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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
61

Modeling and simulation of the electro-chemical behavior of chemically stimulated polyelectrolyte hydrogel layer composites

Sobczyk, Martin, Wallmersperger, Thomas 09 October 2019 (has links)
Polyelectrolyte hydrogels are viscoelastic electroactive polymers which respond to external physical or chemical stimuli by a reversible volume phase transition. Novel fabrication methods allow the creation of hydrogel layer composites in which each layer shows a different sensitivity (e.g. to a different stimulus). This offers new opportunities, for example, in the design of new microsensors, microactuators and microfluidic devices as well as for high-selective membranes and target-specific drug delivery systems. Since only few research groups numerically investigated the transport mechanisms in hydrogel layer composites, a gap remains to describe the movement and transient distribution of ions inside the layer system. In this article, the multifield formulation is adopted to describe the transient distribution of ions in salt-sensitive hydrogel layer composites on the basis of a numerical simulation. For this, the Nernst-Planck and the Poisson equation are solved using one-dimensional finite elements for both anionic-anionic and anionic-cationic gel layer composites under chemical stimulation. Between adjacent gels, an additional interlayer is introduced to account for the physical and chemical bonding region between the gels. Adaptive mesh refinement provides a good resolution close to the interface between the adjacent gel layers. The obtained results are used to predict the osmotic pressure inside the gels and the dependent swelling of the gel layer composite. The excellent agreement of the obtained results with the Donnan equilibrium demonstrates the high potential of the method applied to predict the behavior of hydrogel layer composites.
62

Phenomenological theories of magnetic multilayers and related systems

Kyselov, Mykola 16 November 2010 (has links)
In this thesis multidomain states in magnetically ordered systems with competing long-range and short range interactions are under consideration. In particular, in antiferromagnetically coupled multilayers with perpendicular anisotropy unusual multidomain textures can be stabilized due to a close competition between long-range demagnetization fields and short-range interlayer exchange coupling. These spatially inhomogeneous magnetic textures of regular multidomain configurations and irregular networks of topological defects as well as complex magnetization reversal processes are described in the frame of the phenomenological theory of magnetic domains. Using a modified model of stripe domains it is theoretically shown that the competition between dipolar coupling and antiferromagnetic interlayer exchange coupling causes an instability of ferromagnetically ordered multidomain states and results in three possible ground states: ferromagnetic multidomain state, antiferromagnetic homogeneous and antiferromagnetic multidomain states. The presented theory allows qualitatively to define the area of existence for each of these states depending on geometrical and material parameters of multilayers. In antiferromagnetically coupled superlattices with perpendicular anisotropy an applied magnetic bias field stabilizes specific multidomain states, so-called metamagnetic domains. A phenomenological theory developed in this thesis allows to derive the equilibrium sizes of metamagnetic stripe and bubble domains as functions of the antiferromagnetic exchange, the magnetic bias field, and the geometrical parameters of the multilayer. The magnetic phase diagram includes three different types of metamagnetic domain states, namely multidomains in the surface layer and in internal layers, and also mixed multidomain states may arise. Qualitative and quantitative analysis of step-like magnetization reversal shows a good agreement between the theory and experiment. Analytical equations have been derived for the stray field components of these multidomain states in perpendicular multilayer systems. In particular, closed expressions for stray fields in the case of ferromagnetic and antiferromagnetic stripes are presented. The theoretical approach provides a basis for the analysis of magnetic force microscopy (MFM) images from this class of nanomagnetic systems. Peculiarities of the MFM contrast have been calculated for realistic tip models. These characteristic features in the MFM signals can be employed for the investigations of the different multidomain modes. The methods developed for stripe-like magnetic domains are employed to calculate magnetization processes in twinned microstructures of ferromagnetic shape-memory materials. The remarkable phenomenon of giant magnetic field induced strain transformations in such ferromagnetic shape memory alloys as Ni-Mn-Ga, Ni-Mn-Al, or Fe-Pd arises as an interplay of two physical effects: (i) A martensitic transition creating competing phases, i.e. crystallographic domains or variants, which are crystallographically equivalent but have different orientation. (ii) High uniaxial magnetocrystalline anisotropy that pins the magnetization vectors along certain directions of these martensite variants. Then, an applied magnetic field can drive a microstructural transformation by which the martensitic twins, i.e. the different crystallographic domains, are redistributed in the martensitic state. Within the phenomenological (micromagnetic) theory the equilibrium parameters of multivariant stripe patterns have been derived as functions of the applied field for an extended single-crystalline plate. The calculated magnetic phase diagram allows to give a detailed description of the magnetic field-driven martensitic twin rearrangement in single crystals of magnetic shape-memory alloys. The analysis reveals the crucial role of preformed twins and of the dipolar stray-field energy for the magnetic-field driven transformation process in magnetic shape-memory materials. This work has been done in close collaboration with a group of experimentalists from Institute of Metallic Materials of IFW Dresden, Germany and San Jose Research Center of Hitachi Global Storage Technologies, United States. Comparisons between theoretical and experimental data from this cooperation are presented throughout this thesis as vital part of my work on these different subjects.
63

