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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
111

Lokal provtagning och analys på rökgaskondensat för driftövervakning av tungmetallrening med jonbytarmassor

Olofsson, Emelie January 2020 (has links)
I värme- och kraftvärmeverk förbränns olika typer av bränslen för produktion av el och fjärrvärme. Vid förbränningen bildas rökgaser som innehåller föroreningar, till exempel tungmetaller, från bränslet. Anläggningarna har ofta krav på utsläpp både via rökgaserna och avloppsvatten. Rökgaserna renas därmed genom olika tekniker var av en vanlig teknik är rökgaskondensering. Vid rökgaskondenseringen bildas en vätska, kallad rökgaskondensat, som delvis innehåller tungmetaller från bränslet. Rökgaskondensatet måste renas innan det kan lämna anläggningen och det görs bland annat med tungmetalljonbytare. Jonbytarmassan i tungmetalljonbytarkolonnerna behöver bytas ungefär två gånger per driftsäsong då den inte längre kan binda mer tungmetaller. Detta är en kostnad för värme- och kraftvärmeverken som de vill minimera. I denna studie undersöktes om lokal provtagning och analys på ett kraftvärmeverk av ett antal utvalda tungmetaller i rökgaskondensat är en bra metod för att optimering av reningssteget med tungmetalljonbytare. Samt om detta kan säkerställa att miljökraven för tungmetaller i det renade rökgaskondensatet uppfylls. Med optimering avses att jonbytarmassornas fulla kapacitet utnyttjas, d.v.s. att byten av jonbytarmassor kan reduceras utan att riskera otillåtna halter av tungmetaller i de renade rökgaskondensatet till följd av att jonbytarmassorna använts för länge. Även tiden som behöver avsättas för lokal provtagning och analys dokumenterades. I dagsläget sker analyser hos ackrediterade laboratorium där det tar drygt två veckor att få resultatet och under väntetiden kan mycket på anläggningen förändras. En verifiering av resultaten från studien gjordes mot resultat från ett sådant. I denna studie undersöktes lokal provtagning och analys med mätinstrumentet FREEDD som bygger på tekniken kvartskristall mikrobalans (QCM-teknik). Andra alternativ för lokal analys har inte undersökts här.  Resultatet visade att det i dagsläget är svårt att med lokal provtagning optimera reningssteget med jonbytarmassor samt kontrollera utsläppen av tungmetaller via det renade rökgaskondensatet. Korrigeringar hos mätinstrumentet och provpunkterna behöver göras för att få pålitligt resultat. Tiden som behöver avsättas för provtagning och analys beror på vilken metall som ska analyseras då tiden för preparering av prov varierar. Men om det kan möjliggöra att anläggningarna kan använda jonbytarmassorna längre samt får kontroll på utsläppen via det renade rökgaskondensatet kan det vara lönsamt att avvara den tiden. / In heating and combined heat and power plants, different types of fuels are burned to produce electricity and district heating. During the combustion flue gases containing pollutants, such as heavy metals, are formed from the flue. The plants have requirements for low emissions, both from the flue gases and the wastewater. The flue gases are purified by various techniques and a common technique is flue gas condensation. During the flue gas condensation, a liquid called flue gas condensate, is formed, which partly contains heavy metals from the flue. The flue gas condensate must be cleaned before it can leave the plant. A step in the purification of the flue gas condensate is usually heavy metal ion-exchanger. The ion-exchange mass in the heavy metal ion-exchange columns needs to be changed approximately twice per operating season as it no longer has room to bind more heavy metals. This is an expensive cost for the heating and combined heat and power plants that they want to minimize. This study investigated whether local sampling and analysis at a cogeneration plant of a number selected heavy metals in flue gas condensate is a good method for optimizing the purifications step with heavy metal ion-exchangers. And if this can ensure that the environmental requirements for the heavy metals in the purified flue gas condensate are met. Optimization means that the full capacity of the ion-exchange masses is utilized, i.e. that the exchange of ion-exchange masses can be reduced without risking unauthorized levels of heavy metals in the purified flue gas condensate as a result of the ion exchange masses being used for too long.  The time needed for local sampling and analysis was also documented. At present, analyzes are done at accredited laboratories where it takes over two weeks to get the result and during that time much can be changes at the plant. A verification of the result of the study was also made against the result of an accredited laboratory. In this study, local analysis was made with the measuring instrument FREEDD which is based on quartz crystal microbalance (QCM-technology). Other options for local sampling and analysis have not been investigated. The result showed that, in the present, it is difficult to optimize the purification step with ion-exchange masses and check emissions of heavy metals with the purified flue gas condensate. To obtain reliable result, corrections to the measuring instrument and test points need to be made. The time that needs to be set aside for sampling and analysis depends on the metal, as the time for sample preparation varies.  But if it can enable the plants to use the ion-exchange masses longer and gain control of the emissions of heavy metals with the purified flue gas condensate, it can be profitable to save that time.
112

Electrochemical studies of coatings and thin films

Kang, Jiho 22 February 2006 (has links)
No description available.
113

Surface characterization and functional properties of carbon-based materials

Nelson, Geoffrey Winston January 2012 (has links)
Carbon-based materials are poised to be an important class of 21st century materials, for bio-medical, bio-electronic, and bio-sensing applications. Diamond and polymers are two examples of carbon-based materials of high interest to the bio-materials community. Diamond, in its conductive form, can be used as an electrochemical bio-sensor, whilst its nanoparticle form is considered a non-inflammatory platform to deliver drugs or to grow neuronal cells. Polymers, especially when chemically modified, have been used extensively in biological environments, from anti-microbial use to drug delivery. The large-scale use of either material for biological use is limited by two factors: ease of chemical modification and the paucity of knowledge of their surface chemistry in aqueous media. This thesis addresses aspects of both these issues. The first study reported is an in situ study of the adsorption dynamics of an exemplar globular protein (bovine serum albumin, BSA) on nanodiamond using the relatively novel quartz crystal microbalance with dissipation (QCM-D) technique. For the first time, QCM-D enabled the detailed study of protein dynamics (i.e. kinetics, viscoelastic properties, overlayer structure, etc.) onto nanodiamond thin films having various surface chemistry and roughness. The dynamics of protein adsorption is found to be sensitive to surface chemistry at all stages of adsorption, but it is only sensitive to surface roughness during initial adsorption phases. Our understanding of the nanodiamond-biology interface is enhanced by this study, and it suggests that QCM-D is useful for the study of the surface chemistry of nanoparticle forms of inorganic materials. A second study concerns a novel surface functionalization scheme, based on carbene and azo-coupling chemistry, which has been recently introduced as a practical, facile method for modifying the surfaces of polymers. Using modern surface characterization techniques, it is demonstrated that a chemical linker can be attached to polystyrene surfaces using carbene-based chemistry, and that further chemical functionality can be added to this chemical linker via an azo-coupling reaction. In situ studies of protein dynamics at these interfaces were conducted using QCM-D, thus enabling a link between specific protein behaviour and the polymer surface chemical termination chemistry to be made. A third area of study of investigates the use of diamond electrodes as a bio-sensor for dopamine under physiological conditions. For these conditions, ascorbic acid interferes with the dopamine oxidation signal, in ways that render the two signals irresolvable. Various modifications are used in attempts to reduce this interference, including: small and large cathodic treatments, grafting of electro-active polymers, addition of carbon nanotubes, and hydrogen plasma treatment. Those modifications leading to the hydrogen-termination of diamond are shown to work the best. Notably, hydrogen plasma treatment effects the complete electrochemical separation of dopamine and ascorbic acid at a diamond electrode. This is the first time this has been accomplished without adding non-diamond materials to the diamond electrode surface.
114

