Ce travail rentre dans le cadre de la caractérisation des couches minces, de revêtements et de surfaces fonctionnelles (épaisseur, constantes élastiques,…). Parmi les méthodes de caractérisation potentielles, les méthodes ultrasonores employant des ondes de surface sont particulièrement intéressantes. Pour ce faire, nous avons choisi d’exploiter la dispersion des ondes de surface de type Rayleigh. En effet, les ondes acoustiques de surface (SAW) de type Rayleigh se propagent à la surface d’un matériau et l’énergie véhiculée par ces ondes est confinée sous la surface dans une couche d’épaisseur de l’ordre d’une longueur d’onde. Afin de caractériser ces revêtements, il est nécessaire de travailler sur une large gamme de fréquences. D’autre part, ces couches peuvent être fragiles et transparentes, c’est pourquoi, des transducteurs interdigités (IDT) sont envisagés. Pour optimiser ce type de capteurs, et en particulier leur bande passante, il est nécessaire d’étudier différentes configurations sachant qu’il est notamment possible de faire varier le nombre d’électrodes, les dimensions des électrodes, leurs formes et leurs espacements. Enfin, pour exciter ces ondes de surface dans une large gamme de fréquence avec des niveaux de déplacement suffisants pour la caractérisation des couches minces et revêtements, la technique à double Chirp spatio-temporel basée sur des transducteurs SAW-IDT a été privilégiée. Nous avons montré les potentialités de cette approche en caractérisant premièrement des structures à couche mince métalliques d’épaisseurs de 100 nm et plus, et deuxièmement des revêtements transparents de type sol-gel. / This work is within the scope of characterization of thin layers, coatings and functional surfaces (thickness, elastic constants,…). Among the characterization methods, the ultrasonic methods using surface acoustic waves are particularly interesting. In order to do this, we chose to make use the dispersion phenomenon of Rayleigh-like surface acoustic waves. Indeed, the propagation of these waves is close to the surface of material and the energy is concentrated within a layer under the surface of about one wavelength thick. In order to characterize these coatings and structures, it is necessary to perform measurements in high frequencies. On the other hand, these coatings can be fragile and transparent, this is why in this study, SAW-IDT sensors are achieved for surface acoustic wave generation. For optimization of these SAW-IDT sensors, particularly their band-width, it is necessary to study various IDT configurations by varying the number of electrodes, dimensions of the electrodes, their shapes and spacings. Finally, to generate the surface acoustic waves over a wide frequency range with sufficient displacement amplitude for the characterization of thin films and coatings, a time-space chirp technique with SAW-IDT sensors was selected. We have shown the potential of this approach by characterizing firstly thin metallic layers, and secondly transparent coatings obtained by the sol-gel process.

Surface Acoustic Waves (SAW) fall under a special category of elastic waves that need a material medium to propagate. The energy of these waves is confined to a limited depth below the surface over which they propagate, and their amplitudes decay with increasing depth. As a consequence of their being a surface phenomenon, they are easily accessible for transduction. Due to this reason, a lot of research has been carried out in the area, which has resulted in two very popular applications of SAW - SAW devices and in Non-Destructive Testing and Evaluation. A major restriction of SAW devices is that the SAW need a piezoelectric medium for generation, propagation and reception. This thesis reports the attempt made to overcome this restriction and utilize the SAW on non-piezoelectric substrates for sensing capabilities. The velocity of the SAW is known to be dependent purely on the material properties, specifically the elastic constants and material density. This dependence is the motivation for the sensor system developed in the present work. Information on the survey of the methods suitable for the generation and reception of SAW on non-piezoelectric substrates has been included in the thesis. This is followed by the theoretical and practical details of the method chosen for the present work - the point source/point receiver method. Advantages of this method include a simple and inexpensive fabrication procedure, easy customizability and the absence of restrictions due to directivity of the SAW generated. The transducers consist of a conically shaped PZT element attached to a backing material. When the piezoelectric material on the transmitter side is electrically excited, they undergo mechanical oscillations. When coupled to the surface of a solid, the oscillations are transferred onto the solid, which then acts as a point source for SAW. At the receiver, placed at a distance from the source on the same side, the received mechanical oscillations are converted into an electrical signal as a consequence of the direct piezoelectric effect. The details of the fabrication and preliminary trials conducted on metallic as well as non-metallic samples are given. Various applications have been envisaged for this relatively simple sensor system. One of them is in the field of pressure sensing. Experiments have been carried out to employ the acoustoelastic property of a flexible diaphragm made of silicone rubber sheet to measure pressure. The diaphragm, when exposed to a pressure on one side, experiences a varying strain field on the surface. The velocity of SAW generated