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Příprava a charakterizace dvourozměrných heterostruktur / Fabrication and characterization of two-dimensional heterostructuresMajerová, Irena January 2019 (has links)
After the experimental discovery of graphene at the beginning of the 21st century, many other interesting 2D materials have been discovered. However, the electrical and optical properties of these layers are greatly influenced by the composition and quality of the surrounding materials. In order to preserve the exceptional properties of thin films, attention has gradually been drawn to heterostructures from 2D composite materials. This thesis describes the preparation and characterization of heterostructures composed of graphene and hexagonal boron nitride. In addition, a specific focus will be placed on optimizing the production process of heterostructures by the dry thin film transfer process, prepared by micromechanical exfoliation. Characterization and quality of prepared layers are controlled by Raman spectroscopy, while morphology is examined by atomic force microscope (AFM). Furthermore, the electrical properties of the graphene-hBN device are discussed and the charge carrier of the graphene field-effect transistor is measured.
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Organic modification of Metal/Semiconductor contactsHenry Alberto, Mendez Pinzon 10 July 2006 (has links)
In the present work a Metal / organic / inorganic semiconductor hybrid heterostructure
(Ag / DiMe−PTCDI / GaAs) was built under UHV conditions and characterised in situ. The
aim was to investigate the influence of the organic layer in the surface properties of
GaAs(100) and in the electrical response of organic−modified Ag / GaAs Schottky diodes.
The device was tested by combining surface−sensitive techniques (Photoemission
spectroscopy and NEXAFS) with electrical measurements (current−voltage,
capacitance−voltage, impedance and charge transient spectroscopies).
Core level examination by PES confirms removal of native oxide layers on sulphur
passivated (S−GaAs) and hydrogen plasma treated GaAs(100) (H+GaAs) surfaces.
Additional deposition of ultrathin layers of DiMe−PTCDI may lead to a reduction of the
surface defects density and thereby to an improvement of the electronic properties of GaAs.
The energy level alignment through the heterostructure was deduced by combining UPS and
I−V measurements. This allows fitting of the I−V characteristics with electron as majority
carriers injected over a barrier by thermionic emission as a primary event. For thin organic
layers (below 8 nm thickness) several techniques (UPS, I−V, C−V, QTS and AFM) show non
homogeneous layer growth, leading to formation of voids. The coverage of the H+GaAs
substrate as a function of the nominal thickness of DiMe−PTCDI was assessed via C−V
measurements assuming a voltage independent capacitance of the organic layer.
The frequency response of the device was evaluated through C−V and impedance
measurements in the range 1 kHz−1 MHz. The almost independent behaviour of the
capacitance in the measured frequency range confirmed the assumption of a near
geometrical capacitor, which was used for modelling the impedance with an equivalent circuit
of seven components. From there it was found a predominance of the space charge region
impedance, so that A.C. conduction can only takes place through the parallel conductance,
with a significant contribution of the back contact. Additionally a non linear behaviour of the
organic layer resistance probably due to the presence of traps was deduced. ( ) ω ' R
QTS measurements performed on the heterostructure showed the presence of two
relaxations induced by deposition of the organic layer. The first one is attributed to the
presence of a deep trap probably located at the metal / organic interface, while the second
one has very small activation energy ( ~ 20 meV) which are probably due to disorder at the
organic film. Those processes with small activation energies proved to be determinant for fitting the I−V characteristics of DiMe−PTCDI organic modified diodes using the expressions
of a trapped charge limited current regime TCLC. Such a model was the best analytical
approach found for fitting the I−V response. Further improving probably will involve
implementation of numerical calculations or additional considerations in the physics of the
device.
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Defect energies, band alignments, and charge carrier recombination in polycrystalline Cu(In,Ga)(Se,S)2 alloysTurcu, Mircea Cassian 15 March 2004 (has links)
This work investigates the defect energies, band alignments, and charge carrier recombination in polycrystalline Cu(In1-xGax)(Se1-ySy)2 chalcopyrite thin films and the interrelationship with the alloy composition. Photoluminescence spectroscopy of investigated Cu-poor Cu(In,Ga)(Se,S)2 layers generally shows broad emission lines with the corresponding maxima shifting towards higher energies under decreasing temperature or under increasing excitation power. Admittance spectroscopy of Cu-poor ZnO/CdS/Cu(In,Ga)(Se,S)2 chalcopyrite devices shows that the activation energies of the dominant defect distributions involving donors at the CdS/absorber interface and deep acceptors in the chalcopyrite bulk, increase upon alloying CuInSe2 with S. The band alignments within the Cu(In1-xGax)(Se1-ySy)2 system are determined using the energy position of the bulk acceptor state as a reference. The band gap enlargement under Ga alloying is accommodated almost exclusively in the rise of the conduction band edge, whereas the increase of band gap upon alloying with S is shared between comparable valence and conduction band offsets. The extrapolated band discontinuities [delta]EV(CuInSe2/CuInS2) = -0.23 eV, [delta]EC(CuInSe2/CuInS2) = 0.21 eV, [delta]EV(CuInSe2/CuGaSe2) = 0.036 eV, and [delta]EC(CuInSe2/CuGaSe2) = 0.7 eV are in good agreement with theoretical predictions. Current-voltage analysis of Cu-poor ZnO/CdS/Cu(In,Ga)(Se,S)2 devices reveals recombination barriers which follow the band gap energy of the absorber irrespective of alloy composition, as expected for dominant recombination in the chalcopyrite bulk. In turn, the recombination at the active junction interface prevails in Cu-rich devices which display substantially smaller barriers when compared to the band gap energy of the absorber. The result indicates that the Cu-stoichiometry is the driving compositional parameter for the charge carrier recombination in the chalcopyrite heterojunctions under investigations.