Química da parte úmida em processo de fabricação de papel - interações em interfaces sólido-líquido. / Wet end chemistry in papermaking - interactions in solid-liquid interfaces.

Silva, Deusanilde de Jesus 02 March 2010 (has links)
Um polieletrólito catiônico (poliamina), com baixo peso molecular e elevada densidade de carga, normalmente aplicado como agente coagulante do lixo aniônico, foi usado para estudos de retenção e drenagem na fabricação de papel. O uso do carboximentil celulose de sódio para simulação do teor de lixo aniônico e seu efeito na retenção de cargas minerais foi uma característica importante para este trabalho. Pode ser observado que o aumento da dosagem do polímero catiônico tanto melhora a retenção de cargas minerais, avaliada pela turbidez do filtrado, quanto melhora a drenagem do sistema, avaliada pela velocidade de escoamento. Entretanto, elevadas dosagens deste polímero comprometeram os resultados destes parâmetros devido à inversão de carga do sistema. Pode também ser confirmado que forças de cisalhamento excessivas prejudicam a retenção de cargas minerais. Ademais, um polianfótero, com peso molecular e densidade de carga elevados, contendo grupos positivo (N-[3-(N,N-dimetilamino)propil]acrilamida), negativo (ácido metileno butanodióico) e nulo (acrilamida) na mesma cadeia, foi testado como agente de resistência a seco do papel. Todos os estudos em nível molecular sobre o comportamento do polianfótero em solução e o seu comportamento de adsorção sobre superfícies modelos carregadas, em diferentes condições de pH e de força iônica, foram importantes para explicar tanto dos fenômenos de adsorção, envolvendo fibras celulósicas e polianfótero, quanto o seu efeito na resistência mecânica do papel. Foi observado que a solubilidade do polímero aumenta à medida que o pH se distancia do seu ponto isoelétrico, pHPIE 7,3, e reduz para valores de pH próximos ao pHPIE. O tamanho das estruturas do polianfótero depende do pH do meio de dispersão. As características de tamanho do polianfótero tanto sob a forma de cadeias individuais ou quanto sob a forma de agregados, foram medidas através da técnica de espalhamento dinâmico de luz. As propriedades viscoelásticas das camadas adsorvidas e a quantidade de polímero adsorvida foram medidas através da técnica da balança microgravimétrica com dissipação de energia. Estas duas determinações, associadas às imagens no microscópio de força atômica, foram importantes para o entendimento dos resultados práticos do uso do polianfótero como agente de resistência a seco do papel. Maiores resultados de resistência do papel, avaliada através da resistência à tração, foram alcançados para valores de pH próximos ao ponto isoelétrico onde foram encontrados o seguinte: (1) maiores tamanhos para as estruturas do polímero em solução, (2) maior quantidade de massa nas camadas adsorvidas e (3) a formação de camadas mais viscoelásticas. O fenômeno de separação de fases, associado à mudança da solubilidade do polímero em solução devido ao balanço dos grupos positivos e negativos ionizados ao longo da faixa de pH estudada, foi considerado o principal aspecto para a variação em tamanho dos agregados. Embora este polímero tenha apresentado comportamento antipolieletrólito devido à expansão da sua cadeia e ao aumento da densidade de carga com o aumento da força iônica, considerando o efeito da força iônica para pH 4,3, o comportamento de adsorção do polianfótero foi avaliado como o comportamento de um polieletrólito monocarregado de alta densidade de carga. Maiores e menores quantidades de massas adsorvidas foram encontradas para valores intermediários e extremos de força iônica, respectivamente. As interações eletrostáticas foram consideradas as principais responsáveis pela adsorção do polímero sobre superfícies carregadas. Entretanto, a blindagem de cargas foi considerada a explicação para os baixos valores de massa adsorvida para valores mais elevados de força iônica. / A cationic polyelectrolyte (polyamine), with low molecular weight and high charge density, usually applied as anionic trash coagulant, was used for the retention and drainage studies in the papermaking. The use of sodium carboxymethyl cellulose to simulate the anionic trash content and its effect on the filler retention was an important feature of the work. It could be noted that the increasing of the cationic polymer dosage improves both the filler retention, evaluated by the turbidity of the filtrate, and the system drainage, evaluated by the flow speed. However, high dosages of this polymer compromised the results of these parameters due to the reversal of the system charge. It can also be confirmed that excessive shear forces affect the filler retention. Furthermore, a polyampholyte, with high molecular weight and charge density, containing positive (N-[3-(N,N- dimethylamino)propyl]acrylamide), negative (methylene butanedioic acid), and neutral (acrylamide) groups in the same chain, was tested as a dry strength agent. All of the studies at molecular level concerning to the polyampholyte behavior in the solution and its adsorption behavior on charged model surfaces at different conditions of pH and ionic strength, were important to explain both the adsorption phenomena, involving cellulosic fibers and polyampholyte, and its impact on the paper strength. It was observed that the polymer solubility increases as the pH moves away from its isoelectric point, pHIEP 7.3, and decreases when the pH approaches close to pHIEP. The sizes of the structures of the polyampholytes depend on the pH of the dispersion medium. Also the size characteristics of polyampholyte, both in individual and aggregated forms, were measured by dynamic light scattering technique. The viscoelastic properties of adsorbed layers, as well as the amount of the adsorbed polymer, were measured by quartz crystal microbalance technique with energy dissipation. These two measurements, associated with the atomic force microscopy images, were important to understand the practical results of polyampholyte usage as a dry strength agent. Best results of paper strength, evaluated by paper strength index, were achieved at pH close to the isoelectric point on which one were found the following features: (1) larger sizes of the polymer structures in solution, (2) higher amount of mass in the adsorbed layers, and (3) the formation of more viscoelastic layers. The phase separation phenomenon, associated with the change in the solubility of the polymer due to the balance of the positive and negative groups throughout the studied pH range, was considered the main aspect for the variation in size of the aggregates. Although this polymer shows antipolyelectrolyte behavior due to the expansion of the its chain and the increasing in charge density with the ionic strength, considering the effect of ionic strength at pH 4.3, the adsorption behavior of polyampholyte was evaluated as a monocharged polyelectrolyte behavior with high charge density. Major and minor amounts of adsorbed masses were found for intermediates and extremes values of ionic strength, respectively. The electrostatic interactions were considered the main cause of the adsorption on charged surfaces. However, the electrostatic screening was considered the explanation for the low values of adsorbed mass at higher values of ionic strength.
115

