Recent advances in molecular biology and nanotechnology have enabled scientists to study biological systems at molecular and atomic scales. This level of sophistication demands for new technologies to emerge for providing the necessary sensing tools and equipment. Recent studies have shown that terahertz technology can provide revolutionary sensing techniques for organic and non-organic materials with unprecedented accuracy and sensitivity. This is due to the fact that most of the macromolecules have vibrational and/or rotational resonance signatures in terahertz range. To further increase the sensitivity, terahertz radiation is generated and interacted with the bio-sample on a miniaturized test site or the so-called biochip. From the view point of generation and manipulation of terahertz radiation, the biochip is designed based on the same rules as in high frequency electronic chips or integrated circuits (IC). By increasing the frequency toward terahertz range, the conventional IC design methodologies and analysis tools fail to perform accurately. Therefore, development of new design methodologies and analysis tools is of paramount importance for future terahertz integrated circuits (TIC) in general and terahertz biochips in particular. In this thesis, several advancements are made in design methodology, analysis tool and architecture of terahertz and millimeter-wave integrated circuits when used as a biochip. A global and geometry independent approach for design and analysis of the travelling-wave terahertz photomixer sources, as the core component in a TIC, is discussed in details. Three solvers based on photonic, semiconductor and electromagnetic theories are developed and combined as a unified analysis tool. Using the developed terahertz photomixer source, a resonance-based biochip structure is proposed, and its operation principle, based on resonance perturbation method, is explained. A planar metallic resonator acting as a sample holder and transducer is designed, and its performance in terms of sensitivity and selectivity is studied through simulations. The concept of surface impedance for electromagnetic modeling of DNA self-assembled monolayer on a metal surface is proposed, and its effectiveness is discussed based on the available data in the literature. To overcome the loss challenge, Whispering Gallery Mode (WGM) dielectric resonators with high Q factor are studied as an alternative for metallic resonator. The metallic loss becomes very high at terahertz frequencies, and as a result of that planar metallic resonators do not exhibit high Q factor. Reduced Q factor results in a low sensitivity for any sensor using such resonators. Theoretical models for axially and radially layered dielectric resonators acting on WGM are presented, and the analytical results are compared with the measured data. Excitation of WGM through dielectric waveguide is proposed, and the critical coupling condition is explained through analytical formulation. The possibility of selecting one resonance among many for sensing application is also studied both theoretically and experimentally. A high sensitivity sensor based on WGM resonance in mm-wave and terahertz is proposed, and its sensitivity is studied in details. The performance of the proposed sensor is tested for sensing drug tablets and also liquid droplets through various measurements in mm-wave range. The comprehensive sensitivity analysis shows the ability of the proposed sensor to detect small changes in the order of 10−4 in the sample dielectric constant. The results of various experiments carried out on drug tablets are reported to demonstrate the potential multifunctional capabilities of the sensor in moisture sensing, counterfeit drug detection, and contamination screening. The measurement and simulation results obtained in mm-wave hold promise for WGM to be used for sensing biological solutions in terahertz range with very high sensitivity.

