Gegenstand der vorliegenden Arbeit ist die templatgestützte Erzeugung metallischer Stäbchen und Ringstrukturen im Mikrometer- und Nanometerbereich. Derartige Strukturen besitzen vor allem aufgrund ihres außergewöhnlichen Verhaltes gegenüber elektromagnetischen Wellen ein hohes Potential für optische, elektronische, magnetische oder sensorische Anwendungen. Zunächst wird das Vorgehen zur Herstellung mesoskopischer Ringe durch die Infiltration von Kolloidkristallen aus Siliziumdioxid mittels geeigneter Präkursorlösungen detailliert betrachtet. Daraufhin werden Ansätze zur Optimierung einzelner Teilschritte vorgestellt. Im Anschluss erfolgt die Übertragung des Verfahrens auf die Herstellung von Goldringen. Neben der elektronenmikroskopischen Charakterisierung der Proben wird unter anderem durch energiedispersive Röntgenspektroskopie (EDXS), Elektronenrückstreubeugung (EBSD) und Röntgenphotoelektronenspektroskopie (XPS) bestätigt, dass die entstandenen Strukturen aus metallischem Gold bestehen. Ein weiterer Inhalt dieser Arbeit ist die Konzeption und Umsetzung einer Apparatur zur elektrochemischen Erzeugung von mesoskopischen Metallstäbchen im Inneren von porösen Aluminiumoxidmembranen. Im Anschluss wird die Herstellung von Silber- und Goldstäbchen beschrieben. Außerdem wird aufgeführt, wie die sequenzielle Abscheidung der beiden Metalle unter anschließender Auflösung des metallischen Silbers zur Erhöhung der Ausbeute an isolierten Goldstäbchen führt.

No description available.

Microelectromechanical systems (MEMS) based artificial sensory hairs for flow sensing have been widely explored, but the processes involved in their fabrication are lithography intensive, making the process quite expensive and cumbersome. Most of these devices are also based on silicon MEMS, which makes the fabrication of out-of plane 3D flow sensors very challenging. This thesis aims to develop new fabrication technologies based on Polymer MEMS, with minimum dependence on lithography for the fabrication of piezoresistive 3D out-of-plane artificial sensory hairs for sensing of air flow. Moreover, the fabrication of a flexible sensor array is proposed and new materials are also explored for the sensing application. Soft lithography based approaches are first investigated for the fabrication of an all elastomer device that is tested in a bench top wind tunnel. Micromolding technologies allow for the mass fabrication of microstructures using a single, reusable mold master that is fabricated by SU-8 photolithography, reducing the need for repetitive processing. Polydimethylsiloxane (PDMS) is used as the device material and sputter deposited gold is used as both the piezoresistive as well as the electrode material for collection of device response. The fabrication results of PDMS to PDMS metal transfer micromolding (MTM) are shown and the limitations of the process are also discussed. A dissolving mold metal transfer micromolding process is then proposed and developed, which overcomes the limitations of the conventional MTM process pertinent to the present application. Testing results of devices fabricated using the dissolving mold process are discussed with emphasis on the role of micro-cr  acking as one failure mode in elastomeric devices with thin film metal electrodes. Finally, a laser microfabrication based approach using thin film Kapton as the device material and an electrically conductive carbon-black elastomer composite as the piezoresistor is proposed and demonstrated. Laminated sheets of thick and thin Kapton form the flexible substrate on which the conductive elastomer piezoresistors are stencil printed. Excimer laser ablation is used to make the micro-stencil as well as to release the Kapton cantilevers. The fluid-structure interaction is improved by the deposition of a thin film of silicon dioxide, which produces a stress-gradient induced curvature, strongly enhancing the device sensitivity. This new approach also enables the fabrication of backside interconnects, thereby addressing the commonly observed problem of flow intrusion while using conventional interconnection technologies like wire-bonding. Devices with varying dimensions of the sensing element are fabricated and the results presented, with smallest devices having a width of 400 microns and a length of 1.5 mm with flow sensitivities as high as 60 Ohms/m/s. Recommendations are also proposed for further optimization of the device.