on the stressed surface varies in accordance with the applied stress, and the consequent strain field generated. To verify the acoustoelastic phenomenon in silicone rubber, SAW velocities have been measured in longitudinal and transverse directions with respect to that of the applied tensile strain. Similar measurements are carried out with a pressure variant inducing the strain. The non-invasive nature of this setup lends it to be used for in situ measurement of pressure. The second application is in the field of elastography. Traditional methods of diagnosis to detect the presence of sub-epidermal lesions, some tumors of the breast, liver and prostate, intensity of skin irritation etc have been mainly by palpation. The sensor system developed in this work enables to overcome the restrictive usage and occasional failure to detect minute abnormal symptoms. In vitro trials have been conducted on tissue phantoms made out of poly (vinyl alcohol) (PVA-C) samples of varying stiffnesses. The results obtained and a discussion on the same are presented.

Higher frequencies in the MHz and GHz range and the increasing miniaturization lead to a higher load of the SAW (surface acoustic wave) metallizations. This higher SAW load and the intrinsic stresses result in a stress induced material transport, called acoustomigration. These microstructural changes can destroy the characteristic of the SAW device. Different Al based material combinations were investigated by different authors to improve the reliability of the metallizations and to delay the cost-intensive change to Cu based metallizations. The Cu based metallizations with TaSiN diffusion barriers were also investigated in this work. The barrier layers are necessary to impede the oxygen diffusion into the Cu layer and the Cu diffusion into the piezoelectric substrate. Also in this work the analytical TEM were used as a tool to investigate these microstructural changes in the SAW electrodes. Chemical changes in the metallizations were analysed by EDXS and EELS. The locally high resolved stress measurement in metallizations is a challenge for the future. The CBED (convergent beam electron diffraction) technique has shown the best resolution, however, it can only be applied to TEM lamellas. The aim of this work was to measure the stress within the SAW metallizations by using the CBED method. With it, we could correlate the microstructural changes with the causing stresses within the metallizations. To qualify the CBED method the thermal expansion of Al and Cu single crystals was measured by using a new model for thin TEM lamallas.

The threaded fasteners are one of the most versatile methods for assembly of structural components. For example, in bridges large bolts are used to fix base columns and small bolts are used to support access ladders. Naturally not all bolts are critical for the operation of the structure. Fasteners loaded with small forces and present in large quantities do not receive the same treatment as the critical bolts. Typical maintenance operations such tension measurements, internal stress checking or monitoring of crack development are not practical due to cost and time constrains. Although failure of a single non-critical fastener is not a significant threat to the structure's stability, massive malfunction may cause structural problem such as insufficient stiffness or excessive vibrations. The health of bolted joints is defined by a single parameter: the clamping force (CF). The CF is the force that holds the elements of the joint together. If the CF is too low, separation and bolt fatigue may occur. On the other hand, excessive CF may produce damages in the structural members such as excessive distortion or breakage. The CF is generated by the superposition of the individual tension of the bolts. The bolt tension, also referred as bolt preload, is the actual force that is stretching the bolt body. Maintaining the appropriate tension in bolts ensures a proper CF and hence a good health of the joint. In this thesis, a novel methodology for estimating the tension in bolts using surface acoustic waves (SAWs) is investigated. The tension is estimated by using the reflection of SAWs created by the bolt head interference. Increments in the bolt tension raise the points of interaction between the waves and the bolt head (real area of contact), and hence the position of the reflective boundaries. The variations are estimated using the "conventional linear synthetic array" imaging technique. A singular transducer is actuated from predefined positions to produce an array of signals that are subsequently arranged and added to construct an acoustic image. Three sets of experiment are presented in this research for validating the proposed concept: tension estimation of a ¼ inch stainless steel bolt, a ½ inch stainless steel bolt and ¼ inch grade 8 bolt. Acoustic images of the surface of the clamped plate illustrate a clear trend in the position of the reflective boundary when torque is changed. In all cases, the torque increments increase the real area of contact and therefore the position of the reflective boundary. As expected, the real area of contact grew from the bolt head center to the perimeter, which causes an effect of apparent movement of the boundary. This research proves the potential of the ultrasonic imaging methodology to measure applied tension. The result showed that the system can be used to successfully inspect tension in bolts of ½ and ¼ inches. The methodology investigated in this thesis is the first steps towards the development of bolt tension sensor based on surface acoustic waves.

