MEMS (Micro-Electro-Mechanical Systems) é um microsistema invasivo, intermediador e interativo que se desenvolve de forma inteligente, versátil e eficiente. Entretanto, a interatividade, característica que o torna altamente atrativo e suas qualidades de leveza, invisibilidade, economia quanto a consumo de energia, robustez e alta confiabilidade são foco de investigação. Através da obtenção dos parâmetros característicos muitos desses aspectos podem ser otimizados. Conseqüentemente, este trabalho se propõe obter os parâmetros característicos necessários ao modelo matemático de atuadores MEMS, baseados em deformação elástica e dinâmica combdrive, de forma a descrever com precisão o comportamento linear destes em nível de sistema. Os parâmetros característicos de MEMS podem ser extraídos no próprio simulador, ou identificados através da manipulação dos dados dos sinais de entrada e saída obtidos na execução de testes modais sobre o protótipo. Quando a identificação é determinística, utiliza sinais de excitação que obedecem a uma boa relação sinal-ruído (SNR-Signal-Noise Rate). Quando a identificação é estocástica utiliza sinais de excitação misturados com ruído. Essas duas formas de identificação podem ser interpretadas como os dois extremos de identificação. A rigor, qualquer procedimento que não esteja em nenhum desses extremos pode ser denominado de identificação “caixa-cinza”. Dessa forma, a proposta deste trabalho investigativo consiste em utilizar a identificação “caixa cinza” para obter os parâmetros característicos dos atuadores eletromecânicos MEMS combinando as vantagens dos procedimentos determinísticos e estocásticos. Sob este propósito, foi feita revisão das propriedades da matéria, conceituação de atuadores, compreensão da visão bottom-up e, finalmente, estudo de modelos estocásticos com entradas exógenas ARX (Autoregressive with Exogenous Inputs) e uso de estimadores recursivos, Mínimos Quadrado e Variável Instrumental. A comparação dos resultados do modelo determinístico produzido através de FEM/BEM permite testar o desempenho entre dois modelos de índoles diferentes. Os resultados obtidos após a coleta de dados, a escolha da representação matemática, a determinação da estrutura do modelo, a estimação dos parâmetros e a validação do modelo das três tipologias de atuadores desenvolvidos: pontes simples, ponte dupla e dobradiça dupla permitem identificar os parâmetros característicos com erro quadrático médio menor a 1% e validar esses parâmetros num período não maior a 0,5s. Os resultados se mostram altamente satisfatórios, tornando este trabalho uma contribuição científica à síntese de MEMS em nível de sistemas. / MEMS (Micro Electro-Mechanical Systems) is an invasive, intermediator and interactive small size system that develops in an intelligent, versatile and efficient way. However, the interactivity, feature that makes the system highly attractive and its qualities of lightness, invisibility, economy with regard to power consumption, robustness and high reliability are the focus of research. By obtaining the characteristic parameters many of these aspects can be optimized. Therefore, this study proposes to obtain the characteristic parameters necessary for the mathematical model for MEMS actuators, based on elastic deformation and dynamic comb-drive in order to accurately describe the linear behavior in level system. The characteristic parameters of MEMS can be extracted in the own simulator or identified through the manipulation of input and output data signals obtained in the execution of modal tests on the prototype. When the identification is deterministic, it uses the excitation signals that follow a good signal noise rate (SNR). When the identification is stochastic it uses excitation signals mixed with noise. These two forms of identification can be interpreted as the two extremes of the identification. Strictly speaking, any procedure that is not in any of these extremes may be called the "gray-box" identification. Thus, the propose of this research work consists of using the “gray-box” identification to obtain the characteristic parameters of the MEMS electro-mechanical actuators combining the advantages of the deterministic and stochastic procedures. Under this purpose, it was made revision of the matter features, conceptualization of the actuators, comprehension of the bottom-up vision and, finally, study of the stochastic models with autoregressive exogenous inputs (ARX) and the use of recursive estimators, Least Square and Instrumental Variable. The comparison of results of the deterministic model generated by FEM / BEM, allows testing the performance between two models of different kinds. The results obtained after the data collection, the choice of mathematical representation, the determination of the structure of the model, the estimation of the parameters and validation of the model of three actuators topologies developed (simple bridges, double bridge and double hinge) that permit to identify the parameters with a average quadratic error minor than 1% and to validate these parameters in a period not more than 0.5s. The results show highly satisfactory, becoming this work a scientific contribution to MEMS synthesis at system levels.