In this work siloxane-polymethyl methacrylate (PMMA) hybrid materials were synthesized and doped with Eu (III) from solid europium chloride, solid europium (III) nitrate, europium chloride (III) in alcoholic solution and 3-aminopyrazine-2-carboxylate of lanthanum and europium complex. The hybrid was prepared from methyl methacrylate (MMA) and 3-methacryloxy-propyl-trimethoxysilane (MPTS), using benzoyl peroxide (BPO) as polymerization initiator. The use of the sol-gel method by acid catalysis allowed to obtain pure solid materials and doped with europium different sources with amorphous characteristics, as evidenced by the X-ray diffraction powderdata. The insertion of the europium complex in the polycrystalline matrix did not changethe structural characteristics of the samples. It was observed that the materials doped with europium in solution, showed greater adsorbed amounts of solvents and structural features that changethe spectroscopic properties. The samples containing solid salts showed similar structural features. It was observed that the average life time of the radioactive emissions increase with the heat treatment, indicating that the temperature reduces the number of suppressor luminescence groups in the coordinationenvironment oflanthanides ion and the character non monoexponentialof the decay is indicative of the presence different coordination environments. In the 29Si NMR measurementsfor samples containing alcoholic solution of europium chloride are observed monomer (RSi(OSi)(OH)2), diimeric(R-Si(OSi)2(OH)) and fully condensed (RSi(OSi)3)species,having a polycondensationdegree up to 78% . The materialsdoped with europium complex show strong luminescence, except tosamples treated at 200 ° C, which is indicative of thermal degradation of the coordination complex. It was observed that presence of solvent changedthermal stability, different heat treatments and europium sources exerted strong influence on the coordination environment of the Eu (III) ions in the organic -inorganic hybrid materials. / Neste trabalho materiais híbridos Siloxano-Polimetacrilato de metila (PMMA) foram sintetizados e dopados com íons Eu(III) provenientes de cloreto e nitrato de európio (III) sólidos, cloreto de európio (III) em solução alcoólica e complexo 3-aminopirazina-2-Carboxílato de lantânio e európio. O hibrido foi preparado a partir dometacrilato de metila (MMA) e do 3-metacriloxi-propil-trimetoxisilano (MPTS), utilizando-se como agente inicializador de polimerização o peróxido de benzoila (BPO). A utilização dametodologia de síntese sol-gel por catálise ácida possibilitou a obtenção de materiais sólidos puros e dopados com diferentes fontes de európio, com características amorfas, como ficou evidente pelos dados de difração de raios X de pó. A inserção de complexo de európiopolicristalino na matriz não alterou as características estruturais da amostra.Observou-se que os materiais que foram dopados com európio em solução, apresentaram maior quantidade de solventes adsorvidos e características estruturais que alteraram as suas propriedades espectroscópicas. As amostras dopadas com sais sólidos apresentaram características estruturais semelhantes. Observou-se que os tempos de vida médios das emissões radiativas aumentam com o tratamento térmico, o que indica que o tratamentoreduz o número de grupos supressores de luminescência no ambiente de coordenação do íon lantanídeo e o caráter não monoexponencial do decaimento é indicativo da presença de diferentes ambientes de coordenação. Pelo RMN do 29Si para as amostras dopadas com solução alcoólica de cloreto de európio são observadas espécies monoméricas(R-Si(OSi)(OH)2), diméricas(R-Si(OSi)2(OH)) e totalmente condensadas(R-Si(OSi)3) com um grau de policondensação de até 78%. Os materiais dopados com o complexo apresentam forte luminescência, exceto as amostras tratadas a 200°C, o que é indicativo da degradação térmica do complexo de coordenação. Observou-se que a presença de solvente alterou a estabilidade térmica das amostras, e que a diferentes tratamentos térmicos e a dopagem com diferentes fontes de európio influenciaram sensivelmente o ambiente de coordenação dos íons Eu(III) nos materiais híbridos orgânico-inorgânicos.

