京都大学 / 0048 / 新制・課程博士 / 博士(人間健康科学) / 甲第22890号 / 人健博第82号 / 新制||人健||6(附属図書館) / 京都大学大学院医学研究科人間健康科学系専攻 / (主査)教授 市橋 則明, 教授 林 悠, 教授 妻木 範行 / 学位規則第4条第1項該当 / Doctor of Human Health Sciences / Kyoto University / DFAM

The primary objective of this master’s thesis is to discuss a design and development of proximity touch control panel, which contains two simulated buttons and one rotary slider simulating functions of the potentiometer using specialized sensor controllers. The first part is describing functions and different technologies used to create touch sensors. It also introduces its usage in practice, advantages and disadvantages of different technologies which provides the readers with basic theoretical knowledge and introduction into the touch sensors. The second part as follows describes the definition of Integrated Circuits MPR083 and MPR084, outline of the features and methods of their functions. Displays internal connection of these circuits and describes forms of the serial communication with microcontroller connected to I2C bus. In these part there are in details described individual internal registers of these Integrated Circuits and theirs typical setups. It shows how it is possible to use the external interrupts and examples of their practical application. In the last chapter of these thesis is described the layout of the individual modules and construction of the whole designed device. The work is introducing two different concepts of programming the microcontrollers and consequently also construction of the appropriate ISP and JTAG programmers. It also introduces construction of the display units for visual feedback with the user and approach of the communication for the control LED matrix and graphical LCD display. The main part of this thesis is the construction of the control circuit, which includes key part, microcontroller ATmega16. It also presents the description of the program written in development environment AVR Studio in programming language C and his specific functions. In conclusion of the thesis are listed real measured behavior of the communication on I2C bus and their description.

A novel micromachining technology on SOI substrates is presented that is capable of producing on-chip high-Q resonators and resonator arrays equipped with high aspect-ratio (30:1) microstructures and nano-gap capacitive transducers filled with high-k dielectrics. The newly developed IC-compatible MEMS microfabrication process consists of merely three standard photolithography steps, which is much simpler than the other SOI-based resonator device technologies. In order to achieve the optimum performance and yield of the resonators and resonator arrays, this SOI-based fabrication process has been carefully designed and investigated step by step. For capacitively-transduced extensional mode (e.g., radial-contour and wine-glass mode) resonators, formation of nano-scale capacitive gaps and large resonator-to-electrode overlap area is essential for reducing the motional resistance Rx and DC bias voltage by strengthening the capacitive transduction. Atomic Layer Deposition (ALD) technology with superb conformability and uniformity as well as outstanding thickness controllability is used to deposit the ultra-thin layer (~10 nm) of high-k dielectric material that acts as the solid capacitive gaps, which allows the mass production of on-chip capacitively-transduced resonators and resonator arrays with greatly enhanced electromechancial coupling coefficient, and thus lower motional resistance and DC bias voltage. Using this technique, high-Q micromechanical resonators and resonator arrays on SOI substrates operating at ultra-high frequencies (UHF) have been developed. The ultimate goal of this project is to implement on-chip narrow-band micromechanical filters with unprecedented frequency selectivity and ultra-low insertion loss. By fine-tuning the nonlinear characteristics of the capacitive transducers enabled by the new SOI technology, novel on-chip mechanical signal processors for frequency manipulation, such as mixer and multiplier, will be investigated.