Recent advances in molecular biology and nanotechnology have enabled scientists to study biological systems at molecular and atomic scales. This level of sophistication demands for new technologies to emerge for providing the necessary sensing tools and equipment. Recent studies have shown that terahertz technology can provide revolutionary sensing techniques for organic and non-organic materials with unprecedented accuracy and sensitivity. This is due to the fact that most of the macromolecules have vibrational and/or rotational resonance signatures in terahertz range. To further increase the sensitivity, terahertz radiation is generated and interacted with the bio-sample on a miniaturized test site or the so-called biochip. From the view point of generation and manipulation of terahertz radiation, the biochip is designed based on the same rules as in high frequency electronic chips or integrated circuits (IC). By increasing the frequency toward terahertz range, the conventional IC design methodologies and analysis tools fail to perform accurately. Therefore, development of new design methodologies and analysis tools is of paramount importance for future terahertz integrated circuits (TIC) in general and terahertz biochips in particular. In this thesis, several advancements are made in design methodology, analysis tool and architecture of terahertz and millimeter-wave integrated circuits when used as a biochip. A global and geometry independent approach for design and analysis of the travelling-wave terahertz photomixer sources, as the core component in a TIC, is discussed in details. Three solvers based on photonic, semiconductor and electromagnetic theories are developed and combined as a unified analysis tool. Using the developed terahertz photomixer source, a resonance-based biochip structure is proposed, and its operation principle, based on resonance perturbation method, is explained. A planar metallic resonator acting as a sample holder and transducer is designed, and its performance in terms of sensitivity and selectivity is studied through simulations. The concept of surface impedance for electromagnetic modeling of DNA self-assembled monolayer on a metal surface is proposed, and its effectiveness is discussed based on the available data in the literature. To overcome the loss challenge, Whispering Gallery Mode (WGM) dielectric resonators with high Q factor are studied as an alternative for metallic resonator. The metallic loss becomes very high at terahertz frequencies, and as a result of that planar metallic resonators do not exhibit high Q factor. Reduced Q factor results in a low sensitivity for any sensor using such resonators. Theoretical models for axially and radially layered dielectric resonators acting on WGM are presented, and the analytical results are compared with the measured data. Excitation of WGM through dielectric waveguide is proposed, and the critical coupling condition is explained through analytical formulation. The possibility of selecting one resonance among many for sensing application is also studied both theoretically and experimentally. A high sensitivity sensor based on WGM resonance in mm-wave and terahertz is proposed, and its sensitivity is studied in details. The performance of the proposed sensor is tested for sensing drug tablets and also liquid droplets through various measurements in mm-wave range. The comprehensive sensitivity analysis shows the ability of the proposed sensor to detect small changes in the order of 10−4 in the sample dielectric constant. The results of various experiments carried out on drug tablets are reported to demonstrate the potential multifunctional capabilities of the sensor in moisture sensing, counterfeit drug detection, and contamination screening. The measurement and simulation results obtained in mm-wave hold promise for WGM to be used for sensing biological solutions in terahertz range with very high sensitivity.

Silicon alternatives to quartz crystal based oscillators to electronic system clocking are explored. A study of clocking requirements reveals widely different specifications for different applications. Traditional CMOS oscillator-based solutions are optimized for low-cost fully integrated micro-controller clock applications. The frequency variability of these clock generators is studied and techniques to compensate for this variability are proposed. The efficacy of these techniques in reducing variability is proven theoretically and experimentally. MEMS-resonator based oscillators, due to their exceptional quality factors, are identified as suitable integrated replacements to quartz based oscillators for higher accuracy applications such as data converter clocks. The frequency variation in these oscillators is identified and techniques to minimize the same are proposed and demonstrated. The sources of short-term variation (phase noise) in these oscillators are discussed and an inclusive theory of phase noise is developed. Techniques to improve phase noise are proposed. Findings from this research indicate that MEMS resonator based oscillators, may in future, outperform quartz based solutions in certain applications such as voltage controlled oscillators. The implications of these findings and potential directions for future research are identified.

