For biomedical electronics the compatibility to the biological environment should be well-considered. Therefore this paper evaluates dispensed carbon nanotubes (CNT's) on polyimide (PI) foil for conductive tracks and electrodes for flexible, biomedical applications. A CNT based ink is investigated regarding biocompatibility, flexibility, conductivity and suitability for electrode materials with contact to artificial body fluids. The testing methods comprise bending tests with resistance monitoring, adhesion tests and the utilization of dynamic fluidic and electrical load on dispensed structures. The CNT ink showed good bending properties up to 2653 cycles with an average sheet resistance of 32.5 Ohm/sq. A demonstration of biocompatibility using the adherent cell line HFFF2 resulted negatively. No delamination or dissolving effects occurred during exposure to 0.9 % sodium chloride solution.

The carbon nanotube-based field effect transistor (CNTFET) possesses the potential to overcome limitations of state-of-the-art technologies such as silicon-based complementary metal-oxide-semiconductors. However, the carbon nanotube (CNT) technology is still at its infancy and technology development is still necessary to exploit the CNT properties such as high charge carrier mobility, high current carrying capability, one-dimensional charge transport and their versatile integrability. Within this work significant progress has been achieved scientifically and technologically in the advance of high frequency (HF) CNTFETs for analog applications. According to simulations by others, a technology flow has been developed based on electron beam lithography for bottom gated HF CNTFETs which outperform state-of the art top gate architectures with respect to their parasitic capacitances. Moreover, the impact of electrostatic doping on the CNTFETs has been investigated. In particular, the dynamics of water desorption from the CNTFETs and the related reduction of p-type doping was investigated and the different impact of the n-type dopant polyethylenimine onto the channel region and contact region could be separated for the first time. Furthermore, the impact of doped CNT bundles on the device performance has been studied. It could be shown in detail for the first time, that high off-state source-drain leakage currents can be due to bundled semiconducting CNTs and does not necessarily imply the presence of metallic CNTs. The within the framework of this thesis designed and realized HF CNTFETs are operating in the GHz range with cut-off frequencies up to 14 GHz and maximum frequencies of oscillation up to 6 GHz at a channel length of 280 nm. Moreover, the impact of the spacer between the source-/ drain- to the gate electrode on the HF properties of the CNTFETs has been investigated experimentally for the first time. Simulations by others have successfully confirmed that a symmetrical reduction of the source to gate electrode spacer results in an increased device speed. By asymmetrically reducing the source to gate electrode spacer and in parallel increasing the drain-to-gate electrode spacer the device speed can be further enhanced. Moreover, within this work it has been experimentally indicated for the first time that the device properties of HF CNTFETs can be tuned by different device geometries towards either highest linearity or speed.

No description available.

No description available.

Within the scope of this thesis, a theoretical study of liquid flow in graphitic nanopores was performed. More precisely, a combination of numerical simulations and analytic approach was used to establish the special properties of carbon nanotubes for fluid transport: Molecular dynamics flow simulations of different liquids in carbon nanotubes exhibited flow velocities that are 1-3 orders of magnitude higher than predicted from the continuum hydrodynamics framework and the no-slip boundary condition. These results support previous experiments performed by several groups reporting exceptionally high flow rates for water in carbon nanotube membranes. The reason for this important flow enhancement with respect to the expectation was so far unclear. In this work, a careful investigation of the water/graphite friction coefficient which we identified as the crucial parameter for fast liquid transport in the considered systems, was carried out. In simulations, the friction coefficient was found to be very sensitive to wall curvature: friction is independent of confinement for water between flat graphene walls with zero curvature, while it increases with increasing negative curvature (water at the outside of the tube), and it decreases with increasing positive curvature (water inside the tube), eventually leading to quasi frictionless flow for water in a single file configuration in the smallest tubes. A similar behavior was moreover found with several other liquids, such as alcohol, alcane and OMCTS. Furthermore, a theoretical approximate expression for the friction coefficient is presented which predicts qualitatively and semi-quantitatively its curvature dependent behavior. Moreover, a deeper analysis of the simulations according to the proposed theoretical description shed light on the physical mechanisms at the origin of the ultra low liquid/solid friction in carbon nanotubes. In fine, it is due to their perfectly ordered molecular structure and their atomically smooth surface that carbon nanotubes are quasi-perfect liquid conductors compared to other membrane pores like, for example, nanochannels in amorphous silica. The newly gained understanding constitutes an important validation that carbon nanotubes operate as fast transporters of various liquids which makes them a promising option for different applications like energy conversion or filtration on the molecular level.