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MANIPULATION OF EXCITON DYNAMICS BY INTERFACIAL ENERGY/CHARGE TRANSFER IN TWO-DIMENSIONAL SEMICONDUCTORSDewei Sun (17468739) 29 November 2023 (has links)
<p dir="ltr">In the realm of two-dimensional (2D) materials, monolayer (ML) transition metal dichalcogenides (TMDCs) have gained significant interest due to their direct bandgap transition, high carrier mobility, strong light-matter interaction, and robust spin and valley degrees of freedom, starkly contrasting their bulk counterparts. Owing to their large surface-to-volume ratio, the integration of ML TMDCs with other various 2D semiconductors and microcavities offers opportunities to study fundamental photo-physics processes at the heterointerfaces, paving the way for implementation of next-generation devices.</p><p dir="ltr">Chapter 1 provides a concise introduction to 2D materials, particularly TMDCs, and their fascinating optical and electronic properties. It examines the role of excitons in 2D materials, and the impact of energy transfer (ET) and charge transfer (CT) on exciton’s properties in TMDC through the construction of 2D van der Waals (vdW) heterostructures and coupling with optical microcavities. This chapter also delves into the potential enhancement of TMDCs’ optical properties by integrating 2D hybrid lead halide perovskites and ultra-thin three-dimensional (3D) halide perovskites with TMDCs. Furthermore, it sets the general context for light-matter interaction, another form of ET, considering both weak and strong coupling regimes.</p><p dir="ltr">Chapter 2 outlines the optical techniques employed to gather data for this work. A focus is placed on ultrafast optical techniques like transient absorption spectroscopy, which allow for direct probing and analysis of ET and CT dynamics at the heterointerface.</p><p dir="ltr">Photoinduced interfacial CT plays a critical role in the field of energy conversion involving vdW heterostructures constructed by inorganic nanostructures and organic materials. However, the control of atomic-scale stacking configurations to modulate charge separation at interfaces remains challenging. Chapter 3 aims to illustrate tunability of interfacial charge separation in a Type-II heterojunction between ML-WS<sub>2</sub> and an organic semiconducting molecule by rational design of relative stacking configurations using 2D perovskites as scaffoldings. This chapter investigates how different molecular stacking, face-to-face versus face-to-edge, affects CT at the heterointerface. Our findings reveal that the CT process heavily depends on the relative stacking configurations at the organic-TMDCs heterointerface, with charge separation being notably slowed down for face-to-edge configuration compared to face-to-face configuration. These investigations open new opportunities for designing efficient charge separation processes in energy conversion applications by judiciously engineering interfaces between organic and inorganic semiconductors, using 2D perovskites as scaffolds.</p><p dir="ltr">Though TMDCs’ large surface-to-volume ratios make them excellent platforms for studying interfacial properties, the presence of bulky ligands on the surface of 2D perovskite poses a challenge, impeding direct interfacial coupling in their heterostructures. Chapter 4 details the fabrication of ML-WS<sub>2</sub> and ultra-thin CH<sub>3</sub>NH<sub>3</sub>PbX<sub>3</sub> (MAPbX<sub>3</sub>, X=Br, I) heterostructures with tunable energy levels, to study the dynamics of CT and ET at these hybrid interfaces. Notably, heterojunctions of WS<sub>2</sub> with pure MAPbBr<sub>3</sub> and MAPbI<sub>3</sub> were elucidated as Type-I and Type-II respectively, using photoluminescence (PL) and time-resolved photoluminescence (TR-PL) measurements. Transit absorption (TA) spectroscopy investigations unambiguously revealed a rapid ET facilitated by CT in the WS<sub>2</sub>/MAPbBr<sub>3</sub> heterostructure, with a time constant of ~20 ps, and a predominantly CT in the WS<sub>2</sub>/MAPbI<sub>3</sub> heterostructure with a time constant of ~50 femtosecond (fs). The successful interfacing of low-dimensional perovskites with an extensive array of traditional 2D materials such as TMDCs opens up possibilities for novel optoelectronic properties and applications within the field of 2D material systems. Furthermore, the ultrafast and efficient ET and CT processes hold promise for the creation of advanced energy conversion devices.</p><p dir="ltr">In the last chapter, we successfully fabricated a ML-WS<sub>2</sub> in conjunction with a silver (Ag) nanoparticle (NP) array. Our findings affirmed a weak light-matter coupling between ML-WS<sub>2</sub> and the Ag NP array, as evidenced by angle-resolved photoluminescence spectroscopy. Furthermore, an enhancement in the bright exciton emission from ML-WS<sub>2</sub> was observed at reduced temperatures. The analysis of PL enhancement factor at varying temperatures suggested that an upper bound of the enhancement factor for the bright exciton could reach ~51 or even higher at 7 K, given the imperfect uniformity of the electric filed generated around the NPs. This discovery carries significant implications for the manipulation of excitons in TMDCs and expands their potential applications in the field of optoelectronics.</p>
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Switchable and Tunable MEMS Devices in GaN MMIC TechnologyImtiaz Ahmed (11430355) 20 December 2023 (has links)
<p dir="ltr">Rapid evolution in wireless technology and the increasing demand for high bandwidth communication for 5G/6G and the Internet of Things (IoT) have necessitated a growing number of components in radio front-end modules in an increasingly overcrowded radio frequency (RF) spectrum. Low-cost ad-hoc radios have drawn consumer interest, enabling new devices like microelectromechanical (MEMS) resonators for on-chip clocking, frequency-selective filters, RF signal processing, and spectral sensing for their small footprint and low power consumption. Gallium nitride (GaN) is an attractive electromechanical material due to its high coupling coefficient, acoustic velocity, and low viscoelastic losses. These benefits enable high-Q MEMS resonators in GaN monolithic microwave integrated circuits (MMICs) with scaling capability up to mm-wave frequencies, making this technology platform a contender for high-performance programmable radios in RF/mm-wave, sensors for harsh environments, and information processing in quantum systems.</p><p dir="ltr">The bias-dependent control mechanism of the 2D electron gas (2DEG) in GaN heterostructures can be exploited to design different switchable and tunable devices for reconfigurable MEMS components. This work presents, for the first time, a comprehensive study of the electromechanical performances of different transduction mechanisms in switchable GaN MEMS resonators. A unique OFF-state shunt design, where the 2DEG in an AlN/GaN heterostructure is utilized to control electromechanical transduction in Lamb mode resonators, is also experimentally demonstrated in this work. To make a valid comparison among switchable transducers, equivalent circuit models are developed to extract key parameters from the measurements by fitting them in both ON and OFF states. The switchable transducer with Ohmic interdigitated transducers (IDTs) and Schottky control gate shows superior performance among the designs under consideration with complete suppression of the mechanical mode in the OFF state and a maximum frequency-quality factor product of 5x10<sup>12</sup>s<sup>-1</sup> and a figure-of-merit of 5.18 at 1GHz in the ON state.