Inter-chip input-output (I/O) communication bandwidth demand, which rapidly scaled with integrated circuit scaling, has leveraged equalization techniques to operate reliably on band-limited channels at additional power and area complexity. High-bandwidth inter-chip optical interconnect architectures have the potential to address this increasing I/O bandwidth. Considering future tera-scale systems, power dissipation of the high-speed I/O link becomes a significant concern. This work presents a design flow for the power optimization and comparison of high-speed electrical and optical links at a given data rate and channel type in 90 nm and 45 nm CMOS technologies. The electrical I/O design framework combines statistical link analysis techniques, which are used to determine the link margins at a given bit-error rate (BER), with circuit power estimates based on normalized transistor parameters extracted with a constant current density methodology to predict the power-optimum equalization architecture, circuit style, and transmit swing at a given data rate and process node for three different channels. The transmitter output swing is scaled to operate the link at optimal power efficiency. Under consideration for optical links are a near-term architecture consisting of discrete vertical-cavity surface-emitting lasers (VCSEL) with p-i-n photodetectors (PD) and three long-term integrated photonic architectures that use waveguide metal-semiconductor-metal (MSM) photodetectors and either electro-absorption modulator (EAM), ring resonator modulator (RRM), or Mach-Zehnder modulator (MZM) sources. The normalized transistor parameters are applied to jointly optimize the transmitter and receiver circuitry to minimize total optical link power dissipation for a specified data rate and process technology at a given BER. Analysis results shows that low loss channel characteristics and minimal circuit complexity, together with scaling of transmitter output swing, allows electrical links to achieve excellent power efficiency at high data rates. While the high-loss channel is primarily limited by severe frequency dependent losses to 12 Gb/s, the critical timing path of the first tap of the decision feedback equalizer (DFE) limits the operation of low-loss channels above 20 Gb/s. Among the optical links, the VCSEL-based link is limited by its bandwidth and maximum power levels to a data rate of 24 Gb/s whereas EAM and RRM are both attractive integrated photonic technologies capable of scaling data rates past 30 Gb/s achieving excellent power efficiency in the 45 nm node and are primarily limited by coupling and device insertion losses. While MZM offers robust operation due to its wide optical bandwidth, significant improvements in power efficiency must be achieved to become applicable for high density applications.

Metamaterials attracted significant attention in recent years due to their potential to create novel devices that exhibit specific electromagnetic properties. In this thesis, we investigated transmission and propagation properties of novel metamaterial structures. Electromagnetic properties of metamaterials are characterized and the resonance mechanism of Split Ring Resonator (SRR) structure is investigated. Furthermore, a recent lefthanded metamaterial structure for microwave regime called Fishnet-type metamaterial is studied. We demonstrated the left-handed transmission and negative phase velocity in Fishnet Structures. Finally, we proposed and successfully demonstrated novel approaches that utilize the resonant behavior of SRR structures to enhance the transmission of electromagnetic waves through sub-wavelength apertures at microwave frequency regime. We investigated the transmission enhancement of electromagnetic waves through a sub-wavelength aperture by placing SRR structures in front of the aperture and also by changing the aperture shape as SRR-shaped apertures. The incident electromagnetic wave is effectively coupled to the sub-wavelength aperture causing a strong localization of electromagnetic field in the sub-wavelength aperture. Localized electromagnetic wave gives rise to enhanced transmission from a single sub-wavelength aperture. The proposed structures are designed, simulated, fabricated and measured. The simulations and experimental results are in good agreement and shows significant enhancement of electromagnetic wave transmission through sub-wavelength apertures by utilizing proposed novel structures. Radius (r) of the sub-wavelength aperture is approximately twenty times smaller than the incident wavelength (r/&amp / #955 / ~0.05). This is the smallest aperture size to wavelength ratio in the contemporary literature according to our knowledge.

This dissertation is focused on the design, fabrication, and characterization of novel metamaterials in microwave and terahertz regions with the following outcomes: A planar &micro / -negative metamaterial structure, called double-sided SRR (DSRR), is proposed in the first part of this study. DSRR combines the features of a conventional split ring resonator (SRR) and a broadside-coupled SRR (BC-SRR) to obtain much better miniaturization at microwave frequencies for a given physical cell size. In addition to DSRR, double-sided multiple SRR (DMSRR), double-sided spiral resonator (DSR), and double-sided U-spiral resonator (DUSR) have been shown to provide smaller electrical sizes than their single-sided versions under magnetic excitation. In the second part of this dissertation, a novel multi-band tunable metamaterial topology, called micro-split SRR (MSSRR), is proposed. In addition to that, a novel magnetic resonator structure named single loop resonator (SLR) is suggested to provide two separate magnetic resonance frequencies in addition to an electric resonance in microwave region. In the third part, two different frequency tunable metamaterial topologies called BC-SRR and gap-to-gap SRR are designed, fabricated and characterized at terahertz frequencies with electrical excitation for the first time. In those designs, frequency tuning based on variations in near field coupling is obtained by in-plane horizontal or vertical displacements of the two SRR layers. The values of frequency shifts obtained for these tunable metamaterial structures are reported to be the highest values obtained in literature so far. Finally, in the last part of this dissertation, novel double-sided metamaterial based sensor topologies are suggested and their feasibility studies are presented.

