Ce travail de thèse a pour objectif principal d'améliorer la sensibilité d'un micro-récepteur RMN implantable, utilisé dans le cadre de la micro-spectroscopie localisée in vivo. Dans la première partie de cette thèse, nous avons réexaminé la fabrication et modélisation de ce micro-récepteur par rapport à sa sensibilité. Parmi les deux procédés de fabrication proposés (électrodéposition du micro-récepteur avec un underpass sur un substrat de silicium et de verre), nous avons retenu celui-qui nous a permis d'obtenir les meilleures performances en termes de facteur de qualité. Les prototypes fabriqués avec ce procédé ont été caractérisés à l'aide d'un modèle que nous avons développé, basé sur une équation à coefficients polynomiaux. Ceux-ci ont été établis à partir de la simulation du layout du capteur et ont été réajustés en fonction des mesures. Ce modèle polynomial nous a conduits à un circuit équivalent du micro-récepteur, permettant d'approfondir l'étude de son comportement électrique en radio fréquences. La deuxième partie de ce travail est développée autour de l'association d'un amplificateur faible bruit (LNA) au plus près du micro-récepteur, afin d'améliorer sa sensibilité. Nous avons analysé l'état de l'art de l'amplification de micro-bobines RMN ainsi que l'interaction électromagnétique entre un circuit intégré et l'environnement RMN. En partant de cette analyse et des contraintes à remplir par le circuit d'adaptation (en termes de transmission de puissance, gain en tension et adaptation faible bruit), nous avons proposé un circuit d'amplification locale permettant d'améliorer la sensibilité du capteur. Nous avons validée notre démarche par simulation (avec notre micro-récepteur) et nous avons vérifié l'intérêt de celle-ci en RMN (avec une bobine de surface). Les résultats de ce travail nous ont permis d'établir des solutions concrètes pour atteindre la sensibilité nécessaire à nos applications / The aim of this thesis is to improve the sensitivity of an implantable micro NMR sensor, dedicated to the in vivo local micro-spectroscopy. In the first part of this thesis, we re-examined the design and modeling of this micro-sensor according to its sensitivity. We proposed two micromachining processes (electrodeposition of the micro-sensor with an underpass on a silicon and glass substrate) and we kept the one allowing the higher quality factor. The prototypes made with the chosen process were characterized thanks to a model that we developed, based in an equation with polynomial coefficients. These coefficients were determined from the layout of the sensor and were adapted to match the measurements. From this polynomial model, we proposed an equivalent circuit of the micro-sensor to have a better knowledge of its electrical behavior at high frequencies. The second part of this work is about the closer association of a low noise amplifier (LNA) with the micro-sensor to improve its sensitivity. We analyzed the state of art on the amplification of NMR micro-coils and the electromagnetic interaction between the integrated circuits ant the NMR environment. From this analysis and the conditions of the matching network (power transmission, voltage gain and low noise matching), we proposed a local amplification circuit achieving the sensitivity improvement of the sensor. This approach was validated by simulation (with our micro-sensor) and verified in an NMR system (with a surface coil). The results of this work allow us to set practical solutions to reach the required sensitivity of our applications

