Les futures générations de microbatteries devant fonctionner à des tensions plus faibles, ces travaux sont dédiés à l’étude de matériaux d’électrodes en couche mince pour accumulateurs au Na et Na-ion pouvant répondre à ce nouveau cahier des charges. Ce manuscrit décrit ainsi le choix, l’élaboration et la caractérisation de matériaux d’électrode massifs et en couches minces. Les matériaux présentés ont été sélectionnés pour leur potentiel de fonctionnement et du mécanisme régissant l’insertion des ions alcalins. Pour chaque matériau, notre démarche a impliqué l’élaboration d’une cible permettant le dépôt par pulvérisation cathodique magnétron RF. Les différents paramètres de dépôt ont été optimisés pour obtenir les propriétés physico-chimiques et électrochimiques désirées et dresser une comparaison entre la configuration massive et en couche mince. L’étude du Fe2(MoO4)3 montre les différences de mécanismes selon l’ion alcalin employé. Le bismuth (mécanisme d’alliage), étudié en couches minces, nous a permis d’élucider des réactions électrolytiques parasites ; nos travaux s’attardant également sur les composés NaBi et Na3Bi. Enfin, cette thèse présente 2 sulfures, le matériau « de conversion » FeS2 et un nouveau matériau lamellaire : le Na2TiS3. / As the next generations of microbatteries are expected to power microelectronics devices working at lower voltages, we address the elaboration and characterization of electrode materials for sodium microbatteries. The described materials were selected according to several criterions including their working potentials and insertion mechanisms. For each material, the deposition of thin films was performed using RF magnetron sputtering, the deposition parameters being optimised in order to reach the targeted properties and to highlight the special features of thin film electrodes. The study of the intercalation compound Fe2(MoO4)3 shows the differences in mechanism between Li and Na insertion; while the alloying compound Bi undergoes parasitic electrolytic reactions. Our work also addresses two sulphides: the conversion compound FeS2 and the new layered material Na2TiS3.

Made available in DSpace on 2016-12-08T17:19:38Z (GMT). No. of bitstreams: 1 VIVIANE LILIAN SOETHE.pdf: 4187786 bytes, checksum: ad2945f377ee8ffa2972dbc25afd42a0 (MD5) Previous issue date: 2004-03-25 / Coordenação de Aperfeiçoamento de Pessoal de Nível Superior / The Triode Magnetron Sputtering (TMS) is a system of depositing film characterized by the introduction of a third electrode, which is made up of a grounded mobile screen, located between the cathode (target) and the anode (substrate). The purpose of this screen is to capture cold electrons (at a lower energy level) of discharge. Changing its relative position to the cathode, some of the characteristics of the plasma are changed such as the ignition tension. Based on this, a study was made investigating the relationship between the current and the target voltage by changing the positioning of the screen to the target. Through this study, we could verify that, it s possible to work independently with either of above parameters of deposition. As a result of controlling these parameters, we could verify that the deposition of quality metallic films is possible, by using a TMS equipment on polymeric substrates. By choosing the suitable conditions of deposition, based on a preliminary study, a deposition of Al film on a poly(ethylene terephthalate) substrate was made. It was observed through this study that these films prove to be structurally whole and with few faults. The maintenance of a constant current (0,5A) fir deposition of Al films on polymeric substrates indicates that the change in voltage alters mainly the deposition energy particles, not significantly the superficial property of films. We can still observe that the rate of deposition does not alter significantly with voltage increase, what is evidenced by the little temperature increase in the samples. The Al films deposited submitted to a constant voltage (-700V) displayed a distinct superficial topography due to the current used. The current variation influence was verified notably for the final structure of the deposited film. Besides this, this parameter is directly related to the deposition rate, this being responsible for a temperature increase of the sample caused by increase of condensation heat of deposited atoms. Thus we can say that the sample temperature is more influenced by target current than by target voltage. So, we can observe that depositions made under constant current cause less aggression to polymer and to deposited film than those made under constant voltage. Through TMS, it is possible to control deposition condition and consequently the deposition rate in an accurate way. This makes this method an efficient alternative to metallic film deposition. In view of above, an application of the study of deposited film on polymers was made, altering either the current or voltage of target. Films of Al an Inconel were