Hochaufgelöste räumlich-selektive Einzelionenimplantation ist eine Schlüsseltechnologie um Festkörper-Qubits herzustellen. Der in dieser Arbeit verwendete Nanoimplanter benutzt zur Kollimation eines niederenergetischen Ionenstrahls auf Nanometerebene eine Rasterkraftmikroskop-(AFM-)Spitze, welche mit einer Nanoapertur ausgestattet ist. Diese Technik wurde bereits für verschiedene Quantenanwendungen genutzt. In dieser Arbeit wird sie auf die Erzeugung strukturierter Stickstoff-Fehlstellen-(NV-)Zentren weiterentwickelt und optimiert. Dies umfasst unter anderem die Installation eines neuen AFM-Systems, welches den Aufbau mit zwei nützlichen Funktionen aufrüstet: die In-situ-Aperturvermessung und die Untersuchung von Ionen-sensitiven Fotolacken. Weiter werden die zwei wichtigsten limitierenden Faktoren der räumlichen Auflösung durch Simulationen und Experimente detailliert untersucht. Die Ergebnisse geben Aufschluss über optimale Nanoaperturen und Implantationsbedingungen. Streueffekte an der AFM-Spitze und Gitterführungen in Diamant können dadurch maßgeblich reduziert werden. Weiter werden NV-limitierende Effekte durch mehrere Ausheizschritte sowie Ionen- und Elektronenbestrahlungen untersucht. Zuletzt werden erstmals diamantbasierte Ionendetektoren hergestellt, welche mit Kapazität- und Strom-Spannungs-Messungen, durch Röntgenbestrahlung und Ionenstrahl-induzierter Ladung (IBIC) charakterisiert werden. Die Ergebnisse zeigen, dass die angefertigten Detektoren die Bedingungen für eine deterministische Implantation erfüllen, so dass dieses Prinzip zukünftig in den Nanoimplanter integriert werden kann. / High-resolution spatial-selective single ion implantation is a key technology to produce solid state qubits. The nanoimplanter used in this work collimates a low-energy ion beam at the nanometer level using an atomic force microscope (AFM) tip, which is provided with a nanoaperture. This technique has already been used for various quantum applications. In this thesis it is further developed and optimized for the generation of structured nitrogen vacancy (NV) centers. This includes the installation of a new AFM system, which upgrades the setup with two useful functions: in-situ aperture measurement and the investigation of ion sensitive photoresists. Furthermore, the two most significant limiting factors of spatial resolution are studied in detail by simulations and experiments. The results indicate optimized nanoapertures and implantation conditions. Scattering effects at the AFM tip and ion channeling in diamond can be significantly reduced. Moreover, NV-limiting effects are investigated by several heating steps as well as ion and electron irradiations. Finally, novel diamond based ion detectors are manufactured, that are characterized by capacitance and current-voltage measurements, by X-ray irradiation and ion beam induced charge (IBIC). The results show these detectors fulfill the conditions for a deterministic implantation, so that this concept can be integrated into the nanoimplanter in the future.