</p><p dir="ltr">Over the past few years, there have been numerous efforts to scale the frequencies of MEMS devices in the GaN platform towards mm-wave frequencies. However, challenges remain due to the multi-layer thick buffer, typical in the growth of GaN epilayer on a substrate. This work presents the investigation of SweGaN QuanFINE<sup> </sup>buffer-free and ultrathin GaN-on-SiC for the performance of surface acoustic wave (SAW) devices beyond 10GHz. Finite element analysis (FEA) is performed to find the range of frequencies for the Sezawa mode in the structure. Transmission lines and resonators are designed, fabricated, and characterized. Modified Mason circuit models are developed for each class of devices to extract critical performance metrics and benchmark with the state-of-the-art and theoretical limits for GaN. Sezawa modes are observed at frequencies up to 14.3GHz, achieving a record high in GaN MEMS to the best of our knowledge. A maximum piezoelectric coupling of 0.61% and frequency-quality factor product of 6x10<sup>12</sup>s<sup>-1</sup> are achieved for Sezawa resonators at 11GHz, with a minimum propagation loss of 0.26dB/λ for the two-port devices. The devices also exhibit high linearity with input third-order intercept points (IIP3) of 65dBm at 9GHz.</p><p dir="ltr">This work also investigates tunable acoustoelectric (AE) devices in the QuanFINE platform, leveraging its inherent 2DEG in the AlGaN/GaN heterostructure. Using 9.7GHz Sezawa mode acoustic delay lines, we report the highest frequency of AE in GaN to date. Active and passive AE devices are designed for voltage-dependent non-reciprocity and propagation loss without modification to the standard process for the High Electron Mobility Transistors (HEMTs) in MMICs. Drain/source Ohmic contacts control the drift velocity of the 2DEG, and the Schottky gate modulates 2DEG carrier concentration, resulting in a 30dB/cm separation between forward and reverse acoustic waves for a 2.56kV/cm lateral DC electric field and a maximum change in propagation loss of 50dB/cm for -5V DC at the control gate, respectively. The QuanFINE<sup> </sup>technology with AlGaN/GaN heterostructure enables a platform for switchable MEMS resonators and tunable acoustoelectric devices in MMICs for reconfigurable front end approaching mm-wave frequencies.</p>
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A Comprehensive Study of Magnetic and Magnetotransport Properties of Complex Ferromagnetic/Antiferromagnetic- IrMn-Based HeterostructuresArekapudi, Sri Sai Phani Kanth 21 June 2023 (has links)
Manipulation of ferromagnetic (FM) spins (and spin textures) using an antiferromagnet (AFM) as an active element in exchange coupled AFM/FM heterostructures is a promising branch of spintronics. Recent ground-breaking experimental demonstrations, such as electrical manipulation of the interfacial exchange coupling and FM spins, as well as ultrafast control of the interfacial exchange-coupling torque in AFM/FM heterostructures, have paved the way towards ultrafast spintronic devices for data storage and neuromorphic computing device applications.[5,6] To achieve electrical manipulation of FM spins, AFMs offer an efficient alternative to passive heavy metal electrodes (e.g., Pt, Pd, W, and Ta) for converting charge current to pure spin current. However, AFM thin films are often integrated into complex heterostructured thin film architectures resulting in chemical, structural, and magnetic disorder.
The structural and magnetic disorder in AFM/FM-based spintronic devices can lead to highly undesirable properties, namely thermal dependence of the AFM anisotropy energy barrier, fluctuations in the magnetoresistance, non-linear operation, interfacial spin memory loss, extrinsic contributions to the effective magnetic damping in the adjacent FM, decrease in the effective spin Hall angle, atypical
magnetotransport phenomena and distorted interfacial spin structure. Therefore, controlling the magnetic order down to the nanoscale in exchange coupled AFM/FM-based heterostructures is of fundamental importance. However, the impact of fractional variation in the magnetic order at the nanoscale on the magnetization reversal, magnetization dynamics, interfacial spin transport, and the interfacial domain structure of AFM/FM-based heterostructures remains a critical barrier.
To address the aforementioned challenges, we conduct a comprehensive experimental investigation of chemical, structural, magnetization reversal (integral and element-specific), magnetization dynamics, and magnetotransport properties, combined with high-resolution magnetic imaging of the exchange coupled Ni3Fe/IrMn3-based heterostructures.
Initially, we study the chemical, structural, electrical, and magnetic properties of epitaxially textured MgO(001)/IrMn3(0-35 nm)/Ni3Fe(15 nm)/Al2O3(2.0 nm) heterostructures. We reveal the impact of magnetic field annealing on the interdiffusion at the IrMn3/Ni3Fe interface, electrical resistivity, and magnetic properties of the heterostructures. We further present an AFM IrMn3 film thickness
dependence of the exchange bias field, coercive field, magnetization reversal, and magnetization dynamics of the exchange coupled heterostructures. These experiments reveal a strong correlation between the chemical, structural and magnetic properties of the IrMn3-based heterostructures. We find a significant decrease in the spin-mixing conductance of the chemically-disordered IrMn3/Ni3Fe
interface compared to the chemically-ordered counterpart. Independent of the AFM film thickness, we unveil that thermally disordered AFM grains exist in all the samples (measured up to 35-nm-thick IrMn3 films). We develop an iterative magnetic field cooling procedure to systematically manipulate the orientation of the thermally disordered and reversible AFM moments and thus, achieve tunable magnetic, and magnetotransport properties of exchange coupled AFM-based heterostructures. Subsequently, we investigate the impact of fractional variation in the AFM order on the magnetization reversal and magnetotransport properties of the epitaxially textured ɣ-phase IrMn3/Ni3Fe, Ni3Fe/IrMn3/Ni3Fe, and Ni3Fe/IrMn3/Ni3Fe/CoO heterostructures.
We probe the element-specific (FM: Ni and Co, and AFM: Mn) magnetization reversal properties of the exchange coupled Ni3Fe/IrMn3/Ni3Fe/Co/CoO heterostructures in various magnetic field cooled states. We present a detailed procedure for separating the spin and orbital moment contributions for magnetic elements using the XMCD sum rule. We address whether Mauri-type domain walls can develop at the (polycrystalline) exchange coupled Ni3Fe/IrMn3/Ni3Fe interfaces. We further study the impact of magnetic field cooling on the AFM Mn (near L2,3-edges) X-ray absorption spectra. Finally, we employ a combination of in-field high-resolution magnetic force microscopy, magnetooptical Kerr effect magnetometry with micro-focused beam, and micromagnetic simulations to study the magnetic vortex structures in exchange coupled FM/AFM and AFM/FM/AFM disk structures. We examine the magnetic vortex annihilation mechanism mediated by the emergence and subsequent annihilation of the vortex-antivortex (V-AV) pairs in simple FM and exchange coupled FM/AFM as well as AFM/FM/AFM disk structures. We image the distorted magnetic vortex structures in exchange coupled FM/AFM disks proposed by Gilbert and coworkers. We further emphasize crucial magnetic vortex properties, such as handedness, effective vortex core radius, core displacement at remanence, nucleation field, annihilation field, and exchange bias field.
