Kohlenstoffnanoröhrchen (engl. carbon nanotube, CNT) sind vielversprechende Kandidaten für den Ersatz von Kupferleitbahnen die bei weiterer Strukturverkleinerung von integrierten Schaltkreisen notwendig wird. In dieser Arbeit wird mit Hilfe von ab-initio Simulationen auf Basis der Dichtefunktionaltheorie die elektronische Struktur von halbleitenden CNTs beispielhaft anhand des (8,4)-CNTs untersucht. Nach Besetzung des CNT mit Metallatomen, hier Kobalt, zeigen sich massive Änderungen der Bandstruktur. Es reichen bereits überraschend kleine Mengen des Metalls aus, um einen starken Effekt zu erreichen. Die Änderungen der elektronischen Struktur sind stark abhängig von der genauen Position der Metallatome relativ zum Kohlenstoffgerüst der CNTs, der Einfluss der mechanischen Verformung des CNTs als Reaktion auf die Anlagerung ist hingegen sehr gering. Die relevanten Bänder der Kobaltatome liegen leicht unterhalt der Fermi-Energie und sorgen bei der Integration in die Bandstruktur des CNTs für die Schließung der Bandlücke und somit für die Transformation eines vorher halbleitenden CNTs in ein leitendes. Diese Transformation konnte auch mit Simulationsrechnungen zum Elektronentransport bestätigt werden. Ferner wurden bei weiteren Rechnungen eine ausgeprägte Spinabhängigkeit der Bandstruktur ermittelt, welche noch weiterer Untersuchung bedarf.

Carbon nanotubes (CNTs) are a highly promising material for future interconnects. It is expected that the decoration of CNTs with Cu particles or also the filling of the interspaces between the CNTs with Cu instead of the currently used SiO2 can enhance the performance of CNT-based interconnects. Due to the high aspect ratio of CNTs an appropriate deposition technique has to be applied which is able to coat such structures uniformly. The current work is therefore considered with thermal atomic layer deposition (ALD) of CuxO from the liquid Cu (I) β-diketonate precursor [(nBu3P)2Cu(acac)] and wet oxygen at 135°C on variously pretreated multi-walled CNTs. The different in-situ pre-treatments of the CNTs with oxygen, water vapor and wet oxygen in a temperature range from 100 to 300°C at a pressure of 1.33 mbar have been carried out prior to the ALD to enable uniform nucleation on the otherwise chemical inert CNT surface. The reduction of the CuxO as well as the filling of the space between the CNTs is not part of this work. Variations of the oxidation temperature as well as the oxidation agents resulted in different growth modes of the CuxO. An oxidation with wet oxygen at 300°C yielded in a partially layer like growth of the CuxO. It is expected that this growth mode is connected to a partial destruction of the outer CNT shell due to the oxidation. However, the damage introduced to the CNTs was not high enough to be detected by Raman spectroscopy. For all other investigated pretreatments, the formation of nanoparticles (NPs) was observed by electron microscopy. This formation of CuxO NPs can be explained by the metal-tube-interaction. Furthermore, the NPs probably decorate defect sites of the CNTs due to their higher reactivity. Additionally, analysis of energy-dispersive X-ray spectroscopy and spectroscopic ellipsometry measurements suggests that the used precursor [(nBu3P)2Cu(acac)] requires reactive oxygen surface groups for initiating the ALD growth. The observation of layer-like growth of CuxO on CNTs pretreated with wet oxygen at 300°C appears promising for deposition processes of Cu seed layers on CNTs. However, more aggressive pretreatments at higher temperatures or with more aggressive oxidation agents could be required to enable layer like growth on the entire CNTs.

