Autoclaved aerated concrete is long-time ecological building material with usefull properties. There needs to be done research of its mineralogical compound for reengineering the production. The main mineral compound of AAC is tobermorite, it increases its mechanical properties. In the presence study, we examine the usage of nature and artificial silicious materials. Also, we investigate the influence of sulfate and alumina admixtures, as well as fluidized bed combustion ash, which can be used as the lime and gypsum replacement. Closure of the study is design of the optimal raw material composition, also hydrothermal treatment of autoclaved aerated concrete. In relation to its mechanical properties, mineralogical composition and cost.

The main goal of this dissertation was to show that the principle of atomic layer deposition (ALD) can be applied to “endless” fibers. A reactor of atomic layer deposition has been designed, especially for coating depositions onto meter long bundles of fibers. Aluminum oxide (alumina), titanium oxide (titania), double layers of alumina and titania, as well as aluminium phosphate have been deposited onto bundles of carbon fibers using the home-built reactor. Scanning electron microscopic (SEM) and transmission electron microscopic (TEM) images indicate that the coatings were uniform and conformal onto fiber surface. There was a good adhesion of the coatings to the fibers. Alumina has been deposited using two separate aluminum sources (aluminum trichloride and trimethylaluminum), and water as a source of oxygen. In case of alumina deposition using aluminum trichloride and water, initial deposition temperature was 500 °C. In these conditions, a part of the fiber bundle has been damaged. Thus, the deposition temperature was decreased to 300 °C and the fibers were unaffected. In addition, during this process hydrochloric acid is formed as a byproduct which is a corrosive substance and affects the reactor and there was a chloride impurity in the coatings. Thus, aluminum trichloride precursor was replaced by trimethylalumium. Alumina deposition onto carbon fibers using trimethylaluminum and water was carried out at a temperature of 77 °C. SEM images revealed that the fibers were unaffected and the coatings were uniform and conformal. Oxidation resistance of the carbon fibers was improved slightly after alumina deposition. Oxidation onset temperature of the uncoated fibers was about 630 °C. The resistance was linearly increased with the coating thickness (up to 660 °C) and getting saturated over a thickness of 120 nm. Titania coatings have been deposited using titanium tetrachloride and water. The physical appearances of the titania coatings were similar to the alumina coatings. The oxidation onset temperature of the titania coated carbon fibers was similar to the uncoated fibers but the rate of oxidation was decreased than the uncoated fibers. Two double layer coatings were deposited, alumina followed by titania (alumina/titania), and titania followed by alumina (titania/alumina). If the fibers were coated with the double layer of alumina/titania, they had almost same oxidation onset as alumina coated fibers but the rate of oxidation was decreased significantly compared to alumina coated fibers. This feature is independent of the thickness of the titania layers, at least in the regime investigated (50 nm alumina followed by 13 nm and 40 nm titania). On the other hand, the oxidation onset temperature of fibers coated with titania/alumina (20 nm titania /30 nm alumina) was approximately 750 °C. The fibers were burned completely when temperature was further increased to 900 °C and held another 60 minutes at 900 °C. This is significantly better than any other coating used in this dissertation. ALD of titania and alumina in principle was known beforehand, this dissertation here applies this knowledge for the first time to endless fibers. Furthermore, this dissertation shows for the first time that one can deposit aluminum phosphate via ALD (planar surface as well as fibers). Aluminum phosphate might be special interest in the fiber coating because it is a rather soft material and thus might be used to obtain a weak coupling between fiber and matrix in composites. Aluminum phosphate was deposited using trimethylaluminum and triethylphosphate as precursors. Energy dispersive X-ray spectroscopy and solid state nuclear magnetic resonance spectra confirmed that the coating comprises aluminum phosphate (orthophosphate as well as other stoichiometries). Scanning electron microscopic images revealed that coatings are uniform and conformal. In cases of alumina and titania, it was observed that the coatings were delaminated from the ends of cut fibers and thus formed of clear steps. On the other hand, for aluminum phosphate coating it was observed that the border between coating and underlying fiber often being smeared out and thus formed an irregular line. It seems in case aluminum phosphate cohesion is weaker than