As the semiconductor technology roadmap further extends, the development of next generation silicon systems becomes critically challenged. On the one hand, design and manufacturing closures become much more difficult due to the widening gap between the increasing integration density and the limited manufacturing capability. As a result, manufacturability issues become more and more critically challenged in the design of reliable silicon systems. On the other hand, the continuous scaling of feature size imposes critical issues on traditional interconnect materials (Cu/Low-K dielectrics) due to power, delay and bandwidth concerns. As a result, multiple classes of new materials are under research and development for future generation technologies. In this dissertation, we investigate several critical Computer-Aided Design (CAD) challenges under advanced nanolithography and nanophotonics technologies. In addressing these challenges, we propose systematic CAD methodologies and optimization techniques to assist the design of high-yield and high-performance integrated circuits (IC) with low power consumption. In Very Large Scale Integration (VLSI) CAD for nanolithography, we study the manufacturing variability under resolution enhancement techniques (RETs) and explore two important topics: (1) fast and high fidelity lithography hotspot detection; (2) generic and efficient manufacturability aware physical design. For the first topic, we propose a number of CAD optimization and integration techniques to achieve the following goals in detecting lithography hotspots: (a) high hotspot detection accuracy; (b) low false-positive rate (hotspot false-alarms); (c) good capability to trade-off between detection accuracy and false-alarms; (d) fast CPU run-time; and (e) excellent layout coverage and computation scalability as design gets more complex. For the second topic, we explore the routing stage by incorporating post-RET manufacturability models into the mathematical formulation of a detailed router to achieve: (a) significantly reduced lithography-unfriendly patterns; (b) small CPU run-time overhead; and (c) formulation generality and compatibility to all types of RETs and evoling manufacturing conditions. In VLSI CAD for nanophotonics, we focus on three topics: (1) characterization and evaluation of standard on-chip nanophotonics devices; (2) low power planar routing for on-chip opto-electrically interconnected systems; (3) power-efficient and thermal-reliable design of nanophotonics Wavelength Division Multiplexing for ultra-high bandwidth on-chip communication. With simulations and experiments, we demonstrate the critical role and effectiveness of Computer-Aided Design techniques as the semiconductor industry marches forward in the deeper sub-micron (45nm and below) domain. / text

Eine grundlegende Schwierigkeit in der Röntgenoptik liegt in der Bereitstellung geeigneter Optiken. So ist aufgrund der schwachen Wechselwirkung der Röntgenstrahlung mit Materie der Einsatz brechender Optiken nicht sinnvoll, und es wird auf alternative Konzepte wie Röntgenwellenleiter zurückgegriffen. Röntgenwellenleiter sind nicht-dispersive strahlführende Optiken, welche die Kohärenz der Röntgenstrahlung filtern und als quasi-Punktquellen fungieren. Hierbei wird der Röntgenstrahl in einer oder zwei Dimensionen räumlich beschränkt, wobei der Wellenlängenbereich der Röntgenstrahlung eine Abmessung im sub-100 nm-Bereich erfordert. In der vorliegenden Arbeit wurde ein Verfahren etabliert, mit welchem die Herstellung von Wellenleiterkanälen im sub-50 nm-Bereich in Silizium gelingt. Die Prozessierung basiert hierbei auf einem Schema aus elektronenstrahllithographischer Belichtung, Reaktivem Ionenätzen und Wafer bonding. Das Verfahren ist variabel in Bezug auf verschiedene Wellenleitergeometrien, beispielsweise gekreuzte Wellenleiter und Kanalwellenleiter, ist auf alternative Materialien übertragbar, und erlaubt die Strahlführung auf in einer Dimension gekrümmten Pfaden. Die im Rahmen der vorliegenden Arbeit hergestellten Wellenleiter wurden erfolgreich an verschiedenen Synchrotron-Messplätzen eingesetzt und ihre Fernfelder charakterisiert, und der kohärente Wellenleiterstrahl wurde in der Röntgenmikroskopie und der holographischen Bildgebung eingesetzt. Es finden sich sowohl für die Quellgröße der Wellenleiter als auch für die Auflösung in der Bildgebung Werte im sub-50 nm-Bereich.