Orientador: Euripedes Guilherme de Oliveira Nobrega / Dissertação (mestrado) - Universidade Estadual de Campinas, Faculdade de Engenharia Mecanica / Made available in DSpace on 2018-08-06T12:28:24Z (GMT). No. of bitstreams: 1 Costa_JulianoNunes_M.pdf: 1943364 bytes, checksum: 37bfdc87a8b3b47e435c8aadfe91806a (MD5) Previous issue date: 2006 / Resumo: Hoje em dia, os microssistemas eletromecânicos (MEMS) constituem uma das áreas mais promissoras e de rápido crescimento entre as novas tecnologias. Uma área de destaque na utilização de MEMS é a microfluídica, onde diversos tipos de equipamentos miniaturizados são necessários. As microbombas têm um papel fundamental neste tipo de microdispositivos, devido a sua função de prover quantidades muito pequenas de fluidos de maneira segura e uniforme. O presente trabalho apresenta o processo de desenvolvimento de uma microbomba de diafragma oscilante sem válvulas e com atuação pneumática. Para se construir a microbomba sem válvulas, primeiramente foi feito um estudo sobre os elementos bocaljdifusor, que representam na microbomba o papel das válvulas. Com o objetivo de se analisar o comportamento da microbomba, foi feita uma simulação numérica utilizando-se a analogia por circuitos elétricos equivalentes, reconhecidamente um método simples e eficiente' de simulação de sistemas multidomínios, onde a grande maioria dos microdispositivos podem ser classificados. Por fim, foram projetados e montados protótipos da microbomba utilizahdo-se a tecnologia de microfabricação Litografia Profunda em polímeros flexográficos, onde se faz o uso de radiação ultravioleta. Tal opção se deve a que esta é uma tecnologia de baixo custo e de fácil utilização. Foi feito em seguida o levantamento de desempenho da microbomba, onde vários testes foram realizados para se conhecer a relação de pressão versus vazão / Abstract: Nowadays, Micro-Electromechanical systems (MEMS) constitute one of the most promising and fast expanding fields among the new technologies. Microfiuidic systems are a noteworthy sub-area of MEMS, demanding several types of microdevices to be developed. Micropumps have a fundamental role in thee systems, due to the need of supplying minimal amounts of fiuid in a guaranteed and uniform way. This work presents the process of development of. prototypes of aval veless micropump based upon reciprocating diaphragm and pneumatic actuation. To construct the valveless micropump, firstly it was made a study on the nozzlej diffuser elements, which represent in these micropumps the valve function. Aiming to analyse the behavior of the micropump, a numeric simulation was studied using electrical equivalent networks, known as a simple and eflicient method of simulation of multidomain systems, a classification most MEMS follow. Finally, it was designed and constructed prototypes of the micropumps using the Deep Lithography in fiexographics polymers micro-manufacture technology. This option is due to the low cost characteristic of this technology and also because it is very easy to learn how to produce the prototypes. ln the sequence, the nerformance of the micropump was studied through several experimental tests in order to know its pressure and fiow behavior / Mestrado / Mecanica dos Sólidos e Projeto Mecanico / Mestre em Engenharia Mecânica