Our experimental inquiry offers profound insight into the interfacial exchange interaction, magnetization reversal, magnetization dynamics, and interfacial spin transport of the AFM/FM-based heterostructures. Moreover, our results pave the way towards nanoscale control of the magnetic properties in AFM-based heterostructures and point towards future opportunities in the field of AFM
spintronic devices.:1. Introduction
2. Magnetic Interactions and Exchange Bias Effect
3. Materials
4. Experimental Methods
5. Structural, Electrical, and Magnetization Reversal Properties of Epitaxially Textured ɣ-IrMn3/ Ni3Fe Heterostructures
6. Magnetization Dynamics of MgO(001)/IrMn3/Ni3Fe Heterostructures in the Frequency Domain
7. Tunable Magnetic and Magnetotransport Properties of MgO(001)/Ni3Fe/IrMn3/Ni3Fe/ CoO/Pt Heterostructures
8. Element-Specific XMCD Study of the Exchange Couple Ni3Fe/IrMn3/Ni3Fe/Co/CoO Heterostructures
9. Distorted Vortex Structure and Magnetic Vortex Reversal Processes in Exchange Coupled Ni3Fe/IrMn3 Disk Structures
10. Conclusions and Outlook
Addendum
Acronyms
Symbols
Publication List
Author Information
Acknowledgments
Statement of Authorship
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Growth and characterization of M-plane GaN and (In,Ga)N/GaN multiple quantum wellsSun, Yue-Jun 06 July 2004 (has links)
Thema dieser Arbeit ist die Synthese von Wurtzit M-plane (In,Ga)N(1-100)-Heterostrukturen auf g-LiAlO2(100) mittels plasmaunterstützter Molekularstrahlepitaxie (MBE). Der Einfluß der Wachstumsbedingungen auf die strukturellen, morphologischen, und optischen Eigenschaften von M-plane GaN-Filmen werden untersucht. Ferner werden M-plane (In,Ga)N/GaN Multiquantenwells (MQWs) hergestellt und deren strukturelle und optische Eigenschaften untersucht. Schließlich wird der Einbau von Mg in M-plane GaN untersucht, um p-Typ-Leitfähigkeit zu erreichen. Die Arbeit beginnt mit einer Einführung bezüglich der Verspannung und der elektrostatischen Polarisation in Nitriden. Die Motivation fuer das Wachstum in [1-100]-Richtung anstatt in der konventionellen [0001]-Richtung ist, dass die GaN(1-100)-Flaeche nichtpolar ist, da sie aus einer gleichen Anzahl dreifach koordinierter Ga- und N-Atome aufgebaut ist. GaN ist überdies nicht piezoelektrisch in der [1-100]-Richtung. Das daraus folgende Fehlen elektrostatischer Felder in dieser Richtung stellt einen klaren Vorteil für die Leistung von GaN-basierenden hocheffizienten Leuchtdioden (LEDs) dar. Entsprechende [0001]-orientierte Strukturen, die auf konventionellen Substraten wie Al2O3 und SiC abgeschieden werden, leiden unter einer verringerten Effizienz durch die Präsenz der spontanen und piezoelektrischen Polarisation in dieser Wachstumsrichtung. Die Eigenschaften des Substrats LiAlO2 in Bezug auf das MBE-Wachstum werden anschliessend diskutiert. Es wird gezeigt, daß die thermische Stabilität von LiAlO2 fuer das MBE-Wachstum von Heterostrukturen geeignet ist. Die Polaritaet von LiAlO2 hat einen entscheidenden Einfluß auf die Phasenreinheit der GaN-Filme, und die Wahl der richtigen Polaritaet ist Voraussetzung fuer die Herstellung von einphasigen M-plane GaN-Schichten. In Kapitel 4 wird der Einfluß der Nukleationsbedingungen auf die strukturellen und morphologischen Eigenschaften von M-plane GaN-Filmen systematisch untersucht. Ferner wird die Ga-Adsorption und -Desorption ausführlich untersucht. Optimale Wachstumsbedingungen werden etabliert, die es ermoeglichen, M-plane-GaN-Schichten hoher Qualitaet reproduzierbar zu erhalten. Die Mikrostruktur der M-plane-GaN-Schichten, untersucht mittels Transmissionselektronenmikroskopie, ist durch eine hohe Dichte an Stapelfehlern als dominierenden Defekt gekennzeichnet. Vollstaendige Fadenversetzungen, die die dominanten Defekte in C-plane GaN sind, werden dagegen nicht beobachtet. Die Korrelation zwischen den Stapelfehlern und den optischen Eigenschaften der Films wird untersucht. Eine intensive Emissionslinie wird in Tieftemperatur-Photolumineszenzspektren beobachtet, die an Stapelfehlern gebundenen Exzitonen zugeordnet wird. In Kapitel 6 wird die erfolgreiche Synthese von M-plane-(In,Ga)N/GaN-MQWs beschrieben. Das Zusammensetzungsprofil dieser Strukturen wird mittels Roentgendiffraktometrie und Sekundaerionenmassenspektrometrie untersucht. Die Ergebnisse belegen eine betraechtliche Oberflaechensegregation von In, die zu einem erniedrigten In-Gehalt sowie stark verbreiterten Quantenwells führt. Der erhaltene In-Gehalt von 7% ist niedriger als derjenige (15%), der in entsprechenden C-plane-Strukturen gefunden wird, die unter identischen Bedingungen hergesellt wurden. Dieses Resultat deutet auf eine niedrigere Einbaueffizienz von In auf (1-100) verglichen mit (0001) hin. Die Abhaengigkeit der Übergangsenergien von der Quantenwellbreite dieser M-plane-MQWs belegt die Abwesenheit interner elektrostatischer Felder entlang der Wachstumsrichtung. Die Rekombinationsdynamik in diesen MQWs wird im Detail untersucht. Sie ist stark von lokalisierten Zuständen beeinflußt. Im Gegensatz zu C-plane-Strukturen, wird in diesen M-plane MQWs eine starke Polarisation der spontanen Emission in der Filmebene mit einem energieabhängigen Polarisationsgrad von bis zu 96% beobachtet. In Kapitel 7 wird der Einfluß der Wachstumstemperatur und der Stoechiometrie auf den Mg-Einbau in GaN(1-100) zur p-Dotierung untersucht. Eine Mg-Konzentration bis zu 8×1020 cm-3 kann in M-plane-GaN-Schichten ohne beobachtbare Degradation der Kristallqualität erreicht werden. Es wird sowohl eine Diffusion als auch eine Segregation von Mg in M-plane GaN beobachtet. Zusaetzlich wird eine ausgepraegte Abhaengigkeit des O-Einbaus von der Mg-Dotierung beobachtet, was auf die hohe Reaktivitaet von Mg mit O zurückgeführt wird. Sowohl optische als auch elektrische Messungen weisen darauf hin, daß Mg in diesen M-plane GaN-Schichten als Akzeptor eingebaut wird. / In this thesis, we investigate the synthesis of wurtzite M-plane (In,Ga)N(1-100) heterostructures on g-LiAlO2(100) by plasma-assisted molecular beam epitaxy (MBE). We examine the impact of growth conditions on the structural, morphological, and optical doping properties of M-plane GaN. Furthermore, we fabricate M-plane (In,Ga)N/GaN multiple quantum wells and investigate their structural and optical properties. Finally, the incorporation of Mg in $M$-plane GaN is studied to achieve p-type conductivity. We start by giving an introduction concerning strain and electrostatic polarization fields. The motivation of growth along the [1-100] direction, instead of along the conventional [0001] direction is presented. The GaN(1-100) plane is nonpolar since it is composed of equal numbers of three-fold coordinated Ga and N atoms. Furthermore, GaN is not piezoelectrically active along the [1-100] direction. The resulting absence of electrostatic fields in this direction constitutes a distinct advantage for fabricating high-efficiency light-emitting diodes(LEDs). Corresponding [0001]-oriented structures grown on conventional substrates such as Al2O3(0001) and SiC(0001), suffer from a degradation of luminescence efficiency by the presence of both spontaneous and piezoelectric polarization along the growth direction. The properties of the LiAlO2 substrate with respect to MBE growth are discussed next. The thermal stability of LiAlO2 is demonstrated to be suitable for MBE-growth of heterostructures. The polarity of LiAlO2 is found to have a crucial influence on the phase-purity of the GaN films. The synthesis of pure M-plane GaN is preferentially achieved on one face of the substrate. The impact of nucleation conditions on the structural and morphological properties of M-plane GaN films is systematically investigated. Furthermore, a comprehensive study of Ga adsorption and desorption on the M-plane is presented. Optimum growth conditions are established, and high quality M-plane GaN can be obtained reproducibly. Concerning the microstructure of our M-plane GaN layers, stacking faults are found by transmission electron microscopy (TEM) to be the dominant defects, while perfect threading dislocations, which are the dominant defects (108-1010 cm-2) in C-plane GaN, are not observed by TEM. The correlation between the stacking faults and the optical properties of the films is explored. A strong transition from excitons bound to stacking faults is observed by low temperature photoluminescence measurements. The successful synthesis of M-plane (In,Ga)N/GaN multiple quantum wells (MQWs) is demonstrated. The composition profiles of these structures are investigated by both x-ray diffractometry and secondary ion-mass spectrometry. The results reveal significant In surface segregation, resulting in a reduced In content and much wider wells than intended. The resulting In content of ~7% is lower than that obtained (~15%) for corresponding C-plane structures grown under identical conditions, suggesting a lower In incorporation efficiency on the (1-100) plane compared to the (0001) plane. The dependence of the transition energies on the well thickness of these M-plane quantum wells evidences the absence of internal electrostatic fields along this growth direction. The recombination dynamics in these MQWs is investigated in detail, and is found to be strongly influenced by localized states. Furthermore, in contrast to C-plane (0001) structures, a strong in-plane anisotropy of the spontaneous emission with an energy-dependent polarization degree of up to 96% is observed in the M-plane (In,Ga)N/GaN MQWs. Finally, the impact of the growth temperature and stoichiometry on the Mg incorporation in GaN(1-100) is investigated. Mg doping levels up to 8×1020 cm-3 can be obtained in M-plane GaN, with no observed degradation in crystal quality. Both Mg diffusion and surface segregation in M-plane GaN are observed. In addition, a pronounced dependence of the O incorporation on the Mg doping is observed, and attributed to the high reactivity of Mg with O. Both optical and electrical measurements indicate that Mg acts as an acceptor in the Mg-doped M-plane layers.
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Properties of Zincblende GaN and (In,Ga,Al)N Heterostructures grown by Molecular Beam EpitaxyMüllhäuser, Jochen R. 17 June 1999 (has links)
Während über hexagonales (alpha) GaN zum ersten Mal 1932 berichtet wurde, gelang erst 1989 die Synthese einer mit Molekularstrahlepitaxie (MBE) auf 3C-SiC epitaktisch gewachsenen, metastabilen kubischen (eta) GaN Schicht. Die vorliegende Arbeit befaßt sich mit der Herstellung der Verbindungen eta-(In,Ga,Al)N mittels RF-Plasma unterstützter MBE auf GaAs(001) und den mikrostrukturellen sowie optischen Eigenschaften dieses neuartigen Materialsystems. Im Vergleich zur hexagonalen bietet die kubische Kristallstruktur auf Grund ihrer höheren Symmetrie potentielle Vorteile für die Anwendung in optischen und elektronischen Bauelementen. Viele wichtige Materialgrößen der kubischen Nitride sind jedoch noch gänzlich unbekannt, da sich die Synthese einkristalliner Schichten als sehr schwierig erweist. Das Ziel dieser Arbeit ist es daher erstens, die technologischen Grenzen der Herstellung von bauelementrelevanten kubischen (In,Ga,Al)N Heterostrukturen auszuweiten und zweitens, einen Beitrag zur Aufklärung der bis dato wenig bekannten optischen und elektronischen Eigenschaften des GaN und der Mischkristalle In GaN zu leisten. Zunächst wird ein optimierter MBE Prozess unter Einsatz einer Plasmaquelle hohen Stickstofflusses vorgestellt, welcher nicht nur die reproduzierbare Epitaxie glatter, einphasiger GaN Nukleationsschichten auf GaAs ermöglicht. Vielmehr können damit auch dicke GaN. Schichten mit glatter Oberflächenmorphologie hergestellt werden, welche die Grundlage komplizierterer eta-(In,Ga,Al)N Strukturen bilden. An einer solchen GaN Schicht mit einer mittleren Rauhigkeit von nur 1.5 nm werden dann temperaturabhängige Reflexions- und Transmissionsmessungen durchgeführt. Zur Auswertung der Daten wird ein numerisches Verfahren entwickelt, welches die Berechnung des kompletten Satzes von optischen Konstanten im Spektralgebiet 2.0 = 0.4 wären grün-gelbe Laserdioden. Zusammenfassung in PostScript / While the earliest report on wurtzite (alpha) GaN dates back to 1932, it was not until 1989 that the first epitaxial layer of metastable zincblende (eta) GaN has been synthesized by molecular beam epitaxy (MBE) on a 3C-SiC substrate. The present work focuses on radio frequency (RF) plasma-assisted MBE growth, microstructure, and optical properties of the eta-(In,Ga,Al)N material system on GaAs(001). Due to their higher crystal symmetry, these cubic nitrides are expected to be intrinsically superior for (opto-) electronic applications than the widely employed wurtzite counterparts. Owing to the difficulties of obtaining single-phase crystals, many important material constants are essentially unknown for the cubic nitrides. The aim of this work is therefore, first, to push the technological limits of synthesizing device-relevant zincblende (In,Ga,Al)N heterostructures and, second, to determine the basic optical and electronic properties of GaN as well as to investigate the hardly explored alloy InGaN. An optimized MBE growth process is presented which allows not only the reproducible nucleation of smooth, monocrystalline GaN layers on GaAs using a high-nitrogen-flow RF plasma source. In particular, thick single-phase GaN layers with smooth surface morphology are obtained being a prerequisite for the synthesis of ternary eta-(Ga,In,Al)N structures. Temperature dependent reflectance and transmittance measurements are carried out on such a GaN film having a RMS surface roughness as little as 1.5 nm. A numerical method is developed which allows to extract from these data the complete set of optical constants for photon energies covering the transparent as well as the strongly absorbing spectral range (2.0 -- 3.8 eV). Inhomogeneities in the