Lithium niobate (LiNbO3) and KTiOPO4 (KTP) are ferroelectric crystals of considerable interest in different fields of optics and optoelectronics. Due to its large values of the nonlinear optical, electro-optic (EO), piezoelectric and acousto-optical coefficients, LiNbO3 is widely used for laser frequency conversion using the quasiphase matching (QPM) approach where the sign of nonlinearity has been periodically modulated by electric field poling (EFP). In the microwave and telecommunication field LiNbO3 is used for surface acoustic devices and integrated optical modulators. KTP and its isomorphs, on the other hand, exhibit slightly lower nonlinear coefficients but have much higher photorefractive damage thresholds, so that it is mainly used in the fabrication of QPM devices for both UV, IR and visible light generation and in high power applications. This thesis focus on different key issues: (1) accurate characterization of specific optical properties of LiNbO3, which are of interest in nonlinear and EO applications; (2) in-situ visualization and characterization of domain reversal by EFP in LiNbO3 and KTP crystals for a through understanding of the ferroelectric domain switching; (3) fabrication of periodic surface structures at sub-micron scale in LiNbO for photonic applications. An interferometric method is used for accurate measurement of ordinary and extraordinary refractive indices in uniaxial crystals, which is of great interest in the proper design of QPM crystals. A digital holography (DH) based method is presented here for 2D characterization of the EO properties of LiNbO , which is considerably interesting in the applications where the proper design of the EO device requires a spatially resolved information about the EO behaviour and the existing pointwise techniques are not sufficient. A DH method for novel in-situ monitoring of domain reversal by EFP in both LiNbO3 and KTP, is also presented here. The technqiue could be used as a tool for high fidelity periodic domain engineering but also provides information about domain kinetics, internal field and crystals defects. 3 3 3 Finally this thesis presents novel results concerning nanoscale periodic surface structuring of congruent LiNbO3. Holographic lithography (HL) is used for sub-micron period resist patterning and electric overpoling for surface domain reversal. Surface structures are obtained by selective etching. Moiré effect is also used in the HL to fabricate complicated structures with multiple periods. The depth compatibility with waveguide implementation allows foreseeing possible applications of these structures for Bragg gratings or innovative photonic crystal devices, exploiting the additional nonlinear and EO properties typical of LiNbO3. / QC 20100824

A novel localized surface plasmon resonance (LSPR) sensor that differentiates between background refractive index changes and surface-binding of a target analyte (e.g. a target molecule, protein, or bacterium) is presented. Standard, single channel LSPR sensors cannot differentiate these two effects as their design allows only one mode to be coupled. This novel technique uses two surface plasmon modes to simultaneously measure surface binding and solution refractive index changes. This increases the sensitivity of the sensor. Different channels or modes can be created in sensors with the introduction of gold nanospheres or gold nanorods that act as receptor mechanisms. Once immobilization was achieved on gold nanospheres, the technique was optimized to achieve the same immobilization for gold nanorods to get the expected dual mode spectrum. Intricate fabrication methods are illustrated with using chemically terminated self assembled monolayers. Then the fabrication process advances from chemically silanized nanoparticles, on to specific and systematic patterns generated with the use of Electron Beam Lithography. Comparisons are made within the different methods used, and guidelines are set to create possible room for improvement. Some methods implemented failed, but there was a lot to learn from these unsuccessful outcomes. Finally, the applications of the dual mode sensor are introduced, and current venues where the sensors can be used in chemical and biological settings are discussed.

Springtails (Collembola) are wingless arthropods that are impressively adapted to cutaneous respiration in temporarily rain-flooded habitats by non-wetting skin morphology. Recapitulating the robust and effectively liquid-repellent surface characteristics of springtail skin in engineered materials may offer exciting opportunities for demanding applications. Herein, we present a strategy for mimicking morphological surface features of springtail skin in polymer membranes produced by reverse imprint lithography. We report the fabrication of multi-level silicon masters that, in turn, serve as templates for the replication of flexible polymer membranes. We examined the robust wetting characteristics of polymer membranes by in situ plastron collapse tests and condensation tests. The mechanical stability of the polymer membranes was tested using a tribometer set-up and compared with needle-shaped pillar structures made from similar material. The fabricated membranes are flexible, free-standing, and adaptable to various substrate materials and shapes that allow for emerging applications.

Dans la majeure partie des cas, la séparation en taille de molécules d'ADN, étape primordiale lors d'un séquençage, est réalisée par électrophorèse sur gels, inadaptée à la séparation de longues molécules : la recherche de techniques de séparation alternatives est donc primordiale. Nous avons utilisé une technologie de fabrication alternative, la Lithographie par Décalage de Phase, pour fabriquer des matrices d'obstacles de 80 à 500 nm de diamètre, de formes cylindrique ou ellipsoïdale. Ces matrices nous ont permis de mener une étude des dynamiques de collision ADN-obstacle à l'échelle de la molécule individuelle, par la caractérisation des effets de l'actionnement (électrophorétique ou hydrodynamique), de la dimension et de la forme des obstacles sur ces dynamiques, impliquées dans le processus de séparation en taille. Nous montrons enfin la première séparation hydrodynamique de fragments d'ADN dans des réseaux d'obstacles nanométriques.