[pt] A interação entre polímeros e surfactantes de cargas opostas frequentemente resulta na formação de coacervados e pode ser utilizada para promover a deposição de produtos capilares. A compreensão dos efeitos da estrutura molecular, concentração de surfactantes e polímeros, e força iônica é essencial para controlar esse fenômeno. Este estudo utilizou polímeros e surfactantes de cargas opostas que já são aplicados na indústria cosmética: Lauril Éter Sulfato de Sódio (SLES), Lauril Éter Sulfosuccinato Dissódico (SS), Lauroil Sarcosinato de Sódio (LS), Poli(dialildimetilamônio) (PDADMAC) e Hidroxietilcelulose Cationizada (cat-HEC). Para compreender como a estrutura molecular afeta a coloidal na coacervação induzida por diluição, foi usada uma faixa de concentração típica de produtos, o que é raro de se encontrar na literatura. Caracterizamos as amostras pelas técnicas de potencial zeta, espalhamento de raios X a baixos ângulos e microscopia óptica. A deposição sobre fios de cabelo foi avaliada por microscopia óptica e de força atômica. Os sistemas concentrados de SS e LS+PDADMAC foram uma solução micelar que, quando diluídos, se separaram em uma mesofase cúbica Pm3n. O sistema SLES+PDADMAC demonstrou separação de fases mesmo em concentrações elevadas e o planejamento de misturas revelou que pequenas variações na quantidade de PDADMAC têm impacto significativo. O estudo com cat-HEC mostrou que o recobrimento do fio de cabelo pode ocorrer mesmo sem a coacervação, sendo mais dependente da natureza do polímero. Assim, o trabalho correlacionou estruturas coloidais de diferentes sistemas com propriedades macroscópicas possibilitando um controle estratégico de formulações capilares. / [en] The interaction between oppositely charged polymers and surfactants often leads to the formation of coacervates and can be employed to facilitate the deposition of hair care products. Understanding the e ffects of molecular structure, surfactant and polymer concentrations, and ionic strength is essential for controlling this phenomenon. This study utilized polymers and surfactants with opposing charges that are already employed in the cosmetic industry: So dium Laureth Sulfate (SLES), Disodium Laureth Sulfosuccinate (SS), Sodium Lauroyl Sarcosinate (LS), Poly(diallyldimethylammonium chloride) (PDADMAC), and Cationized Hydroxyethylcellulose (cat HEC). To understand how molecular structure affects colloidal st ructure in dilution induced coacervation, a typical concentration range of products was used, which is rare to find in the literature. We employed zeta potential analysis, low angle X ray scattering, and optical microscopy to characterize the materials. De position on hair strands was assessed through optical and atomic force microscopy . The concentrated SS and LS+PDADMAC systems formed micellar solutions that phase separated into a Pm3n cubic mesophase upon dilution. The SLES+PDADMAC system exhibited phase separation even at high concentrations, with mixture design revealing that small variations in the PDADMAC amount had a significant impact. The study with cat HEC demonstrated that hair strand coating could occur even without coacervation, being more depen dent on the nature of the polymer . As a result, this work established a correlation between colloidal structures in different systems and macroscopic properties, enabling strategic control of hair care formulations.

In this report, a novel smart nanocantilever with self-deflection sensor using embedded piezo-resistor and self-actuation using integrated piezo-electric actuator is proposed, designed and simulated to enable highly sensitive label free biosensor and ultra-short cantilever probe for AFM applications. The smart nanocantilever comprises of a triangular Si3N4 nanocantilever (10µm long, 400nm width and 100nm thickness) connected to a multi-layer support structure (Si3N4 (100nm)/PZT (100nm)) having n-type silicon piezo resistor (7µm long ,2µm width and 20nm thickness) embedded in the Si3N4 layer in both the support structure and nanocantilever. The nanocantilever is designed to maximize the resonance frequency and lower spring constant whereas piezoelectric actuator and piezo resistor is designed to maximize excitation and maximize change in resistance of nanocantilever respectively. The results show that the nanocantilever enhances sensitivity in static mode by factor of 36.5 while in dynamic mode by a factor of 658 for AFM application. For biosensor application, the nanocantilever enhanced the sensitivity in static and dynamic mode by factors of 5.6 and 13.8, respectively. / I denna rapport presenteras en ny, smart nano-kantilever med självdetektion via sensorer som använder inbäddade piezoresistorer, och självpådrivning via integrerade piezoelektriska pådrivare. Dessa är designade och simulerade för att möjliggöra högsensitiva titelfria biosensorer och ultrakorta kantilever-prober för AFM-applikation. Den smarta nano-kantilevern består av en triangulär Si3N4 nano-kantilever (10µm lång, 400nm bred and 100nm djup) kopplad till en stödstruktur med flera lager (Si3N4 (100nm)/PZT (100nm)) och med en n-typ silikon piezoresistor (7µm lång ,2µm bred and 20nm djup) inbäddad i Si3N4 – lagret i både stödstrukturen och i nano-kantilevern. Denna är designad för att maximera resonansfrekvens och sänka fjädringskonstanten, medan den piezo-elektriska pådrivaren och piezo-resistorn är designade för att maximera excitering samt resistansändring för nano-kantilevern. Resultatet i denna rapport visar att nano-kantilevern förstärker känslighet i statiskt läge med en faktor på 36,5, med motsvarande faktor på 658 i dynamiskt läge för AMF- applikation. För biosenor-applikation förstärkte nano-kantilevern känsligheten i statiskt och dynamiskt läge med 5,6 och 13,8 respektive.