refractive index leading to finite coherence effects are quantitatively analyzed by means of Monte Carlo simulations. The fundamental band gap EG(T) of GaN is determined for 5 < T < 300 K and the room temperature density of states is investigated. Systematic studies of the band edge photoluminescence (PL) in terms of transition energies, lineshapes, linewidths, and intensities are carried out for both alpha- and GaN as a function of temperature. Average phonon energies and coupling constants, activation energies for thermal broadening and quenching are determined. Excitation density dependent PL measurements are carried out for both phases in order to study the impact of nonradiative recombination processes at 300 K. A recombination model is applied to estimate the internal quantum efficiency, the (non)radiative lifetimes, as well as the ratio of the electron to hole capture coefficients for both polytypes. It is seen that the dominant nonradiative centers in the n-type material investigated act as hole traps which, however, can be saturated at already modest carrier injection rates. In summary, despite large defect densities in GaN due to highly mismatched heteroepitaxy on GaAs, band edge luminescence is observed up to 500 K with intensities comparable to those of state-of-the-art alpha-GaN. For the first time, thick InGaN films are fabricated on which blue and green luminescence can be observed up to 400 K for x=0.17 and x=0.4, respectively. Apart from bulk-like InGaN films, the first coherently strained InGaN/GaN (multi) quantum wells with In contents as high as 50 % and abrupt interfaces are grown. This achievement shows that a ternary alloy can be synthesized in a metastable crystal structure far beyond the miscibility limit of its binary constituents despite the handicap of highly lattice mismatched heteroepitaxy. The well widths of these structures range between 4 and 7 nm and are thus beyond the theoretically expected critical thickness for the strain values observed. It is to be expected that even higher In contents can be reached for film thicknesses below 5 nm. The potential application of such InGaN/GaN multi quantum wells with x >= 0.4 would thus be diode lasers operating in the green-yellow range. abstract in PostScript
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InGaAs-AlAs and InGaAs-InGaP Strain-Compensated Heterostructures for Short-Wavelength Intersubband Transitions and LasersSemtsiv, Mykhaylo 28 September 2004 (has links)
Der Quantenkaskadenlaser (QCL) ist ein unipolares Intersubbandbauelement dessen Funktionsweise auf Übergängen zwischen dem ersten angeregten Zustand und dem Grundzustand in einem Quantentopf (quantum well, QW) beruht. Er wurde im Jahre 1974 von Kazarinov und Suris theoretisch vorhergesagt und erstmals 1994 von Faist et al. experimentell realisiert. Das Elektron verlässt nach dem Laserübergang nicht das Leitungsband und kann somit durch ein angelegtes elektrisches Feld in die nächste aktive Zone transferiert werden, wo es wiederum einem Laserübergang untergehen kann. Schliesslich, nach einer Reihe solcher Kaskadenprozesse, emittiert ein einzelnes Elektron viele Photonen; dies definiert die hohe Quanteneffizienz der QCLs. Das Hauptproblem bei der kaskadierten Benutzung von aktiven Regionen ist ein schneller Elektronentransport zwischen den emittierenden QWs mithilfe des sogenannten Injektors. Ein schneller Transport der Ladungsträger ist notwendig um das obere Laserniveau zu populieren und das untere zu depopulieren, womit die für die stimulierte Emission notwendige Besetzungsinversion erreicht werden kann. Zur Gewährleistung des schnellen Transports im Injektor ist die Verwendung von Materialien mit einer geringen effektiven Masse naheliegend. Unter den technologisch wichtigen III-V Verbindungen besitzt InAs die geringste elektronische effektive Masse von 0.023m0 (wobei m0 die Masse des freien Elektrons ist). Die binäre Verbindung mit der nächst grösseren effektiven Masse ist GaAs mit m*=0.067m0. Bisher wurden QCLs in beiden, InAs und GaAs und weiterhin im ternären InGaAs basierten QW Materialsystem realisiert. Gegenwärtig zeigen QCLs einen hohen Grad der Reife; hohe Lichtleistung, Dauerstrichbetrieb und Betrieb bei Raumtemperatur sowie Oberflächenemission wurden erzielt. Der von den QCLs abgedeckte spektrale Bereich erstreckt sich von 3.5 Mikrometer bis zu 87 Mikrometer. Trotz des hohen Reifegrades ist der Quantenkaskadenlaser immernoch in der Entwicklung. Speziell die Erweiterung des spektralen Bereichs ist für viele Anwendungen essentiell. Enorme Fortschritte bei der Erweiterung hin zu grösseren Wellenlängen wurden in den letzten Jahren erzielt, dennoch ist der kurzwellige Rekord von 3.5 Mikrometer aus dem Jahre 1998 bisher ungebrochen. Nichtsdestotrotz besitzt der QCL auch im nahen Infrarot das Potential den konventionellen Interbandlaser zu übertreffen. Neben dem Wettstreit um Schwellströme und Ausgangsleistungen, ist aufgrund der andersartigen Physik des Laserüberganges eine verbesserte Anwendungsmöglichkeit im Bereich des schnellen optischen Schaltens zu erwarten. Die Herausforderung im Bereich der kurzwelligen QCLs liegt in der beschränkten Leitungsbanddiskontinuität (CBO) zwischen Quantentopf- und Quantenbarrierenmaterial. Um zwei gebundene elektronische Eigenzustände innerhalb der Quantentöpfe der aktiven Zone zu gewährleisten, wird eine grosse Leitungsbanddiskontinuität benötigt. Weiterhin kann nur so eine ausreichend hohe Barriere zwischen den angeregten Zuständen und dem klassischen Zustandskontinuum bei angelegtem elektrischen Feld erreicht werden. Neben der Notwendigkeit des grossen CBO sollte das Barrierenmaterial eine direkte Bandlücke aufweisen oder zumindest der angeregte Zustand in der aktiven Zone unterhalb des niedrigsten Leitungsbandes des Barrierenmaterials liegen. Mit der Einschränkung bezüglich der Gitterkonstanten von Quantentopf und -barrierenmaterial für ein koh ärentes Wachstum auf einem bestimmten Substrat, endet man bei nur einer Hand voll vielversprechender Materialkombinationen für die Anwendung in QCLs. Das grösste CBO für Materialien mit direkter Bandlücke findet man bei InGaAs/InAlAs. Wir erzielen 520 meV für die ternäre an InP gitterangepasste und 740 meV für die spannungskompensierte In(0.70)Ga(0.30)As/In(0.40)Al(0.60)As Kombination. Unter den Barrierenmaterialien mit indirekter Bandlücke ist die Kombination InAs/AlSb auf GaSb oder InAs mit 2.1 eV CBO im Gamma-valley sehr vielversprechend. Quantenkaskadenlaser basierend auf diesem Materialsystem mit Emission bei 10 Mikrometer wurden kürzlich von Ohtani and Ohno realisiert. Jedoch wurde im kurzwelligen Bereich um 4 und 3 Mikrometer in diesem System bisher nur spontane Emission beobachtet. Damit ist es bis heute ein offene Frage, welches Materialsystem tatsächlich das geeignetste für die Anwendung in kurzwelligen QCLs sein wird und ob es überhaupt möglich sein wird, ihren Wellenlängenbereich auf die Telekommunikationswellenlänge