L’électroérosion (EE) est une technique d’usinage sans contact de matériaux conducteursd’électricité ; elle particulièrement bien adaptée à l’usinage de matériaux durs. Le principe consiste àcréer des décharges électriques érodantes entre un outil et une pièce à usiner, toutes deuximmergées dans un diélectrique. Dans cette thèse, nous avons étudié la miniaturisation de ceprocédé, la microélectroérosion (μEE), qui se présente comme un procédé complémentaire destechniques de micro-usinage mécanique, laser, ou encore des techniques issues de lamicrotechnologie du silicium (RIE, DRIE, LIGA). Toutefois, la résolution de la μEE est limitée.Dans ce travail, nous avons tout d’abord développé un procédé original d’élaboration de microoutilscylindriques en tungstène par gravure électrochimique. Celui-ci permet d’obtenir de manièrereproductible des micro-outils de diamètre 15 μm et de rapport hauteur sur diamètre supérieur à 50.Des micro-outils plus fins ont aussi été obtenus (jusqu’à 700 nm) mais avec des problèmes dereproductibilité. Par ailleurs, un prototype de machine de fraisage par μEE a été développé avec uneélectronique entièrement caractérisée. Des micro-canaux de 40 μm de largeur ont été obtenus dansl’acier d’inoxydable et 25 μm dans le titane ; une rugosité Ra de 86 nm a été atteinte dans des cavitésde 600 x 600 x 30 μm. Les limitations du dispositif expérimental ont aussi été mises en évidence.Dans la dernière partie de ce travail, nous avons procédé à l’étude des microdécharges et du microplasmas’établissant entre micro-outil et pièce à l’aide de caractérisations électriques. La résistanceet l’inductance des décharges ont été déterminées expérimentalement puis intégrées dans unmodèle permettant de prévoir la durée des impulsions de courant et leur intensité. Des pistes pourl’amélioration de la résolution d’usinage sont proposées en conclusion de ce travail. / Electro Discharge Machining (EDM) is a non-contact technique allowing machining of electricallyconductive materials; it is well adapted for the machining of hard materials. The principle is based onthe creation of eroding electrical discharges between a tool and a piece, both immersed in adielectric. In this thesis, we have the studied miniaturization of the process, called micro electrodischarge machining (μ-EDM), which is considered as a complementary technique of mechanical orlaser micro-machining techniques and silicon micro technology processes (RIE, DRIE, LIGA)..However, the resolution of μEDM is limited.In this work, we have firstly developed an original method for making tungsten micro-tools withcylindrical profile by electrochemical etching. This method allows the reproducible fabrication ofmicro-tool with 15-μm diameter. Thinner micro-tools were also obtained (down to 700 nm) withreproducibility problems. Furthermore, a prototype machine for milling μ-EDM was developed with afully characterized electronics. Micro channels were obtained respectively in stainless steel with awidth of 40μm and in titanium with a width of 25μm; a surface roughness Ra of 86 nm was achievedin 600 x 600 x 30 μm cavities. Besides, the limitations of the apparatus were highlighted. In the lastpart of this work, we have studied the micro-discharge and the micro-plasma between the micro-tooland the part with electrical characterization. The resistivity and the inductance of the sparks weremeasured and integrated in a numerical model in order to explain the duration of the microdischarges and their intensity. Solutions for improving the machining resolution are also discussed atthe end of this work.

The thesis is focused on the research of THz antenna arrays to be used for communications. Attention is turned to modeling metallic surfaces at THz frequencies, a proper characterization of gold conductivity, its relation to Drude model and corresponding measurements. Moreover, the best methods for modeling thin metallic layers (depending on the skin depth related to the metal thickness) are presented. An optimized element of a THz 2×2 antenna array designed for the application of communications is developed in a way that enables an expansion to a larger array. The expansion ability is demonstrated on a 4×4 antenna array which is presented in the thesis too. The designed antennas achieve parameters better than the state-of-art antennas. The presented antennas radiate circularly polarized wave at THz frequencies, operate in a wide bandwidth, have a high gain and are of a compact size. In the thesis, an 8×8 antenna array with a beam steering capability is presented. The main beam of the antenna array can be controlled in two dimensions. A high gain of the radiated circularly-polarized wave can be achieved that way. Different approaches to modeling antennas with thin metallic layers are compared and the best methods are recommended from the viewpoint of different requirements. The designed 2×2 and 4×4 antenna arrays are manufactured using a microfabrication technology. Each step of the fabrication is described in detail and discussed. The reflection coefficient at the input of antennas is measured and compared with simulations. Discrepancies in results are associated with surface roughness which is analyzed by a scanning probe microscope and a scanning electron microscope. By down-scaling the developed THz antenna, a low-profile high-gain antenna for Ka-band space applications is designed. The presented antenna achieves better results than state-of-art CubeSat antennas. The antenna performance is verified by a prototype to be operated at 9 GHz, and the radiation characteristics are experimentally confirmed.