Thesis (Ph.D)--Industrial and Systems Engineering, Georgia Institute of Technology, 2010. / Committee Chair: Keskinocak, Pinar; Committee Member: Ergun, Ozlem; Committee Member: Goldsman, David; Committee Member: Hupert, Nathaniel; Committee Member: Swann, Julie. Part of the SMARTech Electronic Thesis and Dissertation Collection.

Metallische Nanostäbe mit einer Länge im Mikrometer-Bereich wirken als Antennen für infrarotes Licht: Indem unter Lichteinfall eine kollektive Schwingung der Leitungselektronen angeregt wird (ein sogenanntes Plasmon), wird das elektrische Feld an den Stabenden stark konzentriert. Besonders starke Feldkonzentrationen treten auf, wenn zwei Antennenarme durch eine schmale Lücke getrennt sind (Dimerantenne). Somit können die Antennen Licht-Materie-Wechselwirkungen -- wie beispielsweise die Absorption infraroten Lichtes von Molekülen -- verstärken. Dieses als oberflächenverstärkte Infrarotabsorption (SEIRA) bezeichnete Phänomen ist sehr nützlich, um Signale in der Infrarotspektroskopie zu verstärken. Diese Arbeit widmet sich der effizienten Herstellung von metallischen Nanostäben für SEIRA. Im ersten Schwerpunktthema werden Dimerantennen, die per Elektronenstrahllithographie (EBL) hergestellt wurden und eine auflösungsbegrenzte Lücke aufweisen, durch eine photochemische Reduktion von Metallsalzkomplexen nachträglich vergrößert. Dadurch verringert sich die Lückengröße und erreicht Werte deutlich unter der Auflösungsgrenze der EBL. Es wird gezeigt, dass diese photochemische Abscheidung die IR-optischen Eigenschaften der Dimerantennen durch plasmonische Kopplung entscheidend verändert. Zudem steigt die Infrarotabsorption von in der Lücke befindlichen Molekülen mit sinkender Lückengröße. Im zweiten Schwerpunktthema liegt der Fokus auf der günstigen Fabrikation einer Vielzahl von IR-Antennen in einem parallelen Prozess. Dabei werden poröse Template aus anodisiertem Aluminiumoxid (AAO) als Negativ für die herzustellenden Metallstäbe benutzt. Es wird zuerst gezeigt, dass die Poren des Templates durch die photochemische Reduktion von Goldsalzkomplexen befüllt werden können. Für eine gezielte Einstellung der Stäbchenlänge und die Generierung einer nanoskaligen Lücke wird weiterhin die elektrochemische Befüllung der Template untersucht. Die hiermit hergestellten IR-Antennen werden vereinzelt, auf ein Substrat aufgetragen und hinsichtlich ihrer Struktur und ihrer IR-optischen Eigenschaften charakterisiert. Die Vor- und Nachteile der untersuchten Herstellungsmethoden und ihre Eignung für die Fabrikation von IR-Antennen für SEIRA werden diskutiert. / Metallic nanorods with lengths in the micrometer regime act as antennas for infrared light: As incident light excites a collective oscillation of the conduction electrons (a so-called plasmon), the electric field is concentrated at the rod ends. In case two antenna arms are separated by a small gap (dimer antenna), a particularly high field concentration occurs. Thereby the antennas are capable of enhancing light-matter-interaction -- for example the absorption of infrared light by molecules. This phenomenon, termed as surface enhanced infrared absorption (SEIRA), is very useful to enhance absorption signals in infrared spectroscopy. This thesis attends to the efficient fabrication of metallic nanorods for SEIRA. The first topic in focus is the manipulation of dimer antennas fabricated by electron beam lithography (EBL), featuring a gap of resolution-limited size. By applying a photochemical reduction of metal salt complexes in solution, the dimer arms are subsequently enlarged. Thereby the gap size is reduced and reaches values clearly below the resolution limit of EBL. It is shown that the IR optical properties of dimer antennas dramatically change during photochemical metal deposition. This is due to plasmonic coupling. Additionally, the absorption of infrared light by molecules located in the gap increases with decreasing gap size. The second topic in focus is the cheap fabrication of a large number of IR antennas in a parallel process. Here, porous templates of anodized aluminum oxide (AAO) are used as a negative for the metal rods to be fabricated. Firstly, it is shown that the pores of the template can be filled by photochemical reduction of gold salt complexes. For a targeted adjustment of the rod lengths and the generation of a nanoscale gap, secondly, the electrochemical filling of acsu AAO is investigated. The IR antennas prepared by this method are extracted from the template, transferred to a substrate, and individually characterized in terms of their structure and IR optical properties. Advantages and drawbacks of the fabrication methods investigated in this work as well as their applicability to the fabrication of IR antennas for SEIRA are being discussed.