Since the rediscovery of carbon nanotubes (CNTs) due to the publication of Sumio Iijima's article Helical microtubules of graphitic carbon in the magazine Nature in 1991 the interest in carbon nanotubes has rapidly increased. This bachelor thesis also deals with this popular material with the aim to functionalize CNTs for further uses in the microelectronic industry. A promising approach is the functionalization of the CNTs with metal nanoparticles or metal films. To achieve this, one can perform an atomic layer deposition (ALD) on CNTs. In the present work the Trimethylaluminum (TMA) ALD is the chosen process for the functionalization of the CNTs, which will be studied here. Since the available knowledge on the CNT-functionalization by gas phase reactions is very limited, a theoretical study of possible reaction pathways is necessary. Those studies are carried out with two modern quantumchemical programs, Turbomole and DMol³, which are described together with an introduction into Density Functional Theory, as well as an introduction of CNTs and the ALD process. A basic model of a CNT with a Single Vacancy defect, which had been selected according to the demands of the studies, is introduced. Because the TMA ALD process requires hydroxyl groups as its starting point, not only is the performance of a TMA ALD cycle on a CNT studied, but also reactions which result in the CNTs owning of hydroxyl groups. Consequently, this bachelor thesis will focus on two di erent aspects: The performance of one TMA ALD cycle and the study of possible educts for the TMA ALD process. This study of the educts includes possible structures which can be formed when a CNT comes into contact with air.:Abstract 1. Introduction 2. Carbon Nanotubes and the Atomic Layer Deposition 2.1. Carbon Nanotubes 2.1.1. Graphene and Its Relation to Carbon Nanotubes 2.1.2. Classi cations 2.1.3. Defects 2.2. Atomic Layer Deposition 2.2.1. Introduction to Atomic Layer Deposition 2.2.2. Trimethylaluminum Atomic Layer Deposition 3. Theoretical Background 3.1. The Schrödinger Equation and the Variational Principle 3.2. Electron Density 3.2.1. The Wave Function 3.2.2. The Electron Density 3.3. The Hohenberg-Kohn Theorems 3.3.1. The First Hohenberg-Kohn Theorem 3.3.2. The Second Hohenberg-Kohn Theorem 3.4. The Kohn-Sham Approach 4. Computational Details and the Model System 4.1. Model System 4.1.1. The Basic (5; 5)-CNT 4.1.2. Further Adjustments to the Basic (5; 5)-CNT 4.2. Computational Details 4.2.1. Materials Studio/Dmol³ 4.2.2. Turbomole 5. Results and Discussion 5.1. Educt Formation Reactions 5.1.1. Educts with Two Oxygen Atoms 5.1.2. Educts with Two Hydroxyl Groups and One Oxygen Atom 5.1.3. Educts with Two Hydroxyl Groups and Two Hydrogen Atoms 5.1.4. Educts with Four Hydroxyl Groups 5.1.5. Educts with Peroxy Groups 5.1.6. Summary - Educts 5.2. Performance of the First Trimethylaluminum Atomic Layer Deposition Cycle 5.2.1. The First Trimethylaluminum Atomic Layer Deposition Half Cycle 5.2.2. The Second Trimethylaluminum Atomic Layer Deposition Half Cycle 6. Summary and Outlook A. Appendix A.1. Note on the Multiplicity A.2. Note on the Computation Time A.3. Comparison between Dmol³ and Turbomole A.4. Tables of Energies for the Studied Educts in 5.1 A.5. Tables of Energies for the Study of the Trimethylaluminum Atomic Layer Deposition Cycle in 5.2 Bibliography Acknowledgment