Efficient External-Memory Graph Search for Model Checking

Lamborn, Peter C 17 May 2014 (has links)
Model checking problems suffer from state space explosion. State space explosion is the number of states in the graph increases exponentially with the number of variables in the state description. Searching the large graphs required in model checking requires an efficient algorithm. This dissertation explores several methods to improve an externalmemory search algorithm for model checking problems. A tool implementing these methods is built on top of the Murphi model checker. One improvement is a state cache for immediate detection leveraging the properties of state locality. A novel type of locality, intralayer locality is explained and shown to exist in a variety of search spaces. Another improvement, partial delayed duplicate detection, exploits interlayer locality to reduce search times. An automatic partitioning function is described that allows hash-based delayed duplicate detection to be used without domain knowledge of the state space. A phased delayed duplicate detection algorithm combining features of hash-based delayed duplicate detection and sorting-based delayed duplicate detection is explained and compared to the other methods.
64

Precise tuning of interlayer electronic coupling in layered conductive metalorganic frameworks

Lu, Yang, Zhang, Yingying, Yang, Chi-Yuan, Revuelta, Sergio, Qi, Haoyuan, Huang, Chuanhui, Jin, Wenlong, Li, Zichao, Vega-Mayoral, Victor, Liu, Yannan, Huang, Xing, Pohl, Darius, Položij, Miroslav, Zhou, Shengqiang, Cánovas, Enrique, Heine, Thomas, Fabiano, Simone, Feng, Xinliang, Dong, Renhao 29 March 2023 (has links)
Two-dimensional conjugated metal-organic frameworks (2D c-MOFs) have attracted increasing interests for (opto)-electronics and spintronics. They generally consist of van der Waals stacked layers and exhibit layer-depended electronic properties. While considerable efforts have been made to regulate the charge transport within a layer, precise control of electronic coupling between layers has not yet been achieved. Herein, we report a strategy to precisely tune interlayer charge transport in 2D c-MOFs via side-chain induced control of the layer spacing. We design hexaiminotriindole ligands allowing programmed functionalization with tailored alkyl chains (HATI_CX, X = 1,3,4; X refers to the carbon numbers of the alkyl chains) for the synthesis of semiconducting Ni3(HATI_CX)2. The layer spacing of these MOFs can be precisely varied from 3.40 to 3.70 Å, leading to widened band gap, suppressed carrier mobilities, and significant improvement of the Seebeck coefficient. With this demonstration, we further achieve a record-high thermoelectric power factor of 68 ± 3 nW m−1 K−2 in Ni3(HATI_C3)2, superior to the reported holes-dominated MOFs.
65