La microscopie à force atomique (AFM) permet d’étudier à l’échelle nanométrique la surface d’échantillons. Elle offre de nombreux avantages par rapport aux microscopes optiques et aux microscopes électroniques, tout en évitant des étapes de préparation particulières : pas de nécessité de congeler, de métalliser ou de teinter l’échantillon ni de travailler sous vide. La résolution de l'imagerie AFM est principalement déterminée par la morphologie de la sonde utilisée et peut atteindre la résolution moléculaire. Toutefois, les sondes en silicium sont très fragiles. De plus, leur forme pyramidale ou conique génère des artefacts sur l’image résultante. Parmi les sondes actuellement en développement, les sondes à nanotubes de carbone mono-paroi offrent de bonnes caractéristiques en termes de qualité d'imagerie et de longévité. Ces sondes sont plus résistantes et de plus petite taille que les sondes traditionnelles.Cette thèse s’intéresse à la fabrication directe de sondes à nanotubes mono-paroi sur des extrémités de pointes AFM commerciales par la méthode de dépôt chimique en phase vapeur assistée par filament chaud dans un réacteur développé au CBMN. En jouant sur les paramètres de synthèse, tels que la quantité de catalyseur ou la température, nous optimisons le protocole de synthèse originel en collaboration avec son auteur Anne-Marie Bonnot afin de l’adapter à notre réacteur. Les nanotubes obtenus sont caractérisés par les microscopies Raman, électronique à balayage et transmission et à force atomique. La caractérisation montre que les nanotubes obtenus ont une structure mono-paroi. Le rendement d’obtention de sondes nanotubes utilisables est de 30%.Les courbes d’approche-retrait d'AFM nous donnent des informations sur la sonde à nanotube utilisée, telles que sa raideur, le nombre de nanotubes en contact avec la surface. Ces courbes nous permettent de sélectionner les paramètres d’imagerie. Deux échantillons sont testés avec les sondes produites : du graphite pyrolytique haute orientation et des origamis d’ADN rectangulaires. Nous réalisons des expériences d’imagerie avec des sondes à nanotube dans l’air en mode dynamique FM et en milieu liquide en mode Peak Force. Les résultats montrent des images à haute résolution de l’origami d’ADN où la période de 5,8 nm est observable. Les sondes à nanotube présentent également une plus longue durée de vie que les pointes AFM en silicium. / Atomic force microscopy (AFM) is used to study at nanometer scale samples on surfaces. It offers many advantages over conventional optical microscopes and electron microscopes: no freezing, metal coating, vacuum or dye is needed to prepare the sample. The AFM imaging resolution is mostly determined by the sharpness of the used probe and can reach molecular resolution. However, silicon probes are brittle. Additionally, their pyramidal or conical shape generates artifacts on the resulting image. Among the probes currently under development, single-walled carbon nanotube probes offer good characteristics in terms of imaging quality and longevity. These probes are more resistant and smaller in size than traditional probes.This thesis focuses on the direct fabrication of single-wall nanotube probes at the apex of commercial AFM tips by the hot-filament chemical vapor deposition method in a reactor developed at CBMN. By playing on the synthesis parameters, such as the amount of catalyst or the temperature of synthesis, we optimize the original synthesis protocol in collaboration with its author Anne-Marie Bonnot in order to adapt it to our reactor. The nanotubes obtained are characterized by Raman, scanning electron microscopy and transmission electron microscopy and AFM. The characterization shows that the nanotubes obtained have a single-wall structure. The yield of nanotube probes for AFM is 30%.AFM approach-retract curves give us information about the nanotube probe used, such as its stiffness or the number of nanotubes in contact with the surface. These curves allow us to select the imaging parameters. Two samples are tested with the produced probes: highly oriented pyrolytic graphite and rectangular DNA origamis. We image the samples with nanotube probes in both air with dynamical FM mode and in liquid medium with Peak Force mode. The results show high resolution images of DNA origami where the 5.8 nm period is observable. Nanotube probes also have longer life than silicon AFM tips.