deposited on Mylar® , a type of PET, with the purpose of investigating film behavior concerning its attenuation characteristics of 4 incident electromagnetic energy. This application range is very wide, including aerospace equipment, radars an so on. When the rate of deposition for the condition used is known, the thickness of film can be altered by varying the time of deposition. A study was conducted of the influence of layer thickness and film material (Al or Inconel) on the characteristics of attenuation of electromagnetic wave energy. According to studies, it was observed that deposited layer thickness and film material influenced attenuating characteristics, so that Al and Inconel deposited films showed a maximum 13% attenuation. This leads us into believing that metallic films can be used with electromagnetic radiation absorbing materials, as long as ideal work thickness and its intrinsic characteristics are known. / O Triodo Magnetron Sputtering (TMS) é um sistema de deposição de filmes caracterizado pela introdução de um terceiro eletrodo, que é constituído de uma tela móvel aterrada, situado entre o catodo (alvo) e o anodo (substrato). Esta tela tem o papel de capturar elétrons frios (menos energéticos) da descarga. Alterando-se a posição relativa desta tela ao catodo, alteram-se algumas das características do plasma como, por exemplo, a tensão de ignição. Baseado nisso, realizou-se um estudo investigando-se a relação entre a corrente e a voltagem do alvo alterando-se a posição relativa da tela ao alvo. Por meio deste estudo, pode-se verificar que é possível tornar independentes estes dois parâmetros de deposição para uma determinada faixa de trabalho. Devido ao controle destes parâmetros, verificou-se que é possível depositar filmes metálicos de qualidade, utilizando um equipamento de TMS sobre substratos poliméricos. Através da escolha adequada das condições de deposição, baseadas no estudo realizado anteriormente, realizou-se a deposição de filmes de Al sobre um substrato de poli(Tereftalato de Etileno). Pode-se observar por meio deste estudo que estes filmes apresentam-se estruturalmente íntegros e com pouca quantidade de defeitos. As deposições de filmes de Al sobre substratos poliméricos mantendo-se a corrente constante (0,5A) indica que a mudança na voltagem altera principalmente a energia das partículas que se depositam, não modificando de forma significativa as propriedades superficiais dos filmes. Pode-se observar ainda que a razão de deposição não sofre alterações significativas com o aumento da voltagem, o que é evidenciado pela pequena elevação da temperatura sofrida pelas amostras. Os filmes de Al depositados sob voltagem constante (-700V) apresentaram topografia superficial distinta em função da corrente utilizada. Pode-se verificar que a variação da corrente influencia de forma significativa a estrutura final do filme depositado. Além disso, este parâmetro está diretamente relacionado com a razão de deposição, sendo este o fator responsável pelo aumento na temperatura da amostra devido a elevação no calor de condensação dos átomos que se depositam. Pode-se desta forma, dizer que a temperatura da amostra é mais influenciada pela corrente que pela voltagem do alvo. Assim, é possível observar que deposições realizadas sob corrente constante provocam menor agressão ao polímero e ao filme depositado que aquelas realizadas sob voltagem constante. Por meio do TMS, é possível controlar-se as condições de deposição e conseqüentemente a razão de deposição de maneira precisa, o que proporciona um controle da camada depositada. Isto faz deste 2 método uma alternativa eficiente para a deposição de filmes metálicos, passível de ser utilizado em muitos ramos de pesquisa. Atentando-se a este fato, realizou-se uma aplicação do estudo dos filmes depositados sobre polímero, alterando-se a corrente ou a voltagem do alvo independentemente. Para isso depositaram-se filmes de Al e Inconel (liga de níquel cromo) sobre Mylar®, um tipo de PET (poli (Tereftalato de etileno)), com a finalidade de investigar o comportamento deste filme quanto as suas características de atenuação de energia eletromagnética incidente. Esta aplicação é bastante vasta envolvendo equipamentos aeronáuticos, radares, e outros. Conhecida a razão de deposição da condição utilizada, pode-se alterar a espessura do filme obtido variando-se o tempo de deposição. Assim, fez-se um estudo da influência da espessura da camada e do material que constitui o filme (Al ou Inconel) nas características de atenuação de energia da onda eletromagnética. De acordo com os estudos, pode-se verificar que a espessura da camada depositada, e o material do filme influenciam nas características atenuadoras, sendo que os filmes de Al e Inconel depositados apresentaram uma atenuação de no máximo 13% . Isto nos leva a crer que filmes metálicos podem ser utilizados com materiais absorvedores de radiação eletromagnética, desde que se conheça a espessura ideal de trabalho e outras características intrínsecas do mesmo.