Electrochemical and Photocatalytic Oxidation of Hydrocarbons

Rismanchian, Azadeh January 2014 (has links)
No description available.
66

Electronic and magnetic properties of hybrid interfaces : from single molecules to ultra-thin molecular films on metallic substrates / Propriétés électroniques et magnétiques d'interfaces hybrides : des molécules isolées aux films moléculaires ultra-minces sur des substrats métalliques

Gruber, Manuel 28 November 2014 (has links)
Comprendre les propriétés des interfaces molécules/métaux est d’une importance capitale pour la spintronique organique. La première partie porte sur l’étude des propriétés magnétiques de molécules de phtalocyanine de manganèse. Nous avons montré que les premières couches moléculaires forment des colonnes avec un arrangement antiferromagnétique sur la surface de Co(100). Ces dernières mènent à de l’anisotropie d’échange. La seconde partie porte sur l’étude d’une molécule à transition de spin, la Fe(phen)2(NCS)2, sublimée sur différentes surfaces. Nous avons identifié les états de spin d’une molécule unique sur du Cu(100). De plus, nous avons commuté l’état de spin d’une molécule unique pourvu qu’elle soit suffisamment découplée du substrat. / Understanding the properties of molecules at the interface with metals is a fundamental issue for organic spintronics. The first part is devoted to the study of magnetic properties of planar manganese-phthalocyanine molecules and Co films. We evidenced that the first molecular layers form vertical columns with antiferromagnetic ordering on the Co(100) surface. In turn, these molecular columns lead to exchange bias. The second part is focused on the study of a spin-crossover complex, Fe(phen)2(NCS)2 sublimed on different metallic surfaces. We identified the two spin states of a single molecules on Cu(100). By applying voltages pulses, we switched the spin state of a single molecule provided that it is sufficiently decoupled from the substrate.
67

Optimalizace plazmatických povrchových úprav skleněných vláken / Plasma surface modification of glass fibers and its optimization

Širjovová, Veronika January 2019 (has links)
Diploma thesis deals with glass fiber surface modification using plasma-enhanced chemical vapor deposition in order to prepare functional interface that enhances the properties of polymer composites. The effect of deposition conditions on shear strength was observed with respect to the chemical composition of the deposited film. Thin films were deposited on planar substrates and fibers using monomer tetravinylsilane in a mixture with oxygen at selected power of plasma discharge. Chemical composition of prepared material was analyzed by infrared spectroscopy. Planar substrate film adhesion was measured using the scratch test. The composite sample was prepared by embedding the surface modified fibers in unsaturated polyester resin, followed by the curing process. The cured composite sample underwent the short beam shear test.
68

Screened Korringa-Kohn-Rostoker-Methode für Vielfachschichten

Zahn, Peter 24 July 2005 (has links)
Im Rahmen der vorliegenden Arbeit wird eine Tight-Binding-Formulierung der Korringa-Kohn-Rostoker-Greenschen-Funktionsmethode vorgestellt. Dabei werden mittels eines geeignet gewählten Referenzsystems abgeschirmte Strukturkonstanten konstruiert. Es werden die Vorteile und Grenzen dieser Transformation des Formalismus diskutiert. Es wird gezeigt, daß der numerische Aufwand zur erechnung der Elektronenstruktur von Systemen mit langgestreckter Elementarzelle linear mit der Systemgröße wächst. Damit ist eine Behandlung von Systemen mit 500 und mehr Atomen pro Elementarzelle möglich. Anhand von umfangreichen Testrechnungen kann demonstriert werden, daß das neue Verfahren bezüglich seiner Genauigkeit mit dem traditionellen KKR-Verfahren vergleichbar ist. Es werden Anwendungen zur Berechnung der Elektronenstruktur sowie zur Zwischenlagenaustauschkopplung von Co/Cu(100)-Vielfachschichten vorgestellt. / A newly developed ab initio tight-binding-formulation of the Korringa-Kohn-Rostoker-Green's function method for layered systems is presented. Screened structure constants are calculated by means of a repulsive reference system. Advantages and limits of this transformation of the formalism are discussed in detail. The numerical effort for self consistent electronic structure calculations of systems with a large prolonged supercell scales linearly with the system size. Systems with up to 500 atoms per unit cell can be treated easily. The accuracy of the new method is of the same order as the traditional KKR method. Applications to electronic structure calculations and magnetic interlayer exchange coupling in Co/Cu(100) multilayers are presented.
69