La microscopie à force atomique (AFM) permet de visualiser la topographie d’échantillons organiqueset inorganiques à l’échelle atomique. Les innovations les plus récentes offrent désormais la possibilitéd’accéder aux propriétés nano-mécaniques des échantillons (élasticité, adhésion…). Son panel defonctionnalités permet de pallier aux besoins des nanotechnologies, tant dans les domaines de laphysique, de la chimie que de la biologie.Cependant, les besoins nécessaires à la compréhension des processus biologiques imposent aumicroscope à force atomique des vitesses d’acquisitions rapides, inférieures à la seconde par image. Leséquipements classiques n’offrent pas cette possibilité. C’est pour s’affranchir de ce verrou technologique,pour l’étude dynamique, qu’un prototype de microscope à force atomique à haute-vitesse a étédéveloppé (HS-AFM) en partenariat avec l’équipe du Professeur T. Ando à l’Université de Kanazawa(Japon). Il permet d’atteindre des vitesses de balayage identiques aux vitesses vidéos : 25-50 images/s, enmilieu liquide. Le dispositif est en perpétuelle amélioration : nouvelle boucle d’asservissement, domainesde balayage augmentés. La haute résolution est, quant à elle, assurée par des leviers miniaturisés munisde sur-pointes en carbone. Parallèlement à l’innovation du microscope en lui-même, des modulescomplémentaires ont été développés : module pousse seringue et module chauffant.Le potentiel de ce prototype, développé dans le cadre d’un programme ANR PNANO 2008 HSnanobio-Imaging, a été montré via l’étude d’une petite protéine de choc thermique : la protéine sHspLo18. Cette protéine, issue de la bactérie lactique Oenococcus oeni, offrait la possibilité d’étudier deschangements de degrés d’oligomérisation en fonction du pH, ainsi que le rôle chaperon et lipochaperonen cas de stress environnemental d’autres complexes biologiques. L’utilisation des techniques demicroscopie couplée à des études biochimiques sur ce modèle protéique a permis d’appréhender l’effetdes surfaces sur l’adsorption et la dynamique des complexes biologiques. L’interaction protéine – surfacea pu être approchée et s’avère utile au développement des capteurs à protéines / The atomic force microscopy (AFM) gives access to the topography of organic and inorganic samplesat the atomic scale. The latest innovations offer the possiblity to understand the sample nano-mechanicalproperties (elasticity, adhesion...). Its feature set allows overcoming the demands of nanotechnology,both in the fields of physics, chemistry and biology.However, understanding biological processes require faster acquisitions for the atomic forcemicroscopy, less than a second per frame. As conventional equipment does not offer the possibility toovercome the constraint of time for dynamical studies, a prototype of high-speed atomic forcemicroscope (HS-AFM) was developed in partnership with Professor T. Ando group of Kanazawa University(Japan). It can reach scanning video speed: 25-50 frames/s in a liquid medium. The device is beingconstantly improved: new feedback control, larger scanning sizes. The resolution is provided byminiaturized cantilevers with carbon EBD-tips. In parallel to innovative modules on the microscope, addonshave been developed: syringe pump and heating modules.The potential of the prototype, developed within the framework of the program ANR PNANO 2008HS-nanobio-Imaging, has been shown through the study of a small heat shock protein: the protein sHspLo18. This protein, from the lactic acid bacterium Oenococcus oeni, offered the possibility of a variouschanges of oligomerization degrees according to the pH, and also the chaperone and lipochaperon activityof protein under the influence of an environmental stress. The use of these techniques of microscopiescoupled with biochemical studies on this proteic model allowed to dread the effect of surfaces on theadsorption and the dynamics of biological complexes. The interaction protein – surface coulb be toapprehend and proves to be useful for the development of protein sensors developed in the laboratory

A commercial non-contact atomic force microscope was improved to achieve utmost resolution on a routine basis. This system was used to study the (110) surface of rutile titanium dioxide. The focus was on understanding contrast formation in terms of tip-sample interaction mechanisms. Moreover, chromium and antimony-doped titanium dioxide was investigated. The implications of transition-metal doping on the surface structure of this highly interesting photocatalyst was studied at the atomic scale.