In this thesis I investigate characteristics of turbulent flow in a channel where one of the walls has riblets, superhydrophobic microribs, or a hybrid surface with traditional riblets built on a superhydrophobic microrib surface. PIV measurements are used to find the velocity profile, the turbulent statistics, and shear stress profile in the rectangular channel with one wall having a structured test surface. Both riblets and superhydrophobic surfaces can each provide a reduction in the wall shear stress in a turbulent channel flow. Characterizing the features of the flow using particle image velocimetry (PIV) is the focus of this research. Superhydrophobicity results from the combination of a hydrophobic coating applied to a surface with microrib structures, resulting in a very low surface energy, such that the fluid does not penetrate in between the structures. The micro-rib structures are aligned in the streamwise flow direction. The riblets are larger than the micro-rib structure by an order of magnitude and protrude into the flow. All the test surfaces were produced on silicon wafers using photolithographic techniques. Pressure in the channel is maintained below the Laplace pressure for all testing, creating sustainable air pockets between the microribs. Velocity profiles, turbulent statistics, shear stress profiles, and friction factors are presented. Measurements were acquired for Reynolds numbers ranging from 4.5x10^3 to 2.0x10^4. Modest drag reductions were observed for the riblet surfaces. Substantial drag increase occurred over the superhydrophobic surfaces. The hybrid surfaces showed the greatest drag reduction. Turbulence production was strongly reduced during riblet and hybrid tests.

<p>This dissertation presents research work related to laser micro sintering, laser micro machining and laser-induced plasma. Firstly, we present extensive experimental studies of double-pulse laser micro sintering (DP-LMS), which typically utilizes the high pressure generated by laser-induced plasma over the powder bed surface to promote molten flow and enhance densification. Chapter 2 shows a single-track experimental study of the DP-LMS process using cobalt powder. The related fundamental mechanisms and effects of different laser parameters on the sintering results are analyzed with the help of <em>in-situ</em> time-resolved temperature measurements. Chapter 3 shows a multi-track experimental study of the DP-LMS process using iron powder. The sintered materials are characterized via the top surface porosity, elemental composition, grain microstructure, nanohardness and metal phase. Three strategic guidelines for laser parameter selection are summarized in the end. Chapter 4 shows time-resolved imaging and OES measurements for plasma induced during DP-LMS. The plasma temperature and free electron number density are deduced by its optical emission spectra (OES). These three chapters have clearly demonstrated DP-LMS can produce much more continuous and densified materials than LMS only using the sintering or pressing laser pulses.</p> <p><br></p> <p>Then, we present laser micro grooving of silicon carbide (SiC) in Chapter 5 by ultrasound-assisted water-confined laser micromachining (UWLM), in comparison with laser machining in water without ultrasound and laser machining in air. UWLM applies <em>in-situ</em> ultrasound to the water-immersed workpiece surface to improve the machining quality and/or productivity. Time-resolved water pressure measurements are carried out to help analyze relevant mechanisms. It has been demonstrated UWLM can be a competitive approach to produce high-quality micro grooves on SiC. The crack problem appears to be effectively solved using a high pulse repetition rate.</p> <p><br></p> <p>Finally, we report a double-front phenomenon for plasma induced by high-intensity nanosecond laser ablation of aluminum in Chapter 6. An additional plasma front is observed via an intensified CCD (ICCD) camera, which propagates very fast at the beginning but stops propagating soon after the laser pulse mostly ends. Its formation could be caused by the inverse bremsstrahlung absorption of laser energy by the ionized ambient gas. Three possible mechanisms on how the ambient gas breakdown is initiated are proposed. </p>

This thesis presents novel radio frequency microelectromechanical (RF MEMS) circuits based on the three-dimensional (3-D) micromachined coplanar transmission lines whose geometry is re-configured by integrated microelectromechanical actuators. Two types of novel RF MEMS devices are proposed. The first is a concept of MEMS capacitors tuneable in multiple discrete and well-defined steps, implemented by in-plane moving of the ground side-walls of a 3-D micromachined coplanar waveguide transmission line. The MEMS actuators are completely embedded in the ground layer of the transmission line, and fabricated using a single-mask silicon-on-insulator (SOI) RF MEMS fabrication process. The resulting device achieves low insertion loss, a very high quality factor, high reliability, high linearity and high self actuation robustness. The second type introduces two novel concepts of area efficient, ultra-wideband, MEMS-reconfigurable coupled line directional couplers, whose coupling is tuned by mechanically changing the geometry of 3-D micromachined coupled transmission lines, utilizing integrated MEMS electrostatic actuators. The coupling is achieved by tuning both the ground and the signal line coupling, obtaining a large tuneable coupling ratio while maintaining an excellent impedance match, along with high isolation and a very high directivity over a very large bandwidth. This thesis also presents for the first time on RF nonlinearity analysis of complex multi-device RF MEMS circuits. Closed-form analytical formulas for the IIP3 of MEMS multi-device circuit concepts are derived. A nonlinearity analysis, based on these formulas and on  measured device parameters, is performed for different circuit concepts and compared to the simulation results of multi-device  conlinear electromechanical circuit models. The degradation of the overall circuit nonlinearity with increasing number of device stages is investigated. Design rules are presented so that the mechanical parameters and thus the IIP3 of the individual device stages can be optimized to achieve a highest overall IIP3 for the whole circuit.The thesis further investigates un-patterned ferromagnetic NiFe/AlN multilayer composites used as advanced magnetic core materials for on-chip inductances. The approach used is to increase the thickness of the ferromagnetic material without increasing its conductivity, by using multilayer NiFe and AlN sandwich structure. This suppresses the induced currents very effectively and at the same time increases the ferromagnetic resonance, which is by a factor of 7.1 higher than for homogeneous NiFe layers of same thickness. The so far highest permeability values above 1 GHz for on-chip integrated un-patterned NiFe layers were achieved. / <p>QC 20140328</p>