Diese Dissertation beschäftigt sich mit der Entwicklung eines neuartigen Konzepts für Herstellung und Handhabung von Mikrofluidiksystemen auf der Basis akustischer Oberflächenwellen (SAW) sowie der Nutzung dieses Konzepts zur Fertigung anwendungsrelevanter Teststrukturen. Schwerpunkte sind dabei unter anderem eine hohe Leistungsbeständigkeit und Lebensdauer der Chipbauelemente und eine hohe technologische Flexibilität bezüglich Herstellung und Einsatz. Ausgehend von einer modularen Betrachtungsweise der Bauelemente wurden vielseitig einsetzbare, elektrisch-optimierte Interdigitalwandler entworfen, verschiedene Herstellungsvarianten für vergrabene Interdigitalwandler hoher Leistungsbeständigkeit auf piezoelektrischen Lithiumniobat-Substraten entwickelt und experimentell verifiziert, ein Sputterverfahren für amorphe SiO2-Dünnschichten hoher Qualität optimiert und eine Federstiftkontakt-Halterung entworfen. Durch Kombination dieser Technologien wurden SAW-Bauelemente für die mikrofluidische Aktorik mit hoher Performance und Reproduzierbarkeit entworfen, charakterisiert und beispielhaft für das elektroakustische Zerstäuben von Fluiden und das Mischen in Mikrokanälen eingesetzt.

Die vorliegende Dissertation beschäftigt sich mit der Verbesserung der Leistungsbeständigkeit von Interdigitalwandlern für zukünftige SAW-Bauelemente durch die Verwendung von kupferbasierten Fingerelektroden. In Bezug auf die Akustomigration, d.h. der Elektrodenschädigung infolge hochzyklischer SAW-Belastung, besitzt Kupfer im Vergleich zu standardmäßig eingesetztem polykristallinem Aluminium eine erhöhte Beständigkeit. Diese lässt sich weiter verbessern, indem die Grenzflächen der Fingerelektroden gegen die durch SAW-Belastung auftretende Loch- und Hügelbildung stabilisiert werden. Das Ziel bestand deshalb darin, die Aktivierungsenergie für den Materialtransport an den Elektrodengrenzflächen zu erhöhen. Zu diesem Zweck wurden in dieser Arbeit Metallisierungen in Form von Kupfer Aluminium-Schichtstapeln und -Legierungen mit jeweils geringem Aluminiumanteil hergestellt. Es konnte gezeigt werden, dass Fingerelektroden aus wärmebehandelten Kupfer-Aluminium-Schichtstapeln eine signifikant erhöhte Leistungsbeständigkeit aufweisen, wobei der elektrische Widerstand im Vergleich zu vollständig legierten Kupfer-Aluminium-Metallisierungen deutlich reduziert ist. Insbesondere kann dieses Schichtsystem durch Elektronenstrahlverdampfung und Lift-Off-Technologie auch kostengünstig hergestellt werden. Der Einfluss von thermischer- und SAW-Belastung auf den mechanischen Spannungszustand in einer Fingerelektrode wurde mittels einer Finiten-Elemente-Simulation untersucht. Darüber hinaus wird der Schädigungsmechanismus für die Akustomigration anhand eines erweiterten Eyringmodells diskutiert. / The aim of this dissertation is the improvement of the power durability of interdigital transducers for future SAW devices using copper based finger electrode materials. Compared to polycrystalline aluminum, which is typically used as electrode material, copper shows a higher durability with respect to acoustomigration, which can be further increased by a stabilization of the electrode interfaces against material transport. For that purpose, copper based metallizations with a small aluminum content were developed as layer stacks or alloys. It could be shown that heat-treated copper-alumininum layer stacks have a significantly higher power durability while the electrical resistivity is reduced in comparison to completely alloyed copper-aluminium metallizations. Additionally, the thin film layer system can be produced by using economical techniques such as electron beam evapouration and lift-off-technology. The influence of thermal and mechanical load on the stress distribution in the finger electrodes was investigated by a finite elements method. The damage mechanism of acoustomigration will be discussed based on an extended Eyring model.