Neste trabalho foi desenvolvido um estudo sistemático das propriedades estruturais, mecânicas e ópticas de filmes de carbeto de silício amorfo hidrogenado (a-Si1-xCx:H) produzidos pela técnica de deposição química a vapor assistida por plasma (PECVD) a baixas temperaturas (320°C), utilizando silana (SiH4) e metano (CH4) como gases precursores do silício e carbono, com a finalidade de avaliar sua aplicabilidade em processos de microfabricação. Foram depositadas duas séries de filmes de a-Si1-xCx:H, com e sem diluição de hidrogênio da mistura gasosa, variando alguns parâmetros, como potência de RF, concentração de metano e fluxo de silana. Os filmes depositados com a mistura gasosa diluída em hidrogênio apresentaram valores maiores de módulo de elasticidade, dureza, gap óptico e índice de refração, comparados com os filmes depositados sem a adição de hidrogênio; no entanto esses filmes apresentaram também valores maiores de stress residual, ocasionando deformações e em alguns casos a quebra das microestruturas fabricadas. No caso das amostras depositados sem a adição de hidrogênio na mistura gasosa, os filmes com conteúdo de carbono maior que 45% depositados com baixa densidade de potência (50 mW.cm-2) apresentaram baixos valores de stress residual compressivo (menores que 60 MPa) e, as microestruturas fabricadas com eles mostraram que o material possui uma superfície livre de defeitos e uma excelente aderência ao substrato, mostrando a viabilidade de poder utilizá-lo como material estrutural e de mascaramento em processos de microfabricação. Além disso, esses filmes são transparentes para comprimentos de onda acima de 600 nm na região visível do espectro eletromagnético, apresentando-o como um material promissório para a fabricação de guias de onda. Finalmente, com o incremento da potência de RF para 100 W na deposição do filme quase estequiométrico com a mistura gasosa não diluída em hidrogênio, conseguiu-se duplicar a taxa de deposição para aproximadamente 12 nm/min, incorporando uma maior quantidade de carbono (~57%), porém também aumento o valor do stress residual compressivo para ~267 MPa. No entanto, as estruturas suspensas fabricadas com este material não apresentaram deformações notáveis. / In this work a study of structural, mechanical and optical properties of hydrogenated amorphous silicon carbide (a-Si1-xCx:H) films, obtained by plasma enhanced chemical vapor deposition (PECVD) at low temperatures (320°C), using silane (SiH4) and methane (CH4) as a gaseous precursors of silicon and carbon, respectively is performed, intending to assess their suitability in microfabrication processes. Two series of a-Si1-xCx:H films were deposited, with and without hydrogen dilution of the gaseous mixture, varying parameters, such as RF power, methane concentration and silane flow. The films deposited with hydrogen diluted gaseous mixture showed higher values of elastic modulus, hardness, optical gap and refractive index, compared with films produced without hydrogen dilution; however these films present higher values of compressive residual stress, causing deformations and in some cases cracks in the microstructures utilizing these films as structural material. In the case of the films deposited without hydrogen dilution of the gaseous mixture, those with carbon contents higher than 45% deposited at low power densities (50 mW.cm-2) presented lower values of compressive residual stress (lower than 60 MPa), and the microstructures fabricated with these materials do not show defects in the surface and have a good adherence to the substrate, demonstrating the feasibility of using these materials as structural and masking materials in microfabrication processes. Moreover, these samples are transparent to wavelengths larger than 600 nm in the visible range of the spectrum, making it suitable to the fabrication of waveguides. Finally, with the increase in the RF power to 100 W in the deposition process without hydrogen dilution a sample close to stoichiometry presented an increase in the deposition rate to approximately 12 nm/min and in the carbon content (~57%); however the compressive residual stress also increased. In spite of that, the microstructures fabricated with this material do not show notable deformations.