Kohlenstoffnanoröhrchen (engl. carbon nanotubes, CNTs) sind Dank ihrer außergewöhnlichen elektrischen Eigenschaften Kandidaten für eine Vielzahl von Anwendungen im Bereich der Mikroelektronik. Ihre ballistischen Transporteigenschaften und die geringe Anfälligkeit auf Elektromigration sind vorteilhaft für die Anwendung von CNTs in Interconnectsystemen. Die Abhängigkeit der elektrischen Transporteigenschaften von mechanischer Verformung bildet weiterhin die Grundlage für die Produktion neuartiger Sensoren auf CNT-Basis. Durch die Besetzung mit Adatomen können diese Eigenschaften dabei weiter verbessert und bei der Herstellung gezielt eingestellt werden. Die Verformung besetzter CNTs ist dabei ein noch relativ unerforschtes Gebiet. In dieser Arbeit wird dieses Verhalten untersucht. Zu Beginn wird gezeigt, dass die Eigenschaften von CNTs durch die Besetzung mit verschiedenen Metallen auf unterschiedliche Weise beeinflusst werden können. Dazu gehören auch Unterschiede zwischen den Spinzuständen, welche bei einigen der untersuchten Metalle auftreten. Durch die axiale Verformung der CNTs wird abschließend gezeigt, dass die Sensoreigenschaften von CNTs auch nach der Besetzung mit Metallen erhalten bleiben.:Zusammenfassung 1. Einleitung 2. Übersicht über Kohlenstoffnanoröhrchen 2.1. Geometrische Eigenschaften 2.1.1. Kohlenstoff als Grundbaustein für Graphen und CNTs 2.1.2. Geometrie von CNTs ausgehend von Graphen 2.2. Elektrische Struktur von Graphen und CNTs 2.3. Piezoelektrisches Verhalten 3. Theoretische Grundlagen 3.1. Dichtefunktionaltheorie 3.1.1. Grundproblem und Motivation 3.1.2. Grundstein der DFT - das Hohenberg-Kohn-Theorem 3.1.3. Praktische Umsetzung - die Kohn-Sham-Gleichungen 3.1.4. Abschätzung des Austausch-Korrelations-Funktionals 3.2. Grundlagen zum elektrischen Transport 3.2.1. Kurze Einführung zu Transportrechnungen 3.2.2. Landauer-Büttiker-Formalismus 4. Numerische Methoden 4.1. Initialisierung und Manipulation der Strukturen 4.2. Umsetzung der DFT 5. Berechnungen und Ergebnisse 5.1. Wahl des Modellsystems 5.1.1. Das zu untersuchende CNT 5.1.2. Auswahl der Adatome 5.2. Wahl der Parameter 5.3. Einige Überlegungen zum unbesetzten (8,4)-CNT 5.4. Untersuchung der Gleichgewichtspositionen 5.5. Analyse der Bandstruktur des besetzten CNTs 5.6. Einfluss auf Leitfähigkeit und Widerstand 5.7. Untersuchung der Spineigenschaften 5.8. Besetzungsgrad von Pd 5.9. Verformung der funktionalisierten CNTs 5.9.1. Implementation 5.9.2. Veränderungen der Struktur 5.9.3. Verhalten der Bandlücke bei einfacher Besetzung 5.9.4. Verhalten der Bandlücke bei mehrfacher Besetzung 5.9.5. Vergleich der verschieden besetzten CNTs bei Streckung 5.9.6. Verhalten des elektrischen Widerstandes bei Streckung 6. Zusammenfassung der Ergebnisse und Ausblick Literaturverzeichnis A. Bandstrukturen bei Verformung B. Transmissionsfunktionen für Besetzungsgrade C. Danksagung D. Selbstständigkeitserklärung

The goal of the current paper is to synthesize and characterize composites based on carbon nanotubes and metal oxides. Multiwalled CNT were synthesized within the pores of anodic aluminum oxide and nanotubular structures of titanium dioxide on the course of this study. There were the methods to obtain a catalyst for synthesis process such as electrochemical deposition, sol-gel technique and sputtering. The synthesis variations based on sol-gel technique and magnetron sputtering resulted in obtaining of CNT@AAO and CNT@TiO2-NT composites respectively. The research of carbon samples by Raman spectrometry was conducted. Characterization of obtained composites by electron microscopy method was done. The analysis of gathered SEM images by specialized software package SIAMS was made. Studies of CNT@TiO2-NT composites by means of impedance spectroscopy method were held. Thus the methodology for CNT@AAO and CNT@TiO2-NT composites synthesis had been developed. Advantages of reviewed techniques regarding ones known at scientific society were indicated. Developed synthesis methods are applied in lab works of Masters with specialization «Electronics and nanoelectronics». / Целью работы являлся синтез и аттестация композитов на основе углеродных нанотрубок и оксидов металлов. В ходе работы выполнен синтезмногостенных УНТ внутри пор анодированного оксида алюминия, а также в