Le traitement d'une infection ostéo-articulaire nécessite une prise en charge longue, obligeant à des chirurgies itératives et à un traitement antibiotique systémique prolongé. À ce jour, le polyméthacrylate de méthyle est le vecteur d’antibiotique local le plus fréquemment utilisé chez l’homme pour traiter une infection ostéo-articulaire. Cependant les PMMA sont non résorbables et obligent à multiplier les interventions chirurgicales afin d’aboutir au traitement définitif de l’infection ostéo-articulaire. Le PMMA ne permet pas une libération complète de l’antibiotique avec de surcroît des doses inférieures à la CMI du germe en cause, pouvant faciliter l’émergence de bactéries résistantes. L'objectif de notre travail était d’obtenir une libération locale efficace et prolongée d’antibiotique grâce à un polymère entièrement résorbable. Le cahier des charges établi pour l’élaboration de ce polymère était le suivant : système matriciel offrant une libération de gentamicine à une dose de 1 à 2 mg/jour/g de mélange sur une période de plus de 10 jours. De plus, le polymère devait être bio-résorbable, c’est-à-dire qu’il devait pouvoir être dégradé jusqu'à obtenir des fragments pouvant être éliminés naturellement par l'organisme. Afin de répondre à ces exigences, il a été créé le PLA50P, Poly(D,L-acide lactique) de haut poids moléculaire. Afin d’obtenir le mélange gentamycine-PLA, une technique de compression des poudres des deux composants a été mise en œuvre. Ce polymère pouvait être stérilisé par -irradiation, sans influence sur les caractéristiques de relargage du polymère.La cinétique in vitro de la gentamicine relarguée par le PLA50GS montrait un pic maximum de gentamicine libérée obtenu à 12 jours et une stabilisation ensuite jusqu’à 63 jours de la quantité relarguée. La quantité cumulée de gentamicine relarguée à 3 semaines in vitro est de 54 % de la quantité contenue initialement dans PLA50GS. In vivo, nous observions une libération in situ de 5,1 µg/mL de gentamicine à J3, de 1,9 µg/mL de gentamicine à J7 et de 0 µg/mL à 5 semaines avec disparition de PLA50GS à l’examen macroscopique. Nous avons ainsi pu mettre en évidence, in vitro et in vivo, un relargage de la gentamicine à des doses supérieures à la CMI du germe et ce pendant plus de trois semaines.Afin de confirmer ces observations, nous avons ensuite mis au point un modèle d’infection périostée chez le rat. Pour ce faire nous avons utilisé des rats âgés de 10 à 12 semaines avec une injection au contact de l’os et au 1/3 moyen de la patte arrière de deux fois 100 ml de SAMS d’origine animale. L’utilisation du PLA50GS a montré sa supériorité par rapport à une administration parentérale d’une dose équivalente de Gentamicine avec une négativation du contage bactériologique chez tous les rats traités par le polymère chargé à la Gentamicine. Nous avons ensuite voulu traiter une infection articulaire grâce à notre polymère. Nous avons donc créé un modèle animal utilisant un lapin femelle de 4 kg avec une injection de 1 ml d’une solution à 103 CFU/ml de staphylococcus méthi-sensible d’origine léporidée. Le PLA50GS nous a permis de réduire très significativement la charge bactérienne intra-articulaire (baisse de 3 à 4 log10 soit 1000 à 10000 fois moins de bactéries) alors que le traitement antibiotique par voie générale dit de référence ne nous a pas permis de réduire l’infection intra-articulaire de façon significative par rapport au groupe non traité. Le PLA50GS nous a ainsi permis de réduire l’infection de 3 log10 par rapport aux autres groupes avec 2 lapins sur 6 guéris de leur infection.Le PLA50GS présente, ainsi, les caractéristiques suivantes : (i) stabilité de la Gentamicine au sein du polymère, (ii) polymère sous forme de poudre stable, (iii) relargage prolongé de la Gentamicine pendant plusieurs semaines, (iv) effet « burst » présent mais limité, (v) très bonne biotolérance, et (vi) efficacité supérieure aux traitements antimicrobiens classiques. / The treatment of soft-tissue infections, osteomyelitis, and acute or chronic septic arthritis is a lengthy process that involves repeated surgical procedures and the systemic administration of antibiotics for at least 6 weeks to 3 months. Poor diffusion of antibiotics into bones and joints requires high doses given parenterally for long periods. At present, the antibiotic vector most widely used in humans with bone or joint infections is polymethylmethacrylate. Because PMMA is not bioabsorbable, multiple surgical procedures are required to eradicate infection. Furthermore, PMMA does not release its full antibiotic load over time and may yield local antibiotic concentrations lower than the minimal inhibitory concentration