Le but de ce travail est d'élaborer de nouveaux revêtements anti-usure à base de nitrure de chrome, de carbure et de carbonitrure de titane par dépôt physique en phase vapeur afin d'améliorer la résistance à l'usure à sec des outils de coupe du bois.Des revêtements binaires de CrN et de MoN, ternaires de Cr-Mo-N et de Ti-W-C et quaternaires de Ti-W-C-N ont été déposés sur des outils de coupe en carbure de tungstène et en acier et sur des substrats de silicium par pulvérisation magnétron RF en utilisant différentes cibles (Cr, Mo, Ti et WC) sous différentes atmosphères (Ar, Ar + N2, Ar + CH4 et Ar + N2 + CH4).L'influence de la pression de travail, des ratios des gaz plasmagènes, des tensions d'auto-polarisation des cibles, de la température des substrats et de celle du recuit sur les propriétés des revêtements ont été étudiées, en utilisant l'EDS, la WDS, l'XPS, la DRX, le MEB, le MET, l'AFM, la microscopie optique, l'interférométrie optique (2D et 3D), le Scratch test, l'essai Daimler, la nanoindentation et la tribométrie alternative et rotative. L'objectif est d'établir une corrélation entre le comportement tribologique des revêtements étudiés et leurs propriétés physico-chimiques et mécaniques.Les revêtements optimaux présentant la meilleure résistance à l'usure à sec ont été testés en usinage de l'épinette noire à l'échelle industrielle dans des conditions sévères (-20/-25 °C). Les résultats montrent que grâce à l'emploi des revêtements de Cr-Mo-N, Ti-W-C et de Ti-W-C-N, la durée de vie des outils coupants a été augmentée de 47 à 77 % par rapport à l'outil non revêtu.Mots clés: revêtement, (Cr-Mo)N, (Ti-W)(C,N), propriétés physico-chimiques, propriétés mécaniques, comportement tribologique, usinage bois / The objective of the present work is to deposit new protective coatings based on chromium nitride, titanium carbide and carbonitride by using physical vapor deposition in order to improve the dry wear resistance of wood cutting tools.Binary CrN, and MoN layers, ternary Cr–Mo–N and Ti-W-C films and quaternary Ti-W-C-N coatings were deposited on carbide inserts, iron cutting tools and silicon substrates by dual radio–frequency (RF) magnetron sputtering using different targets (Cr, Mo, Ti and WC) in different atmospheres (Ar, Ar+N2, Ar+CH4 and Ar+N2 +CH4).The influence of the working pressure, gas ratio, targets voltage, deposition temperature and heat temperature on the coating's properties has been studied by EDS, WDS, XPS, XRD, SEM, TEM, AFM, optical microscopy, 2D and 3D interferometric profilometer, Scratch test, Daimler test, nanoindentation, alternative and rotary tribometer. The objective is to correlate the tribological behavior of the studied coatings and their physico-chemical and mechanical properties.The coatings showing the best wear resistance against dry wear have been tested in industrial wood machining (-20/-25 °C). Results showed that Cr-Mo-N, Ti-W-C and Ti-W-C-N coating have improved the cutting tool's life from 47 to 77 % compared to uncoated one,Keywords: Coatings, (Cr-Mo)N, (Ti-W)(C,N), physico-chemical properties, mechanical properties, tribological behavior, wood machining

Les piles à membrane polymère à échange de protons (PEMFC) sont une des techniques les plus prometteuses pour une production d'électricité propre et efficace à partir d'hydrogène. Les applications de cette nouvelle génération de piles à combustibles concernent aussi bien des applications portables et nomades telles que smartphones, ordinateurs portables, électronique embarquée que des applications domestiques ou dans les transports. A ce jour, le platine utilisé comme catalyseur est considéré comme le seul choix possible pour un rendement élevé et stable. En conséquence, suite à des ressources limitées en platine, la fabrication des piles à combustible reste coûteuse et la production industrielle généralisée impossible. Pour cette raison, une diminution substantielle de la quantité de Pt incorporée