This thesis focuses mostly on investigating different potential applications of meta-transmission line (TL), particularly composite right/left handed (CRLH) TL, and analyzing some new phenomena and applications of meta-TL, mostly left-handed (LH) TL. Realization principle will also be studied.   First, the fundamental electromagnetic properties of propagation in the presence of left-handed material (LHM) are illustrated. The transmission line approach for LHM design is described together with a brief review of the transmission line theory. As a generalized model for LHM TL, CRLH TL provides very unique phase response, such as dual-band operation, bandwidth enhancement, nonlinear dispersion, and the existence of critical frequency with zero phase velocity. Based on these properties, some novel applications of the existing CRLH transmission lines are then given, including a notch filter, a diplexer, a broadband phase shifter, a broadband balun, and a dual band rat-ring coupler. In the design of notch filters and diplexers, CRLH TL shunt stub is utilized to provide high frequency selectivity due to the existence of critical frequency with zero phase velocity. The proposed wideband Wilkinson balun, which comprises of one section of conventional transmission lines and one section of CRLH-TL, is shown to have a 180°±10° bandwidth of 2.12 GHz centered at 1.5 GHz. In the analysis of the dual band rat-ring couplers, a generalized formulation of the requirements about impedances and electrical length of the branches are derived, and as an example, a compact dual-band rat-race coupler is designed utilizing the balanced CRLH TL. Furthermore, a low pass filter is also proposed and designed based on a single (epsilon) negative coplanar waveguide (CPW).Various principles to realize meta-transmission lines are investigated. The main conclusions are listed below:Ÿ         Dual composite right/left handed (D-CRLH) transmission line, which is the dual structure of conventional CRLH TL, shows opposite handedness in the high frequencies and low frequencies with CRLH TL. Meanwhile, in the practical implementation, D-CRLH TL always shows a sharp stopband. A notch filter and a dual-band balun are designed based on D-CRLH TL. Ÿ         The lattice type transmission line (LT-TL) shows the same magnitude response with the conventional right-handed (RH) TL, but a constant phase difference in the phase response over a wide frequency band. A wideband rat-race coupler is proposed as an application of the LT-TL. Ÿ         Finger-shorted interdigital capacitors (FSIDCs) are analyzed and it is shown that FSIDC alone can act as a left-handed transmission line. The value of the reactive elements (inductors and capacitors) in the equivalent circuit model is determined by the dimensions of FSIDC. The relationship between them is analyzed.Later, transmission line loaded with negative-impedance-converted inductors and capacitors is illustrated as the first non-dispersive LH transmission line. The design of a negative series impedance converter is given in detail and a wideband power divider is designed as a potential application of the newly proposed meta-transmission lines in is also given. The final part of the thesis focuses on the study of microstrip lines loaded with complementary split ring resonators (SRRs). An equivalent circuit is made for this structure. The circuit model is verified by the experimental results of cases with different periodic lengths. Thereafter, a meander line split ring resonator (MLSRR) is presented. It shows dual band property and the miniature prototypes of complementary MLSRR loaded transmission lines are fabricated. By comparing the resonance frequencies of complementary MLSRR and multiple SRR, it is shown that the complementary MLSRR is very compact. C-MLSRR is applied in rejecting unnecessary frequencies in the ultra wideband antennas. / QC 20100720