of the causative organism, thereby promoting the emergence of resistant strains. The objective of our work was to develop a fully bioabsorbable polymer capable of ensuring the prolonged and efficient release of its antibiotic load, thus improving the management of bone and joint infections. The specifications for the polymer included the release by the matrix system of 1-2 mg of gentamicin per day and per gram of mixture over more than 10 days. Other specifications were appropriate physical characteristics, a drug release rate sufficient to ensure optimal treatment safety, and ease of implantation. The polymer was also to be bioabsorbable, i.e., subject to degradation into fragments capable of being eliminated naturally by the body. High-molecular weight PLA50P, Poly(D,L-lactic acid) was created and found to meet these specifications. Use of this polymer as large particles (0.5 to 1 mm) limited the initial burst phenomenon. A gentamicin-PLA50P mixture was obtained by compression of the two components prepared in powder form. The antibiotic load was set at 20% to limit the initial burst. The polymer can be sterilized by gamma irradiation, which has no effect on drug release characteristics.In vitro kinetic studies of gentamicin release by the polymer showed a peak on day 12 followed by a plateau that lasted until day 63. After 3 weeks, the cumulative amount of gentamicin released in vitro was 54% of the total amount loaded onto the polymer. In vivo gentamicin concentrations measured in situ were 5.1 µg/mL on day 3, 1.9 µg/mL on day 7, and 0 µg/mL on day 35, when the polymer was no longer visible to the naked eye. Thus, both in vivo and in vitro, gentamicin was released in concentrations greater than the MIC of the microorganism, for longer than 3 weeks.To test the gentamicin-loaded polymer, we created a rat model of periosteal infection. Rats aged 10-12 weeks received two 100 mL injections of methicillin-susceptible Staphylococcus aureus collected from animals, into the middle third of the hind leg, in contact with the bone. Treatment with gentamicin-loaded PLA50P proved superior over parenteral administration of an equivalent gentamicin dose, consistently reverting the bacteriological cultures to negative. We then created a rabbit model of septic arthritis. A doe weighing 4 kg received an add intraarticular injection of 1 mL of a solution containing 103 cfu/mL of a methicillin-sensitive S. aureus strain collected from another rabbit. Gentamicin-loaded PLA50P treatment induced a highly significant drop in the intraarticular bacterial load (by 3-4 log10), whereas standard systemic gentamicin therapy failed to significantly diminish bacterial counts comparatively to the untreated controls. Thus, gentamicin-loaded PLA50P diminished the bacterial load by 3 log10 comparatively to the other groups and allowed eradication of the infection in 2 of the 6 rabbits.In sum, gentamicin-loaded PLA50P (i) ensures the stability of the antibiotic; (ii) is available as a stable powder; (iii) ensures the prolonged release of gentamicin over several weeks; (iv) produces a limited burst effect; (v) exhibits very good biotolerance; (vi) and is more effective than standard antimicrobial therapy.

Gegenstand der vorliegenden Arbeit ist die templatgestützte Erzeugung metallischer Stäbchen und Ringstrukturen im Mikrometer- und Nanometerbereich. Derartige Strukturen besitzen vor allem aufgrund ihres außergewöhnlichen Verhaltes gegenüber elektromagnetischen Wellen ein hohes Potential für optische, elektronische, magnetische oder sensorische Anwendungen. Zunächst wird das Vorgehen zur Herstellung mesoskopischer Ringe durch die Infiltration von Kolloidkristallen aus Siliziumdioxid mittels geeigneter Präkursorlösungen detailliert betrachtet. Daraufhin werden Ansätze zur Optimierung einzelner Teilschritte vorgestellt. Im Anschluss erfolgt die Übertragung des Verfahrens auf die Herstellung von Goldringen. Neben der elektronenmikroskopischen Charakterisierung der Proben wird unter anderem durch energiedispersive Röntgenspektroskopie (EDXS), Elektronenrückstreubeugung (EBSD) und Röntgenphotoelektronenspektroskopie (XPS) bestätigt, dass die entstandenen Strukturen aus metallischem Gold bestehen. Ein weiterer Inhalt dieser Arbeit ist die Konzeption und Umsetzung einer Apparatur zur elektrochemischen Erzeugung von mesoskopischen Metallstäbchen im Inneren von porösen Aluminiumoxidmembranen. Im Anschluss wird die Herstellung von Silber- und Goldstäbchen beschrieben. Außerdem wird aufgeführt, wie die sequenzielle Abscheidung der beiden Metalle unter anschließender Auflösung des metallischen Silbers zur Erhöhung der Ausbeute an isolierten Goldstäbchen führt.