et donc la recherche de nouveaux matériaux d'anode à faible coût avec une activité élevée sont nécessaires. Des systèmes à base d’oxyde de cérium dopés au platine avaient été présentés comme étant des catalyseurs actifs pour l'oxydation du CO, la production d'hydrogène, l'oxydation de l'éthanol et la décomposition de méthanol. Au cours de ce travail, de nouveaux concepts pour la fabrication des piles à combustible ont été développés : la quantité de platine incorporée a été fortement diminuée conduisant à la production de nouveaux matériaux d'anode. Enfin, des catalyseurs à base de platine ont été déposés non pas sous la forme usuelle de nanopoudres mais sous forme de films minces fortement poreux sur substrat silicium.Au cours de cette thèse, le système Pt-CeOx a été étudié. Des échantillons non dopés puis dopés avec une faible quantité de platine ont été élaborés puis caractérisés en vue d'une application comme catalyseurs pour piles à combustibles. L'obtention de ces matériaux avec des propriétés sur mesure implique la maîtrise totale de leurs conditions de croissance. Afin d’étudier ces nouveaux composés de taille nanométrique, la microscopie électronique en transmission (MET) a été un outil précieux, qui a permis d'apporter des informations très précises sur la morphologie des films minces, la composition chimique et la structure à l'échelle atomique. Le cérium possède un double degré d'oxydation (+III/+IV), ce qui explique ses très bonnes propriétés catalytiques. Des analyses par spectrométrie dephotoélectrons X (XPS) ainsi que par spectroscopie de pertes d'énergie des électrons (EELS) ont été effectuées afin de déterminer son degré d'oxydation. / Present doctoral thesis is focused on investigation of novel metal-oxide anode catalyst for fuel cell application by electron microscopy and associated spectroscopies. Catalysts based on Pt-doped cerium oxide in form of thin layers prepared by simultaneous magnetron sputtering deposition on intermediate carbonaceous films grown on silicon substrate have been studied. The influence of the catalyst support composition (a-C and CNx films), deposition time of CeOx layer and other deposition parameters, as deposition rate, composition of working atmosphere and Pt concentration on the morphology of Pt-CeOx layers has been investigated mainly by Transmission Electron Microscopy (TEM). The obtained results have shown that by combination of suitable preparation conditions we are able to tune the final morphology and composition of the catalysts. The composition of carbonaceous films and Pt-CeOx layers was examined by complementary spectroscopy techniques – Energy Dispersive X-ray Spectroscopy (EDX), Electron Energy Loss Spectroscopy (EELS) and X-ray Photoelectron Spectroscopy (XPS). Such prepared porous structures of Pt-CeOx are promising as anode catalytic material for real fuel cell application. / Předložená dizertační práce se zabývá studiem nových katalyzátorů na bázi kov-oxid vhodných pro použití v palivových článcích na straně anody. Platinou dopovaný oxid ceru připravený magnetronovým naprašováním ve formě tenkých vrstev na uhlíkových mezivrstvách nesených křemíkovým substrátem byl zkoumán prostřednictvím mikroskopických a spektroskopických metod. Vliv složení uhlíkového nosiče (a-C a CNx filmy), depozičního času CeOx vrstvy a dalších depozičních parametrů, např. depoziční rychlosti, složení pracovní atmosféry a Pt koncentrace na morfologii Pt-CeOx vrstev byl studován převážně pomocí transmisní elektronové mikroskopie (TEM). Získané výsledky ukazují, že vhodnou kombinací depozičních podmínek jsme schopni vyladit výslednou morfologii a kompozici katalyzátoru. Složení uhlíkových filmů a Pt-CeOx vrstev bylo studováno spektroskopickými technikami – energiově-disperzní spektroskopií (EDX), spektroskopií charakteristických ztrát elektronů (EELS) a rentgenovou fotoelektronovou spektroskopií (XPS). Takto připravené porézní struktury vrstev Pt-CeOx jsou slibným katalytickým materiálem na straně anody pro reálné aplikace v palivových článcích.