In this thesis work, a systematic quantitative study has been undertaken, on the performance of etched fiber Bragg Grating (FBG) sensors in the investigation of surface molecular adsorption in real-time; it is shown that the limit of detection (LOD) of FBGs etched below 2 microns diameter, is better compared to prominent optical label-free molecular sensing techniques such as Surface Plasmon Resonance (SPR). Novel fiber optic sensors based on FBG and etched FBG with various nano materials (polyelectrolytes, carbon nanotubes, hydrogel, metals and chalcogenides) coated on the surface of the core or cladding, have been proposed for sensing multi parameters such as pH, protein, humidity, gas, strain, temperature, and light etc. Besides being reproducible and repeatable, the proposed methods are fast, compact, and highly sensitive. A novel optical instrument has also been developed to measure angular deviation, binocular deviation and refractive index of glass slabs, and liquids, based on a shadow casting technique. This method uses the deviation in the geometrical shadow cast by a periodic dot pattern trans-illuminated by a distorted light beam from the transparent test specimen relative to a reference pattern.

Ce travail a porté sur la caractérisation et la quantification en 3D de la répartition de charges de différents types (nanoparticules, nanotubes, etc.) dans des matrices polymères. Nous nous focalisons sur les techniques de tomographie en microscopie électronique. Une approche multiple en tomographie électronique a été réalisée : la tomographie en FIB/MEB (faisceau d’ions focalisé/microscope électronique à balayage), la tomographie en MEB et la tomographie en MET (microscope électronique en transmission). Les nanocomposites polymère sont généralement élaborés aux fins d’améliorer les propriétés physiques (mécanique, électrique, etc.) du matériau polymère constituant la matrice, grâce à une addition contrôlée de charges nanométriques. La caractérisation de tels matériaux, et l’établissement de corrélations précises entre la microstructure et les propriétés d’usage, requièrent une approche tri-dimensionnelle. En raison de la taille nanométrique des charges, la microscopie électronique est incontournable. Deux systèmes de nanocomposite polymère ont été étudiés par une approche multiple de tomographie électronique : P(BuA-stat-S)/MWNTs (copolymère statistique poly (styrène-co-acrylate de butyl) renforcé par des nanotubes de carbone multi-parois), et P(BuA-stat-MMA)/SiO2 (copolymère statistique poly(butyl acrylate-co-methyl methacrylate) renforcé par des nanoparticules de silice). Par combinaison de divers techniques, la caractérisation et la quantification des nanocharges ont été possibles. En particulier, la taille, la fraction volumique et la distribution des charges ont été mesurées. Cette étude a ainsi fourni des informations en 3D qui contribuent à mieux comprendre les propriétés des nanocomposites. Une attention particulière a été portée aux artefacts et causes d’erreur possibles durant l’étape de traitement 3D. Nous avons également essayé de comparer les différentes techniques utilisées du point de vue de leurs avantages et inconvénients respectifs, en dégageant des possibilités d’amélioration future. / This work is focused on the characterization and quantification of the 3D distribution of different types of fillers (nanoparticles, nanotubes, etc.) in polymer matrices. We have essentially used tomography techniques in electron microscopy. Multiple approaches to electron tomography were performed: FIB-SEM (focused ion beam/scanning electron microscope) tomography, SEM tomography and TEM (transmission electron microscope) tomography. Polymer nanocomposites are basically synthesized in order to improve the physical properties (mechanical, electric, etc.) of the pure polymer constituting the matrix, by a controlled addition of fillers at the nanoscale. The characterization of such materials and the establishment of accurate correlations between the microstructure and the modified properties require a three-dimensional approach. According to the nanometric size of the fillers, electron microscopy techniques are needed. Two systems of polymer nanocomposites have been studied by multiple electron tomography approaches: P(BuA-stat-S)/MWNTs (statistical copolymer poly(styrene-co-butyl acrylate) reinforced by multi-walled carbon nanotubes) and P(BuA-stat-MMA)/SiO2 (statistical copolymer poly(butyl acrylate-co-methyl methacrylate) reinforced by silica nanoparticles). By combining various techniques, the characterization and the quantification of nanofillers were possible. In particular, statistics about size, distribution and volume fraction of the fillers were measured. This study has then provided 3D information, which contributes to a better understanding of properties of the nanocomposites. Attention has been paid to analyze carefully original data, and artifacts and causes of errors or inaccuracy were considered in the 3D treatments. We also attempted to compare benefits and drawbacks of all techniques employed in this study, and perspectives for future improvements have been proposed.