adhesion, thus it might be act a weak interface between fiber and matrix. Alumina, titania, and double layer microtubes have been obtained after selective removal of the underlying carbon fibers. The carbon fibers were selectively removed via thermal oxidation in air at temperatures exceeding 550 °C. SEM and TEM images indicate that the inner side of the tube wall has the same morphology like the fibers. In addition, it was observed that the individual microtubes were separated from their neighbors and they had almost uniform wall thicknesses. The longest tubes had a length of 30 cm.:Bibliographische Beschreibung und Referat 2 Abstract 4 List of abbreviations 10 1. General introduction and outline of this dissertation 12 1.1 References 20 2. Atomic layer deposition: Process and reactor 25 2.1 Introduction 25 2.2 Principle of atomic layer deposition 26 2.3 Materials and methods 29 2.3.1 Precursors 29 2.3.2 Precursors transportation 31 2.3.3 Carrier and purge gas 32 2.3.4 ALD reactors 32 2.4 Flow-Type ALD reactor for fiber coating 33 2.5 Conclusion 35 2.6 References 35 3. Single layer oxide coatings 38 3.1 State of the art 38 3.2 Alumina coating using non-flammable precursors 39 3.2.1 Introduction 39 3.2.Result and discussion 39 3.3 Alumina coating using organometallic precursor 46 3.2.1 Introduction 46 3.2.2 Results and discussion 46 3.4 Titania coating using titanium tetrachloride and water 59 3.4.1 Introduction 59 3.4.2 Results and discussion 59 3.5 Experimental Part 67 3.5.1 General experiments 67 3.5.2 Alumina coating using aluminum chloride and water 69 3.5.3 Alumina coating using trimethylalumium and water 69 3.5.4 Titania coating 72 3.6 Conclusions 72 3.7 References 74 4. Coating thickness and morphology 78 4.1 Introduction 78 4.2 Results and discussion 80 4.2.1 Purge time 15 s 81 4.2.2 Purge time 30 s 85 4.2.3 Purge time 45 s to 100 s 85 4.3 Experimental part 88 4.4 Conclusions 89 4.5 References 89 5. Alumina and titania double layer coatings 91 5.1 Introduction 91 5.2 Results and discussion 92 5.3 Experimental part 102 5.4 Conclusions 103 5.5 References 103 6. Atomic layer deposition of aluminum phosphate 105 6.1 Introduction 105 6.2 Results and discussion 106 6.3 Experimental part 113 6.4 Conclusions 114 6.5 References 115 7. Alumina microtubes 117 7.1 Introduction 117 7.2 Results and discussion 118 7.2.1 Fibers before coating deposition 118 7.2.2 Coatings on the carbon fibers 118 7.2.3 Microtubes 121 7.3 Experimental part 127 7.4 Conclusions 128 7.5 References 128 8. Conclusions 131 Acknowledgements 136 Curriculum Vitae 138 Selbständigkeitserklärung 142 / Das Hauptziel dieser Dissertation bestand darin nachzuweisen, dass die Atomlagenabscheidung (engl. atomic layer deposition (ALD)) auf „endlose“ Fasern angewendet werden kann. Es wurde ein Reaktor zur Atomlagenabscheidung gestaltet, der speziell für die Beschichtung meterlanger Faserbündel geeignet ist. Aluminiumoxid, Titanoxid, Doppelschichten aus Aluminiumoxid und Titanoxid sowie Aluminiumphosphat wurden mit Hilfe des selbstgebauten Reaktors auf Kohlefaserbündel abgeschieden. Rasterelektronenmikroskopische (REM) und transmissionselektronenmikroskopische (TEM) Aufnahmen zeigten, dass die Beschichtung auf den Fasern einheitlich und oberflächentreu war. Des Weiteren wurde eine gute Adhäsion zwischen Beschichtung und Fasern beobachtet. Das Prinzip der Beschichtung mit Titanoxid und Aluminiumoxid mit Hilfe der ALD war bereits vorher bekannt und im Rahmen dieser Dissertation jedoch erstmals auf "endlose" Fasern angewendet. Des Weiteren wird in dieser Dissertation erstmals gezeigt, dass es möglich ist, Aluminiumphosphat mittels ALD abzuscheiden (sowohl auf planaren Oberflächen als auch auf Fasern). Aluminiumphosphat könnte von besonderem Interesse in der Faserbeschichtung sein, da es ein relativ weiches Material ist und könnte daher als eine Art „schwacher“ Verbindung zwischen Faser und Matrix in Kompositen dienen. Die Oxidationsbeständigkeit von beschichten Kohlefasern wurde im Vergleich zu unbeschichteten Fasern bis zu einem gewissen Grad erhöht. Monoschichten von Aluminiumoxid und Titanoxid waren dafür wenig effektiv. Aluminiumphosphatbeschichtete Fasern waren deutlich besser geeignet als die beiden anderen. Eine Doppelschicht aus Titanoxid gefolgt von Aluminiumoxid verbesserte die Oxidationsbeständigkeit nochmals deutlich gegenüber allen anderen Beschichtungen, die in dieser Dissertation verwendet wurden. Mikroröhren aus Aluminiumoxid, Titanoxid und Doppelschichten wurden durch die selektive Entfernung der zugrunde liegenden Kohlefasern erhalten. Einzelne Mikroröhren waren von benachbarten Röhren getrennt und sie weisen eine nahezu einheitliche Wanddicke auf.:Bibliographische Beschreibung und Referat 2 Abstract 4 List of abbreviations 10 1. General introduction and outline of this dissertation 12 1.1 References 20 2. Atomic layer deposition: Process and reactor 25 2.1 Introduction 25 2.2 Principle of atomic layer deposition 26 2.3 Materials and methods 29 2.3.1 