Ces travaux de thèse rentrent dans le cadre de l'ANR Photoflex (2013-2016) qui vise à mettre au point une technologie d'impression laser sans contact, pour créer des motifs actualisables ou permanents à caractère unique sur tout type de support, en particuliers des supports souples. Nous rapportons la synthèse par technique de pulvérisation magnétron en mode réactif et à température ambiante de films minces nanocomposites photochromes constitués de nanoparticules d'Ag entre deux couches nanoporeuses de TiO2. Ces films sont déposés sur des substrats souples tels qu'un plastique transparent (PET) et un papier diffusant. Nous montrons que lorsque le TiO2 est élaboré en régime de pulvérisation élémentaire, le film nanocomposite est coloré en raison de la présence de nanoparticules d'Ag métalliques induisant une résonance de plasmons de surface localisés dans le visible. En revanche, en régime de pulvérisation composite, le film nanocomposite est incolore car l'Ag s'oxyde lors de son recouvrement par le TiO2. Nous avons démontré que les échantillons incolores peuvent se colorer sous insolation laser UV (244 nm) dû à la réduction de l'Ag oxydé puis à la croissance de nanoparticules d'Ag métalliques par coalescence ou par mûrissement d'Ostwald. De plus, l'insolation laser visible (647 nm) à de faibles éclairements (quelques W.cm-2) de ce type de film ou des films initialement colorés donne lieu à des changements morphologiques des nanoparticules d'Ag qui modifient l'absorbance du film et entraînent une modification de la coloration de l'échantillon. Nous avons étudié l'influence des conditions de dépôt (épaisseur de la couche de recouvrement des nanoparticules, épaisseur de la sous-couche de TiO2, quantité d'Ag, temporisation après dépôt d'Ag, traitement plasma des nanoparticules d'Ag, multicouches) afin d'optimiser les effets de photochromisme en amplitude et en vitesse. Tous les mécanismes de photochromisme sont répétables durant des processus cycliques d'insolation UV/Visible. Pour de forts éclairements en laser visible (plusieurs dizaines de kW.cm-2), nous avons observé sur des films nanocomposites déposés sur verre, des changements de couleurs dépendants de la direction de polarisation du faisceau sonde, liés à la croissance thermique et à l'auto-organisation de l'Ag selon un réseau périodique de chaînes de nanoparticules. Contrairement aux faibles éclairements, les couleurs photo-induites sont permanentes et présentent un caractère dichroïque. Cette étude ouvre des perspectives intéressantes en termes d'applications, notamment pour l'authentification et la traçabilité de produits manufacturés, le stockage de données, les nouvelles générations de datamatrix, etc. / These thesis works are within the framework of the ANR Photoflex (2013-2016), which aims to develop a contactless laser printing technology, in order to create updatable or permanent patterns of unique character on any types of supports, especially flexible supports. We report on a reactive magnetron sputtering-based deposition method to synthesize, at room temperature, photochromic nanocomposite thin films consisting of Ag nanoparticles sandwiched between nanoporous TiO2 layers. These films are deposited on flexible substrates such as a transparent plastic (PET) and a diffusing paper. We show that when the TiO2 is elaborated in the metallic sputtering mode, the nanocomposite film is colored due to the formation of metal Ag nanoparticles inducing a localized surface plasmon resonance in the visible range. In contrast, in the compound sputtering mode, the nanocomposite film is colorless because the Ag nanoparticles are oxidized during their capping by the TiO2. We have demonstrated that the colorless samples can be colored under UV laser irradiation (244 nm) due to the reduction of oxidized silver, followed by the growth of metallic Ag nanoparticles