Nanocrystalline diamond (NCD) due its outstanding thermal, mechanical and tribological properties is an ideal candidate for MEMS/NEMS devices. NCD offers the possibility to increase the reliability and life time of RF-MEMS switches and by mitigating the problems of stiction, charge trapping, surface wear and cold welding found in traditional all metal MEMS devices. In this work, nanocrystalline diamond cantilever beams and bridges have been fabricated on a low resistive silicon substrate by using standard micromachining techniques. The diamond structures are then integrated onto alumina and aluminium nitride substrates upon which microwave transmission lines in the microstrip and coplanar waveguide (CPW) topology have been fabricated. The diamond actuators are integrated using a combined soldering and flip chip technique. The NCD bridges are thermally actuated wherein the difference in coefficient of thermal expansion between copper and diamond bends the diamond bridge thus moving the bridges to the actuated state. In the CPW topology, RF-MEMS switches and tunable planar inductors are realized using the micromachined devices. These devices are mounted on a 650 micrometer thick alumina substrate and the microwave characteristics are analyzed in the frequency range of 5-30 GHz. The switches yield a return loss of 15 dB and an insertion loss of 0.2 dB at 20GHz. An inductance ratio of 2.2 is achieved by the tunable inductors at 30 GHz. High power measurements are performed on the diamond actuators which utilize a dual actuation scheme which comprises of thermal and electrostatic actuation. The measurements are performed on the diamond actuators in the power range of 24-47 dBm for the mechanically actuated switches, and 24-40 dBm for electrically actuated switches. The measurements show an insertion loss of 0.2-03 dB in the entire power spectrum. NCD based RF-MEMS capacitive switches is also designed, fabricated and tested. The switches are fabricated on a high resistive silicon substrate and are electrostatically actuated. Small signal measurements are presented in the frequency range of 1-65 GHz. The measured insertion loss in the up-state is 1.1 dB at 50 GHz with 30 dB isolation in the down-state. Dielectric characterization is performed using the Corona-Kelvin technique and the standard I-V and C-V stress tests for nitride and diamond films. The leaky nature of the diamond films provides a potential solution to reliability issues related to dielectric charging.

The semiconductor industry was benefited by the advances in technology in the last decades. This fact has an impact on the sensors field, where the simple transducer was evolved into smart miniaturized multi-functional microsystems. However, commercially available gas and biological sensors are mostly bulky, expensive, and power-hungry, which act as obstacles to mass use. The aim of this work is gas and biological sensing using capacitive structures. Capacitive sensors were selected due to its design simplicity, low fabrication cost, and no DC power consumption. In the first part, the dominant structure among interdigitated electrodes (IDEs), fractal curves (Peano and Hilbert) and Archimedean spiral was investigated from capacitance density perspective. The investigation consists of geometrical formula calculations, COMSOL Multiphysics simulations and cleanroom fabrication of the capacitors on a silicon substrate. Moreover, low-cost fabrication on flexible plastic PET substrate was conducted outside cleanroom with rapid prototyping using a maskless laser etching. The second part contains the humidity, Volatile Organic compounds (VOCs) and Ammonia sensing of polymers, Polyimide and Nafion, and metal-organic framework (MOF), Cu(bdc)2.xH2O using IDEs and tested in an automated gas setup for experiment control and data extraction. The last part includes the biological sensing of C - reactive protein (CRP) quantification, which is considered as a biomarker of being prone to cardiac diseases and Bovine serum albumin (BSA) protein quantification, which is used as a reference for quantifying unknown proteins.

Capacitive micromachined ultrasonic transducers (CMUT:s) are often used in medical imaging and they show some promise as underwater transducers. This thesis collates the available information about how CMUT:s operate, their strengths and weaknesses and investigates their efficiency as an underwater transducer. The accumulated knowledge was channelled into a simulation of a CMUT as a dampened spring system done in MATLAB and Simulink. The simulation investigated the resonance frequency and bandwidth through simulation and compared the results to experimental results from literature.  CMUT:s have good acoustic matching with water making them sensitive, broadband transducers when used under water. Special care must be taken when choosing the CMUT so that materials and designs can fulfil the task for which it is intended, such as the radius of the membrane, the material of the membrane, the insulating layers in or around the CMUT and the height of the air gap inside. CMUT:s are, for the transmission of sound, less capable than existing lead zirconate-titanate-transducers (PZT-transducers). This problem can be somewhat alleviated through operating the CMUT in collapse-mode but care must be taken so that the CMUT is not damaged during this operation. Simulation results and results from literature show that it is possible to simulate CMUT:s with accuracy. By simulating 10 different CMUT:s, using the geometries and material properties of experimentally tested devices and testing for resonance frequency and bandwidth the results were as follows:The average relative error of resonance frequency was found to be -14 %, if outlier results are excluded and the average relative error of bandwidth proved inaccurate at -54 %