Precursors 29 2.3.2 Precursors transportation 31 2.3.3 Carrier and purge gas 32 2.3.4 ALD reactors 32 2.4 Flow-Type ALD reactor for fiber coating 33 2.5 Conclusion 35 2.6 References 35 3. Single layer oxide coatings 38 3.1 State of the art 38 3.2 Alumina coating using non-flammable precursors 39 3.2.1 Introduction 39 3.2.Result and discussion 39 3.3 Alumina coating using organometallic precursor 46 3.2.1 Introduction 46 3.2.2 Results and discussion 46 3.4 Titania coating using titanium tetrachloride and water 59 3.4.1 Introduction 59 3.4.2 Results and discussion 59 3.5 Experimental Part 67 3.5.1 General experiments 67 3.5.2 Alumina coating using aluminum chloride and water 69 3.5.3 Alumina coating using trimethylalumium and water 69 3.5.4 Titania coating 72 3.6 Conclusions 72 3.7 References 74 4. Coating thickness and morphology 78 4.1 Introduction 78 4.2 Results and discussion 80 4.2.1 Purge time 15 s 81 4.2.2 Purge time 30 s 85 4.2.3 Purge time 45 s to 100 s 85 4.3 Experimental part 88 4.4 Conclusions 89 4.5 References 89 5. Alumina and titania double layer coatings 91 5.1 Introduction 91 5.2 Results and discussion 92 5.3 Experimental part 102 5.4 Conclusions 103 5.5 References 103 6. Atomic layer deposition of aluminum phosphate 105 6.1 Introduction 105 6.2 Results and discussion 106 6.3 Experimental part 113 6.4 Conclusions 114 6.5 References 115 7. Alumina microtubes 117 7.1 Introduction 117 7.2 Results and discussion 118 7.2.1 Fibers before coating deposition 118 7.2.2 Coatings on the carbon fibers 118 7.2.3 Microtubes 121 7.3 Experimental part 127 7.4 Conclusions 128 7.5 References 128 8. Conclusions 131 Acknowledgements 136 Curriculum Vitae 138 Selbständigkeitserklärung 142

Die Filtration unter aggressiven Einsatzbedingungen, z.B. Einsatz in korrosiven Medien, Abgasfiltration, stellt besondere Anforderungen an das Filtermaterial. Sogenanntes "Liquid Phase Sintered Silicon Carbide" (LPS-SiC) erfüllt die Anforderungen sehr gut. Deshalb bestand das Ziel der Arbeit besteht darin, erstmals aus LPS-SiC asymmetrische keramische Membranen (grobporöses Substrat mit dünner, feinporiger Membran) herzustellen. Als Additivsystem fanden Yttriumoxid und Aluminiumoxid Verwendung. Es wurde Siliciumcarbid der Körnung F1200 auf Substrat der Körnung F500 abgeschieden. Dem Herstellungsverfahren kommt für die Qualität der Membran eine große Bedeutung zu. Daher wurden in dieser Arbeit folgende Beschichtungsmethoden untersucht, um die optimale Methode zu identifizieren: Tauchbeschichtung, elektrophoretische Abscheidung, Druckfiltration und Einsatz von Transfertapes (Transfertapes: Mischung aus Polyacrylatkleber und Pulver). Im Mittelpunkt stand dabei die Druckfiltration. Hierfür wurde eine neue Apparatur konzipiert und aufgebaut. Für die schlickerbasierten Methoden wurde ein wässriges System entwickelt, bei dem auf den Einsatz von organischen Hilfsstoffen verzichtet werden konnte. Die elektrostatische Stabilisierung konnte durch gezieltes Anlösen von Yttriumoxid, Ausfällen von feinskaligem Yttriumhydroxid und Belegung des Siliciumcarbids mit dem Yttriumhydroxid erreicht werden. Die Elektrophorese führte zu keinen befriedigenden Ergebnissen aufgrund des undefinierten spezifischen Widerstandes des Substrats (siehe Dissertation Jan Ihle, Bergakademie Freiberg 2004). Die Druckfiltration erwies sich als das geeignetste Verfahren. Mit ihr konnten ohne Einschränkungen hochwertige Membranen erzeugt werden. Druck und Zeit sind bei gegebenen Feststoffgehalt frei wählbar. Der Druck wurde zwischen 2*10E4 und 1*10E5 Pa variiert. Höherer Druck führte zu feineren Porengrößen (mittlere und maximale Porengröße). Mit der Druckfiltration konnten Membranen ohne makroskopische Defekte erzeugt werden. Sie führte im Vergleich aller Verfahren zu der geringsten Rauhtiefe der Membranen. Die Tauchbeschichtung ließ sich in diesem System nur über den Feststoffgehalt steuern. Membranen aus der Tauchbeschichtung wiesen makroskopische Fehler (große oberflächliche Poren) auf. Die Methode führte hinsichtlich Porengrößen und Rauhtiefe zu den schlechtesten Werten. Die Transfertape-Methode als neuartiger Ansatz erwies sich für das LPS-SiC System als noch nicht ausgereift. Das direkte Bekleben der Substrate war möglich. Hinsichtlich der Membrandicke sind aber Grenzen bei ca. 50 µm gesetzt. Darüber hinaus reißen die Membranen. Es wurden Schwankungen in der Entbinder- und Sinterschwindung verzeichnet. Weiterhin werden große Hohlräume im Substrat nicht von den Transfertapes abgeformt. Beide Effekte erhöhen die Spannungen beim Sintern, so dass bei geringeren Schichtdicken Risse entstehen. / Silicon Carbide (SiC) fulfills many requirements, e.g. a high robustness in terms of corrosion, which makes it a suitable Material for ceramic membranes. The aim of this work was to produce ceramic membranes out of porous liquid phase sintered Silicon Carbide (LPS-SiC). As additives Alumina and Yttria were used. The SiC based on commercial abrasive powders F1200 (Membrane) and F500 (Substrate). Different