von 1.55 Mikrometer auszuweiten, was zweifellos die grösste Herausforderung darstellt. Oberflächenemission von QCLs ist bisher mittels der Aufbringung einer Rippenstruktur mit kurzer Periode auf der Oberfläche der Laserstreifen erreicht worden. Die Möglichkeit einer Polarisation in der Fläche mithilfe selbstorganisierter Quantenpunktstrukturen innerhalb der aktiven Zone ist ein aktuelles Thema innerhalb der QCL-Gemeinschaft, aber bisher noch unerreicht. Die Kombination aus feldinduzierten Minibändern aus elektronischen Zuständen in konventionellen QCLs und diskreten atomartigen Zuständen in Quantenpunkten ist eine kreative und gleichzeitig widersprüchliche Idee. Dennoch vereint dieses Thema ein gewaltiges Interesse sowohl von theoretischer als auch experimenteller Seite innerhalb der QCL-Gemeinschaft. Diese Arbeit ist der Erweiterung der Materialvielfalt für die Herstellung von Quantenkaskadenlasern gewidmet. Die Mission dieser Forschungsarbeit ist - die Grenzen im Gebrauch des spannungskompensierten Designs des klassischen InGaAs/InAlAs Materialsystems auf InP für kurzwellige Emission auszuloten; - die Möglichkeiten kurzwelliger Intersubbandemission in einer der extraordinären Materialkombinationen für die QCL-Anwendung zu erforschen: spannungskompensiertes InGaAs/InGaP auf GaAs; Die Quintessenz der gesamten Forschungsarbeit besteht in der spannungskompensierten Herangehensweise und den InGaAs enthaltenden Materialsystemen für die Anwendung in Quantenkaskadenlasern. Die Arbeit ist wie folgt strukturiert: Kapitel 1: Die vorliegende Einführung. Kapitel 2: Kurzer überblick der Eigenschaften von Intersubbandübergängen und der Grundlagen der QCL-Funktionsweise. In diesem Kapitel wird eine Einführung in die Eigenschaften von Intersubbandübergängen und den Minibandtransport gegeben. Dieses Kapitel unterstreicht den physikalischen Unterschied von Intersubbandübergängen und Transport zum Fall der Interbandübergnge und gibt eine Einführung in die vorteilhaften Eigenschaften der Intersubbandbauelemente. Weiterhin wird eine Einführung in die Physik des Quantenkaskadenlasers und eine übersicht der Designvielfalt der aktiven Zone gegeben. Im Speziellen wird auf die unterschiedlichen Strategien bei der Erzielung der Besetzungsinversion eingegangen. Kapitel 3: Experimentelles Kapitel. Das 3. Kapitel fasst die erzielten eigenen Ergebnisse innerhalb des InGaAs/InAlAs Materialsystems auf InP zusammen. Dabei konzentriert es sich auf extreme Fälle des spannungskompensierten Designs welche die Realisierung kurzwelliger übergänge zum Ziel haben. Kapitel 4: Experimentelles Kapitel. Im 4. Kapitel werden die erzielten eigenen Ergebnisse innerhalb des InGaAs/InGaP Materialsystems dargestellt. Das InGaAs/InGaP Materialsystem auf GaAs wurde unseres Wissens zuvor füür Intersubbandbauelemente weder benutzt noch vorgeschlagen. Das Kapitel beschreibt den gesamten Verlauf, beginnend mit dem Probenwachstum über grundlegende Materialstudien, bis hin zum Design der QC-Teststruktur und deren Fabrikation. Kapitel 5: Hierin wird die Zusammenfassung der erzielten eigenen Ergebnisse und daraus resultierenden Schlussfolgerungen gegeben. / Quantum cascade lasers, QCL, are unipolar intersubband devices, which work on transitions between the first excited and the ground state in quantum wells, QW. They where predicted theoretically by Kazarinov and Suris 1974, and realized experimentally for the first time by Faist et al. 1994. Electron does not leave the conduction band after the lasing transition in QCL. And therefore it can be used again in the next active region, where it can be transferred due to applied electric field. Finally, after a number of such cascade processes, single electron emits many photons, which defines a high quantum efficiency of QCLs. The key issue in use of cascaded active regions is a fast electron transport in between the emitting QWs (so called, injector region). Fast carrier transfer is needed on the one hand to effectively populate the upper lasing state in active region QW and on the other hand to quickly depopulate the lower lasing state. So that population inversion, necessary for stimulated emission, is achieved. To provide the fast transport in injector region it is likely to deal with materials with a low effective mass. Among the variety of technologically important III-V compounds InAs has the lowest electron effective mass of 0.023m0 (where m0 is the free electron mass). Next low effective mass binary material after InAs is GaAs with m*=0.067m0. Up to now QCLs are realized on both, InAs- and GaAs- as well as ternary InGaAs-based-QW material systems. Currently QCLs show a high level of maturity. High power, cw-operation and room temperature operation as well as surface emission are achieved. Spectral range, covered by QCLs, extends from 3.5 micrometer up to 87 micrometer. Despite of the high level of maturity, QCLs are still under development. In particular, extension of the spectral range of operation is likely for many applications. Tremendous progress was achieved last years in long wavelength range extension of QCLs. However, the short wavelength record of 3.5 micrometer has not been beaten since 1998. Nevertheless, QCLs has a potential to outperform conventional interband lasers also in near infrared spectral range. Apart from competition in threshold current densities and output power, QCLs are expected to be better in fast optical switching operation due to different physics of lasing transitions. The challenge of short wavelength QCLs is a limited conduction band edge offset, CBO, between the quantum well and barrier material. High CBO is needed to confine two quantized electron states in active region QW and to provide sufficient barrier between the excited state and classical continuum of states above the barrier material conduction band edge under applied electric field. More over, despite of high CBO demand, barrier should be the direct band gap material, or at least, the upper lasing state in active region should lay below the lowest conduction band valley in the barrier material. Together with restriction on the lattice constant of both, well and barrier materials, for coherent growth on a certain substrate, we end up with very few promising material combinations for QCL application. The highest CBO for direct band gap materials combination we find in InGaAs/InAlAs. We obtain 520 meV for lattice matched to InP ternaries and about 740 meV for strain-compensated In(0.70)Ga(0.30)As/In(0.40)Al(0.60)As combination. Among the indirect barrier material combinations, very promising is InAs/AlSb on GaSb or InAs with 2.1 eV CBO in gamma-valley. QCL emitting at 10 micrometer has been recently realized on this material system by Ohtani and Ohno. However, at short wavelength, 4 and 3 micrometer, only spontaneous emission is obtained in this material system up to now experimentally. So up to now, it is still an open question, which material system is going to be most