by coalescence or Ostwald ripening. Moreover, visible laser irradiation at low irradiances (few W.cm-2) of the colored films gives rise to changes in the particle morphology that modifies the absorbance of the films and results in sample color changes. We have investigated the influence of the deposition conditions (capping layer thickness of nanoparticles, TiO2 buffer layer thickness, Ag amount, holding time after Ag deposition, plasma annealing of Ag nanoparticles, multilayer) in order to optimize the photochromic effects in amplitude and in speed. All the mechanisms are repeatable during UV/Visible irradiation cyclic processes. For strong visible laser irradiances (several tens of kW.cm-2), we observed on nanocomposite films deposited on glass, color changes dependent on the polarization direction of the probe beam, related to the thermal growth and to the self-organization of Ag according to a periodic grating of nanoparticle chains. Contrary to low irradiances, the photo-induced colors are permanent and have a dichroic character. This study opens up interesting possibilities in terms of applications, including authentication and traceability of manufactured products, data storage, the new generation of datamatrix, etc.

Les multicouches périodiques ont trouvé de nombreuses applications dans les domaines de l’optique, de la mécanique ou encore de l’électronique. Néanmoins, peu d’études se concentrent sur les réponses électriques des structures métal/oxyde périodiques vis-à-vis de la température. L’intérêt de ces travaux s’est porté sur la caractérisation des systèmes produits et l’étude de leurs propriétés électriques en température. Dans les systèmes TiO/Ti/TiO/TiO2 et WO/W/WO/WO3 respectivement à base de titane et de tungstène élaborés par le procédé de gaz réactif pulsé, des modèles de structures sont établis grâce à la microscopie électronique en transmission pour des épaisseurs de sous-couches comprises entre 1,3 et 50,8 nm. Puis, cette étude met en lumière une modification des comportements électriques classiques des matériaux en température, ainsi que l’existence d’une relation empirique entre la variation de résistivité électrique et les structures multicouches périodiques métal/oxyde. Cette relation montre que la résistivité de ces structures multicouches métal/oxyde peut donc être prévue grâce à la corrélation entre les conditions opératoires et les structure produites. Une fois les limites de cette relation établies, ce manuscrit propose une ouverture vers une nouvelle nanostructuration périodique. Elle combine la technique de dépôt sous incidence oblique et la technique de gaz réactif pulsé afin de produire les premiers films composés de colonnes inclinées et d’alternances périodiques métal/oxyde. / Periodic multilayers have found many applications in the fields of optics, mechanics or electronics. However, few studies focus on the electrical responses of the metal/oxide periodic structures versus temperature. The interest of this work was focused on the characterization of the multilayers and their electrical properties versus temperature. In TiO/Ti/TiO/TiO2 and WO/W/WO/WO3 systems produced by the reactive gas pulsing process, sample structures were established by transmission electron microscopy for sublayers thicknesses between 1.3 and 50.8 nm. Then, this study highlights a modification of conventional electrical behavior versus temperature. An empirical relationship was established between the electrical resistivity variation and the metal/oxide periodic multilayer structures. The correlation between the operating conditions and the produced structure allows predicting the resistivity of these metal/oxide multilayer structures. Finally, this manuscript paves the way to a new periodic nanostructuration with the combined use of glancing angle deposition and gas reactive pulsing process to produce the first films composed by inclined columns and periodic metal/oxide alternations.