techniques of membrane formation were applied in order to find the optimum processing procedure: Dip Coating, Electrophoretic Deposition (EPD), Pressure Filtration and the usage of so called Transfer Tapes, a blend of Polyacrylate and ceramic powders). For the slip based methods a water based system was developed without the need of organic additives. A pure electrostatic stabilization was facilitated by solving Yttria with Hydrochloride Acid and precipitation, resulting in the coverage of the SiC particles with finely dispersed Yttria. The EPD was not successful due to a undefined specific resistance of the substrate. The pressure filtration turned out to be the best, most versatile method, leading to defect free membranes with the lowest measured surface roughness. The pressure ranged between 2*10E4 and 1*10E5 Pa. Higher pressure lead to finer pores. The Dip Coating was controlled only by the solids content. Membranes by Dip Coating showed macroscopic defects. As a new concept for ceramic membrane fabrication the Transfer Tapes needed further investigation. The direct gluing on the substrate was possible. The thickness of the membrane was limited to 50 microns in order to keep free of cracks. The Transfer Tapes exhibited pronounced fluctuations in the debinding and sintering shrinkage, leading to increased tension during sintering. Furthermore cavities, (e.g. big pores) were bridged. Both effects lead to increased tension during sintering.

L’objectif de ces travaux a été de développer des vernis acrylate photo-polymérisables à 100% d’extrait sec, destinés à protéger des pièces thermoplastiques en polycarbonate contre les endommagements mécaniques, en particulier contre la rayure. Les relations entre la composition, la structure et les propriétés de ces revêtements ont été explorées. Pour ce faire ont été étudiées la morphologie, les propriétés thermomécaniques ainsi que la résistance à la rayure des matériaux. Cette dernière a été évaluée par des tests de micro-scratch. La cinétique de formation des réseaux polymères a elle aussi été étudiée, par photo-DSC. Tous les matériaux étudiés présentent, en analyse thermomécanique dynamique, un module élevé à l’état caoutchoutique ainsi qu’une large relaxation mécanique. Un vernis pétro-sourcé à 100% d’extrait sec, qualifié de standard, a servi de point de départ à ces travaux. Il a tout d’abord été comparé à un vernis commercial solvanté photo-polymérisable, spécialement conçu pour la protection de pièces thermoplastiques. Celui-ci s’est avéré être plus efficace en termes de résistance à la rayure. Dans un deuxième temps, a été étudiée l’influence sur les propriétés du vernis standard pétro-sourcé d’un monomère multicyclique entrant dans sa composition. La modification de son pourcentage n’a permis d’apporter aucun bénéfice en termes de résistance à la rayure. Des nanoparticules de silice, d’alumine ou de zircone, disponibles sous forme de dispersion dans un monomère acrylate, ont ensuite été incorporées dans le vernis standard pétro-sourcé. Une organisation particulière de la nano-silice et de la nano-alumine au sein des matériaux étudiés a pu être observée par microscopie électronique en transmission. Il a été constaté que le taux de charge doit être élevé pour observer une augmentation du module élastique et une amélioration de la résistance à la rayure du vernis (≥15% massique dans le cas de la nano-silice). Par ailleurs, l’ajout de 5% massique de nano-silice dans le vernis n’a conduit à aucune modification de sa cinétique de photo-polymérisation. Enfin, une partie des composés acrylate pétro-sourcés du vernis standard a été substituée par des acrylates bio-sourcés disponibles industriellement. La cinétique de photo-polymérisation des deux types de vernis est similaire. Les conclusions de la comparaison entre les vernis bio-sourcés et le vernis standard pétro-sourcé en termes de résistance à la rayure dépendent de l’épaisseur des revêtements étudiés. L’ajout d’un composé monoacrylate bio-sourcé à la formulation des vernis tend à améliorer la recouvrance élastique des revêtements de faible épaisseur. L’acrylate d’isobornyle est en particulier intéressant, car il a aussi tendance à retarder l’apparition des craquelures au cours de la rayure. / The aim of this work was to develop 100% solids photo-polymerizable acrylate coatings, intended to protect thermoplastic pieces made of polycarbonate against mechanical damage, in particular scratches. The relationships between the composition, the structure and the properties of these coatings were examined. For this purpose the morphology, the thermomechanical properties and the scratch resistance of the materials, assessed by micro-scratch tests, were studied. The kinetics of the polymer network formation was also studied by photo-DSC experiments. All the materials feature a high elastic modulus and a broad mechanical relaxation in dynamic thermomechanical analysis. A 100% solids petro-based coating (standard) constituted the starting