Dans cette thèse, nous nous sommes intéressés à la manipulation par forces acoustiques de particules et de fluide à petite échelle. Nous avons construit pour cela un système où des ondes acoustiques de surface sont générées sur un substrat piézo-électrique de LiNbO3 à partir d’électrodes interdigitées, puis émises dans une cavité microfluidique, à une fréquence de l’ordre de 37 MHz soient des longueurs d’onde d'environ 100 µm.Dans le cas où deux ondes stationnaires sont émises perpendiculairement et à la même fréquence, nous montrons théoriquement et expérimentalement la présence d’un terme d’interférence qui, selon le déphasage temporel entre les deux ondes, va modifier la localisation des ventres et nœuds de pression dans la cavité, mais aussi donner lieu à des tourbillons dont l’axe de rotation est perpendiculaire au substrat.Nous montrons théoriquement que ces tourbillons proviennent de la forme particulière des écoulements redressés en paroi et, en injectant des microparticules, nous avons déterminé des vitesses angulaire de plusieurs rad/s. Leur disposition spatiale suit une périodicité d'une demi-longueur d'onde, et leur sens de rotation est alternée entre tourbillons voisins horaires et anti-horaires. Que cela soit avec des globules rouges ou des particules de latex, nous avons identifié une dynamique complexe, avec la formation d’agrégats au centre des vortex sous l’effet des forces de radiations et une répartition en différents niveaux par effet de lévitation acoustique dans l’épaisseur de la cavité, en accord avec l'analyse.Dans le cas où des particules d’une dizaine de micromètres sont utilisées, nous observons, outre l’arrangement des objets dans les nœuds de pression, une rotation individuelle de chaque objet, à des vitesses angulaires plus élevées. Nous interprétons ces observations comme la première mise en évidence d’un couple d’origine acoustique sur des microparticules et cellules biologiques à partir d’ondes acoustiques de surface, constituant l’analogue à petite échelle des effets de couples acoustiques décrits par Busse et Wang en 1981.La thèse propose une description détaillée des différentes montages électriques et microfluidiques, avec les différentes étapes conduisant à un laboratoire sur puce permettant la génération tant de forces que de couples acoustiques, mais aussi la manière de qualifier électriquement et optiquement ses performances. / The focus of this PhD thesis was on particles and fluid handling through acoustic forces, at a very small scale. For this purpose, we built a micro-system based on surface acoustic waves emitted from interdigitated electrodes on a lithium niobate piezoelectric substrate. Those waves then leak into a fluid contained in a microfluidic cavity, at a frequency of 37 MHz, leading to 100 µm wavelengths.If two stationnary waves are emitted perpendicularly and at the same frequency, we theoretically and experimentally show evidence of interferences that can, depending on the time phase shift between them, nto only alter the positions of pressure nodes and antinodes in the acoustic cavity, but also give birth to acoustic vortices which axis is normal to the substrate surface.We theoretically show that those vortices come from the special behaviour of acoustic streaming due to a moving surface. Then, while injecting microparticles in the cavity, we measure angular velocities of a few rad/s. Those vortices spatial disposition follows a half-wavelength period, and their rotation alternates between neighbours: clockwise or anticlockwise. We identify a complex dynamic concerning their 3D structure, since small particles tend to aggregate in vertical columns in the center of the vortex because of radiation forces, with a vertical modulation in the height of the cavity, in good agreement with theoretical predictions.When 10 µm large particles are used instead, we observe individual rotations, even for spherical objects, with higher rotation velocities. We believe those observations to be the first evidence of an acoustic net torque exerted on micro-objects such as biological cells or beads stemming from surface acoustic waves, thus a small scale equivalent of acoustic torques described by Busse and Wang in 1981.This manuscript develops a detailed description of both electric and microfuidic devices, giving the successive steps leading to a lab on chip designed to generate acoustic forces and torques at once, and also the method for qualifying and quantifying electrically and optically its performances.