The basic necessities to sustain life are – air, water and food. Although the harmful effects due to contaminated food or water are dangerous to life, these can be reduced/avoided by controlling the intake. Whereas, in case of air, the same amount of control cannot be exercised as there is very little, one can do in case of inhalation. Maximum damage to life is due to air contamination which can be detected and prevented by using gas sensors. The proper use of these sensors not only save lives, but also minimizes social and financial loss. The objective of this thesis work is to study and explore the use of p-type semiconducting material such as CuO, as a promising gas sensing material for organic compounds (VOCs), compatible with existing silicon fabrication technology. The Thesis consist of 7 chapters: Chapter 1 covers the general introduction about gas sensors, sensor parameters, criteria for the selection of sensing material, suitability of CuO as sensing material and a brief literature survey. The second chapter includes the selection of substrate, cleaning procedures and suitable deposition method. The deposition method used in the present thesis work is DC/RF magnetron sputtering. The reactive magnetron sputtering is employed during the deposition of CuO sensing films. It also includes basic introduction about some of the common material characterization techniques. This is followed by Chapter 3 which includes the optimization of sputtering process parameters such as applied power, working pressure, Ar-O2 ratio and substrate temperature for CuO sensing film and the effect of these on surface morphology. Information on the optimized sputtering parameters for electrode film (silver and gold) deposition has also been included in this chapter. In order to study the sensing behavior of the sensor, suitable testing set-up is necessary. This leads us to Chapter 4 that discusses the development of an in-house built sensor testing setup and its automization using MATLAB. The automated testing set-up facilitates off-time data plotting as well as real-time data plotting during the sensing process. To demonstrate the working of the set-up, some initial results obtained are also included in this chapter. After ascertaining the functioning of the automated gas sensor testing set-up, detailed study on the sensing behavior of nanostructured CuO films was performed. This information along with the necessary details is included in Chapter 5. The sensing response of nanostructured CuO films has been studied for different VOCs such as alcohol, toluene and benzene. The study carried out on the effect of different surface additives like multi-walled carbon nanotubes (MWNTs), gold or platinum on ethanol sensing has also been included in this chapter. During the use of MWNTs as surface additives, different concentrations of MWNTs – 0.01 mg, 0.05 mg and 0.1 mg have been dispersed on the CuO sensing film. The sample with lowest concentration of MWNTs exhibited highest sensitivity and lower response time. It is due to the fact that, higher concentrations of MWNTs do not result into uniform dispersion over the CuO films and cover the sensing film almost completely. Operating temperature is the most important factor affecting the performance of a gas sensor. In order to maintain the operating temperature for the portable sensor, the sensor is usually integrated with a heater. The chapter 6 deals with heater optimization including design, simulation and fabrication. In this chapter, microheater as well as macro-heaters were simulated and fabricated. The fabricated macro-heater is bonded with the sensor by eutectic bonding. One of the bonded samples was studied for its sensing response. The final chapter of the thesis deals with the conclusion of present research work and the possible further work on CuO gas sensor.