O presente trabalho teve como foco o desenvolvimento de um software para a simulação de processos de microfabricação em substrato e de microfabricação em superfície baseado em autômatos celulares, o simMEMS. Além disso, visando a futura incorporação de ferramentas para análise das estruturas geradas pelo programa, um módulo com funcionalidades básicas para a análise mecânica de estruturas também foi desenvolvido. No que tange à microfabricação em superfície, o software desenvolvido permite simular a corrosão anisotrópica úmida do Si em KOH e deep reactive ion etching (DRIE). O simulador de corrosão úmida utiliza um autômato celular conhecido como BCA. O simulador de DRIE usa um autômato próprio. Para a simulação dos processos de microfabricação em superfície o software fornece quatro processos: deposição de filmes, corrosão de filmes, fotolitografia e planarização. Para corrosão e deposição de filmes, diversos autômatos celulares da literatura foram analisados e os resultados dessas análises é aqui apresentado. Todos os simuladores, tanto de microfabricação em superfície como em substrato, podem ser utilizados em conjunto. Isso torna o software bastante útil e capaz de simular a fabricação de um grande número de dispositivos. / The main goal of this project is the development of a software capable of simulating both surface and bulk micromachining based on a cellular automata approach. This software has been called simMEMS. In order to enable future versions of the software to also be able to analyze the structures created by the software, a module capable of running a mechanical analysis through the finite element method is also developed. simMEMS allows the user to simulate two bulk micromachining processes: wet anisotropic KOH etching and deep reactive ion etching DRIE. The wet etching simulator uses a cellular automaton known as BCA. The DRIE simulator uses an automaton developed during this project. The surface micromachining simulator allows the user to simulate four types of processes: photolithography, film deposition, film etching and substrate planarization. Several automata for the deposition and etching of films are studied and the results of this study are presented here. All processes, be they for surface or bulk micromachining, can be used on the same substrate to simulate the entire fabrication process for a large array of devices. This makes simMEMS a very useful software.

Context. Smartphones contain advanced sensors called microelectromechanical systems(MEMS). By connecting a smartphone to a computer these sensors can be used to test new interaction techniques for games. Objective. This study aims to investigate an interaction technique implemented with a gyroscope that utilises the leaning of a user’s torso and compare it in terms of precision and enjoyment to using a joystick. Method. The custom interaction technique was implemented by using the gyroscope of a Samsung Galaxy s6 Edge and attaching it to to the torso of the user. The joystick technique was implementation by using the left joystick of an Xbox One controller. A user study was conducted and 19 people participated by playing a custom-made obstacle course game that tested the precision of the interaction techniques. After testing each technique participants took part in a survey consisting of questions regarding their enjoyment using the technique. Result. The results showed that the leaning technique was not as precise as the joystick implementation. The participants found the learning technique to be more fun to use and also more immersive compared to the joystick implementation. The leaning technique was however also more uncomfortable and difficult to use, and players felt less competent in their ability to control the player character with it. Conclusion. The performance difference might have been due to the lack of familiarity with the leaning technique compared to the joystick implementation. The leaning technique was more difficult to use and more uncomfortable than the joystick method. However, the leaning technique was also more fun to use and more immersive. This offers up the opportunity to keep exploring possibilities with this technique.

Kyoto University (京都大学) / 0048 / 新制・課程博士 / 博士(工学) / 甲第16400号 / 工博第3481号 / 新制||工||1526(附属図書館) / 29031 / 京都大学大学院工学研究科電気工学専攻 / (主査)教授 引原 隆士, 教授 田畑 修, 准教授 山田 啓文 / 学位規則第4条第1項該当