Thesis(MScEng)--Stellenbosch University, 2012. / ENGLISH ABSTRACT: The SQUID-NMR technique has been increasingly recommended by many researchers as holding a lot of potential, and it is believed it will become an invaluable tool for non-destructive evaluation in the future. Most of its potential is yet to be exploited. Non-destructive quality control of food products is one of the applications where such a system is being tried. Much of the progress that has been made in improving such a system to the present degree of user friendliness and cost effectiveness shows that, with more effort, it would be possible to implement the technology for on-line sorting, and possibly to reduce it down to hand-held devices. The goal was to investigate the feasibility of the internal fruit quality measurements using the NMR technique, and to develop a SQUID system suitable for SQUID-NMR application, intended for a later integration in a full SQUID-NMR system. A working dc SQUID was manufactured on an YBCO (Y Ba2Cu3O7􀀀 ) thin film deposited on a 10 mm x 10 mm MgO substrate. The SQUID was made of microbridge Josephson junctions, patterned by using the double resist laser lithography method, implemented during the course of this manufacturing process. The test of the SQUID showed a non-hysteretic current-voltage characteristic. Under the action of bringing a magnet closer to the SQUID under test, and then retracting it, the modulation of the I-V curve was observed. The critical current of the SQUID was 20 A and the resistance was 5.5 A series of experiments were performed on destructive measurements of the sugar content in table grapes using NMR, in order to evaluate the feasibility of this technique. The total sugars(TSS) measurements of the same samples were carried out by refractometry, chosen as a conventional method for validation. The NMR measurements were evaluated to be 5.4% precise and have an accuracy of 9.3% relative to the refractometry measurements. A further series of experiments were carried out on a high-Tc SQUID-NMR system. A high correlation coefficient (0.85) of the increasing values of the T1 and T2 relaxation times to the decreasing concentration of sugar (sucrose) in water was obtained. Non-destructive measurements T1 and T2 in table grapes suggested a possible prediction of sugar content in table grapes from the values of T1 or T2. This technique also presented many advantages compared to the conventional high field NMR technique, such as the fast measurements that do not require spectral processing, the ease of sample preparation, and its non-destructive nature. / AFRIKAANSE OPSOMMING: Die SQUID-NMR tegniek word al hoe meer aanbeveel deur navorsers oor die groot potensiaal, en dit beloof om in die toekoms van onskatbare waarde te wees in nie vernietigende evaluering. Die potensiaal moet grotendeels nog ontgin word, en die nie vernietigende kwaliteitsbeheer van voedselprodukte is een van die toepassings wat hier getoets word. Die vooruitgang tot dusver om die stelsel te verbeter wat die gebruikersvriendelikheid en koste-effektiwiteit betref, toon dat met effens meer moeite dit moontlik sal wees om die tegnologie aan te pas vir lynsortering van vrugte, en om dit dalk ook as handtoestel beskikbaar te stel. Die vooruitgang tot dusver om die stelsel te verbeter wat die gebruikersvriendelikheid en koste-effektiwiteit betref, toon dat met effens meer moeite dit moontlik sal wees om die tegnologie aan te pas vir lynsortering van vrugte, en om dit dalk ook as handtoestel beskikbaar te stel. Die doel is om die uitvoerbaarheid van interne vrugtekwaliteit metings deur hierdie tegniek te ondersoek en om ’n SQUID stelsel te ontwikkel wat gepas is vir SQUIDNMR toepassing, met die doel om dit later in ’n volledige SQUID-NMR stelsel te kan integreer. ’n Werkende GS-SQUID is vervaardig op ’n YBCO dunfilm wat op ’n 10 mm x 10 mm MgO substraat gedeponeer is. Die SQUID is van mikro-brug Josephson aansluitings/ voegvlakke, waarop in die loop van die vervaardigingsproses ’n patroon m et dubbelweerstand laser litografie neergelê is. Toets van die SQUID het ’n niehisterese stroom-spanning as kenmerkend getoon. Die nader bring en terugtrekking van ’n magneet het gelei tot waarneming van die modulasie van die I-V kurwe. Die kritieke stroom van die SQUID was 20 A en die weerstand was 5.5 ohm. ’n Reeks eksperimente is uitgevoer oor vernietigende metings van die suikerinhoud van tafeldruiwe met gebruik van NMR, om die gangbaarheid van hierdie tegniek te evalueer. Totale suikers (TSS) metings van dieselfde monsters is uitgevoer deur refraktometrie, wat gekies is as gebruiklike metode vir geldigheidsbepaling. Die NMR metings is as 5.4% presies/noukeurig evalueer, en met ’n akkuraatheid van 9.3% teenoor die refraktometrie metingsyfers. ’n Verdere reeks eksperimente is uitgevoer op ’n hoë-Tc SQID-NMR stelsel. ’n Hoë korrelasiekoëffisiënt van 0.85 van die toenemende waardes van T1 en T2 ontspantye teenoor die afname in konsentrasie van sukrose in water is waargeneem. Nie-vernietigende metings van T1 eb T2 in tafeldruiwe het gelei tot die moontlikheid van gebruik van hierdie tegniek om suikerinhoud van tafeldruiwe te voorspel. Die tegniek het ook baie voordele getoon in teenstelling met die gebruiklike hoëveld NMR tegniek, onder andere dat hierdie metings vinniger is, nie verdere verwerking van die spektrum benodig nie, die maklike voorbereiding van die monsters en die nie-vernietigende aard van die proses.