The present work is dedicated to the development of high performance integrated circuits for wireless communications, by acting of three different levels: technologies, devices, and circuits. Silicon-on-Insulator (SOI) CMOS technology is used in the frame of this work. Micromachining technologies are also investigated for the fabrication of three-dimensional tunable capacitors. The reliability of micromachined thin-film devices is improved by the coating of silanes in both liquid- and vapor-phases. Since in telecommunication applications, distortion is responsible for the generation of spurious frequency bands, the linearity behavior of different SOI transistors is analyzed. The validity range of the existing low-frequency nonlinear characterization methods is discussed. New simple techniques valid at both low- and high-frequencies, are provided, based on the integral function method and on the Volterra series. Finally, the design of a crucial nonlinear circuit, the voltage-controlled oscillator, is introduced. The describing function formalism is used to evaluate the oscillation amplitude and is embedded in a design methodology. The frequency tuning by SOI varactors is analyzed in both small- and large-signal regimes.

This thesis presents various integrated antenna solutions for different types of systems and applications, e.g. wireless sensors, broadband handsets, advanced base stations, MEMS-based reconfigurable front-ends, automotive anti-collision radars, and large area electronics. For wireless sensor applications, a T-matched dipole is proposed and integrated in an electrically small body-worn sensor node. Measurement techniques are developed to characterize the port impedance and radiation properties. Possibilities and limitations of the planar inverted cone antenna (PICA) for small handsets are studied experimentally. Printed slot-type and folded PICAs are demonstrated for UWB handheld terminals. Both monolithic and hybrid integration are applied for electrically steerable array antennas. Compact phase shifters within a traveling wave array antenna architecture, on single layer substrate, is investigated for the first time. Radio frequency MEMS switches are utilized to improve the performance of reconfigurable antennas at higher frequencies. Using monolithic integration, a 20 GHz switched beam antenna based on MEMS switches is implemented and evaluated. Compared to similar work published previously, complete experimental results are here for the first time reported. Moreover, a hybrid approach is used for a 24 GHz switched beam traveling wave array antenna. A MEMS router is fabricated on silicon substrate for switching two array antennas on a LTCC chip. A concept of nano-wire based substrate integrated waveguides (SIW) is proposed for millimeter-wave applications. Antenna prototypes based on this concept are successfully demonstrated for automotive radar applications. W-band body-worn nonlinear harmonic radar reflectors are proposed as a means to improve automotive radar functionality. Passive, semi-passive and active nonlinear reflectors consisting of array antennas and nonlinear circuitry on flex foils are investigated. A new stretchable RF electronics concept for large area electronics is demonstrated. It incorporates liquid metal into microstructured elastic channels. The prototypes exhibit high stretchability, foldability, and twistability, with maintained electrical properties. / wisenet