HIV-1 Nef destabilisiert artifizielle Membransysteme: Untersuchung der Bedeutung des Myristoylankers und des positiven Ladungsclusters / HIV-1 Nef perturbs artificial membranes: investigation of the contribution of the myristoyl anchor and of the basic amino acid cluster

Szilluweit, Ruth 28 April 2009 (has links)
No description available.
116

Química da parte úmida em processo de fabricação de papel - interações em interfaces sólido-líquido. / Wet end chemistry in papermaking - interactions in solid-liquid interfaces.

Deusanilde de Jesus Silva 02 March 2010 (has links)
Um polieletrólito catiônico (poliamina), com baixo peso molecular e elevada densidade de carga, normalmente aplicado como agente coagulante do lixo aniônico, foi usado para estudos de retenção e drenagem na fabricação de papel. O uso do carboximentil celulose de sódio para simulação do teor de lixo aniônico e seu efeito na retenção de cargas minerais foi uma característica importante para este trabalho. Pode ser observado que o aumento da dosagem do polímero catiônico tanto melhora a retenção de cargas minerais, avaliada pela turbidez do filtrado, quanto melhora a drenagem do sistema, avaliada pela velocidade de escoamento. Entretanto, elevadas dosagens deste polímero comprometeram os resultados destes parâmetros devido à inversão de carga do sistema. Pode também ser confirmado que forças de cisalhamento excessivas prejudicam a retenção de cargas minerais. Ademais, um polianfótero, com peso molecular e densidade de carga elevados, contendo grupos positivo (N-[3-(N,N-dimetilamino)propil]acrilamida), negativo (ácido metileno butanodióico) e nulo (acrilamida) na mesma cadeia, foi testado como agente de resistência a seco do papel. Todos os estudos em nível molecular sobre o comportamento do polianfótero em solução e o seu comportamento de adsorção sobre superfícies modelos carregadas, em diferentes condições de pH e de força iônica, foram importantes para explicar tanto dos fenômenos de adsorção, envolvendo fibras celulósicas e polianfótero, quanto o seu efeito na resistência mecânica do papel. Foi observado que a solubilidade do polímero aumenta à medida que o pH se distancia do seu ponto isoelétrico, pHPIE 7,3, e reduz para valores de pH próximos ao pHPIE. O tamanho das estruturas do polianfótero depende do pH do meio de dispersão. As características de tamanho do polianfótero tanto sob a forma de cadeias individuais ou quanto sob a forma de agregados, foram medidas através da técnica de espalhamento dinâmico de luz. As propriedades viscoelásticas das camadas adsorvidas e a quantidade de polímero adsorvida foram medidas através da técnica da balança microgravimétrica com dissipação de energia. Estas duas determinações, associadas às imagens no microscópio de força atômica, foram importantes para o entendimento dos resultados práticos do uso do polianfótero como agente de resistência a seco do papel. Maiores resultados de resistência do papel, avaliada através da resistência à tração, foram alcançados para valores de pH próximos ao ponto isoelétrico onde foram encontrados o seguinte: (1) maiores tamanhos para as estruturas do polímero em solução, (2) maior quantidade de massa nas camadas adsorvidas e (3) a formação de camadas mais viscoelásticas. O fenômeno de separação de fases, associado à mudança da solubilidade do polímero em solução devido ao balanço dos grupos positivos e negativos ionizados ao longo da faixa de pH estudada, foi considerado o principal aspecto para a variação em tamanho dos agregados. Embora este polímero tenha apresentado comportamento antipolieletrólito devido à expansão da sua cadeia e ao aumento da densidade de carga com o aumento da força iônica, considerando o efeito da força iônica para pH 4,3, o comportamento de adsorção do polianfótero foi avaliado como o comportamento de um polieletrólito monocarregado de alta densidade de carga. Maiores e menores quantidades de massas adsorvidas foram encontradas para valores intermediários e extremos de força iônica, respectivamente. As interações eletrostáticas foram consideradas as principais responsáveis pela adsorção do polímero sobre superfícies carregadas. Entretanto, a blindagem de cargas foi considerada a explicação para os baixos valores de massa adsorvida para valores mais elevados de força iônica. / A cationic polyelectrolyte (polyamine), with low molecular weight and high charge density, usually applied as anionic trash coagulant, was used for the retention and drainage studies in the papermaking. The use of sodium carboxymethyl cellulose to simulate the anionic trash content and its effect on the filler retention was an important feature of the work. It could be noted that the increasing of the cationic polymer dosage improves both the filler retention, evaluated by the turbidity of the filtrate, and the system drainage, evaluated by the flow speed. However, high dosages of this polymer compromised the results of these parameters due to the reversal of the system charge. It can also be confirmed that excessive shear forces affect the filler retention. Furthermore, a polyampholyte, with high molecular weight and charge density, containing positive (N-[3-(N,N- dimethylamino)propyl]acrylamide), negative (methylene butanedioic acid), and neutral (acrylamide) groups in the same chain, was tested as a dry strength agent. All of the studies at molecular level concerning to the polyampholyte behavior in the solution and its adsorption behavior on charged model surfaces at different conditions of pH and ionic strength, were important to explain both the adsorption phenomena, involving cellulosic fibers and polyampholyte, and its impact on the paper strength. It was observed that the polymer solubility increases as the pH moves away from its isoelectric point, pHIEP 7.3, and decreases when the pH approaches close to pHIEP. The sizes of the structures of the polyampholytes depend on the pH of the dispersion medium. Also the size characteristics of polyampholyte, both in individual and aggregated forms, were measured by dynamic light scattering technique. The viscoelastic properties of adsorbed layers, as well as the amount of the adsorbed polymer, were measured by quartz crystal microbalance technique with energy dissipation. These two measurements, associated with the atomic force microscopy images, were important to understand the practical results of polyampholyte usage as a dry strength agent. Best results of paper strength, evaluated by paper strength index, were achieved at pH close to the isoelectric point on which one were found the following features: (1) larger sizes of the polymer structures in solution, (2) higher amount of mass in the adsorbed layers, and (3) the formation of more viscoelastic layers. The phase separation phenomenon, associated with the change in the solubility of the polymer due to the balance of the positive and negative groups throughout the studied pH range, was considered the main aspect for the variation in size of the aggregates. Although this polymer shows antipolyelectrolyte behavior due to the expansion of the its chain and the increasing in charge density with the ionic strength, considering the effect of ionic strength at pH 4.3, the adsorption behavior of polyampholyte was evaluated as a monocharged polyelectrolyte behavior with high charge density. Major and minor amounts of adsorbed masses were found for intermediates and extremes values of ionic strength, respectively. The electrostatic interactions were considered the main cause of the adsorption on charged surfaces. However, the electrostatic screening was considered the explanation for the low values of adsorbed mass at higher values of ionic strength.
117