Ce travail s'attaque à la mise en évidence expérimentale d'effets quantiques dans le mouvement d'un résonateur mécanique macroscopique avec une masse effective de 33 microgrammes, soit 3 ordres de grandeur au-dessus de celle du système mécanique le plus massif observé à ce jour dans son état quantique fondamental. Nous avons conçu, fabriqué et fait fonctionner un résonateur optomécanique à 3,6 MHz avec une finesse optique de 100.000 et un facteur de qualité mécanique proche de 100 millions, inséré dans l'environnement à 100 mK d'un réfrigérateur à dilution. Nous présentons un montage optique complètement automatisé incluant une cavité de filtrage, une détection homodyne et plusieurs asservissements, implémentés dans un FPGA avec le programme PyRPL développé spécifiquement pour cette expérience. Nous avons refroidi par laser le mode de compression de notre résonateur mécanique jusqu'à un nombre moyen d'occupation thermique de 20 phonons. Le refroidissement est limité par l'apparition d'une instabilité optomécanique de plusieurs modes des suspensions, au-dessous de 100 kHz. Un filtre digital particulier pour supprimer cette instabilité nous a permis d'atteindre le régime où l'action en retour quantique contribue à hauteur d'environ 30 % au bruit de force total de l'oscillateur mécanique. Pour atteindre des contributions encore plus importantes à l'avenir, nous présentons la conception d'un miroir d'entrée à cristal phononique, caractérisé par un plancher de bruit de mouvement Brownien réduit. / In this work, we attempt the experimental demonstration of quantum effects in the motion of a macroscopic mechanical resonator with a mass of 33 micrograms, about 3 orders of magnitude above the mass of the heaviest system demonstrated so far in the quantum ground state. We have designed, fabricated, and operated an optomechanical resonator at 3.6 MHz, with an optical finesse of 100,000 and a mechanical quality factor near 100 million, embedded in the 100 mK environment of a dilution refrigerator. We present a fully automatized optical measurement setup, including a filter cavity, a homodyne detector, and various feedback controllers implemented in an FPGA with the custom-developed software PyRPL. We have laser-cooled the compression mode of our mechanical resonator to a mean thermal occupation number of 20 phonons. Cooling is limited by the onset of an optomechanical instability of suspension modes with frequencies below 100 kHz. A custom-tailored digital filter to suppress this instability has enabled us to reach a regime where quantum backaction amounts to about 30 % of the total force noise on the mechanical resonator. For even higher ratios in the future, we present the design of a phononic-crystal input mirror with a reduced Brownian motion displacement noise floor.

Miniaturized, self-sufficient bioelectronics powered by unconventional micropower may lead to a new generation of implantable, wireless, minimally invasive medical devices, such as pacemakers, defibrillators, drug-delivering pumps, sensor transmitters, and neurostimulators. Studies have shown that micro-enzymatic biofuel cells (EBFCs) are among the most intuitive candidates for in vivo micropower. In the fisrt part of this thesis, the prototype design of an EBFC chip, having 3D intedigitated microelectrode arrays was proposed to obtain an optimum design of 3D microelectrode arrays for carbon microelectromechanical systems (C-MEMS) based EBFCs. A detailed modeling solving partial differential equations (PDEs) by finite element techniques has been developed on the effect of 1) dimensions of microelectrodes, 2) spatial arrangement of 3D microelectrode arrays, 3) geometry of microelectrode on the EBFC performance based on COMSOL Multiphysics. In the second part of this thesis, in order to investigate the performance of an EBFC, behavior of an EBFC chip performance inside an artery has been studied. COMSOL Multiphysics software has also been applied to analyze mass transport for different orientations of an EBFC chip inside a blood artery. Two orientations: horizontal position (HP) and vertical position (VP) have been analyzed. The third part of this thesis has been focused on experimental work towards high performance EBFC. This work has integrated graphene/enzyme onto three-dimensional (3D) micropillar arrays in order to obtain efficient enzyme immobilization, enhanced enzyme loading and facilitate direct electron transfer. The developed 3D graphene/enzyme network based EBFC generated a maximum power density of 136.3 μWcm-2 at 0.59 V, which is almost 7 times of the maximum power density of the bare 3D carbon micropillar arrays based EBFC. To further improve the EBFC performance, reduced graphene oxide (rGO)/carbon nanotubes (CNTs) has been integrated onto 3D mciropillar arrays to further increase EBFC performance in the fourth part of this thesisThe developed rGO/CNTs based EBFC generated twice the maximum power density of rGO based EBFC. Through a comparison of experimental and theoretical results, the cell performance efficiency is noted to be 67%.