Die vorliegende Arbeit beschäftigt sich mit den Transporteigenschaften defektbehafteter Kohlenstoffnanoröhrchen (CNTs). Als Beispiel werden dabei einfache und doppelte Fehlstellen betrachtet. Der Fokus liegt auf der Berechnung des Transmissionsspektrums und der Leitfähigkeit mit einem schnellen, linear skalierenden rekursiven Greenfunktions-Formalismus, mit dem große Systeme quantenmechanisch behandelt werden können. Als Grundlage wird ein dichtefunktionalbasiertes Tight-Binding-Modell verwendet. Der Einfluss der Defektdichte und des CNT-Durchmessers wird im Rahmen einer statistischen Analyse untersucht. Es wird gezeigt, dass im Grenzfall kleiner Transmission die Leitfähigkeit exponentiell mit der Defektanzahl skaliert. Das System befindet sich im Regime starker Lokalisierung, wobei die Lokalisierungslänge von der Defektdichte und dem CNT-Durchmesser abhängt.

(ULSI) causes an increase of the resistance of the wiring system by increased scattering of electrons at side walls and grain boundaries in the state of the art Cu technology, which increases the RC delay of the interconnect system and thus degrades the performance of the device. The outstanding properties of carbon nanotubes (CNT) such as a large mean free path, a high thermal conductance and a large resistance against electromigration make them an ideal candidate to replace Cu in future feature nodes. The present thesis contributes to the preparation and properties of CNT based vertical interconnections (vias). In addition, all processes applied during the fabrication are compatible to ULSI and an interface between CNT based vias and a Cu metallization is studied. The methodology for the evaluation of CNT based vias is improved; it is highlighted that by measuring the resistance of one multiwall CNT and taking into account the CNT density, the performance of the CNT based vias can be predicted accurately. This provides the means for a systematic evaluation of different integration procedures and materials. The lowest contact resistance is obtained for carbide forming metals, as long as oxidation during the integration is avoided. Even though metal-nitrides exhibit an enhanced contact resistance, they are recommended to be used at the bottom metallization in order to minimize the oxidation of the metal-CNT contact during subsequent processing steps. Overall a ranking for the materials from the lowest to the highest contact resistance is obtained: Ta < Ti < TaN < TiN « TiO2 « Ta2O5 Furthermore the impact of post CNT growth procedures as chemical mechanical planarization, HF treatment and annealing procedures after the CNT based via fabrication are evaluated. The conductance of the incorporated CNTs and the applicable electrical transport regime relative to the CNT quality and the CNT length is discussed. In addition, a strong correlation between the temperature coefficient of resistance and the initial resistance of the CNT based vias at room temperature has been observed. / Die kontinuierliche Miniaturisierung der charakteristischen Abmessungen in hochintegrierten Schaltungen (ULSI) verursacht einen Anstieg des Widerstandes im Zuleitungssystem aufgrund der erhöhten Streuung von Elektronen an Seitenwänden und Korngrenzen in der Cu-Technologie, wodurch die Verzögerungszeit des Zuleitungssystems ansteigt. Die herausragenden Eigenschaften von Kohlenstoffnanoröhren (CNT), wie eine große mittlere freie Weglänge, hohe thermische Leitfähigkeit und eine starke Resistenz gegenüber Elektromigration machen diese zu einem idealen Kandidaten, um Cu in zukünftigen Technologiegenerationen zu ersetzen. Die vorliegende Arbeit beschreibt die Herstellung und daraus resultierenden Eigenschaften von Zwischenebenenkontakten (Vias) basierend auf CNTs. Alle verwendeten Prozessierungsschritte sind kompatibel mit der Herstellung von hochintegrierten Schaltkreisen und eine Schnittstelle zwischen den CNT Vias und einer Cu-Metallisierung ist vorhanden. Insbesondere das Verfahren zur Evaluierung von CNT Vias wurde durch den Einsatz verschiedener Methoden verbessert. Insbesondere soll hervorgehoben werden, dass durch die Messung des Widerstandes eines einzelnen CNTs, bei bekannter CNT Dichte, der Via Widerstand sehr genau vorausgesagt werden kann. Dies ermöglicht eine systematische Untersuchung des Einflusses der verschiedenen Prozessschritte und der darin verwendeten Materialien auf den Via Widerstand. Der niedrigste Kontaktwiderstand wird für Karbidformierende Metalle erreicht, solange Oxidationsprozesse ausgeschlossen werden können. Obwohl Metallnitride einen höheren Kontaktwiderstand aufweisen, sind diese für die Unterseitenmetallisierung zu empfehlen, da dadurch die Oxidation der leitfähigen Schicht minimiert wird. Insgesamt kann eine Reihenfolge beginnend mit dem niedrigsten zum höchsten Kontaktwiderstand aufgestellt werden: Ta < Ti < TaN < TiN « TiO2 « Ta2O5 Desweiteren wurde der Einfluss von Verfahren nach dem CNTWachstum wie die chemischmechanische Planarisierung, eine HF Behandlung und einer Temperaturbehandlung evaluiert, sowie deren Einfluss auf die elektrischen Parameter des Vias untersucht. Die Leitfähigkeit der integrierten CNTs und die daraus resultierenden elektrischen Transporteigenschaften in Abhängigkeit der CNT Qualität und Länge werden besprochen. Ebenso wird die starke Korrelation zwischen dem Temperaturkoeffizienten des elektrischen Widerstandes und des Ausgangswiderstandes der CNT basierten Vias bei Raumtemperatur diskutiert.