Die vorliegende Arbeit beschreibt die Übertragung der aus der Siliziumtechnologie bekannten Präzision der Strukturierung und die Zuverlässigkeit der Verbindungstechnologie auf andere Materialien wie Kupfer und PMMA. Diese Untersuchung ist auf die Entwicklung der Teiltechnologien Strukturierung und Integration fokussiert und konzentriert sich insbesondere auf die Kombination von Mikrostrukturierung und dreidimensionalen Aufbautechniken einschließlich vertikaler fluidischer Durchkontaktierungen bei den Materialien Silizium, Kupfer und Kunststoff (PMMA). Eine begleitende Charakterisierung und messtechnische Bewertung gestattet die Weiterentwicklung während der Experimentedurchführung und erweitert den Stand der Wissenschaft hinsichtlich der genannten Kombinationen. / The work describes the transfer of well known high precisive and reliable micro technologies for patterning and packaging of Silicon to new materials like Copper and PMMA. This investigation is focused on special patterning technologies and system integration aspects. Furthermore the development of material-dependent micro patterning technologies and multi layer packaging techniques including vertical fluidic interconnects using materials like Silicon, Copper, and PMMA (polymer) is shown. An accompanying characterization and measurement-based evaluation enables the ongoing development while performing experimental analysis. At least a higher state of the art for these complex combinations is reached.

Submitted by Johnny Rodrigues (johnnyrodrigues@ufcg.edu.br) on 2018-04-09T18:16:27Z No. of bitstreams: 1 SANDRO MARTINS DOLGHI - DISSERTAÇÃO PPG-CEMat 2014..pdf: 1349252 bytes, checksum: 7e20e2840dc2a5d2e873cd9b77ed0100 (MD5) / Made available in DSpace on 2018-04-09T18:16:27Z (GMT). No. of bitstreams: 1 SANDRO MARTINS DOLGHI - DISSERTAÇÃO PPG-CEMat 2014..pdf: 1349252 bytes, checksum: 7e20e2840dc2a5d2e873cd9b77ed0100 (MD5) Previous issue date: 2014-12-19 / O culto à beleza está em evidência no Brasil e no mundo, levando ao crescente aumento de técnicas e procedimentos para corrigir defeitos estéticos e minimizar os efeitos do envelhecimento. Diversas substâncias preenchedoras com fluidos de alta viscosidade ou partículas de polímeros em suspensão têm sido utilizadas em larga escala em procedimentos cosméticos e correção de lipodistrofia de pacientes HIV positivos, submetidos à terapia antirretroviral de alta atividade. O uso de polimetilmetacrilato (PMMA) como substância de preenchimento dérmico tem crescido vertiginosamente, assim como o número de reações adversas decorrentes de seu uso. O PMMA vem sendo utilizado, amplamente como matéria prima na fabricação de diversos dispositivos e produtos médicos desde a década de 40, especialmente em função de sua biocompatibilidade, entretanto, ainda há carência de informações e estudos sobre migração e resposta inflamatória das substâncias comercializadas no Brasil para fins de preenchimento dérmico. Este trabalho teve como objetivo avaliar as características físico-químicas de implantes de PMMA comercializados no Brasil para procedimentos de bioplastia, em três apresentações comerciais do produto com diferentes concentrações, visando delimitar limites aceitáveis para fins de registro destes produtos na Agência Nacional de Vigilância Sanitária (Anvisa), com foco na segurança sanitária. As amostras foram caracterizadas por Difração de Raios X (DRX), Espectroscopia na região do infravermelho com transformada de Fourier (FTIR), Microscopia Eletrônica de Varredura (MEV), Espectroscopia por Energia Dispersiva de Raios X (EDS), análise de Calorimetria Exploratória Diferencial (DSC), caracterização por Microscopia Óptica (MO). A técnica de DRX mostrou comportamento semicristalino do PMMA. Com a técnica de FTIR constatou-se os grupos funcionais presentes nos implantes. Por meio das técnicas de MO e MEV foi possível perceber a não homogeneidade em relação ao tamanho das microesferas de PMMA. Pôde-se concluir com os resultados de DSC que o pico endotérmico aumentou de acordo com as variações de concentração do PMMA. A partir dos dados obtidos neste trabalho constata-se que o consumidor está sujeito a riscos, visto que a irregularidade das superfícies e variações nos tamanhos das microesferas pode ocasionar reações adversas, em função da fagocitose das microesferas com tamanho inferior a 20 μm. O crescente uso das técnicas de preenchimento com implantes de PMMA, bem como sua indicação para uso em demais especialidades da medicina, o coloca como material a ser ainda amplamente estudado nas mais diversas aplicações do produto na área médica. / The cult of beauty is in evidence in Brazil and in the world, leading to increasing techniques and procedures to correct aesthetic defects and minimize