Die mikromechanische Gleichspannungswandlung basierend auf verschiebungsabhängigen Kapazitäten stellt eine Alternative zu etablierten rein elektronischen Wandlern für den Spezialfall der kapazitiven oder piezoelektrischen Verbraucher dar. Durch ihre kleine Bauform und den Verzicht auf Induktivitäten bietet sie den Vorteil der On-Chip-MEMS- und CMOS-Integration und ermöglicht die Bereitstellung hoher elektrischer Gleichspannungen aus den verfügbaren Grundspannungen der Elektronik (z. B. 3, 5 bzw. 12 V). Von hohen Polarisationsspannungen profitieren nicht nur kapazitive Sensoren und Aktoren, sondern auch piezoelektrische Messverfahren. Diese Arbeit stellt eine umfangreiche Übersicht und Bewertung der möglichen Bauformen mikromechanischer Gleichspannungswandler sowie die konkrete Umsetzung, Charakterisierung und Modellbildung eines resonant arbeitenden Wandlers vor. Es wird auf Besonderheiten und Probleme im Entwurf eingegangen und ausgehend von den Ergebnissen ein Konzeptentwurf für einen optimierten resonanten Gleichspannungswandler erarbeitet.:1 Einleitung 2 Theoretische Grundlagen 3 Ausführungsvarianten von MEMS-DC/DC-Wandlern 4 Designstudie und Umsetzung des resonanten Funktionsprinzips 5 Zusammenfassung und Ausblick / Micromechanical DC/DC conversion based on variable capacitances is an alternative to established electronic voltage converters, which does not require bulky inductors and is suitable for capacitive and piezoelectric loads. The converters are capable of boosting up the polarization voltage from CMOS and electronic levels (3, 5, 12 V), which is beneficial not only for capacitive sensors and actuators but also for piezoelectric sensing. Advantages of this method are the on-chip- and CMOS-integrability. This thesis introduces a comprehensive overview and evaluation of possible designs as well as the practical application, characterization and modeling of a resonant micromechanical DC/DC converter. Innovative claims include a test board for the characterization of resonant DC/DC converters and a SPICE behavioral model of the device, considering parasitic effects. Characteristics and problems of the design are discussed and the results are used to demonstrate an optimized conceptual design of a resonant DC/DC converter.:1 Einleitung 2 Theoretische Grundlagen 3 Ausführungsvarianten von MEMS-DC/DC-Wandlern 4 Designstudie und Umsetzung des resonanten Funktionsprinzips 5 Zusammenfassung und Ausblick

Un nombre de sujets concernant la microrobotique numérique ont été abordés dans le cadre de cette the` se. Une nouvelle génération du microrobot numérique ”DiMiBot” a e´ te´ proposé ce qui rend le DiMiBot plus précis, plus contrôlable et plus petit. La nouvelle structure est formée de deux modules multistables seulement, ce qui ajoute des fonctionnalités´ s importantes comme l’augmentation du nombre de positions avec une taille plus réduite et la capacité´ de réaliser des trajectoires complexes dans l’espace de travail. Le principe du nouveau module multistable combine les avantages des microactionneurs pas à pas en termes du principe et du concept numérique en termes de la répétabilité et la robustesse en boucle ouverte. Un mécanisme de positionnement précis, capable de compenser les incertitudes de fabrication a e´ te´ développé et utilise´ pour assurer un positionnement précis. En parallèle, des modèles analytiques ont e´ te´ développés pour les principaux composants dans le DiMiBot: poutres flambées préformées et actionneurs e´ électrothermiques en U. Des méthodes de conception ont été développées par la suite qui permettent de choisir les dimensions optimales garantissant les performances requises en respectant les spécifications et limites de design. Des prototypes de modules multistables, fabrique´ s dans la salle Blanche MIMENTO, ont montré´ un bon Fonctionnement dans les expériences. / A number of topics concerning digital microrobotics were addressed in this thesis. A new generation of the digital microrobot ”DiMiBot” was proposed with several advantages making the DiMiBot more accurate, more controllable and smaller. The new structure consists of only two multistable modules which adds some important features such as increasing the number of positions with smaller size and the ability to realize complex trajectories in the workspace. The principle of the new multistable module combines the advantages of the stepping microactuators in terms of the principle and of the digital concept in terms of the repeatability and robustness without feedback. The accuracy is ensured with an accurate positioning mechanism that compensate the fabrication tolerances. In parallel, analytical models was developed for the main components in the DiMiBot: preshaped curved beams and U-shaped electrothermal actuators. Subsequently, design methods were developed that allow choosing the optimal dimensions that ensure the desired outputs and respecting the design specifications and limitations. Multistable module prototypes, fabricated in the clean room MIMENTO, showed a proper functioning in the experiments.