Magnetic and Magneto-Transport Properties of Hard Magnetic Thin Film Systems / Magnetische und magnetoresistive Eigenschaften von hartmagnetischen Dünnschichtsystemen

Matthes, Patrick 21 March 2016 (has links) (PDF)
The present thesis is about the investigation of ferromagnetic thin film systems with respect to exchange coupling, magnetization reversal behavior and effects appearing in magnetic heterostructures, namely the exchange bias and the giant magnetoresistance effect. For this purpose, DC magnetron sputtered thin films and multilayers with perpendicular magnetic anisotropy were prepared on single crystalline and rigid as well as flexible amorphous substrates. The first part concentrates on magnetic data storage applications based on the combination of the concept of bit patterned media and three dimensional magnetic memory, consisting of at least two exchange decoupled ferromagnetic storage layers. Here, [Co/Pt] multilayers, revealing different magnetic anisotropies, have been applied as storage layers and as spacer material Pt and Ru was employed. By the characterization of the magnetization reversal behavior the exchange coupling in dependence of the spacer layer thickness was studied. Furthermore, with regard to the concept of bit patterned media, the layers were also grown on self-assembled silica particles, leading to an exchange decoupled single-domain magnetic dot array, which was studied by magnetic force microscope imaging and angular dependent magneto-optic Kerr effect magnetometry to evaluate the reversal mechanism and its dependence on the array dimensions, mainly the diameter of the silica particles and layer thicknesses. To complete the study, micromagnetic simulations were performed to access smaller dimensions and to investigate the dependence of intralayer as well as interlayer coupling on the magnetization reversal of the dot array with multiple storage layers. The second part focuses on the investigation of the giant magnetoresistance effect in systems with perpendicular magnetic anisotropy, where L10 -chemically ordered FePt alloys and [Co/Pt] as well as [Co/Pd] multilayers were utilized. In case of FePt, where high temperatures during the deposition are necessary to induce the chemical ordering, diffusion and alloying of the spacer material often prevent a sufficient exchange decoupling of the ferromagnetic layers. However, with Ru as spacer material a giant magnetoresistance effect could be achieved. Large improvements of the magnetoresistive behavior of such trilayer structures are presented for [Co/Pt] and [Co/Pd] multilayers, which can be deposited at room temperature not limiting the choice of spacer as well as substrate material. Furthermore, in systems consisting of one ferromagnet with perpendicular magnetic anisotropy and one ferromagnet with in-plane magnetic easy axis, a linear and almost hysteresis-free field dependence of the electrical resistance was observed and the behavior for various thickness series has been intensively studied. Finally, the corrosion resistance in dependence of the capping layer material as well as the magnetoresistance of a strained flexible pseudo-spin-valve structure is presented. In addition, in chapter 2.5.2 an experimental study of an improved crystal growth of FePt at comparable low temperatures by molecular beam epitaxy and further promoted by a surfactant mediated growth using Sb is shown. Auger electron spectroscopy as well as Rutherford backscattering spectrometry were carried out to confirm the surface segregation of Sb and magnetic characterization revealed an increase of magnetic anisotropy in comparison to reference layers without Sb. / Die vorliegende Dissertation beschäftigt sich mit der Untersuchung ferromagnetischer Dünnschichtsysteme im Hinblick auf die Austauchkopplung, das Ummagnetisierungsverhalten und Effekte wie z.B. den Exchange Bias Effekt oder den Riesenmagnetwiderstandseffekt (GMR), welche in derartigen