remarkable property of being able to emit a single pulse only if it receives two perturbations that are separated by a specific time interval. We will also illustrate how this system can convert perturbations of different intensity in a series of all identical pulses whose number depends on the intensity of the incoming perturbation. In the third chapter we will analyse, first experimentally and later numerically and theoretically, the dynamical behaviour of a network of coupled semiconductor lasers in a slow-fast chaotic regime. We will rely on a previous study documenting that a single such element can present a neuromimetic dynamics (in particular, the emission of chaotic pulses originating from a canard phenomenon). Surprisingly for a system having such a large number of degrees of freedom, we observe a dynamics which seems low dimensional chaotic. We will examine the impact of statistical properties of the selected population on the dynamics, and we will link our experimental and numerical observations to the existence of a slow manifold for the mean field, computable analytically, and towards whom the dynamics converges thanks to the slow-fact nature of the system. Finally, in chapter 4 we will present a short experimental study on the response of biological cells to light perturbations. Indeed, optogenetic techniques enables to render the cells (in particular neurons) sensitive to light due to the optical control of the opening and closing of ionic channels. Hence, after having studied in the previous chapters optical systems on the basis of observations derived from biological systems, we will physically transfer an optical system towards a biological one. Here we lay the groundwork of a photonic system which allows, with a moderate complexity, to realize cell measurements in response to spatially localized optical perturbations.

Die mikromechanische Gleichspannungswandlung basierend auf verschiebungsabhängigen Kapazitäten stellt eine Alternative zu etablierten rein elektronischen Wandlern für den Spezialfall der kapazitiven oder piezoelektrischen Verbraucher dar. Durch ihre kleine Bauform und den Verzicht auf Induktivitäten bietet sie den Vorteil der On-Chip-MEMS- und CMOS-Integration und ermöglicht die Bereitstellung hoher elektrischer Gleichspannungen aus den verfügbaren Grundspannungen der Elektronik (z. B. 3, 5 bzw. 12 V). Von hohen Polarisationsspannungen profitieren nicht nur kapazitive Sensoren und Aktoren, sondern auch piezoelektrische Messverfahren. Diese Arbeit stellt eine umfangreiche Übersicht und Bewertung der möglichen Bauformen mikromechanischer Gleichspannungswandler sowie die konkrete Umsetzung, Charakterisierung und Modellbildung eines resonant arbeitenden Wandlers vor. Es wird auf Besonderheiten und Probleme im Entwurf eingegangen und ausgehend von den Ergebnissen ein Konzeptentwurf für einen optimierten resonanten Gleichspannungswandler erarbeitet.:1 Einleitung 2 Theoretische Grundlagen 3 Ausführungsvarianten von MEMS-DC/DC-Wandlern 4 Designstudie und Umsetzung des resonanten Funktionsprinzips 5 Zusammenfassung und Ausblick / Micromechanical DC/DC conversion based on variable capacitances is an alternative to established electronic voltage converters, which does not require bulky inductors and is suitable for capacitive and piezoelectric loads. The converters are capable of boosting up the polarization voltage from CMOS and electronic levels (3, 5, 12 V), which is beneficial not only for capacitive sensors and actuators but also for piezoelectric sensing. Advantages of this method are the on-chip- and CMOS-integrability. This thesis introduces a comprehensive overview and evaluation of possible designs as well as the practical application, characterization and modeling of a resonant micromechanical DC/DC converter. Innovative claims include a test board for the characterization of resonant DC/DC converters and a SPICE behavioral model of the device, considering parasitic effects. Characteristics and problems of the design are discussed and the results are used to demonstrate an optimized conceptual design of a resonant DC/DC converter.:1 Einleitung 2 Theoretische Grundlagen 3 Ausführungsvarianten von MEMS-DC/DC-Wandlern 4 Designstudie und Umsetzung des resonanten Funktionsprinzips 5 Zusammenfassung und Ausblick