point of this work. First it was compared to a commercial photo-polymerizable coating containing solvents, specially designed to protect thermoplastic pieces. This commercial coating turned out to be more efficient against scratches. In a second time was studied the influence of the percentage of a multicyclic monomer, taking part in the composition of the standard petro-based coating, on the properties of the latter. The modification of its proportion does not bring any advantage concerning the scratch resistance. Silica, alumina and zirconia nanoparticles, dispersed in an acrylate monomer, were then incorporated in the standard petro-based coating. A particular organization of the silica or alumina nanoparticles in the materials could be observed by transmission electron microscopy. A high filler content is required to observe an increase in the elastic modulus and an enhancement of the scratch resistance of the coating (≥15% by weight for the nano-silica). Moreover, no change of the photo-polymerization kinetics was noticed through the addition of 5% by weight of nano-silica in the coating. Finally, some of the petro-based acrylate compounds of the standard coating were substituted by commercially available bio-based acrylate monomers. Both types of coatings feature similar polymerization kinetics. The conclusions concerning the comparison of the scratch resistance of the bio-based and standard petro-based coatings depend on their thickness. The incorporation of a bio-based monoacrylate compound in low thickness coatings tends to improve the elastic recovery. Isobornyl acrylate is particularly interesting since it also tends to delay the apparition of cracks along the scratch.

Les potentialités du nitrure de gallium (GaN) et notamment de l'hétérostructure AlGaN/GaN, semiconducteur à large bande interdite, en font un matériau particulièrement intéressant en électronique de puissance, notamment pour des applications haute tension, haute température et haute fréquence. L'objectif de ce travail de thèse était de développer et d'optimiser l'étape d'isolation de la grille lors la réalisation de transistors MIS-HEMT de puissance sur hétérostructure AlGaN/GaN, le but étant de réduire les courants de fuite de grille sans perturber les propriétés du transistor. Après avoir évaluation, le choix s'est porté sur l'alumine Al2O3 déposé par ALD comme diélectrique de grille. L'étude s'est d'abord concentrée sur l'analyse de l'influence de traitements, chimiques ou plasma, sur la contamination de la surface d'AlGaN au travers d'analyses XPS et AFM. Puis, l'influence du diélectrique de grille a été évalué à travers la réalisation et la mesure électrique de dispositifs, diodes et transistors, en variant les méthodes de dépôt par ALD. Enfin, l'impact d'un recess par gravure ICP-RIE partielle ou complètes de la barrière d'AlGaN sous la grille a été étudiée. La réalisation d'un HEMT passe par l'étape critique du dépôt du diélectrique de grille sur le semiconducteur, et le contrôle de la qualité de l'interface " diélectrique/AlGaN " est donc une étape fondamentale car elle influe sur les propriétés électriques du composant. Ce contrôle comprend le traitement de surface du semiconducteur, mais aussi la nature et la technique de dépôt du diélectrique. Ainsi il apparaît à travers l'étude qu'un traitement de surface à l'ammoniaque à haute température est le plus efficaces pour retirer les contamination en oxydes natifs. Les mesures électriques, C(V) et Id(Vg), ont quant à elle montrés la supériorité de la PEALD par rapport à un dépôt thermique conventionnel. Ceci peut s'expliquer par le fait que le plasma oxygène qui entre jeu lors du dépôt de l'alumine par PEALD semble nettoyer la surface lors des premiers cycles, retirant notamment la contamination carbone. Cela permet d'avoir une meilleure interface entre l'alumine et le semi-conducteur, limitant les pièges à l'interface et dans l'oxyde. Cela a réduit de manière considérable les courants de fuite de grille, sans détériorer la qualité et la rapidité de la transition entre l'état on et off. De plus, les HEMTs réalisé étant de type normally-off, le recess de grille par gravure ICP-RIE a été implémenté afin de rendre moins négative la tension de pincement. Cela a été réalisé avec succès, notamment avec la réalisation d'un composant de type noramlly-off grâce à un recess total de la barrière d'AlGaN sous la grille. Des résultats à l'état de l'art ont été obtenus à travers une approche simple, et un processus de création de transistors robuste et hautement reproductible, avec une réduction importante des courants de fuite de grille et une pente sous le seuil record. Afin de compléter l'étude il conviendra par la suite de réaliser des études de fiabilité, notamment à travers des mesures dynamiques pour évaluer notamment les phénomènes de dégradation du Ron. / With its large band gap, Gallium Nitride (GaN) semiconductor is one of the most promising materials for new power devices generation thanks to