Instrumental techniques for improving the measurements based on Quartz Crystal Microbalances (Técnicas instrumentales para mejorar las mediciones con microbalanzas de cuarzo)

Torres Villa, Robinsón Alberto 01 October 2012 (has links)
L'Electrogravimetria AC empra una microbalança de quars electroquímica (EQCM) en règim dinàmic. En l'EQCM un dels elèctrodes d'or depositats sobre el cristall és recobert amb una fina pelolícula d'un polímer electroactiv i és emprat com a elèctrode de treball (WE) dins d'una celola electroquímica. Les variacions de la freqüència de ressonància de la microbalança de quars (QCM) permeten obtindre la resposta massa associada amb la transferència de càrrega que es dóna en la interfície polímer-electròlit. L'Electrogravimetria AC va ser proposta a fi de caracteritzar i separadament identificar el moviment dels ions i el solvent en la interfície polímer-electròlit. En esta tècnica s'analitza en el domine de la freqüència la resposta de massa davant de xicotetes pertorbacions de voltatge gràcies a l'ocupació de la microbalança de quars en règim dinàmic. Per a este propòsit s'aplica una xicoteta pertorbació sinusoidal superposada a una tensió contínua, entre l'elèctrode de referència i l'elèctrode de treball de la celola. Posteriorment, es pot dibuixar la funció de transferència electrogravimètrica (EGTF), definida esta com la raó (?m/?E) entre l'amplitud dels canvis de massa induïts (?m) i l'amplitud de la pertorbació sinusoïdal aplicada (?E). Esta funció de transferència se dibuixa en un pla complex per a cada una de les freqüències de la senyal de pertorbació. Les distintes espècies iònicas involucrades són identificades en el pla complex per mitjà de bucles característics sempre que els bucles no se superposen. Per mitjà d'esta tesi doctoral es proposa un nou sistema de conversió de freqüència-tensió basat en un doble ajust de freqüència implementat amb un PLL mesclant elements analògics i digitals (AD PLL). Els resultats trobats tant en la caracterització electrònica del dispositiu com en la fase experimental proven la fiabilitat del sistema per als mesuraments realitzats en la tècnica d'Electrogravimetria AC. / Torres Villa, RA. (2007). Instrumental techniques for improving the measurements based on Quartz Crystal Microbalances (Técnicas instrumentales para mejorar las mediciones con microbalanzas de cuarzo) [Tesis doctoral no publicada]. Universitat Politècnica de València. https://doi.org/10.4995/Thesis/10251/17323 / Palancia
118

Development of a novel high resolution and high throughput biosensing technology based on a Monolithic High Fundamental Frequency Quartz Crystal Microbalance (MHFF-QCM). Validation in food control