L'usage du spin des électrons pour le traitement de l'information est devenu un vaste sujet de recherche aujourd'hui, notamment grâce aux nombreuses possibilités qui en découlent. Les recherches actuelles s'étendent de la génération de courants polarisés en spin à la manipulation cohérente de spin d'électrons uniques dans des boîtes quantiques, avec des applications en électronique de spin ou en information quantique. L'objectif de cette thèse est d'étendre le développement de l'électronique de spin à l'échelle de l'électron unique. Pour cela, nous cherchons à accomplir le transport cohérent d'un spin d'électron entre deux boites quantiques. Cela constituerait un moyen prometteur d'interconnecter les différents nœuds d'un nanoprocesseur quantique. Le principe utilisé repose sur l'emploi d'ondes acoustiques de surface qui, grâce aux propriétés piézoélectriques du matériau, permettent la génération de boites quantiques en mouvement. Tout d'abord, une étude de l'injection d'un électron dans une de ces boites quantiques en mouvement a été effectuée. Le contrôle à la nanoseconde de ce processus a été démontré grâce à l'application de pulses de tension modifiant pendant un bref instant le potentiel qui confine l'électron. Dans un deuxième temps, la préparation d'une superposition cohérente d'états de spin a été réalisée à l'aide d'une double boite quantique isolée, dans une position compatible avec le transport par onde acoustique de surface. Enfin, le transport d'information de spin, codée sur un unique ou sur deux électrons, a été accompli avec une fidélité atteignant 30%. / Recently a growing interest emerged towards the use of electron spins for information processing. The current developments range from the generation of spin polarized currents to the coherent manipulation of single electron spins in quantum dots, with applications in spintronics and quantum information processing respectively. The main objective of this thesis was to develop the equivalent of spintronics at the single electron level. For that purpose, we try to achieve the coherent transport of a single electron spin between distant quantum dots. This could be a promising means of interconnecting different nodes of a quantum nanoprocessor. The electron transfer is ensured by a surface acoustic wave (SAW) that induces dynamical quantum dots thanks to the material piezoelectricity. First, the injection of a single electron from a static to a dynamical quantum dot has been studied. It enables the control of single electron transfer with unity probability down to the nanosecond timescale, thanks to a fast engineering of the static confining potential. Next, we demonstrate the possibility to prepare a coherent spin superposition, using an isolated double quantum dot in a metastable position that is compatible with SAW-assisted electron transfer. This type of isolated dot systems offers more liberty in terms of control. Taking advantage of this feature, a new scheme for coherent spin manipulations has been implemented and proved to have reduced noise sensitivity. Finally, transfer of spin information encoded in one or two electrons has been achieved, with fidelities reaching 30%.