its outstanding material properties for high voltage, temperature and frequency applications. The main objective of this thesis was the development and optimization of the insulating step taking place in the elaboration of MIS-HEMT transistors on an AlGaN/GaN heterstroctructure. In order to reduce gate leakage currents without degrading the device properties, alumina Al2O3 deposited by ALD was chosen as a gate dielectric. The study was first centered on the influence of surface treatments, chemical or plasma, regarding surface contamination. Their impact was analyzed through XPS and AFM. Secondly, electrical measures were performed on complete MIS-HEMT diodes and transistors to evaluate the influence of the alumina insulating layer depending on the ALD deposition method. Lastly, partial and full recess of the AlGaN barrier was studied via ICP-RIE etching. The gate dielectric deposition is one of the crucial steps intervening in the HEMT creation process. The quality and control at the Al2O2/AlGaN interface being paramount, it will directly influence the device's electric properties. This involves control ing the semiconductor surface, but also the nature and deposition technique of the dielectric. As such, an ammonia-based treatment at high temperature appears to be the most efficient in reducing native oxygen contamination. Regarding electric performances, C(V) and Id(Vg) measures showed the superiority of PEALD compared to traditional thermal ALD deposition. This can be explained by the fact that the oxygen plasma used as oxydant during the alumina deposition by PEALD seems to clean the surface during the first cycles, mostly by reducing carbon contamination. This allowed to achieve a better interface between the semiconductor and the insulting layer, thus limiting traps at the interface or in the oxyde. This allows to considerably reduce gate leakage currents, without degrading the quality and transition sharpness between the on and off state. Moreover, the realized HEMTs being normally-off, gate recess etching via ICP-RIE was implemented in order to make the threshold voltage less negative. This was successfully achieved, especially through the realization of a normally-off transistors thanks to a full recess of the AlGaN barrier under the gate. State of the art results were achieved through a simple approach, and a robust and highly reproducible transistor elaboration process, with great reduction of gate leakage currents and a record sub-threshold slope. In order to complete the study, it will be necessary in the future to proceed to viability studies, especially through dynamic electric evaluation, in order to evaluate for instance Ron degradation phenomenons.

Ce mémoire est consacré au développement de technologies de filtrage novatrices qui apportent un gain en performance permettant de répondre aux besoins de filtrage pour télécommunications spatiales à moyen et long termes. Il s’inscrit dans le projet ANR ATOMIQ coordonné par Thales Alenia Space ayant comme partenaires le laboratoire SPCTS et la société 3D CERAM. Le premier chapitre est constitué d’une étude bibliographique sur les filtres en bande Q et V ainsi que les technologies de fabrication 3D. Le deuxième chapitre est consacré à l’élaboration d’une nouvelle formulation d’alumine très pure à faible pertes et stable en température. Le troisième chapitre présente une conception de filtres hyperfréquences en bande Q et V à base de cavités résonantes diélectriques. Le quatrième chapitre concerne la fabrication des filtres par usinage en cru ainsi que la présentation des différents démonstrateurs fabriqués par stéréolithographie et moulage basse pression. Il présente aussi des solutions de correction post-fabrication par tir laser. Ce travail est original par l’utilisation de la stéréolithographie céramique 3D ainsi que du moulage basse pression pour fabriquer des filtres hyperfréquences de petites tailles en bande Q et V. / This thesis focus on the development of innovative filtering technologies that enhance the performance to meet the filtering requirements for spacial communications. It is part of the ANR project ATOMIQ coordinated by Thales Alenia Space with partners (SPCTS 3D CERAM). The first chapter consists of a literature review on the Q and V band filters as well as 3D manufacturing technologies. The second chapter is devoted to the development of a new formulation of highly pure, low losses and temperature stable alumina. The third chapter presents a microwave filter design in Q and V band based on a dielectric resonant cavity. The fourth chapter is about the manufacturing of filters and presentation of various demonstrators manufactured by stereolithography and low pressure molding. It also provides a post-production correction solutions based on laser shoots. This work is original because, to the best of our knowledge, 3D ceramic stereolithography and the low pressure molding have not been used to produce small sizes Q and V band microwave filters.