нанотубулярных структурах диоксида титана. Катализатор для проведения синтеза подготавливался тремя разными способами: методом электрохимического осаждения, золь-гель способом, напылением. Золь-гель метод приготовления катализатора позволил получить композит УНТ@АОА. Используя метод магнетронного напыления удалось синтезировать композиты УНТ@TiO2-НТ. Выполнены исследования синтезированного углеродного материала методом Рамановской спектрометрии. Аттестация полученных композитов проведена методом электронной микроскопии. С помощью программно-аппаратного комплекса анализа изображений SIAMS был проведен анализ полученных СЭМ-изображений. Проведены исследования композита УНТ@TiO2-НТ методом импедансной спектроскопии. В итоге разработана методология получения композитов УНТ@АОА и УНТ@TiO2-НТ. Отмечены достоинства данных методов относительно известных в научном сообществе. Разработанная методика синтеза используется в лабораторных работах магистров направления «Электроника и наноэлектроника».

Le remplacement des systèmes de distribution d’énergie actuels dans les avions (pneumatiques, hydrauliques, mécaniques et électriques) par des systèmes 100% électriques est un enjeu majeur dans le cadre du projet de l’avion « plus électrique ». Le processus d’électrification de l’avion conduit à une augmentation de la puissance embarquée à bord des aéronefs, et par conséquent à une augmentation de la masse du réseau filaire. Afin de pallier à cette augmentation, un nouveau matériau composite possédant des propriétés électriques supérieures à celle du cuivre a été développé dans le but d’augmenter la capacité de courant admissible dans le conducteur à section constante. Ce travail de thèse présente le procédé d’élaboration du matériau composite cuivre-nanotubes de carbone développé ainsi que les techniques de caractérisation utilisées et les résultats associés. Différents paramètres tels que la qualité de la dispersion des renforts dans la matrice, le type de nanotubes de carbone utilisés (multi-parois vs mono-paroi), la nature de l’interface créée entre le cuivre et les renforts (mécanique vs chimique) ainsi que les techniques de mise en forme du matériau (pressage uni-axial à chaud, extrusion à chaud) et de post-traitements (recuit, laminage à chaud) ont été étudiés afin d’obtenir des propriétés physiques optimales. Il en résulte une augmentation des propriétés thermiques (+6,8% pour la conductivité thermique), mécaniques (+32% pour la dureté Vickers) et également électriques - pour la première fois observée- (+3,4 % pour la conductivité électrique) et ce en comparaison avec à une matrice de cuivre pur. / The substitution of the current energy chains in aircrafts (pneumatic, hydraulic, mechanical and electrical) by a 100% electrical chain is a major issue in the field of the “more electric” aircraft. The electrification process leads to an increase of the inboard power of aircrafts, and therefore to an increase of the wired network weight. To counterbalance this increase of mass, a new composite material with higher electrical properties that copper should be considered, in order to increase the current density in the conductor at constant cross section. Several parameters have been studied such as the quality of the carbon nanotubes dispersion, the type of CNTs used (single-walled vs. multi walled), the interface between the matrix and the reinforcements (mechanical vs. chemical), the shaping of material (uni-axial hot pressing, hot extrusion process) and the post treatments processes (heat treatment, hot lamination process). An enhancement of the thermal properties (+ 6.8% of thermal conductivity), the mechanical properties (+32% of Vickers hardness) and for the first time an increase of the electrical properties (+3.4 % for the electrical conductivity) have been observed in comparison with pure copper.