Orientador: José Alexandre Diniz / Tese (doutorado) - Universidade Estadual de Campinas, Faculdade de Engenharia Elétrica e de Computação / Made available in DSpace on 2018-08-22T13:21:22Z (GMT). No. of bitstreams: 1 Barros_AngelicaDenardide_D.pdf: 3021280 bytes, checksum: 8f60fdfa3cbdfc2f485daac1670de328 (MD5) Previous issue date: 2013 / Resumo: O objetivo deste trabalho é a obtenção e caracterização de filmes finos de óxido de titânio (TiOx) e de óxido de zinco (ZnO) para aplicações em sensores baseados em transistores de efeito de campo elétrico sensíveis a íons (Ion Sensitive Field Effect Transistor- ISFET) e de ondas acústicas de superfície (Surface Acoustic Waves - SAW), respectivamente. Desta forma, dois diferentes tipos de sensores foram obtidos. O primeiro é o sensor químico ISFET, cujos óxidos de porta foram os filmes de TiOx. Os filmes de Ti foram depositados sobre substrato de Si através do método de evaporação por feixe de elétrons, e, através do método de pulverização catódica (sputtering). Em seguida foram oxidados em forno térmico de processamento rápido (RTP). A caracterização estrutural ocorreu através de elipsometria, de microscopia de força atômica, de espectroscopia Raman, de difração de raios-X e de espectroscopia de absorção de raios-X próximo da borda, constatando a estrutura cristalina tetragonal referente à forma rutilo do TiO2. A caracterização elétrica da melhor amostra através da curva C-V demonstrou constante dielétrica igual a 8, densidade de estados na interface da ordem de 10-10eV-1.cm-2 e densidade de corrente da ordem de 10-4A/cm2. O MOSFET apresentou tensão Early da ordem de kV, e, resistência de saída da ordem de M?. Este dispositivo possui tensão de limiar igual a 0,30V, corrente de fuga da ordem de 10-8A e transcondutância igual a 12?S. O ISFET apresentou sensibilidade em corrente de 63?A/pH e sensibilidade em tensão equivalente a 64mV/pH, valor que encontra-se próximo do esperado de 59mV/pH (limite de Nernst). O segundo sensor é baseado em ondas acústicas de superfície. Esta tese se dedicou na integração deste sensor sobre substrato de Si, que não sendo piezelétrico impossibilita a geração de ondas acústicas. Como alternativa, o ZnO, que é piezelétrico, foi depositado sobre um filme fino de SiO2 sobre Si, tornando viável a confecção de dispositivos do tipo SAW e permitindo o estudo do transporte de cargas aprisionadas nos mínimos e máximos do potencial piezelétrico gerado pelo óxido de zinco sobre o Si. O filme de ZnO depositado por sputtering foi analisado por difração de raios-X apresentando orientação cristalina hexagonal na direção (0002). A onda acústica foi analisada através dos parâmetros de espalhamento de rede e por interferometria. Na interface SiO2/Si, onde ocorre o transporte acústico, o campo piezelétrico vale 0,56kV/cm. O valor da velocidade de propagação da onda acústica é igual a 4243m/s (obtida por simulação, considerando a frequência de ressonância dos IDTs igual a 750MHz, e o comprimento de onda acústico igual a 5,6?m). O transporte de pares elétrons-lacunas gerados por laser foi detectado na região de coleção de cargas da junção lateral p-i-n para distâncias superiores a 50?m e para valores de PRF entre -10dBm e 0dBm. Isto resultou na eficiência de coleção de pares em até 12% (laser sobre a junção), e de 3,5% com o laser 50?m distante da junção. O desenvolvimento destes sensores sobre substrato de Si permitirá a integração com circuitos de condicionamento de sinais fabricados em tecnologia CMOS / Abstract: The aim of this work is to obtain and characterize thin titanium oxide (TiOx) films and zinc oxide (ZnO) films for applications in sensors based on ion sensitive field effect transistors (ISFET) and surface acoustic waves (SAW), respectively. In this way, two different types of sensors were obtained. The first is the chemical sensor ISFET, with TiOx as gate oxides. Ti films were deposited on Si substrate by electron beam evaporation and sputtering. Then, the Ti films were oxidized in rapid thermal processing oven (RTP). The Structural characterization occurred through ellipsometry, atomic force microscopy, Raman spectroscopy, X-ray diffraction and x-ray absorption near edge spectroscopy, denoting the tetragonal crystal structure of the rutile form of TiO2. Electrical