Durant les dernières décennies, de plus en plus de types de cellules se sont révélées capables de sonder leur environnement mécanique par l'application de forces. Ce phénomène appelé «Mecanosensing» est lié à l'adhésion et la mécanique cellulaire, et est souvent étudié grâce à l'interaction des cellules avec des substrats artificiels. Dans des études distinctes, des surfaces chimiquement structurées avec une répartition des ligands spécifiques ont montré une forte influence sur l’adhésion et la mécanique cellulaire. Cependant, la relation entre les deux phénomènes n'a pas été beaucoup explorée, en partie parce que la fonctionnalisation de substrats mous s’est révélée être un défi technique.Pour résoudre ce problème, nous avons développé une technique simple et rentable nommée «reverse contact printing», afin de fabriquer des plots de protéines sub-microniques sur un élastomère d'élasticité contrôlée, le polydiméthylsiloxane (PDMS). Mon travail de thèse a focalisé sur la standardisation et la compréhension du procédé de transfert. A l’aide de mesures de forces réalisées par AFM nous avons mesuré l’élasticité du PDMS, ainsi que les forces de cohésion et d'adhésion effectives impliquées dans le processus. Nous avons également étudié l'adhésion cellulaire avec des lymphocytes-T sur des surfaces de PDMS d'élasticité variable. Nous avons montré que contrairement à la plupart des autres types de cellules, les cellules-T s'étalent davantage sur substrat mou que sur dur. Finalement nous avons réalisé des expériences pilotes d'adhésion cellulaire sur PDMS structuré. / In the past decade, more and more types of cells have been shown to be capable of probing the mechanics of their environment by application of forces. The stiffness of the environment strongly influences a host of cellular parameters including cell adhesion and mechanics. In separate studies, the spatial distribution of ligands, modulated by chemical patterning of a target surface, has been shown to strongly influence cell adhesion and mechanics. However, the cross-talk between the two phenomena has not been much explored, partly because patterned functionalization of soft substrates is an engineering challenge. To address this issue, we have developed a simple and technique named "reverse contact printing" for fabrication of nanometric protein patches on PDMS (polydimethylsiloxane) elastomer. My PhD work consisted of deciphering the molecular mechanisms that underlie this technique. We realized that the rate of transfer crucially depended on the molecular groups on the protein and on the nature of the PDMS surface. We used atomic force microscopy (AFM) force measurements to measure PDMS elasticity as well as protein-substrate interactions to understand the molecular mechanism governing the transfer. We have identified that a successful reverse transfer is facilitated by the grafting of appropriate chemical groups on the protein, and depends on the PDMS surface treatment and elasticity. We also studied adhesion and mechanics of T lymphocytes on PDMS. We found that surprisingly T lymphocytes spread more on softer than on harder PDMS. In on-going pilot experiments, cells on patterned soft PDMS seem to exhibit different behavior as compared to cells on patterned glass.