Les nanofibres et nanotubes de carbone constituent des matériaux très prometteurs pour les applications microélectronique, stockage ou encore récupération d'énergie, en termes de caractéristiques électriques. Néanmoins leur intégration industrielle à court terme n'est toujours pas d'actualité, à cause de divers verrous technologiques et en particulier celui de la résistance de contact. Ces travaux de thèse se sont intéressés à la problématique du contact électrique entre électrode et nanotubes, lorsque ceux-ci sont intégrés dans des dispositifs par CVD et que le contact se forme durant la croissance. La réalisation et la caractérisation de dispositifs à nanofibres dans un premier temps a permis de mettre en évidence l'importance de la rugosité et de l'oxydation de surface de l'électrode en termes de qualité de contact. Par la suite la fabrication et les caractérisations électrique et physique de dispositifs à nanotubes essentiellement mono-paroi nous ont permis de constater que des barrières de potentiel sont également présentes aux interfaces, liées à la présence d'oxydes natifs ou issus de réactions thermodynamiquement favorables. La modélisation des caractéristiques I-V suggère également l'importance de la cristallinité des électrodes sur les paramètres des barrières. Enfin, nous avons positionné nos résultats par rapport à l'état de l'art, et discuté sur la base de nos travaux et de certains issus de la littérature des différents points-clés permettant de réduire les résistances de contact.

The following is the accepted manuscript of the original article: Marcel Melzer, Thomas Waechtler, Steve Müller, Holger Fiedler, Sascha Hermann, Raul D. Rodriguez, Alexander Villabona, Andrea Sendzik, Robert Mothes, Stefan E. Schulz, Dietrich R.T. Zahn, Michael Hietschold, Heinrich Lang and Thomas Gessner “Copper oxide atomic layer deposition on thermally pretreated multi-walled carbon nanotubes for interconnect applications”, Microelectron. Eng. 107, 223-228 (2013). Digital Object Identifier: 10.1016/j.mee.2012.10.026 Available via http://www.sciencedirect.com or http://dx.doi.org/10.1016/j.mee.2012.10.026 © 2013 Elsevier B.V. Carbon nanotubes (CNTs) are a highly promising material for future interconnects. It is expected that a decoration of the CNTs with Cu particles or also the filling of the interspaces between the CNTs with Cu can enhance the performance of CNT-based interconnects. The current work is therefore considered with thermal atomic layer deposition (ALD) of CuxO from the liquid Cu(I) β-diketonate precursor [(nBu3P)2Cu(acac)] and wet oxygen at 135°C. This paper focuses on different thermal in-situ pre-treatments of the CNTs with O2, H2O and wet O2 at temperatures up to 300°C prior to the ALD process. Analyses by transmission electron microscopy show that in most cases the CuxO forms particles on the multi-walled CNTs (MWCNTs). This behavior can be explained by the low affinity of Cu to form carbides. Nevertheless, also the formation of areas with rather layer-like growth was observed in case of an oxidation with wet O2 at 300°C. This growth mode indicates the partial destruction of the MWCNT surface. However, the damages introduced into the MWCNTs during the pre treatment are too low to be detected by Raman spectroscopy.

La historia del anarquismo en España es la de un movimiento heterogéneo, plural y de manifestaciones muy diversas. El anarquismo fue en Asturias un movimiento, igualmente diverso y pluralista, en constante rivalidad con el republicanismo y el socialismo, primero, y con el comunismo, después, desde los orígenes, hasta la Guerra Civil. Fue un movimiento principalmente sindical, de movilización de masas, además de un movimiento cultural y “político” dentro de su apoliticismo doctrinal, que representó una vía específica y caracterizada dentro de la CNT, y de ahí el interés que presenta, más allá de la pura localización geográfica de la Federación de Asturias, León y Palencia. Militantes y dirigentes manifestaron siempre una peculiar percepción de la función del anarquismo en España, que no siempre fue la de la mayoría dentro de la organización nacional. Sin embargo, nunca se plantearon abandonarla, prueba del carácter esencialmente plural y “libertario” de la CNT. / The history of Spanish anarchism rest on a pluralist and heterogeneous movement beyond their ideas or political praxis. In Asturias, the anarchism and the anarchist militants and leaders, were in constant rivalry with republicanism, socialism and communism, from the origins to the Civil War. But, in fact, the asturian anarcosindicalismo, as tradeunion movement, and the asturian anarcosindicalistas were involved on mass mobilization, also than in cultural and political aims. Their specific idea about the role of the anarchism, in general, and the CNT, in particular, on Spanish politics, not always achieved the majority support in the CNT and was the making of a deep crisis in different times. Notwithstanding that, the Federacion Regional de Asturias, León y Palencia didn´t want to think to leave the organization off, because CNT were a pluralist and “libertarian” organization.