A novel photonic frequency discriminator has been developed. The discriminator utilizes a Mach Zehnder interferometer-assisted ring resonator to achieve enhanced linearity. A numerical frequency-domain two-tone test is performed to evaluate the unique design of the discriminator, particularly for suppression of the third order intermodulation distortion. The discriminator is switchable between linear-intensity and linear-field regimes by adjusting a phase delay on one arm of the Mach Zehnder interferometer. Through the simulation, the linear<intensity discriminator is shown to be advantageous. The discriminator is an optical ring resonator-Mach Zehnder interferometer synthesized passive filter. The ring resonator is made of Arsenic trisulfide (As2S3) and the bus waveguide is a Titanium<diffused Lithium niobate (LiNbO3) waveguide. This As2S3 ring-on-Ti:LiNbO3 hybrid structure offers electro-optic tunability of the device owing to a strong electro-optic effect of the substrate material. A large optical confinement factor achieved by vertical integration of the As2S3 strip waveguide on a LiNbO3 substrate enables a low loss ring resonator. The Mach Zehnder interferometer is formed by the optical path length difference of the birefringent LiNbO3 substrate instead of a physical Y-branch structure, which makes the fabrication tolerances relaxed. In order for this highly birefringent device to be characterized, each polarization mode must be measured separately. A novel algorithm which can measure the wavelength-swept Jones matrix including its phase response is devised. The efficacy of the algorithm is demonstrated by characterizing a ring resonator. Finally, the fabricated discriminator is fully characterized using the algorithm.

Advancing the field of nanotechnology to incorporate the unique properties observed at the nanoscale into functional devices has become a major scientific thrust of the 21st century. New fabrication tools and assembly techniques are required to design and manufacture devices based on one-dimensional nanostructures. Three techniques for manipulating nanomaterials post-synthesis have been developed. Two of them involve direct contact manipulation through the utilization of a physical probe. The third uses optically generated surface acoustic waves to reproducibly control and assemble one-dimensional nanostructures into desired locations. The nature of the third technique is non-contact and limits contamination and defects from being introduced into a device by manipulation. While the effective manipulation of individual nanostructures into device components is important for building functional nanosystems, commercialization is limited by this one-device-at-a-time process. A new approach to nanostructure synthesis was also developed to site-specifically nucleate and grow nanowires between two electrodes. Integrating synthesis directly with prefabricated device architectures leads to the possible mass production of NEMS, MEMS and CMOS systems based upon one-dimensional nanomaterials. The above processes have been pursued to utilize piezoelectric ZnO nanobelts for applications in high frequency electronic filtering as well as biological and chemical sensing. The high quality, single crystal, faceted nature of these materials make them ideal candidates for studying their properties through the designs of a bulk acoustic resonator. The first ever piezoelectric bulk acoustic resonator based on bottom-up synthesized belts will be demonstrated. Initial results are promising and new designs are implemented to scale the device to sub-micron dimensions. Multiple models will be developed to assist with design and testing. Some of models presented will help verify experimental results while others will demonstrate some of the problems plaguing further investigations.

The objective of the work presented in this thesis is to implement high-Q silicon capacitive micromechanical resonators operating in the HF, VHF and UHF frequency bands. Several variations of a fully silicon-based bulk micromachining fabrication process referred to as HARPSS have been developed, characterized and optimized to overcome most of the challenges facing application of such devices as manufacturable electronic components. Several micromechanical structures for implementation of high performance capacitive silicon resonators covering various frequency ranges have been developed under this work. Design criteria and electromechanical modeling of such devices is presented. Under this work, HF and VHF resonators with quality factors in the tens of thousands and RF-compatible equivalent electrical impedances have been implemented successfully. Resonance frequencies in the GHz range with quality factors of a few thousands and lowest motional impedances reported for capacitive resonators to date have been achieved. Several resonator coupling techniques for implementation of higher order resonant systems with possibility of extension to highly selective bandpass filters have been investigated and practically demonstrated. Finally, a wafer-level vacuum sealing technique applicable to such resonators has been developed and its reliability and hermeticity is characterized.