characterization of the best sample through the C-V curve showed dielectric constant equal to 8, interface states density in the order of 10-10eV-1.cm-2 and current density of the order of 10-4/cm2. The MOSFET presented Early voltage in the order of kV, and output resistance in order of M?. This device has threshold voltage equal to 0.30V, leakage current on the order of 10-8A and transconductance equal to 12?S. The ISFET presented current sensitivity equal to 63?A/pH and voltage sensitivity equivalent to 64mV/pH, which is close to the expected 59mV/pH determined by the Nernst limit. The second sensor is based on surface acoustic waves. This thesis was devoted to the integration of this sensor on the Si substrate, which is not piezoelectric and therefore doesn't allow the generation of acoustic waves. Alternatively, the ZnO which is piezoelectric, when deposited on a thin film of SiO2 on Si, make possible the manufacture of SAW devices and allows the study of carriers transport trapped in the minimum and maximum of the piezoelectric potential generated by the zinc oxide on Si. The ZnO film deposited by sputtering was analyzed by x-ray diffraction showing hexagonal crystalline orientation in the direction (0002). The acoustic wave was analyzed through the network analyzer (scattering parameters) and the interferometer. In SiO2/Si interface, where transport occurs, the piezoelectric field is 0, 56kV/cm. the value of the acoustic wave propagation speed is equal to 4243m/s (obtained by simulation, considering the IDTs resonance frequency equal to 750MHz and the acoustic wavelength equal to 5.6?m). The carrier transport of electrons-holes generated by the incidence of a laser was detected in the collection region of the lateral p-i-n junction for distances exceeding 50 ?m and PRF values between-10dBm and 0dBm. This resulted in a collection efficiency up to 12% (laser on the junction), and 3.5% when the laser was 50?m away from the junction. The development of these sensors on Si substrate will allow integration with signal conditioning circuits manufactured in CMOS technology / Doutorado / Eletrônica, Microeletrônica e Optoeletrônica / Doutora em Engenharia Elétrica

Orientador: Jacobus W. Swart / Dissertação (mestrado) - Universidade Estadual de Campinas, Faculdade de Engenharia Eletrica e de Computação / Made available in DSpace on 2018-08-04T18:27:49Z (GMT). No. of bitstreams: 1 Alcantara_GlaucioPedrode_M.pdf: 1079087 bytes, checksum: afc69d32771f7a3060b934cb3fcabca4 (MD5) Previous issue date: 2005 / Resumo: Este trabalho de dissertação apresenta o estudo e projeto dos elementos que compõem um sensor de gases baseado na tecnologia de Onda Acústica de Superfície (SAW), tais como, o oscilador colpitts SAW e um ressonador SAW de uma porta, os quais estão na malha de realimentação de um amplificador. Foi realizado também a deposição de diferentes espessuras de filme fino de TiO2 sobre o sensor, a fim de se estudar o efeito da atenuação da SAW na fronteira entre o cristal e o filme. É mostrado que atenuação da SAW acontece no filme na fina camada de aproximadamente 500 angstroms de espessura. A dependência de espessura com a mudança de freqüência e com fator Q do oscilador SAW e ressonador são apresentados, bem como a ssensitividade de massa do ressonador SAW para o filme de TiO2. Um modelo de oscilador SAW usando 2 caminhos acústicos, de melhor sensitividade que aquele de modo simples, foi estudado e proposto / Abstract: This thesis presents the study and design of the elements which compose a gas sensor based on Surface Acoustic Wave technology, such as, SAW Colpitts oscillator and the SAW one-port resonator that are presents in the feedback loop of an amplifier. It was done deposition of TiO2 thin film different thickness on the sensor, in order to study the effect of SAW attenuation on the border between the crystal and the film. It is shown that SAW attenuation takes place in the film in thin layer of about 500 angstroms thickness. Thickness dependence of frequency shift and Q-factor of SAW oscillator and resonator, as well as, the mass sensitivity of SAW resonator to TiO2 film are presented. The model of SAW oscillator which uses two acoustic paths, has been studied and proposed. / Mestrado / Mestre em Engenharia Elétrica