<p>  </p> <p>Sensing systems have evolved significantly in recent years as a result of several advances in a number of sensor manufacturing approaches. The proximity measuring of approaching objects is a challenging, costly, and critical operation that permits the detection of any impediments without coming into touch with them and causing an unfavorable occurrence. However, developing a flexible proximity sensor capable of operating throughout a wide range of object motion continues to be a difficulty. The current work describes a polymer-based sensor that makes use of a nanostructure composite as the sensing element. The sensor will be used in healthcare and automotive applications in the near future. Composites comprising Thermoplastic Polyurethane (TPU) and Carbon Nanotubes (CNTs) are capable of sensing the presence of an external item at a great distance. The sensor model's performance was then enhanced further by microfabricating an integrated model with a certain shape. The design and production techniques for the TPU/CNTs proximity sensor are basic, and the sensor's performance demonstrates repeatability, as well as high electrical sensitivity and mechanical flexibility. The sensing process is based on the comparison of stored charges at the composite film sensor to the sensor's base voltage. The sensor operates reliably across a detection range of 2-20 cm. Tunneling and fringing effects are used to explain substantial capacitance shifts as sensing mechanisms. The structure's fringing capacitance effect has been thoroughly examined using ANSYS Maxwell (Ansoft) FEA simulation, as the measurements perfectly confirm the simulation's sensitivity trend. A novel mathematical model of fringe capacitance and subsequent tests demonstrate that the distance between an item and the sensor may be determined. Additionally, the model argues that the change in capacitance is significantly influenced by sensor resistivity, with the starting capacitance varying between 0.045pF and 0.024pF in the range 103-105 mm. This analytical model would enable the sensor's sensitivity to be optimized.</p> <p>Additionally, a new generation of durable elastomeric materials is commercially accessible for 3D printing, allowing the development of an entirely new class of materials for wearable and industrial applications. By using functional grading and adjusting to diverse users, the mechanical reaction of soft 3D-printed objects may now be modified for increased safety and comfort. Additionally, electronics may be included into these 3D printed lattice and wearable structures to offer input on the movement of objects associated with healthcare devices as well as automotive components. Thus, in order to investigate the influence of additive manufacturing on the sensitivity of TPU/CNT sensors, samples with equal thickness and size but varied orientations are printed and compared to hot-press samples. Among the many 3D printed patterns, the [0,0] direction has the highest sensitivity, and may be used as an optimum method for increased sensitivity. In contrast to the hot-press samples, the 3D-printed TPU/CNT film features a crystalline network, which may aid in the passage of surface charges and hence increase capacitance changes.</p> <p>To have a better understanding which feature, and parameter can give us the most sensitivity we need to do an optimization. This will be accomplished by collecting experimental and computational results and using them as a basis for establishing a computationally and experimentally supported Genetic Algorithm Assisted Machine Learning (GAML) framework combined with artificial neural network (ANN) to develop TPU/CNT nanocomposite flexible sensors in which material characterizations will be coupled to strain, tactile, electronic and proximity characteristics to probe intermolecular interactions between CNTs and polymers. The proposed framework provides enhanced predictive capabilities by managing multiple sets of data gathered from physical testing (material characterization and sensor testing) and multi-fidelity numerical models spanning all lengths scales. The GAML-ANN framework will allow the concurrent optimization of processing parameters and structural features of TPU/CNT nanocomposites, enabling fabrication of high-performance, lightweight flexible sensor systems.</p> <p>Our suggested nanocomposite sensor establishes a new mainstream platform for ultrasensitive object perception, demonstrating a viable prototype for wearable proximity sensors for motion analysis and the automobile sector.</p>

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This report describes the design and construction of a tilting platform for sorting household waste, limited to plastic, glass, and metal. The platform utilizes a capacitive sensor to identify if an object is placed on the platform, an inductive sensor to detect metal, and a load cell to differentiate between plastic and glass based on their weight difference. The load cell was found to be inaccurate due to sensitivity to physical changes in the environment and sensor placement, leading to inaccurate weight measurements. Relocating the sensors away from the load cell is recommended to improve accuracy. The platform tilts using to two servomotors, which makes the platform tilt in two degrees of freedom. This solution worked as thought out, except for the universal joint having poor quality, resulting in a wobbly motion. / Denna rapport beskriver designen och konstruktionen av en vippande plattform för sortering av hushållsavfall begränsat till plast, glas och metall. Plattformen använder en kapacitiv sensor för att identifiera om ett föremål placeras på den, en induktiv sensor för att detektera metall och en lastcell för att skilja mellan plast och glas baserat på deras viktskillnad. Lastcellen visade sig vara opålitlig på grund av dess känslighet för fysiska förändringar i miljön och placeringen av sensorerna, vilket ledde till felaktiga viktmätningar. Det rekommenderas att flytta sensorerna bort från lastcellen för att förbättra noggrannheten. Den lutande funktionen drivs av två servomotorer som var funktionell men hade en ostadig rörelse på grund av dåliga universal joints.