suitable for short wavelength QCL application. And it is still an open question, if it is possible at all to extend the operation wavelength of QCLs to the most challenging 1.55 micrometer telecommunication wavelength. Surface emission is achieved in QCLs up to now by manufacturing of the short period grating on the top of the planar laser stripe. The possibility of in-plane polarized emission involving self organized quantum dot structures into the QCL active region is a hot topic in QCL community, but it is not achieved experimentally up to now. Combining the field induced minibands of electron states in conventional QCLs together with discrete atom-like states in QDs is a creative and at the same time contradictive idea. Nevertheless, this topic attracts a huge interest from both, theoretical and experimental, side of QCL community. This work is dedicated to make a step forward in extension of material variety used for QCL fabrication. The mission of this research is - to find out the limits of use of strain-compensated designs on classical InGaAs/InAlAs material system on InP to achieve the short wavelength generation; - to discover the possibilities of short wavelength intersubband generation in one of extraordinary material combinations for QCL application: strain-compensated InGaAs/InGaP on GaAs; The bottom line of the whole research is strain compensation approach and InGaAs containing material systems for QCL application. Present work consist of: Chapter 1: The current introduction. Chapter 2: Brief overview of intersubband transitions properties and the basics of QCL action. In the overview-chapter an introduction into the properties of intersubband transitions and miniband transport is given. This chapter underlines the difference in physics of intersubband transitions and transport comparing to the case of interband transitions; and gives an introduction into the advantageous properties of intersubband devices. This chapter gives an introduction into the quantum cascade laser physics and overview on variety of active region designs. This chapter is, specially, dedicated to point out different ways of achieving the population inversion in each QCL active region approach. Chapter 3: Experimental chapter. Third chapter describes obtained original results on InGaAs/InAlAs material system on InP during the present work. It concentrates on extreme cases of strain-compensated designs for achieving the short wavelength transitions. Chapter 4: Experimental chapter. Forth chapter describes obtained original results on InGaAs/InGaP material system. InGaAs/InGaP material system on GaAs was never before, up to our knowledge, proposed or used for intersubband devices. So, the chapter describes all the way from the sample growth issues and basic study of this material up to QC test-structure design and fabrication. Chapter 5: Here, the summary of obtained original results and conclusions are given.
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Ultraviolet and visible semiconductor lasers based on ZnO heterostructuresKalusniak, Sascha 03 February 2014 (has links)
Im Rahmen dieser Arbeit wurden die optischen Eigenschaften von auf ZnO-basierenden Heterostrukturen untersucht. Besonderes Augenmerk lag hierbei auf ihrer Eignung als aktives Material in Laserdioden für den ultravioletten und sichtbaren Spektralbereich. Es wurde gezeigt, dass ZnO und seine ternären Mischkristalle ZnCdO und ZnMgO erstaunlich vielfältige Anwendungen ermöglichen. Mit diesem Materialsystem lässt sich sowohl ein sehr großer Spektralbereich für Lasertätigkeit abdecken als auch eine Vielzahl von Laseranordnungen realisieren. Im Detail wurde demonstriert, dass sich die Lasertätigkeit von ZnCdO/ZnO Quantengraben-Strukturen vom violetten bis in den grünen Spektralbereich verschieben lässt. Obwohl diese Strukturen starke interne elektrische Felder aufweisen, konnte optisch gepumpte Lasertätigkeit bei Zimmertemperatur bis zu einer Wellenlänge von 510 nm gezeigt werden. Die für die Lasertätigkeit nötige optische Rückkopplung wird durch makroskopische Defekte der Probe verursacht und die Proben fungieren somit als Zufallslaser. Die Herstellung von Mikroresonatoren ermöglichte die Untersuchung des Zusammenspiels von Fabry-Perot- und Zufalls-Rückkopplung. Die experimentellen und theoretischen Ergebnisse zeigen, dass der Schwellengewinn eines Zufallslasers in der Regel größer ist als der des Fabry-Perot-Lasers. Des Weiteren wurde gezeigt, dass hoch reflektierende Braggreflektoren für den ultravioletten und blau/grünen Spektralbereich aus ZnO- und ZnMgO-Schichten hergestellt werden können. Ferner wurden die teils unbekannten Brechungsindexverläufe der verwendeten ternären Materialen erarbeitet und Mikrokavitäten mit ZnO/ZnMgO Quantengraben Strukturen als aktive Schichten realisiert. An diesen Kavitäten konnte bei Temperaturen bis zu 150 K starke Kopplung zwischen Exzitonen und Photonen nachgewiesen werden. Bei Zimmertemperatur konnte vertikal-emittierende Lasertätigkeit im nahen ultravioletten Spektralbereich demonstriert werden. / In the framework of this thesis, the optical properties of ZnO-based heterostructures fabricated by molecular beam epitaxy have been investigated, particularly with regard to their suitability for semiconductor laser devices operating in the ultraviolet and visible spectral range. It turned out that ZnO and its ternary alloys ZnMgO and ZnCdO are extremely versatile. They allow to tune the laser emission in a wide spectral range as well as to realize various laser geometries. In detail, it was shown that the laser emission of ZnCdO/ZnO multiple quantum wells can cover a spectral range from violet to green wavelengths. Although these structures suffer from large built-in electric fields, room temperature laser action under optical pumping was demonstrated up to a wavelength of 510. The optical feedback for lasing is provided by growth imperfections on a macroscopic length scale turning these structures into random lasers. The fabrication of micro-resonators allowed to study the interplay between random and Fabry-Perot feedback. The experimental and theoretical analysis shows that random feedback generally requires a larger gain than under Fabry-Perot feedback. Further, this work demonstrates that ZnO- and ZnMgO-layers can be used to fabricate highly reflective distributed Bragg reflectors for applications in the ultraviolet and blue/green spectral range. The partly unknown dispersion curves of the index of refraction of the employed ternary alloys have been elaborated. This enabled the realization of all monolithic microcavities with ZnO/ZnMgO quantum wells as active zone. For temperatures below 150 K strong exciton-photon coupling is observed in such microcavities. At room temperature, vertical cavity surface emitting laser action in the near UV spectral range is demonstrated for appropriately designed microcavities.
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