Tato doktorská práce se zabývala mikrostrukturálním vývojem vybraných oxidových keramických materiálů během konvenčního slinování (CS), rychlého slinování (RRS), flash slinování (FS) a slinování pomocí plazmatu (SPS). S ohledem na keramiku pro strukturální aplikace byly pomocí RRS připraveny relativně velké (1 cm3), bez defektní a téměř hutné pelety oxidu hlinitého a yttriem stabilizovaného oxidu zirkoničitého (YSZ) s homogenní mikrostrukturou. RRS bylo také shledáno jako optimální metoda pro přípravu vysoce hutné bezolovnaté piezoelektrické keramiky s podobnými vlastnostmi, jako byly získány po časově a energeticky náročnějším CS. Metoda SPS dále zlepšila vlastnosti bezolovnaté piezoelektrické keramiky a produkovala plně hutné vzorky, což je dobrým předpokladem pro translucenci a z níž vyplývajícím optoelektrickým vlastnostem. Nejoptimálnějších výsledků – plné hustoty a vysokých piezoelektrických vlastností – bylo dosaženo kombinací SPS a RRS. Analýzy provedené v této studii také poukázaly na důležitost eliminace těkavých nečistot před rychlým ohřevem. Jinak totiž dochází k zachycení těchto látek ve slinuté keramice, což ve výsledku limituje její konečnou hustotu. Ukázalo se, že nízké konečné hustoty RRS YSZ jsou spojeny se zachycením zbytkového chloru pocházejícího ze syntézy prášku. Pokud byl zbytkový chlor odstraněn vysokoteplotním žíháním keramických kompaktů před zahájením RRS, byly touto metodou získány téměř plně hutné YZS vzorky. Negativní vliv zbytkového chloru na zhutnění byl viditelný také u flash slinovaných YSZ vzorků. Navíc FS YSZ často vede ke zrychlení růstu zrn v jádře vzorku, v důsledku vyšší teploty a elektrochemické redukce. Ve spektru procesních parametrů použitých v rámci této práce dokonce došlo k abnormálnímu růstu zrna (AGG). Silně bimodální distribuce velikosti zrn ukázaná v této práci nebyla dříve nalezena u flash slinutého YSZ. AGG byl vysvětlen dvěma přispívajícími faktory – relativně velkou velikostí vzorku, která vedla k lokalizaci elektrického proudu a vzniku horkých míst (z angl. hot-spots), a celkově akcelerovanou kinetikou růstu zrn v jádře vzorku způsobenou elektrochemickou redukcí.

Fischer-Tropsch Synthesis (FTS) is a promising technology for the production of ultra-clean fuels and chemical feedstocks from biomass, coal, or natural gas. Iron catalysts are ideal for conversion of coal and biomass. However, precipitated iron catalysts used in slurry-bubble column reactors suffer from high attrition resulting in difficulty separating catalysts from product and increased slurry viscosity. Thus, development of an active and selective-supported iron catalyst to manage attrition is needed. This thesis focuses on the development of a supported iron catalyst and kinetic models of FTS on the catalyst using advanced statistical methods for experimental design and analysis. A high surface area alumina, modified by the addition of approximately 2 wt% lanthanum, was impregnated with approximately 20 wt% Fe and 1% Pt in a two step procedure. Approximately 10 wt% Fe and 0.5 wt% Pt was added in each step. The catalyst had a CO uptake of 702 μmol/g, extent of reduction of 69%, and was reduced at 450°C. The catalyst was stable over H2 partial pressures of 4-10 atm, CO partial pressures of 1-4 atm, and temperatures of 220-260°C. Weisz modulus values were less than 0.15. A Langmuir-Hinshelwood type rate expression, derived from a proposed FTS mechanism, was used with D-optimal criterion to develop experiments sequentially at 220°C and 239°C. Joint likelihood confidence regions for the rate expression parameters with respect to run number indicate rapid convergence to precise-parameter estimates. Difficulty controlling the process at the designed conditions and steep gradients around the D-optimal criterion resulted in consecutive runs having the same optimal condition. In these situations another process condition was chosen to avoid consecutive replication of the same process condition. A kinetic model which incorporated temperature effects was also regressed. Likelihood and bootstrap confidence intervals suggested that the model parameters were precise. Histograms and skewness statistics calculated from Bootstrap resampling show parameter-effect nonlinearities were small.