This thesis presents the design of an inertial measurement data acquisition system intended for use in sailboats. The variables of interest are 3-axis acceleration, 3-axis rotation, GPS position/velocity, magnetic compass bearing and wind speed/direction. The design focus is on low-cost micro-electromechanical systems (MEMS) based technology and demonstrating the validity of these technologies in a scientific application. A prototype is constructed and submitted to a series of tests to demonstrate functionality and soundness of the design. These tests range from bench tests to full scale application. Contributions of this thesis include the novel application of inertial measurement unit (IMU) technology to a sailboat racing application, the integration of all instrumentation, creative ruggedised packaging and emphasising the use of low-cost commercial off-the-shelf (COTS) technology.

La lutte contre le terrorisme et le trafic de narcotiques sont devenus des enjeux sociétaux majeurs. Par exemple, l’identification rapide des colis piégés est aujourd’hui indispensable dans les lieux publics, motivant le développement de systèmes de détection de types nez électroniques. Ce travail de recherche, porte sur l’étude des transducteurs MEMS de type microleviers et SAW (surface acoustic wave), choisis parmi les différentes familles de biocapteurs existants pour leurs nombreux avantages tels que leur grande sensibilité à détecter tous types de molécules. Cette thèse est axée sur l’étude de ces deux types de MEMS en diamant combinés à des biorécepteurs olfactifs spécifiquement impliqués dans la perception et la reconnaissance des odeurs. Les propriétés physiques et chimiques exceptionnelles du diamant déposé sur leur surface ont permis le développement de détecteurs à la fois miniaturisés, robustes et sensibles. La chimie unique du diamant a permis en particulier d’immobiliser sur la surface de ces transducteurs différents types de biorécepteurs de type OBP (Odorant Binding Protein), MUP (Major Urinary Protein) et OR (récepteurs olfactifs) comme couche sensible. L’immobilisation de ces LBP sur les MEMS en diamant a été caractérisée par diverses techniques telles que la spectroscopie électrochimique d’impédance (EIS), la spectroscopie de fluorescence ou encore la spectroscopie XPS. Les performances des capteurs ont été suivies par vibrométrie laser dans le cas des microleviers et à l’aide d’un système d’acquisition commercial dans le cas des SAW, en mesurant les déplacements de fréquence de résonance lors d’exposition aux composés cibles. Une comparaison entre les différents types de LBP provenant de différentes espèces (mammifères, insectes) a été effectuée en termes de sensibilité lors d’exposition à des drogues et des composés explosifs. Les limites de détections (LOD) obtenues dans nos conditions de mesures se situent dans la gamme d’1µg jusqu’à 35 ng par exemple pour l’héroïne, en fonction des espèces cibles testées. La LOD du TNT est d’environ 100 ng. / Over the last decade, the need for resources devoted to counter terrorism as well as narcotic trafficking has grown. Thus the effective fight against those scourges requires the development of advanced physical and chemical detection systems and sensor systems such as electronic noses able to detect drugs and explosives compounds. In this context, ligand binding proteins (LBP) combined to diamond MEMS such as resonant microcantilevers and surface acoustic wave (SAW) sensors are foreseen as highly promising transducers for the design of label free biosensors in particular for the detection of small organic molecules. LBP are small proteins involved in the perception and recognition of odorant molecules. In this study, OBP (Odorant Binding Protein), MUP (Major Urinary Protein) and OR (olfactory receptor) were used to bind selected analytes. The carbon nature of diamond offers wide opportunities for stable grafting of such bioreceptors. The performances of these transducers present a real improvement in terms of speed, miniaturization and sensitivity. Immobilization of LBP on diamond transducers was investigated using fluorescence methods, electrical impedance spectroscopy (EIS) and X-Ray photoelectron spectroscopy (XPS). The sensing performances of the resulting biosensors were assessed by monitoring the frequency shift in real time upon exposure to the target molecules. We compared different kind of LBP, coming from vertebrates, insects, mutant or wild type in terms of sensitivity, selectivity and for their capability to bind odors, explosive and drug compounds. Within our experimental conditions, the detection of a wide variety of drugs and explosives was possible in the concentration range typically from 1 µg to e.g. 35 ng in the case of heroin, depending on the test substances. The limit of detection of TNT compound is about 100 ng.