the effects of aging. Several dermal fillers with high viscosity or polymer particles in suspension fluids have been used in large scale in cosmetic procedures and lipodystrophy correction of HIV-positive patients undergoing HAART activity. The use of polymethylmethacrylate (PMMA) as dermal filler substance has grown dramatically, and the number of adverse reactions arising from its use. PMMA has been used widely as a raw material in manufacturing various medical devices and products since the 40s, especially due to its biocompatibility, however, there is still a lack of information and studies on migration and inflammatory response of substances marketed in Brazil dermal filler purposes. This study aimed to evaluate the physical and chemical characteristics of PMMA implants sold in Brazil for bioplasty procedures in three commercial presentations of the product with different concentrations, in order to delimit acceptable limits for registration of these products at ANVISA, with focus on security health. The samples were characterized by X-ray Diffraction (XRD), Fourier transform infrared spectroscopy (FTIR), Scanning Electron Microscopy (SEM), Spectroscopy Energy Dispersive X-ray (EDS) analysis of Differential Scanning Calorimetry (DSC), characterized by Optical Microscopy (OM). The XRD technique showed semi-crystalline behavior of PMMA. FTIR technique found the functional groups present on the implants. Through OM and SEM techniques we saw the inhomogeneity relative to the size of the PMMA microspheres. One can conclude from the results of the DSC endothermic peak increased in accordance with changes in the concentration of PMMA. From the data obtained in this study it appears that the consumer is subject to risks as uneven surfaces and variations in size of the microspheres can cause adverse reactions, depending on the phagocytosis of microspheres with size less than 20 microns. The increasing use of technical fill with PMMA implants, as well as indications for use in other specialties of medicine, places it as material to be still widely studied in various product applications in the medical field.

Increasingly compact and powerful light emitting diodes require the development of efficient optical diffusers to manage their lighting capability according to the required application. In this study, a cost-effective strategy is demonstrated for fabricating micro-structured polymethylmethacrylate (PMMA) diffusers for white light sources. By combining different laserbased processes, namely direct laser engraving (DLE), direct laser writing (DLW), and direct laser interference patterning (DLIP), periodic patterns are fabricated in stainless steel surfaces with line- and dot-like geometries with feature sizes ranging from 1.7 to 900 μm. The fabricated hierarchical geometries are transferred to PMMA surfaces by plate-to-plate hot embossing. The relationship between the surface topography and the white light scattering behavior is investigated by confocal and scanning electron microscopy combined with photospectroscopy and image processing of photographs. The triple-scaled hierarchical structures can increase the haze up to 76% in the visible spectrum, while keeping the total transmittance over 90%, as the flat surface.

Die vorliegende Arbeit beschreibt die Übertragung der aus der Siliziumtechnologie bekannten Präzision der Strukturierung und die Zuverlässigkeit der Verbindungstechnologie auf andere Materialien wie Kupfer und PMMA. Diese Untersuchung ist auf die Entwicklung der Teiltechnologien Strukturierung und Integration fokussiert und konzentriert sich insbesondere auf die Kombination von Mikrostrukturierung und dreidimensionalen Aufbautechniken einschließlich vertikaler fluidischer Durchkontaktierungen bei den Materialien Silizium, Kupfer und Kunststoff (PMMA). Eine begleitende Charakterisierung und messtechnische Bewertung gestattet die Weiterentwicklung während der Experimentedurchführung und erweitert den Stand der Wissenschaft hinsichtlich der genannten Kombinationen. / The work describes the transfer of well known high precisive and reliable micro technologies for patterning and packaging of Silicon to new materials like Copper and PMMA. This investigation is focused on special patterning technologies and system integration aspects. Furthermore the development of material-dependent micro patterning technologies and multi layer packaging techniques including vertical fluidic interconnects using materials like Silicon, Copper, and PMMA (polymer) is shown. An accompanying characterization and measurement-based evaluation enables the ongoing development while performing experimental analysis. At least a higher state of the art for these complex combinations is reached.