Durch die Untersuchungen der vorliegenden Arbeit ist es erfolgreich gelungen die beiden gram-positiven Mikroorganismen Lysinibacillus sphaericus JG-A12 und Lysinibacillus sphaericus JG-B53 unter geregelten und idealen Kultivierungsbedingungen im Bioreaktor in hinreichenden Biomasseausbeuten zu kultivieren. Aus der Biomasse beider Stämme ist es anschließend gelungen, die primären Zellwandkomponenten bestehend aus Membranlipiden, Peptidoglykan mit sekundären Zellwandpolymeren und S-Layer-Proteinen in reiner Form und in guten Ausbeuten zu extrahieren. Diese Zellwandkomponenten wurden dann unter Verwendung von biochemischer und strukturanalytischer Methoden charakterisiert. Dabei ist es erstmals gelungen, die Membranlipide beider genutzter Mikroorganismen in Bezug auf deren Zusammensetzungen der enthalten hydrophoben Fettsäuren und der hydrophilen phosphathaltigen Kopfgruppen zu charakterisieren. Durch die vergleichend durchgeführten Metallbindungsversuche im Batch-Verfahren konnten Bindungspräferenzen intakter Zellen von Lysinibacillus sphaericus JG-A12 und Lysinibacillus sphaericus JG-B53 und deren isolierten Zellwandkomponenten mit den Metallen As, Au, Cd, Eu, Pb, Pd, Pt bzw. U untersucht werden. Dabei konnten sowohl in den Untersuchungen intakter Zellen und der primären Zellwandbestandteile deutlich höhere Metallsorptionsraten und Metallentfernungseffizienzen für Lysinibacillus sphaericus JG-B53 festgestellt werden als dies bei Lysinibacillus sphaericus JG-A12 nachzuweisen war. Dies macht diesen Stamm für potentielle technische Anwendungen als metallselektives biosorptives Material weitaus interessanter. Die Untersuchungen der Einzelkomponenten in Suspension lieferten jedoch nur begrenzt Informationen zur Interaktion der Metalle mit den Schichten wie sie unter natürlichen Bedingungen in der Zelle vorkommen. Daher wurden unter Verwendung der QCM-D erstmals die primären Zellwandkomponenten beider Mikroorganismen (S-Layer und Peptidoglykan) sowie von Referenzlipiden an Grenzflächen erfolgreich im nanoskaligen Bereich abgeschieden und online verfolgt. Dadurch war es möglich vereinfachte Einzelschichtsysteme der gram-positiven bakteriellen Zellwand nachzubilden. In den Untersuchungen konnten stabile Schichten generiert werden, welche vergleichbar zu dem Schichtsystem vitaler Zellen sind. Zusätzlich konnte bei den Abscheidungen der S-Layer-Proteine SlfB und Slp1 der positive Effekt von Polyelektrolytmodifizierungen auf das Rekristallisationsverhalten, die Schichtstabilität und den Bedeckungsgrad auf der technischen Oberfläche aufgezeigt werden. Zur Untersuchung der Metallinteraktion zellulärer Einzelschichtsysteme wurden in dieser Arbeit exemplarisch nach den erfolgreichen Untersuchungen zur Rekristallisation, die S-Layer-Proteine als erste Interaktionsschicht des Gesamtzellsystems mit der QCM-D untersucht. Diese stabilen und intakten Schichten konnten analog zu den Schichtuntersuchungen der reinen biologischen Komponenten und nach den QCM-D Metallinteraktionsstudien mit den S-Layer Strukturen mittels der Rasterkraftmikroskopie (AFM) untersucht und bildgebend dargestellt werden. In weiteren spektroskopischen Untersuchungen (TRLFS) der Zellwandkomponenten konnten die lumineszierenden Eigenschaften von Europium ausgenutzt werden, um das Metallbindungsverhalten der einzelnen Komponenten als auch des Gesamtsystems der Zellen beider Mikroorganismen zu bestimmen. Somit konnte Europium als spektroskopische Sonde eingesetzt werden um Rückschlüsse die Biomolekül-Metallwechselwirkungen zu ermöglichen. Dabei konnten vor allem mit den beiden oberflächennahen Zellschichten Lösung teilweise sehr starke Metall-Biomolekül-Wechselwirkungen beobachtet werden.