Carbon nanotubes (CNT) and graphene have been one of the noticeable research areas in science and technology. In recent years, the assembly of these carbon nanostructures is one of the most interesting topic to the scientific world due to its variety of applications from nano to macroscale. These bulk nanostructures to be applicable in shock absorbers, batteries, sensors, photodetectors, actuators, solar cells, fuel cells etc. The present work is motivated to study the detailed compressive behavior of three dimensional cellular assemblies of CNT and graphene. The CNT foams are synthesized by chemical vapor deposition method. It is interesting to study the compressive behavior of CNT foam in the presence external magnetic field applied perpendicular to CNT axis. The peak stress and energy absorption capability of CNT foam enhances by four and nearly two times in the presence of magnetic field as compared to the absence of the magnetic field. In the absence of magnetic field the deformation of CNT foam is obtained elastic, plateau and densification regions. Further CNT foam is loaded with iron oxide nanoparticles of diameter is ~ 40nm on the surface and detailed study of the compressive behavior of the foam by varying iron nanoparticles concentration. The peak stress and energy absorption capability of CNT foam initially decreases with increasing the intensity of the magnetic field, further increases the intensity of the magnetic field the maximum stress and energy absorption capability increases which is due to magnetic CNT and particles align in the direction of the magnetic field. CNT surfaces were further modified by fluid of different viscosities. The mechanical behavior of CNT foam filled with fluids of varying viscosities like 100%, 95% and 90% glycerol and silicone oil are 612, 237, 109 and 279 mPa-s respectively. The mechanical behavior of CNT foam depends on both the intensity of magnetic field and fluid viscosity. The non linear relation between peak stress of CNT and magnetic field intensity is σp(B, η) = σ0 ± α(B-B0) where σ0 is the peak stress at B = B0 , η is the fluid viscosity, parameter α depends on properties of the MR fluid and B0 is an optimum magnetic field for which peak stress is maximum or minimum depending on the fluid viscosity. Graphene is assembled into a three dimensional structure called graphene foam. The graphene foam is infiltrated with polymer and study the detailed compressive behavior of graphene foam and graphene foam/PDMS at different strains of 20, 40, 60 and 70%. The maximum stress and energy absorption capability of graphene foam/PDMS is six times higher than the graphene foam. Also the graphene foam/PDMS is highly stable and reversible for 100 cycles at strains of 30 and 50%. The mechanical behavior of CNT, graphene foam, CNT/PDMS and graphene foam/PDMS is compared. Among all the foams, graphene foam/PDMS has shown the highest elastic modulus as compared to other foams. This behavior can be attributed to the wrinkles formation during the growth of graphene and a coupling between PDMS and interfacial interactions of graphene foam. Therefore it suggests potential applications for dampers, cushions and electronic packaging. Furthermore, the interaction between nanoparticles and polymer in a novel architecture composed of PDMS and iron oxide nanoparticles is studied. The load bearing capacity of uniform composites enhanced by addition of nanoparticles, reaching to a maximum to 1.5 times of the PDMS upon addition of 5wt.% of nanoparticles, and then gradually decreased to 1/6th of PDMS upon addition of 20wt.% of nanoparticles. On the other hand, the load bearing capacity of architectured composites at high strains (≥40%) monotonically increased with addition of nanoparticles in the pillars.