Émanant d’une collaboration entre le laboratoire CNRS du GREMI et le CEA le Ripault, l’objectif de cette thèse est de réaliser une étude exhaustive sur les conditions d’élaboration des électrodes de pile à combustible PEMFC par procédés plasma, dont l’enjeu est d’améliorer l’activité électro-catalytique du catalyseur employé qu’est le platine (Pt). A même quantité, la répartition du platine sur son support se révèle être un critère déterminant sur les performances délivrées par les PEMFCs. De cette observation, plusieurs axes de recherche ont été proposés et chacun d’entre eux a permis d’obtenir de nouveaux résultats. Le régime de pulvérisation magnétron à haute puissance pulsée (HiPIMS) est étudié dans le cas de dépôt de matériaux nobles pures (Pt, Au, Pd) et alliés (Pt5Pd95 et Pt50Pd50) et a permis de révéler une vapeur métallique ionisée conséquente lors du dépôt (10 % à 90 % selon l’élément). Les résultats obtenus sur le régime HiPIMS ont permis la modification de la distribution d’une faible quantité fixée de Pt (20 μg.cm−2) déposée sur la profondeur des couches de diffusion des gaz (GDL), améliorant incidemment les performances des PEMFCs (+80 % à 0.65 V, la tension à puissance nominale). Ce résultat est complété par ceux obtenus sur l’élaboration de catalyseur alliés, notamment sur la disposition du matériel catalytique au niveau de la structure des agrégats (+93 % à 0.65 V pour Pt5Pd95 en dépôts successifs). Une autre étude a permis d’étudier la modification de répartition du Pt en contact avec la membrane électrolyte. La surface de membrane échangeuses de proton est alors initialement structurée. Ces structurations de surface des membranes montrent une amélioration globale des performances PEMFCs pour les architectures CCB (Catalyst Coated Backing) et CCM (Catalyst Coated Membrane) d’un facteur 1.3 jusqu’à 12, respectivement. / From a collaboration between the CNRS laboratory of the CEA and GREMI Ripault, the objective of this thesis is to conduct a complete study on the conditions for producing electrodes of PEM fuel cell by plasma processes in order to improve the electro-catalytic activity of the catalyst (Pt). The platinum atoms on its support appears to be a one of the most important factor determining the performance delivered by the PEMFCs. From this observation, several lines of research have been proposed and each of them has yielded new results. The High Power Impulse Magnetron Sputtering (HiPIMS) process is studied in case of depositions of noble materials (Pt, Au, Pd) and alloy (Pt5Pd95 and Pt50Pd50) and revealed an ionized metal vapor consequent upon deposition (10 % to 90 % depending of the element). The results obtained on the HIPIMS process have allowed a change in the distribution of a small fixed amount of Pt (20 μg.cm−2) deposited on the depth of the gas diffusion layer (GDL), incidentally improving the performance of PEMFCs (+80% at 0.65 V, the voltage at rated power). This result is complemented by those obtained on the development of allied catalysts, especially with the arrangement of the catalytic material on the aggregates structure (+93 % at 0.65 V for Pt5Pd95 in successive deposits). In order to modify the Pt atoms distribution on the membrane support, another study has been realized. The surface of the proton exchange membrane has been structurated before the Pt deposition. Such structuration have shown an increase of the overall performance of PEMFCs in the case of CCB (Catalyst Coated Backing) and CCM (Catalyst Coated Membrane) architecture with an improvement factor of 1.3 up to 12, respectively.

The diploma thesis deals with the treatment of polycaprolactone (PCL) nanofibers. PCL fibers were subjected to the deposition of plasma amine polymers in a low pressure pulsed radiofrequency capacitively coupled discharge using cyclopropylamine monomer (CPA). Collagen as an extracellular matrix (ECM) protein was immobilized and cell proliferation on the modified nanofiber surface was monitored. Untreated PCL fibers were also subjected to the deposition of an antibacterial copper layer, and the fibers were characterized by scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), and energy dispersive spectroscopy (EDX).

The master’s thesis deals with the theory of thin film technology, especially creating these layers. The work includes the distribution of vacuum deposition techniques for physical (PVD) and chemical (CVD). The main aim is to create a theme in different ways of implementation by using magnetron sputtering device, and these motives evaluated in terms of the quality of sputtering.