The goal of this project was to develop novel bacterial biomarkers for use in an industrial context. These biomarkers would be used to determine aluminium industry activity impact on a local ecosystem. Sediment bacterial communities of the Saguenay River are subjected to industrial effluent produced by industry in Jonquière, QC. In-situ responses of these communities to effluent exposure were measured and evaluated as potential biomarker candidates for exposure to past and present effluent discharge. Bacterial community structure and composition between control and affected sites were investigated. Differences observed between the communities were used as indicators of a response to industrial activity through exposure to effluent by-products. Diversity indices were not significantly different between sites with increased effluent exposure. However, differences were observed with the inclusion of algae and cyanobacteria. UniFrac analyses indicated that a control (NNB) and an affected site (Site 2) were more similar to one another with regard to community structure than either was to a medially affected site (Site 5) (Figure 2.4). We did not observe a signature of the microbial community structure that could be predicted with effluent exposure. Microbial community function in relation to bacterial mercury resistance (HgR) was also evaluated as a specific response to the mercury component present in sediments. Novel PCR primers and amplification conditions were developed to amplify merP, merT and merA genes belonging to the mer-operon which confers HgR (Table 5.6). To our knowledge, the roles of merP and merT have not been explored as possible tools to confirm the presence of the operon. HgR gene abundance in sediment microbial communities was significantly correlated (p < 0.05) to total mercury levels (Figure 3.4) but gene expression was not measurable. We could not solely attribute the release of Hg0 from sediments in bioreactor experiments to a biogenic origin. However, there was a 1000 fold difference in measured Hg0 release between control and affected sites suggesting that processes of natural remediation may be taking place at contaminated sites (Figure 3.7). Abundance measurements of HgR related genes represent a strong response target to the mercury immobilized in sediments. Biomarkers built on this response can be used by industry to measure long term effects of industrially derived mercury on local ecosystems. The abundance of mer-operon genes in affected sites indicates the presence of a thriving bacterial community harbouring HgR potential. These communities have the capacity to naturally remediate the sites they occupy. This remediation could be further investigated. Additional studies will be required to develop biomarkers that are more responsive to contemporary industrial activity such as those based on the integrative oxidative stress response.

The goal of this project was to develop novel bacterial biomarkers for use in an industrial context. These biomarkers would be used to determine aluminium industry activity impact on a local ecosystem. Sediment bacterial communities of the Saguenay River are subjected to industrial effluent produced by industry in Jonquière, QC. In-situ responses of these communities to effluent exposure were measured and evaluated as potential biomarker candidates for exposure to past and present effluent discharge. Bacterial community structure and composition between control and affected sites were investigated. Differences observed between the communities were used as indicators of a response to industrial activity through exposure to effluent by-products. Diversity indices were not significantly different between sites with increased effluent exposure. However, differences were observed with the inclusion of algae and cyanobacteria. UniFrac analyses indicated that a control (NNB) and an affected site (Site 2) were more similar to one another with regard to community structure than either was to a medially affected site (Site 5) (Figure 2.4). We did not observe a signature of the microbial community structure that could be predicted with effluent exposure. Microbial community function in relation to bacterial mercury resistance (HgR) was also evaluated as a specific response to the mercury component present in sediments. Novel PCR primers and amplification conditions were developed to amplify merP, merT and merA genes belonging to the mer-operon which confers HgR (Table 5.6). To our knowledge, the roles of merP and merT have not been explored as possible tools to confirm the presence of the operon. HgR gene abundance in sediment microbial communities was significantly correlated (p < 0.05) to total mercury levels (Figure 3.4) but gene expression was not measurable. We could not solely attribute the release of Hg0 from sediments in bioreactor experiments to a biogenic origin. However, there was a 1000 fold difference in measured Hg0 release between control and affected sites suggesting that processes of natural remediation may be taking place at contaminated sites (Figure 3.7). Abundance measurements of HgR related genes represent a strong response target to the mercury immobilized in sediments. Biomarkers built on this response can be used by industry to measure long term effects of industrially derived mercury on local ecosystems. The abundance of mer-operon genes in affected sites indicates the presence of a thriving bacterial community harbouring HgR potential. These communities have the capacity to naturally remediate the sites they occupy. This remediation could be further investigated. Additional studies will be required to develop biomarkers that are more responsive to contemporary industrial activity such as those based on the integrative oxidative stress response.