An optical surface roughness model is presented, which allows a reliable determination of the dielectric function of thin films with high surface roughnesses of more than 10 nm peak to valley distance by means of spectroscopic ellipsometry. Starting from histogram evaluation of atomic force microscopy (AFM) topography measurements a specific roughness layer (RL) model was developed for an organic thin film grown in vacuum which is well suited as an example. Theoretical description based on counting statistics allows generalizing the RL model developed to be used for all non-conducting materials. Finally, a direct input of root mean square (RMS) values found by AFM measurements into the proposed model is presented, which is important for complex ellipsometric evaluation models where a reduction of the amount of unknown parameters can be crucial. Exemplarily, the evaluation of a N,N’-dimethoxyethyl-3,4,9,10-perylene-tetracarboxylic-diimide (DiMethoxyethyl-PTCDI) film is presented, which exhibits a very high surface roughness, i.e. showing no homogeneous film at all.

The foundation of vacuum nanoelectronics was laid as early as in 1961 when Kenneth Shoulders proposed the development of vertical field-emission micro-triodes. After years of conspicuous stagnancy in the field much interest has reemerged for the vacuum nanoelectronics in recent years. Electron field emission under high electric field from conventional and exotic nanoemitters, which have now been made possible with the use of modern day technology, has been the driving force behind this renewal of interest in vacuum nanoelectronics. In the research reported in this thesis self-assembled silicon nanostructures were studied as a potential source of field emission for vacuum nanoelectronic device applications. Whiskerlike protruding silicon nanostructures were grown on untreated n- and p-type silicon surfaces using electron-beam annealing under high vacuum. The electrical transport characteristics of the silicon nanostructures were investigated using conductive atomic force microscopy (C-AFM). Higher electrical conductivities for the nanostructured surface compared to that for the surrounding planar silicon substrate region were observed. Non-ideal diode behaviour with high ideality factors were reported for the individual nanostructure-AFM tip Schottky nanocontacts. This demonstration, indicative of the presence of a significant field emission component in the analysed current transport phenomena was also detailed. Field emission from these nanostructures was demonstrated qualitatively in a lift-mode interleave C-AFM study. A technique to fabricate integrated field emission diodes using silicon nanostructures in a CMOS process technology was developed. The process incorporated the nanostructure growth phase at the closing steps in the process flow. Turn-on voltages as low as ~ 0.6 V were reported for these devices, which make them good candidates for incorporation into standard CMOS circuit applications. Reproducible I V characteristics exhibited by these fabricated devices were further studied and field emission parameters were extracted. A new consistent and reliable method to extract field emission parameters such as effective barrier height, field conversion factor, and total emitting area at the onset of the field emission regime was developed and is reported herein. The developed parameter extraction method used a unified electron emission approach in the transition region of the device operation. The existence of an electron-supply limited current saturation region at very high electric field was also confirmed. Both the C-AFM and the device characterization studies were modelled and simulated using the finite element method in COMSOL Multiphysics. The experimental results – the field developed at various operating environments – are explained in relation to these finite element analyses. Field enhancements at the atomically sharp nanostructure apexes as suggested in the experimental studies were confirmed. The nanostructure tip radius effect and sensitivity to small nanostructure height variation were investigated and mathematical relations for the nanostructure regime of our interest were established. A technique to optimize the cathode-opening area was also demonstrated. Suggestions related to further research on field emission from silicon nanostructures, optimization of the field emission device fabrication process, and fabrication of field emission triodes are elaborated in the final chapter of this thesis. The experimental, modelling, and simulation works of this thesis indicate that silicon field emission devices could be integrated into the existing CMOS process technology. This integration would offer goods from both the worlds of vacuum and solid-sate nanoelectronics – fast ballistic electron transport, temperature insensitivity, radiation hardness, high packing density, mature technological backing, and economies of scale among other features.

Aim of this student research project was to develop an Aluminium Oxide (Al2O3 ) ALD process from trimethylaluminum (TMA) and Ozone in comparison of two shower head designs. Then studying the detailed characteristics of Al2O3 ALD process using various measurement techniques such as Spectroscopic Ellipsometry (SE), x-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM). The real-time ALD growth was studied by in-situ SE. In-situ SE is very promising technique that allows the time-continuous as well as time-discrete measurement of the actual growth over an ALD process time. The following ALD process parameters were varied and their inter-dependencies were studied in detail: exposure times of precursor and co-reactant as well as Argon purge times, the deposition temperature, total process pressure, flow dynamics of two different shower head designs. The effect of varying these ALD process parameters was studied by looking upon ALD cycle attributes. Various ALD cycle attributes are: TMA molecule adsorption (Mads ), Ligand removal (Lrem ), growth kinetics (KO3 ) and growth per cycle (GPC).