Calero Alcarria, María del Señor 02 May 2022 (has links)
Tesis por compendio / [ES] La sociedad actual demanda un mayor control en la seguridad y calidad de los alimentos que se consumen. Esta preocupación se ve reflejada en los diferentes planes estatales y europeos de investigación científica, los cuales, plantean la necesidad de innovar y desarrollar nuevas técnicas analíticas que cubran los requerimientos actuales. En el presente documento se aborda el problema de la presencia de residuos químicos en la miel. El origen de los mismos se debe, fundamentalmente, a los tramientos veterinarios con los que se tratan enfermedades y parásitos en las abejas, y a los tratamientos agrícolas con los que las abejas se ponen en contacto cuando recolectan el néctar en cultivos próximos a las colmenas. La Agencia Europea de Seguridad Alimentaria (EFSA) confirma esta realidad al notificar numerosas alertas sanitarias en la miel. En los últimos años, los métodos de análisis basados en inmunosensores piezoeléctricos se han posicionado como la base de una técnica de cribado muy prometedora, la cual puede ser empleada como técnica complementaria a las clásicas de cromatografía, gracias a su sencillez, rapidez y bajo coste. La tecnología de resonadores High-Fundamental Frequency Quartz Crystal Microbalance with Dissipation (HFF-QCMD) combina la detección directa en tiempo real, alta sensibilidad y selectividad con un fácil manejo y coste reducido en comparación con otras técnicas. Además, está tecnología permite aumentar el rendimiento del análisis mediante el diseño de arrays de resonadores en un mismo sustrato (Monolithic HFF-QCMD). En este documento se presenta el diseño de un array de 24 sensores HFF-QCMD, junto con un cartucho de micro-fluídica que traza diversos microcanales sobre los diferentes elementos sensores, a los que hace llegar la muestra de miel diluida a analizar. El cartucho actúa también como interfaz para realizar la conexión entre el array de resonadores y el instrumento de caracterización de los mismos. Para obtener el máximo partido del array diseñado, se desarrolla un método de medida robusto y fiable que permite elevar la tasa de adquisición de datos para facilitar la toma de registros eléctricos de un elevado número de resonadores de forma simultánea, e incluso en varios armónicos del modo fundamental de resonancia. La gran sensibilidad de la tecnología HFF-QCMD a los eventos bioquímicos a caracterizar se extiende también a otro tipo eventos externos, como son los cambios de temperatura o presión, lo que es necesario minimizar con el fin de reducir el impacto que estas perturbaciones no deseadas provocan en la estabilidad y fiabilidad de la medida. Con este fin, se desarrolla un algoritmo de procesado de señal basado en la Discrete Transform Wavelet (DTW). Finalmente, todos los desarrollos tecnológicos realizados se validan mediante la implementación de un inmunoensayo para la detección simultánea, en muestras de mieles reales, de residuos químicos de naturaleza química muy diferente, a saber, el fungicida tiabendazol y el antibiótico sulfatiazol. / [CA] La societat actual demanda un major control en la seguretat i qualitat dels aliments que es consumeixen. Aquesta preocupació es veu reflectida en els diferents plans estatals i europeus d'investigació científica, els quals, plantegen la necessitat d'innovar i desenvolupar noves tècniques analítiques que cobrisquen els requeriments actuals. En el present document s'aborda el problema de la presència de residus químics en la mel. L'origen dels mateixos es deu, fonamentalment, als tractaments veterinaris amb els quals es tracten malalties i paràsits en les abelles, i als tractaments agrícoles amb els quals les abelles es posen en contacte quan recol·lecten el nèctar en cultius pròxims als ruscos. L'Agència Europea de Seguretat Alimentària (EFSA) confirma aquesta realitat notificant nombroses alertes sanitàries en la mel. En els últims anys, els mètodes d'anàlisis basades en immunosensors piezoelèctrics s'han posicionat com la base d'una tècnica de garbellat molt prometedora, la qual pot ser emprada com a tècnica complementària a les clàssiques de cromatografia, gràcies a la seua senzillesa, rapidesa i baix cost. La tecnologia de ressonadors High-Fundamental Frequency Quartz Crystal Microbalance with Dissipation (HFF-QCMD) combina la detecció directa en temps real, alta sensibilitat i selectivitat amb un fàcil maneig i cost reduït en comparació amb altres tècniques. A més, està tecnologia permet augmentar el rendiment del anàlisi mitjançant el disseny d'arrays de ressonadors en un mateix substrat (Monolithic HFF-QCMD). En aquest document es presenta el disseny d'un array de 24 sensors HFF-QCMD, juntament amb un cartutx de microfluídica que estableix diversos microcanals sobre els diferents elements sensors, als quals fa arribar la mostra de mel diluïda a analitzar. El cartutx actua també com a interfície per a realitzar la connexió entre l'array de ressonadors i l'instrument de caracterització d'aquests. Per a traure el màxim partit a l'array dissenyat, es desenvolupa un mètode de mesura robust i fiable que permet elevar la taxa d'adquisició de dades per a facilitar la presa de registres elèctrics d'un elevat nombre de ressonadors de manera simultània, i fins i tot en diversos harmònics del mode fonamental de ressonància. La gran sensibilitat de la tecnologia HFF-QCMD als esdeveniments bioquímics a caracteritzar s'estén també a un altre tipus esdeveniments externs, com són els canvis de temperatura o pressió, la qual cosa és necessari minimitzar amb la finalitat de reduir l'impacte que aquestes pertorbacions no desitjades provoquen en l'estabilitat i fiabilitat de la mesura. A aquest efecte, es desenvolupa un algorisme de processament de senyal basat en la Discrete Transform Wavelet (DTW). Finalment, tots els desenvolupaments tecnològics realitzats es validen mitjançant la implementació d'un immunoassaig per a la detecció simultània, en mostres de mel reals, de residus químics de naturalesa química molt diferent, a saber, el fungicida tiabendazol i l'antibiòtic sulfatiazol. / [EN] Currently, society demands greater control over the safety and quality of the food consumed. This concern is reflected in the different states and European plans for scientific research, which establish the necessity to innovate and develop new analytical techniques that meet current requirements. This document addresses the problem of the presence of chemical residues in honey. Its origin is fundamentally due to the veterinary treatments against diseases and parasites in bees, and also to the agricultural treatments with which the bees come into contact when they collect the nectar in crops close to the hives. The European Food Safety Agency (EFSA) confirms this reality by notifying numerous health alerts in honey. In recent years, analysis methods based on piezoelectric immunosensors have been positioned as the basis of a very promising screening technique, which can be used as a complementary technique to the classic chromatography, thanks to its simplicity, speed and low cost. High-Fundamental Frequency Quartz Crystal Microbalance with Dissipation (HFF-QCMD) resonator technology combines direct real-time detection, high sensitivity and selectivity with easy handling and low cost compared to other techniques. In addition, this technology allows increasing the performance of the analysis through the design of resonator arrays on the same substrate (Monolithic HFF-QCMD). This document presents the design of an array of 24 HFF-QCMD sensors, together with a microfluidic cartridge that establish various microchannels on the different sensor elements, to provide them the diluted honey sample to be analyzed. The cartridge also acts as an interface to make the connection between the array of resonators and the characterization instrument. To get the most out of the designed array, a robust and reliable measurement method has been developed that allows increasing the data acquisition rate to facilitate electrical parameters readout from a high number of resonators simultaneously, and even in several harmonics of the fundamental resonance mode. The great sensitivity of the HFF-QCMD technology to the biochemical events to be characterized also is extended to other types of external events, such as changes in temperature or pressure, which must be minimized in order to reduce the impact that these unwanted disturbances cause in the stability and reliability of the measurement. To this end, a signal processing algorithm based on the Discrete Transform Wavelet (DTW) is developed. Finally, all the technological developments carried out are validated through the implementation of an immunoassay for the simultaneous detection, in real honey samples, of chemical residues of very different chemical nature, namely, the fungicide thiabendazole and the antibiotic sulfathiazole. / The authors would also like to thank Jorge Martínez from the Laboratory of High Frequency Circuits (LCAF) of the Universitat Politècnica de València (UPV) for assistance with profilometry, and Manuel Planes, José Luis Moya, Mercedes Tabernero, Alicia Nuez and Joaquin Fayos from the Electron Microscopy Services of the UPV for helping with the AFM, and SEM measurements. M.Calero is the recipient of the doctoral fellowship BES-2017-080246 from the Spanish Ministry of Economy, Industry and Competitiveness (Madrid, Spain). This research was funded by Spanish Ministry of Economy and Competitiveness with FEDER funds (AGL 2016-77702-R) and European Commission Horizon 2020 Programme (Grant Agreement number H2020-FETOPEN-2016-2017/737212-CATCH-U-DNA - Capturing non-Amplified Tumor Circulating DNA with Ultrasound Hydrodynamics) for which the authors are grateful. Román Fernández is with the Center for Research and Innovation in Bioengineering (Ci2B), Universitat Politècnica de València, València, Spain and with Advanced Wave Sensors S.L., Paterna, València, Spain. (e-mail: rfernandez@awsensors.com); Yolanda Jiménez, Antonio Arnau and María Calero are with the Center for Research and Innovation in Bioengineering (Ci2B), Universitat Politècnica de València, València, Spain; Ilya Reiviakine is with Advanced Wave Sensors S.L., Paterna, Valencia, Spain and with the Department of Bioengineering, University of Washington, Seattle, WA, 98150 USA; María Isabel Rocha-Gaso and José Vicente García are with Advanced Wave Sensors S.L., Paterna, València, Spain. / Calero Alcarria, MDS. (2022). Development of a novel high resolution and high throughput biosensing technology based on a Monolithic High Fundamental Frequency Quartz Crystal Microbalance (MHFF-QCM). Validation in food control [Tesis doctoral]. Universitat Politècnica de València. https://doi.org/10.4995/Thesis/10251/182652 / TESIS / Compendio
119

Evaluation of novel metalorganic precursors for atomic layer deposition of Nickel-based thin films / Evaluierung neuartiger metallorganischen Präkursoren für Atomlagenabscheidung von Nickel-basierten Dünnschichten

Sharma, Varun 04 June 2015 (has links) (PDF)
Nickel und Nickel (II) -oxid werden in großem Umfang in fortgeschrittenen elektronischen Geräten verwendet. In der Mikroelektronik-Industrie wird Nickel verwendet werden, um Nickelsilizid bilden. Die Nickelmono Silizid (NiSi) wurde als ausgezeichnetes Material für Source-Drain-Kontaktanwendungen unter 45 nm-CMOS-Technologie entwickelt. Im Vergleich zu anderen Siliziden für die Kontaktanwendungen verwendet wird NiSi wegen seines niedrigen spezifischen Widerstand, niedrigen Kontaktwiderstand, relativ niedrigen Bildungstemperatur und niedrigem Siliziumverbrauchs bevorzugt. Nickel in Nickelbasis-Akkus und ferromagnetischen Direktzugriffsspeicher (RAMs) verwendet. Nickel (II) oxid wird als Transistor-Gate-Oxid und Oxid in resistive RAM genutzt wird. Atomic Layer Deposition (ALD) ist eine spezielle Art der Chemical Vapor Deposition (CVD), das verwendet wird, um sehr glatte sowie homogene Dünnfilme mit hervorragenden Treue auch bei hohen Seitenverhältnissen abzuscheiden. Es basiert auf selbstabschließenden sequentielle Gas-Feststoff-Reaktionen, die eine präzise Steuerung der Filmdicke auf wenige Angström lassen sich auf der Basis. Zur Herstellung der heutigen 3D-elektronische Geräte, sind Technologien wie ALD erforderlich. Trotz der Vielzahl von praktischen Anwendungen von Nickel und Nickel (II) -oxid, sind einige Nickelvorstufen zur thermischen basierend ALD erhältlich. Darüber hinaus haben diese Vorstufen bei schlechten Filmeigenschaften führte und die Prozesseigenschaften wurden ebenfalls begrenzt. Daher in dieser Masterarbeit mussten die Eigenschaften verschiedener neuartiger Nickelvorstufen zu bewerten. Alle neuen Vorstufen heteroleptische (verschiedene Arten von Liganden) und Komplexe wurden vom Hersteller speziell zur thermischen basierend ALD aus reinem Nickel mit H 2 als ein Co-Reaktionsmittel gestaltet. Um die neuartige Vorläufer zu untersuchen, wurde eine neue Methode entwickelt, um kleine Mengen in einer sehr zeitsparend (bis zu 2 g) von Ausgangsstoffen zu testen. Diese Methodologie beinhaltet: TGA / DTA-Kurve analysiert der Vorstufen, thermische Stabilitätstests in dem die Vorläufer (<0,1 g) wurden bei erhöhter Temperatur in einer abgedichteten Umgebung für mehrere Stunden wurde die Abscheidung Experimenten und Film Charakterisierungen erhitzt. Die Abscheidungen wurden mit Hilfe der in situ Quarzmikrowaage überwacht, während die anwendungsbezogenen Filmeigenschaften, wie chemische Zusammensetzung, physikalische Phase, Dicke, Dichte, Härte und Schichtwiderstand wurden mit Hilfe von ex situ Messverfahren untersucht. Vor der Evaluierung neuartiger Nickelvorstufen ein Benchmark ALD-Prozess war vom Referenznickelvorläufer (Ni (AMD)) und Luft als Reaktionspartner entwickelt. Das Hauptziel der Entwicklung und Optimierung von solchen Benchmark-ALD-Prozess war es, Standard-Prozessparameter wie zweite Reaktionspartner Belichtungszeiten, Argonspülung Zeiten, gesamtprozessdruck, beginnend Abscheidungstemperatur und Gasströme zu extrahieren. Diese Standard-Prozessparameter mussten verwendet, um die Prozessentwicklung Aufgabe (das spart Vorläufer Verbrauch) zu verkürzen und die Sublimationstemperatur Optimierung für jede neuartige Vorstufe werden. Die ALD Verhalten wurde in Bezug auf die Wachstumsrate durch Variation des Nickelvorläuferbelichtungszeit, Vorläufer Temperatur und Niederschlagstemperatur überprüft. / Nickel and nickel(II) oxide are widely used in advanced electronic devices . In microelectronic industry, nickel is used to form nickel silicide. The nickel mono-silicide (NiSi) has emerged as an excellent material of choice for source-drain contact applications below 45 nm node CMOS technology. As compared to other silicides used for the contact applications, NiSi is preferred because of its low resistivity, low contact resistance, relatively low formation temperature and low silicon consumption. Nickel is used in nickel-based rechargeable batteries and ferromagnetic random access memories (RAMs). Nickel(II) oxide is utilized as transistor gate-oxide and oxide in resistive RAMs. Atomic Layer Deposition (ALD) is a special type of Chemical Vapor Deposition (CVD) technique, that is used to deposit very smooth as well as homogeneous thin films with excellent conformality even at high aspect ratios. It is based on self-terminating sequential gas-solid reactions that allow a precise control of film thickness down to few Angstroms. In order to fabricate todays 3D electronic devices, technologies like ALD are required. In spite of huge number of practical applications of nickel and nickel(II) oxide, a few nickel precursors are available for thermal based ALD. Moreover, these precursors have resulted in poor film qualities and the process properties were also limited. Therefore in this master thesis, the properties of various novel nickel precursors had to be evaluated. All novel precursors are heteroleptic (different types of ligands) complexes and were specially designed by the manufacturer for thermal based ALD of pure nickel with H 2 as a co-reactant. In order to evaluate the novel precursors, a new methodology was designed to test small amounts (down to 2 g) of precursors in a very time efficient way. This methodology includes: TGA/DTA curve analyses of the precursors, thermal stability tests in which the precursors (< 0.1 g) were heated at elevated temperatures in a sealed environment for several hours, deposition experiments, and film characterizations. The depositions were monitored with the help of in situ quartz crystal microbalance, while application related film properties like chemical composition, physical phase, thickness, density, roughness and sheet resistance were investigated with the help of ex situ measurement techniques. Prior to the evaluation of novel nickel precursors, a benchmark ALD process was developed from the reference nickel precursor (Ni(amd)) and air as a co-reactant. The main goal of developing and optimizing such benchmark ALD process was to extract standard process parameters like second-reactant exposure times, Argon purge times, total process pressure, starting deposition temperature and gas flows. These standard process parameters had to be utilized to shorten the process development task (thus saving precursor consumption) and optimize the sublimation temperature for each novel precursor. The ALD behaviour was checked in terms of growth rate by varying the nickel precursor exposure time, precursor temperature and deposition temperature.
120

Evaluation of novel metalorganic precursors for atomic layer deposition of Nickel-based thin films

Sharma, Varun 17 February 2015 (has links)
Nickel und Nickel (II) -oxid werden in großem Umfang in fortgeschrittenen elektronischen Geräten verwendet. In der Mikroelektronik-Industrie wird Nickel verwendet werden, um Nickelsilizid bilden. Die Nickelmono Silizid (NiSi) wurde als ausgezeichnetes Material für Source-Drain-Kontaktanwendungen unter 45 nm-CMOS-Technologie entwickelt. Im Vergleich zu anderen Siliziden für die Kontaktanwendungen verwendet wird NiSi wegen seines niedrigen spezifischen Widerstand, niedrigen Kontaktwiderstand, relativ niedrigen Bildungstemperatur und niedrigem Siliziumverbrauchs bevorzugt. Nickel in Nickelbasis-Akkus und ferromagnetischen Direktzugriffsspeicher (RAMs) verwendet. Nickel (II) oxid wird als Transistor-Gate-Oxid und Oxid in resistive RAM genutzt wird. Atomic Layer Deposition (ALD) ist eine spezielle Art der Chemical Vapor Deposition (CVD), das verwendet wird, um sehr glatte sowie homogene Dünnfilme mit hervorragenden Treue auch bei hohen Seitenverhältnissen abzuscheiden. Es basiert auf selbstabschließenden sequentielle Gas-Feststoff-Reaktionen, die eine präzise Steuerung der Filmdicke auf wenige Angström lassen sich auf der Basis. Zur Herstellung der heutigen 3D-elektronische Geräte, sind Technologien wie ALD erforderlich. Trotz der Vielzahl von praktischen Anwendungen von Nickel und Nickel (II) -oxid, sind einige Nickelvorstufen zur thermischen basierend ALD erhältlich. Darüber hinaus haben diese Vorstufen bei schlechten Filmeigenschaften führte und die Prozesseigenschaften wurden ebenfalls begrenzt. Daher in dieser Masterarbeit mussten die Eigenschaften verschiedener neuartiger Nickelvorstufen zu bewerten. Alle neuen Vorstufen heteroleptische (verschiedene Arten von Liganden) und Komplexe wurden vom Hersteller speziell zur thermischen basierend ALD aus reinem Nickel mit H 2 als ein Co-Reaktionsmittel gestaltet. Um die neuartige Vorläufer zu untersuchen, wurde eine neue Methode entwickelt, um kleine Mengen in einer sehr zeitsparend (bis zu 2 g) von Ausgangsstoffen zu testen. Diese Methodologie beinhaltet: TGA / DTA-Kurve analysiert der Vorstufen, thermische Stabilitätstests in dem die Vorläufer (<0,1 g) wurden bei erhöhter Temperatur in einer abgedichteten Umgebung für mehrere Stunden wurde die Abscheidung Experimenten und Film Charakterisierungen erhitzt. Die Abscheidungen wurden mit Hilfe der in situ Quarzmikrowaage überwacht, während die anwendungsbezogenen Filmeigenschaften, wie chemische Zusammensetzung, physikalische Phase, Dicke, Dichte, Härte und Schichtwiderstand wurden mit Hilfe von ex situ Messverfahren untersucht. Vor der Evaluierung neuartiger Nickelvorstufen ein Benchmark ALD-Prozess war vom Referenznickelvorläufer (Ni (AMD)) und Luft als Reaktionspartner entwickelt. Das Hauptziel der Entwicklung und Optimierung von solchen Benchmark-ALD-Prozess war es, Standard-Prozessparameter wie zweite Reaktionspartner Belichtungszeiten, Argonspülung Zeiten, gesamtprozessdruck, beginnend Abscheidungstemperatur und Gasströme zu extrahieren. Diese Standard-Prozessparameter mussten verwendet, um die Prozessentwicklung Aufgabe (das spart Vorläufer Verbrauch) zu verkürzen und die Sublimationstemperatur Optimierung für jede neuartige Vorstufe werden. Die ALD Verhalten wurde in Bezug auf die Wachstumsrate durch Variation des Nickelvorläuferbelichtungszeit, Vorläufer Temperatur und Niederschlagstemperatur überprüft.:Lists of Abbreviations and Symbols VIII Lists of Figures and Tables XIV 1 Introduction 1 I Theoretical Part 3 2 Nickel and Nickel Oxides 4 2.1 Introduction and Existence 5 2.2 Material properties of Nickel and Nickel Oxide 5 2.3 Application in electronic industry 5 3 Atomic Layer Deposition 7 3.1 History 8 3.2 Definition 8 3.3 Features of thermal-ALD 8 3.3.1 ALD growth mechanism – an ideal view 8 3.3.2 ALD growth behaviour 10 3.3.3 Growth mode 11 3.3.4 ALD temperature window 11 3.4 Benefits and limitations 12 3.5 Precursor properties for thermal-ALD 13 3.6 ALD & CVD of Nickel – A literature survey 13 4 Metrology 17 4.1 Thermal analysis of precursors 18 4.2 Film and growth characterization 21 4.2.1 Quartz Crystal Microbalance 21 4.2.2 Spectroscopic Ellipsometry 24 4.2.3 X-Ray Photoelectron Spectroscopy 28 4.2.4 Scanning Electron Microscopy 29 4.2.5 X-Ray Reflectometry and X-Ray Diffraction 29 4.2.6 Four Point Probe Technique 20 5 Rapid Thermal Processing 32 5.1 Introduction 33 5.2 Basics of RTP 33 5.3 Nickel Silicides-A literature survey 33 II Experimental Part 36 6 Methodologies 37 6.1 Experimental setup 38 6.2 ALD process 41 6.2.1 ALD process types and substrate setups 41 6.2.2 Process parameters 41 6.3 Experimental procedure 42 6.3.1 Tool preparation 42 6.3.2 Thermal analysis and ALD experiments from nickel precursors 43 6.3.3 Data acquisition and evaluation 44 6.3.4 Characterization of film properties 46 7 Results and discussion 48 7.1 Introduction 49 7.2 QCM verification with Aluminum Oxide ALD process 49 7.3 ALD process from the reference precursor 50 7.3.1 Introduction 50 7.3.2 TG analysis for Ni(amd) precursor 51 7.3.3 Thermal stability test for Ni(amd) 51 7.3.4 ALD process optimization 52 7.3.5 Film properties 54 7.4 Evaluating the novel Nickel precursors 55 7.4.1 Screening tests for precursor P1 55 7.4.2 Screening tests for precursor P2 62 7.4.3 Screening tests for precursor P3 66 7.4.4 Screening tests for precursor P4 70 7.4.5 Screening tests for precursor P5 72 7.5 Comparison of all nickel precursors used in this work 74 8 Conclusions and outlook 77 References 83 III Appendix 101 A Deposition temperature control & Ellipsometry model 102 B Gas flow plan 105 / Nickel and nickel(II) oxide are widely used in advanced electronic devices . In microelectronic industry, nickel is used to form nickel silicide. The nickel mono-silicide (NiSi) has emerged as an excellent material of choice for source-drain contact applications below 45 nm node CMOS technology. As compared to other silicides used for the contact applications, NiSi is preferred because of its low resistivity, low contact resistance, relatively low formation temperature and low silicon consumption. Nickel is used in nickel-based rechargeable batteries and ferromagnetic random access memories (RAMs). Nickel(II) oxide is utilized as transistor gate-oxide and oxide in resistive RAMs. Atomic Layer Deposition (ALD) is a special type of Chemical Vapor Deposition (CVD) technique, that is used to deposit very smooth as well as homogeneous thin films with excellent conformality even at high aspect ratios. It is based on self-terminating sequential gas-solid reactions that allow a precise control of film thickness down to few Angstroms. In order to fabricate todays 3D electronic devices, technologies like ALD are required. In spite of huge number of practical applications of nickel and nickel(II) oxide, a few nickel precursors are available for thermal based ALD. Moreover, these precursors have resulted in poor film qualities and the process properties were also limited. Therefore in this master thesis, the properties of various novel nickel precursors had to be evaluated. All novel precursors are heteroleptic (different types of ligands) complexes and were specially designed by the manufacturer for thermal based ALD of pure nickel with H 2 as a co-reactant. In order to evaluate the novel precursors, a new methodology was designed to test small amounts (down to 2 g) of precursors in a very time efficient way. This methodology includes: TGA/DTA curve analyses of the precursors, thermal stability tests in which the precursors (< 0.1 g) were heated at elevated temperatures in a sealed environment for several hours, deposition experiments, and film characterizations. The depositions were monitored with the help of in situ quartz crystal microbalance, while application related film properties like chemical composition, physical phase, thickness, density, roughness and sheet resistance were investigated with the help of ex situ measurement techniques. Prior to the evaluation of novel nickel precursors, a benchmark ALD process was developed from the reference nickel precursor (Ni(amd)) and air as a co-reactant. The main goal of developing and optimizing such benchmark ALD process was to extract standard process parameters like second-reactant exposure times, Argon purge times, total process pressure, starting deposition temperature and gas flows. These standard process parameters had to be utilized to shorten the process development task (thus saving precursor consumption) and optimize the sublimation temperature for each novel precursor. The ALD behaviour was checked in terms of growth rate by varying the nickel precursor exposure time, precursor temperature and deposition temperature.:Lists of Abbreviations and Symbols VIII Lists of Figures and Tables XIV 1 Introduction 1 I Theoretical Part 3 2 Nickel and Nickel Oxides 4 2.1 Introduction and Existence 5 2.2 Material properties of Nickel and Nickel Oxide 5 2.3 Application in electronic industry 5 3 Atomic Layer Deposition 7 3.1 History 8 3.2 Definition 8 3.3 Features of thermal-ALD 8 3.3.1 ALD growth mechanism – an ideal view 8 3.3.2 ALD growth behaviour 10 3.3.3 Growth mode 11 3.3.4 ALD temperature window 11 3.4 Benefits and limitations 12 3.5 Precursor properties for thermal-ALD 13 3.6 ALD & CVD of Nickel – A literature survey 13 4 Metrology 17 4.1 Thermal analysis of precursors 18 4.2 Film and growth characterization 21 4.2.1 Quartz Crystal Microbalance 21 4.2.2 Spectroscopic Ellipsometry 24 4.2.3 X-Ray Photoelectron Spectroscopy 28 4.2.4 Scanning Electron Microscopy 29 4.2.5 X-Ray Reflectometry and X-Ray Diffraction 29 4.2.6 Four Point Probe Technique 20 5 Rapid Thermal Processing 32 5.1 Introduction 33 5.2 Basics of RTP 33 5.3 Nickel Silicides-A literature survey 33 II Experimental Part 36 6 Methodologies 37 6.1 Experimental setup 38 6.2 ALD process 41 6.2.1 ALD process types and substrate setups 41 6.2.2 Process parameters 41 6.3 Experimental procedure 42 6.3.1 Tool preparation 42 6.3.2 Thermal analysis and ALD experiments from nickel precursors 43 6.3.3 Data acquisition and evaluation 44 6.3.4 Characterization of film properties 46 7 Results and discussion 48 7.1 Introduction 49 7.2 QCM verification with Aluminum Oxide ALD process 49 7.3 ALD process from the reference precursor 50 7.3.1 Introduction 50 7.3.2 TG analysis for Ni(amd) precursor 51 7.3.3 Thermal stability test for Ni(amd) 51 7.3.4 ALD process optimization 52 7.3.5 Film properties 54 7.4 Evaluating the novel Nickel precursors 55 7.4.1 Screening tests for precursor P1 55 7.4.2 Screening tests for precursor P2 62 7.4.3 Screening tests for precursor P3 66 7.4.4 Screening tests for precursor P4 70 7.4.5 Screening tests for precursor P5 72 7.5 Comparison of all nickel precursors used in this work 74 8 Conclusions and outlook 77 References 83 III Appendix 101 A Deposition temperature control & Ellipsometry model 102 B Gas flow plan 105

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