L'émergence des nanotubes de carbone a ouvert de nouveaux champs d'application dans le domaine des matériaux polymères. L'ajout de ces charges carbonées au sein de polymères permet la mise en œuvre de composites aux propriétés électriques optimisées. La conductivité de ces matériaux dépend en grande partie de l'organisation des charges dans la matrice, notamment de la présence de réseaux percolants. L'objectif du présent travail de thèse est de comprendre les mécanismes de structuration des nanotubes de carbone au sein de différents milieux. L'architecture de ces réseaux de charges a principalement été révélée par le biais de mesures électriques et diélectriques. L'originalité de nos travaux réside dans l'utilisation de matrices liquides, notamment des huiles de silicone, afin de s'affranchir des contraintes présentes dans les plastiques d'une part, et de simplifier les processus de mise en œuvre d'autre part. Le manuscrit de thèse est articulé autour de six chapitres. Une première partie bibliographique aborde les propriétés des nanotubes de carbone ainsi que les phénomènes que sont la percolation et la percolation dynamique. Le second chapitre, matériel & méthode, présente les matériaux employés ainsi que les différentes techniques de caractérisation utilisées au cours de la thèse. Le troisième chapitre de la thèse aborde, à travers des mesures de conductivité, la percolation dynamique des nanotubes de carbone sein d'huiles de silicone. Le chapitre 4 propose une modification la loi de puissance de Kirkpatrick, afin de décrire la conductivité en fonction du temps et du taux de charge. L'exposant critique de percolation, caractérisant la transition isolant conducteur, se révèle être un indicateur de l'état de dispersion des nanotubes à travers la matrice. Le chapitre 5 démontre la possibilité de contrôler l'organisation des charges par l'application d'un champ électrique. L'application d'un champ élevé permet une augmentation de plusieurs ordres de grandeur de la conductivité ainsi qu'une diminution des charges nécessaire à la formation d'un réseau percolant. Nous avons notamment déterminé des seuils de percolation de l'ordre de 0.005% massique en nanotube de carbone. Enfin, l'influence des propriétés intrinsèques de la matrice, telles la viscosité et la tension de surface, est étudié dans le chapitre 6. La dispersion des nanotubes de carbone s'avère être favorisée au sein de liquides ayant des tensions de surface proches de celle des tubes. Au contraire, une agrégation de charge est rapidement observée dans le cas ou la différence de tension de surface charge-matrice est importante. Nous avons également observé que la percolation des nanotubes est défavorisée au sein de milieux visqueux. / The rise of carbon nanotube has open possibility for composites polymers. Mixing this carbonaceous filler with polymer medias leads to an optimization of the electrical properties. Then, conductivity mainly depends of the filler architecture, especially the presence of percolating networks. The objective of this work is to understand the percolation mechanisms of the carbon nanotubes in different media. During this study, filler network has been revealed by the mean of electrical and dielectrical measurements. The originality of our work lies in the use of liquid matrices, such as silicone oils, in order to overcome the stresses in the plastic on the one hand, and to simplify the processing in other hand. This thesis is organized around six chapters. The first bibliographic part discusses the carbon nanotubes properties as well as percolation and dynamic percolation phenomena. The second chapter, matériel & méthode, presents the materials used and the different characterization techniques employed. The third chapter of the thesis talks about dynamic percolation of carbon nanotubes in silicone oil, probed by conductivity measurements. Chapter 4 provides a change of the power law Kirkpatrick to describe the conductivity as a function of time and filler content. The critical exponent of percolation is proving to be an indicator of the dispersion state of nanotubes throughout the matrix. In the Chapter 5, electric field is depicted as a tool to control the organization of fillers. The application of a high field increases the conductivity of several orders of magnitude and decreases the percolation threshold. Percolation thresholds close to 0.005 wt % have been determined. At last, the influence of the intrinsic properties of the matrix, such as viscosity and surface tension, is discussed in Chapter 6. Carbon nanotubes dispersion appears to be favored if the difference of surface tension between filler and liquid is low. In contrast, a filler aggregation is rapidly observed in the case where the difference in surface tension is important. We also observed that the percolation of the nanotubes is favored in viscous media.