Heterostrukturen auftreten können. Die Probenpräparation erfolgte mittels DC Magnetronsputtern, wobei auf einkristallinen aber auch flexiblen sowie starren amorphen Substraten abgeschieden wurde. Im ersten Teil der Arbeit werden Untersuchungen mit dem Hintergrund einer Anwendung als magnetischer Datenträger vorgestellt. Konkret werden hier die Konzepte Bit Patterned Media (BPM) und 3D Speicher miteinander kombiniert. Letzteres Konzept basiert auf der Verwendung wenigstens zweier austauschentkoppelter ferromagnetischer Schichten, für welche [Co/Pt] Multilagen mit unterschiedlicher magnetischer Anisotropie verwendet wurden. Als Zwischenschichtmaterial diente Pt und Ru. Durch die Charakterisierung des Ummagnetisierungsverhaltens wurde die Austauschkopplung in Abhängigkeit der Zwischenschichtdicke untersucht. Darüber hinaus wurden jene Schichtstapel zur Realisierung des BPM-Konzeptes auf selbstangeordnete SiO2 Partikel mit unterschiedlichen Durchmessern aufgebracht, durch welche sich lateral austauschentkoppelte, eindomänige magnetische Nanostrukturen erzeugen lassen. Zur Untersuchung des Ummagnetisierungsverhaltens und der jeweiligen Größenabhängigkeiten (maßgeblich Durchmesser und Schichtdicke) wurden diese mittels Magnetkraftmikroskopie sowie winkelabhängiger magnetooptischer Kerr Effekt Magnetometrie untersucht. Zur weiteren Vertiefung des Verständnisses noch kleinerer Strukturgrößen erfolgten mikromagnetische Simulationen, bei denen die magnetischen Wechselwirkungen lateral (benachbarte 3D Elemente) als auch vertikal (Wechselwirkungen ferromagnetischer Schichten innerhalb eines 3D Elementes) im Interesse standen, sowie deren Auswirkungen auf das Ummagnetisierungsverhalten des gesamten Feldes. Der Fokus des zweiten Teils liegt auf der Untersuchung des Riesenmagnetwiderstandseffektes in Systemen mit senkrechter Sensitivität. Dafür sind ferromagnetische Schichten mit senkrechter magnetischer Anisotropie nötig, wobei hier die chemisch geordnete L10-Phase der FePt Legierung und [Co/Pt] sowie [Co/Pd] Multilagen Anwendung fanden. Für eine chemische Ordnung der FePt Legierung sind hohe Temperaturen während der Schichtabscheidung notwendig, welche eine hinreichende Austauschentkopplung beider ferromagnetischer Schichten meist nicht gewährleisten. Grund dafür sind einsetzende Diffusionsprozesse als auch Legierungsbildungen mit dem Zwischenschichtmaterial. In der vorliegenden Arbeit konnte der GMR Effekt daher ausschließlich mit einer Ru Zwischenschicht in FePt basierten Trilagensystemen nachgewiesen und charakterisiert werden. Enorme Verbesserungen der magnetoresistiven Eigenschaften werden im Anschluss für [Co/Pt] und vor allem [Co/Pd] Multilagen vorgestellt. Diese Schichtsysteme mit senkrechter magnetischer Anisotropie können bei Raumtemperatur präpariert werden und stellen daher keine weiteren Anforderungen an das Zwischenschichtmaterial sowie die verwendeten Substrate. Hier wurden neben Systemen mit ausschließlich senkrechter magnetischer Anisotropie auch Systeme mit gekreuzten magnetischen Anisotropien intensiv untersucht, da diese durch einen linearen und weitgehend hysteresefreien R(H) Verlauf imHinblick auf Sensoranwendungen enorme Vorteile bieten. Letztendlich wurde die Korrosionsbeständigkeit in Abhängigkeit des Deckschichtmaterials als auch die mechanische Belastbarkeit von auf flexiblen Substraten abgeschiedenen GMR-Schichtstapeln untersucht. Zusätzlich wird in Kapitel 2.5.2 eine experimentelle Studie zum Surfactant-gesteuerten Wachstum der FePt Legierung mittels Molekularstrahlepitaxie vorgestellt. Als Surfactant dient Sb, wodurch die Kristallinität bei geringer Depositionstemperatur deutlich verbessert werden konnte. Die Oberflächensegregation von Sb wurde mittels Auger Elektronenspektroskopie und Rutherford Rückstreuspektrometrie verifiziert und die Charakterisierung magnetischer Eigenschaften belegt einen Anstieg der magnetischen Anisotropieenergie im Vergleich zu Referenzproben ohne Sb.
70

Growth of carbon nanotubes on different support/catalyst systems for advanced interconnects in integrated circuits / Wachstum von Kohlenstoffnanoröhren auf verschiedenen Untergrund/Katalysator-Systemen für zukünftige Leitungsverbindungen in integrierten Schaltkreisen

Hermann, Sascha 15 November 2011 (has links) (PDF)
Since there is a continuous shrinking of feature sizes in ultra-large scale integrated (ULSI) circuits, requirements on materials and technology are going to rise dramatically in the near future. In particular, at the interconnect system this calls for new concepts and materials. Therefore, carbon nanotubes (CNTs) are considered as a promising material to replace partly or entirely metal interconnects in such devices. The present thesis aims to make a contribution to the CNT growth control with the thermal chemical vapor deposition (CVD) method and the integration of CNTs as vertical interconnects (vias) in ULSI circuits. Different support/catalyst systems are examined in processes for catalyst pretreatment and CNT growth. The investigations focus on the catalyst formation and the interactions at the interfaces. Those effects are related to the CNT growth. To get an insight into interactions at interfaces, film structure, composition, and CNT growth characteristics, samples are extensively characterized by techniques like AFM, SEM, TEM, XRD, XPS, and Raman spectroscopy. Screening studies on nanoparticle formation and CNT growth with the well known system SiO2/Ni are presented. This system is characterized by a weak support/catalyst interaction, which leads to undirected growth of multi-walled CNTs (MWCNTs). By contrast, at the Ta/Ni system a strong interaction causes a wetting of catalyst nanoparticles and vertically aligned MWCNT growth. At the system W/Ni a strong interaction at the interface is found as well, but there it induces Stranski-Krastanov catalyst film reformation upon pretreatment and complete CNT growth inhibition. Studies on the SiO2/Cr/Ni system reveal that Cr and Ni act as a bi-catalyst system, which leads to a novel nanostructure defined as interlayer CNT (ICNT) structure. The ICNT films are characterized by well crystallized vertically aligned MWCNTs, which grow out a Cr/Ni layer lifted off as a continuous and very smooth layer from the substrate with the growth. Besides, this nanostructure offers new possibilities for the integration of CNTs in different electronic applications. Based on the presented possibilities of manipulating CNT growth, an integration technology was derived to fabricate CNT vias. The technology uses a surface mediated site-selective CVD for the growth of MWCNTs in via structures. Developments are demonstrated with the fabrication of via test vehicles and the site-selective growth of MWCNTs in vias on 4 inch wafers. Furthermore, the known resistance problem of CNT vias, caused by too low CNT density, is addressed by a new approach. A CNT/metal heterostructure is considered, where the metal is implemented through atomic layer deposition (ALD). The first results of the coating of CNTs with readily reducible copper oxide nanoparticles are presented and discussed. / Aufgrund der kontinuierlichen Verkleinerung von Strukturen in extrem hoch integrierten (engl. Ultra-Large Scale Integration − ULSI) Schaltkreisen werden die Anforderungen an die Materialien und die Technologie in naher Zukunft dramatisch ansteigen. Besonders im Leitbahnsystem sind neue Materialien und Konzepte gefragt. Kohlenstoffnanoröhren (engl. Carbon Nanotubes − CNT) stellen hierbei ein vielversprechendes Material dar, um teilweise oder sogar vollständig metallische Leitbahnen zu ersetzen. Die vorliegende Arbeit liefert einen Beitrag zur CNT-Wachstumskontrolle mit der thermischen Gasphasenabscheidung (engl. Chemical Vapor Deposition − CVD) sowie der Integration von CNTs als vertikale Leitungsverbindungen (Via) in ULSI-Schaltkreisen. Verschiedene Untergrund/Katalysator-Systeme werden in Prozessen zur Katalysatorvorbehandlung sowie zum CNT-Wachstum betrachtet. Die Untersuchungen richten sich insbesondere auf die Katalysatorformierung und die Wechselwirkungen an den Grenzflächen. Diese werden mit dem CNT-Wachstum in Verbindung gebracht. Für Untersuchungen von Grenzflächeninteraktionen, Schichtstruktur, Zusammensetzung sowie CNT-Wachstumscharakteristik werden Analysen mit AFM, REM, TEM, XRD, XPS und Raman-Spektroskopie genutzt. Zunächst werden Voruntersuchungen an dem gut bekannten System SiO2/Ni zur Nanopartikelformierung und CNTWachstum vorgestellt. Dieses System ist gekennzeichnet durch eine schwache Wechselwirkung zwischen Untergrund und Katalysator sowie ungerichtetem Wachstum von mehrwandigen CNTs (MWCNTs). Im Gegensatz dazu hat bei dem System Ta/Ni eine starke Interaktion an der Grenzfläche eine Katalysatornanopartikelbenetzung und vertikales MWCNT-Wachstum zur Folge. Für das W/Ni-System gelten ebenfalls starke Interaktionen an der Grenzfläche. Bei diesem System wird allerdings eine Stranski-Krastanov-Schichtformierung des Katalysators und eine vollständige Unterbindung von CNT-Wachstum erreicht. Bei dem System SiO2/Cr/Ni agieren Cr und Ni als Bi- Katalysatorsystem. Dies führt zu einer neuartigen Nanostruktur, die als Zwischenschicht-CNT (engl. Interlayer Carbon Nanotubes − ICNTs) Struktur definiert wird. Die Schichten sind durch eine gute Qualität von gerichteten MWCNTs charakterisiert, die aus einer geschlossenen, sehr glatten und von den CNTs getragenen Cr/Ni-Schicht herauswachsen. Darüber hinaus bietet die Struktur neue Möglichkeiten für die Integration von CNTs in verschiedene elektronische Anwendungen. Auf der Grundlage der vorgestellten Manipulationsmöglichkeiten von CNT-Wachstum wurde eine Integrationstechnologie für CNTs in Vias abgeleitet. Der Ansatz ist eine oberflächeninduzierte selektive CVD von vertikal gerichteten MWCNTs in Via-Strukturen. Diese Technologie wird mit der Herstellung von einem Via-Testvehikel und dem selektiven CNT-Wachstum in Vias auf 4 Zoll Wafern demonstriert. Um das Widerstandsproblem von CNT-Vias, verursacht durch eine zu niedrige CNT-Dichte, zu reduzieren, wird eine Technologieerweiterung vorgeschlagen. Der Ansatz geht von einer CNT/Metall-Heterostruktur aus, bei der das Metall mit Hilfe der Atomlagenabscheidung (engl. Atomic Layer Deposition − ALD) implementiert wird. Es werden erste Ergebnisse zur CNT-Beschichtung mit reduzierbaren